TWI721210B - A design change spectrometer and a method of manufacturing the design change spectrometer - Google Patents

Abstract

A method of manufacturing the design change spectrometer, including: obtaining a reference parameter and at least one setting specification of a reference spectrometer; integrating at least one necessary parameter of the reference parameters of the reference spectrometer to a design change spectrometer so that the design change spectrometer has the same specifications as the reference spectrometer; obtaining a plurality of free parameters of the design change spectrometer according to the grating equation; and setting a light input element of the design change spectrometer on an light receiving side of a design change case so that the light receiving side of the design change case is shorter than a reference light receiving side of a reference case of the reference spectrometer.

Description

Design and manufacturing method of integrated spectrometer and spectrometer

The invention relates to an optical device configuration, in particular to a design variable spectrometer and a manufacturing method of the design variable spectrometer.

A spectrometer is a scientific instrument that uses optical principles to decompose complex light into spectral lines. Among them, the basic equipment for observing, analyzing and processing the structure and composition of matter has high analysis accuracy, large measurement range, high speed and sample use. Advantages such as small amount. Therefore, the resolution of molecular characteristics, the measurement of concentration, the identification of substances, and the measurement of celestial spectra require the assistance of spectrometers. Among them, spectrometers are widely used in metallurgy, geology, petrochemical industry, medicine and health, and the environment. Protection, resources and hydrological surveying and other fields.

However, the spectrometer is a precision instrument. The entire development time from development to production is long, especially when it meets the needs of various fields. The spectrometer needs to be from optical design, structural design, and various stages of the production process. After some testing, analysis or inspection, each of these stages is important and time-consuming. Therefore, how to shorten the development time without affecting the function of the spectrometer is the goal of various manufacturers now.

In particular, in the optical path design and structural design of a general spectrometer, the light-incident element of the spectrometer is usually set on the long side of the spectrometer housing, but such a design will make the spectrometer in various fields System integration is difficult to implement. Especially when the spectrometer specifications have been accepted by customers, system integration cannot be performed because of the structural placement of the light-incident element, so the entire spectrometer must be redesigned to match the system integration. However, such a process of re-development and design of the spectrometer not only wastes design and manufacturing time and manpower, but also affects the customer's subsequent integration and application time. Therefore, how to adjust the position of the light-incident element while maintaining the specifications of the existing spectrometer, and to manufacture a new spectrometer that meets the requirements of system integration in the least time is an important goal of the present invention.

An object of the present invention is to provide a method for manufacturing a variable spectrometer, in which at least one setting specification is the same as the reference spectrometer, and the setting position of the variable input element of the variable spectrometer is changed to make the width of the receiving side of the variable spectrometer It is narrower than the light-receiving side of the reference spectrometer to facilitate the space required for subsequent system integration and make the application range wider.

An object of the present invention is to provide a method for manufacturing a variable spectrometer, in which a new design variable spectrometer is designed and manufactured using the specifications of an existing reference spectrometer, and the light receiving side of the variable spectrometer is more conducive to subsequent system integration. In particular, such an approach will omit a lot of labor costs for optical design and reduce the reconfirmation time required for system integration.

An object of the present invention is to provide a method for manufacturing a variable spectrometer, in which the optical path from the variable input element to the variable concave grating is changed through the setting of at least one variable reflection element, thereby increasing the setting position of the variable input element Variability, and make the application of variable spectrometer more flexible. It can be understood that in another spectrometer, the variable reflector element can be arranged between the variable input light element and the variable collimator mirror.

In order to achieve at least one of the above objectives, the present invention provides a method for manufacturing a variable spectrometer, including: Obtain a plurality of reference parameters and at least one setting specification of a reference spectrometer.

Integrating at least one necessary parameter of the reference parameters of the reference spectrometer into a set variable spectrometer, so that the set variable spectrometer has the same setting specifications as the reference spectrometer.

According to the grating equation, multiple free parameters of the spectrometer are obtained.

Set a variable light input element of the variable spectrometer on a variable light receiving side of a variable housing so that the variable light receiving side is shorter than a reference light receiving side of a reference housing of the reference spectrometer.

To achieve at least one of the above objectives, the present invention also discloses another method for manufacturing a variable spectrometer, including: obtaining a plurality of reference parameters and at least one setting specification of a reference spectrometer, wherein the reference parameters include at least one necessary parameter to enable the The reference spectrometer can reach the set specifications.

The set variable spectrometer is set to have the same necessary parameters as the reference spectrometer, so that the set variable spectrometer can meet the set specifications.

Setting at least one variable parameter of the variable spectrometer under the condition that the variable spectrometer can reach the set specification includes: setting a variable light-in element of the variable spectrometer located in a variable light receiving element of a variable casing Side, wherein a reference light-incident element of the reference spectrometer is located on a reference light-receiving side of a reference housing, and the variable light-receiving side is shorter than the reference light-receiving side.

Under the condition that the set variable spectrometer can reach the set specification data, a plurality of free parameters of the set variable spectrometer are set according to the optical principle, the necessary parameters, and the set variable parameters.

According to the necessary parameter, the set variable parameter, and the free parameter, the set variable spectrometer is produced.

In order to achieve at least one of the above objectives, the present invention also discloses another method for manufacturing a variable spectrometer, including: The focal length of a reference focusing mirror of a reference spectrometer is referenced to the focal length of a variable focusing mirror of a variable spectrometer.

The optical path distance between a reference plane grating of the reference spectrometer and the reference focusing mirror is configured with reference to the optical path distance between a variable plane grating of the variable spectrometer and the variable focusing mirror.

The number of reference plane gratings of the reference spectrometer is referenced to the number of set variable plane gratings of the set variable spectrometer.

A set variable light input element of the set variable spectrometer is arranged on the set variable light receiving side of a set variable housing, which has a narrower width relative to the reference light receiving side of a reference housing of the reference spectrometer.

In order to make the above-mentioned features, advantages and content of the present invention more comprehensible, preferred embodiments are described in detail below in conjunction with the accompanying drawings.

100: Reference spectrometer

10: Refer to the light component

20: Reference collimating mirror

30: Reference plane grating

40: Reference focusing mirror

50: Reference optical receiver

70: Reference shell

71: Refer to the receiving side

711: reference groove

713: inclined part

100’: Design Variable Spectrometer

10’: Set variable light component

20’: Design variable collimating mirror

30’: Set variable plane grating

40’: Set variable focusing mirror

50’: Set variable light receiver

60’: Design variable reflective element

61’: The first design variable reflective element

62’: The second design variable reflective element

70’: Design variable shell

71’: Set variable light receiving side

712’: protrusion

100A: Reference spectrometer

10A: Refer to the light incident element

30A: Reference concave grating

50A: Reference optical receiver

70A: Reference housing

80A: Reference optical waveguide device

71A: Refer to the receiving side

713A: Inclined part

100A’: Design variable spectrometer

10A’: Set the variable light component

30A’: Set variable concave grating

50A’: Set variable light receiver

60A’: Design variable reflective element

61A’: The first design variable reflective element

62A’: The second design variable reflective element

70A’: Design variable shell

71A’: Set variable light receiving side

712A’: protrusion

80A’: Set variable optical waveguide device

S101~S104, S201~S205, S301~S304, S301’~S305’, S401~S403, S401’~S404’: Set the steps of each embodiment of the manufacturing method of the variable spectrometer

Figure 1 is a flow chart of the manufacturing method of the variable spectrometer according to the first and second alternative embodiments of the present invention.

Figure 2 is a schematic diagram of the optical path of the reference spectrometer in the first embodiment of the method for manufacturing the variable spectrometer of the first alternative embodiment of the present invention.

FIG. 3 is a schematic diagram of the optical path of the designed variable spectrometer in the first embodiment of the method of manufacturing the designed variable spectrometer according to the first alternative embodiment of the present invention.

Fig. 4 is a schematic diagram of the optical path of the design variable spectrometer in the second embodiment of the method of manufacturing the design variable spectrometer according to the first alternative embodiment of the present invention.

Fig. 5 is a schematic diagram of the optical path of the design variable spectrometer in the third embodiment of the method of manufacturing the design variable spectrometer according to the first alternative embodiment of the present invention.

Fig. 6 is a schematic diagram of the optical path of the design variable spectrometer in the fourth embodiment of the method of manufacturing the design variable spectrometer according to the first alternative embodiment of the present invention.

Fig. 7 is a schematic diagram of the optical path of the design variable spectrometer in the fifth embodiment of the manufacturing method of the design variable spectrometer according to the first alternative embodiment of the present invention.

FIG. 8 is a schematic diagram of the optical path of the reference spectrometer in the sixth embodiment of the manufacturing method of the variable spectrometer in the first alternative embodiment of the present invention.

Fig. 9 is a schematic diagram of the optical path of the design variable spectrometer in the sixth embodiment of the manufacturing method of the design variable spectrometer according to the first alternative embodiment of the present invention.

FIG. 10 is a schematic diagram of the optical path of the reference spectrometer in the seventh embodiment of the manufacturing method of the variable spectrometer in the first alternative embodiment of the present invention.

Fig. 11 is a schematic diagram of the optical path of the design variable spectrometer in the seventh embodiment of the manufacturing method of the design variable spectrometer according to the first alternative embodiment of the present invention.

Figure 12 is a schematic diagram of the optical path of the reference spectrometer in the eighth embodiment of the method for manufacturing the variable spectrometer of the first alternative embodiment of the present invention.

Figure 13 is a schematic diagram of the optical path of the eighth implementation aspect of the design variable spectrometer in the manufacturing method of the design variable spectrometer according to the first alternative embodiment of the present invention.

Figure 14 is a schematic diagram of the optical path of the reference spectrometer in the ninth embodiment of the method for manufacturing the variable spectrometer of the first alternative embodiment of the present invention.

Figures 15 and 16 are schematic diagrams of the optical path of the design variable spectrometer in the ninth embodiment of the method of manufacturing the design variable spectrometer according to the first alternative embodiment of the present invention.

Figure 17 is a schematic diagram of the optical path of the reference spectrometer in the tenth embodiment of the method for manufacturing the variable spectrometer of the first alternative embodiment of the present invention.

Figure 18 is a schematic diagram of the optical path of the tenth embodiment of the design variable spectrometer in the manufacturing method of the design variable spectrometer according to the first alternative embodiment of the present invention.

Figure 19 is a schematic diagram of the optical path of the reference spectrometer in the eleventh embodiment of the method for manufacturing the variable spectrometer of the first alternative embodiment of the present invention.

Figure 20 is a schematic diagram of the optical path of the eleventh implementation aspect of the design variable spectrometer in the manufacturing method of the design variable spectrometer according to the first alternative embodiment of the present invention.

FIG. 21 is a schematic diagram of the optical path of the reference spectrometer in the first embodiment of the method for manufacturing the variable spectrometer according to the second alternative embodiment of the present invention.

FIG. 22 is a schematic diagram of the optical path of the designed variable spectrometer in the first embodiment of the method of manufacturing the designed variable spectrometer according to the second alternative embodiment of the present invention.

FIG. 23 is a schematic diagram of the optical path of the reference spectrometer in the second embodiment of the method for manufacturing the variable spectrometer according to the second alternative embodiment of the present invention.

FIG. 24 is a schematic diagram of the optical path of the designed variable spectrometer in the second embodiment of the method of manufacturing the designed variable spectrometer according to the second alternative embodiment of the present invention.

FIG. 25 is a schematic diagram of the optical path of the reference spectrometer in the third embodiment of the method for manufacturing the variable spectrometer according to the second alternative embodiment of the present invention.

FIG. 26 is a schematic diagram of the optical path of the designed variable spectrometer in the third embodiment of the method of manufacturing the designed variable spectrometer according to the second alternative embodiment of the present invention.

FIG. 27 is a schematic diagram of the optical path of the reference spectrometer in the fourth embodiment of the method of manufacturing the variable spectrometer according to the second alternative embodiment of the present invention.

Fig. 28 is a schematic diagram of the optical path of the design variable spectrometer in the fourth embodiment of the method of manufacturing the design variable spectrometer according to the second alternative embodiment of the present invention.

Figure 29 is a schematic diagram of the optical path of the reference spectrometer in the fifth embodiment of the method for manufacturing the variable spectrometer of the second alternative embodiment of the present invention.

Fig. 30 is a schematic diagram of the optical path of the design variable spectrometer in the fifth embodiment of the method of manufacturing the design variable spectrometer according to the second alternative embodiment of the present invention.

FIG. 31 is a schematic diagram of the optical path of the reference spectrometer in the sixth embodiment of the manufacturing method of the variable spectrometer in the second alternative embodiment of the present invention.

FIG. 32 is a schematic diagram of the optical path of the designed variable spectrometer in the sixth embodiment of the method of manufacturing the designed variable spectrometer according to the second alternative embodiment of the present invention.

Figure 33 is a flow chart of the manufacturing method of the variable spectrometer according to the third alternative embodiment of the present invention.

Figure 34 is a flow chart of the manufacturing method of the variable spectrometer according to the fourth alternative embodiment of the present invention.

FIG. 35 is a flowchart of a method of manufacturing a variable spectrometer according to a modified embodiment of the fourth alternative embodiment of the present invention.

Figure 36 is a flow chart of the manufacturing method of the variable spectrometer according to the fifth alternative embodiment of the present invention.

FIG. 37 is a flowchart of a manufacturing method of a variable spectrometer according to a modified embodiment of the fifth alternative embodiment of the present invention.

The following description is used to disclose the present invention so that those skilled in the art can implement the present invention. The selected embodiments in the following description are only examples, and those skilled in the art can think of other obvious variations. The basic principles of the present invention defined in the following description can be applied to other implementations Schemes, modified schemes, improved schemes, equivalent schemes and other technical schemes that do not depart from the spirit and scope of the present invention.

Those skilled in the art should understand that, in the disclosure of the present invention, the terms "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", " The orientation or positional relationship indicated by "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing and simplifying the present invention. The description does not indicate or imply that the pointed device or element must have a specific orientation, be constructed and operated in a specific orientation. The term "same" means "substantially the same", and "substantially" usually defines "most but not all of the specified content", for example, the structure is regarded as substantially the same even though there are tolerances in the structure. Therefore, the above-mentioned terms disclosed in the present invention should not be construed as limiting the present invention.

It can be understood that the term "a" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of an element may be one, and in another embodiment, the number of the element The number can be more than one, and the term "one" cannot be understood as a restriction on the number.

In particular, the optical theory of the present invention can refer to "DIFFRACTION GRATING HANDBOOK sixth edition, Christopher Palmer, Newport Corporation, Erwin Loewen (first edition), NEWPORT CORPORATION". The description of the present invention will not be repeated.

Nowadays, when a spectrometer is needed for system integration in various fields, the client usually proposes the specifications of the required spectrometer, such as the spectral range or resolution. The spectrometer manufacturer will provide the spectrometer according to the customer’s specifications, but the client often finds that the structural space at the receiving end of the spectrometer is too large to be integrated with the system. As a result, the spectrometer manufacturer needs to redesign a new spectrometer for the customer to implement the system. Integration. However, the current product development process of spectrometers needs to go through optical design and mechanical design. Designing, making structural elements, purchasing optical elements, and assembling and manufacturing to complete the production of the spectrometer, this process requires considerable time and manpower. Therefore, redesigning a new spectrometer is equivalent to requiring time and effort again. Therefore, the present invention provides a method for manufacturing a variable spectrometer to shorten the development time of the spectrometer.

Please refer to Fig. 1, which is the manufacturing method of the variable spectrometer according to the first alternative embodiment of the present invention.

The manufacturing method of the variable spectrometer of this embodiment includes: Step S101 obtains a plurality of reference parameters and at least one setting specification of a reference spectrometer.

Step S102 integrates at least one necessary parameter of the reference parameters of the reference spectrometer into a variable spectrometer, so that the variable spectrometer has the same setting specifications as the reference spectrometer.

Step S103 obtains a plurality of free parameters of the variable spectrometer according to the optical principle and the grating equation.

Step S104: Set a variable light-receiving element of the variable spectrometer to a variable light receiving side of a variable housing, so that the variable light receiving side is shorter than a reference light receiving of a reference housing of the reference spectrometer side.

In the above method, integrating the necessary parameters of the existing reference spectrometer into the design variable spectrometer will shorten the time course for the new design variable spectrometer to set specifications in the optical design process, thereby shortening the overall development timeline.

It can be understood that the multiple reference parameters include at least one necessary parameter, and the reference spectrometer itself reaches the set specification through the necessary parameters. However, when the necessary parameters are integrated into the design variable spectrometer, the design variable spectrometer will have the same setting specifications as the reference spectrometer. At the same time, set the specifications here Next, adjust the variable input element to the shorter light-receiving side of the reference spectrometer, which will reduce the structural space of the receiving end of the new variable spectrometer, which is suitable for the system integration of the client. Obviously, the development time course required to design a new design variable spectrometer through the above method is greatly reduced compared to the design of a new spectrometer from scratch.

In addition, in the above method, when the set variable spectrometer can reach the set specification, it further includes: setting a set variable parameter of the set variable spectrometer, which includes: setting at least one set variable reflecting element after the set variable light input element . It can be understood that the addition of the variable reflector element will change the optical path after the variable input light element. In other words, the setting position of the variable reflection element can be further adjusted.

In the manufacturing method of the variable spectrometer of the present invention, the reference spectrometer 100 of the first embodiment includes a reference light-incident element 10 and a reference light receiver 50 for receiving the internal spectral components of the reference spectrometer, as well as a variety of spectrometer component settings. Inside the spectrometer, so that the spectrometer can meet various specifications, such as: reference collimating mirror 20, reference plane grating 30, reference focusing mirror 40. Furthermore, in this embodiment, the reference spectrometer 100 includes a reference light incident element 10, a reference collimating mirror 20, a reference plane grating 30, a reference focusing mirror 40 and a reference light receiver 50. In other words, the external light to be measured will enter the free space of the reference spectrometer 100 through the reference light-incoming element 10 of the reference spectrometer 100, and the light to be measured will pass through the reference collimating mirror 20 to the reference plane grating 30 in the free space, and be split through the reference plane grating 30 After that, it is focused on the reference light receiver 50 by the reference focusing mirror 40. In addition, in this embodiment, the variable spectrometer 100' includes a variable incident light element 10', a variable collimating mirror 20', a variable planar grating 30', a variable focusing mirror 40', and a Set a variable light receiver 50'. Similarly, the external light to be measured passes through the set variable light input element 10' of the set variable spectrometer 100' directly through the set variable collimating mirror 20' is reflected to the variable plane grating 30', and after being split by the variable plane grating 30', the light is condensed to the variable light receiver 50' by the variable focusing mirror 40'.

In this embodiment, the optical path distance between the reference light incident element 10 of the reference spectrometer 100 and the reference collimating mirror 20 is defined as r1, and the optical path distance between the reference collimating mirror 20 and the reference plane grating 30 is defined as r2. The optical path distance between the plane grating 30 and the reference focusing mirror 40 is defined as r3, and the optical path distance between the reference focusing mirror 40 and the reference light receiver 50 is defined as r4. The focal length of the reference collimating mirror 20 is defined as fm1. The focal length of the reference focusing mirror 40 is defined as fm2. The period of the reference plane grating 30 is defined as d. The incident angle and reflection angle of the light with reference to the collimating mirror 20 are defined as θ1. The incident angle and reflection angle of the light with reference to the focusing mirror 40 are defined as θ 2. The light incident angle of the reference plane grating 30 is defined as α, and the diffraction angle is defined as β. In addition, the optical path distance between the variable incident light element 10' and the variable collimating mirror 20' of the variable spectrometer 100' is defined as r1', and the optical path between the variable collimating mirror 20' and the variable planar grating 30 is defined as r1'. The distance is defined as r2', the optical path distance between the variable plane grating 30' and the variable focusing mirror 40' is defined as r3', the optical path distance between the variable focusing mirror 40' and the variable optical receiver 50' Defined as r4'. Let the focal length of the variable collimating mirror 20' be defined as fm1'. The focal length of the variable focusing mirror 40' is defined as fm2'. Let the period of the variable plane grating 30' be defined as d'. Let the light incident angle and reflection angle of the variable collimating mirror 20' be defined as θ 1'. Let the light incident angle and reflection angle of the variable focusing mirror 40' be defined as θ 2'. Let the light incident angle of the variable plane grating 30 be defined as α', and the diffraction angle as β'.

According to the above method, the setting specification of the reference spectrometer 100 includes a spectral range. Furthermore, the set variable spectrometer 100' has the same necessary parameters as the reference spectrometer 100, so that the set variable spectrometer 100' can reach the same spectral range as the reference spectrometer 100. Here, the necessary parameters of the reference spectrometer 100 include the optical path distance between the reference plane grating 30 and the reference focusing mirror 40, the focal length of the reference focusing mirror 40, and the number of reference plane gratings 30. In other words, the reference level of the reference spectrometer 100 is obtained The optical path distance r3 between the surface grating 30 and the reference focusing surface mirror 40 is a necessary parameter of the focal length fm2 of the reference focusing surface mirror 40 and the number of reference surface gratings 30. The necessary parameters of the reference spectrometer 100 are integrated into the variable spectrometer 100', so that the variable spectrometer 100' has the same spectral range as the reference spectrometer 100. That is, the optical path distance r3' between the variable plane grating 30' and the variable focusing mirror 40' of the variable spectrometer 100' is equal to the optical path distance r3 between the reference plane grating 30 and the reference focusing mirror 40 of the reference spectrometer 100. Let the focal length fm2' of the variable focusing mirror 40 of the variable spectrometer 100' be equal to the focal length fm2 of the reference focusing mirror 40 of the reference spectrometer 100. The number of the set variable plane grating 30' of the variable spectrometer 100' is equal to the number of the reference plane grating 30 of the reference spectrometer 100.

