五、新型說明： 【新型所屬之技術領域】 本新型是種緩衝輸魏聰置，_是-歡陽财晶片檢測 機台用之緩衝輸送檢測裝置。 【先前技術】 太陽能板之主要構絲件為雄麟晶片，太陽㈣晶片既輕且薄， 在自動化製造無測過程巾，倘若稍林慎，即有可能造触損、缺角、 或割損’甚至產生肉眼無法察覺的微細裂縫，前揭缺失應該竭盡可能避免， 以提升太陽能”片在製造及檢測過程中的良率。 目前習見之太陽_晶片檢測機台，太陽能石夕晶片在太陽鮮晶片檢 測機台輸送過程中，由-組承載輸送件承載傳送，請參考如圖i所示，以 皮帶輪承_私意，此承餘送件u設置在-基座U上姚能石夕晶 片3藉由承錄送件U之承載及傳送，沿著—個特定方向輸送至一個預 定受測位置進行檢測作業。 处之檢測作業在本例中可被概分為一組光學檢測及一組光電檢測， 所謂光學檢般指_如攝職等鱗影_較置，獲得太陽跡晶片3 的外部影像資料’例如外表是否有觀、微裂、或佈線是錢好，用以判 斷陽此石夕B曰片3疋否有外表瑕疲，另如太陽能石夕晶片3的外表色澤等用 …續刀類的雖。至於光電檢測’贱由檢廳巾模擬太陽光的光源 \ ‘、、、射到又測太陽切晶片3上，再用檢測器中的探針導接接觸到 陽月匕夕阳片3的匯流電極，導出太陽能石夕晶片3受光照所發的電能，從 M392353 而判斷其接收光能轉換為電能輸出的轉換效率是否良好；或者，是由檢測 器中的探針輸出電能給太陽能石夕晶片3，並且由紅外線攝影機取得待測 太陽能石夕晶片3的紅外線影像，藉以判斷石夕晶片中是否存在内部瑕庇。 然而’太陽能石夕晶片3厚度甚薄，而且在製造過程中難免出現些許勉 曲，現有機台的基座12在對應檢測器13的探針位置是平坦的硬質承載平 -面’因此當探針向下抵觸到太陽能祝片3時，太陽能碎晶片3同時受到 檢測器13與基座12的掛壓，對本身輕曲情形較嚴重的太陽能石夕晶片3，將 ♦如圖2所示，造成受測太陽能石夕晶片3的破損或缺角，使得檢測過程中平 添不必要的損壞’產出良率因此降低。 尤其如圖3所示’當被擠壓破損的太陽能矽晶片3被承載輸送件u傳 送到下-站，少許殘留的破片將遺留在基座12上，下一片受測太陽能石夕晶 片3持續被傳送到檢測位置時’更會受到殘留的破#錢而被架高，當探 針下壓時更容易破片損壞’即使僅是因此而受到刮傷，健會降低產出良 率；由此，一片受壓而破損將造成後續更多太陽能矽晶片3的損傷，大大 •影響機台的工作效率。 因此，若能提供一種降低太陽能矽晶片因為受到檢測器與基座的擠壓 而破損的問題，進而提升太陽能矽晶片的產出良率，增加機台檢測效率， 將是此類檢測機台之輸送檢測裝置的最佳解決方案。 【新型内容】 因此，本新型之一目的，在提供一種在檢測過程較無損壞受測太陽能 石夕晶片顧慮的太陽能石夕晶片檢測機台用之緩衝輸送檢測裝置。 本新型之另一目的，在提供一種提升太陽能矽晶片在自動化製造與檢 4 M392353 測過程中良率的场能⑪晶片檢測機台用之緩衝輸送檢測裝置。 本新型之再-目的’在提供__種減少太陽财晶片受測過程_，因檢 測過程破片，導致必須停機清除處理之機率的太陽解^檢峨台用之 緩衝輸送檢測裝置。 本創作為-種太陽财晶諸職台用之緩衝輸送檢測裝置該太陽 能石夕晶片檢_台包含—組基座、—組處理裝置一組接受贿理裝置指 令之分類裝置、及設置於該基座之該緩衝輸驗測裝置，且料受測太陽 能石夕晶片分別具有複數供傳輸電能之匯流電極，該緩衝輸送檢測裝置包 含.-組設置於絲座、沿著-雜定輸送方向承賴等制太陽能石夕晶 片經過-個預定受測位置之承載輸送件；—組對應該承載輸送件、檢測該 等受測太陽能石夕晶片、並輸出檢驗資料至該處理裝置之檢測器；其中，該 檢測益包括-組供對應該預定受測位置、由該等受測太陽财晶片遠離該 承載輸讀繼接料®流電極之職導接電極；以及該承載輸送件在對 應該預定受酿置處’倾下方之基鍊财—個_下壓距離。 精由本創作，太陽能抑B片被承輸送件傳送職對顧定受測位置 處，因承載輸送件與下方之基座保持有—個緩衝下壓距離，所以當檢測器 抵接到太陽财晶片時’太陽财⑼受力將可部分轉糊承載輸送件， 藉由承載輸送件的緩衝變形’吸收部分下壓力，檢·則可順利抵接並提 供電能或接收太陽㈣晶片所發魏，並且大幅降低太陽能W片受抵壓 而破損的s擾；綜上所述，可有效克服上述問題點，提供更佳的測試效率 與更佳產出良率。 > 【實施方式】 5 M392353 有關本新型之技術内容、特點與功效，配合下列參考圖式之較佳實施 例及其詳細說明，將可清楚的呈現》 敬請參閱圖4及圖5所示，應用本創作之太陽能石夕晶片檢測機台4包 含一組基座41、一組處理裝置42、一組接受處理裝置42指令之分類裝置 43、及設置於基座41之緩衝輸送檢測裝置44，其中緩衝輸送檢測裝置44 包括至少一組光學檢測模組441及光電檢測模組442。且為便於說明起見， 定義前述緩衝輸送檢測裝置44承載受測太陽能石夕晶片3之方向為檢測輸送 鲁方向。而受測太陽能矽晶片3分別具有複數供傳輸電能之匯流電極。 受測太陽能矽晶片3經緩衝輸送檢測裝置44承載傳送至對應預定受測 位置接受檢測，並透過設置於光學檢測模組441内例如包括有多組攝影機 等光學景>像擷取器4411，分別將受測太陽能矽晶片3之表面影像及顏色之 影像資料操取下來，並將所得資料輸出至處理裝置42，做為受測太陽能石夕 晶片3置放至對應分類位置的依據。 請一併參考圖6'，本創作之太陽能石夕晶片檢測機台用之緩衝輸送檢測 鲁裝置44更包含一組承載輸送件443及檢測器444，其中承載輪送件443在 本例中例釋為包括兩組設置於基座幻之皮帶輪4431，及兩組分別受皮帶輪 4431帶動且用以承載受測太陽能石夕晶片3之皮帶4432 ;而檢測器係包 括探針444卜機械臂4442及高亮度光源MM，並設置於光電檢測模組祕 中’而光電檢測流程請-併參考圖7、8及9所示，首先如圖7所示由皮帶 他將受測太陽能石夕晶片3依箭頭方向輸送並輸送至如圖s所示位於光 電檢測模組442之檢測位置’而探針係由機械臂MU驅動升降。其 中’皮帶4432在對應預定❹松置處，是與口之基座^縣有一個緩 6 M392353 衝下壓距離。V. New description: [New technology field] This new type is a cushioning transmission Wei Cong set, _ is a buffer conveying detection device for Huanyang Cai wafer testing machine. [Prior Art] The main component of the solar panel is the Xionglin wafer, and the solar (four) wafer is light and thin. In the automated manufacturing process, there is no possibility to make a touch loss, a corner, or a cut. 'Even even micro-cracks that are invisible to the naked eye, the missing front should be avoided as much as possible to enhance the yield of solar energy in the manufacturing and testing process. Currently seeing the sun _ wafer inspection machine, solar stone eve wafer in the sun During the process of transporting the wafer inspection machine, it is carried by the carrier of the group carrier. Please refer to the figure shown in Figure i, with the pulley wheel _ privately, the bearing piece u is set on the pedestal U. The carrying and transporting of the carrying member U is carried along a specific direction to a predetermined measured position for testing. The detecting operation can be roughly divided into a set of optical detection and a set of photoelectric detection in this example. The so-called optical inspection refers to _ such as shooting and other scales _ comparison, obtain the external image data of the solar trace chip 3 'such as whether the appearance of the view, micro-crack, or wiring is good, to judge the Yang Xi Shi B曰3疋There is no external fatigue, another example is the appearance of the solar stone lithograph 3, etc.. Although the procedural type is detected, as for the photoelectric detection, the light source of the sunlight is simulated by the inspection room towel, ',,, shot and measured The solar wafer is cut on the wafer 3, and then the probe in the detector is used to contact the bus electrode of the Yangyueyu sunset piece 3, and the electric energy generated by the solar stone wafer 3 is extracted, and the received light energy conversion is judged from M392353. Whether the conversion efficiency of the electric energy output is good; or, the probe in the detector outputs electric energy to the solar stone wafer 3, and the infrared image of the solar energy laser chip 3 to be tested is obtained by the infrared camera, thereby judging the stone solar wafer Whether there is an internal shackle. However, the solar radiant wafer 3 is very thin, and it is inevitable that some distortion occurs during the manufacturing process. The pedestal 12 of the existing machine is flat and hard-bearing at the probe position of the corresponding detector 13. -Face' Therefore, when the probe is in downward contact with the solar panel 3, the solar chip 3 is simultaneously subjected to the hanging of the detector 13 and the susceptor 12, and the solar ray is more serious to itself. The wafer 3, as shown in FIG. 2, causes damage or lack of corners of the tested solar cell wafer 3, so that unnecessary damage is added during the detection process, and the yield yield is reduced. Especially as shown in FIG. The extruded solar crucible wafer 3 is transported to the lower station by the carrier transport member u, and a small residual chip will remain on the susceptor 12, and the next piece of solar ray wafer 3 to be tested is continuously transferred to the detection position. Will be trapped by the residual broken #钱, it is easier to break the piece when the probe is pressed. 