TWI793818B - Chip testing board and testing method and system thereof - Google Patents

Chip testing board and testing method and system thereof Download PDF

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TWI793818B
TWI793818B TW110139139A TW110139139A TWI793818B TW I793818 B TWI793818 B TW I793818B TW 110139139 A TW110139139 A TW 110139139A TW 110139139 A TW110139139 A TW 110139139A TW I793818 B TWI793818 B TW I793818B
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chip
test
signal
main signal
holes
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TW202318018A (en
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蔡水河
賴政忠
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大陸商常州欣盛半導體技術股份有限公司
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A chip testing board is disclosed. The chip testing board configured to test a chip by using a main signal and a second signal, comprises: a body having a plurality of through holes connected with two sides of the body; a chip test area arranged on a side of the body; and a main signal connector arranged on the same side of the body for connecting the chip test area without passing through the through holes; wherein the chip test area is used to connect the chip and test at least one main signal of the chip through the main signal connector

Description

晶片測試板與其測試方法和系統Wafer test board and its test method and system

本揭露涉及一種晶片測試板與其測試方法和系統。The present disclosure relates to a wafer test board and its testing method and system.

現有的 LCD 手機顯示驅動晶片、或是穿戴手錶的顯示屏、大尺寸電視顯示驅動晶片,這些設計廠與測試廠在單體晶片(顯示器驅動晶片)測試時,為了測試單體晶片的電性或是解析,都會透過拉線的方式,從晶片上的輸出端或是輸入端拉到晶片測試板的測試點上,並透過測試板周邊過孔(Via)走線,連接到使用者測試環境上,所以在訊號傳輸時,這樣的過孔設計對訊號都會有電容性與電感性的產生,影響了高速訊號的完整性。再者,現有的驅動 IC 晶片的 COB(chip on board) 設計都是為了方便共用性與設計簡單與方便使用,但隨著時代的演變,驅動 IC的晶片訊號速度越來越快,傳統 COB 測試應用已經無法滿足測試訊號完整性的條件。Existing LCD mobile phone display driver chips, or display screens for wearable watches, and large-size TV display driver chips, these design factories and test factories test the single chip (display driver chip) in order to test the electrical properties of the single chip or For analysis, it will be pulled from the output terminal or input terminal on the chip to the test point of the chip test board through the way of pulling wires, and connected to the user's test environment through the vias (Via) around the test board. , so when the signal is transmitted, such a via design will have capacitive and inductive effects on the signal, which will affect the integrity of the high-speed signal. Furthermore, the COB (chip on board) design of the existing driver IC chip is all for the convenience of commonality and simple design and convenient use. However, with the evolution of the times, the chip signal speed of the driver IC is getting faster and faster. The traditional COB test The application can no longer meet the conditions for testing signal integrity.

因此,本揭露提出一種晶片測試板與其測試方法和系統,以解決晶片的高速訊號的測試時,因使用過孔(via)測試,而產生電容性與電感性的干擾,影響了高速訊號的完整性的問題。Therefore, this disclosure proposes a chip test board and its testing method and system to solve the problem of capacitive and inductive interference due to the use of via testing when testing high-speed signals on chips, which affects the integrity of high-speed signals. sex issue.

本揭露之一實施例提供一種晶片測試板,用於依主要訊號及次要訊號測試晶片,包含:本體,具有複數個貫通孔連通該本體之二側;晶片測試區,設置於本體之一側;以及主要訊號連接器,設置於本體之同一側,用於不經過該些貫通孔而連接該晶片測試區;其中,晶片測試區用於連接晶片,並通過主要訊號連接器對晶片進行至少一主要訊號的測試。An embodiment of the present disclosure provides a chip test board for testing a chip according to a main signal and a secondary signal, comprising: a body with a plurality of through holes connecting two sides of the body; a chip test area set on one side of the body ; and the main signal connector, which is arranged on the same side of the body, is used to connect the chip test area without going through the through holes; wherein, the chip test area is used to connect the chip, and perform at least one operation on the chip through the main signal connector. Main signal test.

