TWI840048B - 發光二極體電流導流裝置 - Google Patents
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- 239000004065 semiconductor Substances 0.000 claims abstract description 61
- 238000005530 etching Methods 0.000 claims abstract description 40
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 230000000694 effects Effects 0.000 claims abstract description 9
- 238000000605 extraction Methods 0.000 claims abstract description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 18
- 239000010931 gold Substances 0.000 claims description 14
- 229910052737 gold Inorganic materials 0.000 claims description 12
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 12
- 239000010936 titanium Substances 0.000 claims description 11
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 9
- 229910052759 nickel Inorganic materials 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 229910052697 platinum Inorganic materials 0.000 claims description 6
- 239000011651 chromium Substances 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910052732 germanium Inorganic materials 0.000 claims description 3
- 238000007788 roughening Methods 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 2
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 8
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 238000009826 distribution Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000011787 zinc oxide Substances 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- JAONJTDQXUSBGG-UHFFFAOYSA-N dialuminum;dizinc;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Al+3].[Al+3].[Zn+2].[Zn+2] JAONJTDQXUSBGG-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000002077 nanosphere Substances 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/22—Roughened surfaces, e.g. at the interface between epitaxial layers
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- H01L33/14—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
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- H01L33/14—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
- H01L33/145—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure with a current-blocking structure
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- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
- H01L33/382—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape the electrode extending partially in or entirely through the semiconductor body
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- H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
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Abstract
本發明係提供一種發光二極體電流導流裝置,係用於增強發光二極體出光效率及提升電流導流,其包括:接觸電極;基板,係連接該接觸電極;第一電極,係連接該基板;第一半導體層,係與該第一電極的進行電性連結;發光層,係電性連接該第一半導體層;第二半導體層,係電性連接該發光層;第二電極,其具有一主電極及複數延伸電極;電流導流層,係設置於該第二半導體層之一側與該第二電極之一側之間,該電流導流層具有一主半導體層及一蝕刻層,該蝕刻層以該第二電極作為圖樣基準進行蝕刻,其藉由蝕刻提高電阻使電流朝該主半導體層方向行進以達到導流之功效。
Description
本發明是應用於光電領域中發光二極體電流導流,特別是一種提升出光效率及電流導流的發光二極體電流導流裝置。
傳統上,於上出光面大多數只藉由電極延伸(finger)來引導電流流向,或於電極下方藉由氧化物絕緣體使電流向外擴展,但先前技術需額外增加製程結構,且電流分布不均以及非預期流向之問題。
中華民國專利公開公告號第TWI338387B號的發明專利案所揭露之一種發光二極體裝置,包括一磊晶疊層以及一電流擴散層。磊晶疊層依序具有一第一半導體層、一發光層及一第二半導體層。電流擴散層係設置於磊晶疊層之第一半導體層上,且電流擴散層具有一微奈米粗化結構層及一透明導電層,其中微奈米粗化結構層具有複數個鏤空部,而透明導電層係覆蓋於微奈米粗化結構層之一表面及該些鏤空部中。另外,前案亦揭露一種發光二極體裝置的製造方法以及一種具有微奈米結構之電流擴散層,該篇藉由額外附加的材料(奈米球)及製程(奈米壓印)達到電流導流之效果,但製程繁瑣容易及產品外觀不一等缺陷。
中華人民共和國專利公開公告號第CN106558638A號的發明專利案所揭露之一種具有高發光效率的LED芯片及其製作方法,該LED晶片包括:基
板,該基板由下而上依次形成的緩衝層、N型(P型)半導體層、發光層、P型(N型)半導體層、電流阻擋層以及透明導電膜,透明導電膜分為n層,P(N)電極形成在最上層透明導電膜上,該P(N)型半導體層四周邊緣蝕刻至該N(P)型半導體層中形成閉合台階,且各方向的閉合台階上均形成N(P)電極。前案有效改善局部電流過大問題,提高電流分佈均勻性,進而提高發光效率,但其需額外增加一層絕緣電流阻擋層,多造成額外的製程及降低原先的亮度。
有鑑於此,本發明係提供一種發光二極體電流導流裝置,改變昔知技術「電流導流裝置」,藉由蝕刻掉原本的磊晶結構使得大多數電流無法有效往下流通而達到電流向側邊擴散的功能,使電流分布均勻進而提升亮度以解決電流分布不均以及非預期流向之問題,以解決先前技術的缺失。
本發明之第一目的係提供一種發光二極體電流導流裝置,係用於增強發光二極體出光效率及提升電流導流。
為達上述目的或其他目的,本發明係提供一種發光二極體電流導流裝置,係用於增強發光二極體出光效率及提升電流導流,其包括:接觸電極;基板,係連接該接觸電極;第一電極,係連接該基板;第一半導體層,係與該第一電極的進行電性連結;發光層,係電性連接該第一半導體層;第二半導體層,係電性連接該發光層;第二電極,其具有一主電極及複數延伸電極;電流導流層,係設置於該第二半導體層之一側與該第二電極之一側之間,該電流導流層具有一主半導體層及一蝕刻層,該蝕刻層以該第二電極作為圖樣基準進行蝕刻,其藉由蝕刻提高電阻使電流朝該主半導體層方向行進以達到導流之功效。
進一步,其中該接觸電極係為鈦/金或鎳/金之組合所組成。
進一步,其中該第一半導體層係為一P型磊晶層或一N型磊晶層。
進一步,其中該第二半導體層係為一P型磊晶層或一N型磊晶層。
進一步,其中該第一半導體層係暴露於該第二半導體層及該發光層。
進一步,其中該主半導體層係進行粗化製程以提升出光效率。
進一步,該主半導體層係為一P型磊晶層或一N型磊晶層,且厚度較其餘半導體層薄。
