TWM445759U - Probe holding structure and its optical inspection device - Google Patents

Description

Probe holding structure and optical detecting device thereof

This creation is a technique for holding a probe, especially a combination of a probe holding structure and an optical detecting device thereof.

Before the semiconductor wafer is completed, multiple inspection procedures must be performed to ensure quality. One of the test items is to verify whether the electrical connection between the precision electronic components inside the semiconductor wafer is true and whether the function meets the acceptance specifications.

Generally, when testing a semiconductor wafer, the test machine must contact a device under test (DUT), such as a wafer, through a probe card, and by signal transmission and electrical signal analysis. Obtain test results of the test object. The probe card usually comprises a plurality of precision probes arranged in a mutual arrangement, and each probe generally corresponds to a specific electrical contact on the wafer, and when the probe contacts the corresponding electrical contact on the object to be tested, It does pass the test signal from the test machine; at the same time, with the control and analysis program of the probe card and the test machine, the purpose of measuring the electrical characteristics of the test object is achieved.

Please refer to FIGS. 1A and 1B, which are bottom and cross-sectional views of a probe card structure of a conventional technique. The probe card 1 has a guide plate 10 having a through hole 11 therearound, and a plurality of rows of probes 12, 13 and 14 around the through hole. Since there are a plurality of rows of probes 12, 13 and 14 on the guide plate 10, and the area of the guide plate 10 is small, when the probe card 1 is manufactured, the insertion of the first row of probes 12 is performed. When the needle is actuated, the pin movements of the second and third rows of probes 13 and 14 cannot be synchronized, thereby reducing the probe card 1 Production efficiency. In addition, since the probe is directly inserted into the guide plate 10 in the conventional technique, when there is a problem in the manufacturing quality or when there is an abnormality in the probe contact, the problematic probe cannot be individually used. The replacement is made, and the probe must be scrapped together with the guide plate, which inevitably increases the cost of the probe card.

In summary, there is a need for a probe holding structure and an optical detecting device to solve the problems caused by conventional techniques.

One of the aims of the present invention is to provide an optical detecting device for a probe holding structure in which a probe is modularized to be connected to a guiding plate, and a probe and a guiding plate are combined. Elasticity improves the efficiency of making probe cards, and it is also easy to replace problematic probes, making maintenance easier and reducing the cost of probe cards.

In order to achieve the above purpose, the present invention provides a probe holding structure, comprising: a substrate and a plurality of holding modules. The substrate has a through hole and a plurality of grooves disposed around the through hole. The plurality of holding modules are respectively connected to the plurality of slots, and each of the holding modules further has a fixing member and a plurality of probes, and the fixing members are connected to the corresponding slots. The plurality of probes are attached to the fixture and pass through the corresponding slots.

In order to achieve the above object, the present invention further provides an optical detecting device, comprising: a body, at least one lens receiving seat and at least one probe holding structure. The base body has at least one first through hole. The at least one lens receiving seat is respectively received in the at least one first through hole, each mirror There is a lens inside the headrest. The at least one probe holding structure is disposed on a surface of the base body, and each of the probe holding structures includes a substrate and a plurality of holding modules. The substrate has a through hole and a plurality of grooves disposed around the through hole. The plurality of holding modules are respectively connected to the plurality of slots, and each of the holding modules further has a fixing member and a plurality of probes, and the fixing members are connected to the corresponding slots. The plurality of probes are attached to the fixture and pass through the corresponding slots.

Please refer to FIG. 2, which is a perspective view of an embodiment of the creative probe holding structure. In the embodiment, the probe holding structure 2 includes a substrate 20 and a plurality of holding modules 21 . Please refer to FIG. 3A, which is a schematic structural view of a first embodiment of the substrate of the present invention. In the embodiment, the substrate 20 has a through hole 200 and a plurality of grooves 201 disposed around the through hole. In the present embodiment, the plurality of slots 201 are penetrated through the substrate 20. The plurality of troughs 201 may have a U-shaped or a square-shaped arrangement. In this embodiment, the U-shaped arrangement is similar, that is, the trough 201 is formed on three sides of the through hole 200. In addition, in another embodiment, as shown in FIG. 3B, the groove body on the substrate 20 is not a structure penetrating the substrate 20 as shown in FIG. 3A, but has a bottom surface 203 respectively, and then the bottom surface 203. A plurality of first through holes 204 penetrating the substrate 20 are formed on the upper surface. The material of the substrate 20 may be made of engineering plastics, bakelite, or the like. In the present embodiment, the substrate 20 is a ceramic plate. Further, in FIGS. 3A and 3B, the substrate 20 has a counterbore 205. The number of counterbore 205 and The opening position is determined according to the size and configuration of the substrate 20, and is not limited to the four corners of the substrate 20 in the drawing. The purpose of the counterbore 205 is to use a locking component, such as a screw, to lock the substrate 20 to the base, so that the locking component can be sunk into the hole without protruding the surface of the substrate 20, thereby avoiding injury. The wafer to be tested.

