M286363 八、新型說明： 【新型所屬之技術領域】 本創作係關於一種光強度分佈調整裝置，尤指一種適 用於一光學檢測系統且可產生「集中」與「擴散」兩種不 5 同光強度分佈的光強度分佈調整裝置。 【先前技術】 近年來，台灣的TFT-LCD產業蓬勃發展，所使用之玻 璃基板的尺寸越來越大，從原本可用雙手即可拿取的3·5 10 代基板已逐漸擴大到長寬尺寸皆接近2公尺的6代基板，此 時已無法利用雙手拿取玻璃基板。此外，除了面積的擴大 之外’玻璃基板的厚度也逐漸地縮減。所以在TFT—LCD的 製造過程中，玻璃基板皆必須藉由機械手臂在各製程機台 之間移動。 15 而的製造過程中，玻璃基板在經歷各製程 階段後之表面品質的控管是非常重要的，因為如果沒有及 時將有瑕疫的玻璃基板從生產線上挑除，所浪費的不僅有 後續製程的材料的成本，更造成寶貴製程時間的浪費，大 幅影響整個液晶廠的產量。 20 目前，業界已經定義出超過170種以上發生於玻璃基 板上的瑕疯’且瑕疯種類數目仍持續增加中。此外，欲檢 測出上述各種不同的瑕疵，則必須嚴格遵守各種不同的檢 測條件才可順利地檢測出各種瑕疯，如特定的玻璃基板傾 斜角度、特定的光源強度、特定的光源波長或特定的光源 5 M286363 強度分佈。因此，提供目視檢測所需之光源的燈箱品質非 常重要。 圖1係目前業界應用於大面積玻璃基板表面瑕疵目視 檢測之光學檢測系統的示意圖，其中玻璃基板丨被置放於承 5載機台2上，上燈箱3及背燈箱4則分別位於承載機台2的上 方及後方，以提供目視檢測玻璃基板瑕疵所需的光源。此 外，上燈箱3及背燈箱4均為所謂「雙光源燈箱」，它們均 能提供兩種不同波長光源，如白光及黃光。 至於目視檢測玻璃基板瑕疵的步驟，則敘述於下： 10 首先，依據所欲檢測之瑕疵的種類，將玻璃基板^周 整至一特定角度。接著，將特定波長及特定入射角度的光 源照射於玻璃基板1上（在圖丨的狀況中，係點亮背燈箱4提 供光源），再藉由經過嚴格訓練之品管員5以目視的方式檢 視玻璃基板1的整個表面，判斷是否有任何瑕疵存在。 15 當欲檢測另一種瑕疵時，則重複上述步驟，即在依序 调整玻璃基板1角度及光源波長後，再以目視的方式檢查玻 璃基板的整個表面。亦即，必須依據所欲檢測之玻璃瑕疵 的不同，適當地選擇使用不同燈箱的光源及玻璃基板的旋 轉角度，以使光源的光線於玻璃基板上進行正面透射、反 20面透射、正面反射或反面反射等動作，才能正確地檢測玻 璃基板是否存在任何缺陷。 如前所述，光源之波長對於是否能檢測出玻璃基板之 缺陷非常重要。因此’目前業界所使用之燈箱均為所謂之 6 M286363 又光源k箱」，即可依照檢測的需要而提供不同波長光 源的燈箱，其構造如下所示。 圖2A及圖2B分別係第一種「雙光源燈箱」於提供黃光 及白光時的結構示意圖，其中螢光燈管21及鈉燈22分別排 5列於燈箱中，反射板23將鈉燈22所發射之光線朝向擴散板 24反射，再傳遞至外界。此外，在螢光燈管21及鈉燈u之 間，具有一百葉窗狀的遮光板25，其係以氣缸或馬達等方 式帶動而改變其狀態。 在圖2 A的狀況中，螢光燈管2丨係處於關閉狀態，而鈉 10燈22則處於持續開啟的狀態。此外，百葉窗狀的遮光板25 係處於開啟」狀態，使納燈22所發射的光線可以通過並 到達擴散板24。此時，此「雙光源燈箱」提供均勻的黃光 光源。而在圖2B的狀況中，螢光燈管21係處於開啟狀態， 而鈉燈22仍處於持續開啟的狀態。但是，百葉窗狀的遮光 15板25則處於「關閉」狀態以將鈉燈22所發射的光線遮蔽住， 使其無法達擴散板24。此時，此r雙光源燈箱」提供均勻 的白光光源。 圖3A及圖3B分別係第二種「雙光源燈箱」於提供黃光 及白光時的結構示意圖，其中螢光燈管3丨及鈉燈32分別排 20 列於燈箱中，其所發射之光線分別經由擴散板34傳遞至外 界。此外’螢光燈管31排列於遮光板33的上表面，且遮光 板33係以氣缸或馬達等方式帶動而改變其狀態。 在圖3 A的狀況中，發光燈管31係處於關閉狀態，而鈉 燈32則處於持續開啟的狀態。此外，遮光板33係處於「開 M286363 啟」狀態，使鈉燈32所發射的光線可到達擴散板34。此時， 此「雙光源燈箱」提供均勻的黃光光源。而在圖沾的狀況 中，螢光燈管31係處於開啟狀態，而鈉燈32仍處於持續開 啟的狀態。但是’遮光板33則處於「關閉」狀態以將納燈 32所發射的光線遮蔽住，使其無法達擴散板％。此時，此 「雙光源燈箱」便提供均勻的白光光源。M286363 VIII. New description: [New technical field] This creation is about a light intensity distribution adjustment device, especially one that is suitable for an optical detection system and can generate two kinds of light intensity: "concentration" and "diffusion". Distributed light intensity distribution adjustment device. [Prior Art] In recent years, Taiwan's TFT-LCD industry has flourished, and the size of the glass substrate used has been increasing. The 3·5 10th generation substrate that can be taken by both hands has been gradually expanded to length and width. The 6th generation substrate, which is nearly 2 meters in size, is no longer able to take the glass substrate with both hands. Further, in addition to the enlargement of the area, the thickness of the glass substrate is gradually reduced. Therefore, in the manufacturing process of the TFT-LCD, the glass substrate must be moved between the various processing machines by the robot arm. In the manufacturing process, the control of the surface quality of the glass substrate after the various process stages is very important, because if the plague glass substrate is not removed from the production line in time, not only the subsequent process is wasted. The cost of the material is also a waste of valuable process time, which greatly affects the output of the entire liquid crystal factory. 20 Currently, the industry has defined more than 170 types of madness that occur on glass substrates, and the number of madness species continues to increase. In addition, in order to detect the above various flaws, it is necessary to strictly observe various detection conditions in order to smoothly detect various madness, such as a specific glass substrate tilt angle, a specific light source intensity, a specific light source wavelength, or a specific Light source 5 M286363 Intensity distribution. Therefore, the quality of the light box that provides the light source required for visual inspection is very important. FIG. 1 is a schematic diagram of an optical detection system for visual inspection of a large-area glass substrate surface, wherein the glass substrate is placed on the 5-carrier platform 2, and the upper light box 3 and the back light box 4 are respectively located on the carrier. Above and behind the stage 2, a light source required for visually detecting the glass substrate is provided. In addition, the upper light box 3 and the back light box 4 are so-called "dual light source light boxes", which are capable of providing two different wavelength light sources such as white light and yellow light. The procedure for visually detecting the ruthenium of the glass substrate will be described below: 10 First, the glass substrate is rounded to a specific angle depending on the type of ruthenium to be detected. Next, a light source having a specific wavelength and a specific incident angle is irradiated onto the glass substrate 1 (in the case of the figure, the light source is provided to the backlight box 4), and then visually passed through the highly trained quality controller 5. The entire surface of the glass substrate 1 was examined to determine whether any flaws were present. 15 When you want to detect another type of defect, repeat the above steps, after sequentially adjusting the angle of the glass substrate 1 and the wavelength of the light source, and then visually inspect the entire surface of the glass substrate. That is, the light source and the rotation angle of the glass substrate of different light boxes must be appropriately selected according to the difference of the glass crucible to be detected, so that the light of the light source is transmitted on the glass substrate for front side transmission, reverse 20 surface transmission, front side reflection or Actions such as reverse reflection can correctly detect whether there is any defect in the glass substrate. As mentioned earlier, the wavelength of the source is very important for detecting defects in the glass substrate. Therefore, the current light boxes used in the industry are so-called 6 M286363 and light source k-boxes, which can provide light boxes of different wavelengths according to the needs of detection. The structure is as follows. 2A and 2B are respectively a schematic view showing the structure of the first "dual light source light box" for providing yellow light and white light, wherein the fluorescent tube 21 and the sodium lamp 22 are respectively arranged in the light box, and the reflecting plate 23 is provided with the sodium lamp 22 The emitted light is reflected toward the diffusion plate 24 and transmitted to the outside. Further, between the fluorescent tube 21 and the sodium lamp u, a louver-shaped louver 25 is provided, which is driven by a cylinder or a motor to change its state. In the situation of Fig. 2A, the fluorescent tube 2 is in a closed state, and the sodium 10 lamp 22 is in a continuously open state. Further, the louver-like louver 25 is in an open state, so that the light emitted by the illuminator 22 can pass through and reach the diffuser 24. At this time, the “dual light source box” provides a uniform yellow light source. In the case of Fig. 2B, the fluorescent tube 21 is in an open state, and the sodium lamp 22 is still in a continuously open state. However, the louver-like light-shielding 15 plate 25 is in the "closed" state to shield the light emitted from the sodium lamp 22 from reaching the diffusion plate 24. At this time, the r dual light source box provides a uniform white light source. 3A and 3B are respectively a schematic view of the structure of the second "double-source light box" for providing yellow light and white light, wherein the fluorescent tube 3 and the sodium lamp 32 are respectively arranged in the light box, and the emitted light is respectively It is transmitted to the outside via the diffusion plate 34. Further, the fluorescent tube 31 is arranged on the upper surface of the light shielding plate 33, and the light shielding plate 33 is driven by a cylinder or a motor to change its state. In the situation of Fig. 3A, the light-emitting tube 31 is in a closed state, and the sodium lamp 32 is in a continuously open state. In addition, the visor 33 is in the "open M286363" state, so that the light emitted by the sodium lamp 32 can reach the diffuser plate 34. At this time, the "dual light source box" provides a uniform yellow light source. In the case of the image, the fluorescent tube 31 is in the on state, and the sodium lamp 32 is still in the on state. However, the visor 33 is in the "off" state to shield the light emitted by the lamp 32 from reaching the diffuser%. At this point, the “dual light source box” provides a uniform white light source.
10 1510 15
20 但是，上述兩種「雙光源燈箱」均具有幾項缺點，造 成目視檢測玻璃瑕疵的效率無法提升，如下所述： 1.前述之燈箱光源均為直射式，而為了達到發光面的 均句性，整個燈箱的厚度相當厚，進而影響整體目視瑕巍 檢查機的尺寸’佔據較大的空間。 2. 由於納燈在點亮後必需等待15至20分鐘後，盆光強 度才能達到檢測所需的穩定H所以在檢測過程中，納 燈係持續地點亮。因此制自光做為㈣光源時， 必須使用「遮光機構」遮蔽㈣所發射的光線，如此不僅 造成燈箱厚度較厚且結構極為複雜。 3. 當使用鈉燈做為光源時，提供白光之螢光燈必須斷 電。所以在整體檢測過程中，㈣燈必須㈣性開關，大 幅縮紐螢光燈管及其控制器的使用壽命。 擴大板尺寸極大，燈箱的尺寸也必須相對地 牦大，以r足夠面積的均勻光源供檢測 於目前納燈之最長尺寸為110⑽，且其有效發光長L: cm，所以鈉燈必須以相接的方 箱之光源均勾度不佳。 卩册“中，便造成燈 8 M286363 5.由於k官在開始點亮後，其亮度便隨著使用時間的 i曰加而逐漸衰減。但是’由於目前的檢測裝置缺乏監測燈 箱之亮度的機制’所以其無法即時監測光源亮度變化並適 時地向使用者提出警告。對於嚴格要求光源強度穩定之玻 5璃瑕疫檢測程序而言，必須避免發生這種無法監控燈箱亮 度的情況。 综上所述，業界亟需—種可產生「集中」與「擴散」 兩種不同光強度分佈的光強度分佈調整裝置，以提高玻璃 基板瑕疵的檢測效率，減低整體的生產成本。 10 【新型内容】 本創作之光強度分佈調整裝置係應用於一光學檢測 系統中，以檢測一待測物之缺陷，其包括：一光學透鏡層， 此光學透鏡層排列有複數個菲埋耳透鏡；以及-位於此光 15 f透鏡層表面之光開關層，此光開關層具有複數個光調制 =兀：其中’此等光調制單元具有-透明狀態及-霧化狀 心，田此等光调制單元處於此透明狀態時，通過此光強度 刀2凋正衣置之光線的光強度分佈較為集中；當此等光調 單元處於此務化狀態時，通過此光強度分佈調整裝置的 20之光線的光強度分佈較為擴散。 ^本創作之光強度分佈調整裝置所應用之一光學檢測系 統，其包括一具有一發光體及一顏色變換單元的光源裝 置，其提供檢測所需之各種顏色的光源；一導光裝置具有 人此光源裹置連接之導光元件及一位於一相對於此導光 9 M286363 兀件一端之位置的導光鏡片，此導光鏡片係將此光源裝置 所提供之光源轉換為一面光源；一光反射裝置將由導光鏡 片射出之光線反射，使此面光源之光線照射於此光強度分 佈調整裝置；以及一控制裝置，其控制此光源裝置所提供 5 之光源的顏色及強度。 因此，本創作之光強度分佈調整裝置可產生具有「集 中」與「擴散」兩種不同的光強度分佈的光源，且可提供 檢測各種不同種類之光學玻璃的缺陷所需之光源，其比傳 統之僅能提供「擴散」光強度分佈的傳統光源（燈箱）進步 10 許多。此外，在配合前述之光學檢測系統後，本創作之光 強度分佈調整裝置更可提供各種不同強度、不同顏色及不 同光強度分佈（集中及擴散）的光源，大幅提昇檢測出光學 玻璃缺陷的效率，降低因未檢測出光學玻璃缺陷而造成的 後續製程成本浪費。 15 本創作之光強度分佈調整裝置可使用任何種類之材 料於其光開關層之光調制單元中，其較佳為聚合物分散液 晶（PDLC)。本創作之光強度分佈調整裝置可具有任何形狀 ^外型’其外型較佳為平板狀。本創作之光強度分佈調整 裝置可具有任何大小之尺寸，其尺寸較佳與待測物之尺寸 20相近。一應用本創作之光強度分佈調整裝置之光學檢測系 統可使用任何種類之顏色變換單元，其較佳為一具有複數 個濾光片之轉盤。一應用本創作之光強度分佈調整裝置之 光學檢測系統可使用任何種類之驅動裝置，其較佳為一馬 達。一應用本創作之光強度分佈調整裝置之光學檢測系統 M286363 可使用任何種類之發光體，其較佳為一燈泡、一螢光燈管 或一白光發光二極體。一應用本創作之光強度分佈調整裝 置之光學檢測系統可使用任何種類之導光元件，其較佳為 一光纖。一應用本創作之光強度分佈調整裝置之光學檢測 5系統可檢測任何種類之透明待測物，其較佳為一光學玻璃 或一塑膠基板。一應用本創作之光強度分佈調整裝置之光 學檢測系統可使用任何種類之光強度感測裝置感測照射於 一待測物之光強度，其較佳為一光二極體感測器或電荷耦 合感測器（CCD)。 10 【實施方式】 圖4係本創作一較佳實施例之光強度分佈調整裝置的 不意圖，其外型為平板狀且尺寸與待測之玻璃基板的尺寸 相近。在本創作一較佳實施例之光強度分佈調整裝置中， 15光開關層42位於光學透鏡層41的表面，且光開關層42具有 複數個光5周制單元（圖中未示）。此外，每一光調制單元均 枭 /主承合物分散液晶（p〇iymer diSpersed liquid crystals， PDLC)於其中’使其可依據施加電壓的不同而處於一透明 狀態或一霧化狀態。光學透鏡層41則具有複數個菲涅耳透 20 鏡411(Fresnel lens)，使通過光學透鏡層41之光線的光強度 分佈更加集中。 圖5係一應用本創作一較佳實施例之光強度分佈調整 裝置之光學檢測系統的示意圖，其中光源裝置5 1利用燈泡 511、具有複數個濾光片於其表面之濾光片轉盤512及驅動 11 M286363 濾光片轉盤512轉動之馬達513，提供檢測玻璃基板瑕疵所 需之各種顏色的光源。此光源的光線經由光纖52傳輸至一 經過特殊設計的透鏡組53，透鏡組53並將原本之光源轉換 為面光源的型態。接著，由透鏡組53射出之面光線再經由 5 反射板54的反射，照射於光強度分佈調整裝置55及位於其 下之玻璃基板56上。 玻璃基板56係承載於一承載台（圖中未示）上，此承載 台（圖中未示）之周圍並設有複數個光偵測器（圖中未示）以 偵測照射於玻璃基板之光源的強度。此外，光強度分佈調 10整I置55、光偵測器（圖中未示）、燈泡5 11及馬達5 13分別 於電腦57連接，以接受來自電腦57的控制訊號。 畜需要使用特定顏色之「擴散」光強度分佈的光源照 射玻璃基板56時，電腦57輸出一控制訊號至燈泡511、馬達 513及光強度分佈調整裝置55，分別使燈泡5 u點亮、驅使 15濾光片轉盤5 12轉動至適當位置及使光強度分佈調整裝置 55之光開關層（圖中未示）處於一霧化狀態。此時，照射於 玻璃基板56表面的光源便具有特定顏色之「擴散」光強度 分佈。 當需要使用特定顏色之「集中」光強度分佈的光源照 20射玻璃基板56時，電腦57輸出一控制訊號至燈泡511、馬達 513及光強度分佈調整裝置55，分別使燈泡5ιι點亮、驅使 濾光片轉^512轉動至適當位置及使光強度分佈調整裝置 55之光開關層（圖中未示）處於一透明狀態。此時，通過本 創作一較佳實施例之光強度分佈調整裝置而照射於玻璃基 12 M286363 板56表面的光源，便因光強度分佈調整裝置乃之光學透鏡 層的作用，而具有特定顏色之「集中」光強度分佈。 最後，在檢測的過程中，一旦位於承載台（圖中未示） 之周圍的複數個光偵測器（圖中未示）偵測到照射於玻璃基 5板56之光源的強度不足時，電腦57便輸出一控制訊號至燈 /包5 11，以提升燈泡5 11的亮度或者顯示一訊息給操作者， 通知其預備將燈泡511更換。 因此，本創作之光強度分佈調整裝置可產生具有「集 中」與「擴散」兩種不同的光強度分佈的光源。況且，在 10配合前述之光學檢測系統後，本創作之光強度分佈調整裝 置更可提供各種不同強度、不同顏色及不同光強度分佈（集 中及擴散）的光源，大幅提昇檢測出光學玻璃缺陷的效率， P中低因未檢測出光學玻璃缺陷而造成之後續製程成本與製 程時間的浪費。 15 上述實施例僅係為了方便說明而舉例而已，本創作所 主張之權利範圍自應以申請專利範圍所述為準，而非僅限 於上述實施例。 【圖式簡單說明】 20圖H系習知之應用於大面積玻璃基板表面瑕疵目視檢測之 光學檢測系統的示意圖。 圖2A及圖2B係習知第一種「雙光源燈箱」分別於提供黃光 及白光時的結構示意圖。 13 M286363 圖3A及圖3B係習知第二種「雙光源燈箱」分別於提供黃光 及白光時的結構示意圖。 圖4係本創作一較佳實施例之光強度分佈調整裝置的示意 圖。 5圖5係一應用本創作一較佳實施例之光強度分佈調整裝置 之光學檢測系統的示意圖。 【主要元件符號說明】 1玻璃基板 2承載機台 3 上燈箱 4背燈箱 5品管員 21 螢光燈管 22納燈 2 3反射板 24 擴散板 2 5遮光板 31螢光燈管 32 鈉燈 33遮光板 34擴散板 41 光學透鏡層 411菲涅耳透鏡 42光開關層 51 光源裝置 511燈泡 512濾光片轉盤 513馬達 52光纖 5 3透鏡組 54 反射板 55光強度分佈調整裝置 56 玻璃基板 57電腦 1420 However, the above two “dual light source light boxes” have several shortcomings, which may cause the efficiency of visual inspection of the glass enamel to be unsatisfactory, as follows: 1. The aforementioned light box light sources are all direct type, and in order to achieve the luminous surface Sex, the thickness of the entire light box is quite thick, which in turn affects the size of the overall visual inspection machine 'occupies a large space. 