TWI808165B - A fixture assembly for testing edge-emitting laser diodes and a testing apparatus having the same - Google Patents

Abstract

A fixture assembly having a base, an upper cover and a latch mechanism for testing an edge-emitting laser diode and a testing apparatus having the same are provided. The base includes a pocket, and a transmission cavity in communication with and orthogonal to the pocket. The upper cover includes a body, an abutting block and a pressing member. The abutting block is engageable with the body for slidable movement with respect to the body. The latch mechanism is disposed on at least one of the base and the upper cover, and may selectively connect or disconnect the base to or from the upper cover. When the latch mechanism is operated to connect the upper cover to the base, the pressing member applies a force through the abutting block on the edge-emitting laser diode received in the pocket, and the edge-emitting laser diode emits the laser for inspection through the transmission cavity.

Description

Fixture assembly for testing edge-firing laser diodes and testing equipment equipped with the assembly

The present invention relates to a fixture assembly for testing edge-emitting laser diodes and testing equipment with the assembly, especially a fixture assembly suitable for fixing and testing edge-emitting laser diodes, and testing equipment for performing optical and electrical tests on the diodes.

The side/edge-emitting laser diode (side/edge-emitting laser diode) can be used in quite a few fields, including sensing, communication, lighting, photosensitive, and data storage, because of its linear propagation, tiny light spot (several um~), monochromaticity, high optical density, and coherent properties. Further explanation, such as reading and recording of CD, DVD, Blu-ray disc, photosensitive/printing of laser printer and Multi Function Peripheral (MFP), optical fiber communication, illumination of laser microscope and laser liner, distance sensing, smoke sensing, etc.

Furthermore, whether it is portable consumer electronics or industrial application products, there is a trend towards reducing the size of electronic equipment, which directly limits the size of electronic components such as semiconductor chips and laser diodes. inch. However, as the size of components shrinks, the number of contacts available for temporary contact during testing also becomes smaller. Wherein, the contact occupies part of the surface area of the component to be tested, resulting in only a part of the surface area remaining as a thermal contact surface. In addition, fine pitch (Fine pitch) spring probes cannot provide enough force to achieve good thermal contact.

Looking at the technical level of the existing technology, such as the Chinese Utility Model Patent Announcement No. CN201974446U and the Chinese Invention Patent Publication No. CN106996990A, both cannot completely solve the aforementioned problems, and there is still room for improvement. To further explain, take the utility model patent No. CN201974446U "Test fixture for power of laser diode chip" as an example, which only discloses that a carrier groove and a chip groove are provided on the fixture body, and then directly use a photodetector to directly test the components under test in the carrier groove and the chip groove one by one. Therefore, there is no means for clamping the DUT, the precise positioning of the DUT cannot be performed, and the complete electrical contact between the DUT and the spring probe cannot be ensured.

In addition, take the Chinese patent publication No. CN106996990A "Test fixture for simultaneously testing multiple multi-pin laser devices" as an example. Although it discloses a means of clamping the device to be tested, the mechanism is too complicated and must be clamped by manually turning the handle, not to mention that it does not disclose the function of providing a burn-in test. .

The main purpose of the present invention is to provide a fixture assembly for testing edge-emitting laser diodes and testing equipment with the assembly, so that the laser diodes can be firmly clamped and positioned precisely, so that the testing equipment can receive the light beams emitted by each laser diode, and can ensure that all the pads of the laser diodes can completely electrically contact the spring pins.

Another object of the present invention is to provide a fixture assembly for testing edge-emitting laser diodes, so that it can be coupled with a suitable connector connected to a test source, and the fixture itself can be circulated and processed between different devices, so that the fixture can provide repeated processing instead of directly testing the component. In addition, because unpackaged laser diodes are quite fragile and easily damaged, placing them in the jig can reduce the chance of precision dies and contacts coming into contact with external devices. Accordingly, the laser diodes are well protected since they are kept in the jig during other processes or tests.

In order to achieve the above object, a jig assembly for testing the edge-emitting laser diode of the present invention mainly includes a base, an upper cover, and a locking mechanism; the base includes at least one accommodating groove and at least one transmission cavity, and the transmission cavity and the accommodating groove are orthogonal and communicate with each other; the upper cover includes a body, a pressing block, and a pressing element, and the pressing element is set on the body, the pressing block is coupled to the body and can slide relative to the body, and the pressing block is provided with an electrical contact interface; In addition, the locking mechanism is arranged on at least one of the base and the upper cover, and can selectively engage or disengage the base and the upper cover. Wherein, when the locking mechanism engages the base and the upper cover with each other, the The pressing element exerts force on the edge-firing laser diode accommodated in the accommodating groove through the pressing block.

According to this, when the locking mechanism fastens the base and the upper cover, it exerts force on the pressing block through the pressing element, so that the pressing block and the accommodating groove jointly clamp the laser diode to be tested, and at the same time position the laser diode. In addition, when performing detection, the laser emitted by the edge-firing laser diode can be emitted through the transmission cavity (Cavity).

In order to achieve the aforementioned object, the present invention is a fixture assembly for testing an edge-emitting laser diode. The edge-emitting laser diode includes a light-emitting surface and a contact surface. The light-emitting surface includes a light-emitting area, which mainly includes a base, an upper cover, and a locking mechanism; the base includes at least one accommodating groove and at least one transmission cavity, and the transmission cavity and the accommodating groove are orthogonal and communicate with each other, and the accommodating groove is used for accommodating the edge-emitting laser diode; the upper cover includes a body, a The pressing block and a pressing element, and the body includes a through groove, the pressing block is slidably arranged in the through groove of the main body, and the pressing element is arranged between the main body and the pressing block, and the pressing block is provided with an electrical contact interface; the locking mechanism is arranged on at least one of the base and the upper cover, which can selectively engage or disengage the base and the upper cover; wherein, when the locking mechanism makes the base and the upper cover engage with each other, the pressing element exerts force on the contact surface of the edge-emitting laser diode through the pressing block, The contact surface of the edge-emitting laser diode is in contact with the at least one electrical contact interface, and the transmission cavity of the base exposes at least part of the light-emitting area of the edge-emitting laser diode.

In order to achieve the above-mentioned purpose, a detection device of the present invention mainly includes: a power supply module, the aforementioned fixture assembly, a source measurement module, and a main controller; wherein, the source measurement module starts the side shot type laser diode, and the main controller controls to perform an optical test and an electrical test on the edge-fire type laser diode.

2: Base

21: storage tank

22: Transmission cavity

3: Top cover

31: Ontology

311: through groove

312: locking part

32: Press block

321: stop block

322: electrical contact interface

323: Probe

33: Pressure component

34: button

4: Locking mechanism

41:Locking lever

411: Groove

42: slot

421: storage tank

43: Locking piece

431: spring

432: Clamp block

5: Temperature control unit

51: heating table

C: main controller

I _S : Integrating sphere

Ld: edge-firing laser diode

Ld1: light emitting surface

Ld2: contact surface

Ldz: Luminous area

M: source measurement module

P: power module

P _D : Light sensor

S: tester

T: fixture component

FIG. 1 is a schematic perspective view of an edge-firing laser diode.

Fig. 2 is a perspective view of a preferred embodiment of the jig assembly of the present invention.

Fig. 3 is a perspective view when the upper cover and the base of the jig assembly of the present invention are separated.

Fig. 4 is a partial sectional view when the upper cover and the base of the jig assembly of the present invention are separated.

Fig. 5 is a partial cross-sectional view of the upper cover and the base in the jig assembly of the present invention during the joint process.

Fig. 6 is a partial cross-sectional view of the upper cover and the base in the jig assembly of the present invention when the joint is completed.

Fig. 7 is a system architecture diagram of a preferred embodiment of the detection equipment of the present invention.

Before the fixture assembly for testing edge-firing laser diodes of the present invention and the testing equipment equipped with the assembly are described in detail in this embodiment, it should be noted that in the following description, similar components will be represented by the same component symbols. Furthermore, the drawings of the present invention are for illustrative purposes only, and may not be drawn to scale, and not all details may be presented in the drawings.

Please refer to FIG. 1 first, which is a schematic perspective view of an edge-emitting laser diode Ld. Generally speaking, the edge-firing laser diode Ld includes a The light-emitting surface Ld1 and a contact surface Ld2, wherein the light-emitting surface Ld1 includes a light-emitting area Ldz, that is, the laser is emitted from the light-emitting area Ldz. In addition, a plurality of electrical contacts (not shown in the figure) are arranged on the contact surface Ld2, which serve as a medium for electrical conduction between the diode chip and the circuit board.

