!243248 玖、發明說明： 【發明所屬之技術領域】 本發明係關於FPD用基板缺陷檢測裝置，尤其係關於檢 測FPD用基板表面上有無缺陷的大型檢測裝置。 【先前技術】 隨著電信技術的發展與多元化資訊社會的要求，對電子 顯示器的需求逐漸增大，所需顯示器趨向多樣化，且不斷 開發出新型的平板顯示器（Flat Panel Display ··以下簡稱 FPD )元件。目前，正在開發或生産中的平板顯示器有 液晶顯示器（Liquid Crystal Display: LCD)、有機場致發光 顯示器（Organic Electroluminescence Display: OELD)、等離 子體顯示板（Plasma Display Panel: PDP)以及發光二極體 (Light Emitting Display: LED)等。 若要維持上述FPD穩定之品質，不僅需注重材料與工程 的開發’還需做到所使用玻璃及塑膠等基板上無缺陷。FPD 用基板缺陷檢測裝置分爲··在基板表面上照射光線並根據 光線之光學變化檢測基板表面上之缺陷的大型（Macro)檢 測裝置和放大檢測由大型檢測裝置所檢測缺陷部位的微型 (Micro)檢測裝置。 圖1係闡釋現有FPD用大型檢測裝置之概略圖。 圖1中的現有FPD用大型檢測裝置由光源（1 〇)和爲確保光 源（1〇)發射出的光線光路而設置的鏡（21、22)、聚焦經由鏡 (21、22)擴散的光線的菲涅耳透鏡（Fresnel Lens)(30)及散射 或聚焦透過菲涅耳透鏡（30)的光線的液晶板（4〇)組成。光源243248 发明. Description of the invention: [Technical field to which the invention belongs] The present invention relates to a substrate defect detection device for FPD, and particularly to a large-scale detection device for detecting the presence or absence of defects on the surface of a substrate for FPD. [Previous technology] With the development of telecommunication technology and the requirements of a diversified information society, the demand for electronic displays has gradually increased, the required displays have become more diversified, and new types of flat panel displays (hereinafter referred to as Flat Panel Display) have been continuously developed. FPD) element. At present, flat-panel displays under development include liquid crystal displays (Liquid Crystal Display: LCD), organic electroluminescence displays (OELD), plasma display panels (Plasma Display Panel: PDP), and light-emitting diodes. (Light Emitting Display: LED). In order to maintain the stable quality of the above-mentioned FPD, it is necessary not only to pay attention to the development of materials and engineering ', but also to ensure that there are no defects on the glass and plastic substrates used. FPD substrate defect detection devices are divided into a large (Macro) inspection device that irradiates light on the substrate surface and detects defects on the substrate surface based on optical changes in light, and a micro (Micro) that magnifies and detects defect areas detected by the large inspection device. ) Detection device. FIG. 1 is a schematic diagram illustrating a conventional large-scale detection device for FPD. The conventional large-scale detection device for FPD shown in FIG. 1 includes a light source (10) and a mirror (21, 22) provided to ensure a light path emitted by the light source (10), and focuses light diffused through the mirror (21, 22). Fresnel Lens (30) and a liquid crystal panel (40) that scatters or focuses light transmitted through the Fresnel lens (30). light source
O:\88\88030.DOC 1243248 (10)發射出的光線透過鏡（21、22)、菲涅耳透鏡（3〇)、液晶 板（40)照射至被檢测FPD用基板上後再反射光線。由檢杳員 判斷有無瑕疵或斑點等缺陷。 圖2a係光線透過圖1所示現有FpD用大型檢測裝置中菲淫 耳透鏡之過程概略圖，圖2b係利用圖ltFPD用大型檢測装 置照射光線時FPD用基板上之亮度概略圖。 如圖2a中的⑴及⑺所示’爲使透過菲涅耳透鏡㈣的光 線充分擴散至被檢測基板面積上，光源（1〇)與菲涅耳透鏡 (30)之間的距離應長一些。此即圖丨中使用鏡子確保光線光 路之原因所在。 如圖2a中的（2)所示，當光線聚焦至一定程度時，FpD用 基板的光線照度與檢查員位置上的亮度達到最佳狀態。考 慮到該點，菲涅耳透鏡（3〇)應該比基板大。 爲利用菲〉圼耳透鏡彌補不充分的亮度，應注意光源與菲 >圼耳透鏡之間的光路及菲料透鏡的大小。若擴大光源與 ΓΜ圼耳透鏡之間的光路及菲淫耳透鏡的尺寸，則相關裝置 亦曰艾大，其製作費用會有所增加。現有檢測裝置中的奸〇 車乂大’因此不符合目前趨勢。爲克服該缺點，冑由移動光 源、鏡、菲涅耳透鏡等使光線之照射位置發生變化，但其 弊端在於會增加控制部分之構建f用且檢測時間過長。’、 、=外’與圖21>所示FPD用基板亮度相比，圖1所示現有檢 、僅月匕使用單一光源，目此中間部位相對較亮，而邊 緣指相對較暗。因此，由於基板的亮度不均自，無法判 斷是否存在缺陷。