M309575 能夠達到自動化，仍有待克服。 三、基板所放置之承載座，需要與每一吸 的距離，但如何# f θ ，、持相同 π 1Ί控制還是一大問題。 疋以针對上述習知結構所存在之門潁點，士/ 一锸Φ曰w 〜 牧 < 問通點，如何開菸 …a 貫用性之創新結構，實業者所殷切企盼，亦 係相關業者須努力研發突破之目標及方向。 有鐘於此，創作人本於多年從事相關產品之 與設計經驗，針對上述之 ^ 彳不 坪加δ又計與審慎評估後， 終得一確具實用性之本創作。 【新型内容】 欲解決之技術問題點：習知之精密薄形基板，以人工 搬運有其困難度’1損壞率也會提高，加上基板需求尺寸 漸漸朝大尺寸發展，則將更難以人工搬運，而以機械運送 裝卸時’因為每拿取一基板後，厚度均會改變’加上承載 座之與每吸盤之距離均需相同，所以相關之調整控制 變得非常重要。 ’ 解決問題之技術特點：提供一種基板翻轉裝、卸載機 ，其中該機台包含有承載座輸入裝置、承載座輸出裝置、 承載座支撐與校正裝置、基板吸取裝置及基板移動裝置， 其中，^複數基板承載座其中之一，由機台之承載座輸入 裝置送入之機台内定位後，承載座支撐與校正裝置即開使 動作’將承載座頂升並調整之最準確位置，使基板移動袭 置帶動基板吸取裝置得以順利且平均的吸住基板送出或送 入’承載座支撐與校正裝置續動以順利吸住送出或送入下 M309575 一片基板’而基板裝卸完畢後，承載座即被以承載座輸出 裝置送出，以利下一承載座之作業。 對照先A技術之功效： 1 ·本創作達到基板之自動化裝、卸載作業，使得承 載座在裝、卸载完成後可以自動被移出，更換下一承載座 進入作業’達到全自動化之裝卸功效。 2 ·本創作之承載座所在位置並可配合基板取放狀態 被檢測及调整，以隨時保持基板取或放於承載座之位置均 相同者。 3 .本創作之基板吸取裝置，吸取同時會檢測吸取壓 力*其吸盤之吸力不足，表示基板有破損或裂紋，此 時基板移動裝置回復待命位置並停止動作，以待排除瑕疵 品後再動作，如此可避免將瑕疵品送入製程，》咸少浪費， 良率也可提升。The M309575 is able to achieve automation and remains to be overcome. Third, the carrier placed on the substrate needs to be separated from each suction, but how to control the same π 1 还是 is still a big problem. In order to meet the thresholds of the above-mentioned conventional structure, Shi / Yi 锸 曰 牧 牧 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 Relevant operators must strive to develop goals and directions for breakthroughs. With this in mind, the creator has been engaged in related product design and design experience for many years. After the above-mentioned 彳 彳 加 plus δ calculus and prudent evaluation, the creator has a practical and practical creation. [New content] Technical problems to be solved: The precision thin-shaped substrate of the prior art has a difficulty in manual handling. The damage rate will also increase, and the substrate size will gradually increase toward large size, which will make it more difficult to carry it manually. In the case of mechanical loading and unloading, 'because the thickness changes every time a substrate is taken' plus the distance between the carrier and each suction cup is the same, so the relevant adjustment control becomes very important. Technical problem of solving the problem: providing a substrate flipping and unloading machine, wherein the machine comprises a carrier input device, a carrier output device, a carrier support and correction device, a substrate suction device and a substrate moving device, wherein One of the plurality of substrate carriers, after being positioned in the machine table fed by the carrier input device of the machine, the support and correction device of the carrier is opened to cause the action to raise and adjust the most accurate position of the carrier to make the substrate The mobile device drives the substrate suction device to smoothly and evenly suck the substrate to send or feed the 'carrier support and correction device to continue to suck and send or send the M309575 one substrate'. After the substrate is loaded and unloaded, the carrier is It is sent out by the carrier output device to facilitate the operation of the next carrier. Compared with the effect of the first A technology: 1 · This creation achieves the automated loading and unloading operation of the substrate, so that the carrier can be automatically removed after loading and unloading, and the next carrier is replaced to enter the operation' to achieve fully automated loading and unloading. 2 · The position of the carrier of the creation can be detected and adjusted in accordance with the substrate pick-and-place state, so that the position of the substrate taken or placed on the carrier is the same at any time. 3. The substrate suction device of the present invention absorbs the suction pressure at the same time. * The suction force of the suction cup is insufficient, indicating that the substrate is damaged or cracked. At this time, the substrate moving device returns to the standby position and stops the action, so as to remove the defective product and then operate. In this way, it is possible to avoid sending the defective products into the process, which is less wasteful and the yield can be improved.
