M297810 八、新型說明： 【新型所屬之技術領域】 本創作係關於一種研磨機 之研磨機裝置，係藉由線性的 概應隸屬於拋光研磨機結構之 技術領域範_。 【先前技術】 ，尤指一種應用於精密拋光 研磨方式進行抛光研磨，其 應用，運用於抛光研磨機之 許多經由加工所得之產品，在製程中常需對於加工產 品進行拋光及平坦化等加工作業，使產品得到較佳的平括 滑順表面以改善產品的品質，通常藉由研磨機來進行表面 的拋光研磨。加上近年來隨著科技的日新月異，對於… 晶片及晶圓《是平面顯示器玻璃基板等的製㈣程中也藉 由研磨機將其表面拋光平坦&，例如化學機械拋光（ Chemical Mechanical Polishing，CMP)即為常用的技術。 然而一般傳統的化學機械拋光研磨機裝置（8 〇 )的拋光 研磨方式係如第六圖所示，主要係將欲抛光研磨的物件放 置於載具（8 1 )上並對其施壓轉動，使物件與一迴轉的 拋光研磨t (8 2)相抵靠而進行拋光研磨，且於拋光的 過程中需加入研磨漿（83)，使機械拋光研磨過程中同 時進行化學腐蝕作業，因此需對拋光的壓力、速度及時間 進行精密的控制以得到較佳的拋光品質，加上一般係將物 件放置於硬質的工作平台（8 4 )上進行拋光研磨，而容 易因拋光壓力的操作不當而造成脆性物件於拋光研磨的過 程中產生破裂的情形，進而降低拋光研磨的良率，增加加 M297810 工成本’且相對提高精密拋光研磨的困難度。 【新型内容】 因此’本創作人有鑑於現有研磨機裝置於實際使用上 的不足與缺失，特經過不斷的試驗與改良，發展出一種能 改進缺失之創作。 本創作之主要目的，在於提供一種精密的線性拋光研 磨機裝置，其係藉由線性的研磨方式及具撓性的研磨平台 對晶圓等薄型硬脆物件進行拋光研磨，以精簡的研磨機組 裝方式達到精密製造的效果，有效改善物件的拋光品質及 避免物件破裂等問題，不僅可達到簡化研磨機構造而降低 製造成本的㈣，並且能夠改善拋光研磨的操作便利性及 述的創作目的’本創作所運用的技術手 段係在於提供—種精密線性拋光研磨«置，其係包含： -研磨部，該研磨部係包含有一機座，且於該機座的 兩鈿上各裝設一可相對機座轉動之 、，机 驅動兩滾筒轉動的驅動馬達 置有-用以 研磨帶； 4 Μ兩滾㈣外周緣裝設一 一1設於研磨帶之間的承載部，直 有一中空之承載器，其中$ ^ ^ 7載部係包含 以輸送流體之管路，該承:::=外:緣上係設有-用 墊體’其中該塾體上係設有數個* 相結合之 ，且於承載器外設有—容置、°°内°M目通的孔洞 谷置承栽器的底座； -襄設於機座上且相對於 得勠邛，其中該轉 M297810 動卩係在機座介於兩滾筒之間的一側邊設有一轉動馬達， 且於相對轉動馬達的機座另一側邊設有一架板，且於該架 板上係設有_紝人_ > …&板’又轉動部設有一貫穿結合板且可相 、皆。口板移動之中空的轉動軸，而轉動部另設有一與轉動 車M目結合之方形框板，其中轉動轴係穿設於框板的兩端且 在相對於框板的位置上各設有一軸承； 與轉動部相結合之升降部，其中該升降部係設有一 # 與機座相結合之固定板，另設有一裝設於架板上之升降馬 達，该升降馬達設有一可轉動地連接至固定板的升降螺桿 且於升降螺桿上裝設有一升降塊，且於升降塊兩側的固 定板上各設有一滑執，另升降部設有一同時與兩滑執結合 且可相對滑執滑動之升降板，其中該升降板的一端面係與 升降塊相結合而另一端面係與轉動部之框板相結合；以及 與轉動部相結合之吸附部，其中該吸附部係裝設於 研磨帶及框板間的轉動轴上，其包含有一與轉動轴相套合 φ 之吸附框，該吸附框的中心係設有一與轉動軸相連通之孔 洞，另吸附部於吸附框上裝設有一内墊及一外墊，其中内 墊及外墊上係設有數個圓孔，另吸附部於轉動軸的另一端 係設有一與抽風機相連通之接管。 藉由上述技術手段，本創作可藉由滾筒的轉動而帶動 研磨帶’使吸附於吸附框上之物件藉由線性的研磨方式進 行物件表面的抛光研磨作業，並且藉由承載部流體撓性的 來支撐研磨帶，並藉由控制流體喷出量及壓力大小以尚奋 調整支撐拋光研磨帶壓力，可避免物件於研磨過程中產生 7 M297810 破裂的現象，不僅可有效地改善物件研磨的品質，並能有 效降低物件破裂毀損的比率，以藉此達到精密研磨及^便 操作之目的。 【實施方式】 參照第一至五圖所示，其係包括有： -研磨部（2 0 )，其中該研磨部（2 〇 )係包含有M297810 VIII. New description: [New technical field] This creation is about a grinder of a grinder, which is a technical field of polishing grinder structure by linear generalization. [Prior Art], especially one used in the precision polishing method for polishing and polishing, and its application is applied to a plurality of products obtained by processing the polishing machine, and the processing and polishing operations of the processed products are often required in the process. The product is provided with a better smooth and smooth surface to improve the quality of the product, and the surface is usually polished by a grinder. In addition, with the rapid development of technology in recent years, the wafer and wafer "is a flat-panel display glass substrate, etc. (4) also polished the surface by a grinder, such as chemical mechanical polishing (Chemical Mechanical Polishing, CMP) is a commonly used technology. However, the polishing method of the conventional chemical mechanical polishing grinder device (8 〇) is as shown in the sixth figure, mainly for placing the object to be polished and polished on the carrier (8 1 ) and pressing it. The object is polished against the rotating polishing t (8 2), and the polishing slurry (83) is added during the polishing process to simultaneously perform chemical etching during the