'Even if it is only scratched, it will reduce the yield yield; thus, a piece of pressure will be damaged and will cause damage. Subsequent damage to the solar raft wafer 3 greatly affects the efficiency of the machine. Therefore, if it is possible to provide a method for reducing the damage of the solar raft wafer due to the squeeze of the detector and the susceptor, the solar raft wafer is further improved. Output yield and increased machine inspection efficiency will be the best solution for the delivery inspection device of such inspection machines. [New content] Therefore, an object of the present invention is to provide a buffer conveying detecting device for a solar stone wafer testing machine that is less concerned with the damage of the solar energy chip in the detection process. Another object of the present invention is to provide a buffer transmission detecting device for a field energy 11 wafer inspection machine for improving the yield of a solar tantalum wafer in an automated manufacturing and inspection process. The re-purpose of the present invention provides a cushioning detection device for the solar decompression inspection platform which is required to stop the removal process due to fragmentation of the inspection process. The present invention is a buffering and conveying detection device for the solar chemist's various positions. The solar lithography wafer inspection _ station includes a group pedestal, a group processing device, a classification device for receiving a bribe device instruction, and The buffered transmission and test device of the pedestal, and the measured solar energy solar ceremonial wafer respectively has a plurality of bus electrodes for transmitting electrical energy, and the buffered transport detecting device comprises: a set disposed on the wire seat, along the direction of the miscellaneous conveying The solar photovoltaic wafers of the Lai system pass through a carrier carrying member at a predetermined measured position; the pair of detectors that are to carry the conveying member, detect the solar photovoltaic wafers to be tested, and output the inspection data to the processing device; The detection benefit includes - the group is provided for the predetermined measured position, and the measured solar wafer is remote from the bearing and the relay electrode of the relay material; and the carrier conveying member is correspondingly scheduled to be received At the brewing place, the base chain under the 'falling down' is a downward pressure. From the creation of this, the solar-powered B-piece is transported to the position of the measured position of Gu Ding, because the carrying conveyance member and the base underneath maintain a buffering down distance, so when the detector is attached to the solar chip At the time, the solar energy (9) force will be partially transferred to the conveying member, and by the cushioning deformation of the carrying conveying member, the absorption portion will be under pressure, and the inspection can smoothly abut and provide electric energy or receive the sun (four) wafer, and Significantly reduce the sinter of the solar W chip under pressure and damage; in summary, it can effectively overcome the above problems and provide better test efficiency and better output yield. [Embodiment] 5 M392353 The technical content, features and effects of the present invention will be clearly shown in conjunction with the preferred embodiments of the following reference drawings and detailed description thereof. Please refer to FIG. 4 and FIG. The solar