TWI819791B - Probe head, probe assembly and spring-type probe structure composed of - Google Patents

Abstract

A probe head, a probe assembly and a spring probe structure thereof. The probe head includes at least one connected contact part and a docking part. The probe assembly is assembled from the probe head and a pipe fitting. The contact part is located at one end of the butt part, and the contact part is used to contact the object to be measured; the butt part has a polygonal or circular deformable part around its periphery, and the deformable part has at least butt areas distributed in the axial direction, and the The radial size of the docking area is smaller than the radial size of the deformable part; one end of the pipe has at least one convex part, and the convex part is disposed in the corresponding docking area during assembly, and the deformable part is deformed by external force and The deformation part is formed to cover the convex part, so that the pipe and the probe head cannot be separated, so that the probe assembly of the present invention can be firmly connected, and has high current transmission effect and low resistance stability during testing.

Description

Probe head, probe assembly and spring-type probe structure composed of

The present invention is in the technical field of probes for electrical testing, and in particular, to an assembled probe head with good stability and high current transmission and its probe assembly.

After the wafer is completed through the semiconductor process, it is necessary to test whether the signal transmission can operate or operate normally through electrical contact to determine the quality of the numerous chips. Generally speaking, to test whether the electrical connection of the chip circuit is reliable or whether there is a problem with the signal transmission, probes are usually used as the test interface between the test device and the chip under test, through signal transmission and electrical signal analysis. , to obtain the test results of the grain to be tested.

In some applications, the probe device performs testing not on an essentially planar structure, such as a contact pad, but on a three-dimensional contact structure in the shape of a ball of conductive material, called a bump, or Metal pillars (especially copper), called bosses, protrude from a surface of the object to be tested. When applied to the above-mentioned testing operations, a more preferred solution is to use a spring-loaded probe.

As shown in Figure 1, it is a schematic diagram of a conventional spring-type probe. The spring-type probe has an upper ejector pin 91 and a lower ejector pin 92 respectively extending from both ends of a long tubular housing 90. Although the upper ejector pin 91 and the lower ejector pin 92 can move a short distance, they cannot escape from the housing 90. The housing 90 is also provided with a spring 93. Both ends of the spring 93 are in contact with the upper ejector pin 91 and the lower ejector pin 92 respectively, so that it has buffering elasticity during contact. During testing, the circuit between the upper ejector pin 91 and the probe test device The lower ejector pin 92 is in contact with the object to be tested, such as the grains distributed in the wafer. As wafer die sizes become smaller and smaller, this type of spring-loaded probe no longer meets the requirements.

Probes are the main components responsible for electrical contact in test operations. As the number of die distributed in the wafer increases, the gap between adjacent die continues to shrink, and the probe size is also constantly required to be reduced. Some probes are The needle has been formed into the required probe head shape using a micro-electromechanical system process to meet the required requirements. However, the tiny probe head must be combined with metal pipe fittings, springs, thimbles and other structures to form a complete spring-type probe. With the miniaturization of the size of the probe head, the difficulty of processing and assembly has also increased, because the probe not only needs to have high current transmission properties, but also needs to be firmly connected between components during the test operation of repeated electrical contact and separation. Sex must also be maintained. How to ensure that the finished product has excellent solidity during the processing and assembly process, and has high current transmission and low resistance stability in subsequent testing operations, is the focus of this research and design of the present invention.

The main purpose of the present invention is to provide a probe head and its probe assembly, which can make the assembly of the probe head and pipe fittings more convenient, and have good stability after assembly, and will not cause problems when the probe is used for testing for a long time. There are cases of component separation, and it meets the requirements of high current transmission effect and low resistance stability.

In order to achieve the aforementioned objectives, the present invention adopts the following technical solutions:

The present invention is a probe head used in a probe assembly for electrical testing. The probe head includes at least one connected contact portion and at least a mating portion. The contact portion is located at one end of the mating portion and moves away from the mating portion. The size of the docking part becomes smaller as it is farther away. This contact part is used to contact the object to be measured. The docking part is columnar and has a polygonal or circular deformable part around it. The deformable part is distributed in the axial direction with at least A butt area, the radial size of the butt area is smaller than the radial size of the deformable part and forms a concave space.

As one of the better preferred embodiments, the butt portion has a hardness of 500 Vickers hardness or less than 500 Vickers hardness.

As one of the better preferred embodiments, the butt portion has a hardness less than or equal to the hardness of the contact portion.

As one of the better preferred embodiments, the opening size of the docking area is 10 microns or greater.

As one of the better preferred embodiments, the butt portion is made of a material equal to or greater than 30% of the international annealed copper standard.

As one of the better preferred embodiments, the material contains at least one of the following elements: copper (Cu), silver (Ag), gold (Au), carbon (C), platinum (Pt), palladium (Pd), tungsten (W) ), aluminum (Al), tin (Sn), rhodium (Rh), iridium (Ir), indium (In) and ruthenium (Ru).

As one of the better preferred embodiments, the probe head is made of a micro-electromechanical system process, with the contact portion and the docking portion stacked together.

As one of the better preferred embodiments, a first body part is also included, and the first body part is located between the contact part and the butt part.

As one of the better preferred embodiments, the first body is made by a micro-electromechanical system process, the first body is circular or polygonal, and the radial size of the first body is smaller than the butt joint. radial size of the part.

As one of the better preferred embodiments, the probe head further includes a second body part, and the second body part is located at an end of the docking part away from the contact part.

As one of the better preferred embodiments, the second body is made by a micro-electromechanical system process, the second body is circular or polygonal, and the radial size of the second body is less than or equal to The minimum radial size of the accommodation space.

As one of the better preferred embodiments, a limiting portion is also included, the limiting portion is located between the contact portion and the butt portion, and the radial size of the limiting portion is greater than or equal to the inner diameter of the pipe.

As one of the better preferred embodiments, the probe head further includes a first body part, the first body part is located between the limiting part and the butt part, and the radial size of the first body part is smaller than the possible The maximum radial dimension of the deformation part.

The present invention is a probe assembly, which includes: a probe head and a pipe fitting connected thereto. The pipe member forms a receiving space inside, and has at least one convex portion extending convexly in the axial direction at one end. The convex portion is connected to the probe head. Corresponding to the docking area of the probe head, the radial size of the deformable part is larger than the outer diameter of the pipe, so that the deformable part is deformed by external force and forms a deformed part, which is partially covered by the deformed part At least part of the outer peripheral surface of the protrusion makes it impossible to separate the probe head from the pipe.

As one of the better preferred embodiments, the width of the butt area is equal to or greater than the width of the convex portion, so that the convex portion is disposed within the butt area.

As one of the better preferred embodiments, when the deformable part is deformed by external force, at least one deformation part is formed at the position of the convex part, and the deformation part covers at least part of the outer peripheral surface of the convex part.

As one of the better preferred embodiments, when the number of the deformation parts is several, the areas of the deformation parts covering different positions of the convex part are the same or different.

As one of the better preferred embodiments, the convex portion has a length of 700 microns or less.

As one of the preferred embodiments, when the number of the protrusions is several, the distance between two adjacent protrusions is 5 microns or greater than 5 microns.

As one of the better preferred embodiments, the pipe also forms a blocking wall between two adjacent convex portions. The blocking wall is located lower than the top edge of the convex portion and has a radial size smaller than that of the deformable portion. Radial dimensions.

The present invention is a spring-type probe structure, which includes: a probe head and a pipe fitting; a movable thimble, which is arranged in the accommodation space of the pipe fitting; a smaller needle part of the thimble can extend out of the pipe fitting Outside, the ejector pin can move within the pipe but cannot be detached; an elastic member is a compressible spring. The elastic member is disposed in the accommodation space, and its two ends are in contact with the ejector pin and the probe head respectively.

As can be seen from the above, the probe head and its probe assembly of the present invention utilize the deformable part and the docking area formed by the probe head to match the convex part of the pipe fitting, and the convex part is arranged on the docking part during docking. After being in the zone, external force is applied to deform the deformable part and form the deformable part to cover the convex part, so that excellent firmness can be achieved, so that the pipe fitting and the probe head cannot be separated to meet the high current during testing. Transmission effect and low resistance stability requirements.

The technical solution of the present invention will be clearly and completely described below with reference to specific embodiments and drawings. It should be noted that when an element is referred to as being "mounted or secured to" another element, it means that it can be directly on the other element or intervening elements may also be present. When an element is said to be "connected" to another element, this means that it can be directly connected to the other element or that intervening elements may also be present. In the illustrated embodiment, directions indicating up, down, left, right, front and back, etc. are relative and are used to explain that the structure and movement of different components in this case are relative. These representations are appropriate when the parts are in the position shown in the figures. However, if the description of a component's location changes, it is assumed that these representations will change accordingly.

Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field of the invention. The terminology used herein is for the purpose of describing specific embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

As shown in Figures 2 and 3, they are an exploded view and a perspective view of the first embodiment of the present invention respectively. The probe head and its probe assembly of the present invention include a probe head 10 and a pipe fitting 20 connected thereto. The probe head 10 includes at least one contact portion 11 and a butt portion 13 connected thereto. The contact portion 11 The contact portion 11 is located at one end of the docking portion 13 and becomes smaller in size as it gets farther away from the docking portion 13. The contact portion 11 is used to contact the object to be measured. The docking part 13 is columnar, and is surrounded by a polygonal or circular deformable part 131. The deformable part 131 is distributed with at least a docking area 132 in the axial direction, and the radial size of the docking area 132 is smaller than the deformable part 131. The radial size of the portion 131 forms a concave space. The butt portion 13 can have a conductivity material greater than or equal to 30% of the International Annealed Copper Standard (IACS); the pipe fitting 20 forms an accommodation space 21 in the pipe. , one end also has at least one axially extending convex portion 22. During assembly, the convex portion 22 is disposed in the corresponding docking area 132. The deformable portion 131 is pressed by an external force to form at least one deformable portion 133, and The deformation part 133 covers at least a part of the outer peripheral surface of the convex part 22 so that the pipe fitting 20 and the probe head 10 cannot be separated, thereby making the probe head 10 and the pipe fitting 20 in the probe structure of the present invention Can be firmly connected together, and can withstand higher current transmission and low resistance stability during testing.

As shown in Figure 4, the probe assembly of the present invention is an exploded view of a spring-type probe structure. The spring-type probe includes the probe head 10, the tube 20, an elastic member 30 and a movable thimble. 40. The accommodating space 21 of the pipe 20 is for the ejector pin 40 to be inserted, so that a smaller needle part 41 of the ejector pin 40 can extend out of the pipe 20 , but the ejector pin 40 can move within a short distance within the pipe 20 . It is impossible to escape from the accommodation space 21 from below. The elastic member 30 is a compressible spring. When the elastic member 30 is disposed in the accommodating space 21, its two ends will contact the thimble 40 and the probe head 10 respectively. When the probe head 10 is riveted to the top of the pipe 20, the pipe 20 is closed and the entire shape is fixed. During testing, several spring-type probes are installed on a test socket (not shown in the figure). The two ends of the probe head 10 are in contact with the object under test. The thimble 40 is electrically connected to the circuit board. The corresponding circuits are used to perform the required test operations. All subsequent embodiments can operate with the same structure, so they will not be described one by one.

Next, a detailed description of each component of the present invention is given, as shown in Figures 2 and 3:

The probe head 10 of the present invention includes a contact portion 11 and a docking portion 13 stacked in sequence, and is manufactured using a microelectromechanical systems (MEMS) process. The contact portion 11 is formed first, and then the contact portion 11 is formed. The butt portion 13 is integrally formed on the contact portion 11, and the axial size of the butt portion 13 is subsequently controlled according to the molding time. This process method uses the semiconductor process to etch a predetermined pattern on the substrate, and then sequentially deposit corresponding conductive materials. , and finally remove excess material to form the probe needle 10 structure of the present invention.

Although the contact portion 11 and the butt portion 13 are both made of materials with good conductivity, the materials do not need to be exactly the same. The contact portion 11 is responsible for repeated contact with the object to be tested during electrical testing, and is made of a hard material with good wear resistance, such as nickel and nickel alloy, and the nickel alloy includes nickel and is selected from the group consisting of: At least one alloying element in: iron (Fe), tungsten (W), copper (Cu), boron (B), phosphorus (P), carbon (C), cobalt (Co), silver (Ag), manganese (Mn) ), palladium (Pd) and rhodium (Rh). The shape of the contact portion 11 will gradually shrink as it is further away from the butt portion 13 , and the shape may be a cone shape, a quadrilateral pyramid shape, or a polygonal three-dimensional oblique cone shape. The number of the contact portion 11 is only one in this embodiment, but it is not limited to this and can also be multiple. As shown in Figure 5A and Figure 5B , in Figure 5B the contact portion 11 is a quadrilateral shape. of pyramid shape. When the number of the contact portion 11 is one, the height is less than 525 microns, and the maximum radial size of the tip of the contact portion 11 is less than 25 microns. The contact portion 11 can also be made of palladium or palladium alloy materials with medium wear and low resistance, and the contact portion 11 can also be made of palladium or palladium alloy materials with medium wear and low resistance. The palladium alloy includes palladium (Pd) and at least one alloying element selected from the group consisting of: nickel (Ni), copper (Cu), cobalt (Co), molybdenum (Mo), silver (Ag), indium (In ), manganese (Mn) and carbon (C). When there are multiple contact portions 11 , the distance between them should be at least 10 microns.

The butt portion 13 is made of a material with a conductivity equal to or greater than 30% of the International Annealed Copper Standard (IACS). The material includes at least one of the following elements: copper (Cu), silver (Ag), gold (Au), Carbon (C), platinum (Pt), palladium (Pd), tungsten (W), aluminum (Al), tin (Sn), rhodium (Rh), iridium (Ir), indium (In) and ruthenium (Ru). The butt portion 13 has a hardness of 500 Vickers hardness or less than 500 Vickers hardness. The radial dimension of the butt portion 13 is less than 700 micrometers and the height is less than 1000 micrometers, and is used for butt jointing with the pipe 20 . The present invention mainly improves the docking part 13 so that it can be quickly docked and fixed with the pipe fitting 20 during assembly. It has excellent firmness after assembly, increases the joint area with the pipe fitting, and has high current transmission during testing. effect and low resistance stability performance. The butt portion 13 is cylindrical in shape, and is surrounded by a polygonal or circular deformable portion 131 . The deformable portion 131 is distributed with at least a butt area 132 in the axial direction, and the radial size of the butt area 132 is smaller than the deformable portion 131 . The radial size of the deformation portion 131 is to form a concave space, and the number and position of the docking areas 132 correspond to the convex portion 22. In the embodiment, the convex portion 22 has a length of 700 microns or less. The number of the butt areas 132 and the protrusions 22 is preferably more than two, and their positions are evenly distributed around the butt portion 13 . When there are several convex portions 22 , the distance between two adjacent convex portions 22 is 5 micrometers or greater than 5 micrometers. In addition, the opening size of the docking area 132 is 10 microns or greater than 10 microns. In addition, in this embodiment, the width of the butt area 132 is equal to or greater than the width of the protrusion 22 , so that the protrusion 22 can be disposed within the butt area 132 .

As shown in FIG. 6A , during assembly and docking, the protruding portion 22 is disposed in the docking area 132 to mechanically assist in applying external force, such as clamping with mechanical pliers, so that the deformable portion 131 can be pressed by the external force to form at least one deformation. part 133, and the deformation part 133 is extended by part of the material of the deformable part 131 to cover at least a part of the outer peripheral surface of the convex part 22, so that the two can achieve a good riveting and fixing effect. In addition, the hardness of the butt portion 13 is less than or equal to the contact portion 11 . As shown in FIG. 6B , of course, if the mechanical external force is too large, the protruding portion 22 located in the docking area 132 can also be deformed, so that the deformed portion 133 and the protruding portion 22 are more firmly combined. In addition, in this embodiment, when the deformable portion 131 is deformed by external force, at least two deformation portions 133 are formed at the position of each protrusion 22 , and at least two deformation portions 133 cover the deformation portion 131 in different directions. The periphery of the convex portion 22, and the minimum distance between the two deformation portions 133 is less than the opening width of the docking area 132. For example, the minimum distance between the two deformation portions 133 is less than 200 microns or equal to 200 microns, as shown in the figure. It is shown that the two deformation parts 133 located at the same convex part 22 are not in contact and there is a certain distance between them, but this is not limited to this. If the external force exerted by the machine is large, the two deformation parts 133 can also be deformed. The parts 133 are in complete butt contact, and the firmness is better at this time. In addition, the deformable portion 131 is deformed by external force, and only one deformation portion 133 can be formed at the position of each protrusion 22 , and the deformation portion 133 covers at least a part of the outer peripheral surface of the protrusion 22 . , and covers the opening of the docking area 132 .