Referring to FIG. 2 and FIG. 3B , the substrate 20 of the embodiment is the substrate embodiment shown in FIG. 3B , and the plurality of holding modules 21 are respectively received in the plurality of slots 202 . Each of the holding modules 21 further has a fixing member 210 and a plurality of probes 211. In this embodiment, each of the fixing members 210 is an elongated cylinder. The material of the fixing member 210 can be made of engineering plastics, bakelite, or the like. In this embodiment, the fixing member 210 is made of a ceramic material. Please refer to FIG. 4A, which is a schematic cross-sectional view of the probe holding structure shown in FIG. 2 of the present invention. First, the manner in which the holding module 21 of the present invention is connected to the corresponding slot 201 is described. In this embodiment, each of the probes 211 is adhered to the fixing member 210 by a glue 22 such as epoxy. A single holding module 21 is formed. Each of the probes 211 is bent into an N-shaped needle structure having an extending portion 2110, a cantilever portion 2111, and a detecting portion 2112. The extension portion 2110 is abutted against one side of the fixing member 210. In this embodiment, the extending portion 2110 is substantially perpendicular to the surface of the substrate 20. The cantilever portion 2111 is connected to the extending portion 2110 and has a first angle θ1 between the extending portion 2110. In order to adhere the probe 211 to the fixing member 210, the cantilever portion 2111 and the fixing member 210 are connected through the adhesive material 22. The detecting unit 2112 is connected to the cantilever portion 2111 and has a second angle θ2 with the cantilever portion 2111. First angle θ1 and second clip The size of the angle θ2 is not particularly limited and can be bent to a desired angle as needed.

The surface of the fixing member 210 in contact with the probe 211 may be, as shown in FIG. 4B, in addition to being planar, in order to allow each probe 211 to be easily placed on the fixing member 210, the fixing member A groove 2100 or 2101 may be provided on at least one side of the 210. Wherein, the groove 2101 provides a receiving corresponding to the extension 2110. The arrangement of the groove 2100 is advantageous for bending the probe 211, and the position is disposed on the wall surface of the fixing member 210 corresponding to the cantilever portion 2111. It should be noted that although the fixing member 210 shown in FIG. 4B has both the grooves 2100 and 2101, the two grooves 2100 and 2101 do not have to be simultaneously provided, and the user can set the grooves as needed. One or both.

Returning to FIG. 4A, each of the holding modules 21 is embedded in the corresponding groove 202 on the substrate 20. Since the substrate 20 of the embodiment is the embodiment of FIG. 3B, each probe is used. The extension 2110 of the 211 will pass through the substrate 20 through the corresponding first through hole 204. Due to the design of the first through hole 204, the extending portion 2110 of the substrate 20 can be better positioned to facilitate the guiding of the subsequent electrical signals. In order to allow the holding module 21 to be fixed on the substrate 20, when the holding module 21 is received in the corresponding slot 202, the gap between the holding module 21 and the slot 202 can be filled with the adhesive 22 The effect of the connection between the holding module 21 and the trough body 202 is enhanced. In addition, in another embodiment, the connection relationship between the cantilever portion 2111 of the probe 211 and the substrate 20 is further enhanced by the glue 22a. In addition, it should be noted that in another embodiment, the fixing member 210 may not be accommodated in the groove body 202, but may be directly connected to the surface of the corresponding groove body 202. At this time, the tank 202 For a through slot having an opening width smaller than the width of the fixture 210, only the corresponding probe passes is provided. As for the manner in which the fixing member 210 is attached to the substrate, it can be adhered and fixed by using black glue.

Please refer to FIG. 5A to FIG. 5C , which are schematic exploded view of the embodiment of the probe holding structure of the present invention. In the present embodiment, the basic structure is similar to that of FIG. 2, and the difference is that in the holding module 21a of the present embodiment, the structure of the fixing member 210a is different from that of the fixing member 210 of FIG. In the embodiment, as shown in FIG. 5C, the fixing member 210a has a plurality of second through holes 2102 corresponding to a probe 211. An extension 2110 of each probe 211 passes through the second through hole 2102. As shown in FIG. 5B, after the probe 211 is fixed on the fixing member 210a, the probe 211 can be fixed to the fixing member 210a by the adhesive members 22 and 22a. It should be noted that the coating position of the rubber material can be determined as needed, and is not limited by the position shown. Then, the entire holding module 21 is embedded in the groove of the corresponding substrate 20. The groove of the substrate 20 can also be selected as in the case of the groove 201 or 202 shown in Fig. 3A or Fig. 3B. In the present embodiment, the structure of the groove 202 shown in Fig. 3B is used. After the entire holding module 21 is embedded in the corresponding slot body 202, in order to enhance the connection between the holding module 21 and the substrate 20, in an embodiment, the glue may be applied at the interface between the holding module 21 and the substrate 20. Material 22b. It should be noted that the position where the holding module 21 is connected to the adhesive material on the substrate 20 through the adhesive material is not limited by the position shown in this embodiment, and the user can select an appropriate interface according to the requirement. Glue to strengthen the connection. Although the aforementioned first through holes 204 are independent through holes, it is to be noted that another variation of the plurality of first through holes 204 is to integrate them into a single through groove that communicates with each other to provide probe passage.

According to the embodiment of the probe holding structure of the present invention, the probe holding structure of the present invention has a holding module separated from the substrate, so that the mounting module for forming the probe and the fixing mold are assembled. The actions on the substrate can be independently separated, so that the assembly efficiency can be increased, and the probe maintenance can also be independently disassembled, thereby avoiding the problem that the entire probe holding structure is scrapped and the cost is increased. In addition, in the holding modules 21 and 21a of the embodiment shown in FIGS. 2 and 5A, the fixing members 210 or 210a of each of the holding modules 21 or 21a are independent structures of the elongated cylinders. However, in another embodiment, as shown in FIGS. 6A to 6D, the plurality of fixing members 210 may be connected to each other to form an annular integrally formed structure, for example, a mouth-shaped type or a U-shaped integral structure. 6A is a U-shaped fixing member 210b, and FIG. 6B is a mouth-shaped fixing member 210c, and FIGS. 6A and 6B can be used for fixing in the holding module of FIG. Pieces. Further, in the U-shaped fixing member 210d shown in Fig. 6C and the lip-shaped fixing member 210e shown in Fig. 6D, the second through hole 2102 is provided, which can be used in Fig. 5A. Hold the fixture in the module.

Referring to FIG. 6E, the figure is a schematic view of the holding module 21a formed by the fixing member 210d of FIG. 6C combined with the substrate 20b. The substrate 20b has a through hole 200, four counter holes 205, and a plurality of through grooves 206. The plurality of through grooves 206 are disposed around the through holes 200 to form a U-shaped structure, and each of the through grooves 206 penetrates the substrate 20b. In the present embodiment, each of the second through holes 2102 on the fixing member 210d provides an extension of the extension 2110 of each of the probes 211. The extension further passes through the corresponding through slot 206. The fixing member 210d can be directly placed on the surface of the accessory substrate, and then fixed with black glue. To be explained, although Figure 6E In the embodiment, the fixing member 210d of Fig. 6C is used, but according to the spirit of the foregoing, the fixing members may also adopt the structures of the sixth, sixth, and sixth embodiments. Further, in another embodiment, the structure of the substrate 20b may be provided with a structure of a limiting groove to limit the position of the fixing member 210b, 210c, 210d or 210e to be fixed at a specific position of the substrate 20b. In this embodiment, the through slot is formed on the bottom surface of the limiting slot, and the fixing member 210b, 210c, 210d or 210e is received in the limiting slot, and the base is fixed on the bottom surface. The needle passes through the slot.

