TWI885453B - 光接收裝置及距離測量裝置 - Google Patents

光接收裝置及距離測量裝置 Download PDF

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Publication number
TWI885453B
TWI885453B TW112131520A TW112131520A TWI885453B TW I885453 B TWI885453 B TW I885453B TW 112131520 A TW112131520 A TW 112131520A TW 112131520 A TW112131520 A TW 112131520A TW I885453 B TWI885453 B TW I885453B
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TW
Taiwan
Prior art keywords
pixel
light receiving
light
photosensitive element
pixels
Prior art date
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TW112131520A
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English (en)
Chinese (zh)
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TW202349027A (zh
Inventor
小澤治
上水流隼人
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日商索尼半導體解決方案公司
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Publication of TW202349027A publication Critical patent/TW202349027A/zh
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/08Systems determining position data of a target for measuring distance only
    • G01S17/10Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88Lidar systems specially adapted for specific applications
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483Details of pulse systems
    • G01S7/486Receivers
    • G01S7/4861Circuits for detection, sampling, integration or read-out
    • G01S7/4863Detector arrays, e.g. charge-transfer gates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483Details of pulse systems
    • G01S7/486Receivers
    • G01S7/487Extracting wanted echo signals, e.g. pulse detection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491Details of non-pulse systems
    • G01S7/4912Receivers
    • G01S7/4913Circuits for detection, sampling, integration or read-out
    • G01S7/4914Circuits for detection, sampling, integration or read-out of detector arrays, e.g. charge-transfer gates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491Details of non-pulse systems
    • G01S7/4912Receivers
    • G01S7/4918Controlling received signal intensity, gain or exposure of sensor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/22Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
    • H10F30/225Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier working in avalanche mode, e.g. avalanche photodiodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/802Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • H10F39/8027Geometry of the photosensitive area
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/44Electric circuits
    • G01J2001/4413Type
    • G01J2001/442Single-photon detection or photon counting
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/44Electric circuits
    • G01J2001/4413Type
    • G01J2001/4433Peak sensing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/44Electric circuits
    • G01J2001/444Compensating; Calibrating, e.g. dark current, temperature drift, noise reduction or baseline correction; Adjusting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Light Receiving Elements (AREA)
  • Measurement Of Optical Distance (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
TW112131520A 2018-04-20 2019-04-10 光接收裝置及距離測量裝置 TWI885453B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-081068 2018-04-20
JP2018081068A JP7246863B2 (ja) 2018-04-20 2018-04-20 受光装置、車両制御システム及び測距装置

Publications (2)

Publication Number Publication Date
TW202349027A TW202349027A (zh) 2023-12-16
TWI885453B true TWI885453B (zh) 2025-06-01

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TW112131520A TWI885453B (zh) 2018-04-20 2019-04-10 光接收裝置及距離測量裝置
TW108112418A TWI815877B (zh) 2018-04-20 2019-04-10 光接收裝置及距離測量裝置

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Country Status (8)

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US (2) US11714172B2 (cg-RX-API-DMAC7.html)
EP (1) EP3781967A1 (cg-RX-API-DMAC7.html)
JP (1) JP7246863B2 (cg-RX-API-DMAC7.html)
KR (1) KR102740857B1 (cg-RX-API-DMAC7.html)
CN (2) CN210166495U (cg-RX-API-DMAC7.html)
DE (1) DE112019002068T5 (cg-RX-API-DMAC7.html)
TW (2) TWI885453B (cg-RX-API-DMAC7.html)
WO (1) WO2019203057A1 (cg-RX-API-DMAC7.html)

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JP7476033B2 (ja) * 2020-08-24 2024-04-30 株式会社東芝 受光装置及び電子装置
CN215641827U (zh) * 2020-08-25 2022-01-25 神盾股份有限公司 光感测阵列与飞行时间测距装置
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JP7766413B2 (ja) * 2021-04-26 2025-11-10 キヤノン株式会社 投光ユニットおよびそれを用いた測距装置
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KR102774273B1 (ko) * 2021-12-31 2025-02-27 주식회사 트루픽셀 단일 광자 검출 픽셀 및 이를 포함하는 단일 광자 검출 픽셀 어레이
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Publication number Publication date
US12474451B2 (en) 2025-11-18
TW202349027A (zh) 2023-12-16
WO2019203057A1 (en) 2019-10-24
JP7246863B2 (ja) 2023-03-28
US20210025990A1 (en) 2021-01-28
US11714172B2 (en) 2023-08-01
TW202001288A (zh) 2020-01-01
CN210166495U (zh) 2020-03-20
TWI815877B (zh) 2023-09-21
US20230251357A1 (en) 2023-08-10
KR102740857B1 (ko) 2024-12-09
DE112019002068T5 (de) 2021-01-28
JP2019190892A (ja) 2019-10-31
CN110389332A (zh) 2019-10-29
EP3781967A1 (en) 2021-02-24
KR20210003711A (ko) 2021-01-12

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