TWM267222U - Substrate accessing machine - Google Patents

Substrate accessing machine Download PDF

Info

Publication number
TWM267222U
TWM267222U TW93220295U TW93220295U TWM267222U TW M267222 U TWM267222 U TW M267222U TW 93220295 U TW93220295 U TW 93220295U TW 93220295 U TW93220295 U TW 93220295U TW M267222 U TWM267222 U TW M267222U
Authority
TW
Taiwan
Prior art keywords
substrate
arm
abutment
conveying
side plates
Prior art date
Application number
TW93220295U
Other languages
Chinese (zh)
Inventor
Chiu-Fong Huang
Original Assignee
Usun Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Usun Technology Co Ltd filed Critical Usun Technology Co Ltd
Priority to TW93220295U priority Critical patent/TWM267222U/en
Publication of TWM267222U publication Critical patent/TWM267222U/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Description

M267222 四、創作說明(1) 【新型所屬之技術領域】 本創作為提供一種基板存取機,尤指可於卡匣中任意 選擇不同位置之基板進行存取使用的基板存取機。 【先前技術】 按,現今筆記型電腦的顯示器及桌上型螢幕多以薄膜 電晶體(Thin-Film Transistor,簡 稱T F T )的液晶顯示器(L i q u i dM267222 four, described the creation of (1) Technical Field of the Invention The present novel belongs to the creation of the access unit provides a substrate, especially a substrate may be arbitrarily selected different positions of the substrate for use in the access unit accesses the cassette. Press the [prior art], today's notebook and desktop screen display to a multi-film transistor (Thin-Film Transistor, Trigraname T F T) of the liquid crystal display (L i q u i d

Crystal DisPlay,簡稱LCD)為主流 ,而這種顯示器改進了以往雙掃描液晶顯示器(D u a 1 —Scan Twisted Nematic,簡稱 D S T N )在光線太強時不清楚和可顯示角度太小的問題 ,現在T F T的顯示器已經製成桌上型螢幕,有取代傳統 陰極射線官(Cathode ray tube ,簡稱 C R T )螢幕的趨勢,然而,在目前液晶顯示器之製程過 程皆需於無塵室内進行’而無塵室維持無塵環境運作之成 本是非常高昂的,所以内部機器設備大小及搬送機構簡化 是決定廠商之獲利與否,再者,液晶顯示器之基板(如玻 璃電極板、偏光板、反射面板等)必需要於許多製程中進 行搬移,便有廠商開發基板之容置卡匣以因應各種製程之 暫存或儲存上使用。 請參閱第一圖所示,係為習用之立體外觀圖,其主要 於卡匣A的上下座板A 1間之三侧邊設立有複數直立狀支 架A 2,而各左右支架A 2上則以複數鋼索a 3連接,即 使上下鋼索A 3間形成有水平等距狀之基板b用置入空間Crystal DisPlay, abbreviated LCD) is the mainstream, and this improves the problems of the conventional dual-display liquid crystal display scan (D ua 1 -Scan Twisted Nematic, referred to as the DSTN) and a clear display angle is too small when the light is too strong, now TFT The display has been made into a desktop screen, which has the tendency to replace the traditional cathode ray tube (CRT) screen. However, in the current process of LCD display manufacturing, it needs to be performed in a clean room. The cost of operating in a clean environment is very high, so the size of the internal equipment and the simplification of the transport mechanism determine the profitability of the manufacturer. In addition, the substrate of the liquid crystal display (such as glass electrode plates, polarizing plates, reflective panels, etc.) must be Need to be moved in many processes, there are manufacturers to develop the housing of the substrate to accommodate temporary storage or storage of various processes. See Figure First, the conventional system is a perspective external view, mainly in the upper and lower cassette seat plate A 1 A three sides to set up a plurality of A 2 stand erect, and each A 2 then the left and right bracket Connected by plural steel cables a 3, even if a horizontally equidistant substrate b is formed between the upper and lower steel cables A 3

M267222 索A 3需 係於下方 未示出) 隙伸入頂 A,此種 依序送入 序送出, 上方基板 時,即必 可取得該 之損壞或 進出方式 會影響生 制性兩及 第二圖所 C的上 ,而各 承載桿 此種卡 間後頂 式的機 轉動作 來愈大 支撐面 要做特 設立有 ,透過 住基板 方式在 ,而基 進而形 B (不 需由下 損壞或 瑕疵基 ,在某 產之順 不易更 示,係 下座板C 支架C 2 C 2間形 匣C必需 住基板D 械手臂價 需要極大 的趨勢, 積不足, 會到傷 間隔狀 滾輪由 輪可將 卡匣A 匣A内 之順序 基板B 出卡匣 B,上 理,且 基板B 種方式 庇基板 之立體 1間之三侧邊設立 上則以承載桿C 3 成有水平等距狀之 使用機械手臂(圖 ’再將基板D由開 格高昂,且機械手 之空間,再者,因 此種利用機械手臂 而使大尺寸之基板 四、創作說明(2) ,上述之鋼 此種卡匣A 裝置(圖中 鋼索A 3間 口送出卡匣 需由上向下 由下向上依 匣A中之較 或是瑕疯品 基板B ’方 發生欲抽換 確之基板B 間乾燥,便 基板B之限 請參閱 主要於卡匣 狀支架C 2 即使各上下 入空間,而 伸入置入空 C,此種方 板D時之迴 之尺寸有愈 之方式易因 殊處理才不 頂端具複數 複數間隔狀 B,而使滾 基板B送入 板B送出卡 成先進後出 是最下方之 向上依序送 瑕疵之基板 板B不易處 些製程中如 暢性,故此 換損壞或瑕 為另一習用 基板B,而 滾輪之位移 水平位置之 基板B由開 内時,便必 時,則必需 ,是以當卡 )若有損壞 A中之上方 述情形便會 此種順序明 須要短暫時 仍具有挑選 B之缺失。 外觀圖,其 有複數直立 向内延伸, 基板D用置 中未示出) 口送出卡匣 臂在拾取基 液晶顯不Is 拾取基板D D產生翹曲A 3 M267222 cable lines below the required not shown) extending into a top nip A, this sequence are sequentially fed out, is over the substrate, i.e., will be made of the damage or out of the system can affect green and two second The upper part of the figure C, and the back-and-forth movement mechanism of the card between the supporting rods becomes larger, and the support surface must be specially set up, and the base is formed in the form of B, without the need to damage or flaws group, more easily shown in a yield of cis, based lower seat holder plate C C 2 C 2 between reflector shape necessary to stay substrate cassette C D requires great mechanical arm price trends, the product is insufficient, the damage will be spaced by the wheel-like roller Place the order substrate B in the cassette A and the cassette B out of the cassette B, and arrange the substrate B in a way that covers the three sides of the three-dimensional room 1 of the substrate, and then use the bearing rod C 3 to be horizontally equidistant. Robotic arm (figure, then the substrate D is high from the open space, and the space of the robotic hand, and therefore, the use of a robotic arm to make a large-sized substrate 4. Creation instructions (2), the above-mentioned steel cassette A Device (in the picture, the cable 3 needs to send out the cassette From the bottom to the top, according to the comparison in the box A or the defective board B ', the board B needs to be exchanged, and the board B is dried. For the limit of the board B, please refer to the box-shaped bracket C 2 Into the space, and extend into the empty C, this type of square plate D when the size of the return is more easy to handle because it does not have a plurality of plural spaced B at the top, so that the rolling substrate B is sent into the board B and the card is sent out The first-come-first-out is the bottom board that sends defects upwards in order. It is not easy to handle some processes such as smoothness, so the damaged or defective board is replaced with another conventional board B, and the board B with the horizontal position of the roller moved from the inside (If necessary, it is necessary, when the card is). If the above situation in A is damaged, this sequence will be clear when it is necessary to be short, and there is still a lack of picking B. Appearance drawing, which has a plurality of upright and inward extensions, the substrate D with counter not shown) opening out the cassette pickup arm Is not significantly DD pickup yl crystal substrate warped