本揭露之一實施例提供一種晶片測試系統,包含:晶片測試板;晶片,設置於晶片測試區;主要訊號測試平台,用以提供主要訊號;以及次要訊號測試平台,用以提供次要訊號,其中,晶片測試板用於依主要訊號及次要訊號測試晶片,包含:本體,具有複數個貫通孔連通本體之二側;晶片測試區,設置於本體之一側;以及主要訊號連接器,設置於本體之同一側,用於不經過貫通孔而連接晶片測試區;其中,晶片測試區用於連接晶片,並通過主要訊號連接器對晶片進行至少一主要訊號的測試。An embodiment of the present disclosure provides a chip test system, including: a chip test board; a chip set in a chip test area; a main signal test platform for providing a main signal; and a secondary signal test platform for providing a secondary signal , wherein the chip test board is used to test the chip according to the main signal and the secondary signal, including: a body with a plurality of through holes connecting the two sides of the body; a chip test area set on one side of the body; and a main signal connector, It is arranged on the same side of the main body, and is used for connecting the chip test area without passing through holes; wherein, the chip test area is used for connecting the chip, and testing the chip for at least one main signal through the main signal connector.

本揭露之一實施例提供一種晶片測試方法,包含下列步驟:提供晶片測試板;設置該晶片於該晶片測試區;以及通過該主要訊號連接器對該晶片進行至少一主要訊號測試,其中,晶片測試板用於依主要訊號及次要訊號測試晶片,包含:本體,具有複數個貫通孔連通本體之二側;晶片測試區,設置於本體之一側;以及主要訊號連接器,設置於本體之同一側,用於不經過貫通孔而連接晶片測試區;其中,晶片測試區用於連接晶片,並通過主要訊號連接器對晶片進行至少一主要訊號的測試。An embodiment of the present disclosure provides a chip testing method, comprising the following steps: providing a chip test board; setting the chip in the chip test area; and performing at least one main signal test on the chip through the main signal connector, wherein the chip The test board is used to test the chip according to the main signal and the secondary signal, including: the main body, which has a plurality of through holes connecting the two sides of the main body; the chip test area, which is set on one side of the main body; and the main signal connector, which is set on the main body The same side is used for connecting the chip testing area without passing through holes; wherein, the chip testing area is used for connecting the chip, and testing the chip for at least one main signal through the main signal connector.

為更進一步瞭解本揭露的特徵及技術內容,請參閱以下有關本揭露的詳細說明與圖式,然而所提供的圖式僅用於提供參考與說明,並非用來對本揭露加以限制。In order to further understand the features and technical content of the disclosure, please refer to the following detailed description and drawings related to the disclosure. However, the provided drawings are only for reference and illustration, and are not intended to limit the disclosure.

圖1顯示根據本揭露一實施例的晶片測試板。如圖1所示,本揭露的晶片測試板1,用於依主要訊號及次要訊號測試晶片13,晶片測試板1,包含:本體10,具有複數個貫通孔101連通本體10之二側;晶片測試區11,設置於本體10之一側;以及主要訊號連接器12,設置於本體10之同一側,用於不經過該些貫通孔101而連接該晶片測試區11;其中,晶片測試區11用於連接晶片13,並通過主要訊號連接器12對晶片13進行至少一主要訊號的測試。特別是,晶片測試區11通過主要訊號連接器12接收主要訊號並傳輸至晶片13,晶片13響應主要訊號產生回饋訊號並通過主要訊號連接器12輸出以對晶片13進行主要訊號測試。此外,晶片測試區11通過複數貫通孔101接收次要訊號並傳輸至晶片13,晶片13響應次要訊號產生回應訊號並通過貫通孔101輸出以對晶片13進行次要訊號測試。FIG. 1 shows a wafer test board according to an embodiment of the present disclosure. As shown in FIG. 1 , the chip test board 1 of the present disclosure is used to test the chip 13 according to the main signal and the secondary signal. The chip test board 1 includes: a body 10 with a plurality of through holes 101 connected to two sides of the body 10; The chip test area 11 is arranged on one side of the body 10; and the main signal connector 12 is arranged on the same side of the body 10, and is used to connect the chip test area 11 without passing through the through holes 101; wherein, the chip test area 11 is used to connect the chip 13, and perform at least one main signal test on the chip 13 through the main signal connector 12. In particular, the chip test area 11 receives the main signal through the main signal connector 12 and transmits it to the chip 13 , and the chip 13 generates a feedback signal in response to the main signal and outputs it through the main signal connector 12 to perform the main signal test on the chip 13 . In addition, the wafer test area 11 receives the secondary signal through the plurality of through holes 101 and transmits it to the chip 13 . The chip 13 generates a response signal in response to the secondary signal and outputs it through the through hole 101 to perform the secondary signal test on the chip 13 .

