CN201637681U - Optical detection machine - Google Patents
Optical detection machine Download PDFInfo
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- CN201637681U CN201637681U CN2010201125904U CN201020112590U CN201637681U CN 201637681 U CN201637681 U CN 201637681U CN 2010201125904 U CN2010201125904 U CN 2010201125904U CN 201020112590 U CN201020112590 U CN 201020112590U CN 201637681 U CN201637681 U CN 201637681U
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Abstract
The utility model provides an optical detection machine, which comprises a light source device, a reflecting mirror, an optical lens set and a light-filtering adjusting seat, wherein the light source device can inject light source; the front side of the light source device is provided with the reflecting mirror used for reflecting the light source; and the light-filtering adjusting seat capable of adjusting the light source is arranged in the light source device or between the light source device and the reflecting mirror. Therefore, the optical detection machine can be suitable for detecting different defects on a preinstalled glass substrate to be detected, and then the optical lens set is arranged on the reflecting route of the light source; the optical lens set is formed by stacking and combining a thin film, a Frensnel lens and bearing glass; when the light source penetrates through the optical lens set and irradiates to the preinstalled glass substrate to be detected, as the thin film of the optical lens set has the preset haze, the radiating ridge or the rainbow line can not be generated on the preinstalled glass substrate to be detected, thereby preventing the erroneous judgment of a detector for the detection for the glass substrate to be detected, so as to quicken the detection speed and avoid the deficiency of much time waste for detecting the glass substrate to be detected.
Description
Technical field
The utility model relates to a kind of optical detector, especially refer to include light supply apparatus, catoptron, optical mirror slip group and the adjustment seat that filters, and the film of optical mirror slip group is for having predetermined mist degree, when light source penetrated the optical mirror slip group, and when exposing to default glass substrate to be measured, can eliminate radiating ridge and rainbow line on the glass substrate to be measured simultaneously, prevent the erroneous judgement that the testing staff detects glass substrate to be measured, and then increase the optical detector that the testing staff detects accuracy rate.
Background technology
Arriving along with the knowledge imformation age, it no matter is the network communication diversification of using or 3C industrial technology and multimedia information is flourish now, all be by to research and development of products or improve new function, satisfy the demands of consumers and be target, and the screen of iconoscope pattern in the past, because volume is big, disappearances such as high radiation and power consumption are big, so progress along with science and technology, and have the product of LCD to come out, and LCD does not have the shortcoming of iconoscope pattern screen in the past, so have the picture exquisiteness, low radiation, low electromagnetic wave, little and the advantage such as power saving more of volume, and can be applicable to many electronic products, the screen of desktop computer for example, notebook computer, digital frame, liquid crystal TV set, digital camera or satellite navigation machine etc., and become the indispensable in daily life product of masses gradually, with present LCD is example, in the LCD manufacture process, need carry out defects detection so that faulty materials are rejected, and along with scientific-technical progress, make the quality requirements of detection more and more higher, avoiding product to return, and influence the sales volume of the product and market degree of recognition to brand because of the bad client of suffering of quality or user.
Therefore, the processing procedure that 10 to 12 roads are arranged approximately at glass substrate to be measured in the processing procedure in the general LCD manufacture process, and in manufacture process, must detect known defective at least about 17 kinds, and at present domestic and international equipment vendors utilize light source irradiation mostly on glass substrate to be measured, carry out each defects detection of surface, patent application case as Japan, its publication number is the special flood light for appearance inspection of opening 2000-146846 number, its open day is on May 26th, 2000, see also shown in Figure 8, it is existing schematic side view, find out by knowing shown in the figure, its flood light for appearance inspection A is set up in light supply apparatus A1 and catoptron A2 on framework or the device, but the light source penetration mirror A2 reflection that its light supply apparatus A1 is emitted, and light source is assembled via two lens A3, utilize the switch (not shown) dimming glass A4 (also can be described as photoswitch layer or liquid crystal diffuser) to be adjusted the difference that applies voltage again, and form transparence concentrated the bringing together of light source shone on glass substrate A5 to be measured, or can form in addition and vaporific the light source diffusion is shone on glass substrate A5 to be measured, with this different test case, light source concentrated bring or diffuse to glass substrate A5 to be measured together and detect glass substrate A5 to be measured.
The patent application case of tw Taiwan for another example, it discloses No. 200714837 light intensity distributions adjusting gear, application for a patent for invention was proposed on May 1st, 1996, and application case number is No. 95115490, see also shown in Figure 9, it is another existing use synoptic diagram, find out by knowing shown in the figure, the computer B1 may command light supply apparatus B2 of its light intensity distributions adjusting gear B carries out the irradiation of light source, and transfer to lens combination B4 through optical fiber B3, and utilize lens combination B4 with light source irradiation to reflecting plate B5, and after reflecting plate B5 penetrates into light source light adjusting gear B6 again, expose to glass substrate B7 to be measured again, carrying out glass substrate B7 defects detection to be measured, and light adjusting gear B6 is for to be formed by lens B61 and dimming glass B62 stacked combination, and its dimming glass B62 utilizes the switch (not shown) to switch transparence or vaporific, light source can be concentrated bring together or spread to expose to glass substrate B7 to be measured, lens B61 can concentrate light source to bring together and expose to glass substrate B7 to be measured.
