TWI270670B - Lighting apparatus for inspecting substrate - Google Patents

Abstract

Lighting apparatus for inspecting a substrate for providing optimal optical conditions for inspecting a surface of a large sized substrate, including a plurality of mirrors for respectively reflecting lights from a plurality of light sources moving on a curved surface in at least one direction of left/right and up/down directions, and Fresnel lenses for focusing divergent lights reflected at the mirrors onto one focal point, and illuminating the substrate on a stage, thereby simplifying a moving structure of the lighting apparatus and permitting a worker to carry out the inspection at one focal point without having movement of the focal point by illuminating a large area of a large sized substrate with a plurality of lights.

Description

1270670 Case No. 92124874 曰 Amendment 5, Invention Description (1) The invention according to the invention is a conventional substrate which is conventionally reflected by a naked eye piece, a dust on a LCD substrate or a sweat-light detecting device. The light mirror (Fresnel is guided to the substrate, please refer to the report, which discloses that the method uses the surface to reflect back to the technical field of light detecting device for introducing light to the large scale to detect the flaw of the substrate by the naked eye. • PDP base point), emits a light detection base detection device.) illuminate the light. For the light of the inspection projection light, please refer to the partial diagram of the device measured in the first figure. The micromirror is connected by an objective lens, as shown in the first figure. It is shown that a mirror 1 2 is used to detect the semiconductor crystal plate or the EL substrate by reflecting the light 1 3 to line the self-reflecting mirror 12 and the Fresnel lens light onto the platform 20 . The ruthenium (such as residual on the substrate and in order to facilitate visual inspection, usually uses a line to evenly illuminate the entire substrate, and use the substrate board to see if there is sweat or fatigue. Light is emitted through a light source to Fresnel through the focus of the Fresnel lens, and then the light substrate. Patented No. 2 0 0 0 - 1 3 1 2 2 6 patented PDP backside phosphor coating The method of the state, the line to the surface of the object to be inspected, and the surface of the measuring line is detected by the intensity change of the measuring line. The display system is a conventional optical inspection for detecting the substrate. The main principle of the optical measuring device is similar. The light detecting device for detecting the substrate comprises light emitted by the active 11 , and the divergent light reflected by the upper Fresnel lens is concentrated into parallel light 14 Converging through the parallel plates 10 of the upper Fresnel lens i 3 and one of the lower Fresnel lenses 14

1270670

Case No. 92124874 V. Description of the Invention (2) Liquid crystal panel 15 can be made to generate straight or scattered light by means of electricity-like opaque state. The force should be converted into a transparent or the function of the upper lens 13 such as a microscope. The function of the lens 14 is as a microscope objective, in addition, the brother:: the lens 13 and the lower Fresnel lens 1 The space between the 4 rooms is not & The conventional substrate light detecting device can be regarded as a mirror of the microscope, which is self-twisted and reflected by the mirror 12 to the upper Fresnel lens 圼3: ^ 政光; the 透镜 lens 13 converges the light into parallel And then borrow = die: er lens 14 to converge the light again onto the substrate i on the platform 20 〇. 9 Non & Thus, by illuminating the substrate 10 from the focus, the 瑕疵 on the 10 瑕疵 is illuminated. Locating the substrate οί = the liquid crystal panel 15 at the bottom of the Philippine lens 14 can be converted into a transparent or opaque state by the control of the power, for example, when the control + η = off 16 turns off the knife to power off ' Also, 17 supplies 'power s, liquid', and liquid 7 scatter without illuminating the substrate 1 〇, whereas when the switch 16 is turned on to pay the supplied/supplied power, the liquid crystal panel transmits light to illuminate the substrate. 10, and this configuration mode is to ensure that the light will illuminate the substrate 1 only when the user is detecting the substrate 10. However, as the screen size of the flat display (such as LCD, pDp) is getting larger and larger As the size of the enamel is getting smaller and smaller, it is more and more difficult to make a flawless product. In addition, it is more difficult to illuminate the entire substrate with light at the same time. For example, 'we can move the light detection device without moving. Next, profit