本揭露的晶片測試區11包含:複數測試點111,設置於晶片測試板1的第一表面1a,且複數測試點環繞晶片13測試區11周邊進行分佈與配置;複數測試針112,設置於晶片測試板1的第二表面1b,該些複數測試針112分別對應連接該些測試點111;其中,該些貫通孔101分別連接於該些測試針112及該些測試點111之間。此外,晶片測試區11通過複數測試針112、複數貫通孔101及複數測試點111接收次要訊號並傳輸至晶片13;晶片13響應次要訊號產生回應訊號並通過複數測試針112、複數貫通孔101及複數測試點111輸出以對晶片13進行次要訊號測試。特別是,主要訊號的傳輸速率大於百兆位元每秒(100Mbps),例如,網路傳輸訊號,資料傳輸訊號或其他具有高速或高頻的訊號。次要訊號的傳輸速率低於百兆位元每秒(100Mbps),例如,電源訊號等其他低速或低頻訊號。The wafer test area 11 of the present disclosure includes: a plurality of test points 111 arranged on the first surface 1a of the wafer test board 1, and the plurality of test points are distributed and arranged around the periphery of the wafer 13 test area 11; a plurality of test needles 112 are arranged on the wafer On the second surface 1 b of the test board 1 , the plurality of test pins 112 are respectively connected to the test points 111 ; wherein, the through holes 101 are respectively connected between the test pins 112 and the test points 111 . In addition, the wafer test area 11 receives secondary signals through the plurality of test needles 112, the plurality of through holes 101 and the plurality of test points 111 and transmits them to the chip 13; 101 and a plurality of test points 111 are output to perform a secondary signal test on the chip 13 . In particular, the transmission rate of the main signal is greater than 100 Mbps (100 Mbps), for example, network transmission signal, data transmission signal or other signals with high speed or high frequency. Secondary signals with transmission rates below 100 Mbps, for example, other low-speed or low-frequency signals such as power signals.

圖2顯示根據本揭露一實施例之晶片測試系統。請同時參照圖1,本揭露之晶片測試系統2包含:晶片13設置於晶片測試區11;主要訊號測試平台14,用以提供主要訊號;以及次要訊號測試平台15,用以提供次要訊號。晶片測試系統2還包含:晶片測試板1,晶片測試板1包含:本體10,具有複數個貫通孔101連通本體10之二側;晶片測試區11,設置於本體10之一側;以及主要訊號連接器12,設置於本體10之同一側,用於不經過該些貫通孔101而連接晶片測試區11;其中,晶片測試區11用於連接晶片13,並通過主要訊號連接器12對晶片13進行至少一主要訊號的測試。特別是,晶片測試區11通過主要訊號連接器12接收主要訊號並傳輸至晶片13,晶片13響應主要訊號產生回饋訊號並通過主要訊號連接器12輸出以對晶片13進行主要訊號測試。此外,晶片測試區11通過複數貫通孔101接收次要訊號並傳輸至晶片13,晶片13響應次要訊號產生回應訊號並通過貫通孔101輸出以對晶片13進行次要訊號測試。FIG. 2 shows a wafer testing system according to an embodiment of the present disclosure. Please refer to FIG. 1 at the same time, the chip test system 2 of the present disclosure includes: a chip 13 is arranged in the chip test area 11; a main signal test platform 14 is used to provide the main signal; and a secondary signal test platform 15 is used to provide the secondary signal . The chip test system 2 also includes: a chip test board 1, and the chip test board 1 includes: a body 10 with a plurality of through holes 101 connected to two sides of the body 10; a chip test area 11 arranged on one side of the body 10; and main signal The connector 12 is arranged on the same side of the body 10, and is used to connect the chip test area 11 without passing through the through holes 101; wherein, the chip test area 11 is used to connect the chip 13, and the chip 13 is connected to the chip 13 through the main signal connector 12. Perform at least one major signal test. In particular, the chip test area 11 receives the main signal through the main signal connector 12 and transmits it to the chip 13 , and the chip 13 generates a feedback signal in response to the main signal and outputs it through the main signal connector 12 to perform the main signal test on the chip 13 . In addition, the wafer test area 11 receives the secondary signal through the plurality of through holes 101 and transmits it to the chip 13 . The chip 13 generates a response signal in response to the secondary signal and outputs it through the through hole 101 to perform the secondary signal test on the chip 13 .