But but there are many disappearances in the existing at present equipment that sees through light source detection glass substrate to be measured when reality is used, as:
(1) sees through light source to glass substrate A5 to be measured as the testing staff, when whether B7 detects defectiveness, can see through switch (not shown) switch light modulation glass A4, B62 concentrates and brings light source together in glass substrate A5 to be measured, on the B7, because of lens A3, the interference of light of B61 and aberration, cause glass substrate A5 to be measured, B7 is last can to produce the radiating ridge of the alternate shape of black and white strip and the rainbow line of multiple color, cause glass substrate A5 to be measured, the erroneous judgement that B7 detects or can't effectively detect defective, can't meet the requirement of high-quality detection now, not only cause the trouble in testing process to the testing staff, and can increase the time of detection, cause detection speed slowly to reach work efficiency and reduce.
(2) as dimming glass A4, the B62 switch switches to when vaporific, light source is transformed into diffusion light and exposes to glass substrate A5 to be measured by concentrating to bring together, during B7, because dimming glass A4, the characteristic of B62, illumination can be reduced to about about 2000 Foot candle lights (Lux) by 8000 original Foot candle lights (Lux), cause illumination deficiency under the diffusion light pattern, can't detect glass substrate A5 to be measured, the defective that B7 must detect under the diffusion light pattern, and dimming glass A4, the price of B62 is high, causes the Costco Wholesale of light intensity distributions adjusting gear B and flood light for appearance inspection A high.
Therefore, how to solve existing testing light source device, shine the problem and the disappearance that produce rainbow line and radiating ridge in glass substrate to be measured, and dimming glass is when switching to the diffusion light checking mode, have the problem of illumination deficiency, be the relevant manufacturer that is engaged in the industry and desire most ardently the place that research improves direction.
Summary of the invention
Therefore, the creator is because above-mentioned problem and disappearance collected related data, via assessing in many ways and considering, and to engage in the many years of experience of the industry accumulation, via constantly studying and revising, the beginning is designed the utility model patent birth survivor of this kind optical detector.
Fundamental purpose of the present utility model do not need to be dimming glass (also can be described as photoswitch layer or liquid crystal diffuser), can provide to concentrate and bring together and the optical detector of diffused light source, and the light supply apparatus of optical detector can penetrate light source, and the light supply apparatus front side is provided with can be with the catoptron of source reflection, and on the source reflection route, be provided with the optical mirror slip group, and the optical mirror slip group is a film, Fresnel Lenses (Frensnel lens) and bearing glass stacked combination form, when light source penetrated the optical mirror slip group, when presetting glass substrate to be measured to expose to, because the film of optical mirror slip group utilizes mixing method to make, and can form the mist degree of predetermined percentage, eliminate radiating ridge and the rainbow line that is radiated on the glass substrate to be measured with this, prevent the erroneous judgement that the testing staff detects glass substrate to be measured, more can accelerate to detect the speed of glass substrate to be measured, and then minimizing testing staff's working time, to increase work efficiency.
Secondary objective of the present utility model is that light source is through once diffusion, after penetrating into optical mirror slip group and glass substrate to be measured more in regular turn, can form the higher diffused light source of illumination, to pass through under the diffused light source pattern, its testing staff can detect the related defects on the glass substrate to be measured easily, can avoid existing and must use the higher dimming glass of price, to reach the purpose that reduces whole cost.
Another purpose of the present utility model is to be provided with between light supply apparatus and the catoptron diffusion adjuster, driving a plurality of adjustment position by propulsion system on the diffusion adjuster moves, allowing light source be to concentrate or be in various degree through the different Qu Erke of adjustment spreads, satisfy different test conditions by this, the test approaches that optical detector can be carried out increases thereupon, allows optical detector have purposes widely.
In order to achieve the above object, the utility model provides a kind of optical detector, especially refer to that light source penetrates the optical mirror slip group, and when exposing to default glass substrate to be measured, can eliminate radiating ridge or rainbow line that glass substrate to be measured produces, include light supply apparatus, catoptron, optical mirror slip group and the adjustment seat that filters, wherein:
Described light supply apparatus energy transmitting illuminant;
Described catoptron is predetermined angle and tilts to be installed in the light supply apparatus front side, and the light source of the described light supply apparatus of described mirror reflects;
Described optical mirror slip group can be accepted the light source that described catoptron reflected, and described optical mirror slip group has the film of predetermined mist degree, and described film is positioned light source is assembled the Fresnel Lenses upper surface that exposes to default glass substrate to be measured, and Fresnel Lenses is positioned to supply the bearing glass of its support;
Described optical filtering adjustment seat is arranged between described light supply apparatus and the described catoptron, and described optical filtering adjustment seat has and the light source adjustment of described light supply apparatus can be changed color, spreads or penetrate a plurality of filter areas that expose to catoptron again.
During enforcement, described optical mirror slip group is 1%-25% in the predetermined mist degree of described film.
During enforcement, described optical mirror slip group is more than 25% in the predetermined mist degree of described film.
During enforcement, a plurality of filter areas of described optical filtering adjustment seat are the optical filter of different colours, transparent optical filter and fog filter, and filter to adjust seat and be equiped with and can drive its displacement and make the actuator of light source irradiation to different filter areas.
The utility model also provides a kind of optical detector, includes light supply apparatus, catoptron, optical mirror slip group and the adjustment seat that filters, wherein:
Described light supply apparatus energy transmitting illuminant;
Described catoptron is predetermined angle and tilts to be installed in described light supply apparatus front side, and the light source of the described light supply apparatus of described mirror reflects;
Described optical mirror slip group can be accepted the light source that described catoptron reflected, and described optical mirror slip group has the Fresnel Lenses that the light source gathering is exposed to default glass substrate to be measured, and described Fresnel Lenses is positioned to supply the bearing glass upper surface of its support, and is provided with the film of the predetermined mist degree of tool between described Fresnel Lenses and described bearing glass;
Described optical filtering adjustment seat is arranged between described light supply apparatus and the described catoptron, and described optical filtering adjustment seat has and the light source adjustment of described light supply apparatus can be changed color, spreads or penetrate a plurality of filter areas that expose to described catoptron again.
During enforcement, described optical mirror slip group is 1%-25% in the predetermined mist degree of described film.
During enforcement, described optical mirror slip group is more than 25% in the predetermined mist degree of described film.
During enforcement, a plurality of filter areas of described optical filtering adjustment seat are the optical filter of different colours, transparent optical filter and fog filter, and described optical filtering adjustment seat is equiped with and can drives its displacement and make light source irradiation to the actuator of different filter areas.
The utility model also provides a kind of optical detector, includes light supply apparatus, catoptron, optical mirror slip group and the adjustment seat that filters, wherein:
Described light supply apparatus energy transmitting illuminant;
Described catoptron is predetermined angle and tilts to be installed in described light supply apparatus front side, and the light source of the described light supply apparatus of described mirror reflects;
Described optical mirror slip group can be accepted the light source that described catoptron reflected, and described optical mirror slip group has the Fresnel Lenses that the light source gathering is exposed to default glass substrate to be measured, and described Fresnel Lenses is positioned to supply the bearing glass upper surface of its support, and is fitted with the film of predetermined mist degree at described bearing glass lower surface;
Described optical filtering adjustment seat is arranged between described light supply apparatus and the described catoptron, and described optical filtering adjustment seat has and the light source adjustment of described light supply apparatus can be changed color, spreads or penetrate a plurality of filter areas that expose to described catoptron again.
During enforcement, described optical mirror slip group is 1%-25% in the predetermined mist degree of described film.
During enforcement, described optical mirror slip group is more than 25% in the predetermined mist degree of described film.
During enforcement, a plurality of filter areas of described optical filtering adjustment seat are the optical filter of different colours, transparent optical filter and fog filter, and filter to adjust seat and be equiped with and can drive its displacement and make the actuator of light source irradiation to different filter areas.
The utility model also provides a kind of optical detector, includes catoptron, optical mirror slip group and one or more light supply apparatus, wherein:
Described one or more light supply apparatus is provided with the light emitting source of one or more energy transmitting illuminants, and described light emitting source transmitting illuminant one side is provided with the projection camera lens that light source projects is gone out, and is provided with the optical filtering adjustment seat of adjusting light source between described light emitting source and described projection camera lens;
Described catoptron is predetermined angle and tilts to be installed in described light supply apparatus front side, and the light source of the described light supply apparatus of described mirror reflects;
Described optical mirror slip group can be accepted the light source that described catoptron reflected, and described optical mirror slip group is provided with a slice or the above Fresnel Lenses that exposes to default glass substrate to be measured that light source is assembled of a slice, and all Fresnel Lenses are positioned to supply the bearing glass upper surface of its support, and are provided with the film of the predetermined mist degree of tool in described optical mirror slip group.
During enforcement, described optical mirror slip group is 1%-25% in the predetermined mist degree of described film.
During enforcement, described optical mirror slip group is more than 25% in the predetermined mist degree of described film.
During enforcement, the Fresnel Lenses upper surface of described optical mirror slip group is provided with the film of the predetermined mist degree of tool.
During enforcement, be provided with the film of the predetermined mist degree of tool between the Fresnel Lenses of described optical mirror slip group and the described bearing glass.
During enforcement, the bearing glass lower surface of described optical mirror slip group is fitted with the film of predetermined mist degree.
During enforcement, being provided with between described light supply apparatus and the described catoptron filters adjusts seat, and described optical filtering adjustment seat has and the light source adjustment of described light supply apparatus can be changed color, spreads or penetrate a plurality of filter areas that expose to described catoptron again.
During enforcement, a plurality of filter areas of described optical filtering adjustment seat are the optical filter of different colours, transparent optical filter or fog filter, and described optical filtering adjustment seat is equiped with and can drives its displacement and make light source irradiation to the actuator of different filter areas.
During enforcement, the light supply apparatus of described catoptron one side is provided with the leaded light post of gathering of guiding light source and straight ahead at the light source projects place of described light emitting source, and be provided with between described light emitting source and the described leaded light post and can isolate ultraviolet light, the heat insulation mirror of infrared light and thermal source, and be provided with the optical filtering of adjusting light source in the described light supply apparatus and adjust seat, and described optical filtering adjustment seat has and the light source adjustment of described light supply apparatus can be changed color, diffusion or penetrate a plurality of filter areas that expose to the leaded light post again, described a plurality of filter area is the optical filter of different colours, transparent optical filter or fog filter, and described optical filtering adjustment seat is equiped with and can drives its displacement and make light source irradiation to the actuator of different filter areas.
During enforcement, described optical filtering adjustment seat is positioned between described leaded light post and the described heat insulation mirror.
During enforcement, described optical filtering adjustment seat is positioned between described leaded light post and the described heat insulation mirror, and between described light supply apparatus and described catoptron, be provided with and adjust the diffusion adjuster that allows light source penetrate or allow light source diffusion, and described diffusion adjuster is provided with can adjust a plurality of adjustment district that allows light source concentrate or to spread, described a plurality of adjustment district is transparent and diffusibleness is 5%, 10% or 15%, and described diffusion adjuster is provided with the propulsion system that drive its displacement and light source irradiation is distinguished to different adjustment.
During enforcement, described optical mirror slip group is provided with a slice or the above Fresnel Lenses of a slice, and a light supply apparatus shines in all Fresnel Lenses.
Compared with prior art, optical detector described in the utility model, include light supply apparatus, catoptron, optical mirror slip group and the adjustment seat that filters, and the film of optical mirror slip group is for having predetermined mist degree, when light source penetrated the optical mirror slip group, and when exposing to glass substrate default to be measured, can eliminate radiating ridge and rainbow line on the glass substrate to be measured simultaneously, prevent the erroneous judgement that the testing staff detects glass substrate to be measured, and then the increase testing staff detects accuracy rate.
