TWI808164B - A fixture assembly for testing surface emitting laser diodes and testing apparatus having the same - Google Patents

Abstract

A fixture assembly for testing a surface emitting laser diode and a testing apparatus having the same are provided. The fixture assembly comprises a base, an upper cover and a latch mechanism. The base includes at least one pocket, and at least one electrical contact interface disposed in the pocket. The upper cover includes a body, an abutting block and a pressing member disposed in the body. The abutting block is engageable with the body for slidable movement with respect to the body. The latch mechanism is disposed on the base and the upper cover, and is configured to selectively connect or disconnect the base to or from the upper cover. When the latch mechanism is operated to connect the base to the upper cover, the pocket and an opening of the abutting block form into a through cavity through which the laser diode emits the laser beam.

Description

Fixture assembly for testing surface-emitting laser diodes and testing equipment equipped with the assembly

The present invention relates to a fixture assembly for testing surface-emitting laser diodes and testing equipment with the assembly, especially a fixture assembly suitable for fixing and testing surface-emitting laser diodes, and testing equipment for performing optical tests and electrical tests on the diodes.

Common surface-emitting laser diodes, such as Vertical-Cavity Surface-Emitting Laser (VCSEL for short), are constantly expanding in application and demand. At present, VCSEL surface-emitting laser market applications have covered distance sensing, auto focus, 3D sensing, iris recognition, and air and water quality detection. Among them, 3D sensing includes gesture recognition (Gesture Recognition), and face recognition (Face Recognition), etc.

Furthermore, whether it is a portable consumer electronic product or an industrial application product, the trend of reducing the volume of electronic equipment is developing, and this directly limits the size of electronic components such as semiconductor chips and laser diodes. However, as the size of components shrinks, the number of contacts available for temporary contact during testing also becomes smaller. Wherein, the contact occupies the surface portion of the component under test The divided area results in only a small portion of the surface area remaining available as a thermal contact surface. In addition, fine pitch (Fine pitch) spring probes cannot provide enough force to achieve good thermal contact.

Looking at the technical level of the existing technology, such as the Chinese Utility Model Patent Announcement No. CN201974446U and the Chinese Invention Patent Publication No. CN106996990A, both cannot completely solve the aforementioned problems, and there is still room for improvement. To further illustrate, take the utility model patent No. CN201974446U "Test fixture for power of laser diode chip" as an example, which only discloses that a carrier slot and a chip slot are provided on the fixture body, and then a photodetector is used to directly test the components under test in the carrier slot and the wafer slot one by one. Therefore, there is no means for clamping the DUT, the precise positioning of the DUT cannot be performed, and the complete electrical contact between the DUT and the spring probe cannot be ensured.

In addition, take the Chinese patent publication No. CN106996990A "Test fixture for simultaneously testing multiple multi-pin laser devices" as an example. Although it discloses a means of clamping the device to be tested, the mechanism is too complicated and must be clamped by manually turning the handle, not to mention that it does not disclose the function of providing a burn-in test. .

The main purpose of the present invention is to provide a fixture assembly for testing a surface-emitting laser diode and a testing device with the assembly, so that the laser diode can be firmly clamped and precisely positioned, and can be The light beam emitted by each laser diode is received, and it can be ensured that all the contacts of the laser diode can completely and electrically contact the spring probe.

Another object of the present invention is to provide a fixture assembly for testing a surface-emitting laser diode, so that it can be coupled with a suitable connector connected to a test source, and the fixture itself can be circulated and processed between different devices, so that the fixture can provide repeated processing instead of directly testing the component. In addition, because unpackaged laser diodes are quite fragile and easily damaged, placing them in the jig can reduce the chance of precision dies and contacts coming into contact with external devices. Accordingly, the laser diodes are well protected since they are kept in the jig during other processes or tests.