本揭露的晶片測試區11包含:複數測試點111,設置於晶片測試板1的第一表面1a,且複數測試點環繞晶片13測試區11周邊進行分佈與配置;複數測試針112,設置於晶片測試板1的第二表面1b,該些複數測試針112分別對應連接該些測試點111;其中,該些貫通孔101分別連接於該些測試針112及該些測試點111之間。此外,晶片測試區11通過複數測試針112、複數貫通孔101及複數測試點111接收次要訊號並傳輸至晶片13;晶片13響應次要訊號產生回應訊號並通過複數測試針112、複數貫通孔101及複數測試點111輸出以對晶片13進行次要訊號測試。特別是,主要訊號的傳輸速率大於百兆位元每秒(100Mbps),例如,網路傳輸訊號,資料傳輸訊號或其他具有高速或高頻的訊號。次要訊號的傳輸速率低於百兆位元每秒(100Mbps),例如,電源訊號等其他低速或低頻訊號。The wafer test area 11 of the present disclosure includes: a plurality of test points 111 arranged on the first surface 1a of the wafer test board 1, and the plurality of test points are distributed and arranged around the periphery of the wafer 13 test area 11; a plurality of test needles 112 are arranged on the wafer On the second surface 1 b of the test board 1 , the plurality of test pins 112 are respectively connected to the test points 111 ; wherein, the through holes 101 are respectively connected between the test pins 112 and the test points 111 . In addition, the wafer test area 11 receives secondary signals through the plurality of test needles 112, the plurality of through holes 101 and the plurality of test points 111 and transmits them to the chip 13; 101 and a plurality of test points 111 are output to perform a secondary signal test on the chip 13 . In particular, the transmission rate of the main signal is greater than 100 Mbps (100 Mbps), for example, network transmission signal, data transmission signal or other signals with high speed or high frequency. Secondary signals with transmission rates below 100 Mbps, for example, other low-speed or low-frequency signals such as power signals.

圖3顯示根據本揭露之一實施例之次要訊號測試方塊圖。如圖3所示,當晶片13與複數點測試點111相連接且進行次要訊號測試時,次要訊號測試平台15可由測試針傳輸至晶片13,而晶片13接收次要訊號時,會產生回應訊號並通過測試針112傳輸至次要測試平台15,以對晶片13進行次要訊號測試。 圖4示根據本揭露之另一實施例之次要訊號測試方塊圖。如圖4所示,當晶片不與複數點測試點相連接且進行次要訊號測試時,可通過貫通孔101或其他貫通孔113連接傳輸線L至次要測試平台15,次要訊號測試平台15可由通過貫通孔101或其他貫通孔113的連接線L傳輸至晶片13,而晶片13接收次要訊號時,會產生回應訊號並通過貫通孔101或其他貫通孔113的連接線L傳輸至次要測試平台15,以對晶片13進行次要訊號測試。FIG. 3 shows a block diagram of a secondary signal test according to an embodiment of the disclosure. As shown in Figure 3, when the chip 13 is connected with the multi-point test point 111 and the secondary signal test is carried out, the secondary signal test platform 15 can be transmitted to the chip 13 by the test pin, and when the chip 13 receives the secondary signal, it will generate The response signal is transmitted to the secondary test platform 15 through the test pin 112 to perform a secondary signal test on the chip 13 . FIG. 4 shows a block diagram of a secondary signal test according to another embodiment of the disclosure. As shown in Figure 4, when the chip is not connected to multiple test points and the secondary signal test is performed, the transmission line L can be connected to the secondary test platform 15 through the through hole 101 or other through holes 113, and the secondary signal test platform 15 It can be transmitted to the chip 13 by the connection line L passing through the through hole 101 or other through holes 113, and when the chip 13 receives the secondary signal, it will generate a response signal and transmit it to the secondary signal through the connection line L of the through hole 101 or other through holes 113. The test platform 15 is used to test the secondary signal of the chip 13 .

圖5顯示根據本揭露之一實施例之整合訊號測試平台圖。如圖5所示,主要訊號由整合訊號測試平台141產生,並通過整合訊號測試平台141傳輸至該晶片13,當晶片13接收主要訊號時,會產生回饋訊號並通過主要訊號連接器12傳輸至整合訊號測試平台141,以對晶片13進行主要訊號測試。次要訊號亦由整合訊號測試平台141產生,並通過貫通孔113或複數測試針112傳輸至晶片13,當晶片13接收次要訊號時,會產生回應訊號並通過貫通孔101或其他貫通孔113或複數測試針112傳輸至整合訊號測試平台141,以對晶片13進行次要訊號測試。特別是,主要訊號的傳輸速率大於百兆位元每秒(100Mbps),例如,網路傳輸訊號,資料傳輸訊號或其他具有高速或高頻的訊號。次要訊號的傳輸速率低於百兆位元每秒(100Mbps),例如,電源訊號等其他低速或低頻訊號。此外,請參照圖5與圖3,當晶片13與複數點測試點111相連接且進行次要訊號測試時,整合訊號測試平台141可由測試針傳輸至晶片13,而晶片13接收次要訊號時,會產生回應訊號並通過測試針112傳輸至整合訊號測試平台141,以對晶片13進行次要訊號測試。或者是,請同時參照圖5與圖4,當晶片13不與複數點測試點111相連接且進行次要訊號測試時,可通過貫通孔101或其他貫通孔113連接傳輸線L至次要整合訊號測試平台141,次要訊號測試平台15可由通過貫通孔101或其他貫通孔113的連接線L傳輸至晶片13,而晶片13接收次要訊號時,會產生回應訊號並通過貫通孔101或其他貫通孔113的連接線L傳輸至整合訊號測試平台141,以對晶片13進行次要訊號測試。FIG. 5 shows a diagram of an integrated signal test platform according to an embodiment of the present disclosure. As shown in Figure 5, the main signal is generated by the integrated signal test platform 141, and transmitted to the chip 13 through the integrated signal test platform 141, when the chip 13 receives the main signal, it will generate a feedback signal and transmit it to the chip 13 through the main signal connector 12. The integrated signal test platform 141 is used to perform main signal test on the chip 13 . The secondary signal is also generated by the integrated signal test platform 141 and transmitted to the chip 13 through the through hole 113 or a plurality of test pins 112. When the chip 13 receives the secondary signal, it will generate a response signal and pass through the through hole 101 or other through holes 113 Or the plurality of test pins 112 are transmitted to the integrated signal test platform 141 to perform secondary signal test on the chip 13 . In particular, the transmission rate of the main signal is greater than 100 megabits per second (100Mbps), such as network transmission signals, data transmission signals or other signals with high speed or high frequency. Secondary signals with transmission rates below 100 Mbps, for example, other low-speed or low-frequency signals such as power signals. In addition, please refer to FIG. 5 and FIG. 3 , when the chip 13 is connected to the multi-point test point 111 and the secondary signal test is performed, the integrated signal test platform 141 can be transmitted to the chip 13 by the test pin, and when the chip 13 receives the secondary signal , a response signal will be generated and transmitted to the integrated signal test platform 141 through the test pin 112 to perform a secondary signal test on the chip 13 . Or, please refer to FIG. 5 and FIG. 4 at the same time. When the chip 13 is not connected to the multi-point test point 111 and the secondary signal test is performed, the transmission line L can be connected to the secondary integrated signal through the through hole 101 or other through holes 113. The test platform 141 and the secondary signal test platform 15 can be transmitted to the chip 13 by the connection line L passing through the through hole 101 or other through holes 113, and when the chip 13 receives the secondary signal, it will generate a response signal and pass through the through hole 101 or other through holes. The connection line L of the hole 113 is transmitted to the integrated signal testing platform 141 to perform secondary signal testing on the chip 13 .

圖6顯示根據本揭露之一實施例之晶片測試方法流程圖。如圖6所示,並同時參照圖1,本揭露的晶片測試方法,包含下列步驟:提供晶片測試板1(S601);設置晶片13於晶片測試區11(S602);以及通過主要訊號連接器12對晶片13進行至少一主要訊號測試(S603)。前述晶片測試板1包含:本體10,具有複數個貫通孔101連通本體10之二側;晶片測試區11,設置於本體10之一側;以及主要訊號連接器12,設置於本體10之同一側,用於不經過該些貫通孔101而連接晶片測試區11;其中,晶片測試區11用於連接晶片13,並通過主要訊號連接器12對晶片13進行至少一主要訊號的測試。特別是,晶片測試區11通過主要訊號連接器12接收主要訊號並傳輸至晶片13,晶片13響應主要訊號產生回饋訊號並通過主要訊號連接器12輸出以對晶片13進行主要訊號測試。此外,晶片測試區11通過複數貫通孔101接收次要訊號並傳輸至晶片13,晶片13響應次要訊號產生回應訊號並通過貫通孔101輸出以對晶片13進行次要訊號測試。FIG. 6 shows a flowchart of a wafer testing method according to an embodiment of the present disclosure. As shown in Figure 6, and referring to Figure 1 at the same time, the wafer testing method of the present disclosure includes the following steps: providing a wafer testing board 1 (S601); setting the wafer 13 in the wafer testing area 11 (S602); and passing the main signal connector 12 Perform at least one major signal test on the chip 13 (S603). The aforementioned chip test board 1 includes: a body 10, which has a plurality of through holes 101 connected to two sides of the body 10; a chip test area 11, which is arranged on one side of the body 10; and a main signal connector 12, which is arranged on the same side of the body 10 , for connecting the chip test area 11 without passing through the through holes 101 ; wherein, the chip test area 11 is used for connecting the chip 13 , and performing at least one main signal test on the chip 13 through the main signal connector 12 . In particular, the chip test area 11 receives the main signal through the main signal connector 12 and transmits it to the chip 13 , and the chip 13 generates a feedback signal in response to the main signal and outputs it through the main signal connector 12 to perform the main signal test on the chip 13 . In addition, the wafer test area 11 receives the secondary signal through the plurality of through holes 101 and transmits it to the chip 13 . The chip 13 generates a response signal in response to the secondary signal and outputs it through the through hole 101 to perform the secondary signal test on the chip 13 .