Page 8 t number 92124874 V. Description of invention (3)

jpQ—The light detecting device illuminates an LCD substrate with a length of 3 7 0mnix 4 7 Omm (as shown in Figure 2B), but if the length and width of the substrate become n〇〇mmx 125〇mm B inch, then the traditional The method is difficult to measure. Generally, the width of the substrate detectable by a light detecting device is between 400 mm and 5 ,. Therefore, when performing surface detection of a large-scale substrate, the displacement of the upper and lower directions can be performed by moving a photodetecting device (eg, 3A, 3B, or not, or by moving two photodetecting devices for displacement in the up and down direction (as shown in Figs. 4A and 4B). When using a light detecting device to detect the substrate, in order to improve the accuracy of the detection 1, generally every time the moving light detecting device is displaced in the up, down, left, and right directions, the incident angle, the reflection angle, the wavelength, the intensity, and the scattering of the light are adjusted. And the direction of polarization to optimize the optical condition of the object under test. However, the conventional substrate photodetecting device has the following defects: ^, (a), first, as shown in Figs. 3A and 3B, the method of detecting a large-sized substrate by the upper and lower left and right displacement photodetecting devices, due to photodetection The device can only illuminate a part of the substrate at a time, and often lengthens the inspection time of the large-sized substrate, and the substrate is cut into multiple regions in sequence, and is not detected.

Reduce the accuracy of detection. Moreover, in operating such a method (as shown in Figure 3A), the user has to move as the focus changes from 's to s'. (b), the method of detecting a large-area substrate by using one or more photodetectors shown in FIGS. 4A and 4B can effectively solve the time and space in the third Α, 3β:胄 'But in the two light detection devices, there is a dark area where the light is not irradiated, so that this black

Page 9 1270670 Amendment f No. 92124874 V. Description of invention (4) Dark areas become blind spots on detection. (3) such a method of detecting a large-area size substrate by using one or more photodetecting devices, performing horizontal displacement in the left and right directions (as shown in Figs. 3A and 3B) or vertical displacement in the second light detecting device (such as In the case of 4Α, 4β, the user's focus often depends on the position of the substrate from 's, bit to 's, 〇 [Abstract] In view of the problems caused by the above-mentioned prior art, the main purpose of the present invention It is to provide a light detecting device for a substrate, thereby solving the defects and limitations caused by the aforementioned conventional techniques. The first object of the present invention is to provide a substrate light detecting device which can provide optimal optical efficiency for detecting a large-sized substrate. The second object of the present invention is to provide a substrate light detecting device for use. The stain and flaw on the substrate can be detected without shifting the focus. A fourth object of the present invention is to provide a light detecting device for a substrate which can increase the illumination area of the substrate without reducing the throughput, thereby producing a reliable high quality substrate. For the above purposes, the substrate photodetecting device of the present invention includes a plurality of mirrors for reflecting light emitted from a plurality of light sources, and a lens for focusing the light reflected from the mirrors to a frame. The substrate on the ancient platform. ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,

1270670 _ Case No. 92124874_Yearly 曰 Amendment _ V. Invention Description (5) Sub-overlap. In addition, the light detecting means adjusts the incident angle or the reflected angle of the light emitted from the light source by shifting at least one of the mirror and the lens to focus the light at a focus.

A second embodiment of the substrate light detecting device of the present invention includes a mirror for reflecting light emitted from a light source, and the light source is displaced on at least one direction of up, down, left and right, and a lens to self-reflect The light reflected by the mirror is focused to a focus and illuminates the substrate on a platform. Furthermore, the light detecting device comprises at least a light source, a mirror and a lens. A third embodiment of the substrate light detecting device of the present invention includes a plurality of mirrors for reflecting light emitted from a plurality of light sources, and the light source is displaced on at least one direction of the upper and lower sides on a curved surface, and a lens to The light reflected from the mirror partially overlaps adjacent rays and focuses the light to a focus to illuminate the substrate on a platform.

