TWI842051B - Device and pulling apparatus for obtaining the deflection of a seed cable relative to a wire drum - Google Patents

Abstract

On the one hand, an embodiment of the present invention discloses a device for obtaining the deflection of a seed cable relative to a wire drum, wherein the seed cable extends away from the wire drum in a straight direction, and is characterized in that the device includes: a translation guide member, which can be assembled to the wire drum in a manner parallel to the target extension direction of the seed cable; and a moving rod, which is used to move under the guidance of the translation guide member in a manner of abutting the seed cable at its end, so as to obtain the deflection according to the displacement of the moving rod relative to the translation guide member in the extension direction of the moving rod. A second aspect of an embodiment of the present invention discloses a pulling device, which includes a device for obtaining a deflection amount of a seed crystal cable relative to a wire drum, wherein the pulling device pulls a seed crystal by the seed crystal cable resting on the wire drum.

Description

Device and pulling apparatus for obtaining the deflection of a seed cable relative to a wire drum

The present invention belongs to the field of semiconductor manufacturing technology, and in particular relates to a device and a pulling apparatus for obtaining the deflection amount of a seed cable relative to a wire drum.

The Czochralski (CZ) method is a common method for growing silicon ingots. The process usually includes several stages: charging and melting, welding, neck thinning, shoulder release, shoulder rotation, isodiametric growth and finishing. The following is a more specific description of these stages.

First, put the block of polycrystalline silicon raw material into the crucible and heat it to make it completely melted. During the heating period, adjust the gas flow, pressure, crucible position, crystal rotation, and crucible rotation according to the step requirements; after the melt is stable, connect the seed crystal to the seed crystal cable and use the pulling equipment to lower the seed crystal to a distance of 3mm~5mm from the liquid surface. After preheating the seed crystal The seed crystal is lowered to the surface of the melt using a pulling device; after the seed crystal is fully in contact with the melt, the seed crystal is inserted into the melt for necking, and after the necking stage is completed, the diameter is increased to the target diameter; when the neck grows to a sufficient length and reaches a certain pulling rate, the pulling speed can be reduced to release the shoulder and turn the shoulder, and then enter the isodiameter growth stage until the end to complete the entire production process.

In order to ensure a stable crystal pulling process, when installing the seed cable, a special tool is used to obtain the parallelism between the seed cable and the wire drum to ensure that the friction between the seed cable and the wire drum is reduced to a minimum, thereby reducing metal contamination caused by friction. Specifically, when the seed cable of the pulling equipment is initially assembled or replaced later, it is necessary to ensure that the seed cable is parallel to the end face of the wire drum. If the two are not parallel but at a certain angle, the seed cable will rub against the wire drum, which is particularly serious when wire grooves are provided on the wire drum. Since the seed cable is usually made of tungsten and the wire drum is made of 304 stainless steel, which has a hardness much lower than that of tungsten, the friction will produce stainless steel debris. Some of the metal debris attached to the seed cable will be brought into the furnace chamber of the crystal pulling furnace as the seed cable descends, which may cause metal contamination of the product.

At present, both equipment manufacturers and users mostly use visual inspection to calibrate the parallelism between the seed cable and the end face of the wire drum. Due to the large error of visual inspection, it brings hidden dangers to crystal pulling production.

In view of the above situation, how to strictly control the extension direction of the seed cable relative to the wire drum is a technical problem that needs to be solved urgently in this field.

In order to solve the above technical problems, the embodiments of the present invention are intended to provide a device and a pulling apparatus for obtaining the deflection amount of a seed cable relative to a wire drum.

The technical solution of the present invention is implemented as follows: In a first aspect, an embodiment of the present invention provides a device for obtaining the deflection of a seed cable relative to a wire drum, wherein the seed cable extends away from the wire drum in a straight line direction, and the device comprises: A translation guide, which can be assembled to the wire drum in a manner parallel to the target extension direction of the seed cable; A moving rod, which is used to move under the guidance of the translation guide in a manner that the end of the moving rod abuts the seed cable, so as to obtain the deflection according to the displacement of the moving rod relative to the translation guide in the extension direction of the moving rod.

In a second aspect, an embodiment of the present invention provides a pulling device, comprising a device for obtaining the deflection of a seed crystal cable relative to a wire drum as described in the first aspect, wherein the pulling device pulls the seed crystal by the seed crystal cable resting on the wire drum.