特別是,主要訊號測試步驟包含下列步驟:由主要訊號測試平台14產生主要訊號;通過主要訊號連接器12傳輸主要訊號至晶片13;以晶片13響應主要訊號時產生回饋訊號;以及通過主要訊號連接器12傳輸回饋訊號至主要訊號測試平台14。此外,本揭露的晶片測試方法進一步包含一次要訊號測試步驟,包含下列步驟:由次要訊號測試平台15產生次要訊號;通過該些貫通孔101傳輸次要訊號至晶片13;以晶片13響應次要訊號時產生回應訊號;以及通過該些貫通孔101傳輸回饋訊號至主要訊號測試平台14。In particular, the main signal testing step includes the following steps: generating the main signal from the main signal testing platform 14; transmitting the main signal to the chip 13 through the main signal connector 12; generating a feedback signal when the chip 13 responds to the main signal; and connecting the main signal through the main signal The device 12 transmits the feedback signal to the main signal test platform 14 . In addition, the chip testing method of the present disclosure further includes a secondary signal testing step, including the following steps: generating secondary signals from the secondary signal testing platform 15; transmitting the secondary signals to the chip 13 through the through holes 101; responding with the chip 13 A response signal is generated during the secondary signal; and the feedback signal is transmitted to the primary signal testing platform 14 through the through holes 101 .

本揭露的晶片測試區11還包含:複數測試點111,設置於晶片測試板1的第一表面1a,且複數測試點環繞晶片13測試區11周邊進行分佈與配置;複數測試針112,設置於晶片測試板1的第二表面1b,該些複數測試針112分別對應連接該些測試點111;其中,該些貫通孔101分別連接於該些測試針112及該些測試點111之間。此外,晶片測試區11通過複數測試針112、複數貫通孔101及複數測試點111接收次要訊號並傳輸至晶片13;晶片13響應次要訊號產生回應訊號並通過複數測試針112、複數貫通孔101及複數測試點111輸出以對晶片13進行次要訊號測試。特別是,主要訊號的傳輸速率大於百兆位元每秒(100Mbps),例如,網路傳輸訊號,資料傳輸訊號或其他具有高速或高頻的訊號。次要訊號的傳輸速率低於百兆位元每秒(100Mbps),例如,電源訊號等其他低速或低頻訊號。The wafer test area 11 of the present disclosure also includes: a plurality of test points 111 arranged on the first surface 1a of the wafer test board 1, and the plurality of test points are distributed and arranged around the periphery of the wafer 13 test area 11; a plurality of test needles 112 are arranged on On the second surface 1b of the wafer test board 1 , the plurality of test pins 112 are respectively connected to the test points 111 ; wherein the through holes 101 are respectively connected between the test pins 112 and the test points 111 . In addition, the wafer test area 11 receives secondary signals through the plurality of test needles 112, the plurality of through holes 101 and the plurality of test points 111 and transmits them to the chip 13; 101 and a plurality of test points 111 are output to perform a secondary signal test on the chip 13 . In particular, the transmission rate of the main signal is greater than 100 Mbps (100 Mbps), for example, network transmission signal, data transmission signal or other signals with high speed or high frequency. Secondary signals with transmission rates below 100 Mbps, for example, other low-speed or low-frequency signals such as power signals.

本揭露的晶片測試板與其測試方法是為現有技術的測試板高速訊號應用設計裡,通孔本身存在著對地的寄生電容與電感,過孔的寄生電容與電感會給電路造成的主要影響是延長了信號的上升時間,降低了電路的速度與高速訊號的完整性。因此,本揭露的晶片測試板與測試方法在主要訊號上不使用過孔的設計,直接透過高速連接器連接其高速訊號,保持高速訊號的完整性。The chip test board and its test method disclosed in this disclosure are designed for the high-speed signal application of the test board in the prior art. The through hole itself has parasitic capacitance and inductance to the ground. The main impact of the parasitic capacitance and inductance of the via hole on the circuit is The rise time of the signal is prolonged, reducing the speed of the circuit and the integrity of the high-speed signal. Therefore, the chip test board and testing method disclosed herein do not use via design for main signals, and directly connect the high-speed signals through high-speed connectors to maintain the integrity of the high-speed signals.

本揭露已由上述相關實施例加以描述,然而上述實施例僅為實施本揭露之範例。必需指出的是,已揭露之實施例並未限制本揭露之範圍。相反地,包含於申請專利範圍之精神及範圍之修改及均等設置均包含於本揭露之範圍內。The present disclosure has been described by the above-mentioned related embodiments, but the above-mentioned embodiments are only examples for implementing the present disclosure. It must be pointed out that the disclosed embodiments do not limit the scope of this disclosure. On the contrary, modifications and equivalent arrangements included in the spirit and scope of the patent claims are included in the scope of the present disclosure.

1:測試板 11:測試區 12:連接器 13:晶片 101:貫通孔 111:測試點 112:測試針 113:貫通孔 1a、1b:表面 14、15、141:測試平台 S601、S602、S603:步驟1: Test board 11: Testing area 12: Connector 13: Wafer 101: Through hole 111: Test point 112: Test needle 113: through hole 1a, 1b: surface 14, 15, 141: Test platform S601, S602, S603: steps

圖1顯示根據本揭露一實施例的晶片測試板。FIG. 1 shows a wafer test board according to an embodiment of the present disclosure.

圖2顯示根據本揭露一實施例之晶片測試系統。FIG. 2 shows a wafer testing system according to an embodiment of the present disclosure.

圖3顯示根據本揭露之一實施例之次要訊號測試方塊圖。FIG. 3 shows a block diagram of a secondary signal test according to an embodiment of the disclosure.

圖4顯示根據本揭露之另一實施例之次要訊號測試方塊圖。FIG. 4 shows a block diagram of a secondary signal test according to another embodiment of the disclosure.

圖5顯示根據本揭露之一實施例之整合訊號測試平台圖。FIG. 5 shows a diagram of an integrated signal test platform according to an embodiment of the present disclosure.

圖6顯示根據本揭露之一實施例之晶片測試方法流程圖。FIG. 6 shows a flowchart of a wafer testing method according to an embodiment of the present disclosure.

1:測試板 1: Test board

11:測試區 11: Testing area

12:連接器 12: Connector

13:晶片 13: Wafer

101:貫通孔 101: Through hole

111:測試點 111: Test point

112:測試針 112: Test needle

113:貫通孔 113: through hole

1a、1b:表面 1a, 1b: surface

Claims (8)

