CN217651305U - Heating equipment of vacuum coating machine - Google Patents
Heating equipment of vacuum coating machine Download PDFInfo
- Publication number
- CN217651305U CN217651305U CN202123300933.7U CN202123300933U CN217651305U CN 217651305 U CN217651305 U CN 217651305U CN 202123300933 U CN202123300933 U CN 202123300933U CN 217651305 U CN217651305 U CN 217651305U
- Authority
- CN
- China
- Prior art keywords
- rocker
- support
- backing plate
- motor
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Muffle Furnaces And Rotary Kilns (AREA)
Abstract
The utility model relates to a vacuum coating machine firing equipment in vacuum coating technical field, including vacuum cover, two mechanisms and the placement machine of generating heat, two both ends that the mechanism installed respectively in the vacuum cover that generate heat, the middle of placement machine constructs the installation in the vacuum cover, placement machine constructs including support, rotating electrical machines, upset motor, rocker, backing plate and places the board, and the rotating electrical machines is installed in support side upper end, and the rocker is installed in support another side upper end, and the one end and the rotating electrical machines of rocker are connected, and the other end side at the rocker is installed to the upset motor, and the one end of backing plate is installed on the rocker, and the backing plate is connected with the upset motor, places the board and installs on the backing plate. The utility model discloses two heating that generate heat the mechanism and can be abundant that set up, the utility model discloses a placing mechanism can be after accomplishing the one side, and the upset heats to the another side, and when heating the one side, the backing plate that is located its top can lift up through the upset motor.
Description
Technical Field
The utility model relates to a vacuum coating technical field specifically is vacuum coating machine firing equipment.
Background
Vacuum coating machines mainly refer to a type of coating that needs to be performed under a higher vacuum degree, and include vacuum resistance heating evaporation, electron gun heating evaporation and the like. The evaporation coating is generally to heat a target material to evaporate surface components in the form of atomic groups or ions, and deposit the surface components on a substrate to form a thin film through a film forming process (scattering-island structure-labyrinth structure-layer growth). Therefore, the heating equipment is an indispensable component of the vacuum coating machine.
Traditional vacuum coating machine firing equipment's heating pipe generally sets up at the top of organism, and it can only heat the top surface of target when heating, and when needs heat top surface and bottom surface two sides, can only shut down and open the organism chamber door, with the target upset, makes the target bottom surface heat up again, and this kind of structure setting has reduced work efficiency at to a great extent, is unfavorable for the rapid development of enterprise.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects and providing a heating device of a vacuum coating machine.
In order to solve the technical problem, the utility model discloses a following technical scheme: vacuum coating machine firing equipment, including vacuum cover, two mechanisms and the placement machine that generate heat, two both ends that the mechanism installed respectively in vacuum cover that generate heat, the middle of placement machine structure installation in vacuum cover, placement machine constructs including support, rotating electrical machines, upset motor, rocker, backing plate and places the board, and the rotating electrical machines is installed in support side upper end, and the rocker is installed in support another side upper end, and the one end and the rotating electrical machines of rocker are connected, and the other end side at the rocker is installed to the upset motor, and the one end of backing plate is installed on the rocker, and the backing plate is connected with the upset motor, places the board and installs on the backing plate.
Furthermore, the support comprises a first support and a second support, the first support is arranged at one end in the middle of the vacuum cover, and the second support is arranged at the other end in the middle of the vacuum cover.
Further, the rotating electrical machines include a first rotating electrical machine and a second rotating electrical machine, the first rotating electrical machine is installed at the upper end of the side face of the first support, and the second rotating electrical machine is installed at the upper end of the side face of the second support.
Furthermore, the rocker includes first rocker and second rocker, and first rocker is installed in first support another side upper end, and first rocker is connected with first rotating electrical machines, and the second rocker is installed in second support another side upper end, and the second rocker is connected with second rotating electrical machines.
Furthermore, the turnover motor comprises a first turnover motor and a second turnover motor, the first turnover motor is installed at one end of the side face of the first rocker, and the second turnover motor is installed at one end of the side face of the second rocker.
Further, the backing plate includes first backing plate and second backing plate, and the one end of first backing plate is installed on first rocker, and just first backing plate is connected with first upset motor, and the one end of second backing plate is installed on the second rocker, and just the second backing plate is connected with second upset motor.
Further, the placing plate comprises a first placing plate and a second placing plate, the first placing plate is installed on the bottom surface of the first base plate, and the second placing plate is installed on the top surface of the second base plate.
Furthermore, the heating mechanism comprises a reflecting cover, a plurality of heating tubes, a supporting rod and a base, the plurality of heating tubes are installed in the reflecting cover, one end of the supporting rod is installed on the bottom surface of the reflecting cover, and the other end of the supporting rod is installed on the top surface of the base.
