TWI833342B - Two-phase immersion-cooling heat-dissipation structure having porous structure - Google Patents

Two-phase immersion-cooling heat-dissipation structure having porous structure Download PDF

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TWI833342B
TWI833342B TW111133481A TW111133481A TWI833342B TW I833342 B TWI833342 B TW I833342B TW 111133481 A TW111133481 A TW 111133481A TW 111133481 A TW111133481 A TW 111133481A TW I833342 B TWI833342 B TW I833342B
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porous structure
heat dissipation
fins
fin
metal powder
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TW111133481A
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TW202411586A (en
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楊景明
吳俊德
葉子暘
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艾姆勒科技股份有限公司
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Abstract

A two-phase immersion-cooling heat-dissipation structure having a porous structure is provided. The structure includes a heat-dissipation substrate, a plurality of fins, and a reinforced frame. The heat-dissipation substrate has opposite fin and non-fin surfaces. The non-fin surface is used for contacting the heat source immersed in the two-phase coolant, and the fin surface is integrally connected with the fins. At least part of the fin surface and at least some of the fins are covered with a porous structure. The porous structure has a porosity in the range of from 10% to 50% and a thickness of between 0.1 mm and 1 mm. The reinforced frame is coupled to the heat-dissipation substrate and surrounds at least some of the fins.

Description

具有多孔結構的兩相浸沒式散熱結構Two-phase immersed heat dissipation structure with porous structure

本發明涉及一種散熱結構,具體來說是涉及一種具有多孔結構的兩相浸沒式散熱結構。The present invention relates to a heat dissipation structure, specifically to a two-phase immersed heat dissipation structure with a porous structure.

浸沒式冷卻技術是將發熱元件(如伺服器、磁碟陣列等)直接浸沒在不導電的冷卻液中,以透過冷卻液吸熱氣化帶走發熱元件運作所產生之熱能。然而,如何透過浸沒式冷卻技術更加有效地進行散熱一直是業界所需要解決的問題。Immersion cooling technology directly immerses heating components (such as servers, disk arrays, etc.) in non-conductive cooling liquid, so that the cooling liquid absorbs heat and vaporizes to take away the heat energy generated by the operation of the heating components. However, how to dissipate heat more effectively through immersion cooling technology has always been a problem that the industry needs to solve.

有鑑於此,本發明人本於多年從事相關產品之開發與設計,有感上述缺失之可改善,乃特潛心研究並配合學理之運用,終於提出一種設計合理且有效改善上述缺失之本發明。In view of this, the inventor has been engaged in the development and design of related products for many years. He felt that the above deficiencies could be improved, so he devoted himself to research and applied academic theories, and finally proposed an invention that is reasonably designed and effectively improves the above deficiencies.

本發明所要解決的技術問題在於,針對現有技術的不足提供一種具有多孔結構的兩相浸沒式散熱結構。The technical problem to be solved by the present invention is to provide a two-phase immersed heat dissipation structure with a porous structure in view of the shortcomings of the existing technology.

本發明實施例公開了一種具有多孔結構的兩相浸沒式散熱結構,其包括有一散熱基底、多個鰭片、以及一強化外框,所述散熱基底具有相對的鰭片面與非鰭片面,所述非鰭片面用以與浸沒於兩相冷卻液的熱源形成接觸,所述多個鰭片分別是以鏟削成型方式一體成型在所述鰭片面的鏟削式鰭片,並且所述鰭片面的至少一部分和所述多個鰭片中的至少一部分覆蓋有多孔結構,所述多孔結構的孔隙率介於10%~50%,並且厚度介於0.1mm~1mm,所述鰭片的厚度介於0.1mm~0.35mm、鰭片間距介於0.1mm~0.35mm、鰭片高度介於5mm~10mm,並且所述強化外框結合至所述散熱基底並圍繞所述多個鰭片中的至少一部分。An embodiment of the present invention discloses a two-phase immersed heat dissipation structure with a porous structure, which includes a heat dissipation base, a plurality of fins, and a reinforced outer frame. The heat dissipation base has opposite fin surfaces and non-fin surfaces. The non-fin surface is used to form contact with the heat source immersed in the two-phase cooling liquid. The plurality of fins are respectively scraped fins integrally formed on the fin surface by scraping molding, and the fin surface At least a part of and at least a part of the plurality of fins are covered with a porous structure, the porosity of the porous structure is between 10%~50%, and the thickness is between 0.1mm~1mm, and the thickness of the fins is between is between 0.1mm~0.35mm, the fin pitch is between 0.1mm~0.35mm, and the fin height is between 5mm~10mm, and the reinforced outer frame is bonded to the heat dissipation base and surrounds at least one of the plurality of fins. part.

在一優選實施例中,所述鰭片是由銅、銅合金的其一所製成。In a preferred embodiment, the fins are made of copper or copper alloy.

在一優選實施例中,所述多孔結構是由銅、銅合金、銀、銀合金的其一所製成。In a preferred embodiment, the porous structure is made of one of copper, copper alloy, silver, and silver alloy.

在一優選實施例中,所述多孔結構是將金屬粉粒進行燒結所形成,且所述金屬粉粒的中值粒徑(D50)為10μm~30μm。In a preferred embodiment, the porous structure is formed by sintering metal powder particles, and the median particle diameter (D50) of the metal powder particles is 10 μm ~ 30 μm.

在一優選實施例中,所述多孔結構是將金屬粉粒混合高分子材料後進行燒結所形成,且所述金屬粉末的中值粒徑(D50)為10μm~30μm。In a preferred embodiment, the porous structure is formed by mixing metal powder with polymer materials and then sintering, and the median particle size (D50) of the metal powder is 10 μm ~ 30 μm.

在一優選實施例中,所述多孔結構是將金屬粉粒調合成金屬粉膏或粉液後進行燒結所形成,且所述金屬粉膏或粉液的中值粒徑(D50)為1μm~10μm。In a preferred embodiment, the porous structure is formed by mixing metal powder particles into a metal powder paste or powder liquid and then sintering, and the median particle size (D50) of the metal powder paste or powder liquid is 1 μm~ 10μm.