In addition, referring to the setting specifications of the spectrometer 100, a resolution is further included. Furthermore, the set variable spectrometer 100' has the same necessary parameters as the reference spectrometer 100, so that the set variable spectrometer 100' can achieve the same resolution as the reference spectrometer 100. The necessary parameters of the reference spectrometer 100 further include the focal length fm1 of the reference collimating mirror 20. That is, the focal length fm1 of the reference collimating mirror 20 of the reference spectrometer 100 is acquired. The necessary parameters of the reference spectrometer 100 are integrated into the variable spectrometer 100', so that the variable spectrometer 100' has the same resolution as the reference spectrometer 100. That is, suppose that the focal length fm1' of the variable collimating mirror 20' of the variable spectrometer 100' is equal to the focal length fm1 of the reference collimating mirror 20 of the reference spectrometer 100.

It is worth mentioning that there are various setting schemes for the spectrometer assembly, and these setting schemes will not affect the manufacturing method of the variable spectrometer of the present invention. For example, the variable collimating mirror 20', the variable planar grating 30', the variable focusing mirror 40' and the combination thereof can be transmissive or reflective. The optical path design of the spectrometer will form an M shape, a staggered star shape, and three-dimensional folding through the setting of the spectrometer components. When the variable collimating mirror 20', the variable plane grating 30' are set, and the variable focusing mirror 40' is set, the relative angle can be rotated according to requirements. The blaze angle of the variable plane grating 30' can be changed in any way. According to these setting schemes, different implementation modes will be explained below.

Figures 2 and 3 show the first implementation aspect of the method of the first alternative embodiment. Figure 2 is a schematic diagram of the optical path of the reference spectrometer in the manufacturing method of the variable spectrometer. Figure 3 is a schematic diagram of the optical path of the design variable spectrometer in the first embodiment of the manufacturing method of the design variable spectrometer. In this embodiment, referring to the configuration of the spectrometer components of the spectrometer 100 and the variable spectrometer 100', the optical path design of both forms an M shape, and the spectral range of the set specification is the same. In other words, the necessary parameters of the reference spectrometer 100 are integrated into the variable spectrometer 100', so that the optical path distance r3' of the variable plane grating 30 and the variable focusing mirror 40' of the variable spectrometer 100' is equal to the reference plane grating of the reference spectrometer 100 The optical path distance r3 between 30 and the reference focusing mirror 40. Let the focal length fm2' of the variable focusing mirror 40' of the variable spectrometer 100' be equal to the focal length fm2 of the reference focusing mirror 40 of the reference spectrometer 100. The number of the set variable plane grating 30' of the variable spectrometer 100' is equal to the number of the reference plane grating 30 of the reference spectrometer 100. In particular, the optical path distance r1' between the set variable light-entering element 10' and the set variable collimating mirror 20' of the design variable spectrometer 100' of this embodiment is not equal to the reference light input element 10 and the reference collimating mirror of the reference spectrometer 100 The optical path distance of 20 is r1. It is worth mentioning that the light-incoming element 10' and the reference light-incoming element 10 are assumed to receive light perpendicularly.

For example, the center wavelength of the reference spectrometer 100 of this embodiment is 600nm, the range is 200-1000nm, θ 1=15 degrees, θ 2=20 degrees, fm1=60mm, fm2=60mm, α=10 degrees, β =-40 degrees, m=-1, d=2um, r1=60mm, r2=50mm, r3=45mm, r4=60mm. According to the manufacturing method of the variable spectrometer, the r3, fm2, and d reference parameters of the reference spectrometer 100 are obtained and meet the set specifications, and then integrated into the design variable spectrometer 100' and the design variable spectrometer 100' can reach the set specification data, according to Optical principle, necessary parameters, variable parameters and/or grating equation sinα+sinβ=mλ/d set multiple free parameters of the variable spectrometer, for example, the parameters after setting such as: the central wavelength of the variable spectrometer 100' is 600nm , The range is 200-1000nm, θ 1'=15 degrees, θ 2'=20 degrees, fm1'=70mm, fm2'=60mm, α'=10 degrees, β'=-40 degrees, m'=-1, d'=2um, r1'=70mm, r2'=50mm, r3'=45mm, r4 '=60mm.

Fig. 4 is a schematic diagram of the optical path of the set variable spectrometer of the second implementation aspect of the method of the first alternative embodiment. In this embodiment, the schematic diagram of the optical path of the reference spectrometer 100 is the same as that of Figure 2, and the spectral range and resolution are the same in the setting specifications of the reference spectrometer 100 and the variable spectrometer 100'. In addition, the reference focusing mirror 40 adopts a reflection type. The variable focusing mirror 40' adopts a transmissive type. Furthermore, the necessary parameters of the reference spectrometer 100 are integrated into the variable spectrometer 100', so that the optical path distance r3' of the variable plane grating 30 and the variable focusing mirror 40' of the variable spectrometer 100' is equal to the reference of the reference spectrometer 100 The optical path distance r3 between the plane grating 30 and the reference focusing mirror 40. Let the focal length fm2' of the variable focusing mirror 40' of the variable spectrometer 100' be equal to the focal length fm2 of the reference focusing mirror 40 of the reference spectrometer 100. The number of the set variable plane grating 30' of the variable spectrometer 100' is equal to the number of the reference plane grating 30 of the reference spectrometer 100. Set the optical path distance r1' between the variable incident light element 10' and the variable collimating mirror 20' of the variable spectrometer 100' to be equal to the optical path distance r1 between the reference light incident element 10 and the reference collimating mirror 20 of the reference spectrometer 100.

For example, the center wavelength of the reference spectrometer 100 of this embodiment is 600nm, the range is 200-1000nm, θ 1=15 degrees, θ 2=20 degrees, fm1=60mm, fm2=60mm, α=10 degrees, β =-40 degrees, m=-1, d=2um, r1=60mm, r2=50mm, r3=45mm, r4=60mm. According to the manufacturing method of the variable spectrometer, the r3, fm2, and d reference parameters of the reference spectrometer 100 are obtained and meet the set specifications, and then integrated into the design variable spectrometer 100' and the design variable spectrometer 100' can reach the set specification data, according to Optical principle, necessary parameters, variable parameters and/or grating equation sinα+sinβ=mλ/d set multiple free parameters of the variable spectrometer, for example, the parameters after setting such as: the central wavelength of the variable spectrometer 100' is 600nm , The range is 200-1000nm, θ 1'=15 degrees, θ 2'=20 degrees, fm1'=60mm, fm2'=60mm, α'=10 degrees, β'=-40 degrees, m'=-1, d'=2um, r1'=60mm, r2'=50mm, r3'=45mm, r4 '=60mm.

Fig. 5 is a schematic diagram of the optical path of the design variable spectrometer in the third embodiment of the method of manufacturing the variable spectrometer of the first alternative embodiment. In this embodiment, the schematic diagram of the optical path of the reference spectrometer 100 is the same as that in FIG. 2. The set specifications of the reference spectrometer 100 and the variable spectrometer 100' have the same spectral range and resolution. With reference to the arrangement of the spectrometer components of the spectrometer 100, the optical path design forms an M shape, and the arrangement of the spectrometer components of the variable spectrometer 100' makes the optical path design form a staggered star shape. In other words, referring to the necessary parameters of the spectrometer 100, the variable spectrometer 100' can reach the same specifications as the reference spectrometer 100, and multiple free parameters of the variable spectrometer are obtained based on the optical principle, such as the light incidence of the reference collimating mirror 20 The angle and reflection angle θ 1 are different from the light incident angle and reflection angle θ 1 ′ of the variable collimating mirror 20 ′. The light incident angle and reflection angle θ 2 of the reference focusing mirror 40 are different from the light incident angle and reflection angle θ 2'of the variable focusing mirror 40'.

For example, the center wavelength of the reference spectrometer 100 of this embodiment is 600nm, the range is 200-1000nm, θ 1=15 degrees, θ 2=20 degrees, fm1=60mm, fm2=60mm, α=10 degrees, β =-40 degrees, m=-1, d=2um, r1=60mm, r2=50mm, r3=45mm, r4=60mm. According to the manufacturing method of the variable spectrometer, the r3, fm2, and d reference parameters of the reference spectrometer 100 are obtained and meet the set specifications, and then integrated into the design variable spectrometer 100' and the design variable spectrometer 100' can reach the set specification data, according to Optical principle, necessary parameters, variable parameters and/or grating equation sinα+sinβ=mλ/d set multiple free parameters of the variable spectrometer, for example, the parameters after setting such as: the central wavelength of the variable spectrometer 100' is 600nm , The range is 200-1000nm, θ 1'=10 degrees, θ 2'=15 degrees, fm1'=60mm, fm2'=60mm, α'=10 degrees, β'=-40 degrees, m'=-1, d'=2um, r1'=60mm, r2'=50mm, r3'=45mm, r4'=60mm.

Fig. 6 shows a schematic diagram of the optical path of the design variable spectrometer in the fourth embodiment of the method of manufacturing the variable spectrometer of the first alternative embodiment. In this embodiment, the schematic diagram of the optical path of the reference spectrometer 100 is the same as that in FIG. 2. With reference to the configuration of spectrometer components of the spectrometer 100 and the variable spectrometer 100', the optical path design of the two forms a different type of M shape, and the spectral range and resolution are the same in the setting specifications. In other words, in this embodiment, the light incident angle and reflection angle θ 2 of the reference focusing mirror 40 are different from the light incident angle and reflection angle θ 2'of the variable focusing mirror 40'.

For example, the center wavelength of the reference spectrometer 100 of this embodiment is 600nm, the range is 200-1000nm, θ 1=15 degrees, θ 2=20 degrees, fm1=60mm, fm2=60mm, α=10 degrees, β =-40 degrees, m=-1, d=2um, r1=60mm, r2=50mm, r3=45mm, r4=60mm. According to the manufacturing method of the variable spectrometer, the r3, fm2, and d reference parameters of the reference spectrometer 100 are obtained and meet the set specifications, and then integrated into the design variable spectrometer 100' and the design variable spectrometer 100' can reach the set specification data, according to Optical principle, necessary parameters, variable parameters and/or grating equation sinα+sinβ=mλ/d set multiple free parameters of the variable spectrometer, for example, the parameters after setting such as: the central wavelength of the variable spectrometer 100' is 600nm , The range is 200-1000nm, θ 1'=15 degrees, θ 2'=15 degrees, fm1'=60mm, fm2'=60mm, α'=10 degrees, β'=-40 degrees, m'=-1, d'=2um, r1'=60mm, r2'=50mm, r3'=45mm, r4'=60mm.