M267222 、創作說明(3) ,所以其置入空間之高度便 板D存放數量減少,故此種 空間需求大、成本較高及基 請參閱第三圖所示,係 主要於承載盤E之二側把手 間E 2,而使用時為將基板 其它已置入基板F之承載盤 基板F置入各承載盤e後, 用時則由上向下依序取出, 以此種順序明確之基板F進 F須要短暫時間乾燥,便會 方式為以人工處理,在移動 或瑕疵,而人工處理時之動 人工處理亦無法符合講究自 會。 疋以,要如何解決上述 不足’便為此行業者所亟欲 【新型内容】 是故’創作人有鑑於上 料,經由多方評估及考量, 經驗,經由不斷構思與修改 新型專利誕生者。 本創作之主要目的乃在 取用卡匣移動至不同容室位 必需加大,進而使卡匣C之基 方式仍具有機械手臂及無塵室 板D存放數量較少之缺失。 為又一^ W用之侧視剖面圖,甘 E 1間形成有波浪狀之承載空 F置入承載空間E2内,再將 E依序疊置,此種方式在複數 便形成由下向上疊置,而欲使 亦會形成先進後出之順序,是 出方式,在某些製程中如基板 影響生產之順暢性,另因此種 基板F之過程中極易產生損壞 作也需要極大之空間,再者, 動化及生產效率提高的現今社 各種習用所產生之各種缺失與 改善之方向所在。 述缺失與不足,乃搜集相關資 並以從事於此行業累積之多年 ’始設計出此種基板存取機的 於利用昇降機構頂板上方之存 置後’透過二側板外侧之輸送M267222, creation description (3), so the height of the space into which it is placed will reduce the number of storage plates D. Therefore, such space requirements are large, the cost is high, and the base is shown in the third figure, which is mainly on the second side of the carrier E after the handle between E 2, while the other substrate is used as the carrier substrate is placed in the disk substrate F F E into each tray, with the time taken by the downward sequentially, in such a sequence ambiguity into the substrate F F needs to dry for a short time, and the method is manual treatment, movement or defect, and manual treatment can not meet the demand of self-reliance. Cloth to, how to solve the above problems 'will be the industry's anxious to do this [SUMMARY] Therefore in' creator view of the material, via multi-evaluate and consider, experience, through constant new ideas and modify those born patent. The main purpose of this creation is to increase the number of cassettes to be moved to different storage rooms, so that the basic method of cassette C still has the lack of a mechanical arm and a small number of clean room plates D. W is a further side sectional view of a ^, Gan E 1 is formed between the corrugated carrier empty space within the carrier into E2 of F, then E sequentially stacked, laminated upwardly in this manner will form the complex under the If you want to make it, the order of advanced first-come-first-out will be formed. It is the output method. In some processes, such as the substrate affects the smoothness of production. In addition, it is very easy to cause damage during the process of the substrate F. It also requires a lot of space. In addition, various shortcomings and improvements resulting from the various uses of today's society in terms of mobilization and increased production efficiency lie in the direction of improvement. Said deletions and shortcomings, is to gather relevant information and the cumulative engaged in this industry for many years 'design starting substrate upon which access to the machine using a lifting mechanism be kept above the roof of' transport through the outside of the two side plates

