TWI815835B - Cutting method of workpiece and wire saw - Google Patents

Abstract

A method for cutting workpieces, which is carried out with a wire saw. The wire saw is used to cut the workpiece with abrasive grains fixed on the surface. The fixed abrasive steel wire is wound around a plurality of grooved rollers to form a steel wire row. While the fixed abrasive steel wire is driven back and forth in the axial direction, the workpiece is cut and fed into the steel wire row, thereby cutting the workpiece into the steel wire row. It is cut simultaneously at a plurality of positions side by side in the axial direction. The workpiece is supported by the workpiece support mechanism through the joint member attached to the workpiece. After the cutting of the workpiece is completed and before the workpiece is withdrawn from the steel wire array, another set of A metal steel wire wearing member between the workpiece and the workpiece support mechanism cuts and feeds the steel wire row to wear the fixed abrasive grain steel wire. Thereby, when the cut workpiece is pulled out from the steel wire array, the steel wire will not be hooked on the workpiece and cause saw marks, and the steel wire will not be broken.

Description

Cutting method of workpiece and wire saw

The invention relates to a workpiece cutting method and a wire saw.

As a means of cutting out wafers from, for example, silicon ingots and compound semiconductor ingots, wire saws are conventionally known. This wire saw forms a steel wire row by winding a large amount of cutting steel wire around a plurality of rollers. The cutting steel wire is driven at high speed in the axial direction, and the workpiece is moved while appropriately supplying mud. The steel wire row is cut and fed, and the workpiece is simultaneously cut at the position of each steel wire (see, for example, Patent Document 1).

Here, an outline of an example of a conventional wire saw is shown in FIG. 5 . As shown in Figure 5, this wire saw 101 is mainly composed of the following: a steel wire 102 (high tension steel wire) used to cut the workpiece W, grooved rollers 103, 103' around which the steel wire 102 is wound, The steel wire row 112 formed by winding the steel wire 102 around a plurality of grooved rollers 103 and 103', the mechanisms 104 and 104' that apply tension to the steel wire 102, and the workpiece conveying mechanism that sends the cut workpiece W downward. 105 and a mechanism 106 for supplying mud during cutting.

The steel wire 102 is released from the steel wire reel 107 on one side, passes through the moving platform 108, the pulley 109 and the tension imparting mechanism 104, and is wound on the grooved rollers 103 and 103' about 300 to 500 times, and then passes through the other side The tension imparting mechanism 104', the pulley 109' and the moving platform 108' are wound on the steel wire reel 107'.

The grooved rollers 103 and 103' are rollers in which polyurethane resin is pressed into the periphery of a steel cylinder and grooves are cut at a certain pitch on the surface. The wound steel wire 102 drives the motor through the grooved roller. 110 can be driven in the reciprocating direction at a predetermined cycle.

In addition, the wire reels 107 and 107' are rotationally driven by the wire reel drive motors 111 and 111', and the speeds of the grooved drum drive motor 110 and the wire reel drive motors 111 and 111' are respectively controlled. , and the tension applied to the steel wire 102 can be adjusted.

As shown in FIG. 6 , the workpiece conveying mechanism 105 for sending the workpiece W downward in FIG. 5 has a workpiece support portion 113 and a workpiece support mechanism 115 composed of a workpiece plate 114 . The workpiece W is attached to the workpiece W by The joint members (beams) are attached to the workpiece plate 114 .

When the workpiece W is cut, the workpiece W is supported and relatively pressed down by the workpiece conveying mechanism 105, and is sent out against the steel wire array 112 composed of the steel wires 102 wound around the grooved rollers 103 and 103'.

Using such a wire saw 101, the tension applying mechanisms 104 and 104' are used to apply appropriate tension to the steel wire 102, and then the grooved roller drive motor 110 drives the steel wire 102 in the reciprocating direction while simultaneously driving the steel wire 102 from the mud supply mechanism 106. Mud is supplied, and the workpiece is cut and fed by the workpiece conveying mechanism 105 to cut the workpiece.