有關本創作所採用之技術、手段及其功效，茲舉一較 佳實施例並配合圖式詳細說明於后，相信本創作上述之目 的構每及特徵’當可由之得一深入而具體的瞭解。 【實施方式】 裝 參閱第一至第四圖所示 卸載機，係包括有： 本創作係提供一種基板翻轉 一機台（1 0 ) )(如苐六圖所示） 一承載座輸入I 入裝置（20)由機 ，該機台（1 〇 )裝、卸基板（工丄 之方向為前方； 置（20)(如第二圖所示），該輸 台（1 〇 )後方往前裝設有至少一循 7 M309575 '環之輸送帶（2 1 ) ’該輸送帶（2 1 )並為一附有剎車 •之動力元件（2 2)傳動，該動力元件（2 2)可為馬達 ，輸送帶（2 1)之後方並連結至少一壓缸（23)，該 壓缸（2 3)可為氣壓缸或油壓缸，藉由壓缸（2 3)調 整輸送帶（21)之水平或傾斜角度； 一承載座輸出裝置（30)，包含有數平行於機台（ 1 0 )左、右側之輸送桿（3 1 )，每一輸送桿（3 1 ) 均以皮帶（3 2 )連結，皮帶（3 2 )再連結一附有刹車 •之動力元件（33); 一承載座支撐與校正裝置（40)(如第一、第三_ 所示），包含有二組各自獨立且呈下傾斜角度（18度最 佳）之調整座（41) 、（41a)，調整座（41)、 (4 1 a )上並設有水平微調之微調結構（4 2 )、（ 4 2a)，微調結構（4 2 )、（ 4 2 a )上再設支揮平台 (43) 、（ 43 a) ，調整座（41) 、（4la)與 •微調結構（4 2 )、（ 4 2 a )均設有各自獨立之動力元 件（4 4 ) ' ( 4 4 a ) 、 （ 4 5 ) 、 （ 4 5 a );機台 (1 〇 )前方設有至少二校正之超音波測距結構（4 6) ’忒超音波測距結構（4 6 )測距結果得作為調整座（4 工）、（41a)與微調結構（42) 、（42a)調整 距離之依據； 一基板移動裝置（5 〇 )(如第四圖所示），係包含 動力元件（5 1 )驅動一精密之差齒減速機（5 2 ) ，以達到旋擺角度相當精確，差齒減速機（5 2 )連結一 8 M309575 -傳動軸（5 3 )，而傳動軸（5 3 )上固定數懸臂（5 4 一基板吸取裝置（60)(如第四圖所示），包含數 吸盤（6 1)，吸盤（6 裝設於基板移動裝置（5〇 )之懸臂（5 4 )上，每一吸盤（6 1 )並為彈性元件（ 6 2 )頂抵，該彈性元件可為彈簧，每一吸盤（6 1 )並 具檢測吸力装置。 茲舉一卸載基板之實施例說明如下，而裝載基板，則 •係反向操作之態樣，則不再贅述。 參閱第五圖所示，基板承載座（1 2 )設有傾斜l形 裝載部（121)，裝載部（121)上疊設有數基板（ 11)，配合之輸送設備（圖中未示）將其一基板承載座 (1 2)送炱機台（1〇)(如第一圖所示）之承載座輸 入裝置（20)後，由承載座輸入裝置（20)接續將基 板承載座（1 2 )往前送，直到基板承載座（1 2 )為阻 _ 擋件（1 3 )阻擋為止。 參閱第三、第六圖所示’接續上述動作，承載座支撐 與权正裝置（4 0 )之兩組十八度斜度之調整座（4 1 ) 、（41 a)分別斜上動作，使得支撐平台（43)、( 4 3 a )逐漸上升而將基板承載座（1 2)撐離承載座輸 入裝置（20)，同時調整上下水平，並藉由兩微調結構 (42) 、 （ 4 2 a )分別微調調整前後左右關係，而其 調整結果隨時配合兩超音波測距結構（4 6 )測得數值再 行微調，直刻完全精準為止。 9 M309575 參閱第四、第六圖所示，基板之翻轉裝卸，主要以基 板移動裝i (50)配合基板吸取裝置（6〇)所達成， 其中忒基板移動裝f (5〇)以動力元件（5 "驅動差 齒減速機（5 2 )以達到精確的旋擺角度，並帶動傳動軸 (5 3 )及懸臂（5 4 )精碟的擺動，懸臂（5 4 )擺動 後基板吸取裝置（6 0 )之吸盤（6 i )#以貼靠於基板 承載座（12.)之最外層基板（11)上，啟動抽真空設 備使每—吸盤（6 1 ) i生真卜及力吸住基板（1 1 )， 反向旋擺基板移動裝置（5 0 )，基& ( i i )則被吸住 往機台（1 0 )前方送出，待其基板（工工）已位於製程With regard to the techniques, means and functions of the present invention, a preferred embodiment will be described in detail with reference to the drawings, and it is believed that the above-mentioned purpose and characteristics of the present invention can be obtained from an in-depth and specific understanding. . [Embodiment] Referring to the unloading machine shown in the first to fourth figures, the system includes: The present invention provides a substrate flipping machine (10) (as shown in Fig. 6), a carrier input I The device (20) is loaded and unloaded by the machine (1 〇) (the direction of the work is the front; the set (20) (as shown in the second figure), the rear of the transfer (1 〇) is loaded forward Having at least one 7 M309575 'loop conveyor belt (2 1 ) 'the conveyor belt (2 1 ) and a power unit (2 2) with a brake, the power element (2 2) can be a motor After the conveyor belt (2 1) is connected to at least one pressure cylinder (23), the pressure cylinder (23) may be a pneumatic cylinder or a hydraulic cylinder, and the conveyor belt (21) is adjusted by the pressure cylinder (23). Horizontal or inclined angle; a carrier output device (30) comprising a plurality of transport rods (3 1 ) parallel to the left and right sides of the machine (10), each of the transport rods (3 1 ) being belted (3 2 ) Connected, the belt (3 2 ) is connected to a power component (33) with a brake; a carrier