O: \ 88 \ 88030.DOC 1243248 (10) The light emitted by the lens (21, 22), Fresnel lens (30), and liquid crystal panel (40) is irradiated on the substrate for FPD detection and then reflected. Light. The inspector will judge whether there are any flaws or spots. Fig. 2a is a schematic diagram of the process of light passing through a physalis lens in the conventional large-scale detection device for FpD shown in Fig. 1, and Fig. 2b is a schematic diagram of the brightness on the FPD substrate when the large-scale detection device of Fig. 1 is used to irradiate light. As shown by ⑴ and ⑺ in Figure 2a, 'In order to fully diffuse the light passing through the Fresnel lens ㈣ onto the area of the substrate to be detected, the distance between the light source (10) and the Fresnel lens (30) should be longer. . This is why the mirror is used to ensure the light path in the figure. As shown in (2) in FIG. 2a, when the light is focused to a certain degree, the illuminance of the light for the FpD substrate and the brightness at the position of the inspector reach an optimal state. With this in mind, the Fresnel lens (30) should be larger than the substrate. In order to make up for the inadequate brightness using the Philip> Pear lens, attention should be paid to the optical path between the light source and the Phoebe lens and the size of the Phoebe lens. If the optical path between the light source and the ΓΜ 圼 lens is enlarged and the size of the Philip lens is increased, the related device is also called Ai Da, and its production cost will increase. The large number of cars in existing detection devices is therefore not in line with current trends. In order to overcome this disadvantage, the position of light irradiation is changed by moving the light source, mirror, Fresnel lens, etc., but the disadvantages are that it will increase the construction of the control part and the detection time is too long. Compared with the brightness of the FPD substrate shown in Fig. 21, the conventional inspection shown in Fig. 1 uses only a single light source, and the middle part is relatively bright, while the edge is relatively dark. Therefore, since the brightness of the substrate is not uniform, it cannot be judged whether there is a defect.
O:\88\88030.DOC 1243248 【發明内容】 本發明欲解決的技術課題係提供既能簡單檢測大型基板 亦此減小體積、降低製作費用及縮短基板檢測時間的FpD 用基板缺陷檢測裝置。 【實施方式】 爲達成上述技術課題，作爲本發明之一實施例，FpD用 基板缺陷檢測裝置由光源、聚焦透鏡、多面鏡組成，其特 徵在於：聚焦透鏡一般設置於上述光源所發射之光線光路 上’其作用係聚焦光線；多面鏡以可旋轉方式設置，其作 用係入射透過上述聚焦透鏡之光線，再向被檢測FpD用基 板位置散射、反射光線。 爲達成上述技術課題，作爲本發明之一實施例，FPD用 基板缺陷檢測裝置由光源、導光板、光線傳輸裝置組成， 其特徵在於：導光板之作用係入射上述光源所發射光線， 向被檢測FPD用基板位置散射；而光線傳輸裝置之作用則 係將上述光源所發射光線傳送至上述導光板。 下述係關於本發明實施例之說明，如附圖所示。 圖3 a及3b係關於本發明實施例1之FPD用基板缺陷檢測裝 置的概略圖，圖4係關於本發明實施例2iFPD用基板缺陷 檢測裝置的概略圖。 實施例1 如圖3 a所示’本實施例之FPD用基板缺陷檢測裝置由光源 (10)、聚焦透鏡（Focusing Lens)(110)、多面鏡（p〇iyg〇n Mirror)(120)組成。O: \ 88 \ 88030.DOC 1243248 [Summary of the Invention] The technical problem to be solved by the present invention is to provide a substrate defect detection device for FpD that can easily detect large substrates, reduce volume, reduce manufacturing costs, and shorten substrate inspection time. [Embodiment] In order to achieve the above technical problem, as an embodiment of the present invention, a substrate defect detection device for FpD is composed of a light source, a focusing lens, and a polygon mirror, and is characterized in that the focusing lens is generally disposed on the light beam emitted by the light source. On the road, its role is to focus light; the polygon mirror is rotatably