1311214 九、發明說明： 【Ίχ明所屬之技術領域】 本發明係關於一種目視檢測用燈箱，尤指一種可迅速 改變所提供之光源的顏色、具有簡單之結構且可提高檢測 5 出玻璃基板瑕疵之效率的目視檢測用燈箱。 【先前技術】 近年來，台灣的TFT-LCD產業蓬勃發展，所使用之玻 璃基板的尺寸越來越大，從原本可用雙手即可拿取的35 10代基板已逐漸擴大到長寬尺寸皆接近2公尺的6代基板，此 時已無法利用雙手拿取玻璃基板。此外，除了面積的擴大 之外玻％基板的厚度也逐漸地縮減。所以在tfT-LCD的 衣込過私中，玻璃基板皆必須藉由機械手臂在各製程機台 之間移動。 15 而在TFT-LCD的製造過程中，玻璃基板在經歷各製程 =段後之表面品質的控管是非常重要的，因為如果沒有及 時將有瑕疵的玻璃基板從生產線上挑除，所浪費的不僅有 後，袅耘的材料的成本，更造成寶貴製程時間的浪費，大 幅影響整個液晶廠的產量。 2〇 目$ ,業界已經定義出超過170種以上發生於玻璃基 板上的瑕疵，且瑕疵種類數目仍持續增加中。此外，欲檢 測出上述各種不同的瑕疵，則必須嚴格遵守各種不同的檢 測條件才可順利地檢測出各種瑕疵，如特定的玻璃基板傾 斜角度、特定的光源強度、特定的光源波長或特定的光源 1311214 強度为佈。因此’提供目視檢測所需之光源的燈箱品質非 ' 常重要。 圖1係目前業界應用於大面積玻璃基板表面瑕疵目視 • 檢測之光學檢測系統的示意圖，其中玻璃基板1被置放於承 • 5 載機台2上，上燈箱3及背燈箱4則分別位於承載機台2的上 方及後方，以提供目視檢測玻璃基板瑕疵所需的光源。此 外，上燈箱3及背燈箱4均為所謂「雙光源燈箱」，它們均 能提供兩種不同波長光源，如白光及黃光。 • 至於目視檢測玻璃基板瑕疵的步驟，則敘述於下： 10 首先，依據所欲檢測之瑕疵的種類，將玻璃基板！調 整至一特定角度。接著’將特定波長及特定入射角度的光 源照射於玻璃基板1上（在圖1的狀況中，係點亮背燈箱4提 供光源），再藉由經過嚴格訓練之品管員5以目視的方式檢 視玻璃基板1的整個表面’判斷是否有任何瑕斑存在。 15 當欲檢測另一種瑕疵時，則重複上述步驟，即在依序 調整玻璃基板1角度及光源波長後，再以目視的方式檢查玻 • 璃基板的整個表面。亦即，必須依據所欲檢測之玻璃瑕疵 的不同，適當地選擇使用不同燈箱的光源及玻璃基板的旋 轉角度’以使光源的光線於玻璃基板上進行正面透射、反 20 面透射、正面反射或反面反射等動作，才能正確地檢測玻 璃基板是否存在任何缺陷。 - 如岫所述，光源之波長對於是否能檢測出玻璃基板之 • 缺陷非常重要。因此’目前業界所使用之燈箱均為所謂之 1311214 「雙光源燈箱」’即可依照檢測的需要而提供不同波長光 源的燈箱，其構造如下所示。 反食尤 圖2A及圖2B分別係第—種「雙光源燈箱」於提供黃光 及白光時的結構示意圖，其中螢光燈f21及鈉燈22分別排 列於燈箱中’反射板23將鈉燈22所發射之光線朝向擴散板 24反射，再傳遞至外界。此外，在螢光燈f 2ι及納燈以 間，具有-百葉窗狀的遮光板25，其係以氣虹或馬達等方 式帶動而改變其狀態。 在圖2A的狀況中，螢光燈管21係處於關閉狀態，而納 10 15 k 22則處於持續開啟的狀態。此外，百葉窗狀的遮光板μ 係處於「開啟」狀態，使納燈22所發射的光線可以通過並 到達擴散板24。此時，此「雙光源燈箱」提供均句的黃光 光源。而在Β2Β的狀況巾，#紐管21係處於開啟狀態， 而鈉燈22仍處於持續開啟的狀態。但是，丨葉窗狀的光 板25則處於「關閉」狀態以將鈉燈22所發射的光線遮蔽住， 使其無法達擴散板24。此時，此「雙光源燈箱」提供均勻 的白光光源。 圖3Α及圖3Β分別係第二種「雙光源燈箱」於提供黃光 及白光時的結構示意圖，其中螢光燈管31及鈉燈32分別排 2〇列於燈箱中’其所發射之光線分別經由擴散板％傳遞至外 |此外螢光燈管3 1排列於遮光板33的上表面，且遮光 板33係以氣缸或馬達等方式帶動而改變其狀態。 在圖3 Α的狀況中，螢光燈管3 1係處於關閉狀態，而鈉 燈32則處於持續開啟的狀態。此外’遮光板係處於「開 1311214 啟」狀態，使納燈32所發射的光線可到達擴散板34。此時， ·-此「雙光源燈箱」提供均勾的黃光光源。而在圖犯的狀況 中，榮光燈管31係處於開啟狀態，而納燈32仍處於持續開 啟的狀態。但是，遮光板33則處於「關閉」狀態以將鋼燈 5 32所發射的域遮蔽住，使其無法達擴散板34。此時，此 又光源燈相」便提供均勻的白光光源。 但是，上述兩種「雙光源燈箱」均具有幾項缺點，造 成目視檢測玻璃瑕疵的效率無法有效地提升，如下所述： 1. 由於鈉燈在點亮後必需等待15至20分鐘後，其光強 10度才能達到目視檢測玻璃基板瑕疲所需的穩定狀態。所 以’在檢測玻璃基板瑕苑的過程中，鈉燈必須持續地點亮。 也因此，當需使用白光做為檢測光源時，必須使用「遮光 機構」遮蔽鈉燈所發射的光線，如百葉窗狀的遮光板。 2. 上述兩種「雙光源燈箱」由於不具任何濾光單元， 15所以它們僅能提供兩種顏色的光源，即白光與黃光。此外， 由於某些種類的玻璃基板瑕疵僅能在異於黃光及白光的情 況下才能被檢測出來，所以上述兩種「雙光源燈箱」所能 應用之玻璃基板瑕疵_檢測項目受到限制。 3 ·上述兩種「雙光源燈箱」所應用於遮蔽鈉燈所發射 20之光線的結構均㈣複牵隹，且在轉換遮光板狀態時所需驅 動的機械結構較多，如百葉窗狀的遮光板。所以，它們在 切換所提供光源之顏色時的反應速率較低，導致整套玻璃 基板瑕疵檢測程序所需的時間被拉長。1311214 IX. Description of the invention: [Technical field to which the invention belongs] The present invention relates to a light box for visual inspection, in particular to a color which can quickly change the color of the light source provided, has a simple structure and can improve the detection of the glass substrate. A light box for visual inspection of efficiency. [Prior Art] In recent years, Taiwan's TFT-LCD industry has flourished, and the size of the glass substrate used has become larger and larger. From the original 35-generation substrate that can be taken by both hands, it has been gradually expanded to both long and wide sizes. The 6th generation substrate, which is close to 2 meters, is no longer able to take the glass substrate with both hands. Further, in addition to the enlargement of the area, the thickness of the glass substrate is gradually reduced. Therefore, in the tfT-LCD smuggling, the glass substrate must be moved between the various processing machines by the robot arm. 15 In the manufacturing process of TFT-LCD, it is very important to control the surface quality of the glass substrate after each process = segment, because if the defective glass substrate is not removed from the production line in time, it is wasted. Not only later, the cost of the materials, but also the waste of valuable process time, greatly affect the output of the entire LCD factory. 