一種晶片測試板,用於依一主要訊號及一次要訊號測試一晶片,包含:一本體,具有複數個貫通孔連通該本體之二側;一晶片測試區,設置於該本體之一側;以及一主要訊號連接器,設置於該本體之同一側,用於不經過該些貫通孔而連接該晶片測試區;其中,該晶片測試區用於連接該晶片,且該晶片測試區通過該主要訊號連接器接收該主要訊號並傳輸至該晶片,且該主要訊號連接器不經過該些貫通孔傳遞該主要訊號至該晶片;其中該晶片響應該主要訊號產生一回饋訊號並通過該主要訊號連接器輸出,以對該晶片進行該主要訊號測試,且該主要訊號連接器不經過該些貫通孔傳遞該晶片在接收該主要訊號之後產生的該回饋訊號。 A chip test board is used to test a chip according to a main signal and a secondary signal, comprising: a body with a plurality of through holes connecting two sides of the body; a chip test area set on one side of the body; and A main signal connector, arranged on the same side of the body, is used to connect the chip test area without going through the through holes; wherein, the chip test area is used to connect the chip, and the chip test area passes the main signal The connector receives the main signal and transmits it to the chip, and the main signal connector transmits the main signal to the chip without passing through the through holes; wherein the chip generates a feedback signal in response to the main signal and passes through the main signal connector output to perform the main signal test on the chip, and the main signal connector does not transmit the feedback signal generated by the chip after receiving the main signal through the through holes. 如請求項1所述的晶片測試板,其中,該晶片測試區通過該複數貫通孔接收該次要訊號並傳輸至該晶片,該晶片響應該次要訊號產生一回應訊號並通過該貫通孔輸出以對該晶片進行該次要訊號測試。 The chip test board as described in claim 1, wherein the chip test area receives the secondary signal through the plurality of through holes and transmits it to the chip, and the chip generates a response signal in response to the secondary signal and outputs it through the through hole to perform the secondary signal test on the chip. 如請求項1所述的晶片測試板,其中,該晶片測試區包含:複數測試點,設置於該晶片測試板的一第一表面,且該複數測試點環繞該晶片測試區周邊進行分佈與配置;複數測試針,設置於該晶片測試板的一第二表面,該些複數測試針分別對應連接該些測試點;其中,該些貫通孔分別連接於該些測試針及該些測試點之間。 The wafer test board as claimed in claim 1, wherein the wafer test area includes: a plurality of test points arranged on a first surface of the wafer test board, and the plurality of test points are distributed and arranged around the periphery of the wafer test area A plurality of test pins are arranged on a second surface of the chip test board, and the plurality of test pins are respectively connected to the test points; wherein, the through holes are respectively connected between the test pins and the test points . 如請求項3所述的晶片測試板,其中,該晶片測試區通過該複數測試針、該複數貫通孔及該複數測試點接收該次要訊號並傳輸至該晶片;該晶片響應該次要訊號產生一回應訊號並通過該複數測試針、該複數貫通孔及該複數測試點輸出以對該晶片進行該次要訊號測試。 The chip test board as described in claim 3, wherein the chip test area receives the secondary signal through the plurality of test needles, the plurality of through holes and the plurality of test points and transmits it to the chip; the chip responds to the secondary signal A response signal is generated and output through the plurality of test needles, the plurality of through holes and the plurality of test points to perform the secondary signal test on the chip. 如請求項1至請求項4中任一所述的晶片測試板,其中,該主要訊號的傳輸速率大於百兆位元每秒(100Mbps),該次要訊號的傳輸速率低於百兆位元每秒(100Mbps)。 The wafer test board as described in any one of claim 1 to claim 4, wherein the transmission rate of the primary signal is greater than 100 Mbps, and the transmission rate of the secondary signal is lower than 100 Mbps per second (100Mbps). 一種晶片測試系統,包含:如請求項1至請求項5中任一所述之晶片測試板;一晶片,設置於該晶片測試區;一主要訊號測試平台,用以提供該主要訊號;以及一次要訊號測試平台,用以提供該次要訊號。 A chip test system, comprising: a chip test board as described in any one of claim 1 to claim 5; a chip set in the chip test area; a main signal test platform for providing the main signal; and a The primary signal test platform is used to provide the secondary signal. 一種晶片測試方法,包含下列步驟:提供如請求項1至請求項5中任一所述之晶片測試板;設置該晶片於該晶片測試區;以及通過該主要訊號連接器對該晶片進行至少一主要訊號測試,其中該主要訊號測試包含下列步驟:由一主要訊號測試平台產生該主要訊號;通過該主要訊號連接器傳輸該主要號至該晶片,且該主要訊號連接器不經過該些貫通孔傳遞該主要訊號至該晶片;以該晶片響應該主要訊號而產生該回饋訊號;以及 通過該主要訊號連接器傳輸該回饋訊號至該主要訊號測試平台,且該主要訊號連接器不經過該些貫通孔傳遞該晶片在接收該主要訊號之後產生的該回饋訊號。 A chip testing method, comprising the following steps: providing a chip test board as described in any one of claim 1 to claim 5; setting the chip in the chip test area; and performing at least one test on the chip through the main signal connector The main signal test, wherein the main signal test includes the following steps: generating the main signal by a main signal test platform; transmitting the main signal to the chip through the main signal connector, and the main signal connector does not pass through the through holes transmitting the primary signal to the chip; generating the feedback signal with the chip in response to the primary signal; and The feedback signal is transmitted to the main signal testing platform through the main signal connector, and the main signal connector does not transmit the feedback signal generated by the chip after receiving the main signal through the through holes. 如請求項7所述的晶片測試方法,進一步包含一次要訊號測試步驟,包含下列步驟:由一次要訊號測試平台產生該次要訊號;通過該些貫通孔的傳輸線傳輸該次要訊號至該晶片;以該晶片響應該次要訊號時產生一回應訊號;以及通過該些貫通孔的傳輸線傳輸該回應訊號至該次要訊號測試平台。 The chip testing method as described in claim 7, further comprising a secondary signal testing step, including the following steps: generating the secondary signal by a secondary signal testing platform; transmitting the secondary signal to the chip through the transmission lines of the through holes ; generate a response signal when the chip responds to the secondary signal; and transmit the response signal to the secondary signal testing platform through the transmission lines of the through holes.
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