mechanical polishing process, so the polishing is required. The pressure, speed and time are precisely controlled for better polishing quality. In addition, the object is placed on a hard working platform (8 4 ) for polishing, which is easy to cause brittleness due to improper operation of polishing pressure. The object is broken during the polishing process, which reduces the polishing yield, increases the cost of adding M297810, and relatively improves the difficulty of precision polishing. [New content] Therefore, the creator has developed a kind of creation that can improve the lack of continuous improvement and improvement in view of the inadequacy and lack of the actual use of the existing grinder device. The main purpose of this creation is to provide a precision linear polishing machine that polishes thin hard and brittle objects such as wafers by linear grinding and flexible grinding platforms for assembly with a streamlined grinder. The method achieves the effect of precision manufacturing, effectively improves the polishing quality of the object and avoids the problem of object rupture, etc., not only can simplify the structure of the grinder and reduce the manufacturing cost (4), and can improve the operation convenience of the polishing and the purpose of the creation. The technical means used in the creation is to provide a precision linear polishing and polishing apparatus, which comprises: - a grinding part, the grinding part comprises a machine base, and each of the two bases of the machine base is provided with a relative When the base rotates, the drive motor that drives the two drums rotates is provided with - for the grinding belt; 4 Μ two rolls (four), the outer circumference is provided with a bearing portion disposed between the grinding belts, and a hollow carrier is directly provided. , wherein the $ ^ ^ 7 carrier contains a conduit for transporting fluid, the bearing::: outer: the edge is provided with a pad body, wherein the body is provided with a plurality of * phases In addition, the base of the carrier is placed outside the carrier, and the hole is placed in the valley of the hole; the raft is placed on the base and relative to the raft, wherein the M297810 is moved The rafting system is provided with a rotating motor on one side of the base between the two rollers, and a plate is arranged on the other side of the base of the opposite rotating motor, and the slab is provided on the frame _ >...& plate's rotating part is provided with a penetrating plate and can be phased. a hollow rotating shaft of the mouth plate is moved, and the rotating portion is further provided with a square frame plate combined with the rotating car M mesh, wherein the rotating shaft is disposed at two ends of the frame plate and is respectively provided at a position relative to the frame plate a lifting portion combined with the rotating portion, wherein the lifting portion is provided with a fixing plate combined with the machine base, and a lifting motor mounted on the frame plate, the lifting motor is provided with a rotatably connected a lifting screw to the fixing plate and a lifting block mounted on the lifting screw, and