As shown in FIG. 7, it is a schematic diagram of the optical path of the design variable spectrometer in the fifth embodiment of the method of manufacturing the variable spectrometer of the first alternative embodiment. In this embodiment, the schematic diagram of the optical path of the reference spectrometer 100 is the same as that in FIG. 2. With reference to the configuration of spectrometer components of the spectrometer 100 and the variable spectrometer 100', the optical path design of the two forms a different type of M shape, and the spectral range and resolution are the same in the setting specifications. In other words, referring to the light incident angle and reflection angle θ 1 of the collimating mirror 20 and setting the collimation The light incident angle and the reflection angle θ 1'of the straight mirror 20' are different. The light incident angle and reflection angle θ 2 of the reference focusing mirror 40 are different from the light incident angle and reflection angle θ 2'of the variable focusing mirror 40'.

For example, the center wavelength of the reference spectrometer 100 of this embodiment is 600nm, the range is 200-1000nm, θ 1=15 degrees, θ 2=20 degrees, fm1=60mm, fm2=60mm, α=10 degrees, β =-40 degrees, m=-1, d=2um, r1=60mm, r2=50mm, r3=45mm, r4=60mm. According to the manufacturing method of the variable spectrometer, the r3, fm2, and d reference parameters of the reference spectrometer 100 are obtained and meet the set specifications, and then integrated into the design variable spectrometer 100' and the design variable spectrometer 100' can reach the set specification data, according to Optical principle, necessary parameters, variable parameters and/or grating equation sinα+sinβ=mλ/d set multiple free parameters of the variable spectrometer, for example, the parameters after setting such as: the central wavelength of the variable spectrometer 100' is 600nm , The range is 200-1000nm, θ 1'=10 degrees, θ 2'=15 degrees, fm1'=60mm, fm2'=60mm, α'=10 degrees, β'=-40 degrees, m'=-1, d'=2um, r1'=60mm, r2'=50mm, r3'=45mm, r4'=60mm.

It is worth mentioning that the grating equation is sinα+sinβ=mλ/d. α is the angle of incidence, that is, the angle between the incident beam and the normal of the grating. β is the angle of diffraction, that is, the angle between the diffracted beam and the normal of the grating. m is the spectral order. λ is the wavelength of diffracted light. d is the distance between the slits, also known as the grating constant (period). In particular, if both α and β are on the same side of the grating normal, the equation takes the "+" sign. If both α and β are on the opposite side of the grating normal, the equation takes the "-" sign, that is, α and β can be adjusted to Avoid collisions of components or light paths. In addition, the grating equation has a corresponding spectrum for each different value of m, which is called the spectrum order. When m is 0, 1, 2..., they are 0-order, 1st-order, and 2nd-order spectra, respectively. Corresponding to each negative value of m, there are various negative-order spectra. The so-called 0-order spectrum means that the grating has no chromatic dispersion effect and only acts as an image of the incident slit formed by specular reflection.

In this embodiment, according to the aforementioned manufacturing method of the variable spectrometer, the variable input element 10' is arranged at a relatively ideal position, so as to facilitate the subsequent system integration of the variable spectrometer 100'. At the same time According to the above five implementation aspects, various implementation aspects of the arrangement of the variable-entry light element 10' can be further extended, which will be further described below.

FIG. 8 is a schematic diagram of the optical path of the reference spectrometer in the sixth embodiment of the manufacturing method of the variable spectrometer of the first alternative embodiment. Fig. 9 is a schematic diagram of the optical path of the design variable spectrometer in the sixth embodiment of the manufacturing method of the design variable spectrometer of the first alternative embodiment. In this embodiment, the spectral range and resolution in the setting specifications of the reference spectrometer 100 and the variable spectrometer 100' are the same. The installation positions of the reference light incident element 10 and the variable light incident element 10' are different.

Furthermore, according to the manufacturing method of the above-mentioned design variable spectrometer, it further includes setting at least one design variable reflecting element after the design variable light-incoming element. In other words, at least one variable reflective element 60' is provided between the variable light entrance element 10' and the variable collimating mirror 20'. In particular, the reference spectrometer 100 further includes a reference housing 70. The reference housing 70 includes a reference light receiving side 71. The reference light incident element 10 is disposed on the reference light receiving side 71 of the reference housing 70. Refer to the optical path distance r1 between the reference light incident element 10 of the reference spectrometer 100 and the reference collimating mirror 20. The design variable spectrometer 100' also includes a design variable housing 70'. The variable housing 70' includes a variable light receiving side 71'. The variable input light element 10' is arranged on the variable light receiving side 71' of the variable housing 70'. The width of the reference light receiving side 71 is longer than that of the variable light receiving side 71'. In addition, the designed variable spectrometer 100' also includes at least one designed variable reflective element 60'. The variable reflective element 60' is arranged between the variable incident light element 10' and the variable collimating mirror 20'. The optical path distance between the variable incident light element 10' and the variable reflective element 60' is set to r5', and the optical path distance between the variable reflective element 60' and the variable collimating mirror 20' is set to r6'. The resolution of the reference spectrometer 100 and the variable spectrometer 100' are the same, so r1=r5'+r6'. In other words, the optical path distance r1 between the reference light incident element 10 and the reference collimating mirror 20 of the reference spectrometer 100 is equal to the optical path distance r5' between the variable incident light element 10' and the variable reflective element 60' of the variable spectrometer 100' plus The optical path distance r6' between the variable reflecting element 60' of the variable spectrometer 100' and the variable collimating mirror 20' is set above. It is understandable that because the setting of the reflective element 60’ is changed, the The direction of the optical path between the variable input light element 10' and the variable collimating mirror 20' is set, so that the position of the variable input light element 10' can be adjusted and changed synchronously. According to the requirements of system integration, the set variable light receiving element 10' is set on the set variable light receiving side 71' of the set variable spectrometer 100', so that the set variable light receiving side 71' of the set variable spectrometer 100' is relative to the reference spectrometer 100 With reference to the light receiving side 71, the width is smaller.

It is worth mentioning that the present embodiment is referred to the first embodiment. In the first embodiment, the resolutions of the reference spectrometer 100 and the design spectrometer 100' are different. Therefore, in contrast to this embodiment, in the first embodiment, the set variable light-in element 10' can be arranged on the set variable light-receiving side 71' of the set variable spectrometer 100', and the set variable reflective element 60' can be set on the set variable light-receiving side 71'. After the light incident element 10', the difference between the first embodiment and the present embodiment is that the optical path distance r1 between the reference light incident element 10 and the reference collimating mirror 20 of the reference spectrometer 100 is not equal to the design change of the variable spectrometer 100' The optical path distance r5' between the light incident element 10' and the variable reflective element 60' plus the optical path distance r6' between the variable reflective element 60' of the variable spectrometer 100' and the variable collimating mirror 20', namely r1≠r5'+r6'.

FIG. 10 shows a schematic diagram of the optical path of the reference spectrometer in the seventh embodiment in the manufacturing method of the variable spectrometer of the first alternative embodiment. Fig. 11 is a schematic diagram of the optical path of the design variable spectrometer in the seventh embodiment of the manufacturing method of the design variable spectrometer of the first alternative embodiment. In this embodiment, the spectral range and resolution in the setting specifications of the reference spectrometer 100 and the variable spectrometer 100' are the same. The installation positions of the reference light incident element 10 and the variable light incident element 10' are different. The width of the reference light receiving side 71 is longer than that of the variable light receiving side 71'. The reference light receiving side 71 of the reference housing 70 has a reference groove 711, and the reference light incident element 10 is disposed in the reference groove 711. Set the variable incident light element 10' on the variable light receiving side 71' of the variable spectrometer 100' through the manufacturing method of the variable spectrometer, and refer to the optical path distance between the reference light incident element 10 and the reference collimating mirror 20 of the spectrometer 100 r1 is equal to the optical path distance r5' between the set variable incident light element 10' and the set variable reflective element 60' of the set variable spectrometer 100' plus the set variable reflector 60' and set variable collimation of the set variable spectrometer 100' The optical path distance between the mirrors 20' is r6'. It can be understood that regardless of the original setting position of the light incident element 10, the setting position of the variable incident light element 10' can be adjusted by the method of the present invention, and it is located on the relatively short side of the variable housing 70'.

Fig. 12 is a schematic diagram of the optical path of the reference spectrometer in the eighth embodiment in the manufacturing method of the variable spectrometer of the first alternative embodiment. FIG. 13 is a schematic diagram of the optical path of the eighth implementation aspect of the design variable spectrometer in the manufacturing method of the first alternative embodiment of the design variable spectrometer. In this embodiment, the reference spectrometer 100 and the design spectrometer 100' have the same spectral range. The installation positions of the reference light incident element 10 and the variable light incident element 10' are different. The design variable light receiving side 71' of the design variable housing 70' has a protrusion 712'. The reference light incident element 10 is disposed on the reference light reception side 71. The set variable light input element 10' is installed on the projected portion 712' of the set variable light receiving side 71' of the set variable spectrometer 100' through the manufacturing method of the variable spectrometer. In this embodiment, the resolution of the reference spectrometer 100 and the design variable spectrometer 100' can be the same or different. The manufacturing method of the reference spectrometer 100 and the design variable spectrometer 100' have the same specifications. That's it. Therefore, it is understandable that when the resolution of the reference spectrometer 100 and the designed variable spectrometer 100' are the same, that is, r1=r5'+r6'; when the resolution of the reference spectrometer 100 and the designed variable spectrometer 100' are not the same, that is, r1 ≠r5'+r6', which does not affect the setting of the variable input light element 10'.

Fig. 14 is a schematic diagram of the optical path of the reference spectrometer in the ninth embodiment of the method for manufacturing the variable spectrometer of the first alternative embodiment. 15 and 16 are schematic diagrams of the optical path of the design variable spectrometer in the ninth embodiment of the manufacturing method of the design variable spectrometer of the first alternative embodiment. In this embodiment, the spectral range and resolution in the setting specifications of the reference spectrometer 100 and the variable spectrometer 100' are the same. The installation positions of the reference light incident element 10 and the variable light incident element 10' are different. The reference light receiving side 71 of the reference housing 70 has an inclined portion 713, and the reference light incident element 10 is disposed on the inclined portion 713. The set variable light receiving element 10' is installed on the set variable light receiving side 71' of the set variable spectrometer 100' through the manufacturing method of the variable spectrometer. Such as As shown in Figures 15 and 16, the modification or different style of the variable housing 70' will not affect the setting of the variable input light element 10'. Moreover, regardless of the original installation position of the light incident element 10, the installation position of the variable incident light element 10' can be adjusted by the method of the present invention, and it is located on the relatively short side of the variable housing 70'. In addition, the setting of the variable input light element 10' and the variable housing 70' will allow the external light to be measured to enter the variable spectrometer 100' vertically, that is, the variable input light element 10' will receive light vertically. In addition, the reference light incident element 10 also receives light vertically.

Fig. 17 is a schematic diagram of the optical path of the reference spectrometer in the tenth embodiment of the method for manufacturing the variable spectrometer of the first alternative embodiment. Fig. 18 is a schematic diagram of the optical path of the design variable spectrometer of the tenth embodiment in the method of manufacturing the design variable spectrometer of the first alternative embodiment. In this embodiment, the spectral range and resolution in the setting specifications of the reference spectrometer 100 and the variable spectrometer 100' are the same. Refer to the light incident element 10 and the light incident element 10' where the installation positions are different.

Furthermore, the reference spectrometer 100 further includes a reference housing 70. The reference housing 70 includes a reference light receiving side 71. The reference light receiving side 71 of the reference housing 70 has an inclined portion 713, and the reference light incident element 10 is disposed on the inclined portion 713. Refer to the optical path distance r1 between the reference light incident element 10 of the reference spectrometer 100 and the reference collimating mirror 20. The design variable spectrometer 100' also includes a design variable housing 70'. The variable housing 70' includes a variable light receiving side 71'. The variable input light element 10' is arranged on the variable light receiving side 71' of the variable housing 70'. The width of the reference light receiving side 71 is longer than that of the variable light receiving side 71'. In particular, in the present embodiment, two design variable reflection elements 60' are added to the design variable spectrometer 100', which are respectively arranged between the design variable light input element 10' and the design variable collimating mirror 20'. In the following, for convenience of description, the two variable reflective elements 60' are defined as the first variable reflective element 61' and the second variable reflective element 62', respectively.

It is worth mentioning that the optical path distance between the variable incident light element 10' and the first variable reflective element 61' is set to r7', and the distance between the first variable reflective element 61' and the second variable reflective element 62' Optical path distance The distance is set to r8', the optical path distance between the second set variable reflecting element 62' and the set variable collimating mirror 20' is set to r9', where the resolution of the reference spectrometer 100 and the set variable spectrometer 100' are the same, so it can be understood r1=r7'+r8'+r9'. In other words, the optical path distance between the reference light incident element 10 and the reference collimating mirror 20 of the reference spectrometer 100 is equal to the optical path distance between the variable incident light element 10' and the first variable reflective element 61' of the variable spectrometer 100' plus The optical path distance between the first set variable reflecting element 61' and the second set variable reflecting element 62' of the set variable spectrometer 100' plus the second set variable reflector 62' of the set variable spectrometer 100' and the set variable collimating mirror The optical path distance between 20'. It is understandable that because the arrangement of the first design variable reflecting element 61' and the second design variable reflecting element 62' will change the direction of the optical path between the set variable input light element 10' and the set variable collimating mirror 20', it can be Synchronous adjustment changes the setting position of the set-in light element 10'. According to the requirements of system integration, the set variable light receiving element 10' is set on the set variable light receiving side 71' of the set variable spectrometer 100', so that the set variable light receiving side 71' of the set variable spectrometer 100' is relative to the reference spectrometer 100 With reference to the light receiving side 71, the width is smaller.

Fig. 19 is a schematic diagram of the optical path of the reference spectrometer in the eleventh embodiment in the method of manufacturing the variable spectrometer of the first alternative embodiment. Figure 20 is a schematic diagram of the optical path of the eleventh embodiment of the method of manufacturing the variable spectrometer of the first alternative embodiment. In this embodiment, the reference spectrometer 100 and the design spectrometer 100' have the same spectral range. The installation positions of the reference light incident element 10 and the variable light incident element 10' are different. The reference spectrometer 100 also includes a reference housing 70. The reference housing 70 includes a reference light receiving side 71. The reference light incident element 10 is disposed on the reference light receiving side 71 of the reference housing 70. The design variable spectrometer 100' includes a design variable housing 70'. The variable housing 70' includes a variable light receiving side 71'. It is assumed that the variable light receiving side 71' has a protrusion 712'. The variable-incident light element 10' is disposed on the protrusion 712' of the variable-income side 71'. It is understandable that the spectral range of the reference spectrometer 100 is obtained according to the manufacturing method of the variable spectrometer, so that the variable collimating mirror 20' of the variable spectrometer 100', the variable plane grating 30', the variable focusing mirror 40' and After the set variable light receiver 50' is set relative to each other, and the set variable input light element 10' is set in the set variable receiver The protrusion 712' of the light side 71'. In particular, the widths of the variable light receiving side 71' and the reference light receiving side 71 of this embodiment are the same. However, since the variable input element 10' is disposed on the protrusion 712' of the variable light receiving side 71', the receiving end of the variable spectrometer 100' also has a smaller structure than the reference spectrometer 100 Space size. In other words, when the set variable spectrometer 100' can reach the set specification data, the set variable light input element 10' of the set variable spectrometer 100' can be installed on any part of the housing 70' according to actual needs. Limitations of the invention.

Please refer to FIG. 1, which is a manufacturing method of a variable spectrometer according to a second alternative embodiment of the present invention.

The manufacturing method of a variable spectrometer of this embodiment includes:

Step S101 obtains a plurality of reference parameters and at least one setting specification of a reference spectrometer.

Step S102 integrates at least one necessary parameter of the reference parameters of the reference spectrometer into a variable spectrometer, so that the variable spectrometer has the same setting specifications as the reference spectrometer.

Step S103 obtains a plurality of free parameters of the set variable spectrometer according to the grating equation.

Step S104: Set a variable light-receiving element of the variable spectrometer to a variable light receiving side of a variable housing, so that the variable light receiving side is shorter than a reference light receiving of a reference housing of the reference spectrometer side.

In the above method, the reference parameters include at least one necessary parameter so that the reference spectrometer can reach the set specification.

In the above method, under the condition that the set variable spectrometer can reach the set specification, it further includes: setting at least one set variable reflective element after the set variable light input element.

According to the manufacturing method of the variable spectrometer, in this embodiment, the reference spectrometer 100A includes a reference light incident element 10A, a reference concave grating 30A, a reference light receiver 50A, and a reference light waveguide device 80A. After the external light to be measured enters the reference light waveguide device 80A through the reference light entrance element 10A and is split through the reference concave grating 30A, the reference light receiver 50A receives the spectral components of the split light. In this embodiment, the variable spectrometer 100A' includes a variable optical element 10A', a variable concave grating 30A', a variable optical receiver 50A', and a variable optical waveguide device 80A', in which the external waiting The photometry passes through the variable light input element 10A' to the variable concave grating 30A', and passes through the variable concave grating 30A' to split light and then transmits to the variable light receiver 50A'.

It is worth mentioning that the optical path distance between the reference light incident element 10 of the reference spectrometer 100A and the reference concave grating 30A is defined as R1, and the optical path distance between the reference concave grating 30A and the reference light receiver 50A is defined as R2. The period of the reference concave grating 30A is defined as d. With reference to the concave grating 30A, the light incident angle is defined as α, and the diffraction angle is defined as β. In addition, the optical path distance between the variable input element 10A' of the variable spectrometer 100A' and the variable concave grating 30A' is defined as R1'. The optical path distance between the variable concave grating 30A' and the variable optical receiver 50' is defined as R2'. The period of the variable concave grating 30A' is defined as d'. The light incident angle of the variable concave grating 30A' is defined as α', and the diffraction angle is defined as β'.

According to the setting specification of the reference spectrometer 100 in the manufacturing method of the set variable spectrometer, it includes a spectral range. Furthermore, the set variable spectrometer 100' has the same necessary parameters as the reference spectrometer 100, so that the set variable spectrometer 100' can reach the same spectral range as the reference spectrometer 100. The necessary parameters of the reference spectrometer 100 include the optical path distance between the reference concave grating 30A and the reference light receiver 50A, and the number of reference concave gratings 30A. That is, the necessary parameters for the optical path distance R2 between the reference concave grating 30A of the reference spectrometer 100 and the reference light receiver 50A and the number of reference concave gratings 30A are acquired. Integrate the necessary parameters of the reference spectrometer 100 into the design variable spectrometer 100’, so that the design variable spectrometer 100’ has the The same spectral range of the spectrometer 100. That is, the optical path distance R2 between the reference concave grating 30A and the reference optical receiver 50A is equal to the optical path distance between the variable concave grating 30A' and the variable optical receiver 50', which is defined as R2', and the number of reference concave gratings 30A is equal to the variable Number of concave grating 30A'.

In addition, the spectrometer component has a variety of setting schemes, and these setting schemes will not affect the manufacturing method of the variable spectrometer of the present invention. For example, the variable concave grating 30A' can be implemented as a transmissive type or a reflective type. The optical path design of the variable spectrometer can be implemented as a staggered star or three-dimensional folding. In particular, the blaze angle of the variable concave grating 30' can also be changed in any way. These are not limitations of the present invention, and different implementation modes will be described below according to these setting schemes.

FIG. 21 is a schematic diagram of the optical path of the reference spectrometer in the first embodiment in the manufacturing method of the design variable spectrometer of the second alternative embodiment. Figure 22 is a schematic diagram of the optical path of the design variable spectrometer in the first embodiment in the method of manufacturing the design variable spectrometer of the second alternative embodiment. In this embodiment, the reference spectrometer 100A and the variable spectrometer 100A' have the same spectral range in the setting specifications. That is, the optical path distance R2' between the variable concave grating 30A' of the variable spectrometer 100A' and the variable optical receiver 50A' is equal to the optical path distance R2 of the reference concave grating 30A of the reference spectrometer 100A and the reference optical receiver 50A. Let the number of variable concave gratings 30A' of the variable spectrometer 100A' be equal to the number of reference concave gratings 30A of the reference spectrometer 100A. However, the optical path distance R1' of the variable light entrance element 10A' and the variable concave grating 30A' of the variable spectrometer 100A' is not equivalent to the optical path distance R1 of the reference light incident element 10A and the reference concave grating 30A of the reference spectrometer 100A.

For example, the center wavelength of the reference spectrometer 100A of this embodiment is 600nm, the range is 200-1000nm, α=10 degrees, β=-40 degrees, m=-1, d=2um, R1=60mm, R2= 60mm. After obtaining the necessary parameters of the reference spectrometer according to the manufacturing method of the variable spectrometer, it is integrated into the variable spectrometer 100A’ according to the optical principle, necessary parameters, variable parameters and/or grating equation sinα+sinβ=mλ/d Set multiple free parameters of the variable spectrometer. For example, the set parameters are for example: the center wavelength of the variable spectrometer 100' is 600nm, the range is 200-1000nm, α'=10 degrees, β '=-40 degrees, m'=-1, d'=2um, R1'=70mm, R2'=60mm.

Correspondingly, the reference spectrometer 100A further includes a reference housing 70A. The reference housing 70A includes a reference light receiving side 71A. The reference light-incident element 10A is provided on the reference light-receiving side 71A of the reference housing 70A. The design variable spectrometer 100A' also includes a design variable housing 70A'. The design variable housing 70A' includes a design variable light receiving side 71A'. The width of the reference light receiving side 71A is longer than that of the variable light receiving side 71A'. It is assumed that the variable light receiving side 71A' has a protrusion 712A'. The variable input light element 10A' is disposed on the projecting portion 712A' of the variable light receiving side 71A' of the variable housing 70A'.