The tube 20 is used for the probe head 10 to be installed therein for subsequent assembly into a spring-type probe. In order to facilitate quick positioning, the pipe 20 also forms a blocking wall 23 between two adjacent convex portions 22 . The blocking wall 23 is located lower than the top edge of the convex portion 22 and has a radial size smaller than the deformable portion 131 The maximum radial size, when the blocking wall 23 contacts the deformable part 131 during assembly, the docking part 13 can no longer be moved axially, and ensures that the convex part 22 is located in the docking area 132, which is beneficial to subsequent assembly. Riveted fastening.

The probe head 10 of the present invention is manufactured using a microelectromechanical systems (MEMS) process. The shorter the axial dimension, the fewer the processes and the lower the cost. However, the shorter the axial dimension of the probe head 10 is, the more difficult it will be to assemble, align and process. Therefore, the present invention provides the following different embodiments to solve the above problems.

As shown in Figure 7, it is an exploded view of the second embodiment of the present invention. The structure of the second embodiment is similar to the first embodiment, except that the axial dimension of the probe head 10a is increased. In this embodiment, the probe assembly is still composed of the probe head 10a and the pipe 20, but in addition to the contact part 11 and the docking part 13, the probe head 10a also includes a first body part 14 and a The second body 15 , the entire probe head 10 a is still manufactured using a microelectromechanical systems (MEMS) process, and the first body 14 is integrally formed on the contact portion 11 and the docking portion 13 The second body part 15 is integrally formed on an end of the butt part 13 away from the first body part 14 . The shape of the first body 14 can be a polygon or a circular column. The radial size of the butt portion 13 is larger than the radial size of the first body 14 to facilitate the deformation of the deformable portion 131 by force. When covering the convex portion 22, the appearance of the first body portion 14 will not be affected. The shape of the second body 15 can also be a polygon or a circular column, but its radial size is smaller than or equal to the radial size of the accommodating space 21 to avoid affecting the docking of the protrusion 22 with the docking area 132 . The above embodiment increases the axial size of the probe head 10 by adding the first body 14 and the second body 15, which facilitates subsequent assembly or alignment. Of course, you can also freely choose to add only one of them. , as shown in FIG. 8 , which is a diagram of the third embodiment of the present invention, the probe head 10b only adds the first body 14 . As shown in FIG. 9 , which is a fourth embodiment of the present invention, only the second body 15 is added to the probe head 10c.

As shown in Figure 10, it is a diagram of the fifth embodiment of the present invention. In this embodiment, the axial size of the docking part 13 of the probe head 10d is increased according to the designer's needs. As the axial height of the docking part 13 increases, the height of the deformable part 131 of the docking part 13 increases accordingly. , so that during riveting, the axial riveting position precision can accept a larger allowable error, thereby reducing the riveting precision requirements and improving the riveting assembly yield. In addition, the area of the deformable portion 131 becomes larger, and the riveting assembly yield is increased. Forming more deformed portions 133 with a larger area to cover the convex portion 22 can have stronger bonding strength and provide more stable low resistance performance during testing.

As shown in Figure 11, it is a diagram of the sixth embodiment of the present invention. In this embodiment, the probe head 10e still includes the contact part 11, the docking part 13, the first body part 14 and the second body part 15, but the number of the docking parts 13 is set to two. The butt parts 13 are respectively located at opposite positions up and down the second body part 15. Therefore, the number of the deformable parts 131 in the axial direction is also increased, which can reduce the axial riveting precision requirements, improve the riveting assembly yield, and utilize different The deformable portion 131 at the position can form several deformable portions 133 to cover the convex portion 22 when receiving force, which has a stronger firming effect.