energy wafer testing machine 4 of the present application comprises a set of bases 41, a set of processing devices 42, a group of sorting devices 43 that receive the processing device 42 commands, and a buffer conveying detecting device 44 disposed at the base 41. The buffer delivery detecting device 44 includes at least one optical detecting module 441 and a photo detecting module 442. For convenience of explanation, the buffer transmission detecting device 44 is defined to carry the direction of the solar cell wafer 3 to be tested for detecting the transport direction. The solar raft wafers 3 to be tested each have a plurality of bus electrodes for transmitting electrical energy. The measured solar raft wafer 3 is transported to the corresponding predetermined measured position by the buffered transport detecting device 44, and is transmitted through the optical detecting module 441, for example, including an optical scene such as a plurality of cameras, and the image capturing device 4411. The image data of the surface image and the color of the solar ray wafer 3 to be tested are respectively taken out, and the obtained data is output to the processing device 42 as the basis for placing the measured solar ray wafer 3 on the corresponding classification position. Referring to FIG. 6' together, the buffered transport detecting device 44 for the solar energy solar wafer testing machine of the present invention further comprises a set of carrying and transporting members 443 and 444, wherein the carrying wheeled member 443 is in this example. The invention comprises two sets of pulleys 4431 disposed on the base, and two sets of belts 4432 driven by the pulleys 4431 for carrying the solar photovoltaic chips 3 to be tested; and the detector comprises a probe 444 and a mechanical arm 4442 and High-brightness light source MM, and set in the secret of the photoelectric detection module' and the photoelectric detection process please - and refer to Figures 7, 8, and 9, first, as shown in Figure 7, the belt will be measured by the solar energy The direction of the arrow is conveyed and transported to the detection position of the photodetection module 442 as shown in FIG. s, and the probe is driven up and down by the robot arm MU. Among them, the belt 4432 is at the position corresponding to the predetermined ❹, and it has a gentle 6 M392353 squeezing distance from the pedestal of the mouth.
當受測太陽能石夕晶片3被皮帶4432沿著檢測輸送方向承載經過一個預 定受測位置，此時如圖9所示，機械臂4442驅動探針4441向受測太陽能 矽晶片3抵接，碰觸到受測太陽能矽晶片3上的複數供傳輸電能之匯流電 極31，此時檢測器444中的高亮度光源4443被點亮，受測太陽能矽晶片3 隨即將所接收的光能轉換為電能，並經由匯流電極31與探針4441將檢驗 的資料由光電檢測模組442輸出至處理裝置42。由於皮帶4432與下方之基 座41保持有一個緩衝下壓距離，所以，當探針4441抵壓到受測太陽能矽 晶片3時’受測太陽能石夕晶片3也向下賴到皮帶4432，此時，皮帶彻 不會直接減到基座41而麵簡，麵太陽鮮捕^會被探針 444i抵壓*補，最後再由處縣置a鑛，並由接受處理裝置π指令 之分類裝置43進行太陽能矽晶片3的分類。 綜上所述，本創作之太陽能石夕晶片檢測機台用之緩衝輸送檢測裝置確 實可以避免受測太陽能㈣片在檢測過程受損，且提升太陽能㈣片在自 動化製造與檢測過財之良率，更進—步減知破“需要停機清理的困 擾。本創作與習知結翻仿卻魏更優異，實為最轉決方案。 惟以上所述者，僅為本新型之錄實施例而已，#不能⑽限定本新 型實施之細’即大凡依本新辦請翻顧及_朗㈣容所作 單的等效變化與修飾，賴仍屬本_專_蓋之細内。 θ 【圖式簡單說明】 圓1疋習知太陽能石夕晶片檢測側視圖； 圖2是習知太陽能♦晶片受測擠壓破損示意圖； 7 M392353 圖3是習知太陽能矽晶片輸送檢測示意圖； 圖4是本創作實施例之太陽能梦晶片檢测機台立體卞专巴. 圖5是本創作實施例之處理裝置連結方塊圖； 圖6是本創作實施例之緩衝輸送檢測裝置立體示意圖； 圖7是本創作實施例之太陽能矽晶片承載輪送側視圖； 圖8是本創作實施例之太陽能石夕晶片至預定受測位置側視圖及 圖9是本創作實施例之太陽能矽晶片檢測側視圖。 