WO2020134775A1

WO2020134775A1 - Glass substrate detection apparatus

Info

Publication number: WO2020134775A1
Application number: PCT/CN2019/120529
Authority: WO
Inventors: 邓永松
Original assignee: 江苏东旭亿泰智能装备有限公司
Priority date: 2018-12-26
Filing date: 2019-11-25
Publication date: 2020-07-02
Also published as: CN109724999A

Abstract

A glass substrate detection apparatus, comprising a mounting rack (1) provided above a glass substrate; a sliding table that is movably provided on the mounting rack (1) along a first direction; and an illumination unit (2) used for irradiating detection light onto the glass substrate, wherein the illumination unit (2) is movably provided on the sliding table along a second direction. Therefore, the illumination unit can be moved along the first direction and the second direction. That is, the illumination unit can be moved to any position in a plane, thereby being capable of irradiating the detection light to any position of the glass substrate, and thus, the omnidirectional detection of the glass substrate is achieved, an observation blind region is eliminated, and the quality of a finished product can be improved.

Description

Glass substrate inspection device

Technical field

The present disclosure relates to the field of basic glass inspection, and in particular, to a glass substrate inspection device.

Background technique

With the upgrading of electronic products, the quality requirements of liquid crystal displays used in electronic products are becoming higher and higher. As the main component of liquid crystal displays, glass substrates are also getting higher and higher. During the defect inspection of the glass substrate, since the position of the lighting unit is fixed, the detection light can be irradiated to different areas of the glass substrate only by its own rotation. In this process, there are often some blind spots, and these blind spots are not easy to observe, and there are surface defects that affect their quality.

technical problem

The purpose of the present disclosure is to provide a glass substrate detection device that can realize all-round detection of a glass substrate, eliminate observation blind spots, and improve the quality of finished products.

Technical solution

In order to achieve the above object, the present disclosure provides a glass substrate detection device, including: a mounting bracket for being disposed above a glass substrate; a slide table that is movably disposed on the mounting bracket in a first direction; and a lighting unit , For irradiating the detection light onto the glass substrate, the lighting unit is movably arranged on the slide table along the second direction. Optionally, the first direction and the second direction are perpendicular to each other. Optionally, the detection device further includes: a first driving member fixed on the mounting frame; a first transmission shaft connected to the output end of the first driving member; A transmission shaft extends along the first direction; a nut is cooperatively installed on the lead screw, and the sliding table is fixed on the nut. Optionally, the first transmission shaft, the lead screw and the nut are two respectively, the two lead screws are respectively disposed on both sides of the slide table, and the first driving member is disposed on two Between the screws, the first driving member forms two output shafts through the first reduction gear box to connect the two first transmission shafts respectively. Optionally, the detection device further includes an outer cover that covers the outside of the screw and the nut, and the outer cover is formed with an opening to connect the slide table to the nut. Optionally, the detection device further includes a first slide rail disposed parallel to the lead screw, and the slide table is formed with a slide groove that slidingly cooperates with the first slide rail. Optionally, the detection device includes: a second driving member fixed on the slide table; a second transmission shaft connected to the output end of the second driving member; a driving wheel connected to the second driving transmission The drive shaft; the driven wheel is spaced from the driving wheel in the second direction; the belt extends around the outside of the driving wheel and the driven wheel in the second direction, and the lighting unit is fixed at The belt. Optionally, the driving wheel, the driven wheel and the belt are two respectively, which are arranged on both sides of the lighting unit, and the second transmission shaft penetrates the two driving wheels to drive simultaneously The two driving wheels rotate. Optionally, the slide table is fixed to the belt by a first slider, and a second slide rail extending parallel to the belt is also provided on the slide table, and the first slider and the first slide Two sliding rails sliding fit. Optionally, the mounting frame is formed in a rectangular shape and hollowed out.

Beneficial effect

Through the above technical solution, the lighting unit can achieve movement in the first direction and the second direction, that is, movement at any position in the plane, so that the detection light can be irradiated to any position of the glass substrate, and the entire glass substrate is realized. Orientation detection eliminates blind spots and improves the quality of finished products. Other features and advantages of the present disclosure will be described in detail in the detailed description section that follows.

BRIEF DESCRIPTION

The drawings are used to provide a further understanding of the present disclosure, and constitute a part of the specification, together with the following specific embodiments to explain the present disclosure, but do not constitute a limitation of the present disclosure. In the drawings: FIG. 1 is a schematic structural diagram of a detection device according to an exemplary embodiment provided by the present disclosure; FIG. 2 is an enlarged view of part A in FIG. 1; FIG. 3 is an enlarged view of part B in FIG. 1; It is a schematic structural diagram of a slide table of a detection device according to an exemplary embodiment provided by the present disclosure. DESCRIPTION OF REFERENCE NUMERALS 1 Mounting frame 2 Lighting unit 31 First driving member 311 First reduction gear 32 First transmission shaft 33 First gear box 41 Second driving member 42 Second transmission shaft 43 Belt 51 Connecting plate 52 First slider 6 Card block 7 Connection block 100 Cover 200 First slide rail 300 Second slide rail

Best Mode of the Invention

The specific embodiments of the present disclosure will be described in detail below with reference to the drawings. It should be understood that the specific embodiments described herein are only used to illustrate and explain the present disclosure, and are not intended to limit the present disclosure. In this disclosure, unless otherwise stated, the use of directional words such as "上" and "下" refers to the up and down of each component in the state of use, "inner", "outer" refers to each The terms “first”, “second”, etc. are used to distinguish one element from another element inside and outside the outline of the part, and are not of order and importance. In addition, when the following description refers to the drawings, unless In addition, the same numbers in different drawings indicate the same or similar elements. As shown in FIG. 1, the present disclosure provides a glass substrate inspection device for detecting surface defects of a glass substrate, including a mounting frame 1, a slide table, a lighting unit 2, and the like. The mounting frame 1 is used to be arranged above the glass substrate; the slide table can be movably arranged on the mounting frame 1 in the first direction; the lighting unit 2 is used to irradiate the detection light onto the glass substrate, which can be along the second The direction is movably set on the slide table. In this way, the lighting unit 2 can move in the first direction and in the second direction, that is, it can move at any position in the plane, so that the detection light can be irradiated to any position of the glass substrate, and the omnidirectional detection of the glass substrate is realized , Eliminating the blind spot of observation, and can improve the quality of finished products. It should be noted that the present disclosure does not limit the mutual relationship between the first direction and the second direction. For example, the two may be the X direction and the Y direction in the spatial coordinate system, that is, to achieve the movement of any position on the plane. The glass substrate may be a reversible glass substrate, that is, after the detection of one surface is completed, it is turned over to the other surface for detection, which is not limited in the present disclosure. Specifically, as an optional embodiment, the first direction and the second direction may be perpendicular to each other, so that the lighting unit 2 can move within a rectangular area, compared with the manner in which the first direction and the second direction are inclined The first direction and the second direction are perpendicular to each other, which can improve the space utilization of the device, and also facilitate the arrangement of the following transmission components, which is more conducive to the movement of the lighting unit 2 in the plane. According to some embodiments, as shown in FIG. 1, the mounting frame 1 may be formed in a rectangular shape and hollowed out, which may increase the light transmittance of the mounting frame 1 while ensuring strength, and at the same time, facilitate the installation of various transmission components. In addition, as shown in FIGS. 1 and 4, the slide table may also be formed in a hollow shape to avoid shading. The movement form of the slide table in the first direction and the movement mode of the lighting unit 2 in the second direction may have been implemented by any appropriate structure. In the following, the present disclosure will describe in detail the manner in which the lighting unit 2 moves in the first direction and the second direction in an embodiment with reference to the drawings. As shown in FIG. 1, the detection device provided by the present disclosure may further include a first driving member 31, a first transmission shaft 32, a screw, a nut, and the like, where the first driving member 31 may be, for example, a driving motor. The first driving member 31 is fixed on the mounting frame 2; the first transmission shaft 32 can be connected to the output end of the first driving member 31; the screw drive is connected to the first transmission shaft 32 and can extend in the first direction; the nut Co-installed on the screw, the sliding table is fixed on the nut. That is, the first driving member 31 transmits power to the screw through the first transmission shaft 32, and the nut that is in transmission coordination with the screw is fixedly connected to the slide table, thereby realizing the movement of the slide table in the first direction. Here, the present disclosure does not limit the specific arrangement and transmission matching manner of the first driving member 31 and the first transmission shaft 32, and the present disclosure will be described in detail in the following embodiments. According to some embodiments, as shown in FIG. 1, the first transmission shaft 32, the lead screw, and the nut may be two respectively, the two lead screws are respectively disposed on both sides of the slide table, and the first driving member 31 is disposed on Between the two screws, the first driving member 31 forms two output shafts through the first reduction box 311 to connect the two first transmission shafts respectively. It should be noted here that the two sides of the slide table refer to the left and right sides in the moving direction. The first driving member 31 and the two first transmission shafts 32 may be located on the same side of the mounting frame 1, and the two first transmission shafts 32 extend perpendicular to the first direction and are respectively connected to the two output shafts, that is, the two The synchronous transmission of the screw leads to the uniformity of the movement of the slide table in the first direction. Here, the present disclosure does not limit the transmission mode between the first transmission shaft 32 and the lead screw. For example, a first gear box 33 may be provided between the two, and the transmission direction may be converted through mutually matching bevel gears. In addition, there may be only one of the above-mentioned first transmission shaft 32, screw and nut, that is, only one screw in the first direction drives the sliding table to move, instead of a group of screws arranged on both sides of the mounting frame 1, this There are no restrictions on this publicly. According to some embodiments, as shown in FIG. 1, the detection device provided by the present disclosure may further include an outer cover 100 covering the outside