On the other hand, there is known a method of cutting the workpiece using a fixed abrasive steel wire in which diamond abrasive grains or the like are fixed to the surface of the steel wire instead of using slurry containing abrasive grains. This method is used to cut workpieces with a diameter of approximately 150 mm or less. Partially cut off small-diameter ingots has been put into practical use.

In cutting with this fixed abrasive steel wire, the steel wire of the wire saw shown in Figure 5 is replaced with a fixed abrasive steel wire, and the slurry is changed to a coolant such as cooling water that does not contain abrasive grains. Instead, a general scroll saw can be used for this purpose.

[Prior Technical Document]

〔Patent documents〕

[Patent Document 1] Japanese Patent Application Laid-Open No. 9-262826

Cutting with fixed abrasive steel wires has the advantage of producing less industrial waste in terms of the environment because no free abrasive grains are used. It also has the advantage of fast processing speed, which has many advantages compared with processing using wire saws using free abrasive particles. However, in the wire saw, as shown in FIG. 5 , a single steel wire 10 wound around the grooved rollers 103 and 103' is moved and cut in order to push the workpiece W. When the cutting is completed, the workpiece W is located at a relatively high position. The lower side of the steel wire 102 that has pushed the workpiece W. Therefore, in order to take out the workpiece W, it is necessary to move the workpiece W upward so that the steel wire 102 passes through the gap formed in the wafer-shaped workpiece W and is extracted to the opposite lower side.

When drawing out the steel wire, when using a wire saw with free abrasive grains, as shown in FIG. area), the extraction of the steel wire 102 is relatively easy. However, as shown in (b) of FIG. 7 , when a wire saw with fixed abrasive grains is used, since there is no gap between the fixed abrasive grain steel wire 402 and the workpiece W, it is difficult to extract the fixed abrasive grain steel wire 402 . Therefore, the fixed abrasive steel wire 402 is hooked on the workpiece W and floats. If the fixed abrasive steel wire 402 is tried to be pulled out in this state, the cut surface of the workpiece will be damaged and a so-called so-called so-called so-called so-called so-called so-called so-called so-called so-called so-called so-called so-called so-called so-called so-called so-called "fragmentation" on the cut surface of the workpiece will be damaged if the fixed abrasive steel wire 402 is tried to be pulled out in this state. Saw marks, so Warp will deteriorate and damage the quality. Furthermore, if the floating of the fixed abrasive steel wire 402 is further increased, the steel wire may even be broken. When the steel wire is broken, the fixed abrasive steel wire must be re-wound on the grooved drum, and the re-winding amount of the fixed abrasive steel wire needs to be consumed, resulting in a large loss.

In view of the above problems, the present invention provides a workpiece cutting method and a wire saw. When the cut workpiece is extracted from the steel wire array composed of fixed abrasive steel wires, there will be no steel wire hooked on the workpiece to cause sawing. marks, or breakage of the steel wire.

In order to achieve the above object, the present invention provides a method for cutting workpieces, which is performed with a wire saw. The wire saw is a fixed abrasive steel wire with abrasive particles fixed on the surface wound around a plurality of grooved rollers. A steel wire array is formed, and while the fixed abrasive steel wire is driven back and forth in the axial direction, a workpiece is cut and fed into the steel wire array, so that the workpiece is placed at multiple positions side by side in the axial direction. Simultaneous cutting, the workpiece is supported by a workpiece support mechanism through a joint member attached to the workpiece, wherein after the cutting of the workpiece is completed and before the workpiece is extracted from the steel wire array, another installation will be performed on the workpiece. A metal steel wire wearing member between the workpiece and the workpiece supporting mechanism cuts and feeds the steel wire row, thereby wearing the fixed abrasive grain steel wire.