Please refer to FIG. 7 , which is a perspective exploded view of the optical detecting device of the present invention. The optical detecting device 3 includes a body 30, a lens receiving seat 31 and a probe holding structure 2. The base body 30 has a through hole 300, and the inner wall of the through hole 300 has a first thread 301. A receiving groove 302 is defined in a first side of the body 30 to provide the probe holding structure 2 . The through hole 300 penetrates the accommodating groove 302 so that the through hole corresponds to the through hole 200 of the corresponding probe holding structure 2 . A plurality of screw holes 303 are defined in the bottom surface of the accommodating groove 302. In the embodiment, the plurality of screw holes 303 are respectively disposed at four corners of the accommodating groove 302, and four of the probe holding structures 2, respectively. The counterbore 205 corresponds. In addition, a plurality of notches 304 are formed on the bottom surface of the accommodating groove 302, respectively, corresponding to the plurality of holding modules 21, and each of the notches 304 has a plurality of respectively corresponding to the holding module 21 A plurality of probes 211 correspond to perforations 305. The through hole 305 extends through the base body 30 such that the extension portion 2110 of each probe 201 can be electrically connected to the solder pad on the surface of the circuit board of the probe card via the corresponding through hole 305.

The lens housing 31 is disposed in the through hole 300. The lens housing 31 has a receiving slot 310 therein and a lens 33 therein. The lens capacity The outer surface of the seat 31 has a second thread 311 that can be screwed with the first thread 301 in the through hole 300. In one embodiment, the lens 33 is screwed to the screw 312 in the housing by a screw. In addition, at one end of the lens housing 31, there are a plurality of adjustment slots 313 and 314, which can be coupled to an adjustment fixture, and the lens holder 31 is rotated by the adjustment fixture. The lens housing 31 can be moved upward or downward through the first screw 301 and the second screw 311. The adjustment jig can be a one-shaped jig or a cross-shaped jig, but is not limited thereto.

The probe holding structure 2 can be selected as the second embodiment or the embodiment of the fifth embodiment. The probe holding structure 2 is screwed to the corresponding screw hole 303 through a corresponding plurality of locking elements 32, such as screws, to lock the probe holding structure 2 to the body 30. The slot 302 is placed. When the wafer test is performed, light can be projected onto the wafer to be tested by an external light source, so that the wafer to be tested generates an electrical signal. After the plurality of probes 211 electrically connected to the chip to be tested receive the electrical signals, the signals are transmitted to the pads on the circuit board via the extensions 2110. The circuit board receives the electrical signal and transmits the electrical signal to the test machine for electrical signal detection. The lens housing 31 is screwed into the through hole 300, and the through hole 300 corresponds to the through hole 200 of the probe holding structure 2, so that the lens 33 in the lens housing 31 can pass through the through hole. 200 receives the light and can perform optical detection on the side object.

It should be noted that although the foregoing body 30 is provided for accommodating a single probe holding structure 2, in another embodiment, as shown in Figs. 8A and 8B, the figure is a probe holding structure of the present invention. Schematic diagram of the array. In the 8A and 8B embodiments, the probe holding structure 2 is housed in the body 30a in a two-dimensional array arrangement. Each probe holding structure 2 can be coupled to a lens correspondingly Hold the seat. In the embodiment of the eighth embodiment, each of the substrates 20 has a plurality of holding modules 21 arranged in a single U shape; however, in FIG. 8B, the single substrate 20a has a plurality of U-shaped arrays. The holding module 21 is an embodiment that can be changed according to the spirit of the present creation.

However, the specific embodiments described above are only used to illustrate the features and functions of the present invention, and are not intended to limit the scope of implementation of the present invention, without departing from the spirit and technology of the present invention. The equivalent changes and modifications made by the present disclosure are still covered by the scope of the following patent application.

2‧‧‧Probe holding structure

20,20a‧‧‧substrate

200‧‧‧through hole

201, 202‧‧‧

203‧‧‧ bottom

204‧‧‧First through hole

205‧‧‧ counterbore

206‧‧‧through slot

21, 21a‧‧‧ holding module

210,210a~210e‧‧‧Fixed parts

2100, 2101‧‧‧ grooves

2102‧‧‧Second through hole

211‧‧‧ probe

2110‧‧‧Extension

2111‧‧‧Cantilever

2112‧‧‧Detection Department

22, 22a, 22b‧‧‧ glue

3‧‧‧Optical inspection device

30, 30a‧‧‧ body

300‧‧‧through hole

301‧‧‧First thread

302‧‧‧ accommodating slots

303‧‧‧ screw holes

304‧‧‧ notch

305‧‧‧Perforation

31‧‧‧ lens housing

310‧‧‧ accommodating slots

311‧‧‧Second thread

312‧‧ ‧ thread

313,314‧‧‧Adjustment slot

32‧‧‧Locking components

33‧‧‧ lens

1A and 1B are bottom and cross-sectional views of a probe card structure of a conventional technique.