As shown in FIG. 23, it is a schematic diagram of the optical path of the reference spectrometer in the second embodiment of the manufacturing method of the variable spectrometer of the second alternative embodiment. Fig. 24 is a schematic diagram of the optical path of the design variable spectrometer in the second embodiment of the manufacturing method of the design variable spectrometer of the second alternative embodiment. The method for manufacturing the variable spectrometer according to the above further includes: arranging at least one variable reflective element 60' between the variable light input element 10A' and the variable concave grating 30A'. In other words, the set variable reflection element 60A' is added between the set variable light entrance element 10A' and the set variable concave grating 30A' of the set variable spectrometer 100A'. The optical path distance between the variable entrance light element 10A' and the variable reflective element 60A' is set to R3', and the optical path distance between the variable reflective element 60A' and the variable concave grating 30A' is set to R4'. The external light to be measured passes through the set variable incident light element 10A' to the set variable reflective element 60A', is reflected by the set variable reflective element 60A' to the set variable concave grating 30A', and is split through the set variable concave grating 30A' and then transmitted to the set variable Optical receiver 50A'. In this embodiment, the reference spectrometer 100A and the design spectrometer 100A' have the same spectral range and the same resolution.

In other words, the optical path distance R2' between the variable concave grating 30A' of the variable spectrometer 100A' and the variable optical receiver 50A' is equal to the reference concave grating 30A of the reference spectrometer 100A and the reference light receiver. The distance R2 of the device 50A. Let the number of variable concave gratings 30A' of the variable spectrometer 100A' be equal to the number of reference concave gratings 30A of the reference spectrometer 100A. Set the optical path distance R3' of the set variable entrance element 10A' and the set variable reflective element 60A' of the variable spectrometer 100A' plus the optical path distance R4' of the set variable reflector 60A' and the set variable concave grating 30A' equal to that of the reference spectrometer 100A Refer to the optical path distance R1 between the light incident element 10A and the reference concave grating 30A.

For example, the center wavelength of the reference spectrometer 100A of this embodiment is 600nm, the range is 200-1000nm, α=10 degrees, β=-40 degrees, m=-1, d=2um, R1=60mm, R2= 60mm. After obtaining the reference parameters of the reference spectrometer according to the manufacturing method of the variable spectrometer, integrate it into the variable spectrometer 100A', and set the variable spectrometer according to the optical principle, necessary parameters, variable parameters and/or grating equation sinα+sinβ=mλ/d The multiple free parameters of, for example, the set parameters such as: set the center wavelength of the variable spectrometer 100' to 600nm, the range is 200-1000nm, α'=10 degrees, β'=-40 degrees, m'=-1 , D'=2um, R2'=60mm, R3'=30mm, R4'=30mm.

Correspondingly, the reference spectrometer 100A further includes a reference housing 70A. The reference housing 70A includes a reference light receiving side 71A. The reference light-incident element 10A is provided on the reference light-receiving side 71A of the reference housing 70A. The design variable spectrometer 100A' also includes a design variable housing 70A'. The design variable housing 70A' includes a design variable light receiving side 71A'. The width of the reference light receiving side 71A is longer than that of the variable light receiving side 71A'. The variable input light element 10A' is arranged on the variable light receiving side 71A' of the variable housing 70A'.

As shown in FIG. 25, it is a schematic diagram of the optical path of the reference spectrometer in the third embodiment in the manufacturing method of the variable spectrometer of the second alternative embodiment. Fig. 26 is a schematic diagram of the optical path of the design variable spectrometer in the third embodiment of the manufacturing method of the design variable spectrometer of the second alternative embodiment. A reflective element 60A' is added between the set variable light entrance element 10A' and the set variable concave grating 30A' of the variable spectrometer 100A'. In this embodiment, the spectral ranges of the reference spectrometer 100A and the design variable spectrometer 100A’ are similar. Same, the resolution is the same. The reference light receiving side 71A of the reference housing 70A has an inclined portion 713A, and the reference light incident element 10A is disposed on the inclined portion 713A. The set variable light input element 10A' is installed on the set variable light receiving side 71A' of the set variable housing 70A' through the manufacturing method of the variable spectrometer.

As shown in FIG. 27, it is a schematic diagram of the optical path of the reference spectrometer in the fourth embodiment in the manufacturing method of the variable spectrometer of the second alternative embodiment. Fig. 28 is a schematic diagram of the optical path of the design variable spectrometer in the fourth embodiment of the method of manufacturing the design variable spectrometer of the second alternative embodiment. The spectral range and resolution in the setting specifications of the reference spectrometer 100A and the variable spectrometer 100A' are the same. The positions of the reference light-incident element 10A and the set variable light-incident element 10A' are different. The design variable light-receiving side 71A' of the design variable housing 70A' of the design variable spectrometer 100A' has a protrusion 712A'. The reference light incident element 10A is disposed on the reference light reception side 71A. The setting variable light element 10A' is installed on the projecting portion 712A' of the setting variable light receiving side 71A' of the setting variable spectrometer 100A' through the manufacturing method of the variable spectrometer. The width of the reference light receiving side 71A is longer than that of the variable light receiving side 71A'. Set the optical path distance R3' of the set variable entrance element 10A' and the set variable reflective element 60A' of the variable spectrometer 100A' plus the optical path distance R4' of the set variable reflector 60A' and the set variable concave grating 30A' equal to that of the reference spectrometer 100A Refer to the optical path distance R1 between the light incident element 10A and the reference concave grating 30A.

Fig. 29 is a schematic diagram of the optical path of the reference spectrometer in the fifth embodiment in the manufacturing method of the variable spectrometer of the second alternative embodiment. FIG. 30 is a schematic diagram of the optical path of the design variable spectrometer in the fifth embodiment in the manufacturing method of the second alternative embodiment of the design variable spectrometer. In this embodiment, the spectral range and resolution in the setting specifications of the reference spectrometer 100A and the variable spectrometer 100A' are the same. Two variable reflective elements 60A' are added to the variable spectrometer 100A', which are respectively arranged between the variable input element 10A' and the variable concave grating 30A'. For the convenience of description below, the two design variable reflection elements 60A' are respectively defined as the first design reflection element 61A' and the second design reflection element 62A'. In particular, suppose that the optical path distance between the variable-entry light element 10A' and the first variable-reflective element 61A' is set to R5', and the first variable-reflective element The optical path distance between 61A' and the second variable reflective element 62A' is set to R6', and the optical path distance between the second variable reflective element 62A' and the variable concave grating 30A' is set to R7'. The resolution of the reference spectrometer 100 and the design variable spectrometer 100' are the same, so R1=R5'+R6'+R7'.

Fig. 31 is a schematic diagram of the optical path of the reference spectrometer in the sixth embodiment in the manufacturing method of the variable spectrometer of the second alternative embodiment. Fig. 32 is a schematic diagram of the optical path of the design variable spectrometer in the sixth embodiment of the manufacturing method of the design variable spectrometer of the second alternative embodiment. In this embodiment, the reference spectrometer 100A and the design spectrometer 100A' have the same spectral range. A second reflective element 60A' is added to the variable spectrometer 100A', which is respectively arranged between the variable light-in element 10A' and the variable concave grating 30A'. That is, the optical path distance R2' between the variable concave grating 30A' of the variable spectrometer 100A' and the variable optical receiver 50A' is equal to the optical path distance R2 of the reference concave grating 30A of the reference spectrometer 100A and the reference optical receiver 50A. Let the number of variable concave gratings 30A' of the variable spectrometer 100A' be equal to the number of reference concave gratings 30A of the reference spectrometer 100A. However, the optical path distance between the variable incident light element 10A' and the first variable reflective element 61A' plus the optical path distance between the first variable reflective element 61' and the second variable reflective element 62A' plus the second variable reflector The optical path distance between the element 62A' and the variable concave grating 30A' is not equal to the optical path distance R1 of the reference light incident element 10A and the reference concave grating 30A of the reference spectrometer 100A. That is, R1≠R5+R6+R7. In addition, the reference spectrometer 100A further includes a reference housing 70A. The reference housing 70A has a reference light receiving side 71A. The design variable spectrometer 100A' also includes a design variable housing 70A'. The variable housing 70A' has a variable light receiving side 71A'. The reference light incident element 10A is disposed on the reference light reception side 71A. The set variable light-in element 10A' is installed on the set variable light-receiving side 71A' of the set variable spectrometer 100A' through the manufacturing method of the variable spectrometer. The width of the reference light receiving side 71A is longer than that of the variable light receiving side 71A'.

Please refer to FIG. 33, which is a manufacturing method of a variable spectrometer according to a third alternative embodiment of the present invention.

The manufacturing method of the variable spectrometer of this embodiment includes: Step S201 obtains a plurality of reference parameters and at least one setting specification of a reference spectrometer, wherein the reference parameters include at least one necessary parameter so that the reference spectrometer can reach the setting specification.

In step S202, the set variable spectrometer is set to have the necessary parameters that are the same as the reference spectrometer, so that the set variable spectrometer can meet the set specifications.

Step S203, when the set variable spectrometer can reach the set specification, setting at least one set variable parameter of the set variable spectrometer includes: It is set that a set variable light input element of the set variable spectrometer is located on a set variable light receiving side of a set variable housing, wherein a reference light input element of the reference spectrometer is located on a reference light receiving side of a reference housing, and the set The variable light receiving side is shorter than the reference light receiving side.

In step S204, when the set variable spectrometer can reach the set specification data, a plurality of free parameters of the set variable spectrometer are set according to the optical principle, the necessary parameter, and the set variable parameter.

Step S205 makes the variable spectrometer according to the necessary parameter, the variable parameter, and the free parameter.

According to the above method, the step of setting the variable parameters of the variable spectrometer under the condition that the variable spectrometer can reach the set specifications further includes: Set at least one design variable reflective element after the design variable light-incoming element.

According to the manufacturing method of the variable spectrometer described above, in the first implementation aspect of the third alternative embodiment, the reference spectrometer 100 includes a reference light-incident element 10, a reference collimating mirror 20, a reference plane grating 30, and a reference focal plane Mirror 40 and a reference light receiver 50. Design variable spectrometer 100’ includes A variable light element 10', a variable collimating mirror 20', a variable plane grating 30', a variable focusing mirror 40', and a variable light receiver 50' are provided.

According to the manufacturing method of the variable spectrometer described above, the setting specification includes a spectral range, and the necessary parameters include the focal length of the reference focusing mirror 40, the distance from the reference plane grating 30 to the reference focusing mirror 40, and the length of the reference plane grating 30. number.