In order to achieve the above object, the present invention is a fixture assembly for testing a surface-emitting laser diode, which mainly includes a base, an upper cover, and a locking mechanism; wherein, the base includes at least one accommodating groove and at least one electrical contact interface, and the electrical contact interface is arranged in the accommodating groove; in addition, the upper cover includes a body, a pressing block, and a pressing element, the pressing block includes a through hole, and the pressing block is coupled to the body and can slide relative to the body, and the pressing element is assembled on the ontology. Moreover, the locking mechanism is provided on at least one of the base and the upper cover, and can selectively engage or disengage the base and the upper cover. Wherein, when the locking mechanism makes the base and the upper cover engage with each other, the accommodating groove and the through hole form a through cavity (Cavity).

According to this, when the locking mechanism fastens the base and the upper cover, it exerts force on the pressing block through the pressing element, so that the pressing block and the accommodating groove jointly clamp the laser diode to be tested, and at the same time position the laser diode. In addition, when performing detection, the surface-emitting laser diode emits The laser can be emitted through the cavity (Cavity) formed by the accommodating groove and the through hole.

To achieve the aforementioned purpose, the present invention provides a fixture assembly for testing a surface-emitting laser diode. The surface-emitting laser diode may include a light-emitting surface and a contact surface, and the light-emitting surface includes a light-emitting area. The jig assembly of the present invention mainly includes a base, an upper cover, and a locking mechanism; the base includes at least one accommodating groove for accommodating a surface-emitting laser diode, and an electrical contact interface is arranged in the accommodating groove, which is used for electrically contacting the contact surface of the surface-emitting laser diode; and the upper cover includes a body, a pressing block, and a pressing element, and the body includes a through groove, and the pressing block includes a through hole, and the pressing block is slid in the through groove of the body , the pressing element is arranged between the body and the pressing block; moreover, the locking mechanism is arranged on at least one of the base and the upper cover, and can selectively engage or disengage the base and the upper cover. Wherein, when the locking mechanism makes the base and the upper cover engage with each other, the accommodating groove and the through hole form a through cavity (cavity) to expose at least part of the light-emitting area.

In order to achieve the aforementioned purpose, the present invention provides a testing device, which mainly includes: a power supply module, the aforementioned fixture assembly, a source measurement module, and a main controller; wherein, the source measurement module activates the surface-emitting laser diode, and the main controller controls the surface-emitting laser diode to perform an optical test and an electrical test.

2‧‧‧base

21‧‧‧Accommodating tank

211‧‧‧Electrical contact interface

212‧‧‧Catching part

213‧‧‧Probe

3‧‧‧Top cover

31‧‧‧Ontology

311‧‧‧through slot

32‧‧‧press block

322‧‧‧stop block

321‧‧‧through hole

33‧‧‧Pressure components

34‧‧‧button

4‧‧‧Locking mechanism

41‧‧‧Locking lever

411‧‧‧groove

42‧‧‧Slots

421‧‧‧Reservoir

43‧‧‧Locking parts

431‧‧‧spring

432‧‧‧Clamp block

5‧‧‧Temperature control unit

51‧‧‧Heating table

C‧‧‧main controller

Ct‧‧‧through cavity

I _S ‧‧‧Integrating sphere

Ld‧‧‧surface emitting laser diode

Ld1‧‧‧luminous surface

Ld2‧‧‧contact surface

Ldz‧‧‧luminous area

M‧‧‧source measurement module

P‧‧‧Power module

_PD ‧‧‧light sensor

S‧‧‧tester

T‧‧‧Jig Components

Fig. 1 is a schematic perspective view of a surface-emitting laser diode.

Fig. 2 is a perspective view of a preferred embodiment of the jig assembly of the present invention.

Fig. 3 is a perspective view when the upper cover and the base of the jig assembly of the present invention are separated.

Fig. 4 is a partial sectional view when the upper cover and the base of the jig assembly of the present invention are separated.

Fig. 5 is a partial cross-sectional view of the upper cover and the base in the jig assembly of the present invention when they are engaged.

Fig. 6 is a system architecture diagram of a preferred embodiment of the detection device of the present invention.

Before the fixture assembly for testing surface-emitting laser diodes of the present invention and the testing equipment equipped with the assembly are described in detail in this embodiment, it should be noted that in the following description, similar elements will be represented by the same element symbols. Furthermore, the drawings of the present invention are for illustrative purposes only, and may not be drawn to scale, and not all details may be presented in the drawings.

Please refer to FIG. 1 first, which is a schematic perspective view of a surface-emitting laser diode Ld. Generally speaking, the surface-emitting laser diode Ld includes a light-emitting surface Ld1 and a contact surface Ld2, wherein the light-emitting surface Ld1 includes a light-emitting region Ldz, that is, the laser is emitted from the light-emitting region Ldz. In addition, a plurality of electrical contacts (not shown in the figure) are arranged on the contact surface Ld2, which serve as a medium for electrical conduction between the diode chip and the circuit board.

Please refer to Fig. 2 and Fig. 3 again. Fig. 2 is a perspective view of a preferred embodiment of the jig assembly of the present invention, and Fig. 3 is a perspective view of the separation of the upper cover and the base of the jig assembly of the present invention. As shown in the figure, this implementation The jig assembly provided in the example mainly includes a base 2, an upper cover 3, and a locking mechanism 4, and the base 2 is provided with a plurality of accommodating grooves 21, which are used to accommodate the surface-emitting laser diode Ld to be tested, that is, each accommodating groove 21 can accommodate the surface-emitting laser diode Ld.

Please refer to FIG. 4 again. FIG. 4 is a partial cross-sectional view when the upper cover and the base of the jig assembly of the present invention are separated. The bottom of each containing tank 21 is provided with a temperature control unit 5, which is used to heat up or cool down the surface-emitting laser diode Ld, and an electrical contact interface 211 is provided around the temperature control unit 5. Wherein, because the fixture assembly of this embodiment is used for a burn-in test (Burn-in test), the temperature control unit 5 adopts a heating table 51 with a temperature control surface.

In this embodiment, the temperature control surface is a very strong and durable high thermal conductivity interface, which directly contacts the surface-emitting laser diode Ld, and the heating table 51 is coupled to a temperature regulator (not shown in the figure) through a thermal path; but the present invention is not limited thereto, and other heating or cooling modules are applicable to the present invention. In addition, the electrical contact interface 211 of this embodiment adopts spring pins 213 (spring pins), which are arranged around the four circumferences of the heating table 51, and are used to electrically contact the electrical contacts on the contact surface Ld2 of the surface-emitting laser diode Ld (not shown in the figure).

Furthermore, the upper cover 3 in this embodiment includes a body 31 , a plurality of pressing blocks 32 , and a plurality of pressing elements 33 , and the body 31 includes a plurality of through grooves 311 , and each through groove 311 corresponds to an accommodating groove 21 on the base 2 . Wherein, each through groove 311 is slidingly provided with a pressing block 32, and each through groove 311 is provided with a locking portion 212, and each pressing block 32 includes a stop block 322, and the pressing element 33 of this embodiment is a pressing The compression spring is arranged in the through groove 311 and is interposed between the locking portion 212 and the stop block 322. In addition to providing the reset function when the compression block 32 slides, when the compression spring is compressed by the compression of the compression block 32, its stretching elastic force will be used as the pressure under the compression block 32.

Again as shown in the figure, each locking mechanism 4 comprises a locking bar 41, a slot 42 and a locking member 43, and the locking bar 41 protrudes upwards from the upper surface of the base 2, and the slot 42 is arranged on the upper cover 3, and runs through the upper cover 3, and the slot 42 of the upper cover 3 corresponds to the locking bar 41 of the base 2. In addition, the locking member 43 includes a spring 431 and a fastening block 432 , and a receiving slot 421 is disposed in the slot 42 , and the fastening block 432 and the spring 431 are accommodated in the receiving slot 421 . Wherein, the spring 431 applies a bias to the fastening block 432 , and the locking lever 41 includes a groove 411 . In other words, the spring 431 can drive the locking block 432 to slide between the receiving slot 421 and the groove 411 .

