1306143 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種光強度分佈調整裝置，尤指一種適 用於一光學檢測系統且可產生「集中」與「擴散」兩種不 5 同光強度分佈的光強度分佈調整裝置。 【先前技術】 近年來，台灣的TFT-LCD產業蓬勃發展，所使用之玻 璃基板的尺寸越來越大，從原本可用雙手即可拿取的3 5代 10基板已逐漸擴大到長寬尺寸皆接近2公尺的6代基板，此時 已無法利用雙手拿取玻璃基板。此外，除了面積的擴大之 外玻璃基板的厚度也逐漸地縮減。所以在的製 造過程中，玻璃基板皆必須藉由機械手臂在各製程機台之 間移動。 15 而在TFT-LCD的製造過程中，玻璃基板在經歷各製程 階段後之表面品質的控管是非常重要的，因為如果沒有及 時將有瑕疵的玻璃基板從生產線上挑除，所浪費的不僅有 後續製程的材料的成本，更造成寶貴製程時間的浪費，大 幅影響整個液晶廠的產量。 ' 20 目前’業界已經定義出超過17G種以上發生於玻璃基板 上的瑕疵，且瑕疵種類數目仍持續増加中。此外，欲檢測 出上述各種不同的瑕蔽，則必須嚴格遵守各種不同的檢測 條件才可順利地檢測出各種瑕巍，如特定的玻璃基板傾斜 角度、特定的光源強度、特定的光源波長或特定的光源強 5 1306143 度分佈。因此，提供目視檢測所需之光源的燈箱品質非常 重要。 圖1係目前業界應用於大面積玻璃基板表面瑕疵目視 檢測之光學檢測系統的示意圖’其中玻璃基板丨被置放於承 5 載機台2上，上燈箱3及背燈箱4則分別位於承載機台2的上 方及後方’以提供目視檢測玻璃基板瑕疾所需的光源。此 外，上燈箱3及背燈箱4均為所謂「雙光源燈箱」，它們均 能提供兩種不同波長光源，如白光及黃光。 > 至於目視檢測玻璃基板瑕疵的步驟，則敘述於下： 10 首先，依據所欲檢測之瑕疵的種類，將玻璃基板1調整 至一特定角度。接著，將特定波長及特定入射角度的光源 照射於玻璃基板1上（在圖1的狀況中，係點亮背燈箱4提供 光源），再藉由經過嚴格訓練之品管員5以目視的方式檢視 玻璃基板1的整個表面，判斷是否有任何瑕疵存在。 15 當欲檢測另一種瑕疵時，則重複上述步驟，即在依序 調整玻璃基板1角度及光源波長後，再以目視的方式檢查玻 璃基板的整個表面。亦即，必須依據所欲檢測之玻璃瑕疵 的不同，適當地選擇使用不同燈箱的光源及玻璃基板的旋 轉角度，以使光源的光線於玻璃基板上進行正面透射、反 20面透射、正面反射或反面反射等動作，才能正確地檢測玻 璃基板是否存在任何缺陷。 如前所述，光源之波長對於是否能檢測出玻璃基板之 缺陷非常重要。因此，目前業界所使用之燈箱均為所謂之 6 1306143 51306143 IX. Description of the Invention: [Technical Field] The present invention relates to a light intensity distribution adjusting device, and more particularly to an optical detecting system which can generate two kinds of light intensity: "concentration" and "diffusion". Distributed light intensity distribution adjustment device. [Prior Art] In recent years, Taiwan's TFT-LCD industry has flourished, and the size of the glass substrate used has been increasing. The 35-generation 10 substrate that can be taken by both hands has been gradually expanded to the long and wide dimensions. The 6th generation substrate, which is close to 2 meters, is unable to take the glass substrate with both hands. Further, in addition to the enlargement of the area, the thickness of the glass substrate is gradually reduced. Therefore, in the manufacturing process, the glass substrate must be moved between the various processing machines by the robot arm. 15 In the manufacturing process of TFT-LCD, it is very important to control the surface quality of the glass substrate after going through various process stages, because if the defective glass substrate is not removed from the production line in time, it is wasted not only The cost of materials with subsequent processes is also a waste of valuable process time, which greatly affects the output of the entire LCD plant. The '20 current' industry has defined more than 17G types of enamels on glass substrates, and the number of cockroaches continues to increase. In addition, in order to detect the above various kinds of masking, various kinds of detecting conditions must be strictly observed in order to smoothly detect various flaws, such as a specific glass substrate tilt angle, a specific light source intensity, a specific light source wavelength or a specific The light source is strongly 5 1306143 degrees distributed. Therefore, it is important to provide the quality of the light box for the light source required for visual inspection. 1 is a schematic diagram of an optical inspection system for visual inspection of large-area glass substrates on the surface of the industry. The glass substrate is placed on the carrier 5, and the upper light box 3 and the back light box 4 are respectively located on the carrier. The upper and lower sides of the table 2 are used to provide a light source for visually detecting the dysentery of the glass substrate. In addition, the upper light box 3 and the back light box 4 are so-called "dual light source light boxes", which are capable of providing two different wavelength light sources such as white light and yellow light. > The procedure for visually detecting the glass substrate 瑕疵 is described below: 10 First, the glass substrate 1 is adjusted to a specific angle depending on the type of ruthenium to be detected. Next, a light source having a specific wavelength and a specific incident angle is irradiated onto the glass substrate 1 (in the case of FIG. 1, the backlight unit 4 is provided with a light source), and then visually observed by a highly trained quality controller 5. The entire surface of the glass substrate 1 was examined to determine whether any flaws were present. 15 When you want to detect another type of defect, repeat the above steps, after sequentially adjusting the angle of the glass substrate 1 and the wavelength of the light source, and then visually inspect the entire surface of the glass substrate. That is, the light source and the rotation angle of the glass substrate of different light boxes must be appropriately selected according to the difference of the glass crucible to be detected, so that the light of the light source is transmitted on the glass substrate for front side transmission, reverse 20 surface transmission, front side reflection or Actions such as reverse reflection can correctly detect whether there is any defect in the glass substrate. As mentioned earlier, the wavelength of the source is very important for detecting defects in the glass substrate. Therefore, the light boxes currently used in the industry are so-called 6 1306143 5