2〇目$, the industry has defined more than 170 types of defects that occur on glass substrates, and the number of species continues to increase. In addition, in order to detect the above various flaws, various detection conditions must be strictly observed to smoothly detect various flaws, such as a specific glass substrate tilt angle, a specific light source intensity, a specific light source wavelength, or a specific light source. 1311214 The strength is cloth. Therefore, the quality of the light box that provides the light source required for visual inspection is not always important. 1 is a schematic diagram of an optical inspection system for visual inspection and inspection of a large-area glass substrate, in which the glass substrate 1 is placed on a carrier 5, and the upper light box 3 and the back light box 4 are respectively located. The upper and lower sides of the carrier 2 are supported to provide a light source required for visual inspection of the glass substrate. In addition, the upper light box 3 and the back light box 4 are so-called "dual light source light boxes", which are capable of providing two different wavelength light sources such as white light and yellow light. • The procedure for visually inspecting the glass substrate 叙述 is described below: 10 First, depending on the type of flaw you want to test, place the glass substrate! Adjust to a specific angle. Then, a light source of a specific wavelength and a specific incident angle is irradiated onto the glass substrate 1 (in the case of FIG. 1, the backlight unit 4 is provided with a light source), and then visually observed by a highly trained quality controller 5. The entire surface of the glass substrate 1 is inspected to determine whether any ecchymoses are present. 15 When you want to detect another type of defect, repeat the above steps, after sequentially adjusting the angle of the glass substrate 1 and the wavelength of the light source, and then visually inspect the entire surface of the glass substrate. That is, the light source of the different light boxes and the rotation angle of the glass substrate must be appropriately selected according to the difference of the glass crucible to be detected, so that the light of the light source is transmitted on the glass substrate for frontal transmission, trans 20 transmission, frontal reflection or Actions such as reverse reflection can correctly detect whether there is any defect in the glass substrate. - As stated above, the wavelength of the source is important for detecting defects in the glass substrate. Therefore, the light boxes used in the industry are all so-called 1311214 "dual light source light boxes", which can provide light boxes of different wavelengths according to the needs of detection. The structure is as follows. Anti-Food Uto 2A and FIG. 2B are respectively schematic diagrams of the first "double-source light box" when providing yellow light and white light, wherein the fluorescent lamp f21 and the sodium lamp 22 are respectively arranged in the light box, 'the reflection plate 23 is the sodium lamp 22 The emitted light is reflected toward the diffusion plate 24 and transmitted to the outside. Further, between the fluorescent lamp f 2ι and the lamp, there is a louver-shaped light shielding plate 25 which is driven by a gas jet or a motor to change its state. In the situation of Fig. 2A, the fluorescent tube 21 is in a closed state, and the nano 10 15 k 22 is in a continuously open state. Further, the louver-like visor μ is in an "on" state, so that the light emitted by the illuminator 22 can pass through and reach the diffuser 24. At this time, the “dual light source box” provides a yellow light source with a uniform sentence. In the condition of the Β2Β, the #纽管21 is in the on state, and the sodium lamp 22 is still in the continuous state. However, the louvered light plate 25 is in a "closed" state to shield the light emitted by the sodium lamp 22 from reaching the diffuser plate 24. At this time, the “dual light source box” provides a uniform white light source. Figure 3A and Figure 3 are the structural diagrams of the second "double-source light box" when providing yellow and white light. The fluorescent tube 31 and the sodium lamp 32 are respectively arranged in the light box. The fluorescent lamp tube 3 1 is arranged on the upper surface of the light shielding plate 33, and the light shielding plate 33 is driven by a cylinder or a motor to change its state. In the case of Fig. 3, the fluorescent tube 3 1 is in a closed state, and the sodium lamp 32 is in a continuously open state. In addition, the visor is in the "open 1311214" state, so that the light emitted by the lamp 32 can reach the diffuser 34. At this time, the "double light source box" provides a yellow light source that is hooked. In the case of the picture, the glory lamp 31 is in the on state, and the lamp 32 is still in the on state. However, the visor 33 is in the "closed" state to shield the field emitted by the steel lamp 5 32 from reaching the diffuser plate 34. At this point, the light source phase provides a uniform white light source. However, the above two "dual light source light boxes" have several disadvantages, which may cause the efficiency of visual inspection of the glass crucible to be effectively improved, as follows: 1. Since the sodium lamp must wait for 15 to 20 minutes after lighting, its light A strong 10 degrees is required to achieve a stable state required for visual inspection of the fatigue of the glass substrate. Therefore, in the process of detecting the glass substrate, the sodium lamp must be continuously lit. Therefore, when white light is required as the detection light source, it is necessary to use a "shading mechanism" to shield the light emitted by the sodium lamp, such as a louver-like visor. 2. The above two “double-source light boxes” can only provide two colors of light source, namely white light and yellow light, because they do not have any filter units. In addition, since some types of glass substrates can only be detected under conditions other than yellow light and white light, the glass substrates 瑕疵_test items that can be applied to the above two "double-source light boxes" are limited. 3 · The above two "double-source light boxes" are used to shield the light emitted by the sodium lamp by 20 (4) retracement, and the mechanical structure required to drive the hood is more, such as the louver-like visor . Therefore, their response rate is lower when switching the color of the supplied light source, resulting in an extended time required for the entire glass substrate flaw detection procedure.