The lens system includes an upper lens to concentrate the light reflected from the mirror into parallel light; a lower lens to focus the parallel light passing through the upper lens to a focus and illuminate the substrate; and a liquid crystal panel to connect to the lower The lens, by controlling the power supply, converts the liquid crystal panel into a transparent state or an opaque state and thereby generates straight or scattered light. The photodetecting device of the present invention further includes a battery electrically connected to the liquid crystal panel, whereby the battery supplies power to the liquid crystal panel, and a switch controls the liquid crystal panel by turning on or off the power supply of the battery. In order to further improve the object, structural features and functions of the present invention

Page 11 1270670 Case No. 92124874 V. Description of the Invention (6) The following is a detailed description of the following: [Embodiment] A photodetecting device "Fig. 5A, 5B" shows the present invention only for the substrate. A schematic diagram of the first embodiment of the detection is shown in FIG. 5A. The substrate photodetecting device includes a mirror 120 for reflecting reflected light from the light source 1 1 , and the light can be on a curved surface. Displacement in the up, down, left, and right directions; and a Fresnel through the mirror 2〇〇 to focus the divergent rays reflected from the mirror 120 at the focus. On, and illuminate the substrate 300 on the platform. ' _ ...... #, as shown in Figure 5, the divergent light reflected from the mirror 120 is focused onto the substrate 300 through the non- 圼 透镜 lens 200 and illuminates the substrate 3 〇〇 The upper light can be displaced in the up, down, left, and right directions by moving the light detecting means. The light detecting device can focus the light on a focus ρ by moving the light source on the curved surface in the left and right directions, so that the user can detect the substrate at a fixed focus without moving the focus. The present invention is based on the structure of the substrate photodetecting device of the present invention. It is intended that the present invention utilizes a plurality of photodetecting devices for substrate detection. As shown in FIG. 6 , the substrate photodetecting device includes a plurality of mirrors 1 2 〇 to reflect the reflected light from the plurality of light sources 110 , and the plurality of sources 110 can be on the curved surface. Displacement in the up, down, left, and right directions = a number of Philippine lenses 200 to refocus the self-reflecting cymbals at the focus: and illuminate the substrate 3 on the platform. . . Political line, as the younger brother does not, the divergent light reflected from the mirror 120 is transmitted through

Case No. 92] 24 only 74 1270670

V. INSTRUCTIONS (7) ^ ^~§- Only I Philippine lens 20 0 0 Focusing on the substrate 3 The light on the m can be detected by moving the light „large area, and ^ shot to the substrate displacement. The plurality of light detecting devices can be moved in the up, down, left, and right directions, so that we only need to move the light detecting device: a substrate, ..., a king substrate, and the light detecting device can focus the light at the time of the brother knife a focus p. The displacement in the up and down direction is when the light detecting device shifts the light on the curved surface to the substrate 300, and the light is transmitted through the non-reserving lens 200, and the displacement in the left and right direction is concentrated to the focus. P 'Asian user does not need to displace 隹A,,, and the substrate. ., , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The structure of the light detecting device and the present invention utilize a plurality of light detecting devices to perform the base: a schematic diagram of the second embodiment of the second embodiment, which is placed in the basket, the mouth of the skull, and the multi-light detection device of the T in the picture 6: The dark area between the f-phase photodetecting devices (as shown in Figure 6) is reduced Uniformly illuminating a large-sized substrate. The substrate photodetecting device includes a plurality of mirrors 1 for respectively reflecting light emitted from a plurality of light sources ;; and a plurality of Fresnel lenses 2 将 for self-reflecting In the divergent rays reflected by the mirror 12, the neighboring rays are partially overlapped, and the divergent rays are focused on the focus p to illuminate the substrate 3 on the platform. As shown in the figure, the adjacent divergence lines that are irradiated to the substrate 3 in this embodiment are in the first Fresnel lens 2 〇〇 and the second Fresnel lens 2 〇〇 (phase W in the first Partial overlap between a Fresnel lens), thereby eliminating the original

