M281285 四、創作說明（l) 【新型所屬之技術領域】 ‘本創作係有關—種 .式複合光源之光學檢檢測裝置，特別是指-種可調 【先前技術】 隨著科技的進步，本道 # 率是每一間公司皆注重、· f產業蓬勃發展，如何提高良 程環環相扣，目的在又^課題，如材料、製程、檢驗等過 測時必須要找“眼不可於晶，尤其是在檢 ►顯微鏡等工具。 見的缺點，因此需要方便檢測之 現今的半導體礙在進 晶圓材料$ X P1 + 進仃日日®檢測時，依據光電二極體 檢有不當而光源之提供是為 中，透光時則使用環形光源，在先前技術 若需要兩種;；，光源係分別為兩不同之裝置，檢測時 :種先源分別檢查不同特徵，則必須配置兩台不同 2 =互換使用，相當不便。且同軸光源内部之半反 日學鏡片係為固定角度之設置’無法由其他角度 射B曰圓以檢測是否有其他在直射角度時所看不見之瑕 症，難以全面的檢測。 因此，本創作即針對上述數點，提出一種光學檢測裝 置’以有效克服上述之該等問題。 【新型内容】 ϋ 第5頁 M281285M281285 IV. Creation instructions (l) [Technical field to which the new type belongs] 'This creation is related to an optical inspection and detection device of a kind of type-type composite light source, in particular, a kind of adjustable [previous technology] With the advancement of technology, this road # The rate is that every company pays attention to, · The industry is booming. How to improve the good process is interlocked. The purpose is to ^ topic, such as material, process, inspection and other over-testing must look for "eyes are not in the crystal, Especially in inspection tools such as microscopes. Disadvantages seen, and therefore need to be convenient for inspection. Today's semiconductors hinder the advancement of wafer materials $ X P1 + Into the next day ® inspection, according to the photodiode inspection, there is an improper and light source provided It is medium. When transmitting light, a ring light source is used. If two kinds of light sources are required in the prior art, the light sources are two different devices. When detecting: the first source checks different characteristics respectively, you must configure two different 2 = Interchangeable use, which is quite inconvenient. And the semi-anti-scientific lens inside the coaxial light source is set at a fixed angle. 'Cannot shoot the B circle from other angles to detect whether there are other things that are invisible at direct angles. The flaws are difficult to detect comprehensively. Therefore, this creation aims at the above-mentioned points, and proposes an optical detection device 'to effectively overcome these problems. [New content] ϋ Page 5 M281285
結 且 用 提 光 方 人n f創作之主要目的在提供一種光學檢測裝置，其係 ^ 光源與環形光源，讓使用者在使用上更為方便， ，7利用環形光源彌補同軸光源亮度之不足，或反之利 同軸光源補償環形光源之不足。 A乍之另 目的在提供一種光學檢測裝置，其係 二 了方疋轉之光學鏡片，使同軸光源發出之光線可經由 予鏡片不同角度地照射於待測物上，產生偏光效果，全 位對待測物進行檢測。 本創作之再一目的在提供一種光學檢測裝置，其係可 ⑩應用於顯微鏡或攝影機上作為其光源機構，利用一銜接口 與顯微鏡或攝影機相接合。 ^ 為達上述之目的，本創作提供一種光學檢測裝置，其 係包含一殼體，於殼體側面設置有一同軸光源，利用複數 LED、發出光線；另有一環形光源設置於殼體之下方，其係 由複數LED環狀排列所組成，其所發出之光線係可聚光形 成一光圈；以及一光學鏡片，其係設置於殼體内部，可將 同軸光源所發出之光線反射至一待測物上，並可旋轉此光 子鏡片以改變光線入射待測物之角度，同軸光源/環形光 源之光線經待測物反射後，穿透光學鏡片射出；在殼體上 方有一銜接口，可裝設一顯微鏡或攝影機，因此當光線穿 透光予鏡片後，係經過此銜接口而射至顯微鏡或攝影機中 成像。本創作藉由可旋轉之光學鏡片，可提供待測物不同 角度之光”、、了產生偏光的效果於待測物表面外觀清晰取The main purpose of the creation of the light-emitting side nf is to provide an optical detection device, which is a light source and a ring light source, which makes it more convenient for the user to use. 7 Use a ring light source to make up for the lack of brightness of the coaxial light source, or Conversely, coaxial light sources compensate for the shortcomings of ring light sources. A Zhu's other purpose is to provide an optical detection device, which is a square-turned optical lens, so that the light emitted by the coaxial light source can be irradiated on the object to be measured at different angles through the lens to produce a polarizing effect, which is treated in all positions Test object for detection. Another purpose of this creation is to provide an optical detection device that can be applied to a microscope or a camera as its light source mechanism, and is connected to the microscope or the camera using an interface. ^ In order to achieve the above purpose, the present invention provides an optical detection device, which includes a housing, a coaxial light source is arranged on the side of the housing, and a plurality of LEDs are used to emit light; another ring light source is arranged below the housing, and It is composed of a plurality of LEDs arranged in a ring, and the light emitted by the LED can be condensed to form an aperture; and an optical lens is arranged inside the housing and can reflect the light emitted by the coaxial light source to an object to be measured. The photon lens can be rotated to change the angle at which the light enters the object under test. The light from the coaxial light source / ring light source is reflected by the object under test and penetrates the optical lens. There is an interface above the housing. Microscope or camera, so when the light penetrates the lens to the lens, it passes through this interface and is shot into the microscope or camera for imaging. This creation uses a rotatable optical lens to provide light at different angles of the object to be measured ". The effect of generating polarized light is clear on the surface of the object to be measured.