set, and its role is to enter the light that passes through the focusing lens, and then scatter and reflect the light to the position of the FpD substrate to be detected. In order to achieve the above technical problem, as an embodiment of the present invention, a substrate defect detection device for FPD is composed of a light source, a light guide plate, and a light transmission device, and is characterized in that the function of the light guide plate is to inject light emitted by the light source to the detected object. The position of the FPD substrate is scattered; the function of the light transmission device is to transmit the light emitted by the light source to the light guide plate. The following is a description of an embodiment of the present invention, as shown in the drawings. Figs. 3a and 3b are schematic diagrams of an FPD substrate defect detection device according to the first embodiment of the present invention, and Fig. 4 is a schematic diagram of an iFPD substrate defect detection device according to the second embodiment of the present invention. Example 1 As shown in FIG. 3a, 'the substrate defect detection device for FPD in this example is composed of a light source (10), focusing lenses (110), and a polygon mirror (120). .
O:\88\88030.DOC 1243248 光源（ίο)採用光鹵素燈或金屬鹵化物燈等。 聚焦透鏡（110)設置於光源（10)發射的光線光路上，隨著 光源（10)所發射光線入射至聚焦透鏡（11〇)，其聚焦成一條 薄薄的平行光線透過聚焦透鏡（i i 〇)。 多面鏡（120)可旋轉，並設置於透過聚焦透鏡（11〇)聚焦的 光線光路上。光線透過聚焦透鏡（11〇)聚焦入射至多面鏡 (120)後藉由多面鏡散射、反射成面光源形態，而後照射至 FPD用基板表面上。 多面鏡（120)係由相同尺寸的鏡構成多面體的光學儀器。 Ik著多面鏡的旋轉’入射至多面鏡内的如同雷射的點光源 擴散、反射成線光源，而線光源又會擴散、反射成面光源。 如圖3 a所示’多面鏡的每一鏡面皆會形成一面光源。因此， 多面鏡每旋轉一次即會形成相當於鏡面數量的面光源。人 類的眼睛每秒被照射24次以上即會將光線視作連續光。假 叹多面鏡（120)爲八面體，每秒旋轉3次以上，人們就會認爲 FPD用基板上始終照射著面光源。 光源（ίο)所發射光線透過聚焦透鏡（110)和多面鏡（12〇)並 按面光源的形態照射至被檢測FPD用基板上後被反射出 去’檢查員可據此判斷有無瑕症或斑點等缺陷。 由於利用多面鏡（120)照射出來的面光源檢測？][)1)用基板 上有無缺陷，由此僅藉由調節多面鏡之鏡面數及旋轉速度 即可擴大光線照射面積。因此，該檢測裝置甚至可輕易地 檢測大型基板。與先前技術之不同之處在於，光路無需太 長，此可減少檢測裝置之尺寸。另外，無需調#光線的照O: \ 88 \ 88030.DOC 1243248 The light source (ίο) is a light halogen lamp or a metal halide lamp. The focusing lens (110) is arranged on the light path of the light emitted by the light source (10), and as the light emitted by the light source (10) enters the focusing lens (11), it focuses into a thin parallel light and passes through the focusing lens (ii 〇). ). The polygon mirror (120) is rotatable and is set on the light path focused by the focusing lens (11). The light is focused through the focusing lens (110) and incident on the polygon mirror (120). The light is scattered and reflected by the polygon mirror into the form of a surface light source, and is then irradiated onto the surface of the FPD substrate. The polygon mirror (120) is a polyhedral optical instrument composed of mirrors of the same size. Ik with the rotation of the polygon mirror ’, the point light source like a laser incident into the polygon mirror diffuses and reflects into a linear light source, and the linear light source diffuses and reflects into a planar light source. As shown in Fig. 3a, each mirror surface of the 'polygon mirror will form a light source. Therefore, each time the polygon mirror is rotated, a surface light source corresponding to the number of mirror surfaces is formed. Human eyes are treated as continuous light by being illuminated more than 24 times per second. The false polygon mirror (120) is an octahedron, and it rotates more than 3 times per second, and people think