10 15 20 雙光源燈箱」，即可依照檢測的需要而提供不同波長光 源的燈箱，其構造如下所示。 圖2A及圖2B分別係第一種「雙光源燈箱」於提供黃光 及白光時的結構示意圖，其中螢光燈管21及鈉燈22分別排 列於燈箱中，反射板23將鈉燈22所發射之光線朝向擴散板 24反射，再傳遞至外界。此外，在螢光燈管21及鈉燈22之 間’具有一百葉窗狀的遮光板25 ’其係以氣缸或馬達等方 式帶動而改變其狀態。 在圖2A的狀況中，螢光燈管21係處於關閉狀態，而鈉 燈22則處於持續開啟的狀態。此外，百葉窗狀的遮光板25 係處於「開啟」狀態，使鈉燈22所發射的光線可以通過並 到達擴散板24。此時，此「雙光源燈箱」提供均勻的黃光 光源。而在圖2B的狀況中，螢光燈管21係處於開啟狀態， 而鈉燈22仍處於持續開啟的狀態。但是，百葉窗狀的遮光 板25則處於「關閉」狀態以將鈉燈22所發射的光線遮蔽住， 使其無法達擴散板24。此時，此「雙光源燈箱」提供均勻 的白光光源。 圖3A及圖3B分別係第二種「雙光源燈箱」於提供黃光 及白光時的結構示意圖，其中螢光燈管31及鈉燈32分別排 列於燈箱中，其所發射之光線分別經由擴散板34傳遞至外 界。此外’螢光燈管31排列於遮光板33的上表面，且遮光 板33係以氣缸或馬達等方式帶動而改變其狀態。 在圖3A的狀況中’螢光燈管31係處於關閉狀態，而鈉 燈32則處於持續開啟的狀態。此外，遮光板33係處於「開 7 Ϊ306143 啟」狀態，使鈉燈32所發射的光線可到達擴散板34。此時， 此「雙光源燈箱」提供均勻的黃光光源。而在圖3B的狀況 中’榮光燈官31係處於開啟狀態’而納燈32仍處於持續開 啟的狀態。但是’遮光板33則處於「關閉」狀態以將納燈 5 32所發射的光線遮蔽住，使其無法達擴散板34。此時，此 「雙光源燈箱」便提供均勻的白光光源。 但是，上述兩種「雙光源燈箱」均具有幾項缺點，造 成目視檢測玻璃瑕疲的效率無法提升，如下所述： 1.前述之燈箱光源均為直射式，而為了達到發光面的 ίο均勻性，整個燈箱的厚度相當厚，進而影響整體目視瑕疵 檢查機的尺寸’佔據較大的空間。 2·由於鈉燈在點亮後必需等待15至2〇分鐘後，其光強 度才此達到檢测所需的穩定狀態。所以在檢測過程中，鈉 燈係持續地點亮。因此，當需使用白光做為檢測光源時， 15必須使用「遮光機構」遮蔽鈉燈所發射的光線，如此不僅 造成燈箱厚度較厚且結構極為複雜。 。3.田使用納燈做為光源時，提供白光之螢光燈必須斷 電。所以在整體檢測過程中，榮光燈必須經常性開關，大 幅縮短螢光燈管及其控制器的使用壽命。 擴大，以提供足夠面積的均勻光源供檢測所需。可是，由10 15 20 Dual light source box, which can provide light boxes of different wavelengths according to the needs of the test. The structure is as follows. 2A and 2B are respectively schematic structural views of the first "dual light source light box" for providing yellow light and white light, wherein the fluorescent tube 21 and the sodium lamp 22 are respectively arranged in the light box, and the reflecting plate 23 emits the sodium lamp 22. The light is reflected toward the diffusion plate 24 and then transmitted to the outside. Further, the louver 25' having a louver-like shape between the fluorescent tube 21 and the sodium lamp 22 is driven by a cylinder or a motor to change its state. In the situation of Fig. 2A, the fluorescent tube 21 is in a closed state, and the sodium lamp 22 is in a continuously open state. Further, the louver-like louver 25 is in an "on" state, so that the light emitted from the sodium lamp 22 can pass through and reach the diffusion plate 24. At this time, the “dual light source box” provides a uniform yellow light source. In the case of Fig. 2B, the fluorescent tube 21 is in an open state, and the sodium lamp 22 is still in a continuously open state. However, the louvered louver 25 is in the "closed" state to shield the light emitted by the sodium lamp 22 from reaching the diffuser plate 24. At this time, the “dual light source box” provides a uniform white light source. 3A and 3B are respectively schematic structural views of a second "double-source light box" for providing yellow light and white light, wherein the fluorescent tube 31 and the sodium lamp 32 are respectively arranged in the light box, and the emitted light passes through the diffusion plate respectively. 34 passed to the outside world. Further, the fluorescent tube 31 is arranged on the upper surface of the light shielding plate 33, and the light shielding plate 33 is driven by a cylinder or a motor to change its state. In the situation of Fig. 3A, the fluorescent tube 31 is in a closed state, and the sodium lamp 32 is in a continuously open state. In addition, the visor 33 is in the "open 7 Ϊ 306, 143" state, so that the light emitted by the sodium lamp 32 can reach the diffuser 34. At this time, the "dual light source box" provides a uniform yellow light source. In the case of Fig. 3B, the "Glory Lights Officer 31 is in an on state" and the lamp 32 is still in a continuous state. However, the visor 33 is in the "off" state to shield the light emitted by the lamp 5 32 from reaching the diffuser plate 34. At this point, the “dual light source box” provides a uniform white light source. However, the above two "dual light source light boxes" have several disadvantages, which may cause the efficiency of visually detecting the glass fatigue to be improved, as follows: 1. The aforementioned light box light sources are all direct type, and in order to achieve a uniform illumination surface Sex, the thickness of the entire light box is quite thick, which in turn affects the size of the overall visual inspection machine 'occupies a large space. 2. Since the sodium lamp must wait for 15 to 2 minutes after lighting, its light intensity reaches the steady state required for detection. Therefore, the sodium lamp is continuously lit during the test. Therefore, when white light is required as the detection light source, 15 "shading mechanism" must be used to shield the light emitted by the sodium lamp, which not only causes the thickness of the light box to be thick and the structure is extremely complicated. . 3. When using a nano lamp as a light source, the fluorescent lamp that provides white light must be powered off. Therefore, in the overall inspection process, the glory lamp must be switched frequently to greatly shorten the service life of the fluorescent tube and its controller. Expand to provide a uniform light source of sufficient area for inspection. However, by
