TWI790065B - Improvement of the structure of the test needle seat for high-frequency measurement - Google Patents

Abstract

The present invention is an improved structure of a test needle holder for high-frequency measurement. A plurality of probes are provided, and there are a plurality of first accommodating grooves and a plurality of second accommodating grooves between the first board body and the second board body; a movable circuit board is arranged on the first board body At the top side, there is a telescopic gap between the movable circuit board and the first board body, and a plurality of perforations for a plurality of locking elements are provided corresponding to the second accommodating grooves; a telescopic a film, the periphery of which is attached to the surface of the bottom side of the movable circuit board, and the stretch film is attached to the bottom of the second board; a protective film is attached to the bottom of the stretch film surface, and the protective film is provided with a plurality of conductive needles corresponding to the probes, and these conductive needle systems will protrude from the bottom side of the protective film, