TWI833822B - 用於自動映射流動體物體在基板上之方法及系統 - Google Patents

用於自動映射流動體物體在基板上之方法及系統 Download PDF

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Publication number
TWI833822B
TWI833822B TW108137374A TW108137374A TWI833822B TW I833822 B TWI833822 B TW I833822B TW 108137374 A TW108137374 A TW 108137374A TW 108137374 A TW108137374 A TW 108137374A TW I833822 B TWI833822 B TW I833822B
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Taiwan
Prior art keywords
substrate
objects
microscope
recognition module
layout
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TW108137374A
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Chinese (zh)
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TW202028802A (zh
Inventor
馬修 Ｃ 樸特曼
強恩 Ｂ 樸特曼
約翰 克魯克山
裘莉 奧蘭多
艾戴爾 法蘭科
布蘭登 史考特
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美商奈米創尼克影像公司
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/361—Optical details, e.g. image relay to the camera or image sensor
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/20—Analysis of motion
    • G06T7/246—Analysis of motion using feature-based methods, e.g. the tracking of corners or segments
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/70—Determining position or orientation of objects or cameras
    • G06T7/73—Determining position or orientation of objects or cameras using feature-based methods
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/20—Image preprocessing
    • G06V10/255—Detecting or recognising potential candidate objects based on visual cues, e.g. shapes
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V20/00—Scenes; Scene-specific elements
    • G06V20/60—Type of objects
    • G06V20/69—Microscopic objects, e.g. biological cells or cellular parts
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10056—Microscopic image
    • G06T2207/10061—Microscopic image from scanning electron microscope
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20081—Training; Learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20084—Artificial neural networks [ANN]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30004—Biomedical image processing
    • G06T2207/30024—Cell structures in vitro; Tissue sections in vitro
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30141—Printed circuit board [PCB]

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Biomedical Technology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Health & Medical Sciences (AREA)
  • Quality & Reliability (AREA)
  • Image Processing (AREA)
  • Microscoopes, Condenser (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
TW108137374A 2018-10-19 2019-10-17 用於自動映射流動體物體在基板上之方法及系統 TWI833822B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16/164,990 2018-10-19
US16/164,990 US10481379B1 (en) 2018-10-19 2018-10-19 Method and system for automatically mapping fluid objects on a substrate

Publications (2)

Publication Number Publication Date
TW202028802A TW202028802A (zh) 2020-08-01
TWI833822B true TWI833822B (zh) 2024-03-01

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TW108137374A TWI833822B (zh) 2018-10-19 2019-10-17 用於自動映射流動體物體在基板上之方法及系統
TW113103586A TW202422151A (zh) 2018-10-19 2019-10-17 用於自動映射流動體物體在基板上之方法及系統

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US (5) US10481379B1 (cg-RX-API-DMAC7.html)
EP (1) EP3867686B1 (cg-RX-API-DMAC7.html)
JP (2) JP7226852B2 (cg-RX-API-DMAC7.html)
KR (1) KR102706113B1 (cg-RX-API-DMAC7.html)
CN (2) CN117784387A (cg-RX-API-DMAC7.html)
TW (2) TWI833822B (cg-RX-API-DMAC7.html)
WO (1) WO2020081211A1 (cg-RX-API-DMAC7.html)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10169852B1 (en) * 2018-07-03 2019-01-01 Nanotronics Imaging, Inc. Systems, devices, and methods for providing feedback on and improving the accuracy of super-resolution imaging
US10481379B1 (en) 2018-10-19 2019-11-19 Nanotronics Imaging, Inc. Method and system for automatically mapping fluid objects on a substrate
JP7506523B2 (ja) * 2020-05-20 2024-06-26 株式会社エビデント 顕微鏡システム、制御方法、プログラム
CN111766694A (zh) * 2020-07-20 2020-10-13 深圳市创能亿科科技开发有限公司 显微镜切片位置的采集方法和系统
US11556223B2 (en) * 2020-08-27 2023-01-17 Ebay Inc. Automatic feedback system using visual interactions
US12266143B2 (en) * 2021-04-12 2025-04-01 Kla Corporation Salient feature point based image alignment
CN114047129B (zh) * 2021-11-24 2025-02-07 东莞市东宇阳电子科技发展有限公司 自动拍摄mlcc产品切面图像的装置及方法
DK4197485T3 (da) * 2021-12-20 2024-11-18 3Shape As System til scanning af flere dentale genstande
KR102805720B1 (ko) * 2022-03-15 2025-05-13 중앙대학교 산학협력단 기계학습을 이용한 led칩 유체 자가 배열 장치, 시스템 및 방법