support and correction device (40) (shown as the first and third _), including two groups Adjustable seats (41) and (41a) with independent tilt angles (18 degrees optimal), fine adjustment structures (4 2 ) and (4) on the adjustment seats (41) and (4 1 a ) 2a), fine-tuning structures (4 2 ), ( 4 2 a ) are further provided with support platforms (43), (43 a), adjustment seats (41), (4la) and • fine-tuning structures (4 2 ), (4 2 a ) Each has its own independent power components (4 4 ) ' ( 4 4 a ), ( 4 5 ), ( 4 5 a ); at least two corrected ultrasonic ranging are arranged in front of the machine (1 〇) Structure (4 6) '忒 Ultrasonic ranging structure (4 6 ) The distance measurement result is used as the basis for adjusting the distance between the adjustment seat (4 work), (41a) and the fine adjustment structure (42), (42a); (5 〇) (as shown in the fourth figure), which consists of a power component (5 1 ) that drives a precision differential gear reducer (5 2 ) to achieve a fairly accurate swing angle, a differential gear reducer (5 2 ) Connect an 8 M309575 - drive shaft (5 3 ), and the drive shaft (5 3 ) is fixed with a number of cantilevers (5 4 a substrate suction device (60) (as shown in the fourth figure), including several suction cups (6 1), Suction cup (6 mounted on the substrate On the cantilever (5 4 ) of the moving device (5 〇), each suction cup (6 1 ) is abutted against an elastic member ( 6 2 ), and the elastic member can be a spring, and each suction cup (6 1 ) has a suction force. The embodiment of the present invention is described below, and the substrate is loaded, and the reverse operation is omitted. Referring to the fifth figure, the substrate carrier (12) is provided with a tilted l-shaped loading portion (121), and a plurality of substrates (11) are stacked on the loading portion (121), and the matching conveying device (not shown) will be After a substrate carrier (12) is fed to the carrier input device (20) (as shown in the first figure), the substrate carrier (20) is connected to the substrate carrier (1) 2) Forward until the substrate carrier (1 2 ) is blocked by the stopper _ block (1 3 ). Referring to the third and sixth figures, the two sets of eighteen degrees of inclination adjusters (4 1 ) and (41 a) are respectively inclined upwards. The support platforms (43), (43 3 a ) are gradually raised to support the substrate carrier (12) away from the carrier input device (20) while adjusting the upper and lower levels, and by two fine adjustment structures (42), (4) 2 a) Fine-tune the adjustment before and after the left and right relationship, and the adjustment result can be adjusted with the two ultrasonic ranging structures (4 6 ) at any time to fine-tune the value. 9 M309575 Referring to the fourth and sixth figures, the flipping and unloading of the substrate is mainly achieved by the substrate moving device i (50) and the substrate suction device (6〇), wherein the substrate is mounted with the f (5〇) as the power component. (5 " drive differential gear reducer (5 2 ) to achieve precise swing angle, and drive the drive shaft (5 3 ) and the cantilever (5 4 ) fine disc swing, the cantilever (5 4 ) swing after the substrate suction device (6 0 ) sucker (6 i )# is placed on the outermost substrate (11) of the substrate carrier (12.), and the vacuuming device is activated to make each sucker (6 1 ) i The substrate (1 1 ) is moved, the reverse rotation substrate moving device (50), the base & (ii) is sucked to the front of the machine (10), and the substrate (worker) is already in the process
之輸送結構（1 4 )卜Hi 篮士L A 4 '上時，釋放吸盤（6 1 )吸力，基板 (11)脫離基板吸取裝置（6〇)，而由製程之輸送結 構（1 4 )送至製程設備。 參閱第六圖所示’基板承載座（1 2 )上之基板（i 1)被取走一片，招立、占、t 曰波測距結構（4 6 )測到距離有所 改變時’乃得以驅動i 動承载座支撐與校正裝置（4〇)(如 第三圖所示）之兩分别^ 旳刀別獨立之調整座（41) 、 （4la )及兩分別獨立之微靖姓 微凋結構（4 2 )、（ 4 2 a )前後左 右上下各方向之撒靖，丄 _ 十八度角可產生升降及前進後退變 化，而兩獨立之調整座 度（4 1 ) 、（ 4 1 a )又可自行調 整以校正基板承載座「 戰迮（1 2 )單側之升降前後誤差，而兩 .r , 0, . χ)、（423)可精確微調基板承 載座（1 2 )早侧之兪你^ ^ 誤差值，直到兩超音波測距結構 (4 6 )測得距離相回 ，而遠近至定值，則可進行第二片 10 M309575 •基板（1 1 )之送出；依序達到所有基板（1 利卸載送出，而清空後之基板承載座（二2 ) 輸出裝置（30)將之由機台（1〇)兩側輸 圖所不），滿載之基板承載座（i 2 )則又為 裝置（2 0 )輸入（如第五圖所示），接續後 ，據此達到全自動化之基板翻轉裝、卸載機功 本創作功效增進之處如下： _ 1、達到全自動化之基板裝、卸載，並在 載完成後，传以自動更換另一基板承載座，進 之裝、卸載動作。 2、 自動檢測每次送出基板後之改變量， 後續基板位置均能維持固定，以使基板移動裝 吸取裝置之旋擺吸取基板動作可以順利達成。 3、 當有基板是損壞或有裂紋時，造成某 不足時，懸f退回待命位置，操作人員即可將 • 排除，可避免瑕疵品進入製程者。 前文係針對本創作之較佳實施例為本創作 進行具體之說明；惟，熟悉此項技術之人士當 本創作之精#與原則下對本創作進行變更與修 變更與修改’皆應涵蓋於如下f請專利範圍所 中。 【圖式簡單說明】 第一圖：係本創作之立體示意圖。 第二圖：係、本倉Η乍之承載座輸入裝置立體示意 1 )均可順 則為承栽座 出（如第七 承載座輪入 續卸載動作 效者。 基板裝、卸 行另一循環 並隨時調整 置配合基板 一吸盤吸力 4貝壞之基板 之技術特徵 可在不脫離 改，而該等 界定之範_ 圖0 M309575 第三圖 第四圖 第五圖 第六圖 係本創作之調整座立體示 係本創作之基板移動裝置立體示意圖。 係本創作之基板承載座送入機台之動 係本創作之基板送至製程之輪送姓2不思圖。 。 、。稱動作示意圖When the transport structure (1 4 ) is on the Hi basket LA 4 ', the suction cup (6 1 ) is released, and the substrate (11) is separated from the substrate suction device (6〇), and is sent to the transport structure (1 4 ) of the process. Process equipment. Referring to the figure shown in Figure 6, the substrate (i 1) on the substrate carrier (1 2) is taken away, and the distance, the distance, and the c-wave distance measurement structure (4 6 ) are changed. It is able to drive the two movable support support and correction device (4〇) (as shown in the third figure). The separate adjustment seats (41), (4la) and the two independent Weijing surnames Structures (4 2 ), ( 4 2 a ) are spread out in the front, back, left, and right directions. 丄 _ 18 degrees angle can produce ups and downs and forward and backward changes, while two independent adjustments (4 1 ), ( 4 1 a ) It is also self-adjusting to correct the front and rear errors of the substrate carrier "1 ) 单 (1 2 ), and the two.r, 0, . χ), (423) can finely adjust the substrate carrier (1 2 ) early side After that, you ^ ^ error value, until the two ultrasonic ranging structure (4 6) measured the distance back, and the distance is close to the fixed value, then the second piece 10 M309575 • the substrate (1 1 ) can be sent out; Reach all the substrates (1 unloading and unloading, and the empty substrate carrier (2) output device (30) will be driven by the machine (1〇) on both sides) The substrate carrier (i 2 ) is also input to the device (20) (as shown in the fifth figure). After the connection, the fully automated substrate flipping and unloading machine functions are enhanced as follows: : _ 1. Fully automated substrate loading and unloading, and after loading, transfer automatically to replace another substrate carrier, and then load and unload. 