在一優選實施例中,所述多孔結構是將金屬粉粒調合成金屬粉膏或粉液後進行燒結所形成,且所述金屬粉膏或粉液的中值粒徑(D50)為0.01μm~0.5μm。In a preferred embodiment, the porous structure is formed by mixing metal powder particles into a metal powder paste or powder liquid and then sintering, and the median particle size (D50) of the metal powder paste or powder liquid is 0.01 μm. ~0.5μm.

在一優選實施例中,所述多孔結構是由不同材料進行疊加而成的多層複合結構。In a preferred embodiment, the porous structure is a multi-layer composite structure made of different materials.

在一優選實施例中,所述多孔結構為銅網結構。In a preferred embodiment, the porous structure is a copper mesh structure.

在一優選實施例中,所述多孔結構在對應所述熱源位置處的平均厚度是大於對應非所述熱源位置處的平均厚度。In a preferred embodiment, the average thickness of the porous structure at positions corresponding to the heat source is greater than the average thickness corresponding to positions other than the heat source.

在一優選實施例中,所述多孔結構在兩所述鰭片之間的中心位置處的厚度是大於鄰接兩所述鰭片的兩側緣位置處的厚度。In a preferred embodiment, the thickness of the porous structure at a central position between the two fins is greater than the thickness at both side edges adjacent to the two fins.

在一優選實施例中,所述熱源包含有間隔分布的多個局部熱源,所述多孔結構在對應所述多個局部熱源位置處的平均厚度是大於對應非所述多個局部熱源位置處的平均厚度。In a preferred embodiment, the heat source includes a plurality of local heat sources distributed at intervals, and the average thickness of the porous structure at positions corresponding to the plurality of local heat sources is greater than at positions corresponding to non-said plurality of local heat sources. The average thickness.

在一優選實施例中,所述多孔結構區分為覆蓋在所述鰭片面上的第一多孔結構與覆蓋在所述鰭片側緣的第二多孔結構,且所述第一多孔結構與所述第二多孔結構分別是由不同材料及製法的至少其一所形成。In a preferred embodiment, the porous structure is divided into a first porous structure covering the surface of the fin and a second porous structure covering the side edge of the fin, and the first porous structure and The second porous structures are respectively formed by at least one of different materials and manufacturing methods.

在一優選實施例中,所述散熱基底及所述強化外框的至少其一形成有多個穿孔,且有多個彈簧螺絲對應穿過所述多個穿孔。In a preferred embodiment, at least one of the heat dissipation base and the reinforced outer frame is formed with a plurality of through holes, and a plurality of spring screws pass through the plurality of through holes correspondingly.

在一優選實施例中,所述具有多孔結構的兩相浸沒式散熱結構,更包括:一高導熱結構,其結合至所述散熱基底的所述非鰭片面,使所述散熱基底是透過所述高導熱結構與所述熱源形成間接接觸,所述高導熱結構內部形成有一真空密閉腔,且所述真空密閉腔中含有液體。In a preferred embodiment, the two-phase immersed heat dissipation structure with a porous structure further includes: a high thermal conductivity structure, which is bonded to the non-fin surface of the heat dissipation base so that the heat dissipation base can pass through the The highly thermally conductive structure is in indirect contact with the heat source, a vacuum sealed cavity is formed inside the highly thermally conductive structure, and the vacuum sealed cavity contains liquid.

本發明實施例另公開了一種具有多孔結構的兩相浸沒式散熱結構,其包括有一散熱基底、多個鰭片、以及一強化外框,所述散熱基底具有相對的鰭片面與非鰭片面,所述非鰭片面用以與浸沒於兩相冷卻液的熱源形成接觸,所述多個鰭片分別是一體成型在所述鰭片面的針鰭片,並且所述鰭片面的至少一部分和所述多個鰭片中的至少一部分覆蓋有多孔結構,所述多孔結構的孔隙率介於10%~50%,並且厚度介於0.1mm~1mm,所述鰭片的直徑介於0.3mm~1mm、鰭片間距介於0.3mm~0.6mm、鰭片高度介於3mm~7mm,並且所述強化外框結合至所述散熱基底並圍繞所述多個鰭片中的至少一部分。An embodiment of the present invention further discloses a two-phase immersed heat dissipation structure with a porous structure, which includes a heat dissipation base, a plurality of fins, and a reinforced outer frame. The heat dissipation base has opposite fin surfaces and non-fin surfaces. The non-fin surface is used to form contact with the heat source immersed in the two-phase cooling liquid. The plurality of fins are respectively pin fins integrally formed on the fin surface, and at least a part of the fin surface and the At least a part of the plurality of fins is covered with a porous structure, the porosity of the porous structure is between 10% and 50%, and the thickness is between 0.1mm and 1mm, and the diameter of the fins is between 0.3mm and 1mm. The fin pitch ranges from 0.3mm to 0.6mm, the fin height ranges from 3mm to 7mm, and the reinforced outer frame is coupled to the heat dissipation base and surrounds at least a part of the plurality of fins.

為使能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與圖式,然而所提供的圖式僅用於提供參考與說明,並非用來對本發明加以限制。In order to further understand the features and technical content of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings provided are only for reference and illustration and are not used to limit the present invention.

以下是通過特定的具體實施例來說明本發明所公開有關的實施方式,本領域技術人員可由本說明書所公開的內容瞭解本發明的優點與效果。本發明可通過其他不同的具體實施例加以施行或應用,本說明書中的各項細節也可基於不同觀點與應用,在不背離本發明的構思下進行各種修改與變更。另外,本發明的附圖僅為簡單示意說明,並非依實際尺寸的描繪,事先聲明。並且,附圖中相同或類似的部位以相同的標號標示。以下的實施方式將進一步詳細說明本發明的相關技術內容,但所公開的內容並非用以限制本發明的保護範圍。另外,本文中所使用的術語“或”,應視實際情況可能包括相關聯的列出項目中的任一個或者多個的組合。The following is a description of the relevant implementation modes disclosed in the present invention through specific specific examples. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only simple schematic illustrations and are not depictions based on actual dimensions, as is stated in advance. In addition, the same or similar parts in the drawings are labeled with the same reference numerals. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the scope of the present invention. In addition, the term "or" used in this article shall include any one or combination of more of the associated listed items depending on the actual situation.

[第一實施例][First Embodiment]

請參閱圖1至圖2所示,其為本發明的其中一種實施例,本發明實施例提供一種具有多孔結構的兩相浸沒式散熱結構,可用於接觸浸沒於兩相冷卻液中的熱源。如圖1、2所示,根據本發明實施例所提供的具有多孔結構的兩相浸沒式散熱結構,其基本上包括有一散熱基底10、以及多個鰭片20。Please refer to FIG. 1 to FIG. 2 , which is one embodiment of the present invention. The embodiment of the present invention provides a two-phase immersed heat dissipation structure with a porous structure, which can be used to contact a heat source immersed in a two-phase cooling liquid. As shown in FIGS. 1 and 2 , a two-phase immersed heat dissipation structure with a porous structure provided according to an embodiment of the present invention basically includes a heat dissipation base 10 and a plurality of fins 20 .

在本實施例中,散熱基底10可採用高導熱性材所製成,例如鋁、銅或其合金。散熱基底10可以是非多孔散熱材或是多孔散熱材。較佳來說,散熱基底10可以是浸沒於兩相冷卻液(如電子氟化液)中且孔隙率大於8%的多孔散熱板,用於增加氣泡的生成量,以加強浸沒式散熱效果。In this embodiment, the heat dissipation substrate 10 can be made of a material with high thermal conductivity, such as aluminum, copper or alloys thereof. The heat dissipation substrate 10 may be a non-porous heat dissipation material or a porous heat dissipation material. Preferably, the heat dissipation substrate 10 can be a porous heat dissipation plate immersed in a two-phase cooling liquid (such as electronic fluoride liquid) with a porosity greater than 8%, which is used to increase the generation of bubbles and enhance the immersion heat dissipation effect.

在本實施例中,散熱基底10具有相背對的鰭片面101與非鰭片面102。散熱基底10的非鰭片面102用以與浸沒於兩相冷卻液的熱源800形成接觸,這接觸可以是直接形成接觸或是透過中介層間接形成接觸。鰭片20可以是由銅或銅合金所製成。並且,多個鰭片20分別是以鏟削成型方式一體成型在鰭片面101。也就是說,本實施例的散熱基底10的鰭片面101透過鏟削成型方式一體成型有極高密度排列的鏟削式鰭片(skived fins)。進一步說,鰭片20的鰭片厚度T是介於0.1mm~0.35mm,這裡的鰭片厚度T是指單一鰭片中心厚度。鰭片間距D是介於0.1mm~0.35mm,這裡的鰭片間距D是指鰭片的側面到另一鰭片的側面的法向距離。鰭片高度H是介於5mm~10mm,這裡的鰭片高度H是指從鰭片面101到鰭片最高點的垂直距離。In this embodiment, the heat dissipation substrate 10 has opposite fin surfaces 101 and non-fin surfaces 102 . The non-fin surface 102 of the heat dissipation substrate 10 is used to make contact with the heat source 800 immersed in the two-phase cooling liquid. This contact may be direct contact or indirect contact through an interlayer. Fins 20 may be made of copper or copper alloy. Moreover, each of the plurality of fins 20 is integrally formed on the fin surface 101 by cutting. That is to say, the fin surface 101 of the heat dissipation base 10 of this embodiment is integrally formed with extremely high-density arranged skived fins through skiving molding. Furthermore, the fin thickness T of the fin 20 is between 0.1 mm and 0.35 mm. The fin thickness T here refers to the center thickness of a single fin. The fin spacing D is between 0.1mm~0.35mm. The fin spacing D here refers to the normal distance from the side of the fin to the side of the other fin. The fin height H is between 5mm and 10mm. The fin height H here refers to the vertical distance from the fin surface 101 to the highest point of the fin.

進一步說,本實施例的散熱基底10的鰭片面101的至少一部分和多個鰭片20中的至少一部分覆蓋有多孔結構30。多孔結構30的孔隙率介於10%~50%,並且厚度介於0.1mm~1mm,以增加鰭片面101和鰭片20周圍的氣泡成核點,並使熱源800可以傳熱到鰭片20的較高位置處,進而增加鰭片20的較高位置處的利用率。Furthermore, at least part of the fin surface 101 of the heat dissipation base 10 and at least part of the plurality of fins 20 of this embodiment are covered with the porous structure 30 . The porous structure 30 has a porosity between 10% and 50% and a thickness between 0.1mm and 1mm to increase bubble nucleation points around the fin surface 101 and the fins 20 and enable the heat source 800 to transfer heat to the fins 20 at a higher position, thereby increasing the utilization of the higher position of the fins 20 .

細部來說,多孔結構30可以是以銅、銅合金、銀或銀合金等金屬所製成。並且,多孔結構30可以是將金屬粉粒進行燒結所形成,這裡指的燒結可以是松裝燒結。另外,多孔結構30可以是將金屬粉粒混合高分子材料後進行燒結所形成,這裡的高分子材料可以是黏結劑或造孔劑等。多孔結構30也可以是將金屬粉粒調合成可塗抹的金屬粉膏(液)後進行燒結所形成。金屬粉末的中值粒徑(D50)優選為10μm~30μm、或是30μm~500μm。金屬粉膏或粉液的中值粒徑(D50)優選為1μm~10μm、或是0.01μm~0.5μm。In detail, the porous structure 30 may be made of metal such as copper, copper alloy, silver or silver alloy. Furthermore, the porous structure 30 may be formed by sintering metal powder particles, and the sintering referred to here may be loose sintering. In addition, the porous structure 30 may be formed by mixing metal powder with a polymer material and then sintering. The polymer material here may be a binder or a pore-forming agent. The porous structure 30 may also be formed by mixing metal powder particles into a spreadable metal powder paste (liquid) and then sintering. The median particle diameter (D50) of the metal powder is preferably 10 μm to 30 μm or 30 μm to 500 μm. The median particle diameter (D50) of the metal powder paste or powder liquid is preferably 1 μm to 10 μm, or 0.01 μm to 0.5 μm.

另外,多孔結構30可以進一步區分為覆蓋在鰭片面101上的第一多孔結構30a與覆蓋在鰭片20側緣的第二多孔結構30b,且第一多孔結構30a與第二多孔結構30b可以分別是由不同材料或製法所形成。再者,多個鰭片20中對應於熱源800正上方的鰭片20側緣可以是完整覆蓋有第二多孔結構30b,遠離於熱源800的鰭片20側緣則可以不覆蓋有第二多孔結構30b。In addition, the porous structure 30 can be further divided into a first porous structure 30a covering the fin surface 101 and a second porous structure 30b covering the side edge of the fin 20, and the first porous structure 30a and the second porous structure 30b The structures 30b may be formed of different materials or manufacturing methods. Furthermore, the side edges of the fins 20 directly above the heat source 800 among the plurality of fins 20 may be completely covered with the second porous structure 30b, and the side edges of the fins 20 far away from the heat source 800 may not be covered with the second porous structure 30b. Porous structure 30b.

[第二實施例][Second Embodiment]

請參閱圖3所示,其為本發明的第二實施例。本實施例與第一實施例大致相同,其差異說明如下。Please refer to Figure 3, which is a second embodiment of the present invention. This embodiment is substantially the same as the first embodiment, and the differences are explained as follows.

在本實施例中,散熱基底10還結合有強化外框40,且其圍繞多個鰭片20中的至少一部分,以強化整體結構強度並避免翹曲造成的問題及損壞。強化外框40可以是由鋁合金或不鏽鋼所製成。並且,強化外框40可以是以壓合緊配合、焊接、摩擦攪拌接合(FSW)、膠黏、或擴散接合等方式與散熱基底10形成接合。In this embodiment, the heat dissipation base 10 is also combined with a reinforced outer frame 40 that surrounds at least part of the plurality of fins 20 to enhance the overall structural strength and avoid problems and damage caused by warping. The reinforced outer frame 40 may be made of aluminum alloy or stainless steel. Furthermore, the reinforced outer frame 40 may be joined to the heat dissipation base 10 by means of press fit, welding, friction stir welding (FSW), gluing, or diffusion bonding.

[第三實施例][Third Embodiment]

請參閱圖4所示,其為本發明的第三實施例。本實施例與第一及第二實施例大致相同,其差異說明如下。Please refer to Figure 4, which is a third embodiment of the present invention. This embodiment is substantially the same as the first and second embodiments, and the differences are explained as follows.

在本實施例中,散熱基底10的兩側或強化外框40的兩側可分別形成有多個穿孔15,並且有多個彈簧螺絲25對應穿過多個穿孔15,以更好的固定在具熱源800的主板上。In this embodiment, a plurality of through holes 15 can be formed on both sides of the heat dissipation base 10 or both sides of the reinforced outer frame 40, and a plurality of spring screws 25 can pass through the plurality of through holes 15 to better fix the device. Heat source 800 on the motherboard.

[第四實施例][Fourth Embodiment]

請參閱圖5所示,其為本發明的第四實施例。本實施例與第一實施例大致相同,其差異說明如下。Please refer to Figure 5, which is a fourth embodiment of the present invention. This embodiment is substantially the same as the first embodiment, and the differences are explained as follows.

在本實施例中,更包括有一高導熱結構50。並且,高導熱結構50是結合至散熱基底10的非鰭片面102,使散熱基底10是透過高導熱結構50與浸沒於兩相冷卻液的熱源800形成間接接觸。細部來說,高導熱結構50可以是透過焊接、摩擦攪拌接合(FSW)、膠黏、或擴散接合(diffusion bonding)等方式結合至散熱基底10的非鰭片面102。在其他實施例中,散熱基底10可以是與高導熱結構50為一體成型。In this embodiment, a high thermal conductivity structure 50 is further included. Furthermore, the high thermal conductivity structure 50 is coupled to the non-fin surface 102 of the heat dissipation base 10 so that the heat dissipation base 10 forms indirect contact with the heat source 800 immersed in the two-phase cooling liquid through the high thermal conductivity structure 50 . In detail, the high thermal conductivity structure 50 may be bonded to the non-fin surface 102 of the heat dissipation substrate 10 through welding, friction stir welding (FSW), gluing, or diffusion bonding. In other embodiments, the heat dissipation base 10 may be integrally formed with the high thermal conductivity structure 50 .

進一步說,高導熱結構50內部形成有一真空密閉腔501,且真空密閉腔501的腔頂壁與腔底壁還可以形成有燒結體,並且真空閉密腔501中含有適量的液體,所述液體可以是水或丙酮。並且,高導熱結構50的底面可用以接觸浸沒於兩相冷卻液中的熱源800,以使浸沒在兩相冷卻液中的熱源800,除了可以透過兩相冷卻液吸熱氣化帶走熱源800產生之熱能,更可以透過高導熱結構50接觸並吸收熱源800產生之熱能,使得真空密閉腔501中內的液體氣化、蒸發為蒸汽,散發至散熱基底10並將熱能快速傳給與散熱基底10一體成型且以極高密度排列的鏟削式鰭片,並利用兩相冷卻液吸熱氣化將鏟削式鰭片吸收的熱能帶走,而真空密閉腔501中的蒸汽交出熱能並於腔頂壁冷凝後再回流至腔底壁,如此高速迴圈,就能將熱源800產生之熱能快速匯出,進而強化浸沒式散熱效果。Furthermore, a vacuum sealed cavity 501 is formed inside the high thermal conductivity structure 50, and the top wall and bottom wall of the vacuum sealed cavity 501 can also be formed with sintered bodies, and the vacuum sealed cavity 501 contains an appropriate amount of liquid, and the liquid Can be water or acetone. Moreover, the bottom surface of the high thermal conductivity structure 50 can be used to contact the heat source 800 immersed in the two-phase cooling liquid, so that the heat source 800 immersed in the two-phase cooling liquid can absorb heat and vaporize away the heat source 800 to generate electricity. The heat energy can also contact and absorb the heat energy generated by the heat source 800 through the high thermal conductivity structure 50, causing the liquid in the vacuum sealed chamber 501 to vaporize and evaporate into steam, which is distributed to the heat dissipation base 10 and the heat energy is quickly transferred to the heat dissipation base 10 The scraped fins are formed in one piece and arranged at an extremely high density, and use the two-phase coolant to absorb heat and vaporize to take away the heat energy absorbed by the scraping fins, and the steam in the vacuum sealed cavity 501 surrenders the heat energy and circulates it in the cavity. After condensation on the top wall, it flows back to the bottom wall of the cavity. Such a high-speed loop can quickly dissipate the heat energy generated by the heat source 800, thereby enhancing the immersion heat dissipation effect.

[第五實施例][Fifth Embodiment]

請參閱圖6所示,其為本發明的第五實施例。本實施例與第一實施例大致相同,其差異說明如下。Please refer to FIG. 6 , which is a fifth embodiment of the present invention. This embodiment is substantially the same as the first embodiment, and the differences are explained as follows.

在本實施例中,多孔結構30可以為銅網結構。In this embodiment, the porous structure 30 may be a copper mesh structure.

[第六實施例][Sixth Embodiment]

請參閱圖7所示,其為本發明的第六實施例。本實施例與第一實施例大致相同,其差異說明如下。Please refer to FIG. 7 , which is a sixth embodiment of the present invention. This embodiment is substantially the same as the first embodiment, and the differences are explained as follows.

在本實施例中,多孔結構30在對應熱源800位置處的平均厚度是大於對應非熱源800位置處的平均厚度,可增加多孔結構30在對應熱源800位置處的氣泡生成量,以強化浸沒式散熱效果。In this embodiment, the average thickness of the porous structure 30 at the position corresponding to the heat source 800 is greater than the average thickness at the position corresponding to the non-heat source 800, which can increase the amount of bubble generation of the porous structure 30 at the position corresponding to the heat source 800 to enhance the immersion type. Heat dissipation effect.

[第七實施例][Seventh Embodiment]

請參閱圖8所示,其為本發明的第七實施例。本實施例與第一及第六實施例大致相同,其差異說明如下。Please refer to FIG. 8 , which is a seventh embodiment of the present invention. This embodiment is substantially the same as the first and sixth embodiments, and the differences are explained as follows.

在本實施例中,多孔結構30在兩鰭片20之間的中心位置處的厚度是大於鄰接兩鰭片20的兩側緣位置處的厚度,也就是說,多孔結構30在兩鰭片20之間形成有凸起結構,相較於平面結構和凹下結構,本實施例的凸起結構可以使生成的氣泡更快速的脫離表面,更強化浸沒式散熱效果。In this embodiment, the thickness of the porous structure 30 at the center position between the two fins 20 is greater than the thickness at the two edge positions adjacent to the two fins 20 . That is to say, the thickness of the porous structure 30 at the center position between the two fins 20 A convex structure is formed between them. Compared with the flat structure and the concave structure, the convex structure of this embodiment can make the generated bubbles break away from the surface more quickly and enhance the immersion heat dissipation effect.

[第八實施例][Eighth Embodiment]

請參閱圖9所示,其為本發明的第八實施例。本實施例與第一及第六實施例大致相同,其差異說明如下。Please refer to FIG. 9 , which is an eighth embodiment of the present invention. This embodiment is substantially the same as the first and sixth embodiments, and the differences are explained as follows.

在本實施例中,多孔結構30可以是由不同材料進行疊加而成的多層複合結構。In this embodiment, the porous structure 30 may be a multi-layer composite structure made of different materials.

[第九實施例][Ninth Embodiment]

請參閱圖10所示,其為本發明的第九實施例。本實施例與第一及第七實施例大致相同,其差異說明如下。Please refer to Figure 10, which is a ninth embodiment of the present invention. This embodiment is substantially the same as the first and seventh embodiments, and the differences are explained as follows.

在本實施例中,熱源800包含有間隔分布的第一局部熱源801與第二局部熱源802,當然也可以更包含有第三局部熱源、第四局部熱源等,且數量與分布方式並不限制於此。多孔結構30在對應第一局部熱源801與第二局部熱源802位置處的平均厚度是大於對應非第一局部熱源801與非第二局部熱源802位置處的平均厚度。也就是說,多孔結構30在對應多個局部熱源位置處的平均厚度是大於對應非多個局部熱源位置處的平均厚度。In this embodiment, the heat source 800 includes a first local heat source 801 and a second local heat source 802 distributed at intervals. Of course, it may also include a third local heat source, a fourth local heat source, etc., and the number and distribution method are not limited. Here it is. The average thickness of the porous structure 30 at the positions corresponding to the first local heat source 801 and the second local heat source 802 is greater than the average thickness at the positions corresponding to the non-first local heat source 801 and the non-second local heat source 802 . That is to say, the average thickness of the porous structure 30 at positions corresponding to multiple local heat sources is greater than the average thickness corresponding to positions without multiple local heat sources.

[第十實施例][Tenth Embodiment]

請參閱圖11所示,其為本發明的第十實施例。本實施例與第一實施例大致相同,其差異說明如下。Please refer to Figure 11, which is a tenth embodiment of the present invention. This embodiment is substantially the same as the first embodiment, and the differences are explained as follows.

在本實施例中,多個鰭片20是一體成型在散熱基底10的鰭片面101的針鰭片(pin fins)。進一步說,鰭片20的鰭片直徑d是介於0.3mm~1mm,這裡的鰭片直徑d是指單一鰭片中心直徑。鰭片間距D是介於0.3mm~0.6mm,這裡的鰭片間距D是指鰭片的側面到另一鰭片的側面的最短距離。鰭片高度是介於3mm~7mm,這裡的鰭片高度可參照圖2是指從鰭片面到鰭片最高點的垂直距離。In this embodiment, the plurality of fins 20 are pin fins integrally formed on the fin surface 101 of the heat dissipation base 10 . Furthermore, the fin diameter d of the fin 20 is between 0.3 mm and 1 mm, and the fin diameter d here refers to the center diameter of a single fin. The fin spacing D is between 0.3mm~0.6mm. The fin spacing D here refers to the shortest distance from the side of a fin to the side of another fin. The fin height is between 3mm~7mm. The fin height here refers to the vertical distance from the fin surface to the highest point of the fin. Refer to Figure 2.

