TWI800950B - 多層燒結陶瓷體及製造方法 - Google Patents
多層燒結陶瓷體及製造方法 Download PDFInfo
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- TWI800950B TWI800950B TW110138305A TW110138305A TWI800950B TW I800950 B TWI800950 B TW I800950B TW 110138305 A TW110138305 A TW 110138305A TW 110138305 A TW110138305 A TW 110138305A TW I800950 B TWI800950 B TW I800950B
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- sintered ceramic
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- 239000000919 ceramic Substances 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
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- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/9669—Resistance against chemicals, e.g. against molten glass or molten salts
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
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- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
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CN (1) | CN116209648A (zh) |
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US10443126B1 (en) * | 2018-04-06 | 2019-10-15 | Applied Materials, Inc. | Zone-controlled rare-earth oxide ALD and CVD coatings |
US20240059616A1 (en) * | 2020-12-18 | 2024-02-22 | Heraeus Conamic North America Llc | Plasma resistant yttrium aluminum oxide chamber components |
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JP2003277051A (ja) * | 2002-03-22 | 2003-10-02 | Ngk Insulators Ltd | イットリア−アルミナ複合酸化物膜を有する積層体、イットリア−アルミナ複合酸化物膜、耐蝕性部材、耐蝕性膜およびイットリア−アルミナ複合酸化物膜の製造方法 |
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- 2021-10-13 EP EP21807354.2A patent/EP4228894A1/en active Pending
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CN116209648A (zh) | 2023-06-02 |
EP4228894A1 (en) | 2023-08-23 |
TW202222569A (zh) | 2022-06-16 |
JP2023545258A (ja) | 2023-10-27 |
WO2022081700A1 (en) | 2022-04-21 |
KR20230088721A (ko) | 2023-06-20 |
US20240158301A1 (en) | 2024-05-16 |
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