According to the technical solution provided in the embodiment of the present invention, a device for obtaining the deflection of a seed cable relative to a wire drum is provided. Through the cooperation between the translation guide and the moving rod of the device, the moving rod can move under the guidance of the translation guide. When the distance between each point on the seed cable and the translation guide changes, the moving rod needs to be displaced in its own moving direction to keep its end abutting the seed cable. The displacement amount in this case corresponds to the deflection amount in the actual extension direction of the seed cable. By adjusting the seed cable or wire drum according to the deflection, the extension direction of the seed cable relative to the wire drum can be corrected, thereby avoiding safety hazards and product contamination caused by unnecessary friction between the seed cable and the wire drum due to the deflection of the seed cable.

In order to help you understand the technical features, contents and advantages of the present invention and the effects it can achieve, the present invention is described in detail as follows with the accompanying drawings and appendices in the form of embodiments. The drawings used therein are only for illustration and auxiliary description, and may not be the true proportions and precise configurations after the implementation of the present invention. Therefore, the proportions and configurations of the attached drawings should not be interpreted to limit the scope of application of the present invention in actual implementation.

In the description of the embodiments of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

In the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be a connection between two components or an interaction relationship between two components. For those with ordinary knowledge in the field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to the specific circumstances.

Referring to FIG. 1 , the present invention provides a device 1 for obtaining the deflection of a seed cable relative to a wire drum, wherein the seed cable L extends away from the wire drum D in a straight line direction, and the device 1 for obtaining the deflection of the seed cable relative to the wire drum comprises: A translation guide 10, which can be assembled to the wire drum D in a manner parallel to the target extension direction of the seed cable L; A moving rod 20, which is used to move under the guidance of the translation guide 10 in a manner that the end 201 abuts the seed cable L, so as to obtain the deflection according to the displacement of the moving rod 20 relative to the translation guide 10 in the extension direction of the moving rod 20.

According to the technical solution provided in the embodiment of the present invention, a device for obtaining the deflection of a seed cable relative to a wire drum is provided. Through the cooperation between the translation guide 10 and the moving rod 20 of the device 1 for obtaining the deflection of the seed cable relative to the wire drum, the moving rod 20 can move under the guidance of the translation guide 10. When the distance between each point on the seed cable L and the translation guide 10 changes, the moving rod 20 needs to be displaced in its own moving direction to keep its end 201 abutting against the seed cable L. In this case, the displacement corresponds to the deflection of the seed cable in the actual extension direction. By adjusting the seed cable or wire drum according to the deflection, the extension direction of the seed cable relative to the wire drum can be corrected, thereby avoiding safety hazards and product contamination caused by unnecessary friction between the seed cable and the wire drum due to the deflection of the seed cable.

Continuing with reference to Figure 1, in order to assemble the translation guide to the wire drum in a manner parallel to the target extension direction of the seed cable, preferably, the translation guide 10 has a first abutment plane 101, and the first abutment plane 101 is used to abut the planar end surface 102 of the wire drum D when the translation guide 10 is assembled to the wire drum D, and when the first abutment plane 101 abuts the planar end surface 102 of the wire drum D, the translation guide 10 is in a plane parallel to the target extension direction of the seed cable L.

As shown in Figure 1, the wire drum D is roughly cylindrical and one of its end faces 102 is a plane end face. One of the faces of the translation guide 10 is used as abutment plane, namely the first abutment plane 101. When the translation guide 10 is installed on the wire drum D, the first abutment plane 101 of the translation guide 10 directly abuts against the plane end face 102 of the wire drum D, and at this time, the translation guide 10 abutting against the plane end face 102 should be in a plane parallel to the target extension direction.

In order to facilitate the installation of the translation guide 10 relative to the wire drum D, optionally, referring to FIG. 2 , the device further includes a C-shaped clamp 30 for clamping the translation guide 10 to the planar end surface 102, the C-shaped clamp having a bonding plane 301, the bonding plane 301 being used to bond with the seed cable L when the C-shaped clamp clamps the translation guide 10 to the planar end surface 102. The guide 10 also has a second abutment plane 103, which is used to abut the bonding plane 301 when the translation guide 10 is clamped to the planar end face 102. When the bonding plane 301 is bonded to the seed crystal cable L and the second abutment plane 103 abuts the bonding plane 301, the translation guide 10 is parallel to the target extension direction of the seed crystal cable L.

