TWM279645U - Coated object holding device of physical vapor deposition evaporator - Google Patents

Description

M279645 IV. Creation Instructions (1)

The creation is about a kind of physical pain ^, the solidification of the object to be plated in the milk phase deposition vapor deposition machine, and more particularly, a type located in the base of the poor. [Technical field to which the new type belongs] The holder of the device. 、、、 Iron core: internally used for the solidification of the plated objects [previous technology]

At present, in the surface treatment of decorations, tableware, etc., a large amount of vapor deposition 5 PVD has been applied to increase the resistance of the plated material. How to increase the surface of these nano-plated materials has greatly increased The industry is familiar with physical vapor deposition. The Republic of China Patent Bulletin No. 5 1 2 1 8 1 includes a fixed shaft and a plurality of rotating shafts. Above each of the rotating shafts, a seat is provided for the keyed object to be inserted and fixed. In addition to the revolution movement, the nano-scale crickets, which are also sputtering, use physics to reveal the heat and ion resistance in addition to the plating machine of their organs. They are connected in parallel to the squares, and each of them can be deposited in a vapor deposition process. Surface corrosion, surface continuity, mechanical properties of the object to be plated, where the fixed shaft has a cone, which is fixed to cover the mold, mold semiconducting product (phys i ca surface, nanometer surface hardness, uniform extension, and extended use) An important subject holding device, the object to be plated and fixed on the shape of the fixed seat, in addition to the seat around the surface of the body to make the plated dry by sputtering 1 ion ions are used to cover the brother's life 〇 如 中The rotation of the device's main body is fixed and spattered on the shaft. However, the plated material holding device of the conventional physical vapor deposition vaporizer still has the following problems in practical use. The system rotates in an upright shape, so that the covering process of the covered objects is covered in a discontinuous manner, and the evaporation temperature of this physical vapor deposition is low, which is not high ^

The effect of M279645 loose coupling leads to uneven coating thickness and poor bonding of the plated object. In addition, for slender or slightly larger plated objects, these plated objects will produce mutual shielding phenomenon, so that the ions Non-uniform adhesion of particles, etc. = good appearance; and because the nano-ion system drops down in a parabolic manner, 'the area above the object to be adsorbed (A ds ◦ rp ^ 丨 0 n) with more ions' The lower part only adsorbs a small amount of ions, and the thickness of the coating layer forming the object to be plated is severely uneven. Furthermore, the fixed mount not only performs a revolving motion around a fixed axis, but also itself rotates, so the holding device The structure is quite complicated, so that the manufacturing cost cannot be effectively reduced. Therefore, “The author has felt the above problems and years of experience in the industry, and focused on the problems that can be improved, and concentrated on research and practical application.” In the spirit of excellence, he finally proposed a reasonable and effective improvement. The original creation of the above problems. [New content] The main purpose of this creation is to provide a plated material holding device for a physical vapor deposition steamer, which uses a fixed axis and a rotation axis to be set in #parallel 'and makes the fixed base rotate in an inclined manner. Movement can continuously and uniformly coat nano ions on the surface of the plated object to increase the mechanical properties such as surface hardness and wear resistance of the plated object and extend the service life. ^ In order to achieve the above purpose, this creation is to provide a plated material holding device for a physical vapor deposition Zhai plating machine. The holding device is installed inside a vapor deposition machine to hold and hold the plated material, including: A transmission mechanism having a fixed shaft and a transmission connected to the fixed shaft