箱之光源均勻度不佳。 2〇 4,由於玻璃基板尺寸極大，燈箱的尺寸也必須相對地 cm’且其有效發光長度僅9〇 式排列於燈箱_，便造成燈 8 1306143 -螢光燈管或-白光發光二極體。一應用本發明之光強度 分佈調整裝置之光學檢測系統可使用任何種類之導光元 - 件，其杈佳為一光纖。一應用本發明之光強度分佈調整裝 置之光學檢測系統可檢測任何種類之透明待測物，其較佳 5為一光學玻璃或一塑膠基板。一應用本發明之光強度分佈 調整裝置之光學檢測系統可使用任何種類之光強度感測裝 置感測照射於一待測物之光強度，其較佳為一光二極體感 測器或電荷耦合感測器（CCD)。一應用本發明之光強度分佈 肇| 调整裝置之光學檢測系統可使用任何類型表面之光反射裝 10置，其表面較佳為平面、凹面或凸面。一應用本發明之光 強度分佈調整裝置之光學檢測系統的控制裝置可使用任何 方式控制其光強度分佈調整裝置之光調制單元的狀態，其 較佳利用一交流電源控制。一應用本發明之光強度分佈調 整裝置之光學檢測系統的導光裝置可使用任何類型之導光 15鏡片，其較佳為一至少包括一凹透鏡及一凸面鏡的透鏡 組。本發明之光強度分佈調整裝置之光開關層可與光學透 ^ 鏡層保持任何距離，兩者之間的距離可為零公分或較佳介 於5至50公分之間。 本發明之光學檢測系統之光強度分佈調整裝置可使用 20 任何種類的材料於其光開關層之光調制單元中，其較佳為 聚合物分散液晶（PDLC)。本發明之光學檢測系統之光強度 分佈調整裝置可具有任何形狀之外型，其外型較佳為平板 狀。本發明之光學檢測系統之光強度分佈調整裝置可具有 任何大小之尺寸’其尺寸較佳與待測物之尺寸相近。本發 13 1306143 調整裝置中，光開關層42位於光學透鏡層41的表面，且光 開關層42具有複數個光調制單元（圖中未示）。此外，每一光 調制單元均灌注聚合物分散液晶（p〇lymer dispersed “quid crystals，PDLC)於其中，使其可依據施加電壓（來自一交流 5電源）的不同而處於一透明狀態或一霧化狀態。光學透鏡層 41則具有複數個菲》圼耳透鏡41 i({7resnei iens)，使通過光學 透鏡層41之光線的光強度分佈更加集中。當應用於一光學 檢測系統時，本發明第一較佳實施例之光強度分佈調整裝 置的擺放方式可為圖4A或圖4B所示之情況之一。在圖4A所 10 示之情況中，來自光源裝置的光線係先照射於光開關層 42，使其處於一透明狀態或一霧化狀態。接著，此光線再 進入光學透鏡層41’以使其光強度的分佈更加集中。而在 圖4B所示之情況中，來自光源裝置的光線則先照射於光學 透鏡層41 ’以使其光強度的分佈更加集中。接著，此光線 15 再進入光開關層42，使其處於一透明狀態或一霧化狀態。 圖5係一應用本發明第一較佳實施例之光強度分佈調 整裝置之光學檢測系統的示意圖，其中光源裝置5丨利用燈 泡511、具有複數個濾光片於其表面之濾光片轉盤5 i 2及驅 動濾光片轉盤512轉動之馬達513，提供檢測玻璃基板瑕疵 20 所需之各種顏色的光源。此光源的光線經由光纖52傳輸至 一經過特殊設計的透鏡組53，透鏡組53並將原本之光源轉 換為面光源的型態。接著，由透鏡組5 3射出之面光線再經 由反射板54的反射，照射於本發明第一較佳實施例之光強 度分佈調整裝置55及位於其下之玻璃基板56上。玻璃基板 15 1306143 56係承载於-承載台（圖中未示）上，此承載台（圖巾未示）之 周園並又有複數個光偵測器(圖中未示)以偵測照射於玻璃 基板56之光源的強度。此外，本發明第一較佳實施例之光 強度分佈調整裝置55、光偵測器（圖中未示）、燈泡Η〗及馬 5達5!3分別於電腦57連接，以接受來自電腦57的控制訊號。 田需要使用特定顏色之厂擴散」力強度分佈的光源照 射玻璃基板56時，電腦57輸出一控制訊號至燈泡511、馬達 513及本發明第一較佳實施例之光強度分佈調整裝置55，分 別使燈泡511點亮、驅使濾光片轉盤512轉動至適當位置及 10使本發明第一較佳實施例之光強度分佈調整裝置55之光開 關層（圖中未示）處於一霧化狀態。此時，照射於玻璃基板56 表面的光源便具有特定顏色之r擴散」光強度分佈。而當 需要使用特定顏色之「集中」光強度分佈的光源照射玻璃 基板56時，電腦57輸出一控制訊號至燈泡511、馬達513及 15本發明第一較佳實施例之光強度分佈調整裝置55 ,分別使 燈泡511點亮、驅使濾光片轉盤512轉動至適當位置及使本 發明第一較佳實施例之光強度分佈調整裝置55之光開關層 (圖中未不）處於一透明狀態。此時，通過本發明第一較佳實 施例之光強度分佈調整裝置55而照射於玻璃基板％表面的 2〇光源，便因本發明第—較佳實施例之光強度分佈調整裝置 55之光學透鏡層的作用，而具有特定顏色之「集中」光強 度分佈。 最後，在檢測的過程中，一旦位於承載台（圖中未示） 之周圍的複數個光偵測器（圖中未示）偵測到照射於玻璃基 16 1306143 板56之光源的強度不足時，電腦57便輸出一控制訊號至燈 泡511，以提升燈泡511的亮度或者顯示一訊息給操作者， 通知其預備將燈泡511更換。 圖6 A及圖6B係本發明第二較佳實施例之光強度分佈 5調整裝置的示意圖，其外型為平板狀且尺寸與待測之玻璃 基板的尺寸相近。在本發明第二較佳實施例之光強度分佈 調整裝置申，光開關層62並非位於光學透鏡層61的表面， 其係藉由一支撐裝置（圖中未示）而與光學透鏡層61保持一 > 特定距離。此一特定距離並非一固定值，其數值大小會依 10 據實際應用的狀況而有所變化。一般而言，此特定距離係 介於5公分至50公分之間。此外，光開關層62具有複數個光 調制單元（圖中未示）’而每一光調制單元均灌注聚合物分散 液晶（polymer dispersed liquid crystals, PDLC)於其中，使其 可依據施加電壓（來自一交流電源）的不同而處於一透明狀 15 態或一霧化狀態。光學透鏡層61則具有複數個菲涅耳透鏡 611 (Fresnel lens)’使通過光學透鏡層61之光線的光強度分 佈更加集中。當應用於一光學檢測系統時，本發明第二較 佳實施例之光強度分佈調整裝置的擺放方式可為圖6入或圖 6B所示之情況之一。在圖6A所示之情況中，來自光源裝置 20 的光線係先照射於光開關層62 ’使其處於一透明狀態或一 霧化狀態。接著’此光線再進入光學透鏡層61，以使其光 強度的分佈更加集中。而在圖佔所示之情況中，來自光源 裝置的光線則先照射於光學透鏡層6丨，以使其光強度的分 17 1306143 佈更加集中。接著，此光線再進入光開關層62，使其處於 一透明狀態或一霧化狀態。 圖7係本發明第三較佳實施例之光學檢測系統的示意 圖’其係應用本發明第二較佳實施例之光強度分佈調整裝 5 置。其中，光源裝置71利用燈泡711、具有複數個濾光片於 其表面之濾光片轉盤712及驅動濾光片轉盤712轉動之馬達 713 ’提供檢測玻璃基板瑕疵所需之各種顏色的光源。此光 源的光線經由光纖7 2傳輸至一經過特殊設計的透鏡組7 3， 透鏡組73並將原本之光源轉換為面光源的型態。接著，由 10 透鏡組73射出之面光線再經由反射板74的反射，照射於本 發明第二較佳實施例之光強度分佈調整裝置75及位於其下 之玻璃基板76上。玻璃基板76係承載於一承載台（圖中未示） 上，此承載台（圖中未示）之周圍並設有複數個光偵測器（圖 中未示）以偵測照射於玻璃基板76之光源的強度。此外，本 15 發明第二較佳實施例之光強度分佈調整裝置75、光偵測器 (圖中未示）、燈泡711及馬達713分別於電腦77連接，以接受 來自電腦77的控制訊號。 當需要使用特定顏色之「擴散」光強度分佈的光源照 射玻璃基板76時，電腦77輪出一控制訊號至燈泡7丨i、馬達 20 713及本發明第二較佳實施例之光強度分佈調整裝置乃，分 別使燈泡711點亮、驅使渡光片轉盤712轉動至適當位置及 使本發明第一較佳實施例之光強度分佈調整裝置7 5之光開 關層（圖中未示）處於一霧化狀態。此時，照射於玻璃基板76 表面的光源便具有特定顏色之「擴散」光強度分佈。而當 18 '1306143 $要使用特定顏色之「集中」光強度分佈的光源照射玻璃 土板76時，電腦77輸出一控制訊號至燈泡711、馬達713及 本發月第一較佳實施例之光強度分佈調整裝置75，分別使 * ^泡7U點亮、驅使渡光片轉盤712轉動至適當位置及使本 5 I明第二較佳實施例之光強度分佈調整裝置75之光開關層 (圖中未不）處於一透明狀態。此時，通過本發明第二較佳實 施例之光強度分佈調整裝置75而照射於玻璃基板％表面的 、、雨、便口本發明第一較佳實施例之光強度分佈調整裝置 • 75之光學透鏡層的作用’而具有特定顏色之「集中」光強 10 度分佈。 最後，在檢測的過程中，一旦位於承載台（圖中未示） 之周圍的複數個光偵測器（圖中未示）偵測到照射於玻璃基 板76之光源的強度不足時，電腦77便輸出一控制訊號至燈 /包711，以提升燈泡7丨丨的亮度或者顯示一訊息給操作者， 15 通知其預備將燈泡711更換。 圖8係本發明第四較佳實施例之光學檢測系統的示意 g 圖，其係應用本發明第一較佳實施例之光強度分佈調整裝 置。其中，光源裝置81利用燈泡811、具有複數個濾光片於 其表面之濾光片轉盤812及驅動濾光片轉盤812轉動之馬達 20 813，提供檢測玻璃基板瑕疵所需之各種顏色的光源。此光 源的光線首先經過特殊設計的透鏡組83，以使此光源之光 線轉換為面光源的型態並射出。接著，由透鏡組83射出之 面光線再經由反射板84的反射，照射於本發明第一較佳實 施例之光強度分佈調整裝置85及位於其下之玻璃基板86 19 1306143 上。玻璃基板86係承載於一承載台（圖中未示）上，此承載台 (圖中未示）之周圍並設有複數個光偵測器（圖中未示）以偵 測照射於玻璃基板86之光源的強度。此外，本發明第一較 佳實施例之光強度分佈調整裝置85、光偵測器（圖中未示）、 5燈泡811及馬達813分別於電腦87連接，以接受來自電腦87 的控制訊號。