綜合以上所述,本發明提供的具有多孔結構的兩相浸沒式散熱結構,其至少可以通過「散熱基底」、「多個鰭片」、「強化外框」、「散熱基底具有相對的鰭片面與非鰭片面」、「非鰭片面用以與浸沒於兩相冷卻液的熱源形成接觸」、「鰭片面的至少一部分和多個鰭片中的至少一部分覆蓋有多孔結構,且多孔結構的孔隙率介於10%~50%,厚度介於0.1mm~1mm」、「強化外框結合至散熱基底並圍繞多個鰭片中的至少一部分」的技術方案,得以有效的強化浸沒式散熱效果及結構強度。Based on the above, the present invention provides a two-phase immersed heat dissipation structure with a porous structure, which can at least pass through a "heat dissipation base", "multiple fins", "reinforced outer frame", and "the heat dissipation base has opposite fin surfaces". "With the non-fin surface", "the non-fin surface is used to form contact with the heat source immersed in the two-phase coolant", "at least a part of the fin surface and at least a part of the plurality of fins are covered with a porous structure, and the pores of the porous structure The efficiency is between 10%~50% and the thickness is between 0.1mm~1mm" and the technical solution of "reinforced outer frame is combined with the heat dissipation base and surrounds at least a part of the multiple fins", which can effectively enhance the immersion heat dissipation effect and Structural strength.

以上所公開的內容僅為本發明的優選可行實施例,並非因此侷限本發明的申請專利範圍,所以凡是運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的申請專利範圍內。The contents disclosed above are only preferred and feasible embodiments of the present invention, and do not limit the scope of the patent application of the present invention. Therefore, all equivalent technical changes made by using the description and drawings of the present invention are included in the application of the present invention. within the scope of the patent.

10:散熱基底 101:鰭片面 102:非鰭片面 15:穿孔 20:鰭片 25:彈簧螺絲 30:多孔結構 30a:第一多孔結構 30b:第二多孔結構 40:強化外框 50:高導熱結構 501:真空密閉腔 T:鰭片厚度 d:鰭片直徑 D:鰭片間距 H:鰭片高度 800:熱源 801:第一局部熱源 802:第二局部熱源 10:Heat dissipation base 101: Fin surface 102:Non-fin side 15:Perforation 20:fins 25:Spring screw 30: Porous structure 30a: First porous structure 30b: Second porous structure 40: Strengthen the frame 50: High thermal conductivity structure 501: Vacuum sealed chamber T: fin thickness d: fin diameter D: Fin spacing H: fin height 800:Heat source 801: First local heat source 802: Second local heat source

圖1為本發明第一實施例的結構俯視示意圖。Figure 1 is a schematic structural top view of the first embodiment of the present invention.

圖2為本發明第一實施例的結構側視示意圖。Figure 2 is a schematic side view of the structure of the first embodiment of the present invention.

圖3為本發明第二實施例的結構側視示意圖。Figure 3 is a schematic side view of the structure of the second embodiment of the present invention.

圖4為本發明第三實施例的結構側視示意圖。Figure 4 is a schematic side view of the structure of the third embodiment of the present invention.

圖5為本發明第四實施例的結構側視示意圖。Figure 5 is a schematic side view of the structure of the fourth embodiment of the present invention.

圖6為本發明第五實施例的結構側視示意圖。Figure 6 is a schematic side view of the structure of the fifth embodiment of the present invention.

圖7為本發明第六實施例的結構側視示意圖。Figure 7 is a schematic side view of the structure of the sixth embodiment of the present invention.

圖8為本發明第七實施例的結構側視示意圖。Figure 8 is a schematic side view of the structure of the seventh embodiment of the present invention.

圖9為本發明第八實施例的結構側視示意圖。Figure 9 is a schematic side view of the structure of the eighth embodiment of the present invention.

圖10為本發明第九實施例的結構側視示意圖。Figure 10 is a schematic side view of the structure of the ninth embodiment of the present invention.

圖11為本發明第十實施例的結構俯視示意圖。Figure 11 is a schematic structural top view of the tenth embodiment of the present invention.

10:散熱基底 10:Heat dissipation base

101:鰭片面 101: Fin surface

102:非鰭片面 102:Non-fin side

20:鰭片 20:fins

30:多孔結構 30: Porous structure

30a:第一多孔結構 30a: First porous structure

30b:第二多孔結構 30b: Second porous structure

800:熱源 800:Heat source

H:鰭片高度 H: fin height

Claims (28)