According to the manufacturing method of the variable spectrometer described above, the setting specification further includes a resolution, wherein the necessary parameter further includes the focal length of the reference collimator 20.

According to the manufacturing method of the variable spectrometer described above, the setting specification further includes a noise, a dynamic range, and a number of pixels, and the necessary parameters further include the reference light-incident element 10, the reference collimator 20, and the reference plane grating 30. The relative optical path of the reference focusing lens 40 and the reference light sensor 50 and the specifications of the component body.

According to the manufacturing method of the variable spectrometer described above, in the second implementation aspect of the third alternative embodiment, the reference spectrometer 100A includes a reference light incident element 10A, a reference concave grating 30A, a reference light receiver 50A, and a reference light Waveguide device 80A. The variable spectrometer 100A' includes a variable optical element 10A', a variable concave grating 30A', a variable optical receiver 50A', and a variable optical waveguide device 80A'.

According to the manufacturing method of the variable spectrometer described above, the setting specification includes a spectral range, and the necessary parameters include the distance from the reference concave grating 30A to the reference light sensor 50A and the number of the reference plane grating 30A.

According to the manufacturing method of the variable spectrometer described above, the setting specification includes a resolution, and the necessary parameter further includes the element body specification of the reference concave grating 30A.

According to the manufacturing method of the variable spectrometer described above, the setting specification further includes a noise, a dynamic range, and a number of pixels. The necessary parameters further include the reference light-incident element 10A, the reference concave grating 30A, and the reference light receiver 50A. The specifications of the optical path and its components.

Please refer to FIG. 34, which is a manufacturing method of a variable spectrometer according to a fourth alternative embodiment of the present invention.

The manufacturing method of the variable spectrometer of this embodiment includes: Step S301 configures the focal length of a reference focusing mirror of a reference spectrometer to the focal length of a variable focusing mirror of a variable spectrometer.

Step S302 configures the optical path distance between a reference plane grating of the reference spectrometer and the reference focusing mirror with reference to the optical path distance between a variable plane grating of the variable spectrometer and the variable focusing mirror.

Step S303 refers to the configuration of the reference plane grating number of the reference spectrometer to the set variable plane grating number of the set variable spectrometer.

In step S304, a variable light receiving element of the variable spectrometer is arranged on the variable light receiving side of a variable housing, which has a narrower width relative to the reference light receiving side of a reference housing of the reference spectrometer.

According to the manufacturing method of the variable spectrometer described above, the reference spectrometer 100 includes a reference light incident element 10, a reference collimating mirror 20, a reference plane grating 30, a reference focusing mirror 40 and a reference light receiver 50. The variable spectrometer 100' includes a variable light input element 10', a variable collimating mirror 20', a variable plane grating 30', a variable focusing mirror 40', and a variable light receiver 50' . The above method further includes: arranging at least one variable reflection element 60' between the design variable incident light element 10' and a design variable collimating mirror 20' of the design variable spectrometer 100'.

In particular, when the resolution of the reference spectrometer 100A and the variable spectrometer 100' are the same, the optical path distance r5' of the variable incident light element 10' and the variable reflective element 60' plus the variable reflective element 60' and the variable collimation surface The optical path distance r6' of the mirror 20' is equal to the optical path distance r1 between the reference light incident element 10 of the reference spectrometer 100 and the reference collimating mirror 20, that is, r1=r5+r6. It can be understood that when the resolution of the reference spectrometer 100 and the designed variable spectrometer 100' are different, then r1≠r5+r6.

Further, as shown in FIG. 35, the manufacturing method of the variable spectrometer according to a modified embodiment of the fourth alternative embodiment includes: Step S301' configures the focal length of a reference focusing mirror of a reference spectrometer to the focal length of a variable focusing mirror of a variable spectrometer.

Step S302' configures the optical path distance between a reference plane grating of the reference spectrometer and the reference focusing mirror with reference to the optical path distance between a variable plane grating of the variable spectrometer and the variable focusing mirror.

Step S303' refers to the configuration of the reference plane grating number of the reference spectrometer to the set variable plane grating number of the set variable spectrometer.

Step S304' The optical path distance of a reference light-incident element and a reference collimating mirror of the reference spectrometer is configured to refer to the optical path distance of a variable light-incident element and a variable collimating mirror of the reference spectrometer.

In step S305', a set variable light input element of the set variable spectrometer is arranged on the set variable light receiving side of a set variable housing, which has a narrower width relative to the reference light receiving side of a reference housing of the reference spectrometer.

In addition, the above method further includes: arranging at least one variable reflection element between the design variable incident light element and the design collimator mirror of the design variable spectrometer.

Please refer to FIG. 36, which is a manufacturing method of a variable spectrometer according to a fifth alternative embodiment of the present invention.

The manufacturing method of the variable spectrometer of this embodiment includes: In step S401, the optical path distance of a reference concave grating and a reference optical receiver of a reference spectrometer is configured to the optical path distance of a variable concave grating and a variable optical receiver of a variable spectrometer.

Step S402 refers to the configuration of the reference concave grating number of the reference spectrometer to the set variable concave grating number of the set variable spectrometer.

Step S403 is to set a variable light receiving element of the variable spectrometer on the variable light receiving side of a variable housing, which has a narrower width relative to the reference light receiving side of a reference housing of the reference spectrometer.

According to the above manufacturing method of the variable spectrometer, the reference spectrometer 100A includes a reference light incident element 10A, a reference concave grating 30A, a reference light receiver 50A, and a reference light waveguide device 80A. The variable spectrometer 100A' includes a variable optical element 10A', a variable concave grating 30A', a variable optical receiver 50A', and a variable optical waveguide device 80A'.

The above method may further include: arranging at least one variable reflective element 60A' between the designed variable light entering element 10A' and the variable concave grating 30A' of the designed variable spectrometer 100A'. In particular, when the resolution of the reference spectrometer 100A and the variable spectrometer 100A' are the same, the optical path distance R3' of the variable incident light element 10A' and the variable reflective element 60A' plus the variable reflective element 60A' and the variable concave grating are set. The optical path distance R4' of 30A' is equal to the distance R1 between the reference light incident element 10A of the reference spectrometer 100A and the reference concave grating 30A, that is, R1=R3+R4. In addition, when the resolution of the reference spectrometer 100A and the variable spectrometer 100A' are different, R1≠R3+R4.

It is understandable that when two designed variable reflective elements 60A' are provided between the designed variable light-entering element 10A' and the designed variable concave grating 30A' of the designed variable spectrometer 100A', the variable light-entering element 10A' and the first The optical path distance between a variable reflective element 61A' is set to R5', the optical path distance between the first variable reflective element 61A' and the second variable reflective element 62A' is set to R6', and the second variable reflective element The optical path distance between 62A' and the variable concave grating 30A' is set to R7'. Then when the resolution of the reference spectrometer 100 and the design variable spectrometer 100' are not the same, then R1≠R5'+R6'+R7'; when the resolution of the reference spectrometer 100 and the design variable spectrometer 100' are the same, then R1=R5'+ R6'+R7'.

Further, as shown in FIG. 37, the manufacturing method of the variable spectrometer according to a modified embodiment of the fifth alternative embodiment includes: Step S401' configures the optical path distance of a reference concave grating and a reference optical receiver of a reference spectrometer to the optical path distance of a variable concave grating and a variable optical receiver of a variable spectrometer.

Step S402' refers to the configuration of the reference concave grating number of the reference spectrometer to the set variable concave grating number of the set variable spectrometer 100A'.

Step S403' refers to the configuration of the optical path distance between a reference light incident element of the reference spectrometer and the reference concave grating to the distance between a variable light incident element of the variable spectrometer and the variable concave grating.

In step S404', a set variable light-receiving element of the set variable spectrometer is arranged on the set variable light receiving side of a set variable housing, which has a narrower width relative to the reference light receiving side of a reference housing of the reference spectrometer.

The above method may further include: arranging at least one reflective element 60A' between the set variable entrance light element 10A' and the set variable concave grating 30A' of the set variable spectrometer 100A', wherein the reference spectrometer 100A and the set variable concave grating 30A' can be set according to requirements. Whether the resolution of the variable spectrometer 100A' is the same.

In summary, although the present invention has been disclosed as above in preferred embodiments, it is not intended to limit the present invention. Those who have ordinary knowledge in the technical field to which the present invention pertains, without departing from the spirit and scope of the present invention, make various changes and modifications equivalent to substitutions still within the protection scope of the patent for the present invention. Therefore, the content of the foregoing description or drawings shall not be used as an interpretation of the limitation of the scope of patent application, and the scope of protection of the present invention shall be subject to the definition of the scope of patent application attached.

S101~S104: The steps of an embodiment of the manufacturing method of the variable spectrometer

Claims (37)