2. Automatically detect the amount of change after each substrate is sent, follow-up The position of the substrate can be maintained fixed, so that the movement of the substrate to move the suction device of the substrate can be smoothly achieved. 3. When the substrate is damaged or has cracks, when the defect is caused, the suspension f is returned to the standby position, and the operator is Excludes • to prevent the product from entering the process. The previous section describes the creation of the preferred embodiment of the creation; however, those who are familiar with the technology are the author of this creation and the principle The changes and modifications should be covered in the following patent scope. [Simplified illustration] The first picture: a three-dimensional diagram of the creation. The stereo input of the input device of the system and the warehouse of the warehouse is 1). It can be used as the bearing seat. (If the seventh bearing seat wheel is in the unloading effect, the substrate can be loaded and unloaded for another cycle and adjusted at any time. The technical characteristics of the substrate with a sucking plate suction force of 4 Å can be used without any change, and the definition of the _ Figure 0 M309575 The third figure The fourth figure The fifth picture The sixth picture is the stereoscopic display system of the creation The three-dimensional schematic diagram of the substrate moving device of the present invention is the substrate of the creation of the substrate carrier into the machine. The substrate of the creation is sent to the process of the process to send the surname 2 without thinking. Schematic diagram
第七圖：係本創作之基板承載座送出機台 4 0 )承載座支撐與校正裝置 【主要元件符號說明】 (1 〇 )機台 (1 2 )基板承載座 (1 3 )阻擋件 (20)承載座輸入裝置 (2 2 )動力元件 (30)承載座輸出裝置 (3 2 )皮帶 之動作示意圖 (1 1 )基板 (1 2 1 )裝載部 (1 4 )製程之輪 〜鞠送結構 (2 1 )輪送帶 (2 3 )壓紅 (3 1 )輸送桿 (3 3 )動力元件Figure 7: Substrate carrier feeding machine for this creation 4 0) Supporting and correcting device for the carrier [Description of main components] (1 〇) Machine (1 2) Substrate carrier (1 3 ) Blocking device (20 ) bearing input device (2 2 ) power component ( 30 ) carrier output device ( 3 2 ) belt operation diagram (1 1 ) substrate (1 2 1 ) loading portion (1 4) process wheel ~ 鞠 transmission structure ( 2 1) Round belt (2 3 ) pressure red (3 1 ) conveyor rod (3 3 ) power unit
(4 1 )調整座 (4 2 )微調結構 (4 3 )支撐平台 (4 4 )動力元件 (45)動力元件 (4 6 )超音波測距結構 (5 1 )動力元件 (5 3 )傳動轴 (6 0 )基板吸取裝置 (4 1 a)調整座 (4 2 a )微調結構 (43a)支擇平台 (44a)動力元件 (45a)動力元件 (5 0)基板移動裝置 (5 2 )差齒減速機 (5 4 )懸臂 (61)吸盤 12 M309575 (6 2 )彈性元件 t 13(4 1 ) Adjusting seat (4 2 ) Fine-tuning structure (4 3 ) Supporting platform (4 4 ) Power component (45) Power component (4 6 ) Ultrasonic ranging structure (5 1 ) Power component (5 3 ) Drive shaft (6 0 ) Substrate suction device (4 1 a) adjustment seat (4 2 a ) fine adjustment structure (43a) selection platform (44a) power component (45a) power component (50) substrate moving device (5 2 ) differential tooth Reducer (5 4 ) Cantilever (61) Suction cup 12 M309575 (6 2 ) Elastic element t 13