2. Since the lamp must wait for 15 to 20 minutes after lighting, the intensity of the basin can reach the stable H required for the detection. Therefore, the lamp is continuously lit during the detection. Therefore, when using light as the (four) light source, it is necessary to use the "shading mechanism" to shield (4) the light emitted, which not only causes the light box to be thick and the structure is extremely complicated. 3. When a sodium lamp is used as the light source, the white light fluorescent lamp must be powered off. Therefore, in the overall inspection process, (4) the lamp must have a (four) switch, and the life of the large-scale fluorescent tube and its controller. The size of the enlarged board is extremely large, and the size of the light box must also be relatively large. The uniform light source with sufficient area of r is to be detected. The longest dimension of the current nano lamp is 110 (10), and the effective luminous length is L: cm, so the sodium lamp must be connected. The light source of the square box is poorly hooked. In the book "In the middle, it causes the lamp 8 M286363 5. Since the k official starts to light up, its brightness gradually decreases with the use time. However, 'the current detection device lacks the mechanism to monitor the brightness of the light box. 'So it can't monitor the brightness change of the light source in real time and warn the user in time. For the plague detection procedure that strictly requires the light source to be stable, it is necessary to avoid the situation that the brightness of the light box cannot be monitored. As mentioned above, there is a need in the industry for a light intensity distribution adjustment device that can produce two different light intensity distributions, "concentration" and "diffusion", to improve the detection efficiency of the glass substrate and reduce the overall production cost. 10 [New content] The light intensity distribution adjusting device of the present invention is applied to an optical detecting system for detecting defects of a test object, which comprises: an optical lens layer, wherein the optical lens layer is arranged with a plurality of Philippine buried ears a lens; and an optical switch layer on the surface of the lens 15f of the light, the optical switch layer having a plurality of light modulations=兀: wherein the light modulation units have a transparent state and an atomized heart, Tian et al. When the light modulation unit is in this transparent state, the light intensity distribution of the light passing through the light intensity knife 2 is concentrated; when the light modulation unit is in the state of being in this state, the light intensity distribution adjusting device 20 The light intensity distribution of the light is more diffuse. An optical detection system for use in the light intensity distribution adjusting device of the present invention, comprising: a light source device having an illuminant and a color conversion unit, which provides a light source of various colors required for detecting; a light guiding device having a person The light source is wrapped around the light guiding component and a light guiding lens located at a position opposite to one end