Page 13 1270670 __ Case No. 92124874 # ^ s | 正_ V. Description of invention (8) The dark area between a plurality of Fresnel lenses 2 〇 〇. The plurality of photodetecting devices are disposed on a curved surface for focusing the divergent rays incident on the plurality of Fresnel lenses 200, and each of the photodetecting devices includes a light source 1丨0 and a The mirror 1 2 〇 and a Fresnel lens 200. In addition, at least the position of the mirror 120 or Fresnel lens 200 is moved to change the angle of incidence or angle of reflection from the source to partially overlap adjacent divergent rays. ^ As shown in Fig. 8, the plurality of Fresnel lenses 200 includes an upper Philippine lens 20 1 1 to converge the divergent rays into parallel rays; a Fresnel lens 2 0 3 to converge Parallel light emitted from the upper Fresnel lens 2〇1, and thus the light substrate 3 0 0; — the liquid crystal panel connected to the lower Philippine lens 2〇3 = 5 / by power control Change its transparent or opaque shape to produce a straight line of light or scattered light; a control panel + + switch 4 〇〇, and a battery 5 〇〇, through the control of the switch 400 to supply power To the LCD panel 2 0 5. The operation mode of the photodetecting device of the substrate of the present invention will be described in conjunction with the following description: "5th, 5th, and 5". In this embodiment, only the light emitted from the f source 110 is diverged and borrowed. Light is reflected by the mirror 120 to the Fresnel lens 2〇〇. 2 〇 i / Λ mirror 1 2 〇 The divergent light reflected by the 菲 淫 淫 淫 z z z z z z z z z z z 平行 平行 平行 平行 平行 平行 平行 平行 平行 平行 平行 平行 平行 平行 平行 平行 平行 平行 平行 平行 平行 平行The lower non-amplifier lens 203 converges and illuminates. Therefore, the moving light detecting device is used to make up, down, left, and right directions on the curved surface.

Page 14 1270670

Drawing No. 92124S74 V. Description of the invention (9) The displacement ' can be transmitted through the light detecting device on the curved surface of the temple, using:: the entire substrate, and when the light is detected at a fixed point S through the self-defect point p# In the case where f β does not move the focus, in addition, when the liquid crystal display panel of the second mirror 2 0 3 is turned on, the power is placed in a transparent or opaque state, and thus the panel 205 is crystallized. Only when the light is irradiated onto the substrate, although the user detects the substrate and also says that when the switch 40 0 cuts off the power supply from the battery 5, the liquid crystal panel 200 will scatter the light μ 曰 / η _ from ώ + L f 乂 avoids illumination to the substrate 300, and when the switch 400 turns on the power supply from the battery 500, . Λ c,, α77 When a knife is supplied, the light material can pass through the liquid crystal panel 2 0 5 sub-lighting substrate 300. When the moving light detecting device is displaced in the up, down, left, and right directions on the curved surface, the incident angle of the light, the reflection preparation, the inflection angle, the wavelength, the intensity, the scattering, and the polarization direction are adjusted to detect the substrate under the optimized optical condition. . For the sake of F, please refer to "6A, 6B, 7A, 7_". For the convenience of explanation, it is assumed that the two diaphragms, the two mirrors and the two Fresnel lens systems are identical. — from > the first light source 11 0 and the second light source 1 2 0 emit light that is scattered, and the error of the first mirror 1 130 and the second mirror 14 4 反射 reflects the light to the first phenanthrene Nyer lens 20 0 and second Fresnel lens 210. The divergent rays reflected by the first and second mirrors 1 3 〇, 1 40 are transmitted through the upper Fresnel lens 201 of the first and second Fresnel lenses 200, 210 to be parallel light, and then transmitted again. Lower Fresnel lens 2 0 3 converges and illuminates the substrate 1 0 〇〇