而當需要使用特定顏色之「擴散」光強度分 佈的光源照射玻璃基板86時’電腦87輸出一控制訊號至燈 泡811、馬達813及本發明第一較佳實施例之光強度分佈調 _ 整裝置85，分別使燈泡811點亮 '驅使濾光片轉盤812轉動 10至適當位置及使本發明第一較佳實施例之光強度分佈調整 裝置85之光開關層（圖中未示）處於一霧化狀態。此時，照射 於玻璃基板86表面的光源便具有特定顏色之「擴散」光強 度分佈。而當需要使用特定顏色之「集中」光強度分佈的 光源照射玻璃基板86時，電腦87輸出一控制訊號至燈泡 15 811 4達813及本發明第一較佳實施例之光強度分佈調整 裝置85，分別使燈泡811點亮、驅使渡光片轉盤812轉動至 冑當位置及使本發明第一較佳實施例之光強度分佈調整裝 置85之光開關層（圖中未示）處於—透明狀態。此時，通過本 發明第一較佳實施例之光強度分佈調整裝㈣而照射於玻 20璃基板86表面的光源，便因本發明第一較佳實施例之光強 度分伟調整裝置85之光學透鏡層的作用，而具有特定顏色 之「集中」光強度分佈。 最後，在檢測的過程中，一旦位於承载台（圖中未示） 之周圍的複數個光偵測器（圖中未示）偵測到照射於玻璃基 20 1306143 5 10 表面的光源便具有特定顏色之「擴散」光強度分佈。而當 需要使用特定顏色之「集中」光強度分佈的光源照射玻璃 基板96時，電腦97輸出一控制訊號至燈泡911、馬達913及 本發明第二較佳實施例之光強度分佈調整裝置95，分別使 燈泡911點亮、驅使濾光片轉盤912轉動至適當位置及使本 發明第一較佳實施例之光強度分佈調整裝置95之光開關層 (圖中未示）處於一透明狀態。此時，通過本發明第二較佳實 施例之光強度分佈調整裝置95而照射於玻璃基板96表面的 光源’便因本發明第二較佳實施例之光強度分佈調整裝置 95之光學透鏡層的作用，而具有特定顏色之「集中」光強 度分佈。 最後，在檢測的過程中，一旦位於承載台（圖中未示） 之周圍的複數個光偵測器（圖中未示）偵測到照射於玻璃基 板96之光源的強度不足時，電腦97便輸出一控制訊號至燈 15泡9U，以提升燈泡911的亮度或者顯示一訊息給操作者， 通知其預備將燈泡911更換。 因此’本發明之光強度分佈調整裝置可產生具有「集 中」與「擴散」兩種不同的光強度分佈的光源。況且，在 配合前述之光學檢測系統後，本發明之光強度分佈調整裝 20置更可提供各種不同強度、不同顏色及不同光強度分佈（集 中及擴散）的光源’大幅提昇檢測出光學玻璃缺陷的效率， 降低因未檢測出光學玻璃缺陷而造成之後續製程成本與製 程時間的浪費。 22 1306143 上述實施例僅係為了方便說明而舉例而已，本發明所 主張之制範圍自應以中請專利脑所述為準，而非僅限 於上述實施例。 & 5 【圖式簡單說明】 圖Η系習知之應用於大面積玻璃基板表面瑕疵目視檢測之 光學檢測系統的示意圖。The uniformity of the light source of the box is not good. 2〇4, due to the large size of the glass substrate, the size of the light box must also be relatively cm' and its effective illumination length is only arranged in the light box _, which causes the lamp 8 1306143 - fluorescent tube or - white light emitting diode . An optical detecting system to which the light intensity distribution adjusting device of the present invention is applied can use any kind of light guiding element, which is preferably an optical fiber. An optical detecting system using the light intensity distribution adjusting device of the present invention can detect any kind of transparent object to be tested, and preferably 5 is an optical glass or a plastic substrate. An optical detection system using the light intensity distribution adjusting device of the present invention can sense the intensity of light irradiated onto an object to be tested using any kind of light intensity sensing device, which is preferably a photodiode sensor or charge coupled. Sensor (CCD). An optical intensity distribution using the present invention 肇| The optical detection system of the adjustment device can be used with any type of surface light reflecting device, the surface of which is preferably planar, concave or convex. A control device for an optical detecting system to which the light intensity distribution adjusting device of the present invention is applied can control the state of the light modulating unit of the light intensity distribution adjusting device in any manner, which is preferably controlled by an alternating current power source. A light guiding device for an optical detecting system to which the light intensity distribution adjusting device of the present invention is applied may use any type of light guiding lens 15 which is preferably a lens group including at least one concave lens and one convex mirror. The optical switch layer of the light intensity distribution adjusting device of the present invention can maintain any distance from the optical lens layer, and the distance between the two can be zero centimeters or preferably between 5 and 50 centimeters. The light intensity distribution adjusting device of the optical detecting system of the present invention can use any kind of material in the light modulating unit of its optical switching layer, which is preferably a polymer dispersed liquid crystal (PDLC). The light intensity distribution adjusting device of the optical detecting system of the present invention may have any shape and shape, and its outer shape is preferably flat. The light intensity distribution adjusting device of the optical detecting system of the present invention may have a size of any size, and its size is preferably similar to the size of the object to be tested. In the adjusting device, the optical switch layer 42 is located on the surface of the optical lens layer 41, and the optical switch layer 42 has a plurality of light modulating units (not shown). In addition, each light modulation unit is filled with polymer dispersed liquid crystal (PDLC) therein so as to be in a transparent state or a mist depending on the applied voltage (from an AC 5 power source). The optical lens layer 41 has a plurality of fluorescene lenses 41 i ({7resnei iens) to make the light intensity distribution of the light passing through the optical lens layer 41 more concentrated. When applied to an optical detection system, the present invention The light intensity distribution adjusting device of the first preferred embodiment can be placed in one of the cases shown in Fig. 4A or Fig. 4B. In the case of Fig. 4A, the light from the light source device is first irradiated to the light. The switch layer 42 is placed in a transparent state or an atomized state. Then, the light enters the optical lens layer 41' to concentrate its light intensity distribution. In the case shown in Fig. 4B, the light source device is provided. The light is first irradiated onto the optical lens layer 41' to concentrate its light intensity distribution. Then, the light 15 enters the optical switch layer 42 to be in a transparent state or an atomized state. 