of the light guiding device M286363. The light guiding lens converts the light source provided by the light source device into a light source; The reflecting device reflects the light emitted by the light guiding lens to illuminate the light source of the surface light source, and a control device controls the color and intensity of the light source provided by the light source device. Therefore, the light intensity distribution adjusting device of the present invention can generate a light source having two different light intensity distributions of "concentration" and "diffusion", and can provide a light source required for detecting defects of various kinds of optical glasses, which is more conventional than The traditional light source (lightbox) that only provides a "diffusion" light intensity distribution has improved a lot. In addition, after the optical detection system described above, the light intensity distribution adjusting device of the present invention can provide various light sources with different intensities, different colors and different light intensity distributions (concentration and diffusion), and greatly improve the efficiency of detecting optical glass defects. Reduce the waste of subsequent process costs caused by the failure to detect optical glass defects. 15 The light intensity distribution adjusting device of the present invention can use any kind of material in the light modulating unit of its optical switch layer, which is preferably a polymer dispersed liquid crystal (PDLC). The light intensity distribution adjusting device of the present invention may have any shape. The outer shape is preferably a flat shape. The light intensity distribution adjusting device of the present invention can have any size and the size is preferably similar to the size 20 of the object to be tested. An optical detection system using the light intensity distribution adjusting device of the present invention can use any kind of color conversion unit, which is preferably a turntable having a plurality of filters. An optical detecting system using the light intensity distribution adjusting device of the present invention can use any kind of driving device, which is preferably a motor. An optical detecting system M286363 which uses the light intensity distribution adjusting device of the present invention can use any kind of illuminating body, which is preferably a bulb, a fluorescent tube or a white light emitting diode. An optical detecting system using the light intensity distribution adjusting device of the present invention can use any kind of light guiding member, which is preferably an optical fiber. An optical inspection 5 system for applying the light intensity distribution adjusting device of the present invention can detect any kind of transparent analyte, which is preferably an optical glass or a plastic substrate. An optical detection system using the light intensity distribution adjusting device of the present invention can sense the light intensity of an object to be tested using any kind of light intensity sensing device, which is preferably a photodiode sensor or a charge coupled device. Sensor (CCD). [Embodiment] Fig. 