TWI843762B - Method for manufacturing connection structure - Google Patents

Method for manufacturing connection structure Download PDF

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TWI843762B
TWI843762B TW108139034A TW108139034A TWI843762B TW I843762 B TWI843762 B TW I843762B TW 108139034 A TW108139034 A TW 108139034A TW 108139034 A TW108139034 A TW 108139034A TW I843762 B TWI843762 B TW I843762B
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resin
anisotropic bonding
solder particles
bonding film
electrode
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TW202035636A (en
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石松朋之
阿部智幸
青木正治
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日商迪睿合股份有限公司
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R11/00Individual connecting elements providing two or more spaced connecting locations for conductive members which are, or may be, thereby interconnected, e.g. end pieces for wires or cables supported by the wire or cable and having means for facilitating electrical connection to some other wire, terminal, or conductive member, blocks of binding posts
    • H01R11/01Individual connecting elements providing two or more spaced connecting locations for conductive members which are, or may be, thereby interconnected, e.g. end pieces for wires or cables supported by the wire or cable and having means for facilitating electrical connection to some other wire, terminal, or conductive member, blocks of binding posts characterised by the form or arrangement of the conductive interconnection between the connecting locations
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/42Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L101/00Compositions of unspecified macromolecular compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/62Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H01L2224/29001Core members of the layer connector
    • H01L2224/29099Material
    • H01L2224/29198Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
    • H01L2224/29298Fillers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/831Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
    • H01L2224/83101Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a layer connector, e.g. provided in an insulating plate member

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Medicinal Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Materials Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Wire Bonding (AREA)
  • Manufacturing Of Electrical Connectors (AREA)
  • Led Device Packages (AREA)
  • Non-Insulated Conductors (AREA)
  • Conductive Materials (AREA)

Abstract

本發明提供一種可使具備微間距之電極之電子零件接合的連接體之製造方法、異向性接合膜、連接體。使含有固體樹脂、焊料粒子、及助焊劑化合物之異向性接合材料以焊料粒子之平均粒徑之50%以上且300%以下之厚度,介置於第1電子零件之電極與第2電子零件之電極之間,使第1電子零件之電極與第2電子零件之電極於無負載下進行加熱接合,上述固體樹脂係選自熱塑性樹脂、固體自由基聚合性樹脂、及固體環氧樹脂之至少1種,於常溫為固體,且於溫度190℃、負載2.16kg之條件下所測得之熔體流動速率為10g/10min以上。 The present invention provides a method for manufacturing a connector capable of connecting electronic components with electrodes having fine pitches, an anisotropic bonding film, and a connector. An anisotropic bonding material containing a solid resin, solder particles, and a flux compound is placed between an electrode of a first electronic component and an electrode of a second electronic component with a thickness of more than 50% and less than 300% of the average particle size of the solder particles, and the electrode of the first electronic component and the electrode of the second electronic component are heat-bonded without a load. The solid resin is selected from at least one of a thermoplastic resin, a solid free radical polymerizable resin, and a solid epoxy resin, is solid at room temperature, and has a melt flow rate of more than 10 g/10 min at a temperature of 190°C and a load of 2.16 kg.

Description

連接體之製造方法 Manufacturing method of connector

本發明係關於一種安裝LED(Light Emitting Diode)等半導體晶片(元件)之連接體之製造方法、異向性接合膜、連接體。本申請係基於2018年10月31日於日本提出申請之日本專利申請號特願2018-206058、及2019年10月25日提出申請之日本專利申請號特願2019-194479而主張優先權,該申請作為參照被引用至本申請中。 The present invention relates to a method for manufacturing a connector for mounting semiconductor chips (components) such as LEDs (Light Emitting Diodes), an anisotropic bonding film, and a connector. This application claims priority based on Japanese Patent Application No. 2018-206058 filed in Japan on October 31, 2018, and Japanese Patent Application No. 2019-194479 filed on October 25, 2019, which are cited in this application as references.

作為安裝LED等半導體晶片(元件)之方法之一,可列舉倒裝晶片安裝。倒裝晶片安裝與打線相比,可縮小安裝面積,可安裝小型、薄型之半導體晶片。 As one of the methods for mounting semiconductor chips (components) such as LEDs, flip chip mounting can be cited. Compared with wire bonding, flip chip mounting can reduce the mounting area and can mount small and thin semiconductor chips.

然而,由於倒裝晶片安裝中進行加熱壓接,故例如於將多個半導體晶片與大型基板接合之情形時,需要非常高之壓力,或需要於平行度方面進行調整,量產性較困難。 However, since flip chip mounting requires heating and pressing, when bonding multiple semiconductor chips to a large substrate, for example, very high pressure is required, or parallelism needs to be adjusted, making mass production difficult.

先前技術文獻 Prior art literature

專利文獻 Patent Literature

專利文獻1:日本特開2009-102545號公報 Patent document 1: Japanese Patent Publication No. 2009-102545

專利文獻1中記載有使用含有焊料粒子、熱硬化性樹脂黏合劑及助焊劑成分之焊料膏,藉由回焊將複數個零件一起安裝於配線板等。 Patent document 1 describes the use of solder paste containing solder particles, thermosetting resin adhesive and flux components to mount multiple parts together on a wiring board, etc. by reflow.

然而,專利文獻1之焊料膏中,由於使焊料粒子熔融一體化,故含有大量焊料粒子,具備微間距之電極之電子零件之接合較困難。 However, the solder paste of Patent Document 1 contains a large amount of solder particles because the solder particles are melted and integrated, making it difficult to join electronic parts with electrodes with fine pitches.

圖8係於使用以往之焊料膏製得之LED安裝體中,對使LED晶片剝離後之基板側之焊料接合狀態進行觀察時之顯微鏡照片。如圖8所示,一般之焊料膏中,於發生焊料粒子熔融一體化之自對準之情形時,有時焊料粒子於相鄰之端子間凝聚而形成橋A,發生短路。 Figure 8 is a microscope photograph of the solder joint state on the substrate side after the LED chip is peeled off in an LED mounting body made using conventional solder paste. As shown in Figure 8, in a general solder paste, when the solder particles are melted and integrated, the solder particles sometimes aggregate between adjacent terminals to form a bridge A, causing a short circuit.

本技術係鑒於此種以往之實情而提出者,提供一種可使具備微間距之電極之電子零件接合的連接體之製造方法、異向性接合膜、連接體。 This technology is proposed in view of such a previous reality, and provides a method for manufacturing a connector that can connect electronic parts with fine-pitch electrodes, an anisotropic bonding film, and a connector.

本案發明人經過潛心研究,結果發現藉由使用含有「於常溫為固體且具有特定之熔體流動速率之固體樹脂」的異向性接合材料,將電極間之異向性接合材料之厚度相對於焊料粒子之平均粒徑設定為特定值,從而可達成上述目的,因而完成本發明。 After intensive research, the inventor of this case found that by using an anisotropic bonding material containing "solid resin that is solid at room temperature and has a specific melt flow rate", the thickness of the anisotropic bonding material between the electrodes is set to a specific value relative to the average particle size of the solder particles, so as to achieve the above purpose, thus completing the present invention.

即,本發明之連接體之製造方法如下:使含有固體樹脂、焊料粒子、及助焊劑化合物之異向性接合材料以上述焊料粒子之平均粒徑之50%以上且300%以下之厚度,介置於第1電子零件之電極與第2電子零件之電極之間,使上述第1電子零件之電極與上述第2電子零件之電極於無負載下進行加熱接合,上述固體樹脂係選自熱塑性樹脂、固體自由基聚合性樹脂、及固體環氧樹脂之至少1種,於常溫為固體,且於溫度190℃、負載2.16kg之條件下測得之熔體流動速率為10g/10min以上。 That is, the manufacturing method of the connector of the present invention is as follows: an anisotropic bonding material containing a solid resin, solder particles, and a flux compound is placed between the electrode of the first electronic component and the electrode of the second electronic component with a thickness of more than 50% and less than 300% of the average particle size of the solder particles, and the electrode of the first electronic component and the electrode of the second electronic component are heat-bonded under no load. The solid resin is selected from at least one of thermoplastic resins, solid free radical polymerizable resins, and solid epoxy resins, is solid at room temperature, and has a melt flow rate of more than 10 g/10 min at a temperature of 190°C and a load of 2.16 kg.

又,本發明之異向性接合膜含有固體樹脂、焊料粒子、及助焊劑 化合物,上述固體樹脂係選自熱塑性樹脂、固體自由基聚合性樹脂、及固體環氧樹脂之至少1種,於常溫為固體,且於溫度190℃、負載2.16kg之條件下測得之熔體流動速率為10g/10min以上,上述異向性接合膜之厚度係上述焊料粒子之平均粒徑之50%以上且300%以下。 Furthermore, the anisotropic bonding film of the present invention contains a solid resin, solder particles, and a flux compound. The solid resin is selected from at least one of a thermoplastic resin, a solid free radical polymerizable resin, and a solid epoxy resin. It is solid at room temperature, and has a melt flow rate of 10 g/10 min or more at a temperature of 190°C and a load of 2.16 kg. The thickness of the anisotropic bonding film is 50% or more and 300% or less of the average particle size of the solder particles.

又,本發明之連接體係使用上述異向性接合膜將第1電子零件之電極與第2電子零件之電極接合而成。 Furthermore, the connector of the present invention is formed by bonding the electrode of the first electronic component to the electrode of the second electronic component using the above-mentioned anisotropic bonding film.

根據本發明,由於固體樹脂藉由加熱而發生熔融,焊料粒子被夾持於電極間並發生熔融,故可使具備微間距之電極之電子零件接合。 According to the present invention, since the solid resin is melted by heating, the solder particles are sandwiched between the electrodes and melted, so that electronic parts with electrodes with fine pitches can be joined.

10:LED元件 10:LED components

11:第1導電型電極 11: The first conductive electrode

12:第2導電型電極 12: Second conductive type electrode

20:基板 20: Substrate

21:第1電極 21: 1st electrode

22:第2電極 22: Second electrode

30:異向性接合膜 30: Anisotropic bonding film

31:焊料粒子 31: Solder particles

32:異向性導電膜 32: Anisotropic conductive film

33:焊料接合部 33: Solder joint

圖1係示意性地表示接合步驟之一部分之剖視圖。 Figure 1 is a cross-sectional view schematically showing a portion of the joining step.

圖2係表示LED安裝體之構成例之剖視圖。 Figure 2 is a cross-sectional view showing an example of the structure of an LED mounting body.

圖3係示意性地表示應用本技術之異向性接合膜之一部分之剖視圖。 Figure 3 is a schematic cross-sectional view of a portion of an anisotropic bonding film using the present technology.

圖4係對實施例1-1之LED晶片剝離後之基板側之焊料接合狀態進行觀察時之顯微鏡照片。 Figure 4 is a microscope photograph of the solder bonding state on the substrate side after the LED chip is peeled off in Example 1-1.

圖5係對比較例1-1之LED晶片剝離後之基板側之焊料接合狀態進行觀察時之顯微鏡照片。 Figure 5 is a microscope photograph of the solder joint state on the substrate side after the LED chip is peeled off in Comparative Example 1-1.

圖6係對比較例1-2之LED晶片剝離後之基板側之焊料接合狀態進行觀察時之顯微鏡照片。 Figure 6 is a microscope photograph of the solder joint state on the substrate side after the LED chip is peeled off in Comparative Example 1-2.

圖7係對比較例1-3之LED晶片剝離後之基板側之焊料接合狀態進行觀察時之顯微鏡照片。 Figure 7 is a microscope photograph of the solder joint state on the substrate side after the LED chip was peeled off in Comparative Examples 1-3.

圖8係關於使用以往之焊料膏製得之LED安裝體,對LED晶片剝離後之基板 側之焊料接合狀態進行觀察時之顯微鏡照片。 Figure 8 is a microscope photograph of the solder joint state on the substrate side of an LED mounting body made using conventional solder paste after the LED chip is peeled off.

以下,對於本發明之實施形態,一面參照圖式一面根據下述順序詳細地進行說明。 Hereinafter, the implementation form of the present invention will be described in detail according to the following sequence while referring to the drawings.

1.連接體之製造方法 1. Manufacturing method of connector

2.異向性接合膜(異向性接合材料) 2. Anisotropic bonding film (anisotropic bonding material)

3.實施例 3. Implementation examples

<1.連接體之製造方法> <1. Manufacturing method of connector>

本實施形態中之連接體之製造方法如下:使含有固體樹脂、焊料粒子、及助焊劑化合物之異向性接合材料以焊料粒子之平均粒徑之50%以上且300%以下之厚度,介置於第1電子零件之電極與第2電子零件之電極之間,使第1電子零件之電極與第2電子零件之電極於無負載下進行加熱接合,上述固體樹脂係選自熱塑性樹脂、固體自由基聚合性樹脂、及固體環氧樹脂之至少1種,於常溫為固體,且於溫度190℃、負載2.16kg之條件下測得之熔體流動速率為10g/10min以上。 The manufacturing method of the connector in this embodiment is as follows: an anisotropic bonding material containing a solid resin, solder particles, and a flux compound is placed between the electrode of the first electronic component and the electrode of the second electronic component with a thickness of more than 50% and less than 300% of the average particle size of the solder particles, and the electrode of the first electronic component and the electrode of the second electronic component are heat-bonded under no load. The solid resin is selected from at least one of thermoplastic resins, solid free radical polymerizable resins, and solid epoxy resins, is solid at room temperature, and has a melt flow rate of more than 10g/10min at a temperature of 190°C and a load of 2.16kg.

本說明書中,所謂熔體流動速率,係指依據JIS K7210:1999求出熱塑性塑膠之熔體流動速率之方法中所規定之於190℃、2.16kg負載之條件下測得之值,亦稱為熔體質量流率(MFR)。又,所謂常溫,係指JISZ 8703中所規定之20℃±15℃(5℃~35℃)之範圍。又,所謂連接體係指兩個材料或構件電性連接而成者。又,所謂接合係指使兩個材料或構件相互連接。又,所謂無負載係指無機械性加壓之狀態。 In this manual, the melt flow rate refers to the value measured at 190℃ and 2.16kg load according to the method for determining the melt flow rate of thermoplastic plastics in JIS K7210:1999, also known as melt mass flow rate (MFR). In addition, the room temperature refers to the range of 20℃±15℃ (5℃~35℃) specified in JISZ 8703. In addition, the connector refers to two materials or components electrically connected. In addition, the bonding refers to connecting two materials or components to each other. In addition, no load refers to the state without mechanical pressure.

又,平均粒徑係於使用金屬顯微鏡、光學顯微鏡、SEM(Scanning Electron Microscope)等電子顯微鏡等之觀察圖像中,以N=50以上,較佳為N=100以上,進而較佳為N=200以上所測得之粒子之長軸徑之平均值,於粒子為球 形之情形時,平均粒徑係粒子之直徑之平均值。又,亦可為對於觀察圖像使用公知之圖像解析軟體(WinROOF,三谷商事(股))所測得之測定值、使用圖像型粒度分佈測定裝置(例如,FPIA-3000(Malvern公司))所測得之測定值(N=1000以上)。根據觀察圖像或圖像型粒度分佈測定裝置求出之平均粒徑可設為粒子之最大長度之平均值。再者,當製作異向性接合材料時,可使用簡易地利用雷射繞射、散射法求得之粒度分佈中之頻度之累積為50%之粒徑(D50)、算術平均直徑(較佳為體積基準)等製造商值。 The average particle size is the average value of the diameter of the major axis of the particles measured with N=50 or more, preferably N=100 or more, and more preferably N=200 or more in the observed image using a metal microscope, an optical microscope, an electron microscope such as a SEM (Scanning Electron Microscope), etc. When the particles are spherical, the average particle size is the average value of the diameter of the particles. Alternatively, it may be a measured value measured using a known image analysis software (WinROOF, Mitani Shoji Co., Ltd.) or a measured value (N=1000 or more) measured using an image-type particle size distribution measuring device (e.g., FPIA-3000 (Malvern Co., Ltd.)) for the observed image. The average particle size obtained by observing the image or image-type particle size distribution measuring device can be set as the average value of the maximum length of the particles. Furthermore, when making anisotropic bonding materials, the manufacturer's values such as the particle size (D50) at which the cumulative frequency in the particle size distribution is 50% and the arithmetic mean diameter (preferably based on volume) can be used, which can be easily obtained by laser diffraction and scattering methods.