Based on the above, the probe head of the present invention is added with the first body part 14 and the second body part 15, which facilitates docking with the pipe fitting 20, and increases the number of docking parts 13, which helps to obtain stronger firmness. Increasing the axial length of the butt part 13 can accept a larger allowable error, reduce the riveting precision requirements, and improve the riveting assembly yield. Therefore, the total length of the probe head is increased, and the cost is increased. However, It has relative advantages in terms of convenience and firmness of assembly, and can improve the yield of assembled finished products and reduce the additional costs caused by poor assembly. In addition, in the above embodiment, in principle, the radial size of the butt portion 13 is larger than Other components thus do not affect the appearance of the first body part 14 or the second body part 15 when the deformable part 131 is deformed during auxiliary mechanical construction.

In the above embodiment, the stopper wall 23 is responsible for limiting the connection between the probe head 10 and the pipe 20 , but it is not limited to this. As shown in FIG. 12 , it is a diagram of a seventh embodiment of the present invention. In this embodiment, the probe head 10f is responsible for limiting the position of the assembly. In this embodiment, the probe head 10f, in addition to the contact part 11, the docking part 13 and the second body part 15, also includes a limiting part 16. The limiting part 16 is located between the contact part 11 and the second body part 15. Between the butt portions 13 , the radial size of the limiting portion 16 is greater than or equal to the inner diameter of the pipe 20 . The limiting portion 16 can be circular or polygonal. During assembly, the protruding portion 22 is inserted into the docking area 132, and then continues to move against the radial section of the limiting portion 16, temporarily ensuring the relative position of the pipe 20 and the probe head 10f for subsequent convenience. Perform riveting and fixing operations. The limiting portion 16 is still manufactured by a micro-electromechanical system process.

As shown in Figure 13, it is a diagram of the eighth embodiment of the present invention. This embodiment is similar to the seventh embodiment. In this embodiment, the probe head 10g adds a first body portion 14 between the limiting portion 16 and the docking portion 13 to increase the axial size of the probe head 10g.

Based on the above, the probe assembly for electrical testing of the present invention uses a micro-electromechanical system process to manufacture the probe head 10 with a special shape and small size, and then matches the plurality of convex portions of the pipe 20 22. After the two are docked, an auxiliary machine must apply external force to deform the deformable part 131 of the probe head 10 and form the deformable part 133 to cover the convex part 22, so that the two are firmly fixed together. This method can Because the joints between the components are firm and tight, it can withstand high current transmission and low resistance stability during testing, meeting the needs of the probe itself.

The above are only preferred embodiments of the present invention and are not intended to limit the scope of the embodiments of the present invention. That is to say, all equivalent changes and modifications made in accordance with the patentable scope of the present invention are covered by the patentable scope of the present invention.

10: Probe head 10a, 10b, 10c, 10d, 10e, 10f, 10g: probe head 11:Contact Department 13: docking department 131:Deformable part 132: docking area 133:Deformation Department 14:First body part 15:Second body 16: Limiting part 20:Pipe fittings 21: Accommodation space 22:convex part 23: retaining wall 30: Elastic parts 40: thimble 41: Needle part 90: Shell 91: Upper thimble 92: lower thimble 93:Spring

Figure 1 is a schematic cross-sectional view of a conventional spring-type probe.

Figure 2 is an exploded view of the first embodiment of the present invention.

Figure 3 is a perspective view of the first embodiment of the present invention.

Figure 4 is an exploded view of the present invention applied to a spring-type probe.

Figure 5A is a diagram of another embodiment of the probe head of the present invention.

Figure 5B is a diagram of yet another embodiment of the probe head of the present invention.

Figure 6A is an enlarged cross-sectional view (1) of the first embodiment of the present invention.

Figure 6B is an enlarged cross-sectional view (2) of the first embodiment of the present invention.

Figure 7 is an exploded view of the second embodiment of the present invention.

Figure 8 is a perspective view of the probe head according to the third embodiment of the present invention.

Figure 9 is a perspective view of the probe head according to the fourth embodiment of the present invention.

Figure 10 is a perspective view of the probe head according to the fifth embodiment of the present invention.

Figure 11 is a perspective view of the probe head according to the sixth embodiment of the present invention.

Figure 12 is an exploded view of the seventh embodiment of the present invention.

