TWI833053B - 製造時計組件之方法及由此方法所獲得之組件 - Google Patents
製造時計組件之方法及由此方法所獲得之組件 Download PDFInfo
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Abstract
本發明關於製造金屬時計組件的方法,其特徵在於方法包括以下所構成的步驟:經由組合了熱壓印的紫外光微影電鑄(UV-LIGA)型過程,而形成多層級光敏樹脂模具;以及從至少二導電層來電鍍至少一金屬層,以形成大致抵達光敏樹脂之上表面的區塊。
Description
本發明關於藉由微影電鑄(LIGA)科技來製造複雜之多層級金屬結構的方法。本發明也關於以此方法所獲得的此種金屬結構,尤其是時計組件。
對應於上面定義的方法是已知的。尤其,A.B.Frazier等人之標題為「使用光敏聚亞醯胺電鍍模具所製造的金屬微結構」且刊載於微機電系統期刊(第2冊,N版2,1993年6月2日)的一文描述一種製造多層級金屬結構的方法,其係在光敏樹脂層之光微影術所製作的聚亞醯胺模具中做電鍍生長。此方法包括以下步驟:生成用於後續電鍍步驟的犧牲金屬層和黏著層;散布一層光敏聚亞醯胺,透過對應於待形成之結構的一層級之輪廓的遮罩而以紫外光(UV)輻射來照射聚亞醯胺層,
溶解非照射部分而將聚亞醯胺層顯影,如此以獲得聚亞醯胺模具,藉由電鍍而以鎳來填充模具至其頂部,而獲得大致平坦的上表面,藉由真空蒸鍍而在整個上表面上沉積薄鉻層,在鉻層上沉積新的光敏樹脂層,透過對應於待獲得之結構的次一層級之輪廓的新遮罩來照射樹脂層,將聚亞醯胺層顯影,如此以獲得新模具,藉由電鍍生長而以鎳來填充新模具至其頂部,從犧牲層和基板分開多層級結構和聚亞醯胺模具,從聚亞醯胺模具分開多層級結構。
將明白上述方法原則上可以反覆實施以獲得具有多於二層級的金屬結構。
專利文件WO2010/020515A1描述具有幾個層級之零件的製造,其係在模具中之零件金屬的電鍍步驟之前先製作對應於待獲得之最終零件的完整光阻模具。此方法僅可以製作出彼此裡面包含層級突起的多層級零件。
從專利文件EP2405301A1也已知一種包括至少二層級的光阻模具,而形成於基板中的層級僅包括平滑的垂直側壁。
這些方法僅允許製造基本幾何型態是圓柱形的零件,而不允許製造具有複雜幾何型態(例如斜角或倒角)的零件。
本發明的目標是提供允許製造多層級金屬時計組件的方法而克服上述及其他缺點,該方法組合了熱壓印步驟與LIGA科技,其中導電層係關聯於用於每個層級的樹脂層,以於多層級組件的情形下允許有可靠的電鍍。
本發明的目標也在於允許製造具有通常經由LIGA科技所不可行之複雜幾何型態的時計零件。
為此,本發明關於製造時計組件的方法,其包括以下步驟:(a)提供基板,在基板上沉積第一導電層且施加第一光敏樹脂層;(b)使用壓印器來熱壓印第一樹脂層,而將壓印器下壓到基板以塑形該樹脂層且界定時計組件的第一層;(c)透過界定組件之第一層級的遮罩來照射第一塑形樹脂層,並且溶解光敏樹脂層的非照射區域以於多處揭露第一導電層;(e)施加第二光敏樹脂層而覆蓋步驟(c)所得的結構,然後透過界定組件之第二層級的遮罩來照射第二樹脂層,並且溶解第二光敏樹脂層的非照射區域以形成包括第一和第二層級的模具;(f)於模具中從第一導電層而電鑄金屬層來做沉積以形成組件,該金屬層大致抵達第二光敏樹脂層的上表面;(g)依序移除基板、第一導電層、樹脂以釋放組件。
此方法因此允許製造多層級零件。