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006238802A (ja) * 2005-03-03 2006-09-14 Olympus Corp 細胞観察装置、細胞観察方法、顕微鏡システム、及び細胞観察プログラム
US20160155239A1 (en) * 2013-08-02 2016-06-02 Olympus Corporation Cell Tracking Device and Method, and Storage Medium Non-Transitory Storing Computer-Readable Cell Tracking Programs
WO2017145172A1 (en) * 2016-02-23 2017-08-31 Sigtuple Technologies Private Limited System and method for extraction and analysis of samples under a microscope
TW201730843A (zh) * 2015-12-09 2017-09-01 克萊譚克公司 藉由降低晶粒至晶粒製程雜訊之缺陷信號對雜訊增強
US10048477B1 (en) * 2017-02-10 2018-08-14 Nanotronics Imaging, Inc. Camera and specimen alignment to facilitate large area imaging in microscopy

Family Cites Families (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5153444A (en) * 1988-12-23 1992-10-06 Hitachi, Ltd. Method and apparatus for detecting patterns
US6292582B1 (en) * 1996-05-31 2001-09-18 Lin Youling Method and system for identifying defects in a semiconductor
JPH10335399A (ja) * 1997-06-03 1998-12-18 Advantest Corp 試料処理装置および方法
JP3371764B2 (ja) * 1997-06-27 2003-01-27 株式会社日立製作所 撮像方法及び装置
US6366357B1 (en) * 1998-03-05 2002-04-02 General Scanning, Inc. Method and system for high speed measuring of microscopic targets
JP2000182066A (ja) * 1998-10-07 2000-06-30 Advantest Corp 画像処理装置
JP3812185B2 (ja) * 1998-12-01 2006-08-23 株式会社日立製作所 欠陥分類方法およびその装置
US7904187B2 (en) * 1999-02-01 2011-03-08 Hoffberg Steven M Internet appliance system and method
JP4526661B2 (ja) * 2000-06-28 2010-08-18 株式会社日立製作所 検査装置および検査方法
JP2002076071A (ja) 2000-08-25 2002-03-15 Matsushita Electric Ind Co Ltd 部品実装部の信頼性評価方法および信頼性評価装置
US7248716B2 (en) * 2001-07-06 2007-07-24 Palantyr Research, Llc Imaging system, methodology, and applications employing reciprocal space optical design
CA2484549A1 (en) * 2002-05-10 2003-11-20 Phase-1 Molecular Toxicology, Inc. Liver inflammation predictive genes
JP2003339659A (ja) * 2002-05-23 2003-12-02 Hitachi Ltd 超電導磁気シールド装置
US9955551B2 (en) * 2002-07-12 2018-04-24 Yechezkal Evan Spero Detector controlled illuminating system
TWI229243B (en) * 2002-09-20 2005-03-11 Asml Netherlands Bv Lithographic marker structure, lithographic projection apparatus comprising such a lithographic marker structure and method for substrate alignment using such a lithographic marker structure
US8712118B2 (en) * 2003-04-10 2014-04-29 Carl Zeiss Microimaging Gmbh Automated measurement of concentration and/or amount in a biological sample
TWI254792B (en) * 2003-07-01 2006-05-11 Au Optronics Corp Detecting method and device of laser crystalline silicon
US20050031188A1 (en) * 2003-08-10 2005-02-10 Luu Victor Van Systems and methods for characterizing a sample
JP4842533B2 (ja) * 2004-10-27 2011-12-21 株式会社日立ハイテクノロジーズ 不良検査装置
RU2305270C2 (ru) * 2005-05-18 2007-08-27 Андрей Алексеевич Климов Способ флуоресцентной наноскопии (варианты)
JP4537277B2 (ja) * 2005-07-08 2010-09-01 株式会社日立ハイテクノロジーズ 半導体検査装置
JP4938782B2 (ja) * 2005-10-18 2012-05-23 ジーエスアイ・グループ・コーポレーション 光学的基準を利用する方法および装置
US7676077B2 (en) * 2005-11-18 2010-03-09 Kla-Tencor Technologies Corp. Methods and systems for utilizing design data in combination with inspection data
DE112006003790A5 (de) * 2006-01-04 2008-12-04 Jpk Instruments Ag Verfahren zum Betreiben eines Messsystems mit einem Rastersondenmikroskop und Messsystem
JP4908934B2 (ja) * 2006-06-08 2012-04-04 株式会社日立ハイテクノロジーズ 半導体ウェーハ検査装置および半導体ウェーハ検査方法
US8392418B2 (en) * 2009-06-25 2013-03-05 University Of Tennessee Research Foundation Method and apparatus for predicting object properties and events using similarity-based information retrieval and model
US8396582B2 (en) * 2008-03-08 2013-03-12 Tokyo Electron Limited Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool
DE102008041821A1 (de) * 2008-09-04 2010-03-11 Leica Microsystems (Schweiz) Ag Videoadapter für eine Mikroskopkamera
JP2010079221A (ja) * 2008-09-29 2010-04-08 Olympus Corp 生体観察装置
US8373113B2 (en) * 2008-11-05 2013-02-12 Hitachi High-Technologies Corporation Calibration standard member, method for manufacturing the member and scanning electronic microscope using the member
US8488863B2 (en) * 2008-11-06 2013-07-16 Los Alamos National Security, Llc Combinational pixel-by-pixel and object-level classifying, segmenting, and agglomerating in performing quantitative image analysis that distinguishes between healthy non-cancerous and cancerous cell nuclei and delineates nuclear, cytoplasm, and stromal material objects from stained biological tissue materials
JP5301970B2 (ja) 2008-12-08 2013-09-25 オリンパス株式会社 顕微鏡用デジタルカメラシステム及び顕微鏡システム
JP5152077B2 (ja) * 2009-04-01 2013-02-27 ソニー株式会社 生体像提示装置、生体像提示方法及びプログラム並びに生体像提示システム
US8729470B2 (en) * 2009-06-14 2014-05-20 DLA Instruments Electron microscope with an emitter operating in medium vacuum
US9995766B2 (en) * 2009-06-16 2018-06-12 The Regents Of The University Of California Methods and systems for measuring a property of a macromolecule
JP5091976B2 (ja) 2010-04-09 2012-12-05 株式会社東芝 映像表示装置、映像表示方法及び映像表示プログラム
EP2617011A1 (en) * 2010-09-14 2013-07-24 Ramot at Tel Aviv University, Ltd. Cell occupancy measurement
JP2012237566A (ja) * 2011-05-10 2012-12-06 Hitachi High-Technologies Corp 欠陥観察方法及びその装置
KR20130035061A (ko) 2011-09-29 2013-04-08 삼성전기주식회사 솔더볼 검사장치
JP5894854B2 (ja) * 2012-05-11 2016-03-30 株式会社日立ハイテクノロジーズ 検査装置
JP5608209B2 (ja) 2012-11-28 2014-10-15 株式会社日立ハイテクノロジーズ 欠陥レビュー装置
JP6194450B2 (ja) * 2013-04-15 2017-09-13 株式会社メガチップス 状態推定装置、プログラムおよび集積回路
JP6070420B2 (ja) * 2013-05-31 2017-02-01 富士ゼロックス株式会社 画像処理装置及びプログラム
US9263233B2 (en) * 2013-09-29 2016-02-16 Carl Zeiss Microscopy Gmbh Charged particle multi-beam inspection system and method of operating the same
JP6253368B2 (ja) * 2013-11-25 2017-12-27 キヤノン株式会社 三次元形状計測装置およびその制御方法
US10290092B2 (en) * 2014-05-15 2019-05-14 Applied Materials Israel, Ltd System, a method and a computer program product for fitting based defect detection
CN106463434B (zh) * 2014-06-10 2020-12-22 Asml荷兰有限公司 计算晶片检验
US10325057B2 (en) * 2015-08-17 2019-06-18 Amber Precision Instruments, Inc. Using computer-aided design layout in scanning system
JP6643072B2 (ja) * 2015-12-10 2020-02-12 キヤノン株式会社 顕微鏡システムおよびその制御方法
CN109310328B (zh) * 2016-03-25 2022-05-17 统雷有限公司 用于3d测量应用的mems可调vcsel驱动的扫频光源oct
US11366455B2 (en) * 2016-05-09 2022-06-21 Strong Force Iot Portfolio 2016, Llc Methods and systems for optimization of data collection and storage using 3rd party data from a data marketplace in an industrial internet of things environment
US10085162B2 (en) * 2016-07-22 2018-09-25 Ets-Lindgren, Inc. System and method for over-the-air testing of milli-meter wave and other beamforming technologies
US10239178B2 (en) * 2016-10-17 2019-03-26 Virtek Vision International, ULC Laser projector with dynamically adaptable focus
EP3557521B1 (en) 2016-12-19 2024-09-25 Kabushiki Kaisha Yaskawa Denki Industrial device image recognition processor and controller
US10333632B2 (en) * 2017-04-03 2019-06-25 Ets-Lindgren, Inc. Method and system for testing beam forming capabilities of wireless devices
US10311573B2 (en) * 2017-05-02 2019-06-04 Techcyte, Inc. Training and machine learning classification of mold in digital microscopy images
WO2019032723A1 (en) * 2017-08-09 2019-02-14 Allen Institute IMAGE PROCESSING SYSTEMS, DEVICES, AND METHODS FOR GENERATING AN IMAGE HAVING PREDICTIVE MARKING
WO2019243897A2 (en) * 2018-06-19 2019-12-26 Metasystems Hard And Software Gmbh System and method for detection and classification of objects of interest in microscope images by supervised machine learning
US10169852B1 (en) * 2018-07-03 2019-01-01 Nanotronics Imaging, Inc. Systems, devices, and methods for providing feedback on and improving the accuracy of super-resolution imaging
US10481379B1 (en) 2018-10-19 2019-11-19 Nanotronics Imaging, Inc. Method and system for automatically mapping fluid objects on a substrate