Please refer to Fig. 2 and Fig. 3 again. Fig. 2 is a perspective view of a preferred embodiment of the jig assembly of the present invention, and Fig. 3 is a perspective view of the separation of the upper cover and the base of the jig assembly of the present invention. As shown in the figure, the jig assembly provided by this embodiment mainly includes a base 2, an upper cover 3, and a locking mechanism 4, and the base 2 is provided with a plurality of accommodating grooves 21, which are used to accommodate the edge-emitting laser diode Ld to be tested, that is, each accommodating groove 21 can accommodate an edge-emitting laser diode Ld as shown in FIG. 1 .

Please refer to FIG. 4 again. FIG. 4 is a partial cross-sectional view when the upper cover and the base of the jig assembly of the present invention are separated. As shown in the figure, the base 2 is further provided with a plurality of transmission cavities 22 , which are respectively perpendicular to the plurality of accommodating grooves 21 and communicate with each other. In this embodiment, the accommodating groove 21 is arranged vertically, while the transmission cavity 22 is arranged horizontally. In addition, a temperature control unit 5 is provided at the bottom of each containing tank 21 , which is used to heat up or cool down the edge-emitting laser diode Ld.

Wherein, because the jig assembly of this embodiment is used for a burn-in test (Burn-in test), the temperature control unit 5 adopts a heating platform 51, which is heated through the base 2, and the base 2 is connected with a heating or cooling chuck (chuck) (not shown). In other words, in this embodiment, both the heating platform 51 and the susceptor 2 are temperature transfer platforms. However, the present invention is not limited thereto, and other heating or cooling modules are applicable to the present invention.

In addition, the upper cover 3 in this embodiment includes a body 31 , a plurality of pressing blocks 32 , and a plurality of pressing elements 33 , the pressing elements 33 are assembled in the body 31 , and the pressing blocks 32 are coupled to the body 31 and can slide relative to the body 31 . Moreover, each pressing block 32 is provided with an electrical contact interface 322. In this embodiment, the electrical contact interface 322 includes a plurality of probes 323, which protrude from the lower end surface of the pressing block 32, and are used to electrically contact the contact surface Ld2 of the edge-emitting laser diode Ld.

To further illustrate, the main body 31 is provided with a plurality of through grooves 311, and a plurality of pressing blocks 32 are respectively slidably disposed in the plurality of through grooves 311, and the pressing block 32 protrudes radially outward to provide a stopper 321, and the through groove 311 protrudes radially inward to provide a locking portion 312. The pressing element 33 of this embodiment is a compression spring, which is arranged in the through groove 311 and interposed between the locking portion 312 and the stop block 321, and the compression spring not only provides the reset function when the pressing block 32 slides, but when the compression spring is compressed by the pressing block 32, its stretching elastic force will be used as the pressing force under the pressing block 32.

Furthermore, each locking mechanism 4 includes a pair of locking levers 41, a pair of slots 42, and a pair of locking members 43. The pair of locking levers 41 protrude upwards from the upper surface of the base 2 and are respectively arranged on two sides of the accommodating groove 21. The upper edge of each locking lever 41 includes an annular groove 411; The cavities 421 are arranged orthogonally and communicate with each other.

Moreover, the pair of locking pieces 43 are respectively assembled in the pair of slots 42, and each locking piece 43 includes a spring 431 and a fastening block 432, The fastening block 432 and the spring 431 are accommodated in the cavity 421 , and the spring 431 applies a bias to the fastening block 432 . In other words, the spring 431 can drive the locking block 432 to slide between the receiving slot 421 and the groove 411 .

The joining process of the base 2 and the upper cover 3 is described below, please refer to Fig. 4, Fig. 5 and Fig. 6 together. Fig. 4 is a partial sectional view when the upper cover 3 and the base 2 in the jig assembly of the present invention are separated. Fig. 5 is a partial sectional view of the upper cover 3 and the base 2 in the jig assembly of the present invention.

When the base 2 and the upper cover 3 are to be joined, as the upper cover 3 gradually descends and approaches the base 2 , the slot 42 of the upper cover 3 is inserted into the locking rod 41 until the groove 411 on the locking rod 41 corresponds to the slot 421 of the upper cover 3 . At this time, the spring 431 drives the fastening block 432 to slide out of the slot 421, and is locked between the slot 421 and the groove 411, and the locking member 43 fastens the locking rod 41, so that the base 2 and the upper cover 3 cannot be disengaged, thus completing the locking action.