that the surface light source is always illuminated on the FPD substrate. The light emitted by the light source (ίο) passes through the focusing lens (110) and the polygon mirror (12) and is irradiated onto the substrate for FPD to be detected in the form of a surface light source, and then is reflected out. The inspector can judge whether there are any defects or spots. And other defects. Detected by the surface light source illuminated by the polygon mirror (120)? ] [) 1) With or without defects on the substrate, the light irradiation area can be enlarged only by adjusting the number of mirror surfaces and the rotation speed of the polygon mirror. Therefore, the inspection device can easily inspect even large substrates. The difference from the prior art is that the optical path does not need to be too long, which can reduce the size of the detection device. In addition, there is no need to adjust the light
O:\88\88030.DOC 1243248 射位置，從而可降低控制部分之構建費用，並縮短檢測時 間。 如圖3b所示，在經由多面鏡（120)散射、反射的光線光路 上設置菲涅耳透鏡（130)，從而使照射至基板上的面光源均 勻集中於一點上，且經由多面鏡（120)散射、反射的光線透 過菲涅耳透鏡（130)照射至基板表面上。 此外，根據需要在多面鏡（120)正面或背面設置濾色鏡（未 圖示），將入射至多面鏡内的光線或者將多面鏡反射的光線 轉換成单色光。 實施例2 如圖4所示，本實施例之FPD用基板缺陷檢測裝置由光源 (1〇)、導光板（210)及由光纖束（220)構成的光線傳輸裝置組 成。 光纖束（220)被設置爲將光源（10)所發射的光線均勻地傳 至導光板（210)上。亦即，將每個光導纖維（221)的一端按一 定間距在導光板（210)内部排列成<“井，，字形，而另一端則 與上述光源（10)相對。 光源（ίο)所發射光線經由光導纖維（221)入射、擴散至導 光板（210)上，從而照射至fPD用基板上，檢查員可據此判 斷有無瑕疵或斑點等缺陷。 光導纖維（221)各自排列，使藉由光導纖維（221)傳輸的光 線均勻照射於導光板（210)整體上，從而獲得檢測基板缺陷 所需照明度。本發明之檢測裝置與先前技術相比，既簡單 又經濟。O: \ 88 \ 88030.DOC 1243248, which can reduce the construction cost of the control part and shorten the detection time. As shown in FIG. 3b, a Fresnel lens (130) is provided on the optical path of the light scattered and reflected by the polygon mirror (120), so that the surface light source irradiated onto the substrate is uniformly concentrated on one point, and passes through the polygon mirror (120). ) The scattered and reflected light is irradiated onto the surface of the substrate through a Fresnel lens (130). In addition, according to need, a color filter (not shown) is provided on the front or back of the polygon mirror (120) to convert light incident into the polygon mirror or light reflected by the polygon mirror into monochromatic light. Embodiment 2 As shown in FIG. 4, the FPD substrate defect detection device of this embodiment is composed of a light source (10), a light guide plate (210), and a light transmission device composed of an optical fiber bundle (220). The optical fiber bundle (220) is arranged to uniformly transmit the light emitted from the light source (10) to the light guide plate (210). That is, one end of each light guide fiber (221) is arranged inside the light guide plate (210) at a certain pitch into a " well " shape, and the other end is opposite to the light source (10). The light source (ίο) 所The emitted light is incident on the light guide plate (210) through the light guide fiber (221) and diffused, so as to be irradiated onto the fPD substrate, and the inspector can judge whether there are defects such as flaws or spots. The light transmitted by the light guide fiber (221) is evenly irradiated on the entire light guide plate (210), so as to obtain the illuminance required to detect the defects of the substrate. Compared with the prior art, the detection device of the present invention is simple and economical.
O:\88\88030.DOC -10-O: \ 88 \ 88030.DOC -10-