The utility model has the advantages as follows:
compared with the prior art, the utility model discloses two heating mechanisms that generate heat that set up can be abundant, the utility model discloses a placing mechanism can be after accomplishing the one side, and the upset heats to the another side, and when heating the one side, the backing plate that is located its top can lift up through the upset motor.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention;
fig. 2 is a side view of an embodiment of the present invention;
in the figure: 1-a first support, 2-a second support, 3-a first rotating motor, 4-a second rotating motor, 5-a first rocker, 6-a second rocker, 7-a first overturning motor, 8-a second overturning motor, 9-a first base plate, 10-a second base plate, 11-a first placing plate, 12-a second placing plate, 13-a vacuum cover, 14-a reflecting cover, 15-a heating tube, 16-a supporting rod and 17-a base.
Detailed Description
In order to facilitate understanding of those skilled in the art, the present invention will be further described with reference to the following examples and drawings, which are not intended to limit the present invention. The present invention will be described in detail with reference to the accompanying drawings.
Referring to fig. 1-2, the heating device of the vacuum coating machine includes a vacuum cover 13, two heating mechanisms and a placing mechanism, wherein the two heating mechanisms are respectively installed at two ends of the vacuum cover 13, the placing mechanism is installed in the middle of the vacuum cover 13, the placing mechanism includes a support, a rotating motor, a turnover motor, a rocker, a backing plate and a placing plate, the rotating motor is installed at the upper end of the side surface of the support, the rocker is installed at the upper end of the other side surface of the support, one end of the rocker is connected with the rotating motor, the turnover motor is installed at the side surface of the other end of the rocker, one end of the backing plate is installed on the rocker, the backing plate is connected with the turnover motor, and the placing plate is installed on the backing plate.
The support comprises a first support 1 and a second support 2, wherein the first support 1 is arranged at one end of the middle in the vacuum cover 13, and the second support 2 is arranged at the other end of the middle in the vacuum cover 13. The rotating electrical machines include a first rotating electrical machine 3 and a second rotating electrical machine 4, the first rotating electrical machine 3 is installed at the upper end of the side face of the first support 1, and the second rotating electrical machine 4 is installed at the upper end of the side face of the second support 2. The rocking bars comprise a first rocking bar 5 and a second rocking bar 6, the first rocking bar 5 is installed at the upper end of the other side surface of the first support 1, the first rocking bar 5 is connected with the first rotating motor 3, the second rocking bar 6 is installed at the upper end of the other side surface of the second support 2, and the second rocking bar 6 is connected with the second rotating motor 4. The overturning motor comprises a first overturning motor 7 and a second overturning motor 8, the first overturning motor 7 is installed at one end of the side surface of the first rocker 5, and the second overturning motor 8 is installed at one end of the side surface of the second rocker 6. The base plate comprises a first base plate 9 and a second base plate 10, one end of the first base plate 9 is installed on the first rocker 5, the first base plate 9 is connected with the first overturning motor 7, one end of the second base plate 10 is installed on the second rocker 6, and the second base plate 10 is connected with the second overturning motor 8. The placing plate includes a first placing plate 11 and a second placing plate 12, the first placing plate 11 is mounted on the bottom surface of the first setting board 9, and the second placing plate 12 is mounted on the top surface of the second setting board 10. The heating mechanism comprises a reflecting cover 14, a plurality of heating tubes 15, a supporting rod 16 and a base 17, wherein the plurality of heating tubes 15 are installed in the reflecting cover 14, one end of the supporting rod 16 is installed on the bottom surface of the reflecting cover 14, and the other end of the supporting rod 16 is installed on the top surface of the base 17.
The utility model discloses two heating that generate heat the mechanism and can be abundant that set up, the utility model discloses a placing mechanism can be after accomplishing the one side, and the upset heats to the another side, and when heating the one side, the backing plate that is located its top can lift up through the upset motor.
The above description is only for the preferred embodiment of the present invention, and the present invention is not limited to the above description, and although the present invention is disclosed in the preferred embodiment, it is not limited to the above description, and any person skilled in the art can make some changes or modifications to equivalent embodiments without departing from the scope of the present invention, but all the technical solutions of the present invention are within the scope of the present invention.
Claims (8)
1. Vacuum coating machine firing equipment, including vacuum cover, two mechanisms and the mechanism of placing that generate heat, its characterized in that: two mechanisms that generate heat are installed respectively at the both ends in the vacuum cover, place the centre that the mechanism installed in the vacuum cover, place the mechanism and include support, rotating electrical machines, upset motor, rocker, backing plate and place the board, the rotating electrical machines is installed in support side upper end, and the rocker is installed in support another side upper end, and the one end of rocker is connected with the rotating electrical machines, and the other end side at the rocker is installed to the upset motor, and the one end of backing plate is installed on the rocker, and the backing plate is connected with the upset motor, places the board and installs on the backing plate.