5 is a schematic diagram of an optical detection system using a light intensity distribution adjusting device according to a first preferred embodiment of the present invention, wherein the light source device 5 丨 utilizes a bulb 511 and a filter turntable 5 having a plurality of filters on its surface. i 2 and a motor 513 for driving the filter turntable 512 to rotate, providing light sources of various colors required for detecting the glass substrate 。 20. The light of the light source is transmitted via the optical fiber 52 to a specially designed lens group 53, lens group 53 and The original light source is converted into a surface light source. Then, the surface light emitted from the lens group 53 is further reflected by the reflection plate 54 to be irradiated to the light intensity distribution adjusting device 55 of the first preferred embodiment of the present invention. On the glass substrate 56 underneath, the glass substrate 15 1306143 56 is carried on a carrying platform (not shown), and the peripheral surface of the carrying platform (not shown) has a plurality of photodetectors (Fig. The light intensity distribution adjusting device 55, the photodetector (not shown), the bulb 及 and the light intensity distribution adjusting device 55 of the first preferred embodiment of the present invention are used to detect the intensity of the light source that is irradiated onto the glass substrate 56. Horse 5 up to 5! 3 respectively connected to the computer 57 to receive the control signal from the computer 57. When the field needs to use a light source of a specific color to spread the light intensity distribution light source to illuminate the glass substrate 56, the computer 57 outputs a control signal to the bulb 511, the motor 513 and the present. The light intensity distribution adjusting device 55 of the first preferred embodiment of the present invention causes the bulb 511 to illuminate, respectively, to drive the filter disc 512 to rotate to an appropriate position and 10 to provide the light intensity distribution adjusting device 55 of the first preferred embodiment of the present invention. The optical switch layer (not shown) is in an atomized state. At this time, the light source that is irradiated on the surface of the glass substrate 56 has an r-diffusion "light intensity distribution" of a specific color. When the light source of the "concentrated" light intensity distribution of the specific color is required to illuminate the glass substrate 56, the computer 57 outputs a control signal to the bulb 511, the motors 513 and 15 of the light intensity distribution adjusting device 55 of the first preferred embodiment of the present invention. The light bulb 511 is respectively turned on, the filter turntable 512 is rotated to an appropriate position, and the optical switch layer (not shown) of the light intensity distribution adjusting device 55 of the first preferred embodiment of the present invention is placed in a transparent state. At this time, the light source of the light intensity distribution adjusting device 55 of the first preferred embodiment of the present invention is irradiated by the light intensity distribution adjusting device 55 of the first preferred embodiment of the present invention. The role of the lens layer, with a "concentrated" light intensity distribution of a particular color. Finally, during the detection process, a plurality of photodetectors (not shown) located around the carrier (not shown) detect insufficient intensity of the light source that is incident on the glass substrate 16 1306143. The computer 57 outputs a control signal to the bulb 511 to increase the brightness of the bulb 511 or to display a message to the operator informing it to prepare to replace the bulb 511. 