【主要元件符號說明】 4...太陽能矽晶片檢測機台 11、443…承載輪送件 12、41…基座 13、444…檢測器 44…緩衝輸送檢測裝置 4431...皮帶輪 4432··.皮帶 4441...探針 4442...機械臂 4443…高亮度光源 31...匯流電極 42…處理裝置 43…分類裝置 3.·.太1¼能碎晶片 441..·光學檢測模組 4411…光學影像擷取器 442···光電檢測模組When the measured solar ray wafer 3 is carried by the belt 4432 in the detection conveyance direction through a predetermined measured position, at this time, as shown in FIG. 9, the robot arm 4442 drives the probe 4441 to abut the tested solar raft wafer 3, and touches The plurality of high-intensity light sources 4443 in the detector 444 are illuminated by the plurality of high-intensity light sources 4443 in the detector 444, and the received solar energy is converted into electric energy. The verified data is output from the photodetection module 442 to the processing device 42 via the bus electrode 31 and the probe 4441. Since the belt 4432 maintains a buffering down distance from the lower base 41, when the probe 4441 is pressed against the solar raft wafer 3 under test, the measured solar ray wafer 3 also depends on the belt 4432. When the belt is not directly reduced to the base 41 and the surface is simple, the surface of the sun is caught by the probe 444i, and finally the mine is placed by the county, and the sorting device is accepted by the processing device π command. 43 The classification of the solar germanium wafer 3 is performed. In summary, the buffered conveyor detection device used in the solar energy chip testing machine of the present invention can avoid the damage of the tested solar energy (four) film during the detection process, and improve the yield of the solar (four) film in the automated manufacturing and testing. In addition, step-by-step reduction knows that "there is a need to shut down the troubles. This creation and the familiarization of the complex are better than Wei, which is the most important solution. But the above is only the embodiment of this new type. , #不(10)Limits the details of this new implementation. That is to say, the equivalent changes and modifications of the _lang (4) capacity sheet are still in the _ _ _ cover details. θ [Simple diagram Description: Figure 1 is a schematic view of the conventional solar ♦ wafer under test extrusion damage; 7 M392353 Figure 3 is a schematic diagram of conventional solar raft wafer transport detection; Figure 4 is the implementation of this creation Figure 5 is a block diagram of a processing device of the present embodiment; Figure 6 is a perspective view of a buffer conveying detecting device of the present embodiment; FIG. 8 is a side view of the solar ray wafer of the present embodiment to a predetermined measured position and FIG. 9 is a side view of the solar raft wafer detection of the present embodiment. 】 4...Solar 矽 wafer inspection machine table 11, 443... carrying wheeled parts 12, 41... pedestal 13, 444... detector 44... buffer conveying detection device 4431... pulley 4432··. belt 4441.. .Probe 4442...Mechanical arm 4443...High-intensity light source 31...Bus electrode 42...Processing device 43...Classification device 3.·.11⁄4 can be broken wafer 441..·Optical detection module 4411...optical image撷442···photodetection module