Fig. 2 is a perspective view showing an embodiment of the creative probe holding structure.

3A and 3B are schematic structural views of different embodiments of the substrate of the present invention.

Fig. 4A is a schematic cross-sectional view showing the probe holding structure shown in Fig. 2 of the creation.

Figure 4B is a schematic view of another embodiment of the fixture of the present invention.

5A to 5C are schematic exploded views of the embodiment of the probe holding structure of the present invention, the three-dimensional and cross-section and the holding module.

6A to 6D are schematic views of different embodiments of the fixing member of the one-piece structure of the present invention.

Fig. 6E is a schematic view showing another embodiment of the probe holding structure of the present invention.

Figure 7 is a perspective exploded view of the optical detecting device of the present invention.

8A and 8B are schematic views of the array of probe holding structures of the present invention.

2‧‧‧Probe holding structure

20‧‧‧Substrate

200‧‧‧through hole

205‧‧‧ counterbore

21‧‧‧Retaining module

210‧‧‧Fixed parts

211‧‧‧ probe

22‧‧‧Stained materials

Claims (38)

A probe holding structure includes: a substrate having a through hole and a plurality of slots disposed around the through hole; and a plurality of holding modules respectively connected to the plurality of slots A holding module further has: a fixing member connected to the corresponding groove body; and a plurality of probes connected to the fixing member and passing through the corresponding groove body. The probe holding structure according to claim 1, wherein the plurality of slot systems are slots extending through the substrate, and each of the holding modules is received in each of the slots. The probe holding structure according to claim 1 or 2, wherein each probe has: an extending portion that abuts against one side of the fixing member and passes through the corresponding groove; a cantilever a portion connected to the extension portion, having a first angle with the extension portion, a rubber material between the cantilever portion and the fixing member, and a detecting portion connected to the cantilever portion And having a second angle with the cantilever portion. The probe holding structure of claim 1, wherein each of the holding modules is respectively disposed in each of the slots, each of the slots has a bottom surface, and each of the bottom surfaces has a plurality of first through holes Through the substrate, the plurality of first through holes respectively provide the plurality of probes Over. The probe holding structure of claim 4, wherein each of the fixing members has a plurality of second through holes respectively corresponding to each of the first through holes, and the plurality of second through holes respectively provide the A plurality of probes pass. The probe holding structure of claim 5, wherein each probe has: an extension portion passing through the first through hole and the second through hole; a cantilever portion connected to the extension The portion is connected to have a first angle with the extension portion; and a detecting portion is connected to the cantilever portion and has a second angle with the cantilever portion. The probe holding structure according to claim 1, wherein the plurality of tanks are in communication with each other. The probe holding structure according to claim 1 or 7, wherein the plurality of fixing members are connected to each other to form an integral fixing member structure. The probe holding structure of claim 8, wherein the plurality of groove systems are through grooves extending through the substrate, and the integrated fastener structure is connected to a surface of the substrate corresponding to the plurality of grooves that communicate with each other. Above, each probe passes through the through slot. The probe holding structure of claim 8, wherein the interconnecting plurality of groove systems have a bottom surface, and the bottom surface has a plurality of through grooves extending through the substrate, and the integrated fixing structure is received. In the plurality of interconnected slots and against the bottom surface Above, each probe passes through a corresponding through slot. The probe holding structure according to claim 8, wherein the integrated structure is a mouth-shaped or a U-shaped structure. The probe holding structure according to claim 1, wherein the material of the substrate is ceramic, engineering plastic or bakelite. The probe holding structure according to claim 1, wherein the fixing member is made of ceramic, engineering plastic or bakelite. The probe holding structure according to claim 1, wherein the substrate further has a plurality of counterbore holes. The probe holding structure according to claim 1, wherein each of the holding modules is connected to the corresponding tank by a rubber material. The probe holding structure of claim 1, wherein each of the holding modules is respectively disposed in each of the slots, each of the slots has a bottom surface, and each of the bottom surfaces has a through slot extending through the substrate Each through slot provides probe passage. The probe holding structure of claim 16, wherein each of the fixing members has a plurality of second through holes corresponding to the through grooves, and the plurality of second through holes respectively provide the plurality of probes to pass . The probe holding structure of claim 17, wherein each probe has: an extending portion passing through the first through hole and the through groove; and a cantilever portion connected to the extending portion The connection has a first angle with the extension; and a detecting portion is coupled to the cantilever portion and has a second angle with the cantilever portion. An optical detecting device includes: a body having at least one first through hole; at least one lens receiving seat respectively received in the at least one first through hole, each lens housing having a lens; and at least one probe holding structure disposed on a surface of the base body, each of the probe holding structures includes: a substrate having a second through hole and a plurality of the plurality of holes disposed therein a groove body around the second through hole; and a plurality of holding modules respectively connected to the plurality of slots, each of the holding modules further has: a fixing member connected to the corresponding slot body And a plurality of probes attached to the fixture and passing through the corresponding slots. The optical detecting device of claim 19, wherein the plurality of slot systems are slots extending through the substrate, and each of the holding modules is received in each of the slots. The optical detecting device of claim 19 or 20, wherein each of the probes has: an extending portion that abuts against a side of the fixing member and passes through the corresponding groove; a cantilever portion Connecting to the extension portion, having a first angle with the extension portion, a rubber material between the cantilever portion and the fixing member, and a detecting portion connected to the cantilever portion, and There is a second angle between the cantilever portion. The optical detecting device of claim 19, wherein each of the holding modules is respectively disposed in each of the slots, each of the slots has a bottom surface, and each of the bottom surfaces has a plurality of first through holes. Through the substrate, the plurality of first through holes respectively provide passage of the plurality of probes. The optical detecting device of claim 22, wherein each of the fixing members has a plurality of second through holes respectively corresponding to each of the first through holes, and the plurality of second through holes respectively provide the plurality One probe passed. The optical detecting device of claim 23, wherein each probe has: an extending portion passing through the first through hole and the second through hole; a cantilever portion connected to the extending portion Connected to have a first angle with the extension; and a detecting portion connected to the cantilever portion and having a second angle with the cantilever portion. The optical detecting device of claim 19, wherein the plurality of slots are in communication with each other. The optical detecting device of claim 19, wherein the plurality of fixing members are connected to each other to form an integral structure. The optical detecting device of claim 26, wherein the plurality of groove systems are through grooves extending through the substrate, and the integral fixing member structure is connected to a surface of the substrate corresponding to the plurality of grooves communicating with each other Each probe passes through the through slot. The optical detecting device of claim 26, wherein the interconnecting plurality of slot systems have a bottom surface, and the bottom surface has a plurality of through slots extending through the substrate, and the integrated fixing structure is received The plurality of slots are interconnected and abut against the bottom surface, and each probe passes through the corresponding through slot. The optical detecting device of claim 26, wherein the integral structure is a mouth-shaped or a U-shaped structure. The optical detecting device according to claim 19, wherein the substrate is made of ceramic, engineering plastic or bakelite. The optical detecting device according to claim 19, wherein the fixing member is made of ceramic, engineering plastic or bakelite. The optical detecting device of claim 19, wherein the substrate further has a plurality of counterbore holes. The optical detecting device of claim 19, wherein each of the holding modules is connected to the corresponding tank by a glue. The optical detecting device of claim 19, wherein the surface of the base further has at least one receiving groove for respectively receiving the at least one probe holding structure, the first through hole penetrating the receiving portion The slot corresponds to the second through hole of the corresponding probe holding structure. The optical detecting device of claim 34, wherein a bottom surface of each of the accommodating grooves is respectively provided with a notch corresponding to each of the holding modules, and each of the notches has a plurality of perforations to provide corresponding probes. by. The optical detecting device of claim 19, wherein each of the holding modules is respectively accommodated in each of the slots, each of the slots Each of the bottom surfaces has a through hole extending through the substrate, and each through slot provides a probe passage. The optical detecting device of claim 36, wherein each of the fixing members has a plurality of second through holes corresponding to the through grooves, and the plurality of second through holes respectively provide the plurality of probes to pass. The optical detecting device of claim 37, wherein each probe has: an extending portion passing through the first through hole and the through slot; and a cantilever portion connected to the extending portion Having a first angle with the extension; and a detecting portion coupled to the cantilever portion and having a second angle with the cantilever portion.