In such a workpiece cutting method, before the workpiece is extracted from the steel wire array composed of the fixed abrasive grain steel wire, the fixed abrasive grain is cut by a metal wire wearing member separately provided between the workpiece and the workpiece support mechanism. This prevents the abrasive wire from wearing out and prevents the abrasive wire from getting hooked when pulling out the workpiece. Therefore, according to the cutting method of the workpiece of the present invention, it is possible to prevent the occurrence of saw marks caused by the workpiece catching the fixed abrasive steel wire and the occurrence of breakage of the steel wire.

In this case, the steel wire abrasive member preferably has a Vickers hardness (HV) of 150 or less.

Using such a thing, the fixed abrasive steel wire can be worn efficiently.

In addition, the steel wire wear member preferably uses steel with a carbon content of 0.25% by mass or less as a raw material.

Using such a thing, the fixed abrasive grain steel wire can be worn more efficiently.

In addition, the steel wire wearing member can be installed on the side of the joint member.

In addition, the steel wire wearing member can be installed on the workpiece support mechanism.

In this manner, in the workpiece cutting method of the present invention, the wire wearing member installed at an appropriate position can be used.

In order to achieve the above object, the present invention provides a wire saw, which includes a wire series and a workpiece conveying mechanism. The wire series is composed of a fixed abrasive steel wire with abrasive particles fixed on the surface and is wound around a plurality of grooved rollers. Formed, the workpiece conveying mechanism supports a workpiece through a workpiece support mechanism and a joint member, and at the same time pushes the workpiece to the steel wire row, while driving the fixed abrasive steel wire back and forth in the axial direction. At the same time, the workpiece is cut and fed into the steel wire row by the workpiece conveying mechanism, thereby cutting the workpiece at a plurality of positions side by side in the axial direction simultaneously, wherein the wire saw further includes a steel wire wearing member, The steel wire wearing member is made of metal and is used to wear the fixed abrasive steel wire. The steel wire wearing member is disposed between the workpiece and the workpiece support mechanism. After the cutting of the workpiece is completed, it will automatically Before the steel wire array extracts the workpiece, the steel wire wearing member is cut and fed to the steel wire array.

The wire saw of the present invention wears the fixed abrasive steel wire through a metal wire wearing member provided between the workpiece and the workpiece support mechanism before extracting the workpiece from the steel wire array composed of the fixed abrasive steel wire. . Therefore, it is possible to prevent the fixed abrasive steel wire from being hooked when pulling out the workpiece, and to prevent the occurrence of saw marks caused by the fixed abrasive steel wire being hooked on the workpiece, and the wire breakage.

In addition, the steel wire abrasive member preferably has a Vickers hardness (HV) of 150 or less.

Using such a thing, the fixed abrasive steel wire can be worn efficiently.

In addition, the steel wire wear member preferably uses steel with a carbon content of 0.25% by mass or less as a raw material.

Using such a thing, the fixed abrasive grain steel wire can be worn more efficiently.

In addition, the steel wire wearing member can be installed on the side of the joint member.

In addition, the steel wire wearing member can be installed on the workpiece support mechanism.

In this manner, in the workpiece cutting method of the present invention, the wire wearing member installed at an appropriate position can be used.

As described above, according to the workpiece cutting method and wire saw of the present invention, when the cut workpiece is extracted from the steel wire array composed of the fixed abrasive steel wire, it is possible to prevent the generation of saw marks caused by the steel wire hooking on the workpiece. , and the occurrence of steel wire breakage.

1. 101: Scroll saw

2. 102: Steel wire

3, 3’, 103, 103’, 203, 203’: grooved roller

4, 4’, 104, 104’: Tension giving mechanism

5. 105: Workpiece conveying mechanism

6. 106: Mud supply mechanism

7, 7’, 107, 107’: steel wire reel

8, 8’, 108, 108’: moving platform

9, 9’, 109, 109’: pulley

10, 110: Drum drive motor

11, 11’, 111, 111’: low torque motor

12, 112: Steel wire array

20, 120: joint components

21: Steel wire wear components

202: Fixed abrasive steel wire

111: Steel wire reel drive motor

13. 113: Workpiece support part

14, 114: Workpiece plate

15, 115: Workpiece support mechanism

W: workpiece

FIG. 1 is a schematic diagram showing an example of a wire saw according to the present invention.

Figure 2 (a) is a diagram showing the positional relationship between the workpiece and the fixed abrasive steel wire when cutting of the workpiece is completed; Figure 2 (b) is a diagram showing the workpiece and the fixed abrasive steel wire when the hook of the steel wire occurs. (c) of FIG. 2 is a diagram showing the positional relationship between the workpiece and the fixed abrasive steel wire when extraction of the workpiece is completed.

Figure 3 (a) is a schematic diagram showing an example of the wire wearing member in the wire saw of the present invention; Figure 3 (b) shows how the fixed abrasive grain steel wire is cut toward the wire wearing member after the cutting of the workpiece is completed. Schematic diagram of interrupt input and input.

FIG. 4 is a schematic diagram for explaining Examples and Comparative Examples.

FIG. 5 is a schematic diagram showing an example of a general wire saw.

FIG. 6 is a schematic diagram showing an example of a workpiece support mechanism of a general wire saw.

Figure 7(a) is a diagram showing the state of the steel wire in the gap of the workpiece in the free abrasive grain type; Figure 7(b) is a diagram showing the state of the steel wire in the gap of the workpiece in the fixed abrasive grain type.

Hereinafter, embodiments of the present invention will be described, but the present invention is not limited thereto.

As mentioned above, when the fixed abrasive steel wire is used to cut the workpiece, when the cut workpiece is pulled out from the steel wire array composed of the fixed abrasive steel wire, the steel wire is hooked on the workpiece, causing sawing on the cut surface. marks, or the problem of steel wire breakage.

Here, the inventor of this case has repeatedly studied carefully to solve such problems. As a result, it was found that although the fixed abrasive steel wire uses very hard and difficult-to-wear abrasive grains such as diamond, when the cut abrasive grains (fixed abrasive steel wire) are fully worn, the steel wire will not hook. Pull out the workpiece while holding it. Since then, it has been discovered that a method of cutting a metal member with a fixed abrasive steel wire cut into a workpiece and forcibly wearing the abrasive grains has led to the completion of the present invention.

That is, the present invention is a method for cutting workpieces, which is carried out with a wire saw. The wire saw is a fixed abrasive steel wire with abrasive particles fixed on the surface wound around a plurality of grooved rollers to form a steel wire row. , while driving the fixed abrasive steel wire back and forth in the axial direction, by cutting and feeding a workpiece to the steel wire row, the workpiece is simultaneously cut at a plurality of positions side by side in the axial direction. The workpiece is supported by a workpiece support mechanism through a joint member attached to the workpiece, wherein after the cutting of the workpiece is completed and before the workpiece is withdrawn from the steel wire array, an additional mechanism is provided between the workpiece and the workpiece support. A metallic steel wire wearing member between the mechanisms cuts and feeds the steel wire row, thereby wearing the fixed abrasive grain steel wire.

In addition, the present invention is a wire saw, which includes a wire array and a workpiece conveying mechanism. The steel wire array is formed by winding a fixed abrasive steel wire with abrasive grains fixed on the surface around a plurality of grooved rollers. The workpiece conveying mechanism While supporting a workpiece through a workpiece support mechanism and a joint member, the mechanism pushes the workpiece to the steel wire row, and drives the fixed abrasive steel wire back and forth in the axial direction while pushing the workpiece The workpiece conveying mechanism is used to cut and feed the steel wire row, thereby cutting the workpiece simultaneously at a plurality of positions side by side in the axial direction, wherein the wire saw further includes a steel wire wearing member, and the steel wire wearing member It is made of metal and is used to wear the fixed abrasive steel wire. The steel wire wearing member is arranged between the workpiece and the workpiece support mechanism. After the cutting of the workpiece is completed, it is extracted from the steel wire array. In front of the workpiece, the steel wire wearing member is cut and sent to the steel wire row.

First, a wire saw capable of using the workpiece cutting method of the present invention will be described with reference to FIGS. 1 to 3 . As shown in FIG. 1 , the wire saw 1 is composed of a fixed abrasive steel wire 2 for cutting the workpiece W, a plurality of grooved rollers 3 and 3' around which the fixed abrasive steel wire 2 is wound, and a grooved roller 3 . , the steel wire row 12 between 3', the tension imparting mechanism 4, 4' used to impart tension to the fixed abrasive steel wire 2, the workpiece conveying mechanism 5 that sends the cut workpiece W to the lower part and supplies it during cutting. The coolant supply mechanism 6 is composed of a coolant.

The fixed abrasive steel wire 2 is released from the steel wire reel 7 on one side, passes through the moving platform 8, the pulley 9, the magnetic particle clutch (low torque motor 11) and the tension roller (fixed load) (not shown in the figure), etc. The configured tension imparting mechanism 4 enters the grooved roller 3. The steel wire row 12 is formed by winding the fixed abrasive steel wire 2 around the grooved rollers 3 and 3' about 400 to 500 times. Furthermore, the fixed abrasive steel wire 2 passes through the moving platform 8', the pulley 9', and passes through the other side composed of the magnetic powder clutch (low torque motor 11') and the tension roller (fixed load) (not shown in the figure). The tension applying mechanism 4' is wound around the steel wire reel 7'.

Such a wire saw 1 can cut and feed the workpiece W to the steel wire row 12 while reciprocating the fixed abrasive steel wire 2 in the axial direction, thereby cutting a plurality of workpieces W arranged side by side in the axial direction. positions are cut off at the same time. The reciprocating driving of the fixed abrasive steel wire 2 is to make the fixed abrasive steel wire 2 wound between the plurality of grooved rollers 3 and 3' advance by a specified length in one direction and then move in the other direction by a longer distance than before. The amount of advancement is a small length and the length is retreated. This is regarded as a conveying cycle. By repeating this cycle, the steel wire is sent out in one direction. The grooved roller 3' is configured so that the wound fixed abrasive steel wire 2 can be driven in the reciprocating direction by the grooved roller driving motor 10 in a predetermined cycle.

2 (a) and (c) respectively show the positional relationship between the workpiece W and the fixed abrasive steel wire 202 wound around a plurality of grooved rollers 203 and 203' when the cutting of the workpiece is completed and the extraction of the workpiece is completed. picture. As shown in FIG. 2(a) , at the end of cutting, the workpiece W is located below the steel wire row. Therefore, in order To take out the workpiece W, it is necessary to move the workpiece W upward so that the steel wire 202 passes through the gap between the wafers of the cut wafer-shaped workpiece and is relatively extracted downward.

However, when using a conventional wire saw with a fixed abrasive steel wire, since there is no gap between the fixed abrasive steel wire 202 and the workpiece W (see (b) of FIG. 7 ), the fixed abrasive grain 202 may catch the workpiece. W floats as shown in FIG. 2(b) , causing saw marks on the cut surface of the workpiece W, or breaking of the steel wire.

In order to prevent this situation, the wire saw 1 of the present invention, as shown in FIG. 3, is further equipped with a metal wire wearing member 21, which is provided between the workpiece W and the workpiece support mechanism 15. After the cutting of the workpiece W is completed, And before the workpiece W is extracted from the steel wire array 12, the steel wire array 12 is cut and fed. In addition, the workpiece support mechanism 15 can be composed of the workpiece support part 13 and the workpiece plate 14 . Thereby, before extracting a workpiece, the steel wire array 12 can be cut and fed into the steel wire abrasion member 21, and the fixed abrasive grain steel wire 2 can be worn. This can avoid saw marks or wire breakage caused by the steel wire hanging on the workpiece when pulling out the workpiece. In addition, in order to cut and feed the steel wire wearing member 21, the workpiece conveying mechanism 5 may be used.

Here, the wire wearing member 21 in the wire saw 1 of the present invention is made of metal. The metal is not particularly limited, but iron, aluminum, copper, titanium, etc. are suitable. Alloys such as brass can also be used.