However, see FIG. 5 , the locking rod 41 is inserted into the slot 42 of the upper cover 3 , and when the probe 323 on the lower surface of the pressing block 32 touches the contact surface Ld2 of the edge-emitting laser diode Ld, the upper cover 3 gradually descends, and the pressing element 33 is gradually squeezed to generate a pressure, which is applied to the edge-emitting laser diode Ld through the pressing block 32 . It should be noted that although the downward pressure is a discrete force for individual DUTs, each DUT in the component will eventually be subjected to a compliance force to obtain uniform and complete electrical contact and heat conduction contact.

In other words, applying a downward force to the pressing block 32 through the pressing element 33 can ensure that the electrical contact interface 322 completely contacts the contact surface Ld2 of the edge-emitting laser diode Ld, and the pressing block 32 can cooperate with the accommodating groove 21 to tightly clamp the edge-emitting laser diode Ld. At the same time, the light-emitting area Ldz of the light-emitting surface Ld1 can be aligned with the transmission cavity 22 of the base 2 , that is, the transmission cavity 22 completely exposes the light-emitting area Ldz. However, at the beginning of the test, the laser light emitted by the edge-firing laser diode Ld can be emitted through the transmission cavity 22 , as shown in FIG. 6 . It should be noted that for the test, the maximum light output is very important, so the interface or opening angle of the transmission cavity 22 must take into account the maximum divergence angles of the light-emitting area Ldz of the light-emitting surface Ld1, so as not to block the emission of laser light.

On the other hand, please refer to FIG. 2 , FIG. 3 and FIG. 4 again, each locking mechanism 4 of this embodiment further includes a button 34 , which is arranged on the upper cover 3 , and each button 34 is connected to a fastening block 432 . Therefore, when the test is completed, just press the button 34 of the upper cover 3 to push the clamping block 432 to make it withdraw from the groove 411 of the locking rod 41 to release the lock between the upper cover 3 and the base 2, and then the upper cover 3 can be easily separated from the base 2.

Please refer to FIG. 7 again. FIG. 7 is a system architecture diagram of a preferred embodiment of the detection device of the present invention. The detection equipment in this embodiment mainly includes a power module P, a fixture assembly T for testing edge-emitting laser diodes as described in the previous embodiment, a source measurement module M, a tester S, and a main controller C. The power module P, tester S, and source measurement module M are electrically connected to the main controller C, and the tester S corresponds to the transmission cavity 22 of the base 2 .

Wherein, when the locking mechanism 4 makes the base 2 and the upper cover 3 engage with each other, that is, after the electrical contacts on the contact surface Ld2 of the edge-emitting laser diode Ld electrically contact the probe 323, the source measurement module M can supply power and start the edge-emitting laser diode Ld. The laser chamber 22 emits laser light from the base 2 . However, the main controller C controls a tester S to measure the laser emitted from the transmission cavity 22, and then detects the luminous characteristics of the edge-emitting laser diode Ld, wherein the tester S is used to monitor or detect the luminous flux and the light wavelength through an integrating sphere _IS and a photosensor _PD .

In summary, the present invention at least has the following features and advantages:

1. Apply force to the pressing block 32 through the pressing element 33, so that the pressing block 32 and the accommodating groove 21 jointly clamp the laser diode Ld to be tested. In addition to positioning the laser diode Ld, it can also ensure the complete electrical contact between the laser diode Ld and the probe 323. Also, the applied force increases the thermally conductive interface between the laser diode and the submount.

2. The pressing element 33 provides an appropriate pressure and buffer force, so that the pressing block 32 will not excessively press the laser diode Ld, which will cause the laser diode Ld to break and be damaged.

3. The transmission cavity 22 completely exposes the light-emitting surface Ld1 on the laser diode Ld, so that the laser emitted by the laser diode Ld can be emitted from the jig assembly T without hindrance for measurement.

4. It can directly contact the laser diode Ld to be tested through the temperature control unit 5 or through other fluids, and heat up or cool down the temperature of the laser diode Ld, so it can provide a high temperature or low temperature test environment.

5. The operation is quite easy, as long as the slot 42 on the upper cover 3 is aligned with the locking lever 41 on the base 2, and the upper cover 3 and the base 2 are directly pressed together, the locking can be completed; when the test is completed, just press the button 34 on the upper cover 3, and the upper cover 3 can be separated from the base 2.