一種具有多孔結構的兩相浸沒式散熱結構,其包括有一散熱基底、多個鰭片、以及一強化外框,所述散熱基底具有相對的鰭片面與非鰭片面,所述非鰭片面用以與浸沒於兩相冷卻液的熱源形成接觸,所述多個鰭片分別是以鏟削成型方式一體成型在所述鰭片面的鏟削式鰭片,並且所述鰭片面的至少一部分和所述多個鰭片中的至少一部分覆蓋有多孔結構,所述多孔結構的孔隙率介於10%~50%,並且厚度介於0.1mm~1mm,所述鰭片的厚度介於0.1mm~0.35mm、鰭片間距介於0.1mm~0.35mm、鰭片高度介於5mm~10mm,並且所述強化外框結合至所述散熱基底並圍繞所述多個鰭片中的至少一部分;其中,所述多孔結構在對應所述熱源位置處的平均厚度是大於對應非所述熱源位置處的平均厚度。 A two-phase immersed heat dissipation structure with a porous structure, which includes a heat dissipation base, a plurality of fins, and a reinforced outer frame. The heat dissipation base has opposite fin surfaces and non-fin surfaces, and the non-fin surface is used for In contact with the heat source immersed in the two-phase coolant, the plurality of fins are respectively scraped fins integrally formed on the fin surface in a scraping molding manner, and at least a part of the fin surface and the At least a part of the plurality of fins is covered with a porous structure, the porosity of the porous structure is between 10% and 50%, and the thickness is between 0.1mm and 1mm, and the thickness of the fins is between 0.1mm and 0.35mm. , the fin spacing is between 0.1mm~0.35mm, the fin height is between 5mm~10mm, and the reinforced outer frame is coupled to the heat dissipation base and surrounds at least a part of the plurality of fins; wherein, the The average thickness of the porous structure at positions corresponding to the heat source is greater than the average thickness corresponding to positions other than the heat source. 如請求項1所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述鰭片是由銅、銅合金的其一所製成。 The two-phase immersed heat dissipation structure with a porous structure as described in claim 1, wherein the fins are made of one of copper or copper alloy. 如請求項1所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述多孔結構是由銅、銅合金、銀、銀合金的其一所製成。 The two-phase immersed heat dissipation structure with a porous structure as described in claim 1, wherein the porous structure is made of one of copper, copper alloy, silver, and silver alloy. 如請求項1所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述多孔結構是將金屬粉粒進行燒結所形成,且所述金屬粉粒的中值粒徑(D50)為10μm~30μm。 The two-phase immersed heat dissipation structure with a porous structure as described in claim 1, wherein the porous structure is formed by sintering metal powder particles, and the median particle size (D50) of the metal powder particles is 10 μm. ~30μm. 如請求項1所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述多孔結構是將金屬粉粒混合高分子材料後進行燒結 所形成,且所述金屬粉末的中值粒徑(D50)為10μm~30μm。 The two-phase immersed heat dissipation structure with a porous structure as described in claim 1, wherein the porous structure is made by mixing metal powder particles with polymer materials and then sintering formed, and the median particle size (D50) of the metal powder is 10 μm ~ 30 μm. 如請求項1所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述多孔結構是將金屬粉粒調合成金屬粉膏或粉液後進行燒結所形成,且所述金屬粉膏或粉液的中值粒徑(D50)為1μm~10μm。 The two-phase immersed heat dissipation structure with a porous structure as described in claim 1, wherein the porous structure is formed by mixing metal powder particles into a metal powder paste or powder liquid and then sintering, and the metal powder paste or The median particle size (D50) of powder liquid is 1μm~10μm. 如請求項1所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述多孔結構是將金屬粉粒調合成金屬粉膏或粉液後進行燒結所形成,且所述金屬粉膏或粉液的中值粒徑(D50)為0.01μm~0.5μm。 The two-phase immersed heat dissipation structure with a porous structure as described in claim 1, wherein the porous structure is formed by mixing metal powder particles into a metal powder paste or powder liquid and then sintering, and the metal powder paste or The median particle size (D50) of the powder liquid is 0.01μm~0.5μm. 如請求項1所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述多孔結構是由不同材料進行疊加而成的多層複合結構。 The two-phase immersed heat dissipation structure with a porous structure as described in claim 1, wherein the porous structure is a multi-layer composite structure formed by superimposing different materials. 如請求項1所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述多孔結構為銅網結構。 The two-phase immersed heat dissipation structure with a porous structure as described in claim 1, wherein the porous structure is a copper mesh structure. 如請求項1所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述多孔結構在兩所述鰭片之間的中心位置處的厚度是大於鄰接兩所述鰭片的兩側緣位置處的厚度。 The two-phase immersed heat dissipation structure with a porous structure as claimed in claim 1, wherein the thickness of the porous structure at the center between the two fins is greater than that at both sides of the adjacent fins. Thickness at location. 如請求項1所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述熱源包含有間隔分布的多個局部熱源,所述多孔結構在對應所述多個局部熱源位置處的平均厚度是大於對應非所述多個局部熱源位置處的平均厚度。 The two-phase immersed heat dissipation structure with a porous structure as described in claim 1, wherein the heat source includes a plurality of local heat sources distributed at intervals, and the average thickness of the porous structure at positions corresponding to the plurality of local heat sources is greater than the average thickness corresponding to locations other than the plurality of local heat sources. 如請求項1所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述多孔結構區分為覆蓋在所述鰭片面上的第一多孔結構與覆蓋在所述鰭片側緣的第二多孔結構,且所述第一多孔結構與所述第二多孔結構分別是由不同材料及製法的至少其一所形成。 The two-phase immersed heat dissipation structure with a porous structure as claimed in claim 1, wherein the porous structure is divided into a first porous structure covering the fin surface and a second porous structure covering the side edge of the fin. Porous structure, and the first porous structure and the second porous structure are respectively formed by at least one of different materials and manufacturing methods. 如請求項1所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述散熱基底及所述強化外框的至少其一形成有多個穿孔,且有多個彈簧螺絲對應穿過所述多個穿孔。 The two-phase immersed heat dissipation structure with a porous structure as claimed in claim 1, wherein at least one of the heat dissipation base and the reinforced outer frame is formed with a plurality of through holes, and a plurality of spring screws pass through the corresponding holes. Multiple perforations. 如請求項1所述的具有多孔結構的兩相浸沒式散熱結構,更包括:一高導熱結構,其結合至所述散熱基底的所述非鰭片面,使所述散熱基底是透過所述高導熱結構與所述熱源形成間接接觸,所述高導熱結構內部形成有一真空密閉腔,且所述真空密閉腔中含有液體。 The two-phase immersed heat dissipation structure with a porous structure as claimed in claim 1, further comprising: a high thermal conductivity structure, which is combined to the non-fin surface of the heat dissipation base so that the heat dissipation base passes through the high thermal conductivity structure. The thermally conductive structure is in indirect contact with the heat source, a vacuum sealed cavity is formed inside the highly thermally conductive structure, and the vacuum sealed cavity contains liquid. 一種具有多孔結構的兩相浸沒式散熱結構,其包括有一散熱基底、多個鰭片、以及一強化外框,所述散熱基底具有相對的鰭片面與非鰭片面,所述非鰭片面用以與浸沒於兩相冷卻液的熱源形成接觸,所述多個鰭片分別是一體成型在所述鰭片面的針鰭片,並且所述鰭片面的至少一部分和所述多個鰭片中的至少一部分覆蓋有多孔結構,所述多孔結構的孔隙率介於10%~50%,並且厚度介於0.1mm~1mm,所述鰭片的直徑介於0.3mm~1mm、鰭片間距介於0.3mm~0.6mm、鰭片高度介於3mm~7mm,並且所述強化外框結合至所述散熱基底並圍繞所述多個鰭片中的至少一部分;其中,所述多孔結構 在對應所述熱源位置處的平均厚度是大於對應非所述熱源位置處的平均厚度。 