A method for manufacturing a variable spectrometer includes: obtaining a plurality of reference parameters and at least one setting specification of a reference spectrometer; integrating at least one necessary parameter of the reference parameters of the reference spectrometer into a variable spectrometer to make the variable spectrometer Having the same setting specifications as the reference spectrometer; obtaining a plurality of free parameters of the setting variable spectrometer according to the grating equation; and setting a setting variable input element of the setting variable spectrometer to a setting variable receiving light of a setting variable housing Side, make the set variable light-receiving side shorter than a reference light-receiving side of a reference housing of the reference spectrometer. As described in item 1 of the scope of patent application, the manufacturing method of the variable spectrometer further includes: arranging at least one variable reflecting element between the variable light input element and a variable collimating mirror. As described in the first item of the scope of patent application, the manufacturing method of the variable spectrometer further includes: arranging at least one variable reflecting element between the variable light input element and a variable concave grating. The manufacturing method of the variable spectrometer described in item 1 of the scope of patent application, wherein the setting specification includes a spectral range, the necessary parameters of the reference spectrometer include a reference plane grating and a reference focusing mirror optical path distance, the reference The focal length of the focusing mirror and the number of reference plane gratings. The necessary parameters of the variable spectrometer include the optical path distance of a variable plane grating and a variable focusing mirror, the focal length of the variable focusing mirror and the variable plane The number of gratings. The method for manufacturing a variable spectrometer described in item 4 of the scope of patent application, wherein the setting specification further includes a resolution, and the necessary parameters of the variable spectrometer further include the variable input element and a variable collimating mirror The necessary parameters of the reference spectrometer further include the optical path distance of a reference light incident element and a reference collimating mirror. The method for manufacturing a variable spectrometer described in item 2 of the scope of patent application, wherein the setting specification includes a spectral range, the necessary parameters of the reference spectrometer include a reference plane grating and a reference focusing mirror optical path distance, the reference The focal length of the focusing mirror and the number of reference plane gratings. The necessary parameters of the variable spectrometer include the optical path distance of a variable plane grating and a variable focusing mirror, the focal length of the variable focusing mirror and the variable plane The number of gratings. For the manufacturing method of the design variable spectrometer described in item 6 of the scope of patent application, the setting specification further includes a resolution, and the necessary parameters of the design variable spectrometer further include the design variable input element and the design variable reflector element. Plus the optical path distance between the variable reflecting element and the variable collimating mirror, the resolution of the reference spectrometer is set to the optical path distance of a reference light incident element and a reference collimating mirror. The manufacturing method of the variable spectrometer described in the first item of the scope of patent application, wherein the setting specification includes a spectral range, and the necessary parameters of the reference spectrometer include a reference concave grating and an optical path distance of a light receiver and the reference concave surface The number of gratings. The necessary parameters of the variable spectrometer include the optical path distance between a variable concave grating and a variable optical receiver and the number of variable concave gratings. For the manufacturing method of the design variable spectrometer described in item 8 of the scope of patent application, the setting specification further includes a resolution, and the necessary parameter of the design variable spectrometer includes the setting change The optical path distance between the optical element and the variable concave grating, and the necessary parameter of the reference spectrometer includes the optical path distance between a reference light incident element and the reference concave grating. The manufacturing method of the variable spectrometer described in item 3 of the scope of patent application, wherein the setting specification includes a spectral range, the necessary parameters of the reference spectrometer include a reference concave grating and the optical path distance of a light receiver and the reference concave surface The number of gratings. The necessary parameters of the variable spectrometer include the optical path distance between a variable concave grating and a variable optical receiver and the number of variable concave gratings. For the manufacturing method of the design variable spectrometer described in item 10 of the scope of patent application, the setting specification further includes a resolution, and the necessary parameter of the design variable spectrometer includes the distance between the design variable light element and the design variable reflector element. The optical path distance of plus the optical path distance between the variable reflective element and the variable concave grating, the necessary parameters of the reference spectrometer include the optical path distance of a reference light incident element and a reference concave grating. The method for manufacturing a variable spectrometer as described in item 5 of the scope of patent application, wherein the free parameters include the variable collimating mirror, the variable plane grating, the variable focusing mirror being a transmissive type, a reflective type, and combinations thereof . For the method of manufacturing a variable spectrometer described in any one of items 1 to 4, 10, and 12 of the scope of the patent application, a reference light-incident element is arranged on an inclined portion of the reference light-receiving side , The variable-incident light element is arranged on a protrusion on the side of the variable-light-receiving side, and the variable light-incoming element and the reference light-incident element both receive light vertically. For example, the method for manufacturing a variable spectrometer described in any one of items 1 to 12 of the scope of the patent application, wherein the reference light-incident element is arranged in a reference groove on the reference light-receiving side, and the device The variable-entry light element is arranged on a protruding portion on the side of the variable-incident light-receiving element, and the variable-entry light element and the reference light-incident element both receive light vertically. A method for manufacturing a variable spectrometer includes: obtaining a plurality of reference parameters and at least one setting specification of a reference spectrometer, wherein the reference parameters include at least one necessary parameter so that the reference spectrometer can reach the setting specification; setting the setting specification The spectrometer has the same necessary parameters as the reference spectrometer, so that the set-variable spectrometer can reach the set specifications; when the set-variable spectrometer can reach the set specifications, setting at least one set-variable parameter of the set-variable spectrometer includes: setting A set variable incident light element of the set variable spectrometer is located on a set variable light receiving side of a set variable housing, wherein a reference light incident element of the reference spectrometer is located on a reference light receiving side of a reference housing, the set variable The light-receiving side is shorter than the reference light-receiving side; under the condition that the variable spectrometer can reach the set specification data, set the free parameters of the variable spectrometer according to the optical principle, the necessary parameters and the variable parameters; and according to the The necessary parameters, the set variable parameters, and the free parameters make the set variable spectrometer. As described in item 15 of the scope of patent application, the method for manufacturing a variable spectrometer, wherein the step of setting the variable parameter of the variable spectrometer under the condition that the variable spectrometer can reach the setting specifications further includes: setting at least one setting The variable reflection element is after the design of the light-incoming element. According to the manufacturing method of the design variable spectrometer described in item 15 of the scope of patent application, the design variable incident light element and the reference light incident element both receive light vertically. As described in item 15 of the scope of patent application, the method for manufacturing a variable spectrometer, wherein the setting specification includes a spectral range, wherein the reference spectrometer includes the reference housing, the reference light-incident element, a reference collimator, and a reference Planar grating and a reference focusing mirror, wherein the necessary parameters include the focal length of the reference focusing mirror, the optical path distance from the reference plane grating to the reference focusing mirror, and the number of reference plane gratings. According to the manufacturing method of the variable spectrometer described in item 18 of the scope of patent application, the setting specification further includes a resolution, and the necessary parameter further includes the focal length of the reference collimator. The method for manufacturing a variable spectrometer described in item 19 of the scope of patent application, wherein the setting specification further includes a noise, a dynamic range and a pixel number, wherein the reference spectrometer further includes a reference light sensor, wherein the The necessary parameters further include the reference light incident element, the reference collimator lens, the reference plane grating, the relative optical path of the reference focusing lens and the reference light sensor, and the specifications of the element body. The method for manufacturing a variable spectrometer according to item 15 of the scope of patent application, wherein the setting specification includes a spectral range, and the reference spectrometer includes the reference housing, the reference light-incident element, a reference concave grating, and a reference light For the sensor, the necessary parameters include the optical path distance from the reference concave grating to the reference light sensor and the number of the reference concave grating. According to the method of manufacturing a variable spectrometer described in item 21 of the scope of patent application, the setting specification further includes a resolution, and the necessary parameter further includes the element body specification of the reference concave grating. The manufacturing method of the variable spectrometer described in item 22 of the scope of patent application, wherein the setting specification further includes a noise, a dynamic range and a pixel number, and the necessary parameter It also includes the reference concave grating, a reference light sensor, the relative optical path of the reference concave grating, and the specifications of the component body. The method for manufacturing a variable spectrometer according to item 15 of the scope of patent application, wherein the variable spectrometer includes the variable casing, the variable light component, a variable collimator, a variable plane grating, and The variable focus mirror, wherein the free parameters include the variable collimator lens, the variable plane grating, the variable focus mirror being of the transmissive type, the reflective type, and combinations thereof. The method for manufacturing a variable spectrometer according to item 15 of the scope of patent application, wherein the variable spectrometer includes the variable casing, the variable light component, a variable collimator, a variable plane grating, and The variable focusing mirror, wherein the free parameter includes the blaze angle of the variable plane grating. The method for manufacturing a variable spectrometer according to item 15 of the scope of patent application, wherein the variable spectrometer includes the variable casing, the variable light component, a variable collimator, a variable plane grating, and The variable focus lens, wherein the free parameter includes the relative normal angle of the variable collimator lens and the variable plane grating and/or the relative normal angle of the variable plane grating and the variable focus mirror. A design variable spectrometer adopting the manufacturing method described in item 15 of the scope of patent application, comprising: the design variable housing; the design variable light input element located on the design variable light receiving side of the design variable housing, wherein the The set variable light receiving side is shorter than the reference light receiving side; and at least one set variable reflecting element is arranged behind the set variable light receiving element. A method for manufacturing a variable spectrometer includes: Set the focal length of a reference focusing mirror of a reference spectrometer to the focal length of a variable focusing mirror of a variable spectrometer; refer to the optical path distance between a reference plane grating of the reference spectrometer and the reference focusing mirror The optical path distance between a variable plane grating configured to the variable spectrometer and the variable focusing mirror; the number of reference plane gratings of the reference spectrometer is configured to the number of variable plane gratings of the variable spectrometer by reference; And a variable input element of the variable spectrometer is arranged on the variable light receiving side of a variable housing, which has a narrower width relative to the reference light receiving side of a reference housing of the reference spectrometer. As described in item 28 of the scope of patent application, the method for manufacturing a design variable spectrometer further includes: a reference light-incident element and a reference collimating mirror of the reference spectrometer. The optical path distance reference configuration to the design variable spectrometer The optical path distance between the light incident element and a variable collimating mirror. As described in item 28 of the scope of patent application, the method for manufacturing a variable spectrometer further includes: arranging at least one variable reflector element between the variable incident light element and a variable collimating mirror of the design variable spectrometer. A method for manufacturing a variable spectrometer includes: arranging the optical path distance of a reference concave grating of a reference spectrometer and a reference light receiver to the optical path of a variable concave grating and a variable light receiver of a reference spectrometer. Distance; the reference configuration of the reference concave grating number of the reference spectrometer to the set variable concave grating number of the set variable spectrometer; and A set variable light input element of the set variable spectrometer is arranged on the set variable light receiving side of a set variable housing, which has a narrower width relative to the reference light receiving side of a reference housing of the reference spectrometer. As described in item 31 of the scope of patent application, the method for manufacturing a design variable spectrometer further includes: configuring a reference light-incident element of the reference spectrometer and the optical path distance of the reference concave grating to the design variable of the design variable spectrometer. The distance between the light incident element and the set variable concave grating. As described in item 31 of the scope of patent application, the method for manufacturing a variable spectrometer further comprises: placing at least one variable reflective element between the variable incident light element and the variable concave grating of the variable spectrometer. A design variable spectrometer adopting the manufacturing method described in item 28 of the scope of patent application, comprising: the design variable light input element, which is used to receive the external light to be measured vertically; a design variable collimating mirror; the design variable plane grating, The number of strips is equal to the number of reference plane gratings of the reference spectrometer; the focal length of the set variable focusing mirror is equal to the focal length of the reference focusing mirror of the reference spectrometer, and the optical path of the set variable plane grating and the set variable focusing mirror The distance is equal to the optical path distance between the reference plane grating of the reference spectrometer and the reference focusing mirror; a set variable light receiver, in which the external light to be measured passes through the set change into the light element, through the set change collimator mirror to the set change plane The grating is then split through the variable plane grating and then condensed to the variable light receiver through the variable focusing mirror; and The variable housing, the variable light input element is arranged on the variable light receiving side of the variable housing, and its width is narrower than the reference light receiving side of the reference housing of the reference spectrometer. As described in item 34 of the scope of patent application, the designed variable spectrometer includes at least one designed variable reflective element arranged between the designed variable light input element and the designed variable collimating mirror. A design variable spectrometer adopting the manufacturing method described in item 31 of the scope of patent application, comprising: the design variable light input element, which is used to receive the external light to be measured vertically; and a design variable optical waveguide device, which changes the light into the light from the design The light to be measured received by the component travels through the variable optical waveguide device; the variable concave grating has the same number as the reference concave grating of the reference spectrometer; a variable optical receiver, in which the variable concave grating and the reference concave grating The optical path distance of the set variable light receiver is equal to the optical path distance from the reference concave grating of the reference spectrometer to the reference light receiver; The width of the light side is narrower than the reference light-receiving side of the reference housing of the reference spectrometer. The designed variable spectrometer as described in item 36 of the scope of patent application includes at least one designed variable reflective element arranged between the designed variable light-in element and the designed variable concave grating.

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