6A and 6B are schematic views showing a light intensity distribution 5 adjusting device according to a second preferred embodiment of the present invention, which has a flat shape and a size similar to that of the glass substrate to be tested. In the light intensity distribution adjusting device of the second preferred embodiment of the present invention, the optical switch layer 62 is not located on the surface of the optical lens layer 61, and is held by the optical lens layer 61 by a supporting device (not shown). a > a specific distance. This particular distance is not a fixed value, and its value will vary depending on the actual application. In general, this specific distance is between 5 cm and 50 cm. In addition, the optical switch layer 62 has a plurality of light modulating units (not shown), and each of the light modulating units is filled with polymer dispersed liquid crystals (PDLC) therein so as to be based on an applied voltage (from An AC power source is in a transparent state or an atomized state. The optical lens layer 61 has a plurality of Fresnel lenses 611 to concentrate the light intensity distribution of the light passing through the optical lens layer 61. When applied to an optical detecting system, the light intensity distribution adjusting device of the second preferred embodiment of the present invention can be placed in one of the cases shown in Fig. 6 or Fig. 6B. In the case shown in Fig. 6A, the light from the light source device 20 is first irradiated to the optical switch layer 62' to be in a transparent state or an atomized state. This light then enters the optical lens layer 61 again to concentrate its light intensity distribution. In the case of the figure, the light from the light source device is first irradiated onto the optical lens layer 6丨 to concentrate the light intensity of the 17 1306143 cloth. Then, the light enters the optical switch layer 62 again in a transparent state or an atomized state. Fig. 7 is a schematic view of an optical detecting system according to a third preferred embodiment of the present invention, which is applied to a light intensity distribution adjusting device of a second preferred embodiment of the present invention. The light source device 71 provides a light source of various colors required for detecting the glass substrate by using a bulb 711, a filter turntable 712 having a plurality of filters on its surface, and a motor 713' for driving the filter turntable 712. The light from this source is transmitted via optical fiber 72 to a specially designed lens group 73, lens group 73 and converts the original source into a surface light source. Then, the surface light emitted from the 10 lens group 73 is further reflected by the reflection plate 74 to be irradiated onto the light intensity distribution adjusting device 75 of the second preferred embodiment of the present invention and the glass substrate 76 located thereunder. The glass substrate 76 is carried on a carrying platform (not shown), and a plurality of photodetectors (not shown) are disposed around the carrying platform (not shown) to detect the illumination on the glass substrate. The intensity of the light source of 76. In addition, the light intensity distribution adjusting device 75, the photodetector (not shown), the light bulb 711 and the motor 713 of the second preferred embodiment of the present invention are respectively connected to the computer 77 to receive the control signal from the computer 77. When it is required to illuminate the glass substrate 76 with a light source of a "diffusion" light intensity distribution of a specific color, the computer 77 rotates a control signal to the light bulb 7丨i, the motor 20 713, and the light intensity distribution adjustment of the second preferred embodiment of the present invention. The device is configured to illuminate the bulb 711, drive the ferro-wafer turntable 712 to an appropriate position, and place the optical switch layer (not shown) of the light intensity distribution adjusting device 75 of the first preferred embodiment of the present invention in a Atomization status. At this time, the light source that is irradiated on the surface of the glass substrate 76 has a "diffused" light intensity distribution of a specific color. When 18 '1306143 $ is to illuminate the glass earth plate 76 with a light source of a "concentrated" light intensity distribution of a specific color, the computer 77 outputs a control signal to the light bulb 711, the motor 713, and the light of the first preferred embodiment of the present month. The intensity distribution adjusting device 75 respectively lights the light bulb 7u, drives the light-reel turntable 712 to an appropriate position, and causes the optical switch layer of the light intensity distribution adjusting device 75 of the second preferred embodiment. Not in the middle of a transparent state. At this time, the light intensity distribution adjusting device 75 of the first preferred embodiment of the present invention is irradiated on the surface of the glass substrate by the light intensity distribution adjusting device 75 of the second preferred embodiment of the present invention. The role of the optical lens layer 'has a 10 degree distribution of "concentrated" light intensity of a particular color. Finally, during the detection process, once a plurality of photodetectors (not shown) located around the carrying platform (not shown) detect that the intensity of the light source irradiated to the glass substrate 76 is insufficient, the computer 77 A control signal is output to the light/package 711 to increase the brightness of the light bulb 7 or to display a message to the operator, 15 notifying it that it is ready to replace the light bulb 711. Figure 8 is a schematic view of an optical detecting system of a fourth preferred embodiment of the present invention, which is a light intensity distribution adjusting device to which the first preferred embodiment of the present invention is applied. The light source device 81 provides a light source of various colors required for detecting the glass substrate by using a bulb 811, a filter turntable 812 having a plurality of filters on the surface thereof, and a motor 20 813 for driving the filter turntable 812. The light from this source is first passed through a specially designed lens set 83 to convert the light source of this source into a pattern of surface light sources and to exit. Then, the surface light emitted from the lens group 83 is further reflected by the reflection plate 84 to be irradiated onto the light intensity distribution adjusting device 85 of the first preferred embodiment of the present invention and the glass substrate 86 19 1306143 located thereunder. The glass substrate 86 is carried on a carrying platform (not shown), and a plurality of photodetectors (not shown) are disposed around the carrying platform (not shown) to detect the illumination on the glass substrate. The intensity of the light source of 86. In addition, the light intensity distribution adjusting device 85, the photodetector (not shown), the 5 bulb 811 and the motor 813 of the first preferred embodiment of the present invention are respectively connected to the computer 87 to receive the control signal from the computer 87. When the light source of the "diffusion" light intensity distribution of the specific color is required to illuminate the glass substrate 86, the computer 87 outputs a control signal to the bulb 811, the motor 813, and the light intensity distribution adjustment device of the first preferred embodiment of the present invention. 85, respectively, lighting the bulb 811 to drive the filter disc 812 to rotate 10 to a proper position and to cause the optical switch layer (not shown) of the light intensity distribution adjusting device 85 of the first preferred embodiment of the present invention to be in a fog State. At this time, the light source that is irradiated on the surface of the glass substrate 86 has a "diffusion" light intensity distribution of a specific color. When it is required to illuminate the glass substrate 86 with a light source of a "concentrated" light intensity distribution of a specific color, the computer 87 outputs a control signal to the light bulb 15 811 4 up to 813 and the light intensity distribution adjusting device 85 of the first preferred embodiment of the present invention. The light bulb 811 is respectively turned on, the ferro-aluminum turntable 812 is rotated to the squatting position, and the optical switch layer (not shown) of the light intensity distribution adjusting device 85 of the first preferred embodiment of the present invention is in a transparent state. . At this time, the light source which is irradiated on the surface of the glass substrate 86 by the light intensity distribution adjusting device (4) of the first preferred embodiment of the present invention is the light intensity adjusting device 85 of the first preferred embodiment of the present invention. The optical lens layer functions as a "concentrated" light intensity distribution of a particular color. Finally, during the detection process, a plurality of photodetectors (not shown) located around the carrier (not shown) detect the source of the light that is incident on the surface of the glass substrate 20 1306143 5 10 The "diffusion" light intensity distribution of color. When the light source of the "concentrated" light intensity distribution of the specific color is required to illuminate the glass substrate 96, the computer 97 outputs a control signal to the light bulb 911, the motor 913, and the light intensity distribution adjusting device 95 of the second preferred embodiment of the present invention. The light bulb 911 is respectively turned on, the filter turntable 912 is rotated to an appropriate position, and the optical switch layer (not shown) of the light intensity distribution adjusting device 95 of the first preferred embodiment of the present invention is placed in a transparent state. At this time, the light source illuminating the surface of the glass substrate 96 by the light intensity distribution adjusting device 95 of the