a sliding plate on each of the fixing plates on both sides of the lifting block, and the lifting portion is provided with a sliding joint at the same time and sliding relative to the sliding The lifting plate, wherein one end surface of the lifting plate is combined with the lifting block and the other end surface is combined with the frame plate of the rotating portion; and the adsorption portion combined with the rotating portion, wherein the adsorption portion is mounted on the grinding portion The rotating shaft between the belt and the frame plate comprises a suction frame which is engaged with the rotating shaft, wherein the center of the adsorption frame is provided with a hole communicating with the rotating shaft, and the adsorption portion is mounted on the adsorption frame. Inner pad and one The outer pad has a plurality of circular holes formed in the inner pad and the outer pad, and the other end of the rotating shaft is connected with a connecting pipe connected to the exhaust fan. By the above technical means, the present invention can drive the polishing belt by rotating the drum to make the object adsorbed on the adsorption frame perform the polishing operation on the surface of the object by linear grinding, and the fluid is flexible by the bearing portion. In order to support the abrasive belt, and by controlling the fluid discharge amount and the pressure to adjust the pressure of the polishing belt, the phenomenon of 7 M297810 cracking during the grinding process can be avoided, which not only can effectively improve the quality of the object grinding, And can effectively reduce the rate of damage and damage of the object, in order to achieve the purpose of precision grinding and easy operation. [Embodiment] Referring to the first to fifth figures, the method includes: - a polishing portion (20), wherein the polishing portion (2") includes
-機座（2D ’且於該機座（21)的兩端上各裝設一 可相對機座（21)轉動之滾筒（2 ， 、 ^ f η η \ rr 並於其中一滾 ^ 2 )的一端緣與一齒輪（2 3 )相ϋ人 r 9 Τ X ^ ^ d d )相接合，且該機座 C 2 1 )底部相對於該齒輪（ 齒輪⑴）之驅動馬達？)另的位置係裝設有-具 藉由-裝設於滾筒（2Π二：部（20)係 4)奸（2二 輪（23)及驅動馬達（2 = )^(25)間的鏈條（2 帶動滾筒（22)轉動，另於兩滾 ^達（24) 設一研磨帶（2 7 ) 2 )的外周緣裝 22)的轉動而循環作動； …？）可猎由滾筒（ 一裝設於研磨帶（？ 中該承載部（30)係包含一^^載部（3〇)，其 器（31),其中該承裁 ®柱型且為中空之承載 用以輸送流體之管路（ 的外周緣上係設有一 一與承载器（3 i )相沾2 )，該承裁部（3 0 )另設有 1 )相結合之墊體Γ Q 、 (3 3 )上係設有數個與承载器 ），其中該墊體 (3 4 )，另承裁部f q )内部相通的孔洞 〇 )另設有-容置承载器（3 1 M297810 )的方框形底座（3 5 ); 一裝設於機座（2 1 )上相對於承載部（3 0 )之轉 動部（40) ’其中該轉_ (4Q)係設有_轉動馬達 (4 1 )，而該轉動馬達（4 1 )係裝設在機座（2丄） "於兩滾肖（2 2 )之間的一側邊且設有一皮帶輪"2 )，轉動部（40)另於相對轉動„(41)的機座（ 2 1 )另-側邊設有一略呈门型之架《（4 3 )且於該架 板（4 3 )的一側邊上係設有一結合板（4 4 )，又轉動 部：4 〇 )設有-貫穿轉動軸（4 5 )，且轉動軸（4 5 )係可相對結合板（4 4 ) 轉動軸（4 5 )之軸向移動 -中。亥轉動車由（4 5 )為一中空之軸體，且該轉動軸（ 4 5)上係設有一與轉動馬達（4丄）上皮帶輪 相對之皮帶輪（46)，使轉動馬達（41)藉由一皮帶 (47)而帶動轉動軸（45)作動，又轉動部（4〇) 另σ又有與轉動軸（4 5 )相結合之方形框板（4 8 )， 其中轉動軸（4 5 )係穿設於框板（4 8 )的兩端且在相 對於框板（4 8 )的位置上各設有一軸承（4 9 ); 一與轉動部（4 0 )相結合之升降部（5 〇 )，其中 该升降部（5 0 )係設有一與機座（2 1 )相結合之固定 板（5 1 )，另設有一裝設於架板（4 3 )上之升降馬達 (52)，该升降馬達（52)設有一可轉動地連接至固 疋板（5 1 )的升降螺桿（5 3 )，且於升降螺桿（5 3 )上裝設有一升降塊（5 4 )，且於升降塊（5 4 )兩側 的固定板（5 1 )上各設有一滑軌（5 5 )，另升降部（ M297810 5 Ο )設有一同時與兩滑執（5 5 )結合且可相對滑軌 5 5 )滑動之升降板（5 6 ) ’其中該升降板（5 6 ) 一端面係與升降塊（5 4 )相結合而另一端面係與轉動 (4 0 )之框板（4 8 )相結合’使升降馬達（5 2 ) 過升降塊（5 4 )而使升降板（5 6 )帶動框板（4 8 相對機座（2 1 )升降移動；以及 一與轉動部（4 0 )相結合之吸附部（6 0 )，其 該吸附部（6 0 )係裝設於轉動軸（4 5 )上且位於研 帶（27)及框板（48)之間，其包含有一與轉動車由 4 5 )相套合之吸附框（6 1 )，且該吸附框（6 1 ) 中心係設有一與轉動軸（4 5 )相連通之孔洞（6 1 1 ’另吸附部（6 0 )於吸附框（6 1 )上裝設有一略呈 型之硬質内墊（62)及一軟質外墊（6 3)，其中内 (6 2 )及外墊（6 3 )上係設有數個圓孔（6 2 1 ) 6 3 1 )，另吸附部（6 0 )包含有一設置於轉動車由（ 5)另一端且與抽風機相連通之接管（64)，並藉由 風機的作動而將欲拋光研磨之物件吸附於外墊（6 3 ) 〇 本創作線性拋光研磨機裝置（1 0 )之作動方式& 看第 至五圖所示，其中係先將欲拋光研磨之物件放 吸附部（6 〇 )的外墊（6 3 )上，並啟動抽風機，將 乳經由轉動軸（4 5 )及吸附框（6 1 )抽出而使物 附於外墊（6 3 )上，且藉由升降馬達（5 2 ik ( ^ A \ 工的升 A 及升降板（56)帶動轉動部 )白勺才匡 的 部 透 中 磨 ( 的 ) 圓 墊 ( 4 抽 10 M297810 (48)及轉動軸 3 〇 )的流體在管路（3 °㈣同日守藉由承載部（ 藉由塾體（33)的孔洞（3=载器、(31)内流動並 磨墊（2 7 )，進而伟π 贺出流體來支撐拋光研 使吸附於外墊（ 磨帶（2 7 )撓性地相接 6 3 )上之物件與研 轉動馬達（41)的作叙驅動馬達（24)及 心的作動即 士 光研磨機裝置（i 〇 )❹ 本創作之精密線性拋 )的抛光研磨效果。 :本創作同樣於抛光研磨過程中亦 料回收槽：。)Γ研磨帶（27)的下方裝設-漿 中。 研磨漿回收至漿料回收槽（7 〇 ) =上述技術手段，本㈣可藉由㈣（Μ 動而4研磨帶（27) ’使吸附於吸附框（Η)上之 ^勿件藉由線性的研磨方式進行物件表面的拋光研磨，並且 猎f承載部（3 1 )流體的撓性來支撐研磨帶（2 7 )， ::由““IL體贺出！及壓力大小以適當調整支撐拋光研 磨“ 2 7 ) ®力，可避免物件於研磨過程中產生破裂的 現象’不僅有效地改善物件研磨的品質，且有效降低物件 破裂毀損的情形，達到精密研磨及方便操作之目的。 【圖式簡單說明】 第一圖係本創作精密線性撤光研磨機裝置之外觀立體 圖。 第二圖係本創作精密線性拋光研磨機裝置之承載部之 立體分解圖。 11- a base (2D ' and a roller (2, , ^ f η η \ rr for rotating the base (21) on each of the two ends of the base (21)) One end edge is engaged with a gear (2 3 ) and the bottom of the base C 2 1 ) relative to the drive motor of the gear (gear (1)). The other position is equipped with a chain (with 2) mounted on the drum (2nd two: part (20) 4) (2nd round (23) and drive motor (2 = )^(25) ( 2 The rotating drum (22) is rotated, and the rotation of the outer peripheral edge 22) of the grinding belt (2 7 ) 2 ) is performed in two rollings (24); ) can be hunted by a roller (one mounted on the grinding belt (the middle of the bearing portion (30) contains a ^ (3), the device (31), wherein the bearing is cylindrical and hollow The pipeline for carrying the fluid (the outer circumference of the pipeline is provided with a carrier 2 (3 i )), and the socket (30) is further provided with a combination of the cushions Γ Q (3 3 ) is provided with a plurality of carriers, wherein the pad body (3 4 ), the other hole of the other part of the cutting part fq ) is further provided with a receiving carrier (3 1 M297810 ) a frame-shaped base (3 5 ); a rotating portion (40) mounted on the base (2 1 ) relative to the carrying portion (30), wherein the rotating _ (4Q) is provided with a rotating motor (4) 1), the rotating motor (4 1 ) is mounted on the base (2丄) " on one side between the two rollers (2 2 ) and is provided with a pulley " 2 ), the rotating portion (40 In addition, the base (2 1 ) of the relative rotation „(41) is provided with a slightly door-shaped frame “(4 3 ) on the side and a side of the shelf (4 3 ) is provided) The coupling plate (4 4 ) and the rotating portion: 4 〇) are provided with a through-rotation shaft (4 5 ) and rotated (4 5 ) is axially movable relative to the rotating shaft (4 5 ) of the coupling plate (4 4 ). The turning vehicle is (4 5 ) is a hollow shaft body, and the rotating shaft (45) The utility model is provided with a pulley (46) opposite to the pulley on the rotating motor (4丄), so that the rotating motor (41) drives the rotating shaft (45) to be actuated by a belt (47), and the rotating part (4〇) is further σ There is also a square frame plate (4 8 ) combined with the rotating shaft (45), wherein the rotating shaft (45) is threaded at both ends of the frame plate (48) and opposite to the frame plate (48) Each of the positions is provided with a bearing (4 9 ); a lifting portion (5 〇) combined with the rotating portion (40), wherein the lifting portion (50) is provided with a combination with the base (2 1 ) The fixing plate (5 1 ) is further provided with a lifting motor (52) mounted on the frame plate (43), and the lifting motor (52) is provided with a lifting and rotatably connecting to the fixing plate (5 1 ) a screw (5 3 ), and a lifting block (5 4 ) is arranged on the lifting screw (5 3 ), and a sliding rail is arranged on each of the fixing plates (5 1 ) on both sides of the lifting block (5 4 ) (5) 5), another lifting department (M297810 5 Ο) a lifting plate (5 6 ) which is combined with two sliding handles (5 5 ) and slidable relative to the sliding rails 5 5 ), wherein one of the lifting plates (5 6 ) is combined with the lifting block (5 4 ) The end face is combined with the rotating (4 0 ) frame plate (48) to make the lifting motor (5 2 ) pass the lifting block (5 4 ) and the lifting plate (5 6 ) to drive the frame plate (4 8 relative to the frame (2 1 ) lifting movement; and an adsorption portion (60) combined with the rotating portion (40), the adsorption portion (60) is mounted on the rotating shaft (45) and located in the research belt ( 27) and between the frame plate (48), comprising a suction frame (6 1 ) which is engaged with the rotating car by 4 5 ), and the center of the adsorption frame (6 1 ) is provided with a rotating shaft (45) The communicating hole (6 1 1 'the other adsorption part (60) is provided with a slightly rigid inner pad (62) and a soft outer pad (63) on the adsorption frame (6 1 ), wherein (6 2 ) and the outer pad (6 3 ) are provided with a plurality of round holes (6 2 1 ) 6 3 1 ), and the other adsorption portion (60) includes a set on the other end of the rotating car (5) and is pumped The fan is connected to the nozzle (64) and is operated by the fan Polished and polished objects are adsorbed to the outer pad (6 3 ). The operation method of the linear polishing machine (10) is shown in Figure 1-5, in which the object to be polished is placed in the adsorption section ( 6 〇) on the outer pad (63), and start the exhaust fan, the milk is extracted through the rotating shaft (45) and the adsorption frame (6 1 ) to attach the object to the outer pad (63), and by Lifting motor (5 2 ik ( ^ A \ 升 升 A and lifting plate (56) to drive the rotating part) 匡 匡 部 透 ( ( ( 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 〇) The fluid in the pipeline (3 ° (4) on the same day is kept by the bearing part (through the hole of the 塾 body (33) (3 = carrier, (31) flows and grinds the pad (2 7), and then Wei π He The fluid is supported to support the polishing and grinding of the object on the outer pad (the belt (2 7) is flexibly connected to 6 3 ) and the driving motor (24) of the grinding motor (41) and the action of the heart Polishing and polishing effect of the light grinder device (i 〇) 精密 The precision linear polishing of this creation. : This creation is also used in the recycling process during the polishing process: The Γ abrasive belt (27) is installed under the slurry. The slurry is recovered to the slurry recovery tank (7 〇) = the above technical means, this (4) can be linearly adsorbed on the adsorption frame (Η) by (4) (Μ) and 4 abrasive belt (27) The grinding method is used to polish and polish the surface of the object, and the flexibility of the fluid of the f-bearing portion (3 1 ) is used to support the polishing belt (2 7 ), :: by "" IL body congratulation! and pressure to properly adjust the support polishing Grinding "2 7 ) ® force can avoid the phenomenon of cracking of the object during the grinding process' not only effectively improve the quality of the object grinding, but also effectively reduce the damage of the object, and achieve the purpose of precision grinding and convenient operation. Brief Description] The first picture is a perspective view of the appearance of the precision linear light-removing grinder device. The second picture is an exploded view of the bearing part of the precision linear polishing machine.
M297810 第三圖係本創作精密線性拋光研磨機裝置 局部立體圖。 第四圖係本創作之精密線性拋光研磨機袭 <局部立體圖。 第五圖係本創作之精密線性拋光研磨機裝 之局部立體分解圖。 第六圖係現有研磨機之操作示意圖。 【主要元件符號說明 之轉動部之 置之升降部 置之吸附部M297810 The third picture is a partial perspective view of the precision linear polishing machine. The fourth picture is the precise linear polishing machine of this creation. The fifth picture is a partial exploded view of the precision linear polishing machine installed in this creation. The sixth figure is a schematic diagram of the operation of the existing grinder. [Main component symbol description of the moving part of the rotating part of the adsorption section
(1 0 )研磨機裝置 (2 0 )研磨部 (2 1 )機座 (2 3 )齒輪 (2 5 )齒輪 (2 7 )研磨帶 (3 0 )承載部 (3 1 )承載器 (3 3 )墊體 (3 5 )底座 (4 0 )轉動部 (4 1 )轉動馬達 (4 3 )架板 (4 5 )轉動軸 (4 7 )皮帶 (4 9 )軸承 (2 2 )滾筒 (2 4 )驅動馬達 (2 6 )鏈條 (3 2 )管路 (3 4 )孔洞 (4 2 )皮帶輪 (4 4 )結合板 (4 6 )皮帶輪 (4 8 )框才反 12 M297810 (5 Ο )升降部 (5 1 )固定板 (5 3 )升降螺桿 (5 5 )滑軌 (6 0 )吸附部 (61)吸附框 (6 2 )内墊 (6 3 )外墊 (6 4 )接管 (7 0 )漿料回收槽 (8 0 )研磨機裝置 (8 1 )載具 (8 3 )研磨漿 (5 2 )升降馬達 (5 4 )升降塊 (5 6 )升降板 (6 1 1 )孔洞 (6 2 1 )圓孔 (6 3 1 )圓孔 (8 2 )拋光研磨墊 (8 4 )平台(1 0) Grinder device (20) Grinding unit (2 1 ) Base (2 3 ) Gear (2 5 ) Gear (2 7 ) Grinding belt (30) Bearing (3 1 ) Carrier (3 3 ) cushion body (3 5 ) base (4 0 ) rotating part (4 1 ) rotating motor (4 3 ) shelf plate (4 5 ) rotating shaft (4 7 ) belt (4 9 ) bearing (2 2 ) roller (2 4 ) Drive motor (2 6 ) Chain (3 2 ) Pipe (3 4 ) Hole (4 2 ) Pulley (4 4 ) Combined plate (4 6 ) Pulley (4 8 ) Frame is reversed 12 M297810 (5 Ο ) Lifting section (5 1 ) Fixing plate (5 3 ) Lifting screw (5 5 ) Slide rail (60) Adsorption section (61) Adsorption frame (6 2 ) Inner pad (6 3 ) Outer pad (6 4 ) Take-over pipe (7 0 ) Slurry recovery tank (80) Grinder unit (8 1 ) Carrier (8 3 ) Grinding slurry (5 2 ) Lifting motor (5 4 ) Lifting block (5 6 ) Lifting plate (6 1 1 ) Hole (6 2 1) Round hole (6 3 1 ) round hole (8 2 ) polishing pad (8 4 ) platform
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