Description of drawings
Fig. 1 is a three-dimensional exploded view of the present utility model;
Fig. 2 is a side cutaway view of the present utility model;
Fig. 3 is a schematic perspective view of the present utility model;
Fig. 4 is the three-dimensional exploded view of the utility model first preferred embodiment;
Fig. 5 is the three-dimensional exploded view of the utility model second preferred embodiment;
Fig. 6 is the side view of the utility model the 3rd preferred embodiment;
Fig. 7 is the stereographic map of the utility model the 4th preferred embodiment;
Fig. 8 is existing schematic side view;
Fig. 9 is another existing use synoptic diagram.
Description of reference numerals: 1-light supply apparatus; The 11-light emitting source; 13-leaded light post; The heat insulation mirror of 12-; 14-throws camera lens; The 2-catoptron; 3-optical mirror slip group; The 31-film; The 33-bearing glass; The 32-Fresnel Lenses; 4-glass substrate to be measured; 5-filters and adjusts seat; The 51-filter area; The 6-actuator; 7-spreads adjuster; 71-adjusts the district; The 72-propulsion system; The A-flood light for appearance inspection; The A1-light supply apparatus; The A4-dimming glass; The A2-catoptron; A5-glass substrate to be measured; The A3-lens; B-light intensity distributions adjusting gear; The B1-computer; B6-light adjusting gear; The B2-light supply apparatus; The B61-lens; B3-optical fiber; The B62-dimming glass; The B4-lens combination; B7-glass substrate to be measured; The B5-reflecting plate.
Embodiment
For reaching above-mentioned purpose and effect, technological means that the utility model adopted and structure thereof, drawing illustrates in detail that with regard to preferred embodiment of the present utility model its feature and function are as follows, profit is understood fully.
See also Fig. 1, Fig. 2, shown in Figure 3, be three-dimensional exploded view of the present utility model, side cutaway view and schematic perspective view, find out that by knowing shown in the figure optical detector of the present utility model comprises light supply apparatus 1, catoptron 2, optical mirror slip group 3 and the adjustment seat 5 that filters, wherein:
Described light supply apparatus 1 can carry out light source irradiation.
Described catoptron 2 can be with the face mirror of source reflection.
Described optical mirror slip group 3 has film 31, and film 31 is positioned at the upper surface of Fresnel Lenses (Frensnel lens) 32, is positioned at the upper surface of bearing glass 33 again with Fresnel Lenses 32.
Described optical filtering adjustment seat 5 can be with light source variable color, diffusion or concentrated the bringing together that penetrates.
Above-mentioned member is when assembling, direction installing catoptron 2 in light supply apparatus 1 transmitting illuminant, light source can be shone on catoptron 2 to be reflected, and the adjustment seat 5 that filters is installed between light supply apparatus 1 and the catoptron 2, and the adjustment seat 5 that filters refills to be located on the actuator 6, install optical mirror slip group 3 in the direction of catoptron 2 reflection sources again, but make the default to be measured glass substrate 4 of light source cover in the below.
See also shown in Figure 3, it is schematic perspective view of the present utility model, find out by knowing shown in the figure, during the actual use of described optical detector, light supply apparatus 1 is installed in framework or device, and light supply apparatus 1 can be dispersed ejaculation with light source, and utilize catoptron 2 light source to be reflected the film 31 that penetrates into optical mirror slip group 3 in regular turn down, Fresnel Lenses (Frensnel lens) 32 and bearing glass 33, and light source shines in glass substrate 4 to be measured again, and the film 31 of optical mirror slip group 3 has predetermined mist degree, so after light source penetrates film 31, when exposing to glass substrate 4 to be measured again, can prevent that glass substrate 4 to be measured from forming rainbow line or radiating ridge phenomenon, in addition, the Fresnel Lenses 32 of described optical mirror slip group 3 has to concentrate brings light source or optically focused characteristic together, so can utilize Fresnel Lenses 32 that light source is focused on, penetrate again bearing glass 33 with light source irradiation in glass substrate 4 to be measured, and Fresnel Lenses 32 can be one chip or be spliced by polylith, and formation a slice larger area Fresnel Lenses 32, penetrate into larger area Fresnel Lenses 32 with this light source, and then can detect larger area glass substrate 4 to be measured, can detect the restriction of size to break through glass substrate 4 to be measured, and have the advantage that promotes applicability.
Above-mentioned Fresnel Lenses 32 is positioned the upper surface of bearing glass 33, because the size of glass substrate 4 to be measured increases day by day, make the size of Fresnel Lenses 32 also increase thereupon, so Fresnel Lenses 32 submarginal positions may be bent downwardly distortion, can support or holding Fresnel Lenses 32 this moment by bearing glass 33, prevents to influence the spotlight effect of Fresnel Lenses 32.
Seeing also shown in Figure 3ly, is schematic perspective view of the present utility model, finds out that by knowing shown in the figure film 31 manufacture methods of described optical mirror slip group 3 are sneaked into the particle of predetermined number or size in clear plastic by mixing method; Or utilize roll-in lines mode; be pressed with the figure or the lines of predetermined number or size at the clear plastic top roll; to form the mist degree of default number percent; when the film 31 of clear plastic material is sneaked into less; the particle of negligible amounts or roll-in have less; when less default figure or lines; the number percent of the mist degree of its film 31 is lower; when mist degree during between 1%-25%; can eliminate light source irradiation to glass substrate 4 to be measured; the radiating ridge of the chequered with black and white shape that its glass substrate 4 to be measured is produced; can detect defective on the glass substrate 4 to be measured with this; and the situation of minimizing erroneous judgement; and then can accelerate to detect time of every glass substrate 4 to be measured; with reduction testing staff's working time and employing of testing staff, and then reach the human cost amount of money that reduces the required burden of manufacturer.