Please also refer to FIG. 5 . FIG. 5 is a partial cross-sectional view of the upper cover 3 and the base 2 in the jig assembly of the present invention when they are engaged. When the locking mechanism 4 makes the base 2 and the upper cover 3 engage with each other, the spring 431 drives the locking block 432 to be fixed between the receiving groove 421 and the groove 411. At this time, the locking mechanism 4 fastens the base 2 and the upper cover 3, and the receiving groove 21 and the through hole 321 form a through cavity Ct.

At this time, the pressing element 33 generates a spring force due to being compressed, and it exerts force on the light-emitting surface Ld1 of the surface-emitting laser diode Ld through the pressing block 32, that is, the pressing block 32 pushes the surface-emitting laser diode Ld downward, so that the contact surface Ld2 of the surface-emitting laser diode Ld completely contacts the spring probe 213 of the electrical contact interface 211 to form electrical conduction. However, at this time, the light-emitting region Ldz of the surface-emitting laser diode Ld can emit laser light through the through hole 321 of the pressing block 32 . It should be noted that for testing, the maximum light output is very important, so the opening angle of the through hole 321 must take into account the maximum divergence angles of the surface-emitting laser diode Ld.

On the other hand, please refer to FIG. 2 and FIG. 3 again, each locking mechanism 4 of this embodiment further includes a button 34 , which is arranged on the upper cover 3 , and each button 34 is connected to a fastening block 432 . Therefore, when the test is completed, just press the button 34 of the upper cover 3 to push the clamping block 432 to make it withdraw from the groove 411 of the locking rod 41 to release the lock between the upper cover 3 and the base 2, and then the upper cover 3 can be easily separated from the base 2.

Please refer to FIG. 6 again. FIG. 6 is a system architecture diagram of a preferred embodiment of the detection device of the present invention. The testing equipment of this embodiment mainly includes a power module P, a fixture assembly T for testing surface-emitting laser diodes as described in the previous embodiment, a source measurement module M, a tester S, and a main controller C. The power module P, tester S, and source measurement module M are electrically connected to the main controller C, and the tester S corresponds to the through hole 321 of the pressing block 32 .

Wherein, when the locking mechanism 4 makes the base 2 and the upper cover 3 engage with each other, that is, after the electrical contacts on the contact surface Ld2 of the surface-emitting laser diode Ld electrically contact the spring probe 213, the source measurement module M can supply power and start the surface-emitting laser diode Ld. At this time, the source measurement module M also measures electrical parameters such as voltage, and then conducts an electrical test; The laser is emitted from the upper cover 3 through the cavity Ct. However, the main controller C controls a tester S to measure the laser emitted from the penetrating cavity Ct, and then detects the luminous characteristics of the surface-emitting laser diode Ld, wherein the tester S is used to monitor or detect the luminous flux and the light wavelength through an integrating sphere _IS and a photosensor _PD . In summary, the present invention at least has the following features and advantages:

1. Apply force to the pressing block 32 through the pressing element 33, so that the pressing block 32 and the accommodating groove 21 jointly clamp the laser diode to be tested. In addition to positioning the laser diode, it can also ensure complete electrical contact between the laser diode and the spring probe 213.

2. The pressing element 33 provides appropriate pressure and buffer force, so that the pressing block 32 will not overly press the laser diode, which will cause the laser diode to break and be damaged.

3. The light-emitting region Ldz on the laser diode is completely exposed through the cavity Ct, so that the laser emitted by the laser diode can be emitted from the through cavity Ct without hindrance for measurement.

4. It can directly contact the laser diode to be tested through the temperature control unit 5 or through other fluids, and heat up or cool down the laser diode, so it can provide a high or low temperature test environment.

5. The operation is quite easy, as long as the slot 42 on the upper cover 3 is aligned with the locking lever 41 on the base 2, and the upper cover 3 and the base 2 are directly pressed together, the locking can be completed; when the test is completed, just press the button 34 on the upper cover 3, and the upper cover 3 can be separated from the base 2.