It is preferable to use a Vickers hardness (HV) of 150 or less for the steel wire abrasive member 21 . In addition, the lower limit of Vickers hardness (HV) is not particularly limited, but it can be 70 or more. Furthermore, as a raw material of the steel wire wear member 21, one of the most suitable examples is steel (mild steel) with a carbon content of 0.25% by mass or less compared to high-tensile steel subjected to quenching or the like. In addition, the carbon content of mild steel is generally 0.22 to 0.27% by mass. The lower limit of the carbon content of the raw material of the steel wire wearing member 21 is not particularly limited, and it can be 0.10% by mass or more.

If the wire wearing member is as described above, the fixed abrasive grain wire can be worn more efficiently.

In addition, the thickness and cutting feed amount of the wire abrasive member 21 are not particularly limited as long as the fixed abrasive grain wire can be abraded, and can be set appropriately.

In addition, as shown in FIG. 3 , the wire abrasion member 21 can be easily attached and mounted on the side surface of the joint member 20 for use. Alternatively, the wire wearing member 21 is attached and mounted on the workpiece support mechanism 15 .

In this way, the wire saw 1 of the present invention can cut and feed the metal wire abrasive member 21 to the steel wire array 12 after the cutting of the workpiece W is completed and before the workpiece W is extracted from the steel wire array 12 , thereby making it possible to fix the wire saw 1 . The abrasive steel wire is worn and then the workpiece is extracted. This can prevent the steel wire from hooking on the workpiece and causing saw marks or the steel wire from breaking.

Next, the cutting method of the workpiece according to the present invention will be explained by taking the situation of using the above-mentioned wire saw of the present invention as an example. First, as shown in Figure 1, the steel wire array 12 is formed by winding the fixed abrasive steel wire 2 with abrasive particles fixed on the surface around a plurality of grooved rollers 3, 3'. Then, the grooved roller driving motor 10 drives the fixed abrasive steel wire 2 back and forth in the axial direction of the fixed abrasive steel wire 2 . Next, the cylindrical workpiece W is cut and fed to the steel wire row by the workpiece conveying mechanism 5, so that the workpiece W is cut at a plurality of positions juxtaposed in the axial direction.

In the workpiece cutting method of the present invention, after the cutting of the workpiece W is completed and before the workpiece W is extracted from the steel wire array 12 , the metal wire wearing member 21 is separately provided between the workpiece W and the workpiece support mechanism 15 The steel wire row 12 is cut and fed, so that the fixed abrasive grain steel wire 2 is worn (see (b) of FIG. 3 ).

Thereby, since the steel wire is sufficiently worn, it is possible to prevent the steel wire from being hooked on the cut workpiece when the workpiece W is pulled out, causing saw marks on the cut surface, or the steel wire being broken.

[Example]

Although the present invention will be specifically described below using examples and comparative examples, the present invention is not limited thereto.

(Example)

Using the wire saw of the present invention as shown in FIG. 1 , according to the workpiece cutting method of the present invention, the cylindrical workpiece is cut and the workpiece is extracted from the steel wire array composed of fixed abrasive grain steel wires. The fixed abrasive steel wires described in Table 1 below are used.

Furthermore, the structure of the steel wire abrasion member and the cutting conditions of the workpiece were as shown in Table 2 below. In addition, the wire driving conditions and the conveying speed of the steel wire abrading member when cutting and feeding the steel wire array are the same as the steel wire driving conditions and workpiece conveying conditions when cutting the workpiece. The wire wearing member is cut into 5 mm to wear the fixed abrasive grain wire.

As shown in FIG. 4 , in the embodiment, S25C (steel) is attached to both sides of the joint member as a steel wire abrasion member.

(Comparative example)

The cylindrical workpiece was cut under the same conditions (Table 1 and Table 2) as in the Example except that no steel wire abrasive member was used, and the workpiece was extracted from the steel wire array (Fig. 4). The results are shown in Table 3 below.