In addition; bigger when sneaking into; when more particle of quantity or roll-in have than multiple preset figure or lines to clear plastic; the percent haze of film 31 is improved; when mist degree is brought up to more than 25%; and penetration mirror 2 reflects light source down the film 31 that penetrates into optical mirror slip group 3 in regular turn; behind Fresnel Lenses 32 and the bearing glass 33; and when exposing to glass substrate 4 to be measured again with light source; glass substrate 4 to be measured can not produce any radiating ridge and rainbow line simultaneously; and then can detect related defects on the glass substrate 4 to be measured; see through the different percent haze of adjusting film 31 with this; just can be used in the inspection of defective in the different processing procedures, reach advantage with lifting applicability.
In addition, seat 5 is adjusted in the optical filtering that is provided with strip between described light supply apparatus 1 and the catoptron 2, and described optical filtering adjustment seat 5 has the filter area 51 of a plurality of series arrangement shapes, and each filter area 51 can be the optical filter of different colours (as ruddiness, green glow, shades of colours such as blue light), transparent optical filter or fog filter, and filter area 51 can be Openworks shape, make the filter area 51 of Openworks shape replace transparent optical filter, and fog filter can be frosted glass, adjusting seat 5 to filter again is installed on the actuator 6, can will filter by actuator 6 and adjust seat 5 and move, the light source of light supply apparatus 1 is penetrated filter adjust the different filter areas 51 of seat 5 after, can irradiate different light source colours and spectrum, with the defects detection that is applicable to that glass substrate to be measured 4 is different, and actuator 6 will filter adjust seat 5 and move to the transparent optical filter of filter area 51 after, the light source that light supply apparatus 1 can be shone, the reflection of penetration mirror 2, making light source penetrate optical mirror slip group 3 exposes on the glass substrate 4 to be checked, concentrate the function of bringing light source together to reach, when actuator 6 will filter adjust seat 5 and move to the fog filter of filter area 51 after, the light source that light supply apparatus 1 is irradiated can be done the once adjustment of diffusion, see through the adjustment seat 5 that filters with this and carry out the variable color of light source, concentrate and to bring together or spread, reach the effect that can detect glass substrate 4 different defectives to be measured.
Light source after the above-mentioned once diffusion, after penetrating into Fresnel Lenses 32, because the directivity of light source is destroyed, the focusing that only can form local trace is brought together, most light source that forms similar diffusion effect, and illumination also can reach 3000 Foot candle lights (Lux), and detect the required minimal illumination of glass substrate 4 disappearances to be measured is 3000 Foot candle lights (Lux), so the detection that can carry out under the diffusion light pattern glass substrate 4 to be measured, avoiding the diffused light source illumination deficiency of existing light supply apparatus, and the disappearance that can't detect glass substrate 4 to be measured.
In addition, described optical filtering adjustment seat 5 can be strip or circle, when the adjustment seat 5 that filters is strip, its strip can be from left to right, from top to bottom or oblique, see through and can be motor, the actuator 6 of oil hydraulic cylinder or pneumatic cylinder will filter and adjust seat 5 and adjust mobile on track, and when filter adjusting seat 5 and be circle, it filters and adjusts seat 5 surfaces around being provided with a plurality of filter areas 51, to filter by actuator 6 and to adjust seat 5 and rotate, make the different filter areas 51 of the penetrable optical filtering adjustment of the light source seat 5 of light supply apparatus 1, to form different colours, diffusion or the concentrated light of bringing together, reaching detection glass substrate 4 needed detection light source to be measured by this gets final product, non-so promptly limit to claim of the present utility model, therefore the simple and easy modification and the equivalent structure that use the utility model instructions and graphic content to do such as change, and all should in like manner be contained in the claim of the present utility model.
See also Fig. 1, Fig. 3, Fig. 4 and shown in Figure 5, it is the utility model three-dimensional exploded view, schematic perspective view, the three-dimensional exploded view of first preferred embodiment, the three-dimensional exploded view of second preferred embodiment, find out by knowing shown in the figure, because film 31 positions of described optical mirror slip group 3 and Fresnel Lenses 32 and bearing glass 33 are mutually to timing, the light source that its catoptron 2 is reflected penetrates into optical mirror slip group 3, the detection effect that exposes to glass substrate 4 to be measured more also can not influence, so between film 31 and Fresnel Lenses 32 and the bearing glass 33 different combinations can be arranged, its film 31 can be positioned on the upper surface of Fresnel Lenses 32, between Fresnel Lenses 32 and the bearing glass 33 or fit in bearing glass 33 below, see through the predetermined mist degree of film 31, make light source penetrate optical mirror slip group 3, and when exposing to default glass substrate 4 to be measured, can prevent that glass substrate 4 to be measured from producing radiating ridge and the rainbow line gets final product, non-so promptly limit to claim of the present utility model, so the simple and easy modification and the equivalent structure that use the utility model instructions and graphic content to do such as change, all should in like manner be contained in the claim of the present utility model, close and give Chen Ming.
Please consult Fig. 3 again, shown in Figure 6, it is schematic perspective view of the present utility model, the side view of the 3rd preferred embodiment, find out by knowing shown in the figure, described light supply apparatus 1 is provided with one or more light emitting source 11, and the light source projects side of light emitting source 11 is provided with can isolate ultraviolet light, the heat insulation mirror 12 of infrared light and thermal source, and be provided with at the light source projects place that the guiding light source is assembled and the leaded light post 13 of straight ahead, side in addition at leaded light post 13 relative light emitting sources 11 is provided with the projection camera lens 14 that light source is throwed outwardly again, and the adjustment seat 5 that filters can be installed in the light supply apparatus 1, its adjustment seat 5 that filters can be installed between heat insulation mirror 12 and the leaded light post 13, or be installed between leaded light post 13 and the projection camera lens 14, and can between light supply apparatus 1 and catoptron 2, be provided with the diffusion adjuster 7 that can allow light source penetrate or allow the light source diffusion, its diffusion adjuster 7 is provided with the adjustment district 71 of linearly a plurality of or annular arrangement, and a plurality of adjustment district 71 can be transparent and the different diffusiblenesss of one or more tools (as 5%, 10% or 15% etc.) zone, and diffusion adjuster 7 is connected with propulsion system 72 (as motor, cylinder), just can utilize propulsion system 72 to drive diffusion adjuster 7 and do straight-line displacement or rotation, allowing different adjustment districts 71 align light supply apparatus 1 passes for the light source of its projection, adjusting light source by this is cover or is different diffusion irradiations, meet different testing conditions, allow single optical detector just can reach many detections that optical detector just can carry out originally, and can save the cost of buying board and reduce the shared space of board.
In addition, see also Fig. 3, shown in Figure 7, it is schematic perspective view of the present utility model, the stereographic map of the 4th preferred embodiment, find out by knowing shown in the figure, described optical mirror slip group 3 can be provided with a slice, two or four Fresnel Lenses 32, and two Fresnel Lenses 32 cut for the mode of utilizing the central point skew, and utilize skew lens after cutting to splice to increase size, the hot spot of optical mirror slip group 3 is evenly increased, and the radius-of-curvature of two Fresnel Lenses 32 and seam crossing can not form the dark space, allow range of exposures can increase the detection of carrying out large scale glass substrate 4 to be measured, and four Fresnel Lenses 32 also utilize central point to cut towards the mode of splicing centre skew to be spliced again, moreover, can utilize 1 pair of a slice of single light source device, two or four Fresnel Lenses 32 shine, or be provided with the light supply apparatus 1 of corresponding Fresnel Lenses 32 quantity, single light source device 1 is shone in single Fresnel Lenses 32.
Above-mentioned optical detector of the present utility model can have following each advantage when reality is used, as:
(1) because optical detector includes light supply apparatus 1, catoptron 2, optical mirror slip group 3 and the adjustment seat 5 that filters, and the film 31 of optical mirror slip group 3 has predetermined mist degree, when light source penetrated optical mirror slip group 3, and when exposing to default glass substrate 4 to be measured, can prevent that glass substrate 4 to be measured from producing radiating ridge and rainbow line, avoid the testing staff to the erroneous judgement that glass substrate 4 to be measured detects, accelerate detection speed and accuracy with this.
(2) since light source through once the diffusion, penetrate into optical mirror slip group 3, expose to glass substrate 4 to be measured again, can get the higher diffused light source of an illumination, make the testing staff can be under the diffusion light pattern, detect the related defects on the glass substrate 4 to be measured easily, and needn't use the member of dimming glass (also can be described as photoswitch layer or liquid crystal diffuser), and then the cost saving that can reduce cost.
(3) can be provided with diffusion adjuster 7 between described light supply apparatus 1 and the catoptron 2, drive a plurality of adjustment district's 71 displacements by propulsion system 72, just can allow light source pass different adjustment districts 71, because a plurality of adjustment district 71 can be transparent or different diffusiblenesss, just can adjust the irradiation that allows light source be cover or be different diffusions, reach different test conditions by this, the test approaches that the optical detector increase can be carried out.
Therefore; the utility model is primarily aimed at optical detector; especially refer to include light supply apparatus 1; catoptron 2; the optical mirror slip group 3 and the adjustment seat 5 that filters; optical mirror slip group 3 utilizes mixing method to make the mist degree of predetermined percentage again; can eliminate the radiating ridge and the rainbow line that are radiated on the glass substrate 4 to be measured; with the erroneous judgement of avoiding the testing staff that glass substrate 4 to be measured is detected; and then quick and convenient detection glass substrate 4 to be measured; and need not see through dimming glass; can provide to concentrate and bring together and diffused light source is main key protection point; but; the above only is preferred embodiment of the present utility model; non-so promptly limit to claim of the present utility model, the simple and easy modification and the equivalent structure that therefore use the utility model instructions and graphic content to do such as change, and all should in like manner be contained in the claim of the present utility model.
In sum, the above-mentioned optical detector of the utility model can reach its effect and purpose really, so the utility model really is the utility model of a practicality excellence when using, for meeting the application important document of novel patent, file an application in accordance with the law, expect that examining committee grants accurate this case early, to ensure creator's arduous utility model, if an ancient unit of weight office examine committee have any check doubtful, the indication of please writing to us without sparing, settled the doing one's utmost of creator cooperates, and the true feeling moral is just.
Claims (24)
1. an optical detector is characterized in that, includes light supply apparatus, catoptron, optical mirror slip group and the adjustment seat that filters, wherein:
Described light supply apparatus energy transmitting illuminant;
Described catoptron is predetermined angle and tilts to be installed in the light supply apparatus front side, and the light source of the described light supply apparatus of described mirror reflects;
Described optical mirror slip group can be accepted the light source that described catoptron reflected, and described optical mirror slip group has the film of predetermined mist degree, and described film is positioned light source is assembled the Fresnel Lenses upper surface that exposes to default glass substrate to be measured, and Fresnel Lenses is positioned to supply the bearing glass of its support;
Described optical filtering adjustment seat is arranged between described light supply apparatus and the described catoptron, and described optical filtering adjustment seat has and the light source adjustment of described light supply apparatus can be changed color, spreads or penetrate a plurality of filter areas that expose to catoptron again.
2. optical detector as claimed in claim 1 is characterized in that, described optical mirror slip group is 1%-25% in the predetermined mist degree of described film.
3. optical detector as claimed in claim 1 is characterized in that, described optical mirror slip group is more than 25% in the predetermined mist degree of described film.
4. optical detector as claimed in claim 1, it is characterized in that, a plurality of filter areas of described optical filtering adjustment seat are the optical filter of different colours, transparent optical filter and fog filter, and filter to adjust seat and be equiped with and can drive its displacement and make the actuator of light source irradiation to different filter areas.
5. an optical detector is characterized in that, includes light supply apparatus, catoptron, optical mirror slip group and the adjustment seat that filters, wherein:
Described light supply apparatus energy transmitting illuminant;
Described catoptron is predetermined angle and tilts to be installed in described light supply apparatus front side, and the light source of the described light supply apparatus of described mirror reflects;
Described optical mirror slip group can be accepted the light source that described catoptron reflected, and described optical mirror slip group has the Fresnel Lenses that the light source gathering is exposed to default glass substrate to be measured, and described Fresnel Lenses is positioned to supply the bearing glass upper surface of its support, and is provided with the film of the predetermined mist degree of tool between described Fresnel Lenses and described bearing glass;
Described optical filtering adjustment seat is arranged between described light supply apparatus and the described catoptron, and described optical filtering adjustment seat has and the light source adjustment of described light supply apparatus can be changed color, spreads or penetrate a plurality of filter areas that expose to described catoptron again.
6. optical detector as claimed in claim 5 is characterized in that, described optical mirror slip group is 1%-25% in the predetermined mist degree of described film.
7. optical detector as claimed in claim 5 is characterized in that, described optical mirror slip group is more than 25% in the predetermined mist degree of described film.
8. optical detector as claimed in claim 5, it is characterized in that, a plurality of filter areas of described optical filtering adjustment seat are the optical filter of different colours, transparent optical filter and fog filter, and described optical filtering adjustment seat is equiped with and can drives its displacement and make light source irradiation to the actuator of different filter areas.
9. an optical detector is characterized in that, includes light supply apparatus, catoptron, optical mirror slip group and the adjustment seat that filters, wherein:
Described light supply apparatus energy transmitting illuminant;
Described catoptron is predetermined angle and tilts to be installed in described light supply apparatus front side, and the light source of the described light supply apparatus of described mirror reflects;
Described optical mirror slip group can be accepted the light source that described catoptron reflected, and described optical mirror slip group has the Fresnel Lenses that the light source gathering is exposed to default glass substrate to be measured, and described Fresnel Lenses is positioned to supply the bearing glass upper surface of its support, and is fitted with the film of predetermined mist degree at described bearing glass lower surface;
Described optical filtering adjustment seat is arranged between described light supply apparatus and the described catoptron, and described optical filtering adjustment seat has and the light source adjustment of described light supply apparatus can be changed color, spreads or penetrate a plurality of filter areas that expose to described catoptron again.
10. optical detector as claimed in claim 9 is characterized in that, described optical mirror slip group is 1%-25% in the predetermined mist degree of described film.
11. optical detector as claimed in claim 9 is characterized in that, described optical mirror slip group is more than 25% in the predetermined mist degree of described film.
12. optical detector as claimed in claim 9, it is characterized in that, a plurality of filter areas of described optical filtering adjustment seat are the optical filter of different colours, transparent optical filter and fog filter, and filter to adjust seat and be equiped with and can drive its displacement and make the actuator of light source irradiation to different filter areas.
13. an optical detector is characterized in that, includes catoptron, optical mirror slip group and one or more light supply apparatus, wherein:
Described one or more light supply apparatus is provided with the light emitting source of one or more energy transmitting illuminants, and described light emitting source transmitting illuminant one side is provided with the projection camera lens that light source projects is gone out, and is provided with the optical filtering adjustment seat of adjusting light source between described light emitting source and described projection camera lens;
Described catoptron is predetermined angle and tilts to be installed in described light supply apparatus front side, and the light source of the described light supply apparatus of described mirror reflects;
Described optical mirror slip group can be accepted the light source that described catoptron reflected, and described optical mirror slip group is provided with a slice or the above Fresnel Lenses that exposes to default glass substrate to be measured that light source is assembled of a slice, and all Fresnel Lenses are positioned to supply the bearing glass upper surface of its support, and are provided with the film of the predetermined mist degree of tool in described optical mirror slip group.
14. optical detector as claimed in claim 13 is characterized in that, described optical mirror slip group is 1%-25% in the predetermined mist degree of described film.
15. optical detector as claimed in claim 13 is characterized in that, described optical mirror slip group is more than 25% in the predetermined mist degree of described film.
16. optical detector as claimed in claim 13 is characterized in that, the Fresnel Lenses upper surface of described optical mirror slip group is provided with the film of the predetermined mist degree of tool.
17. optical detector as claimed in claim 13 is characterized in that, is provided with the film of the predetermined mist degree of tool between the Fresnel Lenses of described optical mirror slip group and the described bearing glass.
18. optical detector as claimed in claim 13 is characterized in that, the bearing glass lower surface of described optical mirror slip group is fitted with the film of predetermined mist degree.
19. optical detector as claimed in claim 13, it is characterized in that, being provided with between described light supply apparatus and the described catoptron filters adjusts seat, and described optical filtering adjustment seat has and the light source adjustment of described light supply apparatus can be changed color, spreads or penetrate a plurality of filter areas that expose to described catoptron again.
20. optical detector as claimed in claim 19, it is characterized in that, a plurality of filter areas of described optical filtering adjustment seat are the optical filter of different colours, transparent optical filter or fog filter, and described optical filtering adjustment seat is equiped with and can drives its displacement and make light source irradiation to the actuator of different filter areas.
21. optical detector as claimed in claim 13, it is characterized in that, the light supply apparatus of described catoptron one side is provided with the leaded light post of gathering of guiding light source and straight ahead at the light source projects place of described light emitting source, and be provided with between described light emitting source and the described leaded light post and can isolate ultraviolet light, the heat insulation mirror of infrared light and thermal source, and be provided with the optical filtering of adjusting light source in the described light supply apparatus and adjust seat, and described optical filtering adjustment seat has and the light source adjustment of described light supply apparatus can be changed color, diffusion or penetrate a plurality of filter areas that expose to the leaded light post again, described a plurality of filter area is the optical filter of different colours, transparent optical filter or fog filter, and described optical filtering adjustment seat is equiped with and can drives its displacement and make light source irradiation to the actuator of different filter areas.
22. optical detector as claimed in claim 21 is characterized in that, described optical filtering adjustment seat is positioned between described leaded light post and the described heat insulation mirror.
23. optical detector as claimed in claim 21, it is characterized in that, described optical filtering adjustment seat is positioned between described leaded light post and the described heat insulation mirror, and between described light supply apparatus and described catoptron, be provided with and adjust the diffusion adjuster that allows light source penetrate or allow light source diffusion, and described diffusion adjuster is provided with can adjust a plurality of adjustment district that allows light source concentrate or to spread, described a plurality of adjustment district is transparent and diffusibleness is 5%, 10% or 15%, and described diffusion adjuster is provided with the propulsion system that drive its displacement and light source irradiation is distinguished to different adjustment.
24. optical detector as claimed in claim 13 is characterized in that, described optical mirror slip group is provided with a slice or the above Fresnel Lenses of a slice, and a light supply apparatus shines in all Fresnel Lenses.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201125904U CN201637681U (en) | 2010-02-04 | 2010-02-04 | Optical detection machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201125904U CN201637681U (en) | 2010-02-04 | 2010-02-04 | Optical detection machine |
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| Publication Number | Publication Date |
|---|---|
| CN201637681U true CN201637681U (en) | 2010-11-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010201125904U Expired - Fee Related CN201637681U (en) | 2010-02-04 | 2010-02-04 | Optical detection machine |
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| CN (1) | CN201637681U (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103868926A (en) * | 2012-12-12 | 2014-06-18 | 由田新技股份有限公司 | Detection device |
| CN107271153A (en) * | 2017-07-31 | 2017-10-20 | 信利半导体有限公司 | A kind of diffusion barrier hides the method for testing of the flaw |
| CN107589125A (en) * | 2017-09-13 | 2018-01-16 | 杭州艾咪科技有限公司 | subway shield glass display system |
| CN108267450A (en) * | 2018-02-28 | 2018-07-10 | 京东方科技集团股份有限公司 | Substrate detection apparatus and method |
| CN109632824A (en) * | 2019-01-11 | 2019-04-16 | 英特尔产品（成都）有限公司 | Object inspection systems for object abnormal examination |
| CN109827974A (en) * | 2018-08-30 | 2019-05-31 | 东莞市微科光电科技有限公司 | A kind of resin optical filter film splits detection device and detection method |
| CN112683787A (en) * | 2019-10-17 | 2021-04-20 | 神讯电脑(昆山)有限公司 | Object surface detection system and detection method based on artificial neural network |
| CN113514467A (en) * | 2020-04-10 | 2021-10-19 | 康耐视公司 | Optical system using variable diffuser plate |
| CN116794068A (en) * | 2023-05-31 | 2023-09-22 | 成都瑞波科材料科技有限公司 | Rainbow pattern detection device and method for coating process and coating process equipment |
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2010
- 2010-02-04 CN CN2010201125904U patent/CN201637681U/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103868926A (en) * | 2012-12-12 | 2014-06-18 | 由田新技股份有限公司 | Detection device |
| CN107271153A (en) * | 2017-07-31 | 2017-10-20 | 信利半导体有限公司 | A kind of diffusion barrier hides the method for testing of the flaw |
| CN107589125A (en) * | 2017-09-13 | 2018-01-16 | 杭州艾咪科技有限公司 | subway shield glass display system |
| CN108267450A (en) * | 2018-02-28 | 2018-07-10 | 京东方科技集团股份有限公司 | Substrate detection apparatus and method |
| CN109827974A (en) * | 2018-08-30 | 2019-05-31 | 东莞市微科光电科技有限公司 | A kind of resin optical filter film splits detection device and detection method |
| CN109827974B (en) * | 2018-08-30 | 2022-03-08 | 东莞市微科光电科技有限公司 | Resin optical filter film crack detection device and detection method |
| CN109632824A (en) * | 2019-01-11 | 2019-04-16 | 英特尔产品（成都）有限公司 | Object inspection systems for object abnormal examination |
| CN112683787A (en) * | 2019-10-17 | 2021-04-20 | 神讯电脑(昆山)有限公司 | Object surface detection system and detection method based on artificial neural network |
| CN113514467A (en) * | 2020-04-10 | 2021-10-19 | 康耐视公司 | Optical system using variable diffuser plate |
| CN116794068A (en) * | 2023-05-31 | 2023-09-22 | 成都瑞波科材料科技有限公司 | Rainbow pattern detection device and method for coating process and coating process equipment |
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