Figure 13 is an exploded view of the eighth embodiment of the present invention.

10: Probe head

11:Contact Department

13: docking department

131:Deformable part

132: docking area

20:Pipe fittings

21: Accommodation space

22:convex part

23: retaining wall

Claims (21)

A probe head used in a probe assembly for electrical testing. The probe head includes at least one connected contact portion and at least a mating portion. The contact portion is located at one end of the mating portion and becomes smaller as it moves away from the mating portion. The smaller the remote size, the contact part is used to contact the object to be measured; the butt part is columnar, and has a polygonal or circular deformable part around it, and the deformable part has at least a butt area distributed in the axial direction , the radial size of the docking area is smaller than the radial size of the deformable part and forms an inner concave space. As for the probe head according to claim 1, the butt portion has a hardness of 500 Vickers hardness or less than 500 Vickers hardness. In the probe head of claim 1, the butt portion has a hardness less than or equal to the hardness of the contact portion. As for the probe head according to claim 1, the opening size of the docking area is 10 microns or greater than 10 microns. For the probe head described in claim 1, the butt portion is made of a material equal to or greater than 30% of the international annealed copper standard. The probe head according to claim 5, the material includes at least one of the following elements: copper (Cu), silver (Ag), gold (Au), carbon (C), platinum (Pt), palladium (Pd), tungsten (W), aluminum (Al), tin (Sn), rhodium (Rh), iridium (Ir), indium (In) and ruthenium (Ru). In the probe head of claim 1, the contact portion and the butt portion are stacked together and are made by a micro-electromechanical system process. The probe head according to claim 1, further comprising a first body part located between the contact part and the butt part. As for the probe head described in claim 8, the first body is made by a micro-electromechanical system process, the first body is circular or polygonal, and the radial size of the first body is smaller than the The radial size of the butt joint. The probe head according to claim 1, further comprising a second body portion located at an end of the docking portion away from the contact portion. As for the probe head according to claim 10, the second body is made by a micro-electromechanical system process, the second body is circular or polygonal, and the radial size of the second body is smaller than or Equal to the minimum radial size of the fitting's accommodation space. The probe head according to claim 1 further includes a limiting part located between the contact part and the butt part, and the radial dimension of the limiting part is greater than or equal to the inner diameter of the pipe. The probe head according to claim 12, the probe head further includes a first body part, the first body part is located between the limiting part and the butt part, and the radial size of the first body part is less than The radial size of the deformable zone. A probe assembly, including: the probe head as described in any one of claims 1 to 13 and a pipe fitting connected thereto, the pipe forming a receiving space inside and having at least one axial protrusion at one end An extended convex part corresponding to the docking area of the probe head, and the radial size of the deformable part is greater than the outer diameter of the pipe, so that the deformable part is deformed by external force and forms a deformed part , the deformation part covers at least part of the outer peripheral surface of the convex part, so that the probe head and the pipe cannot be separated. In the probe assembly of claim 14, the width of the docking area is equal to or greater than the width of the protrusion, so that the protrusion is disposed within the docking area. The probe assembly according to claim 14, when the deformable part is deformed by external force, at least one deformation part is formed at the position of the convex part, and the deformation part covers at least part of the outer peripheral surface of the convex part. . As for the probe assembly according to claim 16, when the number of the deformation parts is several, the areas of the deformation parts covering different positions of the convex part are the same or different. The probe assembly of claim 14, the convex portion has a length of 700 microns or less. As for the probe assembly described in claim 14, when the number of the protrusions is several, the distance between two adjacent protrusions is 5 microns or greater than 5 microns. As for the probe assembly described in claim 14, the pipe member also forms a blocking wall between two adjacent convex portions, the blocking wall is located lower than the top edge of the convex portion, and the radial size is smaller than the deformable radial size of the part. A spring-type probe structure, including: the probe assembly as described in claim 14; a movable ejector pin, which is disposed in the accommodation space of the pipe fitting, and a smaller needle portion of the ejector pin can extend out of the pipe fitting Outside, the ejector pin moves within the pipe but cannot be detached; an elastic member is a compressible spring. The elastic member is disposed in the accommodation space, and its two ends are in contact with the ejector pin and the probe head respectively.

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