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006238802A (ja) * 2005-03-03 2006-09-14 Olympus Corp 細胞観察装置、細胞観察方法、顕微鏡システム、及び細胞観察プログラム
US20160155239A1 (en) * 2013-08-02 2016-06-02 Olympus Corporation Cell Tracking Device and Method, and Storage Medium Non-Transitory Storing Computer-Readable Cell Tracking Programs
TW201730843A (zh) * 2015-12-09 2017-09-01 克萊譚克公司 藉由降低晶粒至晶粒製程雜訊之缺陷信號對雜訊增強
WO2017145172A1 (en) * 2016-02-23 2017-08-31 Sigtuple Technologies Private Limited System and method for extraction and analysis of samples under a microscope
US10048477B1 (en) * 2017-02-10 2018-08-14 Nanotronics Imaging, Inc. Camera and specimen alignment to facilitate large area imaging in microscopy

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Publication number Publication date
WO2020081211A1 (en) 2020-04-23
US11333876B2 (en) 2022-05-17
US10809516B2 (en) 2020-10-20
CN117784387A (zh) 2024-03-29
US20240160002A1 (en) 2024-05-16
TW202422151A (zh) 2024-06-01
CN112912783B (zh) 2023-05-30
EP3867686A4 (en) 2022-08-17
US10481379B1 (en) 2019-11-19
JP2022502796A (ja) 2022-01-11
JP2023052869A (ja) 2023-04-12
KR20210077735A (ko) 2021-06-25
TW202028802A (zh) 2020-08-01
US20200124837A1 (en) 2020-04-23
CN112912783A (zh) 2021-06-04
KR102706113B1 (ko) 2024-09-12
EP3867686A1 (en) 2021-08-25
US20220276481A1 (en) 2022-09-01
JP7226852B2 (ja) 2023-02-21
JP7553978B2 (ja) 2024-09-19
EP3867686B1 (en) 2025-03-19
US12174361B2 (en) 2024-12-24
US20210026125A1 (en) 2021-01-28
US11815673B2 (en) 2023-11-14

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