2. The heating equipment of the vacuum coating machine as claimed in claim 1, wherein: the support includes first support and second support, and the one end in the middle of first support is installed in the vacuum chamber, and the other end in the middle of the second support is installed in the vacuum chamber.
3. The vacuum coater heating apparatus as claimed in claim 2, wherein: the rotating motor comprises a first rotating motor and a second rotating motor, the first rotating motor is installed at the upper end of the side face of the first support, and the second rotating motor is installed at the upper end of the side face of the second support.
4. The heating equipment of the vacuum coating machine as claimed in claim 3, wherein: the rocking bars comprise a first rocking bar and a second rocking bar, the first rocking bar is installed at the upper end of the other side face of the first support and is connected with the first rotating motor, the second rocking bar is installed at the upper end of the other side face of the second support and is connected with the second rotating motor.
5. The heating equipment of the vacuum coating machine as claimed in claim 4, wherein: the turnover motor comprises a first turnover motor and a second turnover motor, the first turnover motor is installed at one end of the side face of the first rocker, and the second turnover motor is installed at one end of the side face of the second rocker.
6. The vacuum coater heating apparatus as claimed in claim 5, wherein: the backing plate comprises a first backing plate and a second backing plate, one end of the first backing plate is installed on a first rocker, the first backing plate is connected with a first overturning motor, one end of the second backing plate is installed on a second rocker, and the second backing plate is connected with a second overturning motor.
7. The heating equipment of the vacuum coating machine as claimed in claim 6, wherein: the placing plates comprise a first placing plate and a second placing plate, the first placing plate is installed on the bottom surface of the first base plate, and the second placing plate is installed on the top surface of the second base plate.
8. The vacuum coater heating apparatus as claimed in claim 1, wherein: the heating mechanism comprises a reflecting cover, a plurality of heating tubes, a supporting rod and a base, wherein the plurality of heating tubes are arranged in the reflecting cover, one end of the supporting rod is arranged on the bottom surface of the reflecting cover, and the other end of the supporting rod is arranged on the top surface of the base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123300933.7U CN217651305U (en) | 2021-12-27 | 2021-12-27 | Heating equipment of vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123300933.7U CN217651305U (en) | 2021-12-27 | 2021-12-27 | Heating equipment of vacuum coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217651305U true CN217651305U (en) | 2022-10-25 |
Family
ID=83660418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123300933.7U Active CN217651305U (en) | 2021-12-27 | 2021-12-27 | Heating equipment of vacuum coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217651305U (en) |
-
2021
- 2021-12-27 CN CN202123300933.7U patent/CN217651305U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201751427U (en) | Linear evaporation source | |
| US9906170B2 (en) | Triboelectric energy harvester including coating electrification layer and manufacturing method thereof | |
| EP3503209A1 (en) | Processing method for photovoltaic cell and string welding and curing device for photovoltaic cell | |
| US6869636B2 (en) | Method of evaporating film used in an organic electro-luminescent display | |
| KR960026261A (en) | Method and apparatus for covering or filling reintroduced contact hole | |
| CN106252515B (en) | A kind of efficient stable perovskite battery and preparation method thereof containing impermeable C film | |
| CN107815649B (en) | Evaporation coating device and evaporation coating method | |
| JP2009239300A (en) | Anodized substrate support | |
| CN104313538B (en) | Evaporated device and evaporation coating method | |
| IT1283484B1 (en) | METHOD FOR THE PRODUCTION OF THIN SUPPORTED LAYERS OF NON-EVAPORABLE GETTER MATERIAL AND GETTER DEVICES THUS PRODUCED | |
| CN106148893A (en) | A kind of evaporation coating device and evaporation coating method, substrate | |
| CN217651305U (en) | Heating equipment of vacuum coating machine | |
| CN107910443B (en) | A kind of carbon electrode perovskite solar battery and preparation method thereof | |
| CN110257777A (en) | Vapor deposition cover and evaporated device | |
| CN114976089B (en) | Metal bipolar plate containing coating and preparation method thereof | |
| CN108950515A (en) | A kind of fuel battery metal pole plate carbon-base coating preparation facilities based on PECVD | |
| CN106684352A (en) | Preparation method of titanium dioxide nano-tube array immobilized spherical molybdenum disulfide negative electrode material for lithium battery | |
| CN108220904A (en) | Contact plate and evaporated device | |
| CN218592019U (en) | Movable magnetic tin-implanting table | |
| CN102568977A (en) | Method for preparing metallized carbon nanotube cathode by electrophoretic deposition in assistance of magnetic field | |
| CN212476866U (en) | Evaporation plating mechanism | |
| CN104726839B (en) | Apparatus for fixing substrate | |
| CN206646160U (en) | A kind of Fast Installation formula product plated film hanger | |
| CN214991817U (en) | Structure for improving abnormal discharge of OGM product clamp | |
| CN207031533U (en) | One kind evaporation source structure and vacuum coater |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |