TW201932266A - Workpiece cutting method and wire saw - Google Patents

Abstract

The present invention is a workpiece cutting method that uses a wire saw for cutting a workpiece simultaneously in a plurality of locations aligned in the axial direction by way of forming a wire row by winding a fixed abrasive grain wire on a plurality of grooved rollers and feeding the workpiece, held with a workpiece holding means via a connecting member mounted to the workpiece, to be cut by the wire row while the fixed abrasive grain wire moves back and forth in the axial direction, said workpiece cutting method being characterized in that a wire abrasion member made of metal and separately provided between the workpiece and the workpiece holding means is fed to and cut by the wire row after the workpiece is cut and before the workpiece is extracted from the wire row, and the fixed abrasive grain wire is abraded. Thus, provided are a workpiece cutting method and a wire saw with which saw marks by the wire catching on the workpiece when extracting the cut workpiece from the wire row and wire breaks do not occur.

Description

Workpiece cutting method and wire saw

The present invention relates to a method of cutting a workpiece and a wire saw.

As a means for cutting out a wafer from, for example, a bismuth ingot and a compound semiconductor ingot, a wire saw is conventionally used. The wire saw is formed by winding a large number of cutting steel wires in a plurality of rollers to form a steel wire row which is driven at a high speed in the axial direction and which is made to be supplied while appropriately supplying the slurry. The steel wire is cut and fed, and the workpiece is simultaneously cut at the position of each steel wire (see, for example, Patent Document 1).

An outline of an example of a conventional wire saw is shown in FIG. As shown in FIG. 5, the wire saw 101 is mainly composed of a steel wire 102 (high tensile steel wire) for cutting the workpiece W, and a grooved roller 103, 103' wound by the steel wire 102, A wire line 112 formed by winding a steel wire 102 around a plurality of grooved rolls 103, 103', a mechanism 104, 104' for imparting tension to the steel wire 102, and a workpiece conveying mechanism for conveying the workpiece W to be cut downward 105 and a mechanism 106 for supplying mud at the time of cutting.

The steel wire 102 is released from the steel wire reel 107 on one side, and is wound around the grooved drum 103, 103' via the boring table 108, the pulley 109, and the tension applying mechanism 104, about 300 to 500 times, and then passes through the other side. The tension applying mechanism 104', the pulley 109', and the moving platform 108' are wound around the steel wire reel 107'.

Further, the grooved drums 103 and 103' are rollers which press the polyurethane resin around the steel cylinder and cut the groove at a certain pitch on the surface thereof, and the wound steel wire 102 is driven by the grooved drum motor. 110 can be driven in a reciprocating direction at a predetermined cycle.

The steel wire reels 107, 107' are rotationally driven by the wire reel drive motors 111, 111', respectively, by controlling the speed of the grooved drum drive motor 110 and the wire reel drive motors 111, 111', respectively. The tension applied to the steel wire 102 can be adjusted.

Further, as shown in FIG. 6, the workpiece transport mechanism 105 for feeding the workpiece W downward in FIG. 5 has a workpiece support portion 113 and a workpiece support mechanism 115 composed of a workpiece plate 114, and the workpiece W is attached to the workpiece W. The joint member (beam) is followed by the workpiece plate 114.

When the workpiece W is cut, the workpiece W is relatively pressed while being supported by the workpiece transport mechanism 105, and is sent out to the steel wire array 112 composed of the steel wires 102 wound around the grooved rollers 103, 103'.

Using such a jigsaw 101, the tension applying mechanism 104, 104' is used to apply an appropriate tension to the steel wire 102, and the grooved roller drive motor 110 drives the steel wire 102 in the reciprocating direction while the self-slurry supply mechanism 106 is being driven. The slurry is supplied, and the workpiece is conveyed by the workpiece transport mechanism 105 to cut the workpiece.

On the other hand, it is known to cut a workpiece by using a fixed abrasive grain steel wire which fixes diamond abrasive grains or the like on the surface of a steel wire without using a slurry containing abrasive grains, and has a diameter of about 150 mm or less. Part of the cutting of the small-diameter ingot is practical.

In the cutting by the fixed abrasive steel wire, the steel wire of the wire saw shown in FIG. 5 is changed to a fixed abrasive steel wire, and the mud is changed to a coolant such as cooling water containing no abrasive grains. It is possible to use a general wire saw for this purpose.

[Previous Technical Literature]
[Patent Literature]
[Patent Document 1] Japanese Patent Laid-Open Publication No. Hei 9-262826

[The problem to be solved by the invention]
Since the cutting by the fixed abrasive grain steel wire does not use the free abrasive grain, there is an advantage that the industrial waste is small in terms of the environment. Moreover, it has the advantage of a fast processing speed, and has many advantages over the processing using a wire saw using free abrasive grains. However, in the wire saw, as shown in Fig. 5, in order to press the workpiece W, one steel wire 10 wound around the grooved drums 103, 103' is moved and cut, and at the end of the cutting, the workpiece W is located at the end. The lower side of the steel wire 102 that has pushed the workpiece W. Therefore, in order to take out the workpiece W, it is necessary to move the steel wire 102 to the lower side by forming a gap of the wafer-shaped workpiece W by being cut by cutting the workpiece W upward.

In the case of using a wire saw with free abrasive grains when drawing a steel wire, as shown in FIG. 7(a), a gap can be generated between the steel wire 102 and the workpiece W depending on the width of the free abrasive grain G (blank clearance) Zone), the extraction of the steel wire 102 is relatively easy. However, as shown in FIG. 7(b), in the case of using a wire saw with fixed abrasive grains, it is difficult to extract the fixed abrasive steel wire 402 because no gap is formed between the fixed abrasive steel wire 402 and the workpiece W. Therefore, the fixed abrasive steel wire 402 is hooked on the workpiece W and floated. If the fixed abrasive steel wire 402 is to be withdrawn in this state, the workpiece cut surface will be damaged and a so-called cut surface will be produced. Saw marks, so Warp will deteriorate and damage quality. Further, if the floating of the fixed abrasive steel wire 402 is further increased, it may even break the steel wire. When the steel wire breakage occurs, it is necessary to laborly re-wind the fixed abrasive grain steel wire to the grooved roller, and it takes a large amount of the fixed abrasive grain steel wire which is re-wound.

The present invention has been made in view of the above problems, and provides a cutting method for a workpiece and a wire saw. When the workpiece after the cutting is extracted from the steel wire column formed by the fixed abrasive steel wire, the steel wire is not hooked on the workpiece to generate the saw. Traces, or broken wires that produce steel wires.

[Technical means to solve the problem]
In order to achieve the above object, the present invention provides a method for cutting a workpiece, which is performed by a wire saw, which is obtained by winding a fixed abrasive steel wire having abrasive grains on its surface on a plurality of grooved rollers. Forming a steel wire train, and cutting and feeding the fixed abrasive grain steel wire in the axial direction, by cutting and feeding the steel wire row to a workpiece, the workpiece is arranged at a plurality of positions side by side in the axial direction Simultaneously cutting, the workpiece is supported by a workpiece supporting mechanism through a joint member attached to the workpiece, wherein after the cutting of the workpiece is completed, and the workpiece is drawn from the steel wire column, the workpiece is additionally disposed at the workpiece A steel wire wear member between the workpiece and the workpiece support mechanism cuts and feeds the steel wire row to wear the fixed abrasive grain wire.

In the cutting method of such a workpiece, the fixed grinding is performed by a metal steel wire wear member separately provided between the workpiece and the workpiece supporting mechanism before the workpiece is drawn from the steel wire string formed by the fixed abrasive steel wire. The grain steel wire is worn, so that it is possible to prevent the occurrence of the hook of the fixed abrasive steel wire when the workpiece is taken out. Therefore, according to the cutting method of the workpiece of the present invention, it is possible to prevent the occurrence of the saw marks caused by the hooking of the workpiece by the fixed abrasive grain steel wire and the occurrence of the disconnection of the steel wire.

In this case, the steel wire wear member preferably has a Vickers hardness (HV) of 150 or less.

By using such a thing, the fixed abrasive grain steel wire can be efficiently worn.

Further, the steel wire wear member is preferably made of steel having a carbon content of 0.25 mass% or less.

By using such a thing, the fixed abrasive grain steel wire can be worn more efficiently.

Further, the steel wire wear member can be attached to the side surface of the joint member.

Further, the wire abrasion member can be attached to the workpiece support mechanism.

As described above, in the cutting method of the workpiece of the present invention, a steel wire wear member provided at an appropriate position can be used.

In order to achieve the above object, the present invention provides a wire saw comprising a wire array and a workpiece transporting mechanism, wherein the steel wire is wound by a plurality of fixed abrasive steel wires having abrasive grains fixed on the surface thereof, and is wound around a plurality of grooved rollers. Forming, the workpiece conveying mechanism pushes the workpiece to the steel wire string while supporting the workpiece through a workpiece supporting mechanism and through an engaging member, and reciprocating the fixed abrasive grain steel wire in the axial direction At the same time, the workpiece is cut and fed by the workpiece conveying mechanism, thereby simultaneously cutting the workpiece at a plurality of positions side by side in the axial direction, wherein the wire saw further comprises a steel wire wear member. The steel wire wear member is made of metal for abrading the fixed abrasive grain wire, and the wire wear member is disposed between the workpiece and the workpiece support mechanism, after the cutting of the workpiece is completed, and The steel wire wear member cuts and feeds the steel wire row before the steel wire is drawn out of the workpiece.

The wire saw of the present invention is used for fixing the abrasive grain steel wire by a metal steel wire wear member disposed between the workpiece and the workpiece support mechanism before the workpiece is drawn from the steel wire column formed by the fixed abrasive steel wire. . Therefore, it is possible to prevent the occurrence of the hook of the fixed abrasive steel wire when the workpiece is taken out, and it is possible to prevent the occurrence of the saw mark caused by the fixed abrasive grain wire hooking on the workpiece and the occurrence of the disconnection of the steel wire.

Further, the steel wire wear member preferably has a Vickers hardness (HV) of 150 or less.

By using such a thing, the fixed abrasive grain steel wire can be efficiently worn.

Further, the steel wire wear member is preferably made of steel having a carbon content of 0.25 mass% or less.

By using such a thing, the fixed abrasive grain steel wire can be worn more efficiently.

Further, the steel wire wear member can be attached to the side surface of the joint member.

Further, the wire abrasion member can be attached to the workpiece support mechanism.

As described above, in the cutting method of the workpiece of the present invention, a steel wire wear member provided at an appropriate position can be used.

[Compared with the efficacy of prior art]
As described above, according to the cutting method and the wire saw of the present invention, when the workpiece after cutting is taken out from the steel wire column formed by the fixed abrasive steel wire, the occurrence of the saw mark caused by the steel wire hooking on the workpiece can be prevented. , and the occurrence of wire breaks.

Hereinafter, the embodiments of the present invention will be described, but the present invention is not limited thereto.

As described above, when the workpiece is cut by the fixed abrasive grain steel wire, when the steel wire string formed by the fixed abrasive grain steel wire is taken out from the workpiece after cutting, a steel wire is hooked on the workpiece, and a saw is produced on the cut surface. Trace, or the problem of broken steel wire.

Here, the inventor of the present case has carefully studied in order to solve such problems. As a result, it has been found that the fixed abrasive grain steel wire is made of a hard, hard-wearing abrasive grain such as a diamond, but the steel wire is not hooked under the condition that the abrasive grain (fixed abrasive steel wire) after cutting is sufficiently worn. Pull the workpiece out of the workpiece. From this point of view, it has been found that the present invention has been completed by cutting a fixed abrasive steel wire after cutting a workpiece into a metal member and forcibly abrading the abrasive grains.

That is, the present invention is a method for cutting a workpiece, which is performed by a wire saw, which is a fixed abrasive grain steel wire having abrasive grains fixed on a surface thereof, and is wound around a plurality of grooved drums to form a steel wire column. While the fixed abrasive grain steel wire is reciprocated in the axial direction, the workpiece is cut and fed by a workpiece, and the workpiece is simultaneously cut at a plurality of positions side by side in the axial direction. The workpiece is supported by a workpiece supporting mechanism through a joint member attached to the workpiece, wherein after the cutting of the workpiece is completed, and before the workpiece is drawn from the steel line, the workpiece is additionally disposed on the workpiece and the workpiece is supported. A steel wire wear member made of metal between the mechanisms cuts and feeds the steel wire row to wear the fixed abrasive grain steel wire.

Further, the present invention is a wire saw comprising a core line and a workpiece transporting mechanism formed by winding a fixed abrasive steel wire having abrasive grains fixed on the surface of a plurality of grooved rollers, the workpiece transporting The mechanism pushes the workpiece to the steel wire string while supporting the workpiece through a workpiece supporting mechanism and through an engaging member, and the workpiece is driven while the fixed abrasive grain steel wire is reciprocated in the axial direction The steel wire train is cut and fed by the workpiece transport mechanism, thereby simultaneously cutting the workpiece at a plurality of positions side by side in the axial direction, wherein the wire saw further comprises a steel wire wear member, the steel wire wear member The wire is made of metal for abrading the fixed abrasive grain, and the wire wear member is disposed between the workpiece and the workpiece support mechanism, and after the cutting of the workpiece is completed, and is extracted from the steel wire column The steel wire wear member is cut and fed to the steel wire row before the workpiece.

First, a wire saw capable of using the cutting method of the workpiece of the present invention will be described with reference to Figs. 1 to 3 . As shown in FIG. 1, the wire saw 1 is formed of a fixed abrasive grain 2 for cutting a workpiece W, a plurality of grooved rollers 3, 3' wound with a fixed abrasive steel wire 2, and a grooved drum 3. The steel wire array 12 between 3', the tension applying mechanisms 4, 4' for imparting the tension of the fixed abrasive steel wire 2, the workpiece transport mechanism 5 for feeding the cut workpiece W to the lower portion, and the supply at the time of cutting The coolant supply mechanism 6 of the coolant is constituted.

The fixed abrasive grain steel wire 2 is released from the steel wire reel 7 on one side, passes through the moving platform 8 and the pulley 9, passes through the magnetic powder clutch (low torque motor 11) and the tension roller (fixed load) (not shown), etc. The tension applying mechanism 4 is configured to enter the grooved drum 3. Further, the steel wire row 12 is formed by winding the fixed abrasive steel wire 2 around the grooved rolls 3, 3' by about 400 to 500 times. Further, the fixed abrasive steel wire 2 passes through the moving platform 8' and the pulley 9', passes through the other side of the magnetic powder clutch (low torque motor 11') and the tension roller (fixed load) (not shown). The tension applying mechanism 4' is wound around the steel wire reel 7'.

Such a jigsaw 1 can cut and feed the workpiece W to the steel wire train 12 while the fixed abrasive grain steel wire 2 is reciprocated in the axial direction thereof, thereby arranging the workpiece W in the axial direction. The position is cut off at the same time. The reciprocating drive of the fixed abrasive steel wire 2 is such that the fixed abrasive steel wire 2 wound between the plurality of grooved rollers 3, 3' advances in a direction by a predetermined length, and is oriented in the other direction. The advance amount is regressed with a small length, and this is taken as a conveyance cycle, and by repeating this cycle, the steel wire is sent in one direction. The grooved roller 3' is provided such that the wound fixed abrasive steel wire 2 can be driven in the reciprocating direction by the grooved drum drive motor 10 at a predetermined cycle.

Further, (a) and (c) of Fig. 2 show the positional relationship between the workpiece W and the fixed abrasive steel wire 202 wound around the plurality of grooved rollers 203 and 203' at the end of the cutting of the workpiece and the completion of the extraction of the workpiece. Figure. As shown in FIG. 2(a), at the end of the cutting, the workpiece W is located at a position lower than the steel line row. Therefore, in order to take out the workpiece W, it is necessary to move the steel wire 202 upward by the gap between the wafers which are cut into the wafer-like workpiece by the workpiece W, and to be drawn out to the lower side.

However, when a wire saw of a conventional fixed abrasive steel wire is used, since the gap between the fixed abrasive steel wire 202 and the workpiece W is not generated (refer to (b) of FIG. 7), the fixed abrasive grain 202 will hook the workpiece. W floats as shown in FIG. 2(b), and a saw mark is formed on the cut surface of the workpiece W, or the steel wire is broken.

In order to prevent this, the wire saw 1 of the present invention further includes a metal wire wear member 21 provided between the workpiece W and the workpiece support mechanism 15 as shown in FIG. 3, after the cutting of the workpiece W is completed. Further, the steel wire train 12 is cut and fed before the workpiece W is taken out from the steel wire train 12. Further, the workpiece support mechanism 15 can be constituted by the workpiece support portion 13 and the workpiece plate 14. Thereby, the steel wire strand 12 can be cut and fed to the steel wire wear member 21 before the workpiece is taken out, and the fixed abrasive steel wire 2 can be worn. It is possible to avoid the occurrence of saw marks when the steel wire is hooked on the workpiece when the workpiece is taken out, or the occurrence of wire breakage. Further, in order to cut and feed the wire abrasion member 21, the workpiece conveying mechanism 5 may be used.

Here, the wire abrasion member 21 in the wire saw 1 of the present invention is made of metal. The metal is not particularly limited, but is preferably iron, aluminum, copper, titanium or the like. Alloys such as brass can also be used.

Further, the steel wire wear member 21 preferably has a Vickers hardness (HV) of 150 or less. Further, the lower limit of the Vickers hardness (HV) is not particularly limited, but may be 70 or more. Further, as the raw material of the steel wire wear member 21, steel (soft steel) having a carbon content of 0.25 mass% or less in high-tensile steel such as quenching is one of the most suitable examples. In addition, the carbon content of the mild steel is generally 0.22 to 0.27% by mass, and the lower limit of the carbon content of the raw material of the steel wire abrasion member 21 is not particularly limited, and may be 0.10% by mass or more.

If the steel wire wear member is as described above, the fixed abrasive steel wire can be more effectively worn.

In addition, the thickness of the steel wire wear member 21 and the amount of cut and fed are not particularly limited as long as the fixed abrasive steel wire can be worn, and can be appropriately set.

Further, as shown in FIG. 3, the steel wire wear member 21 can be attached to the side surface of the joint member 20 by simply attaching it. Alternatively, the wire abrasion member 21 is attached and attached to the workpiece support mechanism 15.

In the wire saw 1 of the present invention, after the cutting of the workpiece W is completed and the workpiece W is taken out from the steel wire row 12, the steel wire wear member 21 made of metal is cut and fed to the steel wire row 12, and can be fixed. Abrasive steel wire wear and then extract the workpiece. Thereby, it is possible to prevent the steel wire from being hooked on the workpiece to cause a saw mark or the occurrence of wire breakage.

Next, a cutting method of the workpiece of the present invention will be described by taking the case of using the wire saw of the present invention as an example. First, as shown in Fig. 1, a fixed wire steel wire 2 having abrasive grains fixed on its surface is wound around a plurality of grooved rolls 3, 3' to form a steel wire row 12. Then, the fixed abrasive steel wire 2 is reciprocated in the axial direction of the fixed abrasive steel wire 2 by the grooved drum drive motor 10. Then, the cylindrical workpiece W is cut and fed by the workpiece transport mechanism 5, and the workpiece W is cut at a plurality of positions in the axial direction.

In the cutting method of the workpiece according to the present invention, after the cutting of the workpiece W is completed and before the workpiece W is taken out from the steel wire row 12, the metal steel wire wear member 21 additionally provided between the workpiece W and the workpiece supporting mechanism 15 is provided. The steel wire train 12 is cut and fed, and the fixed abrasive grain steel wire 2 is worn (see (b) of Fig. 3).

As a result, since the steel wire is sufficiently worn, it is possible to prevent the steel wire from being hooked on the workpiece after the workpiece W is pulled out, causing a saw mark on the cut surface or the occurrence of wire breakage.

[Examples]
Hereinafter, the present invention will be specifically described using examples and comparative examples, but the present invention is not limited thereto.

(Example)
Using the wire saw of the present invention as shown in Fig. 1, according to the cutting method of the workpiece of the present invention, the cutting of the cylindrical workpiece is performed, and the drawing of the steel wire string formed by the workpiece from the fixed abrasive steel wire is performed. The fixed abrasive steel wire used was as described in Table 1 below.

【Table 1】

Further, the configuration of the steel wire wear member and the cutting condition of the workpiece are as shown in Table 2 below. In addition, the steel wire driving condition and the steel wire abrasion member conveying speed when the steel wire wear member is cut and fed into the steel wire row are the same as the steel wire driving conditions and the workpiece conveying conditions when the workpiece is cut. The steel wire wear member was cut into 5 mm to wear the fixed abrasive steel wire.
【Table 2】

Further, as in Fig. 4, in the embodiment, S25C (steel) was attached as a steel wire wear member to both side faces of the joint member.

(Comparative example)
The cylindrical workpiece was cut under the same conditions (Table 1 and Table 2) as in the example except that the steel wire wear member was not used, and the workpiece was extracted from the steel wire row (Fig. 4). The results are shown in Table 3 below.

【table 3】

As shown in Table 3, in the embodiment in which the fixed abrasive grain steel wire was worn by the steel wire wear member, no breakage occurred at the time of drawing and no saw marks were formed on the cut surface of the workpiece. On the other hand, in the comparative example in which the steel wire abrasion member was not used, since the fixed abrasive grain steel wire was not worn, the occurrence of the wire breakage and the saw mark at the time of extraction was confirmed.

Further, the present invention is not limited by the foregoing embodiments. The above-described embodiments are exemplified, and have substantially the same configuration as the technical idea described in the patent application scope of the present invention, and the same effects are achieved in the technical scope of the present invention.

1, 101‧‧‧ wire saw

2, 102‧‧‧ steel wire

3, 3', 103, 103', 203, 203'‧‧‧ with grooved roller

4, 4', 104, 104' ‧ ‧ tension-giving institutions

5, 105‧‧‧ workpiece conveying mechanism

6, 106‧‧ ‧ mud supply agency

7, 7', 107, 107'‧‧‧ steel wire reel

8, 8', 108, 108' ‧ ‧ moving platforms

9,9’, 109, 109’‧‧‧ pulleys

10, 110‧‧‧Roller drive motor

11, 11', 111, 111'‧‧‧ low torque motor

12, 112‧‧‧ steel line

20, 120‧‧‧ joint components

21‧‧‧Steel wire wear components

202‧‧‧Fixed abrasive steel wire

111‧‧‧Steel wire reel drive motor

13, 113‧‧‧ workpiece support

14, 114‧‧‧ workpiece board

15, 115‧‧‧ workpiece support mechanism

W‧‧‧Workpiece

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic view showing an example of a wire saw according to the present invention.