A two-phase immersed heat dissipation structure with a porous structure, which includes a heat dissipation base, a plurality of fins, and a reinforced outer frame. The heat dissipation base has opposite fin surfaces and non-fin surfaces, and the non-fin surface is used for In contact with the heat source immersed in the two-phase cooling liquid, the plurality of fins are respectively pin fins integrally formed on the fin surface, and at least a part of the fin surface and at least one of the plurality of fins A part is covered with a porous structure. The porosity of the porous structure is between 10% and 50%, and the thickness is between 0.1mm and 1mm. The diameter of the fins is between 0.3mm and 1mm, and the fin spacing is between 0.3mm. ~0.6mm, the fin height is between 3mm~7mm, and the reinforced outer frame is bonded to the heat dissipation base and surrounds at least a part of the plurality of fins; wherein, the porous structure The average thickness at the position corresponding to the heat source is greater than the average thickness corresponding to the position other than the heat source. 如請求項15所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述鰭片是由銅、銅合金的其一所製成。 The two-phase immersed heat dissipation structure with a porous structure as described in claim 15, wherein the fins are made of one of copper or copper alloy. 如請求項15所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述多孔結構是由銅、銅合金、銀、銀合金的其一所製成。 The two-phase immersed heat dissipation structure with a porous structure as described in claim 15, wherein the porous structure is made of one of copper, copper alloy, silver, and silver alloy. 如請求項15所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述多孔結構是將金屬粉粒進行燒結所形成,且所述金屬粉粒的中值粒徑(D50)為30μm~500μm。 The two-phase immersed heat dissipation structure with a porous structure as described in claim 15, wherein the porous structure is formed by sintering metal powder particles, and the median particle size (D50) of the metal powder particles is 30 μm. ~500μm. 如請求項15所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述多孔結構是將金屬粉粒混合高分子材料後進行燒結所形成,且所述金屬粉末的中值粒徑(D50)為10μm~30μm。 The two-phase immersed heat dissipation structure with a porous structure as described in claim 15, wherein the porous structure is formed by mixing metal powder with a polymer material and then sintering, and the median particle size of the metal powder is ( D50) is 10μm~30μm. 如請求項15所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述多孔結構是將金屬粉粒調合成金屬粉膏或粉液後進行燒結所形成,且所述金屬粉膏或粉液的中值粒徑(D50)為1μm~10μm。 The two-phase immersed heat dissipation structure with a porous structure as described in claim 15, wherein the porous structure is formed by mixing metal powder particles into a metal powder paste or powder liquid and then sintering, and the metal powder paste or The median particle size (D50) of powder liquid is 1μm~10μm. 如請求項15所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述多孔結構是將金屬粉粒調合成金屬粉膏或粉液後進行燒結所形成,且所述金屬粉膏或粉液的中值粒徑(D50)為0.01μm~0.5μm。 The two-phase immersed heat dissipation structure with a porous structure as described in claim 15, wherein the porous structure is formed by mixing metal powder particles into a metal powder paste or powder liquid and then sintering, and the metal powder paste or The median particle size (D50) of the powder liquid is 0.01μm~0.5μm. 如請求項15所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述多孔結構是由不同材料進行疊加而成的多層複合結構。 The two-phase immersed heat dissipation structure with a porous structure as described in claim 15, wherein the porous structure is a multi-layer composite structure formed by superimposing different materials. 如請求項15所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述多孔結構為銅網結構。 The two-phase immersed heat dissipation structure with a porous structure as described in claim 15, wherein the porous structure is a copper mesh structure. 如請求項15所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述多孔結構在兩所述鰭片之間的中心位置處的厚度是大於鄰接兩所述鰭片的兩側緣位置處的厚度。 The two-phase immersed heat dissipation structure with a porous structure as described in claim 15, wherein the thickness of the porous structure at the center between the two fins is greater than that at both sides of the edges adjacent to the two fins. Thickness at location. 如請求項15所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述熱源包含有間隔分布的多個局部熱源,所述多孔結構在對應所述多個局部熱源位置處的平均厚度是大於對應非所述多個局部熱源位置處的平均厚度。 The two-phase immersed heat dissipation structure with a porous structure as described in claim 15, wherein the heat source includes a plurality of local heat sources distributed at intervals, and the average thickness of the porous structure at positions corresponding to the plurality of local heat sources is greater than the average thickness corresponding to locations other than the plurality of local heat sources. 如請求項15所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述多孔結構區分為覆蓋在所述鰭片面上的第一多孔結構與覆蓋在所述鰭片側緣的第二多孔結構,且所述第一多孔結構與所述第二多孔結構分別是由不同材料及製法的至少其一所形成。 The two-phase immersed heat dissipation structure with a porous structure as claimed in claim 15, wherein the porous structure is divided into a first porous structure covering the fin surface and a second porous structure covering the side edge of the fin. Porous structure, and the first porous structure and the second porous structure are respectively formed by at least one of different materials and manufacturing methods. 如請求項15所述的具有多孔結構的兩相浸沒式散熱結構,其中,所述散熱基底及所述強化外框的至少其一形成有多個穿孔,且有多個彈簧螺絲對應穿過所述多個穿孔。 The two-phase immersed heat dissipation structure with a porous structure as described in claim 15, wherein at least one of the heat dissipation base and the reinforced outer frame is formed with a plurality of through holes, and a plurality of spring screws pass through the corresponding holes. Multiple perforations. 如請求項15所述的具有多孔結構的兩相浸沒式散熱結構,更包括:一高導熱結構,其結合至所述散熱基底的所述非鰭片面,使所述散熱基底是透過所述高導熱結構與所述熱源形成間接接觸,所述高導熱結構內部形成有一真空密閉腔,且所述真空密閉腔中含有液體。 The two-phase immersed heat dissipation structure with a porous structure as claimed in claim 15, further comprising: a high thermal conductivity structure, which is coupled to the non-fin surface of the heat dissipation base, so that the heat dissipation base passes through the high thermal conductivity The thermally conductive structure is in indirect contact with the heat source, a vacuum sealed cavity is formed inside the highly thermally conductive structure, and the vacuum sealed cavity contains liquid.
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CN114158232A (en) * 2020-09-08 2022-03-08 英业达科技有限公司 Heat sink and heat dissipation system
CN114322618A (en) * 2020-10-09 2022-04-12 米巴烧结奥地利有限公司 Heat transport device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114158232A (en) * 2020-09-08 2022-03-08 英业达科技有限公司 Heat sink and heat dissipation system
CN114322618A (en) * 2020-10-09 2022-04-12 米巴烧结奥地利有限公司 Heat transport device

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