Page 15 1270670 Case No. 92124874 Issue 5, Invention Description (10) In this embodiment, in order to prevent the formation of dark areas between adjacent Fresnel lenses 2 0 0, 2 1 0, through the first Philippine The divergent rays of the Neel lens 200 and the second Fresnel lens 2 1 0 (adjacent to the first Fresnel lens 200) are partially overlapped and then irradiated to the substrate 100. The light detecting device illuminates the entire substrate surface by moving up and down on the curved surface, and focuses the light on a focus P. The user can observe the fixed focus S by the reflected light without moving the focus. Substrate.

In addition, by controlling the power supply to the liquid crystal display panel 205 located at the lower Fresnel lens 203 by the switch 300, the transparent or opaque state of the liquid crystal display panel 205 can be controlled, and thus the control can be controlled only when used. When the substrate is detected, light is irradiated onto the substrate. When the switch 300 is cut off from the power supply of the battery 400, the liquid crystal panel 200 will scatter light to avoid illuminating the substrate 300, and when the switch 300 turns on the power from the battery 400. When supplied, light can pass through the LCD panel 205 and illuminate the substrate 100. When the moving light detecting device is displaced in the up and down direction on the curved surface, that is, adjusting the incident angle, the reflection angle, the wavelength, the intensity, the scattering, and the polarization direction of the light to detect the substrate under the optimized optical condition, the entire substrate can be illuminated. Bright to detect stains and blemishes.

In summary, the photodetecting device of the present invention has the following advantages: (1) simplifying the displacement system of the photodetecting device by using a plurality of light sources to illuminate the substrate of a large size, and allowing the user to In the case of moving the focus, the surface of the substrate is detected with a fixed focus. (2) applying a plurality of photodetecting devices to suppress the illuminated substrate

Page 16 1270670 _ Case No. 92124874_ Year Month 曰 Amendment _ V. Invention Description (11) The presence of dark areas can increase the reliability of large-size substrate inspection and increase the quality and quality of products without reducing productivity. rate. While the present invention has been described above in terms of the preferred embodiments thereof, it is not intended to limit the scope of the present invention, and the equivalents and modifications may be made without departing from the spirit and scope of the invention. The scope of the invention is covered by the scope of the invention, and the scope of patent protection of the invention is defined by the scope of the patent application attached to the specification.

Page 17 1270670 Case No. 92124874 Year of the Moon Correction Diagram Brief Description Figure 1 is a partial schematic view of a conventional light detecting device for detecting a substrate; Figure 2A, 2B is a conventional light detecting device FIG. 3A and FIG. 3B are structural diagrams of a second embodiment of a conventional photodetecting device in detecting a substrate; FIGS. 4A and 4B are a conventional FIG. 5A and FIG. 5B are schematic diagrams showing a first embodiment of the substrate photodetecting device of the present invention; FIGS. 6A and 6B are diagrams of the present invention. A schematic diagram of a second embodiment of a substrate light detecting device; FIGS. 7A and 7B are a third embodiment of the substrate photodetecting device of the present invention, and FIG. 8 is a substrate photodetecting device of the present invention. A schematic representation of a preferred embodiment of a Fresnel lens. [Description of Symbols] 1 0, 3 0 0 Substrate 11, 110 Light source 12, 12〇, 130, 140 Mirror 13, 14, 2, 201, 2 0 3, 2 1 〇 Fresnel lens 1 5 , 2 0 5 LCD panel 1 6 , 4 0 0 switch

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Claims (1)