As shown in FIG2 , the C-shaped clamp 30 clamps the wire drum D in a manner that crosses the winding portion of the wire drum D. When the C-shaped clamp 30 clamps the wire drum D, the translation guide 10 is clamped between the C-shaped clamp 30 and the wire drum D, and the surface 301 of the C-shaped clamp facing the winding portion of the wire drum D is in contact with both the seed cable L and the second abutment plane 103 of the translation guide 10 as a bonding plane. In this case, the translation guide 10 is parallel to the target extension direction of the seed cable L. By using the C-shaped clamp, it is more conducive to assembling the translation guide to the wire drum in a manner parallel to the target extension direction of the seed cable.

In order to make the translation guide member play a better guiding role, optionally, referring to FIG. 1 , the translation guide member 10 is in the shape of a cuboid, and the first abutting plane 101 is the main surface of the cuboid, and the second abutting plane 103 is the side surface of the cuboid.

In order to facilitate the C-shaped clamp to fit and abut against the seed cable L and the translation guide 10, preferably, referring to FIG. 2 , the connecting portion 31 of the C-shaped clamp 30 connecting the two branches 32 and the branch 33 is in a rectangular shape, and the fitting plane 301 is the main surface of the rectangular shape.

In order to further facilitate the translation guide to guide the moving rod and enable the moving rod to shift better along its own extension direction, preferably, referring to Figure 3, the device 1 for obtaining the deflection of the seed cable relative to the wire drum also includes a connector 40 for connecting the translation guide 10 and the moving rod 20, wherein the connector 40 includes a first through hole 401, and the translation guide 10 is configured to be able to pass through the first through hole 401, so that the moving rod 20 can move under the guidance of the translation guide 10.

As shown in FIG3 , the translation guide 10 and the moving rod 20 are respectively connected to the connecting member 40, wherein the translation guide 10 passes through the first through hole 401 on the connecting member 40, thereby, the connecting member 40 can translate together with the moving rod 20 under the guidance of the translation guide 10, thereby obtaining the distance between each point along the seed cable and the first abutment plane of the translation guide 10.

According to another optional embodiment of the present invention, referring to FIG. 3 , the connector further includes a second through hole 402, and the moving rod 20 can pass through the second through hole 402 to move in a direction away from or close to the seed cable L.

As shown in FIG3 , when the operation is performed, the connecting member 40 can be moved on the translation guide 10. Since the end 201 of the moving rod 20 is always in contact with the seed cable L during the translation process, the deflection of the seed cable will cause the moving rod 20 to be displaced in the extension direction of the moving rod. The second through hole 402 on the connecting member 40 can guide the displacement of the moving rod 20 in the extension direction of the moving rod, so that the moving rod 20 moves strictly according to its own extension direction, and the angle of the moving rod relative to the translation guide will not change, so the deflection amount obtained will be more accurate.

4 , the present invention further provides a pulling device 2, comprising a device 1 for obtaining the deflection amount of the seed crystal cable relative to the wire drum, wherein the pulling device 2 pulls the seed crystal by the seed crystal cable L abutting against the wire drum D.

According to an optional embodiment of the present invention, referring to FIG4 , the pulling device 2 further includes a fixed pulley 50, the rotation axis X2 of the fixed pulley 50 is parallel to the rotation axis X1 of the wire drum D, the seed crystal cable L extends from the wire drum D to the fixed pulley 50, and when the wire drum D is at a set position relative to the fixed pulley 50, the seed crystal cable L extends along the target extension direction. For the actual crystal pulling process, if the seed crystal cable is first wound around the fixed pulley after extending from the wire drum and then connected to the seed crystal, it can be convenient to perform the pulling operation.

According to an optional embodiment of the present invention, referring to FIG. 4 , the pulling device 2 further includes an adjusting device 60 coaxially arranged with the wire drum D, and the adjusting device 60 is used to adjust the wire drum D in an axial direction according to the result obtained by the device 1 for obtaining the deflection amount of the seed cable L relative to the wire drum D so that the wire drum D is in a set position relative to the fixed pulley 50.

As shown in FIG4 , the adjusting device 60 is coaxially connected to the wire drum D. The adjusting device 60 is in the form of a shaft and is connected to the center of the wire drum D. By shifting the adjusting device 60 in the axial direction, the wire drum D will move in the axial direction together with the adjusting device 60. Since the position of the fixed pulley remains unchanged, moving the wire drum D to the set position can adjust the actual extension direction between the wire drum D and the fixed pulley 50 on the seed cable L, thereby correcting the deflection of the seed cable relative to the wire drum D, reducing the friction of the seed cable relative to the wire drum and the fixed pulley, reducing the contamination of the silicon rod, and even preventing the seed cable from breaking.