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Components; and a rotating shaft arranged in the return mechanism, a fixed shaft with a ^ shovel structure is a non-4 rotating shaft and a support arm around the transmission mechanism: ^-drive two ends of the rotating shaft to be connected to a rotating D; The disc member 'and the transmission element cooperate with each other to rotate, so that the solid rotating member rotates, thereby achieving the above purpose. Mouth socket produces a slanted rotation [Embodiment] Please refer to the detailed description below 'It is not intended to explain the features and technical content of this creation, the description and the drawings, and the attached drawings are only for reference and creation. . Please refer to the first, second, and third figures for the combination diagram, application state diagram, and the first step of the application example of the steamer: Figure: Sectional view of the combination of the fixed seat and the plated object. 'This creative system provides a physical Gas-phase, accumulative vapor deposition machine holding device for plated material, the holding device is installed inside a vapor deposition machine for plated material holding and holding, mainly including a transmission mechanism 11 and at least one fixing mechanism 12. Among them: (1) The transmission mechanism 1 1 is fixed on the inner top surface of the evaporation machine, and includes a fixed shaft 111 and a transmission element 112 connected to the fixed shaft U1. The fixed shaft 111 is vertically vertical. The transmission element 丨 2 can be a helical gear or a helical bevel gear, which has a rotation-providing element or device. The fixing mechanism 12 includes a rotating shaft 121 that is non-parallel to the transmission shaft 丨 丨 i, and a support ^ 21 for holding the rotating shaft 丨 21.

1 2 2 and the one that drives the rotation axis 丨 2} The rotation of the rotation of the hibiscus ... 2'122 The winding mechanism 11 performs a central angle of 5. Two: two ;; Within the axis 121 and the fixed axis 111 A / Tuo Xiegu & 0 /, the angle between the inside is 15. ~ 4 5. The g seat 1 ^ 5 'remote connection ^ 疋 The two ends of the rotating shaft 121 are respectively provided with a rotating member 124 and a fixed connection = 12, and the moving member 124 is connected with the transmission base 12; ^ cooperate with the rotation hunting to make the fixed connection seat 1 25 is capable of generating an oblique rotating motion, and the rotating member 1 24 can also be a helical gear or a bevel wheel, which has an element or a device for providing rotation. φ The fixed mount 125 (as shown in the third figure) includes a base plate 1251, a first insert plate 1 252, a second insert plate 253, and a ring body 1 254. The center of the base plate 1 2 5 is rotated. The shaft 丨 2 1 is locked and connected to each other, and the first insert disk 1 2 5 2 and the second insert disk 1 2 53 are respectively arranged above it, and the ring body 2 5 4 is looped around the chassis 1251 The first insert disk 1 252 and the second insert disk 1 25 3 are formed on the outer periphery, and a space is formed between the chassis 1251 and the first insert disk 1252 and the first insert disk 1252 and the second * insert disk 1 2 5 3 respectively. 1 2 5 5. In addition, the first insert disk 1 252 and the second insert disk 1 253 are respectively provided with a plurality of insertion holes 丨 25 6, 1256 ', and the insertion holes 1256 and 1256 of the insertion disks 1252 and 1253 are respectively It is correspondingly arranged so that the object to be plated can be firmly inserted and connected to the _ insertion holes 1 256 and 1 256 ′ of the fixing base 1 2 5. Furthermore, a plurality of perforations 1 2 5 7 ′ and 1 2 5 7 are respectively provided on the chassis 1251 and the ring body 1254, so that the object to be plated can achieve the effect of heat dissipation during the production process, so as to improve the object to be plated. Process quality. The turntable member 1 2 3 is composed of a circular turntable 1 2 3 1 and a rotating shaft 1232 connected to the bottom of the turntable 1231. At the outer periphery of the turntable 1231

Page 8 4. Creation instructions (5) A support arm 122 is fixedly connected, and a rotating shaft 1232 is placed (not shown in the figure), and is electrically connected to] is connected to the motor temple drive device #Used as a voltage power supply 2. With the Nissei system, the objects to be plated, such as milling cutters, drills (pins), J-inch knife tools, etc. can be inserted and held on the fixed base Γ25, and / ;, electrical and hole extraction device 7, the arc power supply 3 Connected with-arc% 31, and the ion device will be placed at ^ W7, and sealed in the clothes set 5 series as an ion grab, and the gas is drawn out and the 7 series is set as a pump, the inside of the vapor deposition machine After being evacuated, different heating temperatures are applied according to the characteristics of the different minerals, typically between 450 C and 3 generations. The ionized device 5 is used to clean the surface to be plated. F The arc gun 3 to 1 The nano-ion self-sputtering target 4 is sputtered out in a parabolic manner, and again with the assistance of the ion device 5, the rice ion after the arc operation is further refined by the ion device 5 and the solid Then, the nano ions are tilted and rotated in a downward direction so that the nano ions such as tritium can be uniformly and continuously covered on the surface of the object to be plated. Finally, from the gas inlet 6 Nitrogen-containing carbon gas is passed in and cooled to complete the production of the coating. Please refer to the fourth and fifth figures, which are sectional views of another embodiment and another embodiment of the fixed mount of this creation. The fixed mount 1 2 5 of this creation can be in addition to the above embodiment. The fixed base 1 2 5 can be composed of a chassis U51, a first insert disc 1252 provided above the chassis 1251, and a ring body 1 2 54 provided on the outer periphery of the chassis 1 251 and the first insert disc 1 252. A space 1 255 is formed between the pan plate 1251, the first insert plate 1 2 52 and the ring body 1 2 54. A plurality of insertion holes 1 2 5 6 are provided on the first insert plate 1 2 5 2 And the M279645 Fourth, creation instructions (6) The chassis 1251 is provided with a large number of perforations; [257, and most of the grooves 1 2 58, the grooves 1 2 5 8 are respectively connected to the plug holes 1 2 5 6 corresponding settings, so that the plated objects can be inserted and fixed (as shown in the fourth figure). In addition, for various substrates of different shapes or sizes, many protrusions 1 2 5 9 and perforations 1 2 5 7 'can be directly extended on the chassis 丨 251. These protrusions 1 2 5 9 are provided for The bell-shaped object with holes is inserted and connected (as shown in the fifth figure). Please refer to the sixth figure, which is a schematic diagram of the combination of the second embodiment of the present invention applied to the steamer. The fixed connection mechanism of this creation can be set in a single group in the above embodiment, or it can be fixed by a complex array. The mechanism 丨 2 is formed, and each of the fixed mechanisms 12 is correspondingly arranged at an equal interval, and is rotated around the transmission mechanism 丨 丨 to perform a% rotation motion 'and cause each of the fixed mounts 125 to rotate to achieve the operation process. The balance of forces and increase production speed. The holding device for the plated object of this creative physical vapor deposition vaporizer can not only improve the various shortcomings of conventional use, but also has the following advantages: Because of the fixed f: rotating in an inclined shape, the nano-ion parabola can be received in the forward direction The method of the method is to cover the surface of the object to be covered with nano ions in a continuous manner. The thickness of the object to be plated is uniform and the bonding is good. In addition, the device has a simple structure, low manufacturing cost and maintenance. The holding device of this creation is not limited to different shapes, + re-plated objects, and more extensive and applicable scope. To sum up, when we know that the physical vapour deposits in this creation are solid, and do n’t see the dead side. In @ 枝 之 被 plated U holding device has industrial applicability, novelty, and advanced structure. Similar products and public use were created in various types of publications, fully complying with the requirements for new patent applications. Call 1 not seen

Page 10 M279645 IV. Creation Instructions (7) The above is only the preferred embodiment of this creation. When the M279645 diagram is simply explained, the first diagram is the first implementation of this creation. The example is applied to the vapor deposition machine. The second figure is a use state diagram of the first embodiment of the present invention applied to the vapor deposition machine. The third figure is a sectional view of the combination of the fixing seat and the plated object in the second figure. The fourth figure is a combined sectional view of another embodiment of the fixing base of the present invention. The fifth figure is a combined sectional view of another embodiment of the fixing base of the present invention. The sixth diagram is a schematic combination diagram of the second embodiment of the present invention applied to a vapor deposition machine. [Description of the main component symbols: [This creation] Fixed shaft 11 1 Fixing mechanism 1 2 Support arm 1 2 2 Turntable 1231 Rotating part 124 Chassis 1251 Second insert disk 1 2 5 3 Space 1 2 5 5 Perforation 1 2 5 7 , 1 2 5 7 'convex column 1 2 5 9 holding device 1 transmission mechanism 11 transmission element 11 2 rotary shaft 1 2 1 rotary plate member 1 2 3 rotary shaft 1 2 3 2 fixed seat 125 first insert plate 1 2 5 2 ring body 1254 socket 1 2 5 6, 1 2 5 6 'recess 1258