second preferred embodiment of the present invention is the optical lens layer of the light intensity distribution adjusting device 95 of the second preferred embodiment of the present invention. The role of a "concentrated" light intensity distribution with a specific color. Finally, during the detection process, once a plurality of photodetectors (not shown) located around the carrying platform (not shown) detect that the intensity of the light source irradiated to the glass substrate 96 is insufficient, the computer 97 A control signal is output to the lamp 15 to 9U to increase the brightness of the lamp 911 or to display a message to the operator informing him that the lamp 911 is ready to be replaced. Therefore, the light intensity distribution adjusting device of the present invention can produce a light source having two different light intensity distributions of "concentration" and "diffusion". Moreover, after the optical detection system described above, the light intensity distribution adjusting device 20 of the present invention can provide various light sources with different intensities, different colors and different light intensity distributions (concentration and diffusion) to greatly improve the detection of optical glass defects. The efficiency reduces the waste of subsequent process costs and process time caused by the failure to detect optical glass defects. 22 1306143 The above embodiments are merely examples for convenience of description, and the scope of the invention is defined by the scope of the patent application, and is not limited to the above embodiments. & 5 [Simple description of the diagram] The diagram is a schematic diagram of an optical detection system applied to the surface of a large-area glass substrate for visual inspection.
圖2Α及圖2Β係習知第一種「雙光源燈箱」分別於提供黃光 及白光時的結構示意圖。 10 圖3Α及圖3Β係習知第二種「雙光源燈箱」分別於提供黃光 及白光時的結構示意圖。 .圖4Α及圖4Β係本發明第一較佳實施例之光強度分佈調整 裝置的示意圖。 圖5係一應用本發明第一較佳實施例之光強度分佈調整裝 15 置之光學檢測系統的示意圖。 圖6Α及圖6Β係本發明第二較佳實施例之光強度分佈調整 ^^1 裝置的示意圖。 圖7係本發明第三較佳實施例之光學檢測系統的示意圖。 圖8係本發明第四較佳實施例之光學檢測系統的示意圖。 20圖9係本發明第五較佳實施例之光學檢測系統的示意圖。 2承載機台 5品管員 3上燈箱 21螢光燈管 【主要元件符號說明】 1玻璃基板 4背燈箱 23 Ί306143 55光強度分佈調整裝置Fig. 2A and Fig. 2 are schematic views showing the structure of the first "dual light source light box" when providing yellow light and white light, respectively. Figure 3 and Figure 3 show the structure of the second "double-source light box" in the case of providing yellow and white light, respectively. Fig. 4A and Fig. 4 are schematic views showing a light intensity distribution adjusting device of a first preferred embodiment of the present invention. Fig. 5 is a schematic view showing an optical detecting system to which the light intensity distribution adjusting device of the first preferred embodiment of the present invention is applied. Fig. 6A and Fig. 6 are schematic views showing a device for adjusting the light intensity distribution of the second preferred embodiment of the present invention. Figure 7 is a schematic illustration of an optical inspection system in accordance with a third preferred embodiment of the present invention. Figure 8 is a schematic illustration of an optical inspection system in accordance with a fourth preferred embodiment of the present invention. Figure 9 is a schematic illustration of an optical inspection system in accordance with a fifth preferred embodiment of the present invention. 2 carrying machine 5 quality control staff 3 upper light box 21 fluorescent light tube [main symbol description] 1 glass substrate 4 back light box 23 Ί 306143 55 light intensity distribution adjustment device
75光強度分佈調整裝置 81光源裝置 811燈泡 813馬達 83透鏡組 85光強度分佈調整裝置75 light intensity distribution adjustment device 81 light source device 811 bulb 813 motor 83 lens group 85 light intensity distribution adjustment device
95光強度分佈調整裝置 22鈉燈 25遮光板 33遮光板 411菲涅耳透鏡 511燈泡 52光纖 57電腦 62光開關層 712濾光片轉盤 73透鏡組 87電腦 912濾光片轉盤 94反射板 96玻璃基板 23反射板 31螢光燈管 3 4擴散板 42光開關層 512濾光片轉盤 53透鏡組 61光學透鏡層 71光源裝置 713馬達 74反射板 91光源裝置 913馬達 97電腦 24擴散板 32鈉燈 41光學透鏡層 51光源裝置 513馬達 5 4反射板 56玻璃基板 611菲涅耳透鏡 711燈泡 72光纖 76玻璃基板 77電腦 812濾光片轉盤 84反射板 86玻璃基板 911燈泡 93透鏡組 2495 light intensity distribution adjustment device 22 sodium lamp 25 visor 33 visor 411 Fresnel lens 511 bulb 52 fiber 57 computer 62 optical switch layer 712 filter turntable 73 lens group 87 computer 912 filter turntable 94 reflector 96 glass substrate 23 reflector 31 fluorescent tube 3 4 diffuser 42 optical switch layer 512 filter turntable 53 lens group 61 optical lens layer 71 light source device 713 motor 74 reflector 91 light source device 913 motor 97 computer 24 diffuser 32 sodium lamp 41 optical Lens layer 51 Light source device 513 Motor 5 4 Reflector 56 Glass substrate 611 Fresnel lens 711 Light bulb 72 Fiber 76 Glass substrate 77 Computer 812 Filter turntable 84 Reflector 86 Glass substrate 911 Light bulb 93 Lens group 24