M281285 四、創作說明（3) " —------- 底下藉由具體實施例詳加說明，當更容易瞭解本創作 •之目的、技術内容、特點及其所達成之功效。 【實施方式】 、 本創作^供一種光學檢測裝置，第一圖及第二圖所示 為本創作之立體結構示意圖，第三圖為本創作之結構剖視 圖，如圖所示，一中空四方之殼體1〇，於殼體1〇侧面設置 有一同軸光源1 2，此同軸光源1 2係為複數平行排列之 L E D ’利用其發出平行光線；另有一環形光源2 4，利用複 數鎖固元件26將ί展形光源24鎖在殼體之下方，其係由複 數LED環狀排列所組成，其所發出之光線係可聚光形成一 光圈；以及一光學鏡片14 ’其係為一半反射半穿透之鏡 片，設置於殼體10之内部’用以將同軸光源12所發出之光 線反射至一待測物（圖中未示）上，並可藉由一旋轉鈕2 〇 旋轉此光學鏡片1 4之傾斜角度，以改變光線入射待測物之 角度；而在殼體1 0上方則設有一銜接口 2 2，可裝設一顯微 鏡或攝影機。 同軸光源1 2係用以檢測可透光之待測物，而環形光源 24則用以檢測不可透光之物體。當單獨使用同軸光源1 2對 •待測物進行檢測時，此同軸光源1 2之LED會發出光線至光 學鏡片1 4，此光線町透過一渡光片1 6過濾其他色光而得到 想要的單色光，如紅色光’亦可透過一勻光片使光線均勻 發射；光學鏡片14與光線之間係具有一角度，以將此光線 反射出去。接著，同軸光源1 2之光線射至光學鏡片1 4，並M281285 Fourth, the creation description (3) " —------- The following detailed description with specific examples, it will be easier to understand the purpose, technical content, characteristics and effects of this creation. [Embodiment] This creation is for an optical detection device. The first and second figures show the three-dimensional structure diagram of the creation, and the third picture is the cross-sectional view of the structure of the creation. As shown in the figure, a hollow square The housing 10 is provided with a coaxial light source 12 on the side of the housing 10. The coaxial light source 12 is a plurality of parallel-arranged LEDs that emit parallel light; another ring light source 24 uses a plurality of locking elements 26. The extension light source 24 is locked below the housing, which is composed of a plurality of LED circular arrangements, and the light emitted by the light source can be focused to form an aperture; and an optical lens 14 'is a half reflection and a half penetration The transparent lens is disposed inside the casing 10 to reflect the light emitted by the coaxial light source 12 to a test object (not shown), and the optical lens 1 can be rotated by a rotary button 2 The inclination angle of 4 is used to change the angle of light incident on the object to be measured; and an interface 22 is provided above the housing 10, and a microscope or camera can be installed. The coaxial light source 12 is used to detect light-transmitting objects, while the ring-shaped light source 24 is used to detect light-opaque objects. When using the coaxial light source 12 alone to detect the object to be measured, the LED of this coaxial light source 12 will emit light to the optical lens 14 and this light will filter other colored light through a light sheet 16 to get the desired Monochromatic light, such as red light, can also be transmitted through a uniform light sheet to uniformly emit the light; the optical lens 14 and the light have an angle to reflect the light. Then, the light from the coaxial light source 12 is incident on the optical lens 14 and
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四、創作說明（4) 被其反射至殼體1 〇下方之待測物上，此待測物將光線反 -射，當光線穿透光學鏡片1 4後’係經過此銜接口 2 2而射至 顯微鏡或攝影機中成像。 當單獨使用環形光源24時，可旋轉控制光學鏡片J 4角 度之旋轉紐2 0，將光學鏡片1 4調整為與待測物平行，使同 轴光源12之光線亦與光學鏡片14平行，而無法經由光學鏡 片1 4反射至待測物上；亦可將同軸光源1 2關閉。環形光源 24之光線入射待測物後’待測物將光線反射，透射過光學 鏡片1 4後經過銜接口 2 2而射至顯微鏡或攝影機中成像。 光學鏡片14可藉由旋轉鈕20調整角度，產生不同方向 之軸向 果，清 足以照 度，同 定位置 24可組 之角度 綜 一可旋 ’線，讓 使用或 可互相 題。本 同材料 光，利用 晰檢驗待 射出瑕窥 理，同軸 光線之不 合成一複 以取得最 上所述， 轉、半反 使用者可 與同軸光 彌補彼此 創作係可 特性之物 不同万向 測物之表 時，可同 光源1 2亦 足，因此 合式光源 佳檢測影 本創作係 射半穿透 糟由偏光 源同時使 之不足處 作為顯微 體，進行 面外觀， 時使用環 可調整軸 本創作之 同時使用 像之效果 為 '一種光 之光學鏡 效果檢驗 用之一環 ，如光源 鏡或攝影 其表面外 生侧光（偏光 若同軸光源1 2 形光源24加強 向以補償環形 同軸光源1 2及 ，利用調整光 〇 學檢測裝置， 片反射同軸光 待測物，並結 形光源，當同 不夠亮或照射 機之光源機構 觀檢查，如顯 )的效 之亮度不 光之亮 光源24特 環形光源 學鏡片14 其係利用 源之光 合可單獨 時使用時 角度等問 ，針對不 微鏡人工4. Creation instructions (4) It is reflected on the object under test by the housing 10, and the object under test reflects light. When the light penetrates the optical lens 14, it passes through the interface 2 2 and Shoot into a microscope or video camera for imaging. When the ring light source 24 is used alone, the rotation angle 20 of the optical lens J 4 can be rotated to adjust the optical lens 14 to be parallel to the object to be measured, so that the light of the coaxial light source 12 is also parallel to the optical lens 14, and It cannot be reflected on the object to be measured through the optical lens 14; the coaxial light source 12 can also be turned off. After the light from the ring light source 24 enters the object to be measured, the object to be reflected reflects the light, passes through the optical lens 14, passes through the interface 22, and then enters the microscope or camera for imaging. The optical lens 14 can be adjusted by the rotary knob 20 to generate axial results in different directions, which is sufficient to illuminate the light. The angles that can be set at the same position 24 can be combined into a single 'rotatable' line, which can be used or can be mutually problematic. This is the same material as the light, using clear inspection to inspect the flaws to be emitted. The coaxial light is not combined to achieve the above. The transflective and semi-reflective users and the coaxial light can make up each other for different characteristics. It can be as good as the light source 12 when it is displayed. Therefore, the combined light source is good for detecting film creation. It is a semi-transparent film that uses a bias light source to make the shortcomings as a microscopic body for surface appearance. At the same time, the effect of using the image is' a ring of light for the inspection of the effect of optical mirrors, such as a light source mirror or a photographic surface exogenous side light (polarized light if the coaxial light source 12 shape light source 24 is strengthened to compensate the annular coaxial light source 12 and Using the adjustment optical detection device, the sheet reflects the coaxial light to be measured, and the light source is shaped. When the light source is not bright enough or the light source mechanism of the irradiation machine is inspected, such as visible light, the light source is not bright. 24 special ring light sources. Learn lenses 14 It is the use of the photosynthesis of the source can be used alone when the angle and other questions, for non-micro mirror artificial
第8頁 M281285 四、創作說明（5) 檢查或影像自動檢查。 唯以上所述者，說&丄> 用來限定本創作實二 彳作之較佳實施例而 述之特徵及精神所A &圍。故即凡依本創作申 作之申請專利範圍内之均等變化或修飾，均應包 已，並非 請範圍所 括於本創Page 8 M281285 4. Creation Instructions (5) Inspection or automatic image inspection. Only those mentioned above, said & 丄 > are used to define the characteristics and spirit of A & Therefore, all equal changes or modifications within the scope of the patent application filed according to this creation should be included, not the scope of the invention.
_ M281285 圖式簡單說明 【圖式簡單說明】 •第一圖及第二圖為本創作之立體結構示意圖。 第三圖為本創作之結構剖面示意圖。 【主要元件符號說明】 10 殼體 12 同軸光源 14光學鏡片 16濾光片 @18勻光片 2 0 旋轉鈕 2 2銜接口 24環形光源 2 6鎖固元件_ M281285 Schematic description [Schematic description] • The first and second pictures are the three-dimensional structure diagrams of the creation. The third figure is a schematic structural cross-section of the creation. [Description of main component symbols] 10 Housing 12 Coaxial light source 14 Optical lens 16 Filter @ 18 Uniform light 2 0 Rotary knob 2 2 Interface 24 Ring light source 2 6 Locking element
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