Page 12 M279645 Brief description of the diagram Bias power supply 2 Arc power supply! § '3 Arc gun 31 Sputter target 4 Ion device 5 Gas inlet 6 Gas extraction device 7 fl 丨

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Claims (1)

M279645 5. Scope of patent application 1. A holding device system includes: a transmission element; and at least one non-parallel movable rotating shaft and parts, where the rotating moving parts are connected with the oblique rotation 2. The object to be plated according to the application Stiff setting. 3. Rotary shaft of solid plated solid according to application 4. Rotary shaft of solid plated solid according to application 5. Any of solid plated solid material according to application. 6. The plated material holding device of the physical vapor deposition vapor deposition machine according to the application, which is fixed inside the money vaporizer, and is used to be held and held by minerals. The mechanism has —IT] ^ i L TZ.疋 shaft and a transmission connected to a fixed shaft: 1 冓 'has a fixed shaft that is in line with the transmission mechanism, a support arm for holding a rotating shaft and a belt 1: a turntable that rotates the transmission mechanism A rotating part and a fixed base are respectively connected to the two ends of the structure, and the moving parts rotate in cooperation with each other, so that the fixed base is tilted. The physical vapor deposition key machine described in the first item of the scope, wherein the fixed shaft system of the transmission mechanism is longitudinal lead K: The physical vapor deposition machine described in the first item of the scope: the physical installation, wherein the transmission The fixed axis of the mechanism and the missing angle between the fixed mechanism are between 5. ~ 90. between. The physical vapor deposition clock machine as described in item 3 of the U-Lee range is oriented, where the angle between the fixed shaft and the fixed mechanism of the transmission mechanism is between 15. ~ 45. between. : The physical vapor deposition steaming machine and clothing set described in item 1 of Ziliganwei, wherein the transmission element is a helical gear or a beveled bevel wheel. Plating machine Page 14 1 · The object holding device of the physical vapor deposition vapor deposition machine according to item 6 of the scope of patent application, wherein the fixing base further includes a second insert disk M279645 5. The object to be plated for patent application The device, wherein the α connection seat of the fixing mechanism includes a chassis, a first insert disc provided in the space above the chassis and a space formed between the chassis, and a carcass provided around the chassis and the first insert disc. ^ 7 According to the object holding device of the physical vapour phase / redundant vapor deposition machine described in item 6 of the scope of the patent application, wherein 0 / x plate has a number of insertion holes on the plate, and the chassis has A plurality of grooves are provided, and the four grooves are arranged corresponding to the plug holes. 8 · The keyed object holding device of the physical% vapor deposition vapor deposition machine described in item 6 of the scope of application for patents, wherein the number / insert plate has a number of insertion holes, and the chassis is provided with There are many protrusions, and the holes are correspondingly arranged. 9. The object holding device of the physical vapor deposition vapor deposition machine according to item 6 of the scope of the patent application, wherein the chassis and the ring body are respectively provided with a plurality of perforations. The second inserting disc is between the first inserting disc and the chassis, and a space is formed between the second inserting disc and the first inserting disc. 11 · According to the physical vapor deposition vapor deposition machine's broken plate holding device according to item 10 of the scope of the patent application, the second plug-in plate is provided with a plurality of plug holes, and the second plug-in plate is also provided with There are many plug holes, and the plug hole of each plug is 1 L. It is held by minerals, and the potter's, and / or Jieluo plating machine Han m milk U character display, among which the fixing machine Then you set the array settings, each Page 15 M279645 Page 16