根據本發明其他有利的變化例:步驟(b)是在真空下進行;在步驟(b)期間,第一樹脂層加熱至70℃和150℃之間;壓印器具有凸板印刷,至少一部分的印刷配置成在步驟(b)中直接壓抵著基板的表面;該壓印器印刷界定組件的該至少第一層級;方法在步驟(c)之後包括可選擇的步驟(d),其係在第一樹脂層的照射區域上局部沉積第二導電層;第二導電層是透過鏤空遮罩而沉積;第二導電層施加成大致沉積在所有的曝露表面上(包括側壁),然後被完全移除,但在已藉由轉移壓印步驟而沉積的阻劑所保護之第一樹脂層的上表面除外;第二導電層藉由印刷導電樹脂或油墨而沉積;該第一導電層和該第二導電層是Au、Ti、Pt、Ag、Cr或Pd型,或是此等至少二種材料的堆疊;基板是由矽所製成;第一導電層具有包括在50奈米和500奈米之間的厚度;第二導電層具有包括在50奈米和500奈米之間的厚度。
最後,本發明關於由根據本發明之方法所獲得的時計組件,舉例而言例如托板叉或擒縱輪。
明顯的是本發明方法的特別有利應用是製造用於時計的組件。
1:基板
2:第一導電層
3:第一樹脂層
3a:光聚合區域
3b:非照射區域
4:遮罩
5:第二導電層
6:第二樹脂層
6a:光聚合區域
6b:非照射區域
7:金屬層
8:壓印器
從下面根據本發明方法之範例性具體態樣的詳述將更清楚顯現本發明的其他特徵和優點,此範例搭配所附圖式而純粹以非限制性圖示所給出,其中:[圖1到8]示範本發明生產時計組件之一具體態樣的方法步驟。
用於根據本發明之方法步驟(a)的基板1舉例而言是由矽基板所形成。於方法的第一步驟(a),舉例而言藉由物理氣相沉積(physical vapour deposition,PVD)而沉積了第一導電層2,亦即能夠開始通電金屬沉積的一層。典型而言,第一導電層2為Au、Ti、Pt、Ag、Cr或Pd型(圖1),或是此等至少二種材料的堆疊,並且具有包括在50奈米和500奈米之間的厚度。舉例而言,第一導電層2可以由覆蓋了金或銅層的鉻或鈦次層所形成。
用於此方法的光敏樹脂較佳而言為八官能基環氧系負型樹脂,例如SU-8樹脂,其設計成在UV輻射作用下聚合。
根據本發明的特殊具體態樣,樹脂採取乾膜的形式,樹脂遂藉由層合而施加於基板1。
替代選擇而言,光敏樹脂或可為正型光阻,其設計成在UV輻射的作用下分解。將了解本發明不限於一些特殊類型的光敏樹脂。熟於此技術者將知道如何從適合UV光微影術之所有已知的樹脂來選擇適合其需求的光敏樹脂。
第一樹脂層3以任何適當的手段(離心塗佈、旋塗或噴灑)而沉積在基板1上達所要厚度。典型而言,樹脂的厚度係包括在10微米和1000微米之間,較佳而言在30微米和300微米之間。視所要的厚度和所用的沉積技術而定,樹脂將以一或更多步驟來沉積。
第一樹脂層3然後典型而言加熱至90和120°之間,持續時間則視沉積的厚度而定以移除溶劑(前烘烤的步驟)。此加熱過程使樹脂乾燥且硬化。
圖2示範的次一步驟(b)係在於熱壓印或壓印第一樹脂層3以將它塑形並且界定時計組件的第一層級。樹脂首先加熱至包括在70℃和150℃之間的溫度,此時它變得黏稠以允許藉由壓在上面的壓印器8來平坦化而塑形。此步驟可以在真空下進行以避免當壓住第一樹脂層3時形成氣泡。根據本發明,壓印器8被下壓到基板1,直到樹脂完全平坦化為止,致使在壓印器的部分壓抵著基板之處僅有殘留樹脂層在導電層上方。
有利而言,壓印器8具有凸板印刷,其可能具有高度變化,藉此界定組件的至少第一層級,該至少一第一層級因此具有複雜的三維幾何形態,其不可能經由習
用的LIGA過程而獲得。
也可能設想到藉由壓印器來形成二或更多層級以產生待獲得之組件的完整幾何形態。
圖3示範的次一步驟(c)係在於透過界定待形成的組件之第一層級的遮罩4而以UV輻射來照射第一樹脂層3,因此形成光聚合區域3a和非光聚合區域3b。
此步驟確保被壓印器壓過後的殘留樹脂膜消失以揭露導電層,並且允許樹脂被結構化,而如LIGA過程經常所進行的。