of the screw and nut, for protecting the screw and nut. The cover 100 is formed with an opening to connect the sliding table to the nut. Specifically, as shown in FIG. 2, a connecting block 7 can be fixedly connected to the nut, and the connecting block 7 extends out of the opening, and both sides of the sliding table can be A rectangular connecting plate 51 is formed respectively, and the connecting plate 51 is fixedly connected to the connecting block 7 so as to realize the movement of the slide table in the first direction. For example, the lower end of the connecting plate 51 may be connected with two rollers, and the upper end of the housing 100 may be formed with a guide rail for guiding the rollers. The two rollers may be connected through a connecting shaft, and the fixed connection between the connecting shaft and the connecting block 7 may make the two The two rollers roll along the guide rail to realize the movement of the slide table in the first direction. That is, there may be many ways to connect the sliding table and the nut, and this disclosure does not limit this. In order to achieve a more stable movement of the slide table in the first direction, as shown in FIGS. 1 and 2, the detection device provided by the present disclosure further includes a first slide rail 200 disposed parallel to the lead screw. A sliding chute of sliding rail 200, that is, when the sliding table moves in the first direction, the nut drives the sliding table, and the sliding groove on the sliding table can slide along the first sliding rail 200, ensuring the stability of the sliding table movement Sex. The above describes the movement of the slide table in the first direction, that is, the movement of the lighting unit 2 in the first direction, and the movement of the lighting unit 2 in the second direction is described below. Specifically, as an optional embodiment, as shown in FIGS. 3 and 4, the detection device provided by the present disclosure may further include a second driving member 41, a second transmission shaft 42, a driving wheel, a driven wheel, a belt, etc. , Where the second driving member 41 may be a driving motor, for example. The second driving member 41 is fixed on the slide table; the second transmission shaft 42 can be connected to the output end of the second driving member 41 for driving the rotation of the driving wheel described below; the driving wheel transmission is connected to the second driving shaft 42 The driven wheel and the driving wheel are spaced apart in the second direction; the belt 43 extends around the outside of the driving wheel and the driven wheel in the second direction, and the lighting unit 2 is fixed on the belt 43. That is, the second driving member 41 drives the second transmission shaft 42 to rotate, thereby driving the rotation of the driving wheel, and the driving wheel and the driven wheel drive the belt 43 to rotate, thereby realizing the lighting unit 2 fixed on the belt 43 Move in the second direction. Of course, there can be many kinds of movements of the lighting unit 2 in the second direction, for example, the above-mentioned screw nut transmission method, which is not limited in the present disclosure. According to some embodiments, as shown in FIGS. 3 and 4, the driving wheel, the driven wheel and the belt 43 may be two, that is, two sets of such transmission components, and they are both provided on both sides of the lighting unit 2. The two transmission shafts 42 penetrate the two driving wheels to simultaneously drive the two driving wheels to rotate. In this way, the second driving member 41 can drive the two belts 43 to rotate synchronously, thereby achieving the synchronization of the movement. It should be noted here that the two sides of the lighting unit 2 refer to the left and right sides in the moving direction. Of course, the transmission components such as the driving wheel, the driven wheel, and the belt 43 can also be provided as a group, and the other side of the slide table can be driven passively, which is not limited in the present disclosure. According to some embodiments, as shown in FIGS. 3 and 4, the slide table may be fixed on the belt 43 through the first slider 52, and the slide table is further provided with a second slide rail 300 extending parallel to the belt 43, for example The second slide rail 300 may be disposed directly under the belt 43, and the first slider 52 and the second slide rail 300 slidingly cooperate, so that the second slide rail 300 can further provide support for the slide table. There may be a plurality of first sliders 52 arranged in the second direction, and the lighting unit 2 is fixedly connected to the first slider 52, thereby achieving smooth movement of the lighting unit 2. In addition, a hollow clamping block 6 can be sleeved on the side of the belt 43 near the lower side, and the clamping block 6 can be fixed on the slide table, so as to prevent the belt 43 from shaking up and down. As shown in FIG. 1, the lighting unit 2 can realize clockwise or counterclockwise alternating movement in the first direction and the second direction, thereby realizing the omnidirectional detection of the glass substrate. When the detection is completed, the glass substrate is turned over for another One-sided inspection. In addition, for the specific composition of the lighting unit 2, it may include a lighting box, a sodium lamp, a halogen lamp housed in the lighting box, and a reflector for reflecting the detection light emitted by the sodium lamp and the halogen lamp to the surface of the glass substrate, wherein the lighting The dimming glass mounted on the mounting frame 1 is also provided directly below the unit 2. When the dimming glass is energized, the detection light is irradiated onto the glass substrate via the reflector and the dimming glass to perform the detection operation. Among them, the detection light emitted by the halogen lamp is used to detect spots, scratches, etc. on the glass substrate, and the detection light emitted by the sodium lamp is used to detect the uniformity of the alignment film of the glass substrate. In order to ensure the normal operation of the sodium lamp, a cooling fan is also arranged on it. In addition, the detection device of the present disclosure may also include a dust cover (not shown in the figure), which is provided on the outside of the frame 1 to prevent dust and debris from falling into each component, thereby ensuring the stability of the detection device jobs. The preferred embodiments of the present disclosure have been described in detail above with reference to the accompanying drawings. However, the present disclosure is not limited to the specific details in the above embodiments. Within the scope of the technical concept of the present disclosure, various simple modifications can be made to the technical solutions of the present disclosure. These simple modifications all fall within the protection scope of the present disclosure. In addition, it should be noted that the specific technical features described in the above specific embodiments can be combined in any suitable manner without contradictions. In order to avoid unnecessary repetition, the present disclosure The combination method will not be explained separately. In addition, various combinations of various embodiments of the present disclosure can also be arbitrarily combined, as long as it does not violate the idea of the present disclosure, it should also be regarded as what is disclosed in the present disclosure.