As shown in Table 3, in the example in which the fixed abrasive steel wire was worn by the steel wire wearing member, there was no wire breakage during extraction and no saw marks on the cut surface of the workpiece. On the other hand, in the comparative example in which a steel wire abrasion member was not used, the fixed abrasive grain steel wire was not worn, and the occurrence of wire breakage and saw marks during extraction was confirmed.

In addition, the present invention is not limited by the foregoing embodiments. The foregoing embodiments are examples, and those that have substantially the same structure as the technical ideas described in the patent application scope of the present invention and achieve the same effects are included in the technical scope of the present invention.

1:Scroll saw

2:Steel wire

3. 3’: Grooved roller

4. 4’: Tension giving mechanism

5: Workpiece conveying mechanism

6: Mud supply mechanism

7. 7’: Steel wire reel

8, 8’: moving platform

9, 9’: pulley

10:Roller drive motor

11, 11’: low torque motor

12: Steel wire array

21: Steel wire wear components

W: workpiece

Claims (12)

A method for cutting workpieces using a wire saw. The wire saw winds a fixed abrasive steel wire with abrasive particles fixed on its surface around a plurality of grooved rollers to form a steel wire row. While the fixed abrasive steel wire is driven back and forth in the axial direction, a workpiece is cut and fed into the steel wire row, and the workpiece is cut simultaneously at multiple positions side by side in the axial direction. The workpiece is pasted through A joint member attached to the workpiece is supported by a workpiece support mechanism, wherein after the cutting of the workpiece is completed and before the workpiece is extracted from the steel wire array, another joint member is disposed between the workpiece and the workpiece support mechanism. A steel wire wearing member made of metal cuts and feeds the steel wire row, thereby wearing the fixed abrasive grain steel wire. The method for cutting a workpiece according to claim 1, wherein the steel wire wearing member has a Vickers hardness (HV) of 150 or less. The method for cutting a workpiece according to claim 1, wherein the steel wire wear member uses steel with a carbon content of 0.25 mass% or less as a raw material. The method for cutting a workpiece according to claim 2, wherein the steel wire wear member uses steel with a carbon content of 0.25 mass% or less as a raw material. The method for cutting a workpiece according to any one of claims 1 to 4, wherein the steel wire wearing member is installed on the side of the joint member. The workpiece cutting method according to any one of claims 1 to 4, wherein the steel wire wearing member is installed on the workpiece support mechanism. A wire saw includes a steel wire row and a workpiece conveying mechanism. The steel wire row is formed by winding a plurality of grooved rollers with fixed abrasive steel wires with abrasive grains fixed on the surface. The workpiece conveying mechanism is formed by A workpiece supporting mechanism supports a workpiece through a joint member and simultaneously pushes the workpiece To the steel wire array, while driving the fixed abrasive steel wire back and forth in the axial direction, the workpiece is cut and fed to the steel wire array by the workpiece conveying mechanism, so that the fixed abrasive steel wire is worn, Thereby, the workpiece is cut simultaneously at a plurality of positions arranged side by side in the axial direction, wherein the wire saw further includes a steel wire wearing member, the steel wire wearing member is made of metal, and is used to wear the fixed abrasive grain steel wire, The steel wire abrasive member is disposed between the workpiece and the workpiece support mechanism. After the cutting of the workpiece is completed and before the workpiece is extracted from the steel wire array, the steel wire abrasive member cuts the steel wire array. Break in and send out. The wire saw according to claim 7, wherein the steel wire wearing member has a Vickers hardness (HV) of 150 or less. The wire saw according to claim 7, wherein the steel wire wearing member uses steel with a carbon content of 0.25 mass% or less as a raw material. The wire saw according to claim 8, wherein the steel wire wearing member uses steel with a carbon content of 0.25 mass% or less as a raw material. The wire saw according to any one of claims 7 to 10, wherein the wire wearing member is installed on the side of the joint member. The wire saw according to any one of claims 7 to 10, wherein the steel wire wearing member is installed on the workpiece support mechanism.