第一樹脂層3可能需要後烘烤的步驟以完成UV照射所誘發的光聚合。此後烘烤的步驟較佳而言在90℃和95℃之間進行。光聚合區域3a變成對多數的溶劑不敏感。然而,非光聚合區域或可後續用溶劑來溶解。
其次,溶解第一樹脂層3的非光聚合區域3b以於多處揭露基板1的第一導電層2,如圖4。此作業使用適合的溶劑(例如丙二醇醋酸甲乙酯[PGMEA])溶解非聚合區域3b而進行。因此獲得由光聚合光敏樹脂所製成的模具,其由壓印和光微影術作業的組合所形成,而界定組件的第一層級。
於圖5示範之可選擇的步驟(d),第二導電層5沉積在前面步驟所光聚合的區域3a上。此第二導電層5可能具有相同於第一導電層2的特徵,亦即它為Au、Ti、Pt、Ag、Cr或Pd型,或是此等至少二種材料的堆疊,並且具有包括在50奈米和500奈米之間的厚度。
根據本發明的第一變化例,使用了鏤空遮罩,其以光學對齊來定位。此設備有可能確保遮罩良好對齊於基板上之光聚合區域3a的幾何形態,因此確保僅在光聚合區域3a的上表面做沉積,而避免沉積在光聚合樹脂的側壁上,因為遮罩固持成盡可能地靠近基板1。
根據本發明的第二變化例,第二導電層施加成大致沉積在所有的曝露表面上(包括側壁),然後整個被移除,但在藉由轉移壓印步驟而沉積的阻劑所保護之第一樹脂層的上表面除外。
熟於此技術者也或可考慮實施三維(3D)印刷以沉積第二導電層5。
此種解決方案有可能有選擇且更精確地沉積第二導電層5,因此在光聚合樹脂的側壁上沒有任何沉積。
圖6示範的次一步驟(e)係在於沉積第二樹脂層6而覆蓋前面步驟所得的結構。相同的樹脂用於此步驟,並且厚度大於步驟(a)沉積的厚度。一般而言,厚度以所要獲得之組件的幾何形態為函數來變化。
次一步驟係在於透過界定組件之第二層級的遮罩來照射第二樹脂層6,並且溶解第二樹脂層6的非照射區域6b。在此步驟結束時(圖6),則獲得了模具,其包括第一和第二層級,而於多處揭露第一導電層2和第二導電層5。
圖7示範的次一步驟(f)係在於藉由電鑄或電
鍍而於模具中從第一導電層2且可能從第二導電層5來沉積金屬層7以形成區塊,其較佳而言所抵達的高度低於模具的高度,而在任何後續的機製期間提供較好的機械強度。在此背景,「金屬」(metal)自然包括金屬合金。典型而言,金屬將選自包括鎳、銅、金或銀的群組,合金則選自包括金銅、鎳鈷、鎳鐵、鎳磷或鎳鎢的群組。一般而言,多層金屬結構整個是由相同的合金或金屬所製成。然而,也可能在電鍍步驟期間改變金屬或合金以獲得包括至少二層不同類型的金屬結構。
根據熟知的電鑄技術而針對每種待電沉積的金屬或合金來選擇電鑄條件,尤其是浴液組成、系統的幾何形態、電壓和電流密度。
金屬層7可以用機械過程來機製以獲得待生產的組件之厚度所預先界定的厚度。視須進行此作業的表面而定,完工機製可以是還在晶圓上之時就進行。
步驟(g)係在於以一系列溼式或乾式蝕刻步驟來移除基板、導電層或樹脂層而釋放組件,此作業係熟於此技術者所熟悉的。舉例而言,第一導電層2和基板1藉由溼式蝕刻而移除,這允許從基板1釋放組件而不使之受損。尤其,矽基板可以用氫氧化鉀溶液(KOH)來蝕刻。
在此第一程序結束時,獲得的組件維持在第一和第二樹脂層中,而第二導電層5也仍存在於多處。
第二程序係在於藉由O2電漿蝕刻而移除第一樹脂層3和第二樹脂層6,當中則由中間金屬層的溼式蝕刻
所分開。
在此步驟結束時,獲得的組件可加以清潔,並且有可能在工具機上重加工以進行機製作業或美化光製。在此階段,零件可以立即使用或經歷多樣的裝飾性和/或功能性處理(典型而言為物理或化學沉積)。