第7頁 創作說明(4) f置朝卡匣相對移冑’使各輸送面穿入卡匣二侧支架間隙 中,其真空滾輪轉動搭配吸取 置某 板於卡匣處進行存敗蚀田 叩切荷疋水千位置之基 可任音選擇Α & π i ,用以達到設備空間成本減少及 ^任思選擇基板於卡厘中存取使用之 【實施方式】 其功= = : = 膽採用之技術手段及 功能下,俾利=ίΓ 貫施例詳加說明其構造與 =閲第四、四Α、五圖所示’ ::意圖、俯視示意圖及於動作時之前視之 中瞭解本創作夫鉍A k 士 * , j肌不思圖,可由圖 S所糂# 致匕括有基台1及輸送裝置2、位移手段 :冓 玆就本案之主要構件及其特徵詳述如后;其中 1 2該ί台1為具有座體1 1及矗立於座體1 1之-側板 1 2 ’而二側侧板i 2間之 及轉動之真空滾輪14,且吸取臂ί::;:;:臂 方設有昇降播播Q "、二,袞輪1 4下 15:::: 其昇降機構13上方為-與吸取臂 二滾輪1 4形成錯位之頂板ί 3 ί。 一 各輸基台1二側板12外側, 有等距向内延設之水平粒孚 $ 1,並於支臂2 1上設 有複數容置輸送面2 2上則設 * μ間221及自由轉動之輪子22? η ^ ^ 空間221為連接有管子23。 22,且容置 該位移手段3為位於基台1之座體11與輪送裝置2 M267222 四、創作說明(5) —_ 之支臂2 1遠離輸送面2 2另侧,而位於基台 1處為設有相反方向之螺桿3 i ,且 之座體ί 3所帶動,並使輸送裝置辟01 Γ 可由馬達3 設有具内螺紋導執之套筒3 2。 〃螺杯3 1接合處 請參閱第請參閱第四、m ^ 作於基板5送入至卡n4内•,么圖所示,本創 (圖中未示出)將基板5傳逆 外部之輸送設備 間的真空滾輪座體11之二側板 1頂動上方…之座板4 ?時幵降機構"之頂板1 3 置,且二側板1 2外側之輸送择2® 4移動至特定位 内相對移動,並使複數等距内: ’、利用位移手段3向 人卡“二側支架42 =;延送面⑴ 將基板5送入於輸送面29主 ^ 八二滾輪14轉動 並由氣愿裝i (圖中未=面”复數輪子2 2 2上方, 之複數容置空間221進>^ ^&子23對輸送面22上 ,待基板5完全進入至卡虱,用以對基板5產生吸力 裝置2便以位移手段3向外相^ f室位置後,其二輸送 延設之水平輸送面2 2脫齡上子移動,並使複數等距向内 ,而基板5即位於卡匣4 *匣4 一側支架4 2之間隙中 而完成基板5送入卡寺=水平位置之鋼索4 3上,進 請參閱第請參閲==動:乍者: 作基板5由卡匣4處送出時,、’、、,、A圖所示,本創 1 3 1頂動上方卡匣4之庙為先使昇降機構1 3之頂板 定位置,且二側板i 2外1 ,而使卡厘4移動至特 之輪送裝置2亦利用位移手段 M267222Creation instructions on page 7 (4) F-position toward the cassette, move each conveying surface into the gap between the brackets on the two sides of the cassette, and its vacuum roller rotates with suction to place a plate on the cassette for storage and loss. Cloth Qiehe water-based one thousand positions of the sound may be any one selected Α & π i, to achieve reduced costs and space equipment selection ^ Si substrate according to any of the card used to access the PCT [embodiment its function = =: = bile the use of techniques and functions, consistent serve benefits = ίΓ elaborate embodiment which is configured with a fourth = read, four [alpha], as shown in FIG five ':: intention, in a plan view and a schematic view of the operation prior to being understood that the The creation of the bismuth Aks *, j muscles without thinking, can be shown in Figure S. The abutment 1 and the conveying device 2, and the displacement means: the main components of this case and their characteristics are described in detail below; ί 12 wherein the seat having a table 11 stands on the base 1 and the 1 - side plate 12 'and the two sides of the plate and i 2 Room rotation of the vacuum roller 14, and the pick-up arm ί ::;: ;: The arm is provided with a lifting broadcast Q ", two, the sprocket wheel 1 4 under 15 :::: the lifting mechanism 13 is above-and the suction arm two rollers 1 4 form a misalignment Roof ί 3 ί. Each of the abutment 1 and the outer side of the two side plates 12 are equidistantly extended horizontally and horizontally, and are provided with a plurality of receiving surfaces on the support arm 2 1. A μ space 221 and a free space are provided on the 2 2. The rotating wheel 22? ^^^ The space 221 is connected with a pipe 23. 22, and the displacement of the receiving means 11 and the wheel 3 is located at the base pedestal of a feeding apparatus body 2 M267222 IV Creation described (5) -_ the arm 21 away from the other side of the conveying surface 22, and is located in the base 1 is provided at the opposite direction of the screw 3 I, and the seat body ί 3 driven, and the provision of the delivery device 01 Γ provided by the motor 3 with an internal thread of the guide sleeve 32 performed. 〃 spiro cup 3 are joined a fourth see see, m ^ for the substrate 5 is fed to the card n4 •,, the external substrate 5 passed the inverse of this record (not shown) as shown in FIG Mody Vacuum roller seat body 11-2 between the conveying equipment, the side plate 1 is pushed upwards ... the seat plate 4 is a time lowering mechanism " the top plate 1 3 is set, and the conveyance option 2 2 outside the two side plates 1 2 is moved to a specific position The relative movement of the inside and the plural isometric distances: ', using the displacement means 3 to the person card "two sides of the bracket 42 =; extended delivery surface ⑴ send the substrate 5 to the conveying surface 29 main ^ eighty two rollers 14 and I would like to install i (not in the figure) above the plurality of wheels 2 2 2 and the plurality of receiving spaces 221 into the ^^^ & sub-23 on the conveying surface 22, until the substrate 5 completely enters the lice for After the suction device 2 of the substrate 5 is moved to the f chamber position by the displacement means 3, the horizontal conveying surface 22 of the second conveyance extension 2 moves away from the child and makes the plural equidistant inwards, and the substrate 5 is located on the card Box 4 * Box 4 is in the gap between one side of the bracket 4 2 and the completed substrate 5 is fed into the steel wire 4 3 of Ka Si = horizontal position. When the board 5 is sent out from the cassette 4, as shown in Figures, ',,,, and A, the original 1 3 1 pushes the temple of the upper cassette 4 to set the top plate of the lifting mechanism 13 first, and the two side plates i 2 outside 1 and the caliper 4 is moved to the special carousel 2 also using displacement means M267222

g、創作說明(6) 3向内相對移動, 2穿入卡匣4二侧 之複數輪子2 2 2 置(圖中未示出) 空間2 2 1進行吸 取臂1 5向内移動 氣,再將基板5邊 使真空滾輪1 4轉 中未示出)後,其 移動,並使複數等 4二侧支架4 2之 輸送動作者。 再者,本創作 3對輸送面2 2上 對基板5產生吸力 殘留之粉塵上使用 此外,請參閱 另一較佳實施例之 圖,可由圖中瞭解 1 1之二侧板1 2 1 2 1 ;另輸送裝 側,各輸送裝置2 上設有等距向内延 則設有複數容置空 並使複數 支架4 2 位於欲送 沿管子2 氣,用以 至卡匣4 緣下方向 動將基板 二輸送裝 向内延 間隙中, 藉由氣壓 之複數容 ’為可清 〇 第七、七 立體外觀 其基台1 ,而二侧 置2為分 為具有基 設之水平 間2 2 1 等距向 之間隙 出之基 3對輸 對基板 開口之 外拉動 5送出 置2便 設之水 進而完 内延設之水 中,即使輪 板5下方, 送面2 2上 5產生吸力 基板5邊緣 至真空滾輪 至外部之輸 以位移手段 平輸送面2 成基板5送 平輸送面2 送面2 2上 並由氣壓裝 之複數容置 ’再利用吸 下方進行吸 2 4上,續 送設備(圖 3向外相對 2脫離卡昆 入卡匣4之 裝置(圖中未示出)沿管子2 置空間2 2 1進行吸氣,用以 除基板5在製程或輸送過程中 亡、七B ^所示,係為本創作 示意圖、前視示意圖俯視示意 為具有座體11及矗立於座體 侧板1 2間之上方形成有平台 別設置於基台1二侧板i 2外 立狀支臂21,並於支臂21 輸送面22,而輸送面22上 及自由轉動之輪子222,且g, creation described (6) 3 inwardly relative movement of the two sides of the plurality of wheels 2 4 2 2 2 penetrates cassette means (not shown) space 221 for suction arm 15 moves inwardly gas, then After the substrate 5 is turned to the vacuum roller 14 (not shown), it is moved and a plurality of transporters such as the two-sided brackets 42 are moved. In addition, in this creation, 3 pairs of conveying surfaces 22 are used on the dust that has a suction residue on the substrate 5. In addition, please refer to the diagram of another preferred embodiment, which can be understood from the figure. 1 2nd side plate 1 2 1 2 1 On the other side of the conveying device, there are equidistant inward extensions on each conveying device 2. A plurality of empty spaces are provided and a plurality of brackets 4 2 are positioned to send gas along the tube 2 to move the substrate under the edge of the cassette 4 In the inward gap of the two conveying devices, the multiple capacity of the air pressure can be cleared. The seventh and seventh three-dimensional appearance of the abutment 1 and the two sides 2 are divided into horizontal intervals with a base 2 2 1 equidistant. the space to the output of the group of three pairs than the substrate opening 5 is pulled out of the device 2 will be located inside the water further water completion of extension, even if the lower wheel plate 5, conveying surface 22 on the substrate 5 to produce a vacuum suction edge 5 transport rollers to the outside of the displacement means 5 flat surface of a flat feed conveyor 2 conveying surface into the substrate 2 on conveying surface 22 by means of a plurality of pressure receiving 'reused for downward suction on the suction 24, continued feeding apparatus (FIG. 3 Opposite outward 2 is the device (not shown in the figure) for removing the card into the cassette 4 Sub 2 sets the space 2 2 1 for suction to remove the substrate 5 during the process or transportation process, as shown in Figure 7B. This is a schematic diagram of the creation, a schematic view of the front view, and a seat 11 and a stand on the seat. forming an upper side of the plate 2 respectively have a platform disposed on the base plate 1 i 2 outer two shaped vertical arm 21, and arm 21 to the conveying surface 22, and the conveying surface 22 and the free wheel 222 is rotated, And

第10頁 M267222 ^、創作說明(7) 容置空間221為連接 相對設立之可伸縮吸取 中支臂21與輸送面2 手段2 6為利用具馬達 在齒轨2 6 1上下移動 體1 1與輸送裝置2之 位於基台1之座體11 螺桿3 1可由馬達3 3 1與螺桿3 1接合處設 上述之構成為透過 動對正卡匣4特定水平 對移動,再輔以支臂2 真空滾輪2 4來帶動特 行存取。 有管子2 臂2 5及 2間為具 (圖中未 ’其位移 支臂2 1 處為設有 所帶動, 有具内螺 輪送裝置 位置,並 1前方設 定水平位 3,並於各支 轉動之真空滾 有昇降手段2 示出)之動力 手段3為位於 运離輸送面2 相反方向之螺 並使輪送裝置 紋導軌之套筒 2之輸送面2 以輸送裝置2 立之吸取臂2 置之基板5於 臂2 1前方 輪2 4,其 6 ,而昇降 齒輪2 6 2 基台1之座 2另側,而 桿3 1,且 2之支臂23 2。 2的上下移 朝卡匣4相 5及轉動之 卡匣4處進 然 基板5 明中僅 施例並 離本創 更,均 綜 達到瑕 卡匣中 賜准本 而,本創 於卡匣4 針對本創 非用以限 作所揭示 應包含於 上所述, 疲率降低 存取使用 案,以保 1卞馬針對 中存取使 作之較佳 定本創作 之技藝精 本創作所 本創作之 、設備空 之功效, 障創作人 二乂設備空間成本及可任意選擇 用為其主要特徵,而上述 可行實施例說明而已,惟 之申請專利範圍,舉凡其 神下所完成之均等變化與 涵蓋之專利範圍中。 基板存取機於使用時,為 ,成本減少且可任意選擇 爰依法提出申請,盼審 之辛苦創作。 詳細說,此實 它未脫 修飾變 確實能 基板於 委早曰Page 10 M267222 ^, described the creation of (7) to connect the accommodating space 221 relative to the establishment of the telescopic arm 21 and the suction branched conveying surface 2 with means 26 for the use of the motor 261 in the rack member 11 and moved up and down the delivery device 2 is located in the pedestal base 11 of a screw body 31 by the motor 331 is provided with a screw joint 31 of the above-described configuration is for aligning the cassette 4 through a certain level of movement, the arm 2 supplemented vacuo Wheels 2 4 to drive special access. There are tubes 2 between the arms 2 5 and 2 (not shown in the figure, its displacement support arm 2 is equipped with a drive, there is an internal screw wheel feeding device position, and 1 is set in front of the horizontal position 3, and in each branch the rotation of the vacuum roller elevating means 2 shown) of the power means 3 is transported away from the conveying surface 2 is located in the opposite direction of the spiral sleeve and roll feed means conveying surface of the guide groove 2 of the conveying means 2 to absorb the vertical arm 2 2 the substrate 5 is placed on the arm 21 forward wheel 24, which is 6, the lift gear 262 and the base 1 of the other side of the seat 2, the lever 31 and the support arm 23 2 2. The 2 moves up and down towards the 4th phase of the cassette 5 and the 4th stage of the rotating cassette enters the base plate 5. The example in the Ming Dynasty is only an example and it is changed from the original. The disclosure for the non-restricted use of the original creation should be included in the above-mentioned case, the fatigue rate is reduced to access the use case, so as to ensure that the technology of the original version of the original copy is better. The effectiveness of the device is empty, and the creator ’s cost of the device space and its optional features can be used as its main features. The above-mentioned feasible embodiments are only described, but the scope of the patent application is for all changes and coverage that are equal to those accomplished by God. Patent scope. When the substrate access machine is in use, the cost is reduced and you can choose arbitrarily. You can submit an application in accordance with the law and look forward to the hard work of review. In detail, this fact is not removed, modified, and indeed can be used in the board.