進一步,該第一電極及該基板之間更包含一透明電極,該透明電極係為導電氧化物。
進一步,該第一電極及該基板之間更可選擇性地包含一金屬層,係設置該透明電極之一側,該金屬層可為Ti、Au、Ni或Pt組成。
進一步,其中該第二電極可為Ge、Ti、Ni、Pt、Au或Cr組成。
進一步,其中該蝕刻層可選擇該主電極抑或該延伸電極抑或兩者之組合作為基準決定該蝕刻層之區域;更進一步,如為該主電極及該延伸電極為基準作該蝕刻層之區域,則可於該主電極與該延伸電極連接處不進行蝕刻,以達到提升導流之功效。
相較於習知技術,本發明提供一種發光二極體電流導流裝置,將遮光區域蝕刻以進行電流導流,使電朝未被遮蔽區域行進以增強發光二極體出光效率,且製程簡單耗時少,僅需要增加一道黃光及一道蝕刻製程。
CE:接觸電極
10:基板
20:第一電極
30:第一半導體層
40:發光層
50:第二半導體層
60:第二電極
61:主電極
62:延伸電極
70:電流導流層
71:主半導體層
72:蝕刻層
圖1係本發明第一實施例之發光二極體電流導流裝置的層狀結構圖。
圖2(a)係本發明第二實施例之發光二極體電流導流裝置的俯視圖。
圖2(b)係本發明第二實施例之主電極蝕刻部位的示意圖。
圖2(c)係本發明第二實施例之延伸電極蝕刻部位的示意圖。
圖3(a)係本發明第三實施例之發光二極體電流導流裝置的俯視圖。
圖3(b)係本發明第三實施例之主電極及延伸電極之組合蝕刻部位的示意
圖。
為充分瞭解本發明之目的、特徵及功效,茲藉由下述具體之實施例,並配合所附之圖式,對本發明做一詳細說明,說明如後:
於本發明中,係使用「一」或「一個」來描述本文所述的單元、元件和組件。此舉只是為了方便說明,並且對本發明之範疇提供一般性的意義。因此,除非很明顯地另指他意,否則此種描述應理解為包括一個、至少一個,且單數也同時包括複數。
於本文中,用語「包含」、「包括」、「具有」、「含有」或其他任何類似用語意欲涵蓋非排他性的包括物。舉例而言,含有複數要件的一元件、結構、製品或裝置不僅限於本文所列出的此等要件而已,而是可以包括未明確列出但卻是該元件、結構、製品或裝置通常固有的其他要件。除此之外,除非有相反的明確說明,用語「或」是指涵括性的「或」,而不是指排他性的「或」。
請參考圖1,係本發明第一實施例之發光二極體電流導流裝置的層狀結構圖,本發明提供一種發光二極體電流導流裝置,係用於增強發光二極體出光效率及提升電流導流,其包括:接觸電極CE;基板10,係連接該接觸電極CE;第一電極20,係連接該基板10;第一半導體層30,係與該第一電極20的進行電性連結;發光層40,係電性連接該第一半導體層30;第二半導體層50,係電性連接該發光層40;第二電極60,其具有一主電極61及複數延伸電極62;電流導流層70,係設置於該第二半導體層50之一側與該第二電極60之一側之間,該電流導流層70具有一主半導體層71及一蝕刻層72,該蝕刻層72以該第二電極60作為圖樣基準並依照需求對不同位置進行蝕刻,其藉由蝕刻該電流導流層70,進而提高該主電極61之局部與該延伸電極62之局部與該第二半導體層50之間的接觸電阻,並使電流朝該主半導體層71方向行進以達到導流之功效。
其中該接觸電極CE係為鈦/金抑或鎳/金之組合所組成之電極;該第一半導體層30係為一P型磊晶層或一N型磊晶層;其中該第二半導體層50係為一P型磊晶層或一N型磊晶層;其中該第一半導體層30係暴露於該第二半導體層50及該發光層40;該主半導體層71係為一P型磊晶層或一N型磊晶層,且厚度較其餘半導體層薄;其中該主半導體層71係進行粗化製程以提升出光效率;該第一電極20及該基板10之間更包含一透明電極,該透明電極係為導電氧化物,如:ITO(氧化銦錫)、IZO(氧化銦鋅)、IGZO(氧化銦鎵鋅)、ZnO(氧化鋅)、AZO(氧化鋁鋅)....等;該第一電極20及該基板10之間更可選擇性地包含一金屬層,係設置該透明電極之一側,該金屬層之材質可為Ti(鈦)、Au(金)、Ni(鎳)抑或Pt(鉑)等至少一材料組成;其中該第二電極60可為Ge(鍺)、Ti(鈦)、Ni(鎳)、Pt(鉑)、Au(金)抑或Cr(鉻)等至少一材料組成。
請參考圖2(a)~圖2(c),請參考圖2(a),係本發明第二實施例之發光二極體電流導流裝置的俯視圖,其中該蝕刻層72可選擇該主電極61亦或該延伸電極62亦或兩者之組合作為基準決定該蝕刻層72之區域,以降低第二電極60的遮光率,請參考圖2(b),係本發明第二實施例之主電極蝕刻部位的示意圖,其中該蝕刻層72選擇該主電極61為基準決定該蝕刻層72之區域,再來請參照圖2(c),係本發明第二實施例之延伸電極蝕刻部位的示意圖,其中該蝕刻層72選擇該延伸電極62為基準決定該蝕刻層72之區域。
請參考圖3(a)~圖3(b),請參考圖3(a),係本發明第三實施例之發光二極體電流導流裝置的俯視圖,其中該蝕刻層72可選擇該主電極61亦或該延伸電極62亦或兩者之組合作為基準決定該蝕刻層72之區域,請參考圖3(b),係本發明第三實施例之主電極及延伸電極之組合蝕刻部位的示意圖,其中以該主電極61及該延伸電極62為基準作該蝕刻層72之區域,則可於該主電極61與該延伸電極62連接處不進行蝕刻,以達到提升導流之功效。
本發明在上文中已以較佳實施例揭露,然熟習本項技術者應理解的是,該實施例僅用於描繪本發明,而不應解讀為限制本發明之範圍。應注意的是,舉凡與該實施例等效之變化與置換,均應設為涵蓋於本發明之範疇內。因此,本發明之保護範圍當以申請專利範圍所界定者為準。
CE:接觸電極
10:基板
20:第一電極
30:第一半導體層
40:發光層
50:第二半導體層
60:第二電極
61:主電極
62:延伸電極
70:電流導流層
71:主半導體層
72:蝕刻層
Claims (12)
- 一種發光二極體電流導流裝置,係用於增強發光二極體出光效率及提升電流導流,其包括:接觸電極;基板,係連接該接觸電極;第一電極,係連接該基板;第一半導體層,係與該第一電極的進行電性連結;發光層,係電性連接該第一半導體層;第二半導體層,係電性連接該發光層;以及第二電極,其具有一主電極及複數延伸電極;電流導流層,係設置於該第二半導體層之一側與該第二電極之一側之間,該電流導流層具有一主半導體層及一蝕刻層,該蝕刻層以該第二電極作為圖樣基準進行蝕刻,其藉由蝕刻形成隔開該第二電極及該第二半導體層之鏤空區域以提高電阻使電流朝該主半導體層方向行進以達到導流之功效。
- 如請求項1所述之發光二極體電流導流裝置,其中該接觸電極係為鈦/金或鎳/金之組合所組成。
- 如請求項1所述之發光二極體電流導流裝置,其中該第一半導體層係為一P型磊晶層或一N型磊晶層。
- 如請求項1所述之發光二極體電流導流裝置,其中該第二半導體層係為一P型磊晶層或一N型磊晶層。
- 如請求項1所述之發光二極體電流導流裝置,其中該第一半導體層係暴露於該第二半導體層及該發光層。
- 如請求項1所述之發光二極體電流導流裝置,其中該主半導體層係進行粗化製程以提升出光效率。
- 如請求項1所述之發光二極體電流導流裝置,其中該主半導體層係為一P型磊晶層或一N型磊晶層,且厚度較其餘半導體層薄。
- 如請求項1所述之發光二極體電流導流裝置,其中該第一電極及該基板之間更包含一透明電極,該透明電極係為導電氧化物。
- 如請求項8所述之發光二極體電流導流裝置,其中該第一電極及該基板之間更可選擇性地包含一金屬層,係設置該透明電極之一側,該金屬層可為鈦、金、鎳或鉑所組成。
- 如請求項1所述之發光二極體電流導流裝置,其中該第二電極可為鍺、鈦、鎳、鉑、金或鉻所組成。
- 如請求項1所述之發光二極體電流導流裝置,其中該蝕刻層可選擇該主電極抑或該延伸電極抑或兩者之組合作為基準決定該蝕刻層之區域。
- 如請求項11所述之發光二極體電流導流裝置,其中如為該主電極及該延伸電極為基準作該蝕刻層之區域,則可於該主電極與該延伸電極連接處不進行蝕刻,以達到提升導流之功效。
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CN101517758A (zh) * | 2006-08-11 | 2009-08-26 | 普瑞光电股份有限公司 | 可安装于表面的晶片 |
TW201013971A (en) * | 2008-09-18 | 2010-04-01 | Epistar Corp | Optoelectronic semiconductor device |
TW201429001A (zh) * | 2012-12-03 | 2014-07-16 | Iljin Led Co Ltd | 包含分離區之具有改進的電流擴散性以及高亮度的半導體發光二極體 |
TW201505209A (zh) * | 2013-07-26 | 2015-02-01 | Lextar Electronics Corp | 發光二極體及其製造方法 |
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CN101517758A (zh) * | 2006-08-11 | 2009-08-26 | 普瑞光电股份有限公司 | 可安装于表面的晶片 |
TW201013971A (en) * | 2008-09-18 | 2010-04-01 | Epistar Corp | Optoelectronic semiconductor device |
TW201429001A (zh) * | 2012-12-03 | 2014-07-16 | Iljin Led Co Ltd | 包含分離區之具有改進的電流擴散性以及高亮度的半導體發光二極體 |
TW201505209A (zh) * | 2013-07-26 | 2015-02-01 | Lextar Electronics Corp | 發光二極體及其製造方法 |
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