本發明方法的特別有利應用是製造用於時計的組件,例如彈簧、托板叉、轉輪、嵌花...等。由於此方法的結果,有可能製作比經由習用光微影術作業所獲得的還更多樣之形狀且更複雜之幾何型態的組件。此種方法也有可能獲得穩健的組件,其就幾何型態而言顯示良好的可靠性。
1:基板
2:第一導電層
3:第一樹脂層
Claims (13)
- 一種製造至少一時計組件的方法,其包括以下步驟:(a)提供基板(1),在該基板(1)上沉積第一導電層(2)且施加第一樹脂層(3);(b)使用壓印器(8)來熱壓印該第一樹脂層(3),而將該壓印器(8)下壓到該基板,以塑形該第一樹脂層(3)且界定該時計組件的第一層級,其中該壓印器(8)具有凸板印刷,至少一部分的該凸板印刷配置成在步驟(b)中直接壓抵著該基板(1)的表面;(c)透過界定該組件之至少第一層級的遮罩(4)以UV來照射被塑形的該第一樹脂層(3),並且溶解該第一樹脂層(3)的非UV照射區域(3b)以於多處揭露該第一導電層(2);(d)施加第二樹脂層(6)而覆蓋步驟(c)所得的結構,然後透過界定該組件之第二層級的遮罩以UV來照射該第二樹脂層(6),並且溶解該第二樹脂層(6)的非UV照射區域(6b)以形成包括第一和第二層級的模具;(e)於該模具中從該第一導電層(2)而電鑄金屬層(7)來做沉積以形成該組件,該金屬層(7)大致抵達該第二樹脂層(6)的上表面;(f)依序移除該基板、該第一導電層(2)、該第一樹脂層(3)和該第二樹脂層(6)以釋放該組件。
- 根據請求項1的方法,其中步驟(b)是在真空下進行。
- 根據請求項1的方法,其中在步驟(b)期間,該第一樹脂層(3)加熱至70℃和150℃之間。
- 根據請求項1的方法,其中該壓印器印刷界定該組件的該至少第一層級。
- 根據請求項1的方法,其中該方法在步驟(c)或步驟(b)之後包括可選擇的步驟(d),其係在該第一樹脂層(3)的照射層(3a)上局部沉積第二導電層(5)。
- 根據請求項5的方法,其中該第二導電層(5)是透過鏤空遮罩而沉積。
- 根據請求項5的方法,其中於步驟(d),該第二導電層(5)施加成大致沉積在包括側壁的所有的曝露表面上,然後被整個移除,但在藉由轉移壓印步驟而沉積的阻劑所保護之該第一樹脂層(3)的上表面除外。
- 根據請求項5的方法,其中於步驟(d),該第二導電層(5)藉由印刷油墨或導電樹脂而沉積。
- 根據請求項5的方法,其中該第一導電層(2)和該第二導電層(5)為Au、Ti、Pt、Ag、Cr或Pd型。
- 根據請求項1的方法,其中基板(1)是由矽所製成。
- 根據請求項1的方法,其中該第一導電層(2)具有包括在50奈米和500奈米之間的厚度。
- 根據請求項5的方法,其中該第二導電層(5)具有包括在50奈米和500奈米之間的厚度。
- 一種根據請求項1的方法所獲得的時計 組件。
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CN113009780A (zh) | 2021-06-22 |
EP3839626A1 (fr) | 2021-06-23 |
US20210191338A1 (en) | 2021-06-24 |
EP3839626B1 (fr) | 2023-10-11 |
TW202142375A (zh) | 2021-11-16 |
KR102520739B1 (ko) | 2023-04-11 |
KR20210079201A (ko) | 2021-06-29 |
JP2021096249A (ja) | 2021-06-24 |
JP7112472B2 (ja) | 2022-08-03 |
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