M267222 圖式簡單說明 1 【 圖 式 簡 單 說 明 】 第 一 圖 係 為 習用 之 立 體 外 觀 圖 〇 第 二 圖 係 為 另一 習 用 之 立 體 外 觀 圖 〇 第 三 圖 係 為 又一 習 用 之 侧 視 剖 面 圖 〇 第 四 圖 係 為 本創 作 之 立 體 外 觀 示 意 圖 〇 第 四A 圖 係 為 本創 作 之 俯 視 示 意 圖 〇 第 五 圖 係 為 本創 作 於 動 作 時 之 前 視 示 意 圖 〇 第 五A 圖 係 為 本創 作 於 動 作 時 之 俯 視 示 意 圖 〇 第 六 圖 係 為 本創 作 於 動 作 後 之 前 視 示 意 圖 〇 第 六A 圖 係 為 本創 作 於 動 作 時 之 俯 視 示 意 圖 〇 第 七 圖 係 為 本創 作 另 一 較 佳 實 施 例 之 立 體 外 觀 示意圖 第 七A 圖 係 為 本創 作 另 一 較佳 實 施 例 之 前 視 示 意 圖。 第 七B 圖 係 為 本創 作 另 一 較 佳 實 施 例 之 俯 視 示 意 圖。M267222 Brief description of the drawing 1 [Simplified illustration of the drawing] The first picture is a conventional three-dimensional appearance view. The second picture is another conventional three-dimensional appearance view. The third picture is another conventional side sectional view. The fourth picture is a schematic diagram of the three-dimensional appearance of the creation. The fourth A picture is a schematic plan view of the creation. The fifth picture is a schematic view of the creation before the action. The fifth picture is the creation of the action at the time. Top view diagram. The sixth picture is a schematic view of the front of the creation after the action. The sixth picture is a top view of the creation while in action. The seventh picture is a three-dimensional appearance diagram of another preferred embodiment of the creation. Figure 7A is a schematic front view of another preferred embodiment of the creation. Seventh line B in FIG relatively good for another embodiment of a solid is a plan view illustrating the present record is intended FIG.

【主 要元 件符號 說明】[Description of main component symbols]

A、 卡S A1、座板 A3、鋼索 A2、支架 A 3 1、定位端 A 2 1 、凹槽 B、 基板A, card S A1, the seat plate A3, cable A2, the stent A 3 1, the positioning terminal A 2 1, the groove B, substrate

第12頁 M267222 圖式簡單說明 c、卡匣 C1、座板 C3、承載桿 C 2、支架 D、基板Page 12 M267222 drawings briefly described c, cassette C1, the seat plate C3, the carrier bar C 2, the bracket D, the substrate

第13頁 M267222 圖式簡單說明 段 手 移桿筒 位螺套 3 達 馬 4 4 匣板架 卡座支 4 索 岡 板 基Page 13 M267222 drawings briefly described the cartridge 3 position of the collar 44 horses cassette deck pallet branched segment hand shift lever plate 4-yl cable Gang

(ill 第14頁(ill p. 14

Claims (1)

M267222 2 3 4 卡匣前方設有吸取臂及真空滾 輪下方設有昇降機構; 二侧板外侧,並於輸送裝置之 距向内延設之水平輪送面,各 可自由滾動之輪子;及 之座體與輸送裝置之支臂遠離 所述之基板存取機’其中該位 處為設有相反方向之螺桿且 並使輸送裝置之支臂與螺 之套筒。 所述之基板存取機,其中該輸 空間,且容置空間為連接有管 五、申請專利範圍 1、一種基板存取機,包括 該基台之二側侧板及其 輪’且吸取臂及真空滾 該輸送裝置為位於基台 二支臂上設有相對且等 輸送面上表面設有複數 該位移手段為位於基台 輸送面另側。 如申請專利範圍第1項 移手段係於基台之座體 螺桿可由馬達所帶動, 合處設有具内螺紋導軌 %中請專利範圍第1項 送面上則設有複數容置 〇 一種基板存取機,包括 該基台之二側侧板及其 二側侧板間之上方形成有平台 該輸送裝置為位於基台二側板外侧,並於輪送穿置之 二支臂上設有相對且等距向内延設之水平輪送^,各 輸送面上表面設有複數可自由滾動之輪子,並於各支 臂前方相對設立之可伸縮吸取臂及轉動之真空滾輪, 其中支臂與輸送面間為具有昇降手段;及W 該位移手段為位於基台之座體與輸送裝置之支臂遠離M267222 2 3 4 The front of the cassette is equipped with a suction arm and a lifting mechanism below the vacuum roller; the two side plates are outside, and the horizontal wheel feeding surface is extended inwardly from the distance of the conveying device, each of which can roll freely; and The base body and the arm of the conveying device are far away from the substrate storage machine, wherein the position is a sleeve provided with a screw in the opposite direction and the arm and the screw of the conveying device. The substrate storage machine, wherein the conveying space and the accommodating space are connected with a tube V. Patent application scope 1. A substrate storage machine including two side plates and wheels of the abutment and a suction arm And the vacuum roller is provided on the two arms of the abutment and is provided on the two arms of the abutment, and a plurality of displacement means are provided on the upper surface of the same conveying surface. The displacement means is located on the other side of the abutment conveying surface. For example, if the first range of the patent application scope is to move the screw of the base body of the abutment, it can be driven by a motor. There is an internal thread guide in the joint. The substrate storage machine includes the two side plates of the abutment and a platform formed above the two side plates. The conveying device is located outside the two side plates of the abutment and is provided on the two arms of the wheel feed. Relative and equidistant horizontal wheels are arranged inwardly. Each surface of the conveying surface is provided with a plurality of freely rolling wheels, and a retractable suction arm and a rotating vacuum roller are set in front of each arm. There is a lifting means between it and the conveying surface; and W The displacement means is away from the seat of the abutment and the arm of the conveying device. M267222M267222 輸送面另侧。 5、 如申請專利範圍第4項所述之基板存取機,1 移手段係於基台之座體處為設有相反方向之螺^該位 螺桿可由馬達所帶動,並使輸送裝置之支臂^ ^曰且 合處設有具内螺紋導軌之套筒。 -、’、#接 6、 如申請專利範圍第4項所述之基板存取機,其中該輪 送面上則設有複數容置空間,且容置空間為連接ϋ 子。 7、 如申請專利範圍第4項所述之基板存取機,其中該昇 降手段為利用具馬達之動力齒輪在齒軌上下移動。Conveying surface on the other side. 5, as described in item 4 patented machine access range of the substrate, a shifting means based on the base station of the base is provided with an opposite direction of the bit-spiro ^ screw driven by a motor, the supporting means and the transport The arm ^ ^ is provided with a sleeve with an internal thread guide. -, ', # 6 then, if the application of the substrate teller machine patentable scope of item 4, wherein the surface of the feed wheel is provided with a plurality accommodating space, and the accommodating space for the connection sub ϋ. 7, as the application of paragraph substrate patentable scope withdrawal machine 4, wherein the elevating means moves up and down with using the power of the motor of the gear rack.
TW93220295U 2004-12-16 2004-12-16 Substrate accessing machine TWM267222U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93220295U TWM267222U (en) 2004-12-16 2004-12-16 Substrate accessing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93220295U TWM267222U (en) 2004-12-16 2004-12-16 Substrate accessing machine

Publications (1)

Publication Number Publication Date
TWM267222U true TWM267222U (en) 2005-06-11

Family

ID=36592030

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93220295U TWM267222U (en) 2004-12-16 2004-12-16 Substrate accessing machine

Country Status (1)

Country Link
TW (1) TWM267222U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112934539A (en) * 2021-03-03 2021-06-11 宁波宏邦家具有限公司 Paint layer coating equipment for furniture

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112934539A (en) * 2021-03-03 2021-06-11 宁波宏邦家具有限公司 Paint layer coating equipment for furniture
CN112934539B (en) * 2021-03-03 2023-03-14 宁波宏邦家具有限公司 Paint layer coating equipment for furniture

Similar Documents

Publication Publication Date Title
TWI227212B (en) Substrate transporting system
KR101476849B1 (en) Combination Equipment for Exfoliation and Position, and Fabricating Method of Liquid Crystal Display using the same
US8500915B2 (en) Substrate transporting apparatus, substrate platform shelf and substrate processing apparatus
TWI334189B (en) Substrate processing apparatus and substrate transfer method
JP2008198884A (en) Substrate-treating device
CN101181958A (en) Substrate transfer-machine and substrate take-in box thereof
CN107935413A (en) A kind of hollow glass horizontal production line
JP2007039157A (en) Conveying device, vacuum treatment device and conveying method
CN1847117B (en) Laminated board substrate transfer arrangement
TW559980B (en) Substrate feed chamber and substrate processing apparatus
TW201006748A (en) Apparatus for transferring base plate
CN102502260A (en) Glass substrate storing and transporting system and glass substrate storing platform
TW201801212A (en) Conveying method and device for substrate inspection capable of improving production efficiency, reducing production cost and saving plant space
JP2020155627A (en) Tray transfer device and panel transfer system
TWM267222U (en) Substrate accessing machine
CN216970816U (en) Panel polaroid storage and transfer device
KR20120066113A (en) Apparatus and method for processing substrate
CN207738655U (en) A kind of hollow glass horizontal production line
JP2004119571A (en) Board storage cassette device
JP2003321118A (en) Right-angle transfer equipment
TWI321114B (en) Liquid dispensing system
TWM634002U (en) Three-axis arm automatic equipment
TWI548578B (en) Lifting equipment for electronic components
JP2006245486A (en) Rack frame structure of stocker
KR101394482B1 (en) Substrate processing apparatus

Legal Events

Date Code Title Description
MM4K Annulment or lapse of a utility model due to non-payment of fees