The above are only preferred embodiments of the present invention and are not intended to limit the scope of implementation of the present invention. If the present invention is modified or replaced by something equivalent without departing from the spirit and scope of the present invention, it should be included in the protection scope of the patent application of the present invention.

1: Device for obtaining the deflection of the seed cable relative to the wire drum 2: Pulling device 10: Translation guide 20: Moving rod 30: C-shaped clip 31: Connecting part 32: Branching part 33: Branching part 40: Connecting part 50: Fixed pulley 60: Adjusting device 101: First abutting plane 102: Planar end surface 103: Second abutting plane 201: End 301: Laminating plane 401: First through-hole 402: Second through-hole L: Seed cable D: Wire drum X1: Rotation axis X2: Rotation axis

FIG1 is a schematic diagram of a device for obtaining the deflection amount of a seed cable relative to a wire drum provided in an embodiment of the present invention; FIG2 is a schematic diagram of a device for obtaining the deflection amount of a seed cable relative to a wire drum provided in another embodiment of the present invention; FIG3 is a schematic diagram of a device for obtaining the deflection amount of a seed cable relative to a wire drum provided in another embodiment of the present invention; FIG4 is a schematic diagram of a pulling device provided in an embodiment of the present invention.

1: Device for obtaining the deflection of the seed cable relative to the wire drum

10: Translation guide

20:Moving rod

101: First contact plane

102: Plane end face

201: End

L: Seed cable

D: String drum

Claims (7)

A device for obtaining the deflection of a seed cable relative to a wire drum, wherein the seed cable extends away from the wire drum in a straight line direction, and the device comprises: a translation guide, which can be assembled to the wire drum in a manner parallel to the target extension direction of the seed cable; a moving rod, which is used to move under the guidance of the translation guide in a manner of abutting the seed cable at its end, so as to obtain the deflection according to the displacement of the moving rod relative to the translation guide in the extension direction of the moving rod; wherein the translation guide has a first abutment plane, which is used to abut the planar end surface of the wire drum when the translation guide is assembled to the wire drum, and when the first abutment plane abuts the planar end surface of the wire drum, the translation guide The device further comprises a C-shaped clamp for clamping the translation guide to the end face of the plane, the C-shaped clamp having a bonding plane, the bonding plane being used to bond with the seed cable when the C-shaped clamp clamps the translation guide to the end face of the plane, the translation guide also having a second abutting plane, the second abutting plane being used to abut the bonding plane when the translation guide is clamped to the end face of the plane, when the bonding plane is bonded with the seed cable and the second abutting plane abuts the bonding plane, the translation guide is parallel to the target extension direction of the seed cable; the connecting portion of the C-shaped clamp connecting the two branches is in a rectangular parallelepiped shape, and the bonding plane is the main surface of the rectangular parallelepiped. The device for obtaining the deflection of the seed cable relative to the wire drum as described in claim 1, wherein the translation guide is a rectangular parallelepiped, and the first abutment plane is the main surface of the rectangular parallelepiped, and the second abutment plane is the side surface of the rectangular parallelepiped. The device for obtaining the deflection of the seed cable relative to the wire drum as described in claim 1 further includes a connector for connecting the translation guide and the moving rod, wherein the connector includes a first through-hole, and the translation guide is configured to be able to pass through the first through-hole, so that the moving rod can move under the guidance of the translation guide. A device for obtaining the deflection of a seed cable relative to a wire drum as described in claim 3, wherein the connector further includes a second through-hole, and the moving rod can pass through the second through-hole and move in a direction away from or close to the seed cable. A pulling device, comprising a device for obtaining the deflection of a seed crystal cable relative to a wire drum as described in any one of claims 1 to 4, wherein the pulling device pulls the seed crystal by the seed crystal cable resting on the wire drum. The pulling device as described in claim 5 further includes a fixed pulley, the rotation axis of the fixed pulley is parallel to the rotation axis of the wire drum, the seed crystal cable extends from the wire drum to the fixed pulley, and when the wire drum is in a set position relative to the fixed pulley, the seed crystal cable extends along the target extension direction. The pulling device as described in claim 6 further includes an adjusting device coaxially arranged with the wire drum, the adjusting device being used to adjust the wire drum in the axial direction according to the result obtained by the device for obtaining the deflection amount of the seed cable relative to the wire drum so that the wire drum is in the set position relative to the fixed pulley.

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