4 is a schematic view of a light intensity distribution adjusting device according to a preferred embodiment of the present invention. The outer shape is a flat plate and the size is similar to the size of the glass substrate to be tested. In the light intensity distribution adjusting device of a preferred embodiment of the present invention, the optical switch layer 42 is located on the surface of the optical lens layer 41, and the optical switch layer 42 has a plurality of light 5-week units (not shown). Further, each of the light modulating units is 枭 / 承 y dispersed liquid crystals (PDLC) in which it is made to be in a transparent state or an atomized state depending on the applied voltage. The optical lens layer 41 has a plurality of Fresnel lenses 411 to concentrate the light intensity distribution of the light passing through the optical lens layer 41. 5 is a schematic diagram of an optical detection system using a light intensity distribution adjusting device according to a preferred embodiment of the present invention, wherein the light source device 51 uses a bulb 511, a filter turntable 512 having a plurality of filters on its surface, and The motor 513, which drives the 11 M286363 filter turntable 512, provides a light source of various colors required to detect the glass substrate. The light from this source is transmitted via fiber 52 to a specially designed lens set 53, lens set 53 and converts the original source into a surface light source. Then, the surface light emitted from the lens group 53 is further reflected by the fifth reflecting plate 54 and irradiated onto the light intensity distribution adjusting device 55 and the glass substrate 56 located thereunder. The glass substrate 56 is carried on a carrying platform (not shown), and a plurality of photodetectors (not shown) are disposed around the carrying platform (not shown) to detect the illumination on the glass substrate. The intensity of the light source. In addition, the light intensity distribution is adjusted to 10, the photodetector (not shown), the bulb 5 11 and the motor 5 13 are respectively connected to the computer 57 to receive the control signal from the computer 57. When the animal needs to illuminate the glass substrate 56 with a light source of a "diffusion" light intensity distribution of a specific color, the computer 57 outputs a control signal to the bulb 511, the motor 513, and the light intensity distribution adjusting device 55 to respectively illuminate and drive the bulb 5u. The filter turntable 5 12 is rotated to an appropriate position and the optical switch layer (not shown) of the light intensity distribution adjusting device 55 is in an atomized state. At this time, the light source that is irradiated on the surface of the glass substrate 56 has a "diffused" light intensity distribution of a specific color. When it is required to use a light source of a "concentrated" light intensity distribution of a specific color to illuminate the glass substrate 56, the computer 57 outputs a control signal to the bulb 511, the motor 513, and the light intensity distribution adjusting means 55 to respectively illuminate and drive the bulb 5 ιι The filter rotates 512 to the proper position and causes the optical switch layer (not shown) of the light intensity distribution adjusting device 55 to be in a transparent state. At this time, the light source irradiated on the surface of the glass base 12 M286363 plate 56 by the light intensity distribution adjusting device of the preferred embodiment of the present invention has a specific color due to the action of the optical lens layer of the light intensity distribution adjusting device. "concentrate" the light intensity distribution. Finally, during the detection process, once a plurality of photodetectors (not shown) located around the carrier (not shown) detect insufficient intensity of the light source that is incident on the glass-based 5 panel 56, The computer 57 outputs a control signal to the light/package 5 11 to increase the brightness of the light bulb 5 11 or to display a message to the operator informing it to prepare to replace the light bulb 511. Therefore, the light intensity distribution adjusting device of the present invention can generate a light source having two different light intensity distributions of "concentration" and "diffusion". Moreover, after matching the optical detection system described above, the light intensity distribution adjusting device of the present invention can provide various light sources with different intensities, different colors and different light intensity distributions (concentration and diffusion), and greatly improve the detection of optical glass defects. Efficiency, low in P, is a waste of subsequent process costs and process time due to the failure to detect optical glass defects. The above-mentioned embodiments are merely examples for the convenience of the description, and the scope of the claims is intended to be based on the scope of the patent application, and is not limited to the above embodiments. [Simple description of the drawing] Fig. H is a schematic view of an optical detecting system applied to the surface of a large-area glass substrate for visual inspection. 2A and 2B are schematic views showing the structure of a first "dual light source light box" for providing yellow light and white light, respectively. 13 M286363 Figs. 3A and 3B are schematic views showing the structure of a conventional "dual light source light box" for providing yellow light and white light, respectively. Fig. 4 is a schematic view showing a light intensity distribution adjusting device of a preferred embodiment of the present invention. 5 is a schematic diagram of an optical detection system for applying the light intensity distribution adjusting device of a preferred embodiment. [Main component symbol description] 1 glass substrate 2 carrying machine 3 upper light box 4 back light box 5 quality controller 21 fluorescent tube 22 nano lamp 2 3 reflecting plate 24 diffusing plate 2 5 visor 31 fluorescent tube 32 sodium lamp 33 Light shield 34 diffuser 41 Optical lens layer 411 Fresnel lens 42 Optical switch layer 51 Light source device 511 Light bulb 512 Filter turntable 513 Motor 52 Fiber 5 3 Lens group 54 Reflector 55 Light intensity distribution adjustment device 56 Glass substrate 57 Computer 14