作為第1電子零件,較佳為LED(Light Emitting Diode)、驅動IC(Integrated Circuit)等晶片(元件),作為第2電子零件,若為設置有配線者,則無特別限定,只要為可廣義地定義為「設置有可搭載第1電子零件之電極之基板(所謂印刷配線板:PWB)」者即可。例如可列舉:硬質基板、玻璃基板、可撓性基板(FPC:Fexible Printed Circuits)、陶瓷基板、塑膠基板等基板。分別設置於第1電子零件及第2電子零件之電極(電極排列、電極群)以對向地異向性連接之方式設置,亦能夠以複數個第1電子零件搭載於一個第2電子零件之方式設置電極(電極排列、電極群)。作為第1電子零件,除LED(Light Emitting Diode)以外,亦可為驅動IC(Integrated Ckcuit)等晶片(例如,半導體元件)、可撓性基板(FPC:FlexibLe Printed Circuits)、經樹脂成形之零件等設置有配線(導通材料)者。作為第2電子零件,只要為設置有至少一部分與第1電子零件之端子對應之端子者,則無特別限定,只要為可廣義地定義為「設置有可搭載第1電子零件之電極之基板(所謂印刷配線板:PWB)」者即可。又,亦可將相同零件積層、連接。該積層數只要不會對連接帶來阻礙,則無特別限定。多個異種零件之積層亦同樣如此。分別設置於第1電子零件及第2電子零件之電極(電極排列、電極群)以對向地異向性連接之方式設置,且亦能夠以複數個第1電子零件搭載於一個第2電子零件之方式設置電極(電極排列、電極群)。再者,上述電子零件較理想為 具備回焊步驟中之耐熱性。 As the first electronic component, preferably, it is a chip (component) such as LED (Light Emitting Diode) or driver IC (Integrated Circuit). As the second electronic component, if it is provided with wiring, it is not particularly limited, as long as it can be broadly defined as "a substrate provided with an electrode that can carry the first electronic component (so-called printed wiring board: PWB)". For example, it can be: a hard substrate, a glass substrate, a flexible substrate (FPC: Fexible Printed Circuits), a ceramic substrate, a plastic substrate and the like. The electrodes (electrode arrangement, electrode group) respectively provided on the first electronic component and the second electronic component are provided in an oppositely anisotropic manner, and the electrodes (electrode arrangement, electrode group) can also be provided in a manner that a plurality of first electronic components are mounted on one second electronic component. The first electronic component may be, in addition to LED (Light Emitting Diode), a chip (e.g., semiconductor element) such as a driver IC (Integrated Circuit), a flexible substrate (FPC: Flexible Printed Circuits), a resin-formed component, etc. provided with wiring (conducting material). The second electronic component is not particularly limited as long as it is provided with at least a portion of terminals corresponding to the terminals of the first electronic component, and can be broadly defined as "a substrate provided with electrodes that can carry the first electronic component (so-called printed wiring board: PWB)". In addition, the same components can be stacked and connected. The number of layers is not particularly limited as long as it does not hinder the connection. The same applies to the stacking of multiple heterogeneous components. The electrodes (electrode arrangements, electrode groups) respectively provided on the first electronic component and the second electronic component are arranged in a manner of oppositely anisotropically connected, and the electrodes (electrode arrangements, electrode groups) can also be arranged in a manner of carrying a plurality of first electronic components on one second electronic component. Furthermore, the above electronic components are preferably heat-resistant during the reflow step.

異向性接合材料含有固體樹脂、焊料粒子、及助焊劑化合物,上述固體樹脂由選自熱塑性樹脂、固體自由基聚合性樹脂、及固體環氧樹脂之1種所組成,於常溫為固體,且MFR為10g/10min以上。助焊劑化合物較佳為羧酸。藉此,可獲得良好之焊料連接,並且於摻合有環氧樹脂之情形時,可作為環氧樹脂之硬化劑發揮功能。又,助焊劑化合物較佳為羧基經烷基乙烯基醚封端(block)化而成之封端化羧酸。藉此,可控制發揮助焊劑效果、及硬化劑功能之溫度。 The anisotropic bonding material contains a solid resin, solder particles, and a flux compound. The solid resin is composed of one selected from a thermoplastic resin, a solid free radical polymerizable resin, and a solid epoxy resin, is solid at room temperature, and has an MFR of 10 g/10 min or more. The flux compound is preferably a carboxylic acid. In this way, a good solder connection can be obtained, and when mixed with an epoxy resin, it can function as a hardener for the epoxy resin. In addition, the flux compound is preferably a blocked carboxylic acid in which the carboxyl group is blocked by an alkyl vinyl ether. In this way, the temperature at which the flux effect and the hardener function are exerted can be controlled.

又,異向性接合材料之樹脂流動量可為1.3~2.5,有時較佳為設為未達1.3。藉由使樹脂流動量成為該等值,從而可如後述般於無負載下進行加熱接合。樹脂流動量可依據日本特開2016-178225號公報中所記載之測定方法進行測定。首先,將異向性接合膜切割為2.0mm寬度,將切割過之異向性接合膜利用無鹼玻璃(厚度0.7μm)夾住,進行回焊步驟。回焊設為與連接所使用之條件相同即可。並且,測定回焊前後之樹脂擴寬量,將加壓後之異向性接合膜之寬度之最大值B除以加壓前之寬度A(=2.0mm),可將所求得之值作為樹脂流動量。又,更佳為不以無鹼玻璃夾住,而載置異向性接合材料進行回焊步驟,成為上述數值。於異向性接合材料之樹脂流動量較小之情形時,有回焊步驟中未於無負載下進行樹脂熔融,而對焊料粒子與電極間之夾持帶來阻礙之虞。本技術中,由於在黏合劑樹脂之加熱硬化時未施加負載,故較理想為使熔融性高於「以施加負載(如一般之異向性連接般利用工具進行按壓)為前提之黏合劑樹脂之設計」。 In addition, the resin flow rate of the anisotropic bonding material can be 1.3~2.5, and it is sometimes better to be set to less than 1.3. By making the resin flow rate become such a value, heat bonding can be performed under no load as described later. The resin flow rate can be measured according to the measurement method described in Japanese Patent Gazette No. 2016-178225. First, the anisotropic bonding film is cut into 2.0mm width, and the cut anisotropic bonding film is clamped with alkali-free glass (thickness 0.7μm) to perform a reflow step. The reflow can be set to the same conditions as those used for connection. Furthermore, the resin expansion before and after the reflow is measured, and the maximum value B of the width of the anisotropic bonding film after pressurization is divided by the width A (=2.0mm) before pressurization. The obtained value can be used as the resin flow. Moreover, it is more preferable to place the anisotropic bonding material without clamping it with alkali-free glass and perform the reflow step to obtain the above value. In the case where the resin flow of the anisotropic bonding material is small, there is a risk that the resin will not melt without load during the reflow step, which may hinder the clamping between the solder particles and the electrode. In this technology, since no load is applied when the adhesive resin is heated and hardened, it is more ideal to make the meltability higher than "the design of the adhesive resin based on the premise of applying a load (such as pressing with a tool like a general anisotropic connection)".

異向性接合材料可為膜狀異向性接合膜、或膏狀異向性接合膏之任一者。又,可使異向性接合膏於連接時成為膜狀,亦可藉由搭載零件而製成近似於膜之形態。 The anisotropic bonding material can be either a film-like anisotropic bonding film or a paste-like anisotropic bonding paste. Furthermore, the anisotropic bonding paste can be made into a film-like shape during connection, or can be made into a shape similar to a film by mounting components.

於異向性接合膏之情形時,只要可於基板上均勻地塗佈特定量即可,例如,可使用分注、衝壓、網版印刷等塗佈方法,亦可視需要進行乾燥。於 異向性接合膜之情形時,由於不僅可藉由膜厚使異向性接合材料之量均勻化,而且可於基板上一起層壓,可縮短產距時間,故特佳。又,藉由預先製成膜狀而易操作,故可期待亦提高作業效率。 In the case of anisotropic bonding paste, as long as a specific amount can be uniformly applied on the substrate, for example, dispensing, stamping, screen printing and other coating methods can be used, and drying can be performed as needed. In the case of anisotropic bonding film, not only can the amount of anisotropic bonding material be made uniform by the film thickness, but it can also be laminated on the substrate to shorten the production time, so it is particularly good. In addition, it is easy to handle by making it into a film in advance, so it can be expected to improve the work efficiency.

第1電子零件之電極與第2電子零件之電極之間之異向性接合材料之厚度之下限為焊料粒子之平均粒徑之50%以上,較佳為80%以上,更佳為90%以上。若異向性接合材料之厚度過薄,則焊料粒子變得容易夾持於電極間,但有製成膜狀時難易度變高之虞。又,第1電子零件之電極與第2電子零件之電極之間之異向性接合材料之厚度之上限為焊料粒子之平均粒徑之300%以下,較佳為200%以下,更佳為150%以下。若異向性接合材料之厚度過厚,則有對接合帶來阻礙之虞。 The lower limit of the thickness of the anisotropic bonding material between the electrode of the first electronic component and the electrode of the second electronic component is 50% or more of the average particle size of the solder particles, preferably 80% or more, and more preferably 90% or more. If the thickness of the anisotropic bonding material is too thin, the solder particles become easily sandwiched between the electrodes, but there is a risk that the difficulty of forming a film will increase. In addition, the upper limit of the thickness of the anisotropic bonding material between the electrode of the first electronic component and the electrode of the second electronic component is 300% or less of the average particle size of the solder particles, preferably 200% or less, and more preferably 150% or less. If the thickness of the anisotropic bonding material is too thick, there is a risk that the bonding band will be hindered.

以下,作為連接體之製造方法之具體例,對LED安裝體之製造方法進行說明。LED安裝體之製造方法具有:將具有焊料粒子之平均粒徑之50%以上且300%以下之厚度的異向性接合材料設置於基板上之步驟;將LED元件搭載於異向性接合材料上之搭載步驟;及使LED元件之電極與基板之電極於無負載下進行加熱接合之接合步驟。 As a specific example of the method for manufacturing a connector, the method for manufacturing an LED mounting body is described below. The method for manufacturing an LED mounting body comprises: a step of placing an anisotropic bonding material having a thickness of 50% or more and 300% or less of the average particle size of solder particles on a substrate; a step of mounting an LED element on the anisotropic bonding material; and a step of bonding the electrode of the LED element and the electrode of the substrate by heat bonding under no load.

設置異向性接合材料之步驟可為將異向性接合膏於連接前於基板上製成膜狀之步驟,亦可為如以往之異向性導電膜中所使用般,將異向性接合膜於低溫低壓貼合於基板上之暫時貼合步驟,亦可為將異向性接合膜於基板上進行層壓之層壓步驟。 The step of setting the anisotropic bonding material may be a step of forming an anisotropic bonding paste into a film on the substrate before connection, or a temporary bonding step of bonding the anisotropic bonding film to the substrate at low temperature and low pressure as used in the previous anisotropic conductive film, or a lamination step of laminating the anisotropic bonding film on the substrate.

於設置異向性接合材料之步驟係暫時貼合步驟之情形時,可於公知之使用條件下使異向性接合膜設置於基板上。於該情形時,由於僅進行自以往之裝置變更工具等最低限度之變更即可,故可獲得經濟性之優點。 When the step of setting the anisotropic bonding material is a temporary bonding step, the anisotropic bonding film can be set on the substrate under known usage conditions. In this case, since only minimal changes such as changing tools from the previous device are required, the advantage of economy can be obtained.

於設置異向性接合材料之步驟為層壓步驟之情形時,例如,使用加壓式層壓機,將異向性接合膜於基板上進行層壓。層壓溫度較佳為40℃以上且 160℃以下,更佳為50℃以上且140℃以下,進而較佳為60℃以上且120℃以下。又,層壓壓力較佳為0.1MPa以上且10MPa以下,更佳為0.5MPa且以上5MPa以下,進而較佳為1MPa以上且3MPa以下。又,層壓時間較佳為0.1sec以上且10sec以下,較佳為0.5sec以上且8sec以下,進而較佳為1sec以上且5sec以下。又,亦可為真空加壓式層壓。若為以往之異向性導電膜之使用了加熱加壓工具的暫時貼合,則膜之寬度受到工具寬度之限制,但於層壓步驟之情形時,由於不使用加熱加壓工具,故可期待能夠一次搭載相對較寬之寬度。又,亦可對一個基板層壓一個異向性接合膜。藉此,由於不會複數次進行加熱壓接工具之上下移動與異向性接合膜之搬送,故可縮短設置異向性接合材料之步驟之時間。 When the step of setting the anisotropic bonding material is a lamination step, for example, a pressurized lamination machine is used to laminarize the anisotropic bonding film on the substrate. The lamination temperature is preferably 40°C or higher and 160°C or lower, more preferably 50°C or higher and 140°C or lower, and further preferably 60°C or higher and 120°C or lower. Furthermore, the lamination pressure is preferably 0.1MPa or higher and 10MPa or lower, more preferably 0.5MPa or higher and 5MPa or lower, and further preferably 1MPa or higher and 3MPa or lower. Furthermore, the lamination time is preferably 0.1sec or higher and 10sec or lower, preferably 0.5sec or higher and 8sec or lower, and further preferably 1sec or higher and 5sec or lower. In addition, vacuum pressurized lamination is also possible. If the conventional anisotropic conductive film is temporarily bonded using a heating and pressing tool, the width of the film is limited by the width of the tool. However, in the case of the lamination step, since the heating and pressing tool is not used, it can be expected that a relatively wide width can be loaded at one time. In addition, one anisotropic bonding film can be laminated on one substrate. In this way, since the heating and pressing tool does not need to be moved up and down and the anisotropic bonding film is not transported multiple times, the time for setting the anisotropic bonding material step can be shortened.

搭載步驟中,例如將複數個LED元件配置、搭載於異向性接合膜上。本技術中,由於無法期待焊料粒子之自對準,故搭載步驟中,較佳為使LED元件準確地進行對準。各LED元件例如於單面具有第1導電型電極與第2導電型電極,且配置於與第1導電型電極及第2導電型電極對應之基板30之電極上。 In the mounting step, for example, a plurality of LED components are arranged and mounted on the anisotropic bonding film. In the present technology, since the self-alignment of the solder particles cannot be expected, it is preferred to accurately align the LED components in the mounting step. Each LED component has, for example, a first conductive type electrode and a second conductive type electrode on a single side, and is arranged on an electrode of the substrate 30 corresponding to the first conductive type electrode and the second conductive type electrode.

再者,於上述設置異向性導電接合材料之步驟中,使LED元件之電極與基板之電極之間的異向性接合材料之厚度近似於焊料粒子之平均粒徑,但不限定於此,亦可於搭載步驟中,藉由加壓(例如,暫時壓接)使異向性接合材料之厚度近似於焊料粒子之平均粒徑。該加壓步驟中,例如,藉由自載置於第2電子零件之第1電子零件側進行加壓,從而使得LED元件之電極與基板之電極之間的異向性接合材料之厚度近似於焊料粒子之平均粒徑。此處,若異向性接合材料之厚度過大,則有對加壓帶來阻礙之虞,因此亦可謂較佳為設為上述上限之厚度。所謂近似於平均粒徑,係指若經過該加壓步驟,則理論上焊料粒子之最大直徑成為異向性連接材料之厚度,故異向性連接材料之厚度可視為與焊料粒子之最大直徑同等,若考慮到厚度不均,亦可設為焊料粒子之最大直徑之130%以下,較佳為120%以下。又,加壓步驟之壓力之下限較佳為0.2MPa以上,更佳為 0.4MPa以上,又,加壓步驟之壓力之上限可為2.0MPa以下,較佳為1.0MPa以下,更佳為0.8MPa以下。由於上限及下限有時根據裝置之規格之不同而發生變動,故若可達成將樹脂壓入至焊料粒徑之目的,則不限定於上述數值範圍。該加壓(暫時壓接)步驟以不使焊料粒子熔融,而拉近電極與焊料粒子之距離為目的而進行。 Furthermore, in the step of providing the anisotropic conductive bonding material, the thickness of the anisotropic bonding material between the electrode of the LED element and the electrode of the substrate is made to be close to the average particle size of the solder particles, but it is not limited to this. In the mounting step, the thickness of the anisotropic bonding material can be made close to the average particle size of the solder particles by applying pressure (for example, temporary pressing). In the pressurizing step, for example, the pressure is applied from the side of the first electronic component mounted on the second electronic component, so that the thickness of the anisotropic bonding material between the electrode of the LED element and the electrode of the substrate is close to the average particle size of the solder particles. Here, if the thickness of the anisotropic bonding material is too large, there is a risk that it will hinder the pressurization, so it is better to set the thickness to the upper limit mentioned above. The so-called close to the average particle size means that after the pressurization step, the maximum diameter of the solder particles theoretically becomes the thickness of the anisotropic bonding material, so the thickness of the anisotropic bonding material can be regarded as the same as the maximum diameter of the solder particles. If the thickness unevenness is taken into account, it can also be set to 130% or less of the maximum diameter of the solder particles, preferably 120% or less. Furthermore, the lower limit of the pressure in the pressurizing step is preferably 0.2MPa or more, more preferably 0.4MPa or more, and the upper limit of the pressure in the pressurizing step can be 2.0MPa or less, preferably 1.0MPa or less, and more preferably 0.8MPa or less. Since the upper and lower limits sometimes vary depending on the specifications of the device, if the purpose of pressing the resin into the solder particle size can be achieved, it is not limited to the above numerical range. The pressurizing (temporary pressing) step is performed for the purpose of not melting the solder particles but shortening the distance between the electrode and the solder particles.

圖1係示意性地表示接合步驟之一部分之剖視圖。接合步驟中,使LED元件10之電極11、12與基板20之電極21、21於無負載下進行加熱接合。作為不進行機械性加壓而於無負載下進行加熱接合之方法,可列舉:大氣壓回焊、真空回焊、大氣壓烘箱、高壓釜(加壓烘箱)等,該等之中,較佳為使用可排除內包於接合部之氣泡之真空回焊、高壓釜等。由於為無負載,故與使用一般之加熱加壓工具之異向性導電連接相比,不會發生多餘之樹脂流動,因此可期待氣泡之夾帶亦得到抑制之效果。 FIG1 is a cross-sectional view schematically showing a portion of the bonding step. In the bonding step, the electrodes 11, 12 of the LED element 10 and the electrodes 21, 21 of the substrate 20 are heat-bonded under no load. As a method of heat-bonding under no load without mechanical pressurization, there are atmospheric pressure reflow, vacuum reflow, atmospheric pressure oven, high pressure autoclave (pressure oven), etc. Among them, it is preferable to use vacuum reflow, high pressure autoclave, etc. that can eliminate bubbles contained in the bonding part. Since there is no load, there will be no excess resin flow compared to anisotropic conductive connection using general heating and pressurizing tools, so it can be expected that the effect of suppressing the clamping of bubbles can also be achieved.

固體樹脂藉由加熱而發生熔融,藉由LED元件10之自重使得焊料粒子31夾持於電極間,藉由焊料熔融溫度以上之正式加熱使得焊料粒子31發生熔融,焊料於電極潤濕擴散,藉由冷卻使得LED元件10之電極與基板20之電極接合。接合步驟中,作為一例,較佳為以200℃以上且300℃以下之溫度,更佳為以220℃以上且290℃以下之溫度,進而較佳為以240℃以上且280℃以下之溫度進行正式加熱。藉此,使LED元件10之電極與基板20之電極接合,故可獲得優異之導通性、散熱性、及接著性。接合步驟中,由於無負載,故預想焊料粒子之移動量較小,焊料粒子之捕捉效率較高。又,由於焊料粒子之含量係無法期待進行自對準之程度,且接合步驟中,異向性接合膜中所含有之多個焊料粒子並未成為一體,故於一個電極內存在複數個焊料接合部位。此處,所謂焊料接合,係指使焊料熔融而使對向之電子零件之各電極連結。 The solid resin is melted by heating, and the solder particles 31 are sandwiched between the electrodes by the weight of the LED element 10. The solder particles 31 are melted by the main heating above the melting temperature of the solder, and the solder is wetted and diffused in the electrodes. The electrodes of the LED element 10 and the electrodes of the substrate 20 are joined by cooling. In the joining step, as an example, it is preferably to perform the main heating at a temperature of 200°C or more and 300°C or less, more preferably at a temperature of 220°C or more and 290°C or less, and further preferably at a temperature of 240°C or more and 280°C or less. In this way, the electrodes of the LED element 10 and the electrodes of the substrate 20 are joined, so that excellent conductivity, heat dissipation, and adhesion can be obtained. In the bonding step, since there is no load, the movement of solder particles is expected to be small and the capture efficiency of solder particles is high. In addition, since the content of solder particles is not expected to be self-aligned, and in the bonding step, the multiple solder particles contained in the anisotropic bonding film are not integrated, there are multiple solder bonding sites in one electrode. Here, the so-called solder bonding refers to melting the solder to connect the electrodes of the opposing electronic components.

圖2係表示LED安裝體之構成例之剖視圖。該LED安裝體係使用 焊料粒子31分散於固體樹脂而成之異向性接合膜將LED元件10與基板20連接而成者。即,LED安裝體係具有LED元件10、基板20、及焊料粒子31,具備使LED元件10之電極11、12與基板20之電極21、22連接而成之異向性接合膜32,LED元件10之電極11、12與基板20之電極21、22藉由焊料接合部33接合而成,且將固體樹脂填充於LED元件10與基板20之間而成。 FIG2 is a cross-sectional view showing an example of the structure of an LED mounting body. The LED mounting body is formed by connecting the LED element 10 and the substrate 20 using an anisotropic bonding film formed by dispersing solder particles 31 in a solid resin. That is, the LED mounting body has an LED element 10, a substrate 20, and solder particles 31, and has an anisotropic bonding film 32 formed by connecting the electrodes 11, 12 of the LED element 10 and the electrodes 21, 22 of the substrate 20, and the electrodes 11, 12 of the LED element 10 and the electrodes 21, 22 of the substrate 20 are bonded by a solder bonding portion 33, and the solid resin is filled between the LED element 10 and the substrate 20.

LED元件10具備第1導電型電極11及第2導電型電極12,若向第1導電型電極11與第2導電型電極12之間施加電壓,則載子集中於元件內之活性層,藉由進行再結合而產生發光。第1導電型電極11與第2導電型電極12之間隙間之距離,根據元件尺寸例如為100μm以上且200μm以下、50μm以上且100μm以下、20μm以上且50μm以下。作為LED元件10,無特別限定,例如可良好地使用具有400nm-500nm之峰值波長之藍色LED等。 The LED element 10 has a first conductive electrode 11 and a second conductive electrode 12. When a voltage is applied between the first conductive electrode 11 and the second conductive electrode 12, carriers are concentrated in the active layer in the element and light is generated by recombination. The distance between the first conductive electrode 11 and the second conductive electrode 12 is, for example, 100 μm to 200 μm, 50 μm to 100 μm, or 20 μm to 50 μm, depending on the element size. There is no particular limitation on the LED element 10. For example, a blue LED with a peak wavelength of 400 nm to 500 nm can be used well.

基板20於基材上於與LED元件10之第1導電型電極11及第2導電型電極12對應之位置分別具有第1電極21及第2電極22。作為基板20,可列舉:印刷配線板、玻璃基板、可撓性基板、陶瓷基板、塑膠基板等。印刷配線板之電極高度例如為10μm以上且40μm以下,玻璃基板之電極高度例如為3μm以下,可撓性基板之電極高度例如為5μm以上且20μm以下。 The substrate 20 has a first electrode 21 and a second electrode 22 on the base material at positions corresponding to the first conductive type electrode 11 and the second conductive type electrode 12 of the LED element 10, respectively. Examples of the substrate 20 include a printed wiring board, a glass substrate, a flexible substrate, a ceramic substrate, a plastic substrate, etc. The electrode height of the printed wiring board is, for example, greater than 10 μm and less than 40 μm, the electrode height of the glass substrate is, for example, less than 3 μm, and the electrode height of the flexible substrate is, for example, greater than 5 μm and less than 20 μm.

異向性接合膜32係於接合步驟後異向性接合材料成為膜狀而成者,藉由焊料接合部33將LED元件10之電極11、12與基板20之電極21、22進行金屬接合,並且於LED元件10與基板20之間填充異向性接合材料而成。 The anisotropic bonding film 32 is formed by the anisotropic bonding material being in a film shape after the bonding step, and the electrodes 11, 12 of the LED element 10 and the electrodes 21, 22 of the substrate 20 are metal-bonded by the solder bonding portion 33, and the anisotropic bonding material is filled between the LED element 10 and the substrate 20.

如圖2所示,LED安裝體係LED元件10之端子(電極11、12)與基板20之端子(電極21、22)藉由焊料接合部33進行金屬鍵結,且於LED元件20與基板30之間填充固體樹脂而成。藉此,可防止水分等滲入至LED元件10與基板20之間。 As shown in FIG2 , the LED mounting body is formed by metal bonding between the terminals (electrodes 11, 12) of the LED element 10 and the terminals (electrodes 21, 22) of the substrate 20 via a solder joint 33, and a solid resin is filled between the LED element 20 and the substrate 30. This prevents moisture from penetrating between the LED element 10 and the substrate 20.

<2.異向性接合膜(異向性接合材料)> <2. Anisotropic bonding film (anisotropic bonding material)>

圖3係示意性地表示應用本技術之異向性接合膜之一部分之剖視圖。如圖3所示,異向性接合膜30含有固體樹脂、焊料粒子31、及助焊劑化合物。又,異向性導電膜30中,視需要亦可於第1面貼附有第1膜,於第2面貼附有第2膜。再者,異向性接合膜係使異向性接合材料形成為膜狀而成者。 FIG3 is a schematic cross-sectional view of a portion of an anisotropic bonding film to which the present technology is applied. As shown in FIG3 , the anisotropic bonding film 30 contains a solid resin, solder particles 31, and a flux compound. In addition, in the anisotropic conductive film 30, a first film may be attached to the first surface and a second film may be attached to the second surface as needed. Furthermore, the anisotropic bonding film is formed by forming an anisotropic bonding material into a film shape.

膜厚度之下限為焊料粒子之平均粒徑之50%以上,較佳為80%以上,更佳為90%以上。若膜厚度過薄,則焊料粒子變得容易夾持於電極間,但有製成膜狀時難易度變高之虞。又,膜厚度之上限為焊料粒子之平均粒徑之300%以下,較佳為200%以下,更佳為150%以下。若膜厚度過厚,則有對接合帶來阻礙之虞。膜厚度可使用能夠測定1μm以下,較佳為0.1μm以下之公知之測微計或數位厚度規(例如,Mitutoyo股份有限公司:MDE-25M,最小顯示量0.0001mm)進行測定。膜厚度只要測定10個部位以上並進行平均即可。但是,於膜厚度薄於粒徑之情形時,接觸式之厚度測定器不適用,故較佳為使用雷射位移計(例如,基恩士股份有限公司,分光干涉位移型SI-T系列等)。此處,所謂膜厚度,係指僅樹脂層之厚度,不包括粒徑。 The lower limit of the film thickness is more than 50% of the average particle size of the solder particles, preferably more than 80%, and more preferably more than 90%. If the film thickness is too thin, the solder particles become easily clamped between the electrodes, but there is a risk that it will be more difficult to make it into a film. In addition, the upper limit of the film thickness is less than 300% of the average particle size of the solder particles, preferably less than 200%, and more preferably less than 150%. If the film thickness is too thick, there is a risk that it will hinder the bonding. The film thickness can be measured using a known micrometer or digital thickness gauge (for example, Mitutoyo Co., Ltd.: MDE-25M, minimum display amount 0.0001mm) that can measure less than 1μm, preferably less than 0.1μm. The film thickness only needs to be measured at more than 10 locations and averaged. However, when the film thickness is thinner than the particle size, the contact-type thickness meter is not applicable, so it is better to use a laser displacement meter (e.g., KEYENCE Corporation, spectral interference displacement type SI-T series, etc.). Here, the so-called film thickness refers to the thickness of the resin layer only, not including the particle size.

[固體樹脂] [Solid resin]

固體樹脂於常溫為固體,且於溫度190℃、負載2.16kg之條件下測得之MFR為10g/10min以上。MFR之上限較佳為5000g/10min以下,更佳為4000g/10min以下,進而較佳為3000g/10min以下。若MFR過大,則使得固體樹脂變得難以填充於第1電子零件與第2電子零件之間。 The solid resin is solid at room temperature, and the MFR measured at a temperature of 190°C and a load of 2.16 kg is 10 g/10 min or more. The upper limit of the MFR is preferably 5000 g/10 min or less, more preferably 4000 g/10 min or less, and further preferably 3000 g/10 min or less. If the MFR is too large, it becomes difficult for the solid resin to be filled between the first electronic component and the second electronic component.

熱塑性樹脂若於常溫為固體,且滿足上述MFR,則無特別限定,例如,亦可為乙烯-乙酸乙烯酯共聚樹脂、乙烯-丙烯酸共聚樹脂、聚醯胺樹脂、聚酯樹脂等。於固體樹脂為熱塑性樹脂之情形時,由於藉由熱熔使第1電子零件之電極與第2電子零件之電極金屬接合,故可獲得充分之接合強度。又,由於熱塑性樹脂不會伴隨反應,故無需注意適用期(產品生命(product life)長於使用 硬化性樹脂及硬化劑(反應起始劑)者),操作變得容易。又,由於熱塑性樹脂於常溫為固體,故於使用時樹脂不會發生熔融,但於發生熔融之情形時,亦可使其含有填料從而防止熔融。 Thermoplastic resins are not particularly limited as long as they are solid at room temperature and satisfy the above-mentioned MFR. For example, they may be ethylene-vinyl acetate copolymers, ethylene-acrylic acid copolymers, polyamide resins, polyester resins, etc. In the case where the solid resin is a thermoplastic resin, sufficient bonding strength can be obtained because the electrode of the first electronic component and the electrode of the second electronic component are metal-bonded by hot melting. In addition, since thermoplastic resins are not accompanied by reactions, there is no need to pay attention to the shelf life (product life is longer than that of those using curable resins and curing agents (reaction initiators)), and handling becomes easy. In addition, since thermoplastic resin is solid at room temperature, the resin will not melt when used. However, if it melts, fillers can be added to prevent melting.

固體自由基聚合性樹脂只要為於常溫為固體,滿足上述MFR,且於分子內具有1個以上不飽和雙鍵之自由基聚合性樹脂,則無特別限定,例如,可為不飽和聚酯(亦稱為乙烯酯)、環氧改質或胺酯(urethane)改質之(甲基)丙烯酸酯等。藉此,可維持膜形狀。 The solid free radical polymerizable resin is not particularly limited as long as it is solid at room temperature, satisfies the above MFR, and has one or more unsaturated double bonds in the molecule. For example, it can be unsaturated polyester (also known as vinyl ester), epoxy-modified or urethane-modified (meth) acrylate, etc. This can maintain the film shape.

固體環氧樹脂只要為於常溫為固體,滿足上述MFR,且於分子內具有1個以上之環氧基之環氧樹脂,則無特別限定,例如可為雙酚A型環氧樹脂、聯苯型環氧樹脂等。藉此,可維持膜形狀。 The solid epoxy resin is not particularly limited as long as it is solid at room temperature, satisfies the above-mentioned MFR, and has one or more epoxy groups in the molecule. For example, it may be bisphenol A type epoxy resin, biphenyl type epoxy resin, etc. In this way, the film shape can be maintained.

又,異向性接合膜亦可進而含有於常溫為液狀之液狀自由基聚合性樹脂、與聚合起始劑。液狀自由基聚合性樹脂只要於常溫為液狀,則無特別限定,例如可為丙烯酸酯、甲基丙烯酸酯、不飽和聚酯等,亦可經胺酯改質。藉由使用液狀自由基聚合性樹脂,不僅可對異向性接合膜賦予黏性,提高對於被接著體之層壓性,且可提高安裝時之黏合劑整體之流動性。 In addition, the anisotropic bonding film may further contain a liquid radical polymerizable resin that is liquid at room temperature and a polymerization initiator. The liquid radical polymerizable resin is not particularly limited as long as it is liquid at room temperature, and may be, for example, acrylate, methacrylate, unsaturated polyester, etc., and may also be modified by amine. By using a liquid radical polymerizable resin, not only can the anisotropic bonding film be given viscosity, thereby improving the lamination properties to the adherend, but also the fluidity of the adhesive as a whole during installation can be improved.

液狀自由基聚合性樹脂之摻合量相對於固體樹脂100質量份,較佳為100質量份以下,更佳為80質量份以下,進而較佳為70質量份以下。若液狀自由基聚合性樹脂之摻合量變多,則變得較難維持膜形狀。 The amount of the liquid radical polymerizable resin blended relative to 100 parts by mass of the solid resin is preferably 100 parts by mass or less, more preferably 80 parts by mass or less, and further preferably 70 parts by mass or less. If the amount of the liquid radical polymerizable resin blended increases, it becomes more difficult to maintain the film shape.

聚合起始劑較佳為二醯基過氧化物等有機過氧化物。又,聚合起始劑之反應起始溫度較佳為高於焊料粒子之熔點。藉此,由於在固體樹脂之流動後開始硬化,故可獲得良好之焊料接合。 The polymerization initiator is preferably an organic peroxide such as diacyl peroxide. In addition, the reaction starting temperature of the polymerization initiator is preferably higher than the melting point of the solder particles. In this way, since the solid resin begins to harden after flowing, a good solder joint can be obtained.

又,異向性接合膜亦可進而含有於常溫為液狀之環氧樹脂、與硬化劑。液狀環氧樹脂只要於常溫為液狀,則無特別限定,例如,可為雙酚A型環氧樹脂、雙酚F型環氧樹脂等,亦可為胺酯改質之環氧樹脂。 In addition, the anisotropic bonding film may further contain an epoxy resin that is liquid at room temperature and a hardener. The liquid epoxy resin is not particularly limited as long as it is liquid at room temperature. For example, it may be a bisphenol A type epoxy resin, a bisphenol F type epoxy resin, or an amine-modified epoxy resin.

液狀環氧樹脂之摻合量相對於固體樹脂100質量份,較佳為160質量份以下,更佳為100質量份以下,進而較佳為70質量份以下。若液狀環氧樹脂之摻合量變多,則變得較難維持膜形狀。 The amount of liquid epoxy resin blended relative to 100 parts by mass of solid resin is preferably 160 parts by mass or less, more preferably 100 parts by mass or less, and further preferably 70 parts by mass or less. If the amount of liquid epoxy resin blended increases, it becomes more difficult to maintain the film shape.

硬化劑只要為利用熱而開始硬化之熱硬化劑,則無特別限定,例如可列舉:胺、咪唑等陰離子系硬化劑;鋶鹽等陽離子系硬化劑。又,硬化劑亦可被微膠囊化以便對於進行膜化時所使用之溶劑獲得耐受性。 The hardener is not particularly limited as long as it is a thermal hardener that starts hardening by heat. Examples include: anionic hardeners such as amines and imidazoles; cationic hardeners such as cobalt salts. In addition, the hardener can also be microencapsulated to obtain resistance to the solvent used in the film formation.

又,硬化劑亦可為羧酸、或羧基經烷基乙烯基醚封端化而成之封端化羧酸。即,硬化劑亦可為助焊劑化合物。 Furthermore, the hardener may be a carboxylic acid, or a blocked carboxylic acid in which the carboxyl group is blocked by an alkyl vinyl ether. That is, the hardener may also be a flux compound.

[焊料粒子] [Solder particles]

焊料粒子可於異向性接合膜中無規地混練、分散,亦可於俯視下配置。異向性接合膜之於俯視下之焊料粒子整體之配置可為規則之配置亦可為無規配置。作為規則之配置之態樣,可列舉:正方格子、六方格子、斜方格子、長方格子等格子排列,無特別限制。又,作為無規配置之態樣,較佳為於膜之俯視下各焊料粒子互不接觸地存在,且於膜厚方向焊料粒子亦互不重疊地存在。又,較佳為異向性接合膜中之焊料粒子之總個數之95%以上不與其他焊料粒子接觸而獨立存在。其可藉由使用公知之金屬顯微鏡或光學顯微鏡,任意地抽取5個部位以上之俯視下之膜之1mm2以上之面積,觀察200個以上,較佳為1000個以上之焊料粒子,從而進行確認。又,於焊料粒子於異向性接合膜中於俯視下配置之情形時,焊料粒子亦可於膜厚方向之相同位置對齊。 The solder particles can be randomly mixed and dispersed in the anisotropic bonding film, or can be arranged when viewed from above. The overall arrangement of the solder particles in the anisotropic bonding film when viewed from above can be regular or random. As a pattern of regular arrangement, there can be listed: square lattice, hexagonal lattice, rhombus lattice, rectangular lattice and other lattice arrangements, without special restrictions. In addition, as a pattern of random arrangement, it is preferred that the solder particles exist without contacting each other when the film is viewed from above, and the solder particles also exist without overlapping each other in the film thickness direction. In addition, it is preferred that more than 95% of the total number of solder particles in the anisotropic bonding film exist independently without contacting other solder particles. This can be confirmed by using a known metal microscope or optical microscope to randomly extract 5 or more locations of an area of 1 mm2 or more of the film in a top view, and observe 200 or more, preferably 1000 or more solder particles. In addition, when the solder particles are arranged in the anisotropic bonding film in a top view, the solder particles can also be aligned at the same position in the film thickness direction.

又,焊料粒子亦可以複數個凝聚而成之凝聚體之形式配置。於該情形時,異向性接合膜之於俯視下之凝聚體之配置與上述焊料粒子之配置同樣地,可為規則之配置亦可為無規配置。又,較佳為於膜之俯視下,各凝聚體互不接觸地存在,且於膜厚方向凝聚體亦互不重疊地存在。各凝聚體之焊料粒子之平均粒徑可與上述平均粒徑同樣地進行測量。 Furthermore, the solder particles may be arranged in the form of agglomerates formed by a plurality of agglomerates. In this case, the arrangement of the agglomerates of the anisotropic bonding film in a top view may be regular or random, similar to the arrangement of the solder particles described above. Furthermore, it is preferred that the agglomerates exist without contacting each other in a top view of the film, and the agglomerates also exist without overlapping each other in the film thickness direction. The average particle size of the solder particles of each agglomerate may be measured in the same manner as the above average particle size.

焊料粒子之平均粒徑較佳為作為被接著體的半導體元件之電極之間隙間之距離之1/3以下,更佳為1/4以下,進而較佳為1/5以下。若焊料粒子之平均粒徑大於半導體元件之電極之間隙間之距離之1/3,則發生短路之可能性變高。作為具體之焊料粒子之粒徑,較佳為1μm以上且30μm以下。若平均粒徑小於1μm,則有無法獲得與電極部良好之焊料接合狀態,可靠性變差之傾向。又,為了使膜之塗佈厚度固定,焊料粒子之平均粒徑之下限較佳為3μm以上,更佳為5μm以上。又,若焊料粒子之平均粒徑為30μm以上,則微間距連接變得困難。焊料粒子之平均粒徑之上限為30μm以下,較佳為25μm以下,進而較佳為20μm以下。根據連接對象之不同,焊料粒子之平均粒徑之上限較理想設為15μm以下。又,於為複數個焊料粒子凝聚而成之凝聚體之情形時,亦可將凝聚體之大小設為與上述焊料粒子之平均粒徑同等。於製成凝聚體之情形時,亦可將焊料粒子之平均粒徑設為小於上述值。各焊料粒子之大小可利用電子顯微鏡進行觀察而求出。 The average particle size of the solder particles is preferably less than 1/3 of the distance between the electrodes of the semiconductor element being connected, more preferably less than 1/4, and further preferably less than 1/5. If the average particle size of the solder particles is larger than 1/3 of the distance between the electrodes of the semiconductor element, the possibility of a short circuit increases. As a specific particle size of the solder particles, it is preferably greater than 1 μm and less than 30 μm. If the average particle size is less than 1 μm, a good solder joint with the electrode portion may not be obtained, and reliability tends to deteriorate. In addition, in order to make the coating thickness of the film constant, the lower limit of the average particle size of the solder particles is preferably greater than 3 μm, and more preferably greater than 5 μm. Furthermore, if the average particle size of the solder particles is greater than 30μm, fine-pitch connection becomes difficult. The upper limit of the average particle size of the solder particles is less than 30μm, preferably less than 25μm, and more preferably less than 20μm. Depending on the connection object, the upper limit of the average particle size of the solder particles is preferably set to less than 15μm. Furthermore, in the case of an agglomerate formed by agglomeration of multiple solder particles, the size of the agglomerate can also be set to be equal to the average particle size of the above-mentioned solder particles. In the case of making an agglomerate, the average particle size of the solder particles can also be set to be smaller than the above value. The size of each solder particle can be observed and obtained using an electron microscope.

焊料粒子例如可自JIS Z 3282-1999中所規定之Sn-Pb系、Pb-Sn-Sb系、Sn-Sb系、Sn-Pb-Bi系、Bi-Sn系、Sn-Cu系、Sn-Pb-Cu系、Sn-In系、Sn-Ag系、Sn-Pb-Ag系、Pb-Ag系等,根據電極材料或連接條件等適當選擇。焊料粒子之熔點較佳為110℃以上且180℃以下,更佳為120℃以上且160℃以下,進而較佳為130℃以上且150℃以下。又,焊料粒子亦可以使表面活化為目的,使得助焊劑化合物直接與表面結合。可藉由使表面活化,而促進與電極部之金屬鍵結。 Solder particles can be appropriately selected from Sn-Pb, Pb-Sn-Sb, Sn-Sb, Sn-Pb-Bi, Bi-Sn, Sn-Cu, Sn-Pb-Cu, Sn-In, Sn-Ag, Sn-Pb-Ag, Pb-Ag, etc. specified in JIS Z 3282-1999, depending on the electrode material or connection conditions. The melting point of the solder particles is preferably above 110°C and below 180°C, more preferably above 120°C and below 160°C, and further preferably above 130°C and below 150°C. In addition, the solder particles can also be surface activated so that the flux compound is directly bonded to the surface. By activating the surface, the metal bonding with the electrode portion can be promoted.

焊料粒子之摻合量之質量比範圍之下限較佳為20wt%以上,更佳為30wt%以上,進而較佳為40wt%以上,焊料粒子之摻合量之質量比範圍之下限較佳為80wt%以下,更佳為70wt%以下,進而較佳為60wt%以下。又,焊料粒子之摻合量之體積比範圍之下限較佳為5vol%以上,更佳為10vol%以上,進而較佳為15vol%以上,焊料粒子之摻合量之體積比範圍之上限較佳為30vol%以下,更佳為25vol%以下,進而較佳為20vol%以下。藉由使焊料粒子之摻合量滿 足上述質量比範圍或體積比範圍,從而可獲得優異之導通性、散熱性、及接著性。於焊料粒子存在於黏合劑中之情形時,可使用體積比,於製造異向性導電接合材料之情形時(於焊料粒子存在於黏合劑之前),可使用質量比。質量比可根據摻合物之比重或摻合比等轉換為體積比。若焊料粒子之摻合量過少,則變得無法獲得優異之導通性、散熱性、及接著性,若摻合量過多,則異向性受損,變得無法獲得優異之導通可靠性。 The lower limit of the mass ratio range of the solder particle blending amount is preferably 20 wt% or more, more preferably 30 wt% or more, and further preferably 40 wt% or more. The lower limit of the mass ratio range of the solder particle blending amount is preferably 80 wt% or less, more preferably 70 wt% or less, and further preferably 60 wt% or less. Furthermore, the lower limit of the volume ratio range of the solder particle blending amount is preferably 5 vol% or more, more preferably 10 vol% or more, and further preferably 15 vol% or more. The upper limit of the volume ratio range of the solder particle blending amount is preferably 30 vol% or less, more preferably 25 vol% or less, and further preferably 20 vol% or less. By making the amount of solder particles mixed satisfy the above-mentioned mass ratio range or volume ratio range, excellent conductivity, heat dissipation, and adhesion can be obtained. When the solder particles are present in the adhesive, the volume ratio can be used, and when the anisotropic conductive bonding material is manufactured (before the solder particles are present in the adhesive), the mass ratio can be used. The mass ratio can be converted into the volume ratio based on the specific gravity of the mixture or the mixing ratio. If the amount of solder particles mixed is too small, it becomes impossible to obtain excellent conductivity, heat dissipation, and adhesion. If the amount of solder particles mixed is too large, the anisotropy is damaged and it becomes impossible to obtain excellent conduction reliability.

[助焊劑化合物] [Flux compounds]

助焊劑化合物除去電極表面之異物或氧化膜,或防止電極表面之氧化,或降低熔融焊料之表面張力等。作為助焊劑化合物,例如較佳為使用乙醯丙酸、順丁烯二酸、草酸、丙二酸、丁二酸、戊二酸、己二酸、癸二酸等羧酸。藉此,可獲得良好之焊料連接,並且於摻合有環氧樹脂之情形時,可作為環氧樹脂之硬化劑發揮功能。 The flux compound removes foreign matter or oxide film on the electrode surface, or prevents oxidation of the electrode surface, or reduces the surface tension of the molten solder. As the flux compound, for example, it is preferred to use carboxylic acids such as acetopropionic acid, succinic acid, oxalic acid, malonic acid, succinic acid, glutaric acid, adipic acid, and sebacic acid. In this way, a good solder connection can be obtained, and when mixed with epoxy resin, it can function as a hardener for epoxy resin.

又,作為助焊劑化合物,較佳為使用羧基經烷基乙烯基醚封端化而成之封端化羧酸。藉此,可控制發揮助焊劑效果及硬化劑功能之溫度。又,由於對於樹脂之溶解性提高,故可改善進行膜化時之混合、塗佈不均。又,解除封端化之解離溫度較佳為焊料粒子之熔點以上。藉此,可獲得良好之焊料連接,並且於摻合有環氧樹脂之情形時,由於在環氧樹脂之流動後開始硬化,故可獲得良好之焊料接合。 In addition, as a flux compound, it is preferred to use a blocked carboxylic acid formed by blocking the carboxyl group with an alkyl vinyl ether. In this way, the temperature at which the flux effect and the curing agent function are exerted can be controlled. In addition, since the solubility in the resin is improved, the mixing and uneven coating during film formation can be improved. In addition, the decapping temperature is preferably above the melting point of the solder particles. In this way, a good solder connection can be obtained, and when an epoxy resin is mixed, since the epoxy resin starts to harden after flowing, a good solder joint can be obtained.

[其他添加劑] [Other additives]

異向性接合膜中亦可除上述固體樹脂、焊料粒子、及助焊劑化合物以外,於不損害本發明之範圍內摻合各種各樣之添加劑。例如,異向性接合膜亦可含有無機填料、有機填料、金屬填料、偶合劑、調平劑、穩定劑、觸變劑等。無機填料、有機填料、及金屬填料之粒徑就連接穩定性之觀點而言,小於焊料粒子之平均粒徑,例如使用10-1000nm之奈米填料、1-10μm之微米填料等。 In addition to the above-mentioned solid resin, solder particles, and flux compounds, various additives can be mixed into the anisotropic bonding film within the scope that does not damage the present invention. For example, the anisotropic bonding film can also contain inorganic fillers, organic fillers, metal fillers, coupling agents, leveling agents, stabilizers, and thixotropic agents. From the perspective of connection stability, the particle size of the inorganic filler, organic filler, and metal filler is smaller than the average particle size of the solder particles, for example, nano fillers of 10-1000nm, micro fillers of 1-10μm, etc. are used.

作為無機填料,可列舉:二氧化矽、氧化鋁、氫氧化鋁、氧化鈦、氫氧化鋁、氫氧化鈣、碳酸鈣、滑石、氧化鋅、沸石等,亦可以提高吸濕可靠性為目的,添加二氧化矽,或以提高光反射為目的,添加氧化鈦,或以防止因酸所致之腐蝕為目的,添加氫氧化鋁、氫氧化鈣等。 As inorganic fillers, there are: silicon dioxide, aluminum oxide, aluminum hydroxide, titanium oxide, aluminum hydroxide, calcium hydroxide, calcium carbonate, talc, zinc oxide, zeolite, etc. Silicon dioxide can be added for the purpose of improving moisture absorption reliability, titanium oxide can be added for the purpose of improving light reflection, or aluminum hydroxide, calcium hydroxide, etc. can be added for the purpose of preventing corrosion caused by acid.

作為有機填料,可列舉:丙烯酸系樹脂、碳、核殼粒子等,藉由添加有機填料,從而可獲得防止結塊、光散射等效果。 Examples of organic fillers include acrylic resins, carbon, core-shell particles, etc. By adding organic fillers, effects such as preventing agglomeration and light scattering can be achieved.

作為金屬填料,可列舉:Ni、Cu、Ag、Au,亦可為其等之合金。例如,Cu填料由於與酸形成錯合物,故可防止電極等之腐蝕。再者,金屬填料可有助於導通,亦可無助於導通,金屬填料之摻合量只要調整為包含焊料粒子在內不發生短路之程度即可。 As metal fillers, Ni, Cu, Ag, Au, and alloys thereof can be listed. For example, Cu fillers can prevent corrosion of electrodes, etc. by forming complexes with acids. Furthermore, metal fillers may or may not contribute to conduction. The amount of metal fillers added can be adjusted to a level that does not cause short circuits including solder particles.

又,上述異向性接合膜例如可藉由如下方式獲得,即,將固體樹脂、焊料粒子、及助焊劑化合物於溶劑中進行混合,藉由棒式塗佈機將該混合物以成為特定厚度之方式塗佈於剝離處理膜上後,加以乾燥,而使溶劑揮發。又,為了提高焊料粒子之分散性,較佳為於含有溶劑之狀態下施加高剪切。例如,可使用公知之批次式行星攪拌裝置。亦可為能夠於真空環境下進行者。又,異向性接合膜之溶劑殘量較佳為2%以下,更佳為1%以下。 Furthermore, the above-mentioned anisotropic bonding film can be obtained, for example, by mixing a solid resin, solder particles, and a flux compound in a solvent, applying the mixture to a specific thickness on a stripping treatment film by a rod coater, and then drying to volatilize the solvent. Furthermore, in order to improve the dispersibility of the solder particles, it is preferred to apply high shear in a state containing a solvent. For example, a known batch planetary stirring device can be used. It can also be capable of being carried out in a vacuum environment. Furthermore, the solvent residue of the anisotropic bonding film is preferably less than 2%, and more preferably less than 1%.

實施例 Implementation example

<3.1第1實施例> <3.1 First Implementation Example>

第1實施例中,使用含有熱塑性樹脂之異向性接合膜,製作LED安裝體,對LED安裝體之順向電壓、晶片剪切強度、及接合狀態進行評價。 In the first embodiment, an anisotropic bonding film containing a thermoplastic resin is used to make an LED mounting body, and the forward voltage, chip shear strength, and bonding state of the LED mounting body are evaluated.

[固體樹脂之熔體流動速率之測定] [Determination of melt flow rate of solid resin]

依據JIS K7210:1999之求出塑性塑膠之熔體流動速率之方法,使用熔體流動速率測定裝置(品名:Melt Indexer G-02,東洋精機製作所公司製造),於溫度190℃、負載2.16kg之條件下測定熱塑性樹脂A-E之熔體流動速率。 According to the method for determining the melt flow rate of plastics in JIS K7210:1999, the melt flow rate measuring device (product name: Melt Indexer G-02, manufactured by Toyo Seiki Seisaku-sho Co., Ltd.) was used to measure the melt flow rate of thermoplastic resins A-E at a temperature of 190°C and a load of 2.16 kg.

A:聚酯樹脂,Primalloy A1500(三菱化學(股)),MFR=11g/10min A: Polyester resin, Primalloy A1500 (Mitsubishi Chemical), MFR=11g/10min

B:乙烯-乙酸乙烯酯共聚樹脂,EVAFLEX EV205WR(三井杜邦化學(股)),MFR=800g/10min B: Ethylene-vinyl acetate copolymer, EVAFLEX EV205WR (Mitsui DuPont Chemicals Co., Ltd.), MFR = 800g/10min

C:乙烯丙烯酸共聚樹脂,Nucrel N1050H(杜邦(股)),MFR=500g/10min C: Ethylene acrylic acid copolymer resin, Nucrel N1050H (DuPont), MFR=500g/10min

D:聚醯胺樹脂,Griltex D1666A(EMS GRIVORY(股)),MFR=130g/10min D: Polyamide resin, Griltex D1666A (EMS GRIVORY), MFR = 130g/10min

E:苯氧樹脂、Phenotohto YP70(新日鐵住金化學(股)),MFR=1g/10min E: Phenoxy resin, Phenotohto YP70 (Nippon Steel & Sumitomo Metal Chemicals Co., Ltd.), MFR = 1g/10min

[LED安裝體之製作] [Production of LED mounting body]

準備LED晶片(Dexerials評價用LED晶片,尺寸45mil,If=350mA,Vf=3.1V,Au-Sn墊,分別設置有墊尺寸300μm×800μm之P電極與N電極,且墊間距離(P電極與N電極間距離)150μm)、與基板(Dexerials評價用陶瓷基板,18μm厚Cu圖案,Ni-Au鍍覆,圖案間(間隙)50μm)。使異向性接合膜於80℃-2MPa-3sec之條件下於基板上進行層壓,使LED晶片對準搭載後,藉由回焊(峰值溫度260℃)安裝LED晶片。 Prepare LED chips (LED chips for Dexerials evaluation, size 45mil, If=350mA, Vf=3.1V, Au-Sn pads, P-electrode and N-electrode with pad size 300μm×800μm, and pad distance (P-electrode and N-electrode distance) 150μm) and substrates (ceramic substrates for Dexerials evaluation, 18μm thick Cu pattern, Ni-Au coating, pattern gap 50μm). Laminate the anisotropic bonding film on the substrate under the conditions of 80℃-2MPa-3sec, align the LED chips and mount them, then install the LED chips by reflow (peak temperature 260℃).

[順向電壓之測定] [Measurement of forward voltage]

經由基板之圖案使作為額定電流之If=350mA於LED晶片中流動,測定LED晶片之順向電壓值Vf。將因電壓過量而無法讀取之情形設為「OPEN」。 The rated current If=350mA is made to flow through the LED chip through the pattern of the substrate, and the forward voltage value Vf of the LED chip is measured. The situation where the reading cannot be made due to excessive voltage is set to "OPEN".

[晶片剪切強度之測定] [Determination of chip shear strength]

使用接合測試機(品號:PTR-1100,力世科公司製造),以測定速度20μm/sec測定LED晶片之晶片剪切強度。 The chip shear strength of the LED chip was measured using a bonding tester (product number: PTR-1100, manufactured by Lisko Corporation) at a measuring speed of 20μm/sec.

[接合狀態之觀察] [Observation of the bonding state]

利用光學顯微鏡觀察測定晶片剪切強度後、即LED晶片剝離後之基板側之焊料接合狀態。 The solder joint state on the substrate side after the LED chip is peeled off is observed using an optical microscope to measure the chip shear strength.

[膜厚度之測定] [Determination of film thickness]

膜厚度係使用數位測微計,測定10個部位以上,並將其平均值作為膜厚度。 The film thickness is measured at more than 10 locations using a digital micrometer, and the average value is taken as the film thickness.

<實施例1-1> <Implementation Example 1-1>

如表1所示,以特定之質量份摻合熱塑性樹脂A、助焊劑化合物(戊二酸(1,3-丙烷二羧酸),和光純藥(股))、焊料粒子(42Sn-58Bi,Type6,熔點139℃,平均粒徑10μm,三井金屬(股))、氧化鈦(平均粒徑0.21μm,CR-60,石原產業(股)),製得異向性接合膜。 As shown in Table 1, thermoplastic resin A, flux compound (glutaric acid (1,3-propanedicarboxylic acid), Wako Pure Chemical Industries, Ltd.), solder particles (42Sn-58Bi, Type 6, melting point 139°C, average particle size 10μm, Mitsui Metals, Ltd.), and titanium oxide (average particle size 0.21μm, CR-60, Ishihara Industry Co., Ltd.) were mixed with specific mass fractions to produce an anisotropic bonding film.

於使焊料粒子分散於混合溶解有熱塑性樹脂A、助焊劑化合物、及氧化鈦之甲苯溶液中後,利用間隙塗佈機,以甲苯乾燥後之厚度為20μm之方式塗佈於剝離PET(PET-02-BU,Shikoku-Tohcello(股))上而製作。甲苯乾燥係於80℃-10min之條件下進行。乾燥後之膜厚度之測定值為20μm。 After dispersing solder particles in a toluene solution containing a mixture of thermoplastic resin A, flux compound, and titanium oxide, the film was coated on a peeling PET (PET-02-BU, Shikoku-Tohcello (stock)) using a gap coater in a manner such that the thickness after toluene drying was 20μm. Toluene drying was performed at 80℃-10min. The measured film thickness after drying was 20μm.

表1中表示使用異向性接合膜製得之LED安裝體之順向電壓、及晶片剪切強度之測定結果。順向電壓為3.1V、晶片剪切強度為40N/chip。 Table 1 shows the results of the measurement of the forward voltage and chip shear strength of the LED mounting body made using anisotropic bonding film. The forward voltage is 3.1V and the chip shear strength is 40N/chip.

圖4係對實施例1-1之LED晶片剝離後之基板側之焊料接合狀態進行觀察時之顯微鏡照片。焊料於LED晶片側及基板側潤濕擴散,焊料接合狀態良好。又,可確認出於一個電極內存在複數個焊料接合部位。 Figure 4 is a microscope photograph of the solder joint state on the substrate side after the LED chip of Example 1-1 was peeled off. The solder is wet and diffused on the LED chip side and the substrate side, and the solder joint state is good. In addition, it can be confirmed that there are multiple solder joints in one electrode.

<實施例1-2> <Implementation Example 1-2>

如表1所示,使用熱塑性樹脂B代替熱塑性樹脂A,除此以外與實施例1-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為3.0V、晶片剪切強度為45N/chip。 As shown in Table 1, thermoplastic resin B was used instead of thermoplastic resin A, and the anisotropic bonding film was prepared in the same manner as in Example 1-1. The LED mounting body prepared using the anisotropic bonding film had a forward voltage of 3.0 V and a chip shear strength of 45 N/chip.

<實施例1-3> <Implementation Example 1-3>

如表1所示,使用熱塑性樹脂C代替熱塑性樹脂A,除此以外與實施例1-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為3.0V、晶片剪切強度為43N/chip。 As shown in Table 1, thermoplastic resin C was used instead of thermoplastic resin A, and the anisotropic bonding film was prepared in the same manner as in Example 1-1. The LED mounting body prepared using the anisotropic bonding film had a forward voltage of 3.0 V and a chip shear strength of 43 N/chip.

<實施例1-4> <Implementation Example 1-4>

如表1所示,使用熱塑性樹脂D代替熱塑性樹脂A,除此以外與實施例1-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為3.0V、晶片剪切強度為46N/chip。 As shown in Table 1, thermoplastic resin D was used instead of thermoplastic resin A, and the anisotropic bonding film was prepared in the same manner as in Example 1-1. The LED mounting body prepared using the anisotropic bonding film had a forward voltage of 3.0 V and a chip shear strength of 46 N/chip.

<實施例1-5> <Implementation Example 1-5>

如表1所示,將異向性接合膜之厚度設為30μm,除此以外與實施例1-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為3.1V、晶片剪切強度為47N/chip。 As shown in Table 1, the thickness of the anisotropic bonding film was set to 30 μm, and the anisotropic bonding film was prepared in the same manner as in Example 1-1. The forward voltage of the LED mounting body prepared using the anisotropic bonding film was 3.1 V, and the chip shear strength was 47 N/chip.

<比較例1-1> <Comparison Example 1-1>

如表1所示,使用熱塑性樹脂E代替熱塑性樹脂A,除此以外與實施例1-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓變為OPEN,晶片剪切強度為19N/chip。 As shown in Table 1, thermoplastic resin E was used instead of thermoplastic resin A, and the anisotropic bonding film was prepared in the same manner as in Example 1-1. The forward voltage of the LED mounting body prepared using the anisotropic bonding film became OPEN, and the chip shear strength was 19N/chip.

圖5係對比較例1-1之LED晶片剝離後之基板側之焊料接合狀態進行觀察時之顯微鏡照片。由於熱塑性樹脂E之熔體流動速率為1g/10min,故樹脂幾乎未流動,焊料粒子未與LED晶片之墊或基板之圖案接觸且未發生熔融。 Figure 5 is a microscope photograph of the solder joint state on the substrate side after the LED chip was peeled off in Comparative Example 1-1. Since the melt flow rate of thermoplastic resin E is 1g/10min, the resin hardly flows, and the solder particles do not contact the pad of the LED chip or the pattern of the substrate and do not melt.

<比較例1-2> <Comparison Example 1-2>

如表1所示,未摻合助焊劑化合物,除此以外與實施例1-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓變為OPEN,晶片剪切強度為18N/chip。 As shown in Table 1, the anisotropic bonding film was prepared in the same manner as Example 1-1 except that the flux compound was not mixed. The forward voltage of the LED mounting body prepared using the anisotropic bonding film became OPEN, and the chip shear strength was 18N/chip.

圖6係對比較例1-2之LED晶片剝離後之基板側之焊料接合狀態進行觀察時之顯微鏡照片。由於未摻合助焊劑化合物,故焊料粒子未發生熔融。 Figure 6 is a microscope photograph of the solder joint state on the substrate side after the LED chip was peeled off in Comparative Example 1-2. Since the flux compound was not mixed, the solder particles did not melt.

<比較例1-3> <Comparison Example 1-3>

如表1所示,將異向性接合膜之厚度設為40μm,除此以外與實施例1-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓變為OPEN,晶片剪切強度為25N/chip。 As shown in Table 1, the thickness of the anisotropic bonding film was set to 40 μm, and the anisotropic bonding film was prepared in the same manner as in Example 1-1. The forward voltage of the LED mounting body prepared using the anisotropic bonding film became OPEN, and the chip shear strength was 25 N/chip.

圖7係對比較例1-3之LED晶片剝離後之基板側之焊料接合狀態進行觀察時之顯微鏡照片。由於異向性接合膜之厚度較厚,為40μm,故焊料粒子於電極間之夾持不充分,焊料接合不充分,僅LED晶片側之部位與僅基板側之部位發現焊料粒子之潤濕擴散。 Figure 7 is a microscope photograph of the solder bonding state on the substrate side after the LED chip was peeled off in Comparative Example 1-3. Since the thickness of the anisotropic bonding film is relatively thick, at 40μm, the solder particles are not sufficiently clamped between the electrodes, and the solder bonding is insufficient. The wetting and diffusion of solder particles are only found on the side of the LED chip and the side of the substrate.

Figure 108139034-A0305-02-0021-1
Figure 108139034-A0305-02-0021-1

比較例1-1中,由於使用熔體流動速率為1g/10min之熱塑性樹脂E,故樹脂之流動性較差,焊料粒子未發生熔融,未與被接著體之電極接合。因此,無法測定順向電壓。又,由於樹脂未充分地流動,亦未形成焊料接合,故結果為LED晶片之密接性較弱,晶片剪切強度較低。 In Comparative Example 1-1, since thermoplastic resin E with a melt flow rate of 1g/10min was used, the resin had poor fluidity, the solder particles did not melt, and did not bond with the electrode of the connected body. Therefore, the forward voltage could not be measured. In addition, since the resin did not flow sufficiently and no solder joint was formed, the result was that the adhesion of the LED chip was weak and the chip shear strength was low.

比較例1-2中,由於未摻合助焊劑化合物,故焊料粒子未發生熔融,無法測定順向電壓。 In Comparative Example 1-2, since the flux compound was not mixed, the solder particles did not melt and the forward voltage could not be measured.

比較例1-3中,由於使用相對於焊料粒子之平均粒徑10μm為4倍厚度之40μm厚度之異向性接合膜,故未形成焊料接合,無法測定順向電壓。又,結果為晶片剪切強度亦較低。 In Comparative Example 1-3, since a 40μm thick anisotropic bonding film was used, which is 4 times thicker than the average particle size of the solder particles of 10μm, no solder joint was formed and the forward voltage could not be measured. In addition, the chip shear strength was also low.

另一方面,實施例1-1~實施例1-5中,由於使用熔體流動速率為1g/10min以上之熱塑性樹脂A-D,且使用相對於焊料粒子之平均粒徑10μm為2-3倍厚度之20-30μm厚度之異向性接合膜,故樹脂發生熔融、流動,藉由焊料粒 子於被接著體之電極間進行焊料接合,可獲得接近於額定電壓3.1V之值。又,結果晶片剪切強度亦良好。 On the other hand, in Examples 1-1 to 1-5, since thermoplastic resins A-D with a melt flow rate of more than 1g/10min are used, and an anisotropic bonding film with a thickness of 20-30μm, which is 2-3 times the average particle size of solder particles of 10μm, is used, the resin melts and flows, and solder bonding is performed between the electrodes of the connected body by solder particles, and a value close to the rated voltage of 3.1V can be obtained. In addition, the chip shear strength is also good.

<3.2第2實施例> <3.2 Second Implementation Example>

第2實施例中,使用含有自由基聚合性樹脂之異向性接合膜,製作LED安裝體,對LED安裝體之順向電壓、絕緣性及晶片剪切強度進行評價。由於LED安裝體之製作、LED安裝體之順向電壓、及晶片剪切(die shear)強度之測定與第1實施例相同,故此處省略說明。 In the second embodiment, an anisotropic bonding film containing a free radical polymerizable resin is used to make an LED mount, and the forward voltage, insulation and die shear strength of the LED mount are evaluated. Since the manufacture of the LED mount, the forward voltage of the LED mount, and the measurement of the die shear strength are the same as those in the first embodiment, the description is omitted here.

[固體樹脂之熔體流動速率之測定] [Determination of melt flow rate of solid resin]

依據JIS K7210:1999之求出塑性塑膠之熔體流動速率之方法,使用熔體流動速率測定裝置(品名:Melt Indexer G-02,東洋精機製作所公司製造),於溫度190℃、負載2.16kg之條件下測定熱塑性樹脂A-C、E及固體自由基聚合性樹脂之熔體流動速率。 According to the method for determining the melt flow rate of plastics in JIS K7210:1999, the melt flow rate measuring device (product name: Melt Indexer G-02, manufactured by Toyo Seiki Seisaku-sho) was used to measure the melt flow rate of thermoplastic resins A-C, E and solid free radical polymerizable resins at a temperature of 190°C and a load of 2.16 kg.

A:聚酯樹脂,Primalloy A1500(三菱化學(股)),MFR=11g/10min A: Polyester resin, Primalloy A1500 (Mitsubishi Chemical), MFR=11g/10min

B:乙烯-乙酸乙烯酯共聚樹脂,EVAFLEX EV205WR(三井杜邦化學(股)),MFR=800g/10min B: Ethylene-vinyl acetate copolymer, EVAFLEX EV205WR (Mitsui DuPont Chemicals Co., Ltd.), MFR = 800g/10min

C:乙烯丙烯酸共聚樹脂,Nucrel N1050H(杜邦(股)),MFR=500g/10min C: Ethylene acrylic acid copolymer resin, Nucrel N1050H (DuPont), MFR=500g/10min

E:苯氧樹脂、Phenotohto YP70(新日鐵住金化學(股)),MFR=1g/10min E: Phenoxy resin, Phenotohto YP70 (Nippon Steel & Sumitomo Metal Chemicals Co., Ltd.), MFR = 1g/10min

固體自由基聚合性樹脂:乙烯酯樹脂,Lipoxy VR-90,昭和電工(股),MFR=100g/10min Solid free radical polymerizable resin: vinyl ester resin, Lipoxy VR-90, Showa Denko Co., Ltd., MFR=100g/10min

[絕緣性之評價] [Evaluation of Insulation]

經由基板之圖案使反向電流0.1μA於LED晶片中流動,將未流動電流之情形評價為「OK」,將流動有電流之情形評價為「NG」。 A reverse current of 0.1μA is made to flow in the LED chip through the pattern of the substrate. The situation where no current flows is evaluated as "OK", and the situation where current flows is evaluated as "NG".

<實施例2-1> <Implementation Example 2-1>

如表2所示,以特定之質量份摻合熱塑性樹脂A、液狀自由基聚合性樹脂(氫 化雙酚A二環氧丙醚,Avolites 4000,共榮社化學(股))、起始劑(二醯基過氧化物,Perhexa 25B,日油(股))、助焊劑化合物A(戊二酸(1,3-丙烷二羧酸),和光純藥(股))、焊料粒子(42Sn-58Bi,Type6,熔點139℃,平均粒徑10μm,三井金屬(股))、氧化鈦(平均粒徑0.21μm,CR-60,石原產業(股)),製得異向性接合膜。 As shown in Table 2, a thermoplastic resin A, a liquid radical polymerizable resin (bisphenol A diglycidyl ether, Avolites 4000, Kyoeisha Chemical Co., Ltd.), an initiator (diacyl peroxide, Perhexa 25B, NOF Corporation), a flux compound A (glutaric acid (1,3-propanedicarboxylic acid), Wako Pure Chemical Industries, Ltd.), solder particles (42Sn-58Bi, Type 6, melting point 139°C, average particle size 10μm, Mitsui Metals Co., Ltd.), and titanium oxide (average particle size 0.21μm, CR-60, Ishihara Industry Co., Ltd.) were mixed with specific mass fractions to produce an anisotropic bonding film.

利用甲苯使熱塑性樹脂A、及液狀自由基聚合性樹脂混合溶解,向其中投入助焊劑化合物A、及氧化鈦,利用三輥研磨機(以間隙10μm通過3次)使其分散後,使起始劑與焊料粒子分散,藉此獲得樹脂溶液。利用間隙塗佈機將該樹脂溶液以甲苯乾燥後之厚度為20μm之方式塗佈於剝離PET(PET-02-BU,Shikoku-Tohcello(股))上而製作。甲苯乾燥係於80℃-10min之條件下進行。 Thermoplastic resin A and liquid free radical polymerizable resin were mixed and dissolved in toluene, flux compound A and titanium oxide were added thereto, and dispersed using a three-roll mill (passed 3 times with a gap of 10μm), and then the initiator and solder particles were dispersed to obtain a resin solution. The resin solution was coated on a peeling PET (PET-02-BU, Shikoku-Tohcello (stock)) using a gap coater in a manner such that the thickness after toluene drying was 20μm. Toluene drying was performed under the condition of 80℃-10min.

如表2所示,使用異向性接合膜製得之LED安裝體之順向電壓為3.1V,絕緣性為OK,晶片剪切強度為42N/chip。 As shown in Table 2, the forward voltage of the LED mount made using anisotropic bonding film is 3.1V, the insulation is OK, and the chip shear strength is 42N/chip.

<實施例2-2> <Implementation Example 2-2>

如表2所示,使用熱塑性樹脂B代替熱塑性樹脂A,除此以外與實施例2-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為3.0V,絕緣性為OK,晶片剪切強度為46N/chip。 As shown in Table 2, thermoplastic resin B was used instead of thermoplastic resin A, and the anisotropic bonding film was prepared in the same manner as in Example 2-1. The LED mounting body prepared using the anisotropic bonding film had a forward voltage of 3.0 V, an insulation property of OK, and a chip shear strength of 46 N/chip.

<實施例2-3> <Implementation Example 2-3>

如表2所示,使用熱塑性樹脂C代替熱塑性樹脂A,除此以外與實施例2-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為3.0V,絕緣性為OK,晶片剪切強度為41N/chip。 As shown in Table 2, thermoplastic resin C was used instead of thermoplastic resin A, and the anisotropic bonding film was prepared in the same manner as in Example 2-1. The LED mounting body prepared using the anisotropic bonding film had a forward voltage of 3.0 V, an insulation property of OK, and a chip shear strength of 41 N/chip.

<實施例2-4> <Implementation Example 2-4>

如表2所示,使用固體自由基聚合性樹脂代替熱塑性樹脂A,除此以外與實施例2-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為3.0V,絕緣性為OK,晶片剪切強度為47N/chip。 As shown in Table 2, a solid free radical polymerizable resin was used instead of thermoplastic resin A, and an anisotropic bonding film was prepared in the same manner as in Example 2-1. The LED mounting body prepared using the anisotropic bonding film had a forward voltage of 3.0 V, an insulation property of OK, and a chip shear strength of 47 N/chip.

<實施例2-5> <Implementation Example 2-5>

如表2所示,使用助焊劑化合物B(封端化羧酸,Santacid G,日油(股))代替助焊劑化合物A,除此以外與實施例2-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為3.0V,絕緣性為OK,晶片剪切強度為46N/chip。 As shown in Table 2, flux compound B (blocked carboxylic acid, Santacid G, NOF Corporation) was used instead of flux compound A, and the anisotropic bonding film was prepared in the same manner as in Example 2-1. The LED mounting body prepared using the anisotropic bonding film had a forward voltage of 3.0 V, an insulation property of OK, and a chip shear strength of 46 N/chip.

<實施例2-6> <Implementation Example 2-6>

如表2所示,將異向性接合膜之厚度設為30μm,除此以外與實施例2-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為3.1V,絕緣性為OK,晶片剪切強度為49N/chip。 As shown in Table 2, the thickness of the anisotropic bonding film was set to 30 μm, and the anisotropic bonding film was prepared in the same manner as in Example 2-1. The forward voltage of the LED mounting body prepared using the anisotropic bonding film was 3.1 V, the insulation was OK, and the chip shear strength was 49 N/chip.

<比較例2-1> <Comparison Example 2-1>

如表2所示,於利用反應性稀釋劑(丙烯酸四氫糠酯,Viscoat#150,大阪有機化學工業(股))使熱塑性樹脂E溶解後,使自由基聚合性樹脂、起始劑、助焊劑化合物A、氧化鈦、及焊料粒子進行混合分散,藉此製得異向性接合膏。 As shown in Table 2, after the thermoplastic resin E is dissolved by using a reactive diluent (tetrahydrofurfuryl acrylate, Viscoat #150, Osaka Organic Chemical Industry Co., Ltd.), a free radical polymerizable resin, an initiator, a flux compound A, titanium oxide, and solder particles are mixed and dispersed to prepare an anisotropic bonding paste.

準備LED晶片(Dexerials評價用LED晶片,尺寸45mil,If=350mA,Vf=3.1V,Au-Sn墊,墊尺寸300μm×800μm,墊間距離200μm)、與基板(Dexerials評價用陶瓷基板,18μm厚Cu圖案,Ni-Au鍍覆,圖案間(間隙)50μm)。使用厚度30μm之遮罩,將異向性接合膏塗佈於基板上,使LED晶片對準搭載後,藉由回焊(峰值溫度260℃)安裝LED晶片。 Prepare LED chips (Dexerials evaluation LED chips, size 45mil, If=350mA, Vf=3.1V, Au-Sn pads, pad size 300μm×800μm, pad spacing 200μm) and substrates (Dexerials evaluation ceramic substrates, 18μm thick Cu patterns, Ni-Au coating, pattern spacing (gap) 50μm). Use a 30μm thick mask to apply anisotropic bonding paste on the substrate, align the LED chips and mount them, then install the LED chips by reflow (peak temperature 260℃).

如表2所示,使用異向性接合膏製得之LED安裝體之順向電壓為3.0V,絕緣性為NG,晶片剪切強度為45N/chip。 As shown in Table 2, the forward voltage of the LED mount made using anisotropic bonding paste is 3.0V, the insulation is NG, and the chip shear strength is 45N/chip.

<比較例2-2> <Comparison Example 2-2>

如表2所示,使用熱塑性樹脂E代替熱塑性樹脂A,除此以外與實施例2-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為OPEN,絕緣性為OK,晶片剪切強度為19N/chip。 As shown in Table 2, thermoplastic resin E was used instead of thermoplastic resin A, and the anisotropic bonding film was prepared in the same manner as in Example 2-1. The forward voltage of the LED mounting body prepared using the anisotropic bonding film was OPEN, the insulation was OK, and the chip shear strength was 19N/chip.

<比較例2-3> <Comparison Example 2-3>

如表2所示,未摻合助焊劑化合物,除此以外與實施例2-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為OPEN,絕緣性為OK,晶片剪切強度為19N/chip。 As shown in Table 2, the anisotropic bonding film was prepared in the same manner as Example 2-1 except that the flux compound was not mixed. The forward voltage of the LED mounting body prepared using the anisotropic bonding film was OPEN, the insulation was OK, and the chip shear strength was 19N/chip.

<比較例2-4> <Comparison Example 2-4>

如表2所示,將異向性接合膜之厚度設為40μm,除此以外與實施例2-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為OPEN,絕緣性為OK,晶片剪切強度為26N/chip。 As shown in Table 2, the thickness of the anisotropic bonding film was set to 40 μm, and the anisotropic bonding film was prepared in the same manner as in Example 2-1. The forward voltage of the LED mounting body prepared using the anisotropic bonding film was OPEN, the insulation was OK, and the chip shear strength was 26 N/chip.

Figure 108139034-A0305-02-0026-2
Figure 108139034-A0305-02-0026-2

比較例2-1中,由於使用熔體流動速率為1g/10min之熱塑性樹脂E,塗佈膏狀之異向性接合材料,故基板之相鄰端子間產生因焊料接合所致之短路。 In Comparative Example 2-1, since a thermoplastic resin E with a melt flow rate of 1g/10min was used to apply anisotropic bonding material in a paste form, a short circuit caused by solder bonding occurred between adjacent terminals of the substrate.

比較例2-2中,由於使用熔體流動速率為1g/10min之熱塑性樹脂E,故樹脂之流動性較差,焊料粒子未發生熔融,未與被接著體之電極接合。因此,無法測定順向電壓。又,由於樹脂未充分地流動,亦未形成焊料接合,故結果LED晶片之密接性較弱,晶片剪切強度較低。 In Comparative Example 2-2, since thermoplastic resin E with a melt flow rate of 1g/10min was used, the resin had poor fluidity, the solder particles did not melt, and did not bond with the electrode of the connected body. Therefore, the forward voltage could not be measured. In addition, since the resin did not flow sufficiently and no solder joint was formed, the LED chip had weak adhesion and low chip shear strength.

比較例2-3中,由於未摻合助焊劑化合物,故焊料粒子未發生熔融,無法測定順向電壓。 In Comparative Example 2-3, since the flux compound was not mixed, the solder particles did not melt and the forward voltage could not be measured.

比較例2-4中,由於使用相對於焊料粒子之平均粒徑10μm為4倍厚度之40μm厚度之異向性接合膜,故未形成焊料接合,無法測定順向電壓。又,結果晶片剪切強度亦較低。 In Comparative Example 2-4, since a 40μm thick anisotropic bonding film was used, which is 4 times thicker than the average particle size of the solder particles of 10μm, no solder joint was formed and the forward voltage could not be measured. In addition, the chip shear strength was also lower.

另一方面,實施例2-1~實施例2-5中,由於使用熔體流動速率為1g/10min以上之熱塑性樹脂A-D,使用相對於焊料粒子之平均粒徑10μm為2-3倍厚度之20-30μm厚度之異向性接合膜,故樹脂發生熔融、流動,藉由焊料粒子於被接著體之電極間進行焊料接合,可獲得接近於額定電壓3.1V之值。又,結果晶片剪切強度亦良好。 On the other hand, in Examples 2-1 to 2-5, since thermoplastic resins A-D with a melt flow rate of more than 1g/10min are used, and an anisotropic bonding film with a thickness of 20-30μm, which is 2-3 times the average particle size of the solder particles of 10μm, is used, the resin melts and flows, and solder bonding is performed between the electrodes of the connected body by soldering the solder particles, and a value close to the rated voltage of 3.1V can be obtained. In addition, the chip shear strength is also good.

<3.3第3實施例> <3.3 Implementation Example 3>

第3實施例中,使用含有環氧樹脂之異向性接合膜製作LED安裝體,對LED安裝體之順向電壓、絕緣性及晶片剪切強度進行評價。由於LED安裝體之製作、LED安裝體之順向電壓、及晶片剪切強度之測定與第1實施例相同,且LED安裝體之絕緣性之評價與第2實施例相同,故此處省略說明。 In the third embodiment, an anisotropic bonding film containing epoxy resin is used to make an LED mount, and the forward voltage, insulation and chip shear strength of the LED mount are evaluated. Since the manufacture of the LED mount, the measurement of the forward voltage of the LED mount, and the chip shear strength are the same as those in the first embodiment, and the evaluation of the insulation of the LED mount is the same as that in the second embodiment, the description is omitted here.

[固體樹脂之熔體流動速率之測定] [Determination of melt flow rate of solid resin]

依據JIS K7210:1999之求出塑性塑膠之熔體流動速率之方法,使用熔體流 動速率測定裝置(品名:Melt Indexer G-02,東洋精機製作所公司製造),於溫度190℃、負載2.16kg之條件下測定熱塑性樹脂A-C、E及固體環氧樹脂之熔體流動速率。 According to the method for determining the melt flow rate of plastics in JIS K7210:1999, the melt flow rate measuring device (product name: Melt Indexer G-02, manufactured by Toyo Seiki Seisaku-sho) was used to measure the melt flow rate of thermoplastic resins A-C, E and solid epoxy resin at a temperature of 190°C and a load of 2.16 kg.

A:聚酯樹脂,Primalloy A1500(三菱化學(股)),MFR=11g/10min A: Polyester resin, Primalloy A1500 (Mitsubishi Chemical), MFR=11g/10min

B:乙烯-乙酸乙烯酯共聚樹脂,EVAFLEX EV205WR(三井杜邦化學(股)),MFR=800g/10min B: Ethylene-vinyl acetate copolymer, EVAFLEX EV205WR (Mitsui DuPont Chemicals Co., Ltd.), MFR = 800g/10min

C:乙烯丙烯酸共聚樹脂,Nucrel N1050H(杜邦(股)),MFR=500g/10min C: Ethylene acrylic acid copolymer resin, Nucrel N1050H (DuPont), MFR=500g/10min

E:苯氧樹脂、Phenotohto YP70(新日鐵住金化學(股)),MFR=1g/10min E: Phenoxy resin, Phenotohto YP70 (Nippon Steel & Sumitomo Metal Chemicals Co., Ltd.), MFR = 1g/10min

固體環氧樹脂:雙酚A型環氧樹脂,1001,三菱化學(股),MFR=2600g/10min Solid epoxy resin: Bisphenol A epoxy resin, 1001, Mitsubishi Chemical Co., Ltd., MFR=2600g/10min

<實施例3-1> <Implementation Example 3-1>

如表3所示,以特定之質量份摻合熱塑性樹脂A、液狀環氧樹脂(雙酚A型環氧樹脂,YL980,三菱化學(股))、硬化劑A(陰離子硬化劑,微膠囊型咪唑硬化劑,HX3941HP,旭化成(股))、助焊劑化合物A(戊二酸(1,3-丙烷二羧酸),和光純藥(股))、焊料粒子(42Sn-58Bi,Type6,熔點139℃,平均粒徑10μm,三井金屬(股))、氧化鈦(平均粒徑0.21μm,CR-60,石原產業(股)),製得異向性接合膜。 As shown in Table 3, thermoplastic resin A, liquid epoxy resin (bisphenol A type epoxy resin, YL980, Mitsubishi Chemical Co., Ltd.), hardener A (anionic hardener, microcapsule type imidazole hardener, HX3941HP, Asahi Kasei Co., Ltd.), flux compound A (glutaric acid (1,3-propanedicarboxylic acid), Wako Pure Chemical Industries, Ltd.), solder particles (42Sn-58Bi, Type 6, melting point 139°C, average particle size 10μm, Mitsui Metals Co., Ltd.), and titanium oxide (average particle size 0.21μm, CR-60, Ishihara Sangyo Co., Ltd.) were mixed with specific mass fractions to produce an anisotropic bonding film.

利用甲苯使熱塑性樹脂A、及液狀環氧樹脂混合溶解,向其中投入助焊劑化合物A、及氧化鈦,利用三輥研磨機(以間隙10μm通過3次)使其分散後,使硬化劑A與焊料粒子分散,藉此獲得樹脂溶液。利用間隙塗佈機將該樹脂溶液以甲苯乾燥後之厚度為20μm之方式塗佈於剝離PET(PET-02-BU,Shikoku-Tohcello(股))上而製作。甲苯乾燥係於80℃-10min之條件下進行。 Thermoplastic resin A and liquid epoxy resin were mixed and dissolved in toluene, and flux compound A and titanium oxide were added thereto. After being dispersed using a three-roll grinder (passed 3 times with a gap of 10μm), hardener A and solder particles were dispersed to obtain a resin solution. The resin solution was coated on a peeling PET (PET-02-BU, Shikoku-Tohcello (stock)) using a gap coater in a manner such that the thickness after toluene drying was 20μm. Toluene drying was performed under the condition of 80℃-10min.

如表3所示,使用異向性接合膜製得之LED安裝體之順向電壓為3.1V,絕緣性為OK,晶片剪切強度為43N/chip。 As shown in Table 3, the forward voltage of the LED mount made using anisotropic bonding film is 3.1V, the insulation is OK, and the chip shear strength is 43N/chip.

<實施例3-2> <Implementation Example 3-2>

如表3所示,使用熱塑性樹脂B代替熱塑性樹脂A,除此以外與實施例3-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為3.0V,絕緣性為OK,晶片剪切強度為46N/chip。 As shown in Table 3, thermoplastic resin B was used instead of thermoplastic resin A, and the anisotropic bonding film was prepared in the same manner as in Example 3-1. The LED mounting body prepared using the anisotropic bonding film had a forward voltage of 3.0 V, an insulation property of OK, and a chip shear strength of 46 N/chip.

<實施例3-3> <Implementation Example 3-3>

如表3所示,使用熱塑性樹脂C代替熱塑性樹脂A,除此以外與實施例3-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為3.0V,絕緣性為OK,晶片剪切強度為41N/chip。 As shown in Table 3, thermoplastic resin C was used instead of thermoplastic resin A, and the anisotropic bonding film was prepared in the same manner as in Example 3-1. The LED mounting body prepared using the anisotropic bonding film had a forward voltage of 3.0 V, an insulation property of OK, and a chip shear strength of 41 N/chip.

<實施例3-4> <Implementation Example 3-4>

如表3所示,使用固體環氧樹脂代替熱塑性樹脂A,除此以外與實施例3-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為3.0V,絕緣性為OK,晶片剪切強度為47N/chip。 As shown in Table 3, a solid epoxy resin was used instead of thermoplastic resin A, and an anisotropic bonding film was prepared in the same manner as in Example 3-1. The LED mounting body prepared using the anisotropic bonding film had a forward voltage of 3.0 V, an insulation property of OK, and a chip shear strength of 47 N/chip.

<實施例3-5> <Implementation Example 3-5>

如表3所示,使用硬化劑B(陽離子硬化劑,鋶鹽,San-Aid SI-80L,三新化學公司製造)代替硬化劑A,並調整液狀環氧樹脂之摻合比,除此以外與實施例3-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為3.0V,絕緣性為OK,晶片剪切強度為46N/chip。 As shown in Table 3, hardener B (cationic hardener, cobalt salt, San-Aid SI-80L, manufactured by Sanshin Chemical Co., Ltd.) was used instead of hardener A, and the blending ratio of the liquid epoxy resin was adjusted. The anisotropic bonding film was prepared in the same manner as in Example 3-1. The LED mounting body prepared using the anisotropic bonding film had a forward voltage of 3.0 V, an insulation property of OK, and a chip shear strength of 46 N/chip.

<實施例3-6> <Implementation Example 3-6>

如表3所示,使用助焊劑化合物B(封端化羧酸,Santacid G,日油(股))代替助焊劑化合物A,除此以外與實施例3-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為3.0V,絕緣性為OK,晶片剪切強度為44N/chip。 As shown in Table 3, flux compound B (blocked carboxylic acid, Santacid G, NOF Corporation) was used instead of flux compound A, and the anisotropic bonding film was prepared in the same manner as in Example 3-1. The LED mounting body prepared using the anisotropic bonding film had a forward voltage of 3.0 V, an insulation property of OK, and a chip shear strength of 44 N/chip.

<實施例3-7> <Implementation Example 3-7>

如表3所示,將異向性接合膜之厚度設為30μm,除此以外與實施例3-1同樣 地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為3.1V,絕緣性為OK,晶片剪切強度為49N/chip。 As shown in Table 3, the thickness of the anisotropic bonding film was set to 30 μm, and the anisotropic bonding film was prepared in the same manner as in Example 3-1. The forward voltage of the LED mounting body prepared using the anisotropic bonding film was 3.1 V, the insulation was OK, and the chip shear strength was 49 N/chip.

<比較例3-1> <Comparison Example 3-1>

如表3所示,藉由使液狀環氧樹脂、硬化劑A、助焊劑化合物A、氧化鈦、及焊料粒子進行混合分散,從而製得異向性接合膏。 As shown in Table 3, an anisotropic bonding paste is prepared by mixing and dispersing liquid epoxy resin, hardener A, flux compound A, titanium oxide, and solder particles.

準備LED晶片(Dexerials評價用LED晶片,尺寸45mil,If=350mA,Vf=3.1V,Au-Sn墊,墊尺寸300μm×800μm,墊間距離200μm)、與基板(Dexerials評價用陶瓷基板,18μm厚Cu圖案,Ni-Au鍍覆,圖案間(間隙)50μm)。使用厚度30μm之遮罩,將異向性接合膏塗佈於基板上,使LED晶片對準搭載後,藉由回焊(峰值溫度260℃)安裝LED晶片。 Prepare LED chips (Dexerials evaluation LED chips, size 45mil, If=350mA, Vf=3.1V, Au-Sn pads, pad size 300μm×800μm, pad spacing 200μm) and substrates (Dexerials evaluation ceramic substrates, 18μm thick Cu patterns, Ni-Au coating, pattern spacing (gap) 50μm). Use a 30μm thick mask to apply anisotropic bonding paste on the substrate, align the LED chips and mount them, then install the LED chips by reflow (peak temperature 260℃).

如表3所示,使用異向性接合膏製得之LED安裝體之順向電壓為3.0V,絕緣性為NG,晶片剪切強度為45N/chip。 As shown in Table 3, the forward voltage of the LED mount made using anisotropic bonding paste is 3.0V, the insulation is NG, and the chip shear strength is 45N/chip.

<比較例3-2> <Comparison Example 3-2>

如表2所示,使用熱塑性樹脂E代替熱塑性樹脂A,除此以外與實施例3-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為OPEN,絕緣性為OK,晶片剪切強度為19N/chip。 As shown in Table 2, thermoplastic resin E was used instead of thermoplastic resin A, and the anisotropic bonding film was prepared in the same manner as in Example 3-1. The forward voltage of the LED mounting body prepared using the anisotropic bonding film was OPEN, the insulation was OK, and the chip shear strength was 19N/chip.

<比較例3-3> <Comparison Example 3-3>

如表3所示,未摻合助焊劑化合物,除此以外與實施例3-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為OPEN,絕緣性為OK,晶片剪切強度為19N/chip。 As shown in Table 3, the anisotropic bonding film was prepared in the same manner as Example 3-1 except that the flux compound was not mixed. The forward voltage of the LED mounting body prepared using the anisotropic bonding film was OPEN, the insulation was OK, and the chip shear strength was 19N/chip.

<比較例3-4> <Comparison Example 3-4>

如表3所示,將異向性接合膜之厚度設為40μm,除此以外與實施例3-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為OPEN,絕緣性為OK,晶片剪切強度為26N/chip。 As shown in Table 3, the thickness of the anisotropic bonding film was set to 40 μm, and the anisotropic bonding film was prepared in the same manner as in Example 3-1. The forward voltage of the LED mounting body prepared using the anisotropic bonding film was OPEN, the insulation was OK, and the chip shear strength was 26 N/chip.

Figure 108139034-A0305-02-0031-5
Figure 108139034-A0305-02-0031-5

比較例3-1中,由於使用液狀環氧樹脂,塗佈膏狀之異向性接合材料,故於基板之相鄰端子間產生因焊料接合所致之短路。 In Comparative Example 3-1, since liquid epoxy was used to apply the paste-like anisotropic bonding material, a short circuit caused by solder bonding occurred between adjacent terminals on the substrate.

比較例3-2中,由於使用熔體流動速率為1g/10min之熱塑性樹脂E,故樹脂之流動性較差,焊料粒子未發生熔融,未與被接著體之電極接合。因此,無法測定順向電壓。又,由於樹脂未充分地流動,亦未形成焊料接合,故結果LED晶片之密接性較弱,晶片剪切強度較低。 In Comparative Example 3-2, since thermoplastic resin E with a melt flow rate of 1g/10min was used, the resin had poor fluidity, the solder particles did not melt, and did not bond with the electrode of the connected body. Therefore, the forward voltage could not be measured. In addition, since the resin did not flow sufficiently and no solder joint was formed, the LED chip had weak adhesion and low chip shear strength.

比較例3-3中,由於未摻合助焊劑化合物,故焊料粒子未發生熔融,無法測定順向電壓。 In Comparative Example 3-3, since the flux compound was not mixed, the solder particles did not melt and the forward voltage could not be measured.

比較例3-4中,由於使用相對於焊料粒子之平均粒徑10μm為4倍厚度之40μm厚度之異向性接合膜,故未形成焊料接合,無法測定順向電壓。又,結果晶片剪切強度亦較低。 In Comparative Example 3-4, since a 40μm thick anisotropic bonding film was used, which is 4 times thicker than the average particle size of the solder particles of 10μm, no solder joint was formed and the forward voltage could not be measured. In addition, the chip shear strength was also lower.

另一方面,實施例3-1~實施例3-7中,由於使用熔體流動速率為1g/10min以上之熱塑性樹脂A-D,且使用相對於焊料粒子之平均粒徑10μm為2-3倍厚度之20-30μm厚度之異向性接合膜,故樹脂發生熔融、流動,藉由焊料粒子於被接著體之電極間進行焊料接合,可獲得接近於額定電壓3.1V之值。又,結果晶片剪切強度亦良好。又,即便使用實施例3-6之利用乙烯醚使羧基封端而成之封端化助焊劑化合物,亦可獲得良好之結果。 On the other hand, in Examples 3-1 to 3-7, since thermoplastic resins A-D with a melt flow rate of more than 1g/10min are used, and an anisotropic bonding film with a thickness of 20-30μm, which is 2-3 times the average particle size of the solder particles of 10μm, is used, the resin melts and flows, and solder bonding is performed between the electrodes of the connected body by soldering the solder particles, and a value close to the rated voltage of 3.1V can be obtained. In addition, the chip shear strength is also good. In addition, even if the capped flux compound formed by capping the carboxyl group with vinyl ether in Example 3-6 is used, good results can be obtained.

<3.4第4實施例> <3.4 Implementation Example 4>

第4實施例中,使用含有羧酸作為助焊劑化合物之異向性接合膜製作LED安裝體,對LED安裝體之順向電壓、絕緣性及晶片剪切強度進行評價。由於LED安裝體之製作、LED安裝體之順向電壓、及晶片剪切強度之測定與第1實施例相同,且LED安裝體之絕緣性之評價與第2實施例相同,故此處省略說明。 In the fourth embodiment, an LED mounting body is manufactured using an anisotropic bonding film containing carboxylic acid as a flux compound, and the forward voltage, insulation and chip shear strength of the LED mounting body are evaluated. Since the manufacture of the LED mounting body, the measurement of the forward voltage of the LED mounting body, and the chip shear strength are the same as those in the first embodiment, and the evaluation of the insulation of the LED mounting body is the same as that in the second embodiment, the description is omitted here.

[固體樹脂之熔體流動速率之測定] [Determination of melt flow rate of solid resin]

依據JIS K7210:1999之求出塑性塑膠之熔體流動速率之方法,使用熔體流 動速率測定裝置(品名:Melt Indexer G-02,東洋精機製作所公司製造),於溫度190℃、負載2.16kg之條件下測定熱塑性樹脂A、E及固體環氧樹脂之熔體流動速率。 According to the method for determining the melt flow rate of plastics in JIS K7210:1999, the melt flow rate measuring device (product name: Melt Indexer G-02, manufactured by Toyo Seiki Seisaku-sho) was used to measure the melt flow rate of thermoplastic resins A, E and solid epoxy resin at a temperature of 190°C and a load of 2.16 kg.

A:聚酯樹脂,Primalloy A1500(三菱化學(股)),MFR=11g/10min A: Polyester resin, Primalloy A1500 (Mitsubishi Chemical), MFR=11g/10min

E:苯氧樹脂,Phenotohto YP70(新日鐵住金化學(股)),MFR=1g/10min E: Phenoxy resin, Phenotohto YP70 (Nippon Steel & Sumitomo Metal Chemicals Co., Ltd.), MFR = 1g/10min

固體環氧樹脂:雙酚A型環氧樹脂,1001,三菱化學(股),MFR=2600g/10min Solid epoxy resin: Bisphenol A epoxy resin, 1001, Mitsubishi Chemical Co., Ltd., MFR=2600g/10min

<實施例4-1> <Implementation Example 4-1>

如表4所示,以特定之質量份摻合熱塑性樹脂A、液狀環氧樹脂(雙酚A型環氧樹脂,YL980,三菱化學(股))、助焊劑化合物A(戊二酸(1,3-丙烷二羧酸),和光純藥(股))、焊料粒子(42Sn-58Bi,Type6,熔點139℃,平均粒徑10μm、三井金屬(股))、氧化鈦(平均粒徑0.21μm,CR-60,石原產業(股)),製得異向性接合膜。 As shown in Table 4, thermoplastic resin A, liquid epoxy resin (bisphenol A type epoxy resin, YL980, Mitsubishi Chemical Co., Ltd.), flux compound A (glutaric acid (1,3-propanedicarboxylic acid), Wako Pure Chemical Industries, Ltd.), solder particles (42Sn-58Bi, Type 6, melting point 139°C, average particle size 10μm, Mitsui Metals Co., Ltd.), and titanium oxide (average particle size 0.21μm, CR-60, Ishihara Sangyo Co., Ltd.) were mixed with specific mass fractions to produce an anisotropic bonding film.

利用甲苯使熱塑性樹脂A、及液狀環氧樹脂混合溶解,向其中投入助焊劑化合物A、及氧化鈦,利用三輥研磨機(以間隙10μm通過3次)使其分散後,使焊料粒子分散,藉此獲得樹脂溶液。利用間隙塗佈機將該樹脂溶液以甲苯乾燥後之厚度為20μm之方式塗佈於剝離PET(PET-02-BU,Shikoku-Tohcello(股))上而製作。甲苯乾燥係於80℃-10min之條件下進行。 Thermoplastic resin A and liquid epoxy resin were mixed and dissolved in toluene, and flux compound A and titanium oxide were added thereto. After being dispersed by a three-roll grinder (passed 3 times with a gap of 10 μm), solder particles were dispersed to obtain a resin solution. The resin solution was coated on a peeling PET (PET-02-BU, Shikoku-Tohcello (stock)) with a gap coater in a manner such that the thickness after toluene drying was 20 μm. Toluene drying was performed under the condition of 80°C-10min.

如表4所示,使用異向性接合膜製得之LED安裝體之順向電壓為3.1V,絕緣性為OK,晶片剪切強度為44N/chip。 As shown in Table 4, the forward voltage of the LED mount made using anisotropic bonding film is 3.1V, the insulation is OK, and the chip shear strength is 44N/chip.

<實施例4-2> <Implementation Example 4-2>

如表4所示,使用固體環氧樹脂代替熱塑性樹脂A,除此以外與實施例4-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為3.1V,絕緣性為OK,晶片剪切強度為45N/chip。 As shown in Table 4, a solid epoxy resin was used instead of thermoplastic resin A, and an anisotropic bonding film was prepared in the same manner as in Example 4-1. The forward voltage of the LED mounting body prepared using the anisotropic bonding film was 3.1V, the insulation was OK, and the chip shear strength was 45N/chip.

<實施例4-3> <Implementation Example 4-3>

如表4所示,使用助焊劑化合物B(封端化羧酸,Santacid G,日油(股))代替助焊劑化合物A,除此以外與實施例4-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為3.0V,絕緣性為OK,晶片剪切強度為44N/chip。 As shown in Table 4, flux compound B (blocked carboxylic acid, Santacid G, NOF Corporation) was used instead of flux compound A, and the anisotropic bonding film was prepared in the same manner as in Example 4-1. The LED mounting body prepared using the anisotropic bonding film had a forward voltage of 3.0 V, an insulation property of OK, and a chip shear strength of 44 N/chip.

<實施例4-4> <Implementation Example 4-4>

如表4所示,將異向性接合膜之厚度設為30μm,除此以外與實施例4-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為3.1V,絕緣性為OK,晶片剪切強度為48N/chip。 As shown in Table 4, the thickness of the anisotropic bonding film was set to 30 μm, and the anisotropic bonding film was prepared in the same manner as in Example 4-1. The forward voltage of the LED mounting body prepared using the anisotropic bonding film was 3.1 V, the insulation was OK, and the chip shear strength was 48 N/chip.

<比較例4-1> <Comparison Example 4-1>

如表4所示,藉由使液狀環氧樹脂、硬化劑A、助焊劑化合物B、氧化鈦、及焊料粒子進行混合分散,從而製作異向性接合膏。 As shown in Table 4, an anisotropic bonding paste is prepared by mixing and dispersing liquid epoxy resin, hardener A, flux compound B, titanium oxide, and solder particles.

準備LED晶片(Dexerials評價用LED晶片,尺寸45mil,If=350mA,Vf=3.1V,Au-Sn墊,墊尺寸300μm×800μm,墊間距離200μm)、與基板(Dexerials評價用陶瓷基板,18μm厚Cu圖案,Ni-Au鍍覆,圖案間(間隙)50μm)。使用厚度30μm之遮罩,將異向性接合膏塗佈於基板上,使LED晶片對準搭載後,藉由回焊(峰值溫度260℃)安裝LED晶片。 Prepare LED chips (Dexerials evaluation LED chips, size 45mil, If=350mA, Vf=3.1V, Au-Sn pads, pad size 300μm×800μm, pad spacing 200μm) and substrates (Dexerials evaluation ceramic substrates, 18μm thick Cu patterns, Ni-Au coating, pattern spacing (gap) 50μm). Use a 30μm thick mask to apply anisotropic bonding paste on the substrate, align the LED chips and mount them, then install the LED chips by reflow (peak temperature 260℃).

如表4所示,使用異向性接合膏製得之LED安裝體之順向電壓為3.0V,絕緣性為NG,晶片剪切強度為45N/chip。 As shown in Table 4, the forward voltage of the LED mount made using anisotropic bonding paste is 3.0V, the insulation is NG, and the chip shear strength is 45N/chip.

<比較例4-2> <Comparison Example 4-2>

如表4所示,使用熱塑性樹脂E代替熱塑性樹脂A,除此以外與實施例4-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為OPEN,絕緣性為OK,晶片剪切強度為19N/chip。 As shown in Table 4, thermoplastic resin E was used instead of thermoplastic resin A, and the anisotropic bonding film was prepared in the same manner as in Example 4-1. The forward voltage of the LED mounting body prepared using the anisotropic bonding film was OPEN, the insulation was OK, and the chip shear strength was 19N/chip.

<比較例4-3> <Comparison Example 4-3>

如表4所示,未摻合助焊劑化合物,除此以外與實施例4-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為OPEN,絕緣性為OK,晶片剪切強度為18N/chip。 As shown in Table 4, the anisotropic bonding film was prepared in the same manner as Example 4-1 except that the flux compound was not mixed. The forward voltage of the LED mounting body prepared using the anisotropic bonding film was OPEN, the insulation was OK, and the chip shear strength was 18N/chip.

<比較例4-4> <Comparison Example 4-4>

如表4所示,將異向性接合膜之厚度設為40μm,除此以外與實施例4-1同樣地製得異向性接合膜。使用異向性接合膜製得之LED安裝體之順向電壓為OPEN,絕緣性為OK,晶片剪切強度為25N/chip。 As shown in Table 4, the thickness of the anisotropic bonding film was set to 40 μm, and the anisotropic bonding film was prepared in the same manner as in Example 4-1. The forward voltage of the LED mounting body prepared using the anisotropic bonding film was OPEN, the insulation was OK, and the chip shear strength was 25 N/chip.

Figure 108139034-A0305-02-0036-6
Figure 108139034-A0305-02-0036-6

比較例4-1中,由於未摻合固體樹脂,而塗佈膏狀之異向性接合材料,故於基板之相鄰端子間產生因焊料接合所致之短路。 In Comparative Example 4-1, since a paste-like anisotropic bonding material was applied without mixing with a solid resin, a short circuit caused by solder bonding occurred between adjacent terminals of the substrate.

比較例4-2中,由於使用熔體流動速率為1g/10min之熱塑性樹脂E,故樹脂之流動性較差,焊料粒子未發生熔融,未與被接著體之電極接合。因此,無法測定順向電壓。又,由於樹脂未充分地流動,未形成焊料接合,故結果LED晶片之密接性較弱,晶片剪切強度較低。 In Comparative Example 4-2, since thermoplastic resin E with a melt flow rate of 1g/10min was used, the resin had poor fluidity, the solder particles did not melt, and did not bond with the electrode of the connected body. Therefore, the forward voltage could not be measured. In addition, since the resin did not flow sufficiently and no solder joint was formed, the LED chip had weak adhesion and low chip shear strength.

比較例4-3中,由於未摻合助焊劑化合物,故焊料粒子未發生熔融,無法測定順向電壓。 In Comparative Example 4-3, since the flux compound was not mixed, the solder particles did not melt and the forward voltage could not be measured.

比較例4-4中,由於使用相對於焊料粒子之平均粒徑10μm為4倍厚度之40μm厚度之異向性接合膜,故未形成焊料接合,無法測定順向電壓。又,結果晶片剪切強度亦較低。 In Comparative Example 4-4, since a 40μm thick anisotropic bonding film was used, which is 4 times thicker than the average particle size of the solder particles of 10μm, no solder joint was formed and the forward voltage could not be measured. In addition, the chip shear strength was also lower.

另一方面,實施例4-1~實施例4-4中,由於使用熔體流動速率為1g/10min以上之熱塑性樹脂A或固體環氧樹脂,且使用相對於焊料粒子之平均粒徑10μm為2-3倍厚度之20-30μm厚度之異向性接合膜,故樹脂發生熔融、流動,藉由焊料粒子於被接著體之電極間進行焊料接合,可獲得接近於額定電壓3.1V之值。又,結果晶片剪切強度亦良好。又,實施例4-3中,即便使用助焊劑化合物作為硬化劑,亦可獲得良好之結果。 On the other hand, in Examples 4-1 to 4-4, since a thermoplastic resin A or solid epoxy resin having a melt flow rate of more than 1g/10min is used, and an anisotropic bonding film having a thickness of 20-30μm, which is 2-3 times the average particle size of the solder particles of 10μm, is used, the resin melts and flows, and solder bonding is performed between the electrodes of the connected body by solder particles, and a value close to the rated voltage of 3.1V can be obtained. In addition, the chip shear strength is also good. In addition, in Example 4-3, even if a flux compound is used as a hardener, a good result can be obtained.

再者,認為,上述實施例中雖使用膜狀之異向性接合材料,但若將膏狀之異向性接合材料調整為特定厚度,則可獲得同樣之結果。 Furthermore, it is believed that although a film-like anisotropic bonding material is used in the above-mentioned embodiment, the same result can be obtained if the paste-like anisotropic bonding material is adjusted to a specific thickness.

Claims (5)

一種連接體之製造方法,其使含有固體樹脂、焊料粒子、及助焊劑化合物之異向性接合材料以上述焊料粒子之平均粒徑之50%以上且300%以下之厚度,介置於第1電子零件之電極與第2電子零件之電極之間,使上述第1電子零件之電極與上述第2電子零件之電極於無負載下進行加熱接合,上述固體樹脂係選自熱塑性樹脂、固體自由基聚合性樹脂、及固體環氧樹脂之至少1種,於常溫為固體,且於溫度190℃、負載2.16kg之條件下測得之熔體流動速率為10g/10min以上。 A method for manufacturing a connector, wherein an anisotropic bonding material containing a solid resin, solder particles, and a flux compound is interposed between an electrode of a first electronic component and an electrode of a second electronic component with a thickness of more than 50% and less than 300% of the average particle size of the solder particles, and the electrode of the first electronic component and the electrode of the second electronic component are heat-bonded under no load, wherein the solid resin is selected from at least one of a thermoplastic resin, a solid free radical polymerizable resin, and a solid epoxy resin, is solid at room temperature, and has a melt flow rate of more than 10 g/10 min at a temperature of 190°C and a load of 2.16 kg. 如請求項1所述之連接體之製造方法,其中,上述異向性接合材料係具有上述焊料粒子之平均粒徑之50%以上且300%以下之厚度之異向性接合膜。 A method for manufacturing a connector as described in claim 1, wherein the anisotropic bonding material is an anisotropic bonding film having a thickness of not less than 50% and not more than 300% of the average particle size of the solder particles. 如請求項2所述之連接體之製造方法,其中,上述第2電子零件為基板,於上述基板上層壓上述異向性接合膜,於上述異向性接合膜上搭載複數個上述第1電子零件,進行加熱接合。 A method for manufacturing a connector as described in claim 2, wherein the second electronic component is a substrate, the anisotropic bonding film is laminated on the substrate, and a plurality of the first electronic components are mounted on the anisotropic bonding film and thermally bonded. 如請求項1至3中任一項所述之連接體之製造方法,其中,上述助焊劑化合物為羧酸。 A method for manufacturing a connector as described in any one of claims 1 to 3, wherein the flux compound is a carboxylic acid. 如請求項1至3中任一項所述之連接體之製造方法,其中,上述助焊劑化合物係羧基經烷基乙烯基醚封端(block)化而成之封端化羧酸。 A method for manufacturing a connector as described in any one of claims 1 to 3, wherein the flux compound is a blocked carboxylic acid in which the carboxyl group is blocked by an alkyl vinyl ether.
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Families Citing this family (4)

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Publication number Priority date Publication date Assignee Title
JP6966659B1 (en) * 2020-06-05 2021-11-17 デクセリアルズ株式会社 Smart card manufacturing method, smart card, and hot melt adhesive sheet containing conductive particles
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004140366A (en) * 2003-10-15 2004-05-13 Hitachi Chem Co Ltd Method for connecting electrode
TW200735741A (en) * 2005-08-17 2007-09-16 Sumitomo Chemical Co Laminate to be used in flexible printed wiring boards and wiring boards made by using the same

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6433808A (en) * 1986-10-18 1989-02-03 Japan Synthetic Rubber Co Ltd Conductive particle and conductive adhesive including it
JP4699189B2 (en) * 2005-12-01 2011-06-08 日東電工株式会社 Semiconductor device manufacturing method and electronic component
JP4890053B2 (en) * 2006-03-02 2012-03-07 旭化成イーマテリアルズ株式会社 Anisotropic conductive film for microcircuit inspection
KR20090045195A (en) * 2006-08-25 2009-05-07 스미토모 베이클리트 컴퍼니 리미티드 Adhesive tape, joint structure, and semiconductor package
JP5456475B2 (en) * 2007-09-05 2014-03-26 日立化成株式会社 Adhesive and connection structure using the same
JP5032938B2 (en) 2007-10-24 2012-09-26 パナソニック株式会社 Thermosetting resin composition and method for producing the same
CN101897245B (en) * 2007-12-17 2013-03-13 日立化成工业株式会社 Circuit connecting material and structure for connecting circuit member
JP2010040893A (en) * 2008-08-07 2010-02-18 Sumitomo Bakelite Co Ltd Method of connecting terminals to each other, method of manufacturing semiconductor device using the same, and method of coagulating conductive particle
JP2011231146A (en) * 2010-04-23 2011-11-17 Asahi Kasei E-Materials Corp Anisotropic conductive film
JP5297418B2 (en) * 2010-06-21 2013-09-25 デクセリアルズ株式会社 Anisotropic conductive material and method for manufacturing the same, and mounting body and method for manufacturing the same
JP2015167106A (en) * 2014-03-04 2015-09-24 日立化成株式会社 Anisotropic conductive film, and connection structure
JP2017097974A (en) * 2015-11-18 2017-06-01 デクセリアルズ株式会社 Anisotropically conductive film, method for connecting electronic component, and method for manufacturing connection structure
KR102621211B1 (en) * 2016-05-05 2024-01-04 데쿠세리아루즈 가부시키가이샤 Anisotropic conductive film

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004140366A (en) * 2003-10-15 2004-05-13 Hitachi Chem Co Ltd Method for connecting electrode
TW200735741A (en) * 2005-08-17 2007-09-16 Sumitomo Chemical Co Laminate to be used in flexible printed wiring boards and wiring boards made by using the same

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