1270670 Case No. 92124874 r VI. Patent Application No. 1. A light of a substrate detects light emitted by a plurality of mirrors, and the light is displaced in one direction; and a lens is focused to a focus by a lens, and the lens is photographed therein The package converges into a parallel liquid light focusing to a focal liquid crystal panel, in a clear state or not, please circumscribe the patent range and focus on the lower panel of the mirror that illuminates the substrate, wherein the weight is 3, wherein the weight is 3 Wherein the light parallel lens is a light transmission line, such as the application of the stack. Such as the application of the light from the light, such as the application for the detection of the focus, please use the source of the device, a light source, a light source, a mirror, and a source of light, and the light source is in the focus of the surrounding system. The surrounding light detection is a curved device comprising: a system for reflecting a plurality of light source sources on a curved surface for at least up and down, at least to reflect light reflected from the mirrors on a platform. a substrate; a lens for reflecting the upper lens from the mirror, a lens for passing through the upper transparent point and illuminating the substrate, and a connection for switching the liquid crystal state by controlling power supply, And a light detecting device for generating a straight light or a light detecting device of the substrate, wherein the light is applied to the light detecting device of the substrate between the adjacent light rays, and at least one of the mirror and the lens are over-displaced The incident angle or the angle of reflection of the light, so that the light detecting device of the substrate of the item 1 is a divergent light. The device includes: a bit for reflecting at least one direction of up, down, left, and right from a light surface emitted from a light source Page 20 1270670 Case No. 92124874 A_ Amendment VI. Patent application scope shift; and Focus 6, which mirror. 7. Among them, the focus is as follows. For example, the application of the light detection lens is used, and the illumination device is illuminated to at least the light reflected from the mirror as a substrate on the platform. The light detecting device of the substrate according to the fifth aspect includes a light source mirror and a displacement in the left and right direction of the light illuminating the substrate as disclosed in the patent application scope. The lens includes: a lens, a light; a lens that illuminates the liquid crystal panel, the liquid crystal light or the scattered line converges into a parallel, a focus, and a focus, and the device is powered by the device. It should be possible to generate, for example, a light detecting device of the substrate of the fifth item of the power supply that supplies the electric power to the pool in a closed-loop conversion patent application range, as the light source is displaced on the curved surface In the light detecting device of the substrate according to Item 05, the line is divergent light. The light detecting device of the substrate of claim 5, wherein the light reflected from the mirror is used to pass the parallel light collecting plate passing through the upper lens; and the system is connected to the lower lens by controlling the electric board It is transparent or opaque and emits light. Photodetection of the substrate according to item 1 or 9 The battery connected to the liquid crystal panel is supplied by a liquid crystal panel and a switch to control the liquid crystal panel. Page 21 1270670 Case No. 92124874 曰 Amendment VI, the scope of application for patents 1, one issued - the square line is brighter and one set, the equal light is adjacent to the .3 set, the light 14 is set, and the wavelength is 0. The application of the platform, such as the light in the source, such as the line, such as the strong-based complex light-shifting-through line, is applied by the line-up application by means of the degree and the plate, and By mirror, part of the substrate patent displacement is at least the weight of the patented patent-adjusted scattered light detection mirror, the light source and the system are used for overlapping, the device comprises: a system for respectively reflecting from a plurality of light sources to a curved surface Up and down, left and right, at least the light reflected from the mirror is incident and the light is focused to a focus to detect at least one of the mirrors or the lens of the substrate according to the range of item 1 to be adjusted The angle of incidence of a ray and the angle of reflection, thereby the stack. The range of the range of the first light source is illuminating and the light detecting of the substrate of the pole item 1 is displaced on the curved surface to illuminate the light of the light detecting substrate of the substrate of the substrate 119 Angle, reflection angle, and direction can increase the accuracy of detection Page 22 1270670 Case No. 92124874 曰 Amendment 6. Designated representative diagram (1) The representative figure of the case is: „_5Α_____ diagram (2), the representative figure of the representative figure is a simple description of the symbol 3 0 0 Substrate 1 1 〇 light source 1 2 〇Mirror 2 0 0 Fresnel lens Ρ Focus Page 5