Fig. 2(a) is a view showing the positional relationship between the workpiece and the fixed abrasive grain steel wire at the end of the cutting of the workpiece; (b) of Fig. 2 shows the workpiece and the fixed abrasive grain steel when the hook of the steel wire is generated. A diagram showing the state of the line; (c) of FIG. 2 is a view showing the positional relationship between the workpiece and the fixed abrasive grain steel wire at the end of the extraction of the workpiece.

Fig. 3 (a) is a schematic view showing an example of a steel wire abrasion member in the wire saw of the present invention; (b) of Fig. 3 shows that after the cutting of the workpiece is completed, the fixed abrasive steel wire is cut toward the steel wire wear member. A schematic diagram of the break.

4 is a schematic view for explaining an embodiment and a comparative example.

Fig. 5 is a schematic view showing an example of a general wire saw.

Fig. 6 is a schematic view showing an example of a workpiece supporting mechanism of a general wire saw.

Fig. 7(a) is a view showing a state of a steel wire in a void of a workpiece in a free abrasive grain type, and Fig. 7(b) is a view showing a state of a steel wire in a void of a workpiece in a fixed abrasive grain type.

Claims (12)

A cutting method for a workpiece is performed by a wire saw, which is a fixed abrasive grain steel wire with abrasive grains fixed on a surface thereof, and is wound around a plurality of grooved rollers to form a steel wire string. The fixed abrasive grain steel wire is reciprocated in the axial direction, and the workpiece is cut and fed by a workpiece, and the workpiece is simultaneously cut at a plurality of positions side by side in the axial direction, and the workpiece is passed through the sticker. An engaging member attached to the workpiece is supported by a workpiece supporting mechanism, After the cutting of the workpiece is completed, and before the workpiece is extracted from the steel wire row, a steel wire wear member separately disposed between the workpiece and the workpiece supporting mechanism is cut into the steel wire row. Send, while the fixed abrasive grain steel wire is worn. The cutting method of the workpiece according to claim 1, wherein the steel wire wear member uses a Vickers hardness (HV) of 150 or less. The cutting method of the workpiece according to claim 1, wherein the steel wire wear member uses steel having a carbon content of 0.25 mass% or less as a raw material. The method of cutting a workpiece according to claim 2, wherein the steel wire wear member uses steel having a carbon content of 0.25 mass% or less as a raw material. The method of cutting a workpiece according to any one of claims 1 to 4, wherein the wire abrasion member is attached to a side surface of the joint member. The method of cutting a workpiece according to any one of claims 1 to 4, wherein the wire abrasion member is attached to the workpiece support mechanism. A wire saw comprising a wire array and a workpiece conveying mechanism, wherein the steel wire is formed by winding a fixed abrasive steel wire with abrasive grains on a surface thereof, and the workpiece conveying mechanism is formed by a workpiece supporting mechanism and supporting a workpiece through an engaging member, pushing the workpiece to the steel wire row, and transporting the workpiece to the workpiece while reciprocating the fixed abrasive grain steel wire in the axial direction The mechanism cuts and feeds the steel wire row, thereby simultaneously cutting the workpiece at a plurality of positions side by side in the axial direction. Wherein the wire saw further comprises a steel wire wear member, the steel wire wear member is made of metal for abrading the fixed abrasive grain wire, and the wire wear member is disposed between the workpiece and the workpiece support mechanism After the cutting of the workpiece is completed, the steel wire wear member is cut and fed to the steel wire row before the workpiece is drawn from the steel wire row. The wire saw according to claim 7, wherein the wire abrasion member is a Vickers hardness (HV) of 150 or less. The wire saw according to claim 7, wherein the steel wire wear member uses steel having a carbon content of 0.25 mass% or less as a raw material. The wire saw according to claim 8, wherein the wire abrasion member uses steel having a carbon content of 0.25 mass% or less as a raw material. The wire saw according to any one of claims 7 to 10, wherein the wire abrasion member is attached to a side of the joint member. A wire saw according to any one of claims 7 to 10, wherein the wire wear member is mounted to the workpiece support mechanism.