6. The laser diode stored in the jig assembly will be well protected, which can reduce the chance of precision crystal grains contacting external devices, thereby avoiding damage by external forces.

7. The fixture components can flow and be processed between different processes or equipment. For example, when performing different inspection items, the laser diode does not need to be removed from the fixture, and the fixture components can be reused.

The above-mentioned embodiments are only examples for convenience of description, and the scope of rights claimed by the present invention should be based on the scope of the patent application, rather than limited to the above-mentioned embodiments.

2‧‧‧base

22‧‧‧Transmission cavity

3‧‧‧Top cover

34‧‧‧button

Claims (10)

A fixture assembly for testing edge-emitting laser diodes, comprising: a base, which includes at least one accommodating groove, and at least one transmission cavity, the at least one transmission cavity and the at least one accommodating groove are perpendicular to and communicate with each other; an upper cover, which includes a body, at least one pressing block, and at least one pressing element, the body of the upper cover includes at least one through groove, the at least one pressing block is slid in the at least one through groove and can slide relative to the body, the at least one pressing The element group is arranged in the at least one through groove, and the at least one pressing block is provided with an electrical contact interface; a locking mechanism is arranged on at least one of the base and the upper cover, and selectively engages or disengages the base and the upper cover; The jig assembly for testing edge-emitting laser diodes according to claim 1, wherein the locking mechanism includes at least one locking lever, at least one slot, and at least one locking member. The at least one locking lever protrudes upward from the upper surface of the base. The jig assembly for testing edge-emitting laser diodes according to claim 2, wherein the at least one locking member includes a spring and a clamping block, A slot is provided in the slot, the locking block and the spring are accommodated in the slot, the spring applies a bias to the locking block, and the locking lever includes a groove; when the locking mechanism engages the base and the upper cover, the spring drives the locking block to be locked between the slot and the groove. According to claim 1, the jig assembly for testing edge-emitting laser diodes, wherein the at least one through groove is provided with a locking part, the at least one pressing block includes a stop block, the at least one pressing element is a compression spring, and the at least one pressing element is interposed between the locking part and the stopping block. The jig assembly for testing edge-emitting laser diodes as claimed in item 1, wherein the base further includes a temperature control unit, which is arranged in the at least one accommodating groove, and is used to heat up or cool down the edge-emitting laser diodes. According to claim 5, the fixture assembly for testing edge-emitting laser diodes, wherein the temperature control unit includes a heating platform, which is arranged at the bottom of the at least one containing groove and contacts the bottom surface of the edge-emitting laser diodes. According to claim 6, the fixture assembly for testing edge-emitting laser diodes, wherein the electrical contact interface includes a plurality of probes arranged on the lower end surface of the at least one pressing block. A fixture assembly for testing an edge-emitting laser diode, the edge-emitting laser diode includes a light-emitting surface and a contact surface, the light-emitting surface includes a light-emitting area, including: a base, which includes at least one accommodating groove, and at least one transmission cavity, the at least one transmission cavity and the at least one accommodating groove are orthogonal and connected to each other The at least one accommodating groove is used for accommodating the edge-firing laser diode; an upper cover, which includes a body, at least one pressing block, and at least one pressing element. At least one of the covers selectively engages or disengages the base and the upper cover; wherein, when the locking mechanism engages the base and the upper cover, the at least one pressure-applying element exerts force on the contact surface of the edge-emitting laser diode through the at least one pressing block, the contact surface of the edge-emitting laser diode contacts the at least one electrical contact interface, and the transmission cavity of the base exposes at least part of the light-emitting area of the edge-emitting laser diode. The jig assembly for testing edge-emitting laser diodes as claimed in claim 8, wherein the base further includes a temperature control unit, which is disposed in the at least one accommodating groove, and is used to heat up or cool down the edge-emitting laser diodes. A testing device, comprising: a power module; a fixture assembly for testing edge-firing laser diodes as described in any one of Claims 1 to 9, which is used to accommodate the at least one edge-firing laser diode; A source measurement module; and a main controller, the power supply module and the source measurement module are electrically connected to the main controller; wherein, the source measurement module activates the at least side-firing laser diode, and the main controller controls the side-firing laser diode to perform an optical test and an electrical test.

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