6. The laser diode stored in the jig assembly will be well protected, which can reduce the chance of precision crystal grains contacting external devices, thereby avoiding damage by external forces.

7. The fixture components can flow and be processed between different processes or equipment. For example, when performing different inspection items, the laser diode does not need to be removed from the fixture, and the fixture components can be reused.

The above-mentioned embodiments are only examples for convenience of description, and the scope of rights claimed by the present invention should be based on the scope of the patent application, rather than limited to the above-mentioned embodiments.

2‧‧‧base

3‧‧‧Top cover

31‧‧‧Ontology

311‧‧‧through slot

34‧‧‧button

Claims (9)

A fixture assembly for testing a surface-emitting laser diode, comprising: a base, which includes at least one accommodating slot, and at least one electrical contact interface, and the at least one electrical contact interface is arranged in the at least one accommodating slot; A locking portion, the at least one pressing block includes a blocking block, the at least one compression spring is interposed between the locking portion and the blocking block; a locking mechanism, which is arranged on at least one of the base and the upper cover, and selectively engages or disengages the base and the upper cover; The jig assembly for testing a surface-emitting laser diode as claimed in claim 1, wherein the locking mechanism includes at least one locking lever, at least one slot, and at least one locking member, the at least one locking lever protrudes upward from the upper surface of the base, the at least one slot is arranged on the upper cover, and the at least one locking member is assembled in the at least one slot; When the locking mechanism engages the base and the upper cover, the at least one locking member fastens the at least one locking lever. A jig assembly for testing a surface-emitting laser diode according to claim 2, wherein the at least one locking member includes a spring and a clamping block, A slot is provided in the at least one slot, the locking block and the spring are contained in the slot, and the spring applies a bias to the locking block, and the at least one locking lever includes a groove; when the locking mechanism engages the base and the upper cover, the spring drives the locking block to be locked between the slot and the groove. The jig assembly for testing a surface-emitting laser diode as claimed in claim 1, wherein the base further includes a temperature control unit, which is arranged in the at least one accommodating groove, and is used to heat up or cool down the surface-emitting laser diode. The jig assembly for testing surface-emitting laser diodes as claimed in claim 4, wherein the temperature control unit includes a heating platform, which is arranged at the bottom of the at least one containing tank and contacts the bottom surface of the surface-emitting laser diodes. According to claim 5, the jig assembly for testing surface-emitting laser diodes, wherein the at least one electrical contact interface includes a plurality of probes, which are arranged around the circumference of the heating table. A fixture assembly for testing a surface-emitting laser diode. The surface-emitting laser diode includes a light-emitting surface and a contact surface. The light-emitting surface includes a light-emitting area, including: a base, which includes at least one accommodating groove for accommodating the surface-emitting laser diode. An electrical contact interface is arranged in the at least one accommodating groove, which is used for electrically contacting the contact surface of the surface-emitting laser diode; , and at least one compression spring, the body includes at least one through groove, the at least one pressure The blocking block includes a through hole, the at least one pressing block is slidably arranged in the through groove of the body, a locking portion is provided in the through groove, the at least one pressing block includes a blocking block, the at least one compression spring is interposed between the locking portion and the blocking block; The at least one compression spring exerts force on the light-emitting surface of the surface-emitting laser diode through the at least one pressing block, the contact surface of the surface-emitting laser diode contacts the electrical contact interface, and the through hole of the at least one pressing block exposes at least part of the light-emitting area. The jig assembly for testing surface-emitting laser diodes as claimed in claim 7, wherein the base further includes a temperature control unit, which is disposed in the at least one accommodating groove, and is used to heat up or cool down the surface-emitting laser diodes. A testing device, comprising: a power supply module; a fixture assembly for testing surface-emitting laser diodes as described in any one of claims 1 to 8, which is used to accommodate the at least one surface-emitting laser diode; a source measurement module; and a main controller, the power supply module and the source measurement module are electrically connected to the main controller; wherein, the source measurement module activates the surface-emitting laser diode The main controller controls the surface-emitting laser diode to perform an optical test and an electrical test.

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