Claims

A glass substrate detection device, characterized in that it comprises: a mounting frame (1), which is arranged above the glass substrate; a sliding table, which is movably arranged on the mounting frame (1) in a first direction; and An illuminating unit (2) is used to irradiate the detection light onto the glass substrate, and the illuminating unit (2) is movably arranged on the slide table along the second direction. A
The glass substrate inspection device according to claim 1, wherein the first direction and the second direction are perpendicular to each other. A
The glass substrate inspection device according to claim 2, characterized in that the inspection device further comprises: a first driving member (31) fixed on the mounting frame (2); a first transmission shaft (32), Connected to the output end of the first driving member (31); a screw, connected to the first drive shaft (32) and extending in the first direction; a nut, fitted and installed on the screw On, the sliding table is fixed on the nut.
The glass substrate inspection device according to claim 3, characterized in that the first transmission shaft (32), the lead screw and the nut are two respectively, and the two lead screws are respectively provided in the On both sides of the slide table, the first driving member (31) is disposed between the two screw rods, and the first driving member (31) forms two output shafts through the first reduction gear (311) to Two first transmission shafts (32) are connected respectively.

The glass substrate detection apparatus according to claim 4, wherein said detecting means further comprises a housing in the housing (100) of said screw and said nut outer side of the housing (100) is formed with an opening To connect the slide table to the nut.

The glass substrate detection apparatus according to claim 3, wherein said detecting means further comprises a first rail (200) disposed in parallel with the lead screw, the slider is formed with the first A sliding rail (200) slidingly fits the chute.
The glass substrate inspection device according to any one of claims 3-6, characterized in that the inspection device comprises: a second driving member (41) fixed on the slide table; a second transmission shaft (42 ), connected to the output end of the second driving member (41); driving wheel, transmission connected to the second transmission shaft (42); driven wheel, spaced from the driving wheel in the second direction The belt (43) is extended around the driving wheel and the driven wheel in the second direction, and the lighting unit (2) is fixed on the belt (43).  
The glass substrate inspection device according to claim 7, characterized in that the driving wheel, the driven wheel and the belt (43) are two respectively, and are provided on both sides of the lighting unit (2) , The second transmission shaft (42) penetrates the two driving wheels to simultaneously drive the two driving wheels to rotate. A
The glass substrate inspection device according to claim 7, wherein the slide table is fixed on the belt (43) by a first slider (52), and the slide table is further provided with the belt (43) A second slide rail (300) extending in parallel, the first slider (52) slidingly cooperates with the second slide rail (300).

10. The glass substrate inspection device according to claim 1, wherein the mounting frame (1) is formed in a rectangular shape and hollowed out.

A