TWI800969B - 切斷裝置 - Google Patents

切斷裝置 Download PDF

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Publication number
TWI800969B
TWI800969B TW110140537A TW110140537A TWI800969B TW I800969 B TWI800969 B TW I800969B TW 110140537 A TW110140537 A TW 110140537A TW 110140537 A TW110140537 A TW 110140537A TW I800969 B TWI800969 B TW I800969B
Authority
TW
Taiwan
Prior art keywords
cutting device
cutting
Prior art date
Application number
TW110140537A
Other languages
English (en)
Chinese (zh)
Other versions
TW202221776A (zh
Inventor
堀聡子
岩田康弘
黄善夏
北川雄大
片岡昌一
Original Assignee
日商Towa股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商Towa股份有限公司 filed Critical 日商Towa股份有限公司
Publication of TW202221776A publication Critical patent/TW202221776A/zh
Application granted granted Critical
Publication of TWI800969B publication Critical patent/TWI800969B/zh

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/06Grinders for cutting-off
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • B24B41/061Work supports, e.g. adjustable steadies axially supporting turning workpieces, e.g. magnetically, pneumatically
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/22Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
    • B28D1/24Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising with cutting discs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00Accessories specially adapted for use with machines or devices of the preceding groups
    • B28D7/04Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67092Apparatus for mechanical treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mining & Mineral Resources (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Dicing (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Nonmetal Cutting Devices (AREA)
  • Details Of Cutting Devices (AREA)
  • Scissors And Nippers (AREA)
TW110140537A 2020-11-24 2021-11-01 切斷裝置 TWI800969B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020194384A JP2022083115A (ja) 2020-11-24 2020-11-24 切断装置及び切断品の製造方法
JP2020-194384 2020-11-24

Publications (2)

Publication Number Publication Date
TW202221776A TW202221776A (zh) 2022-06-01
TWI800969B true TWI800969B (zh) 2023-05-01

Family

ID=81754313

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110140537A TWI800969B (zh) 2020-11-24 2021-11-01 切斷裝置

Country Status (5)

Country Link
JP (1) JP2022083115A (ja)
KR (1) KR20230088771A (ja)
CN (1) CN116669901A (ja)
TW (1) TWI800969B (ja)
WO (1) WO2022113573A1 (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017147304A (ja) * 2016-02-16 2017-08-24 株式会社ディスコ 切削方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011040542A (ja) * 2009-08-10 2011-02-24 Disco Abrasive Syst Ltd パッケージ基板の分割方法
JP5709593B2 (ja) * 2011-03-09 2015-04-30 株式会社ディスコ 加工装置
JP6037372B2 (ja) * 2011-08-03 2016-12-07 株式会社ディスコ パッケージ基板分割装置
JP2015191993A (ja) 2014-03-28 2015-11-02 株式会社東京精密 半導体製造装置及び半導体の製造方法
JP6640142B2 (ja) * 2017-03-31 2020-02-05 Towa株式会社 切断装置、半導体パッケージの貼付方法及び電子部品の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017147304A (ja) * 2016-02-16 2017-08-24 株式会社ディスコ 切削方法

Also Published As

Publication number Publication date
KR20230088771A (ko) 2023-06-20
JP2022083115A (ja) 2022-06-03
WO2022113573A1 (ja) 2022-06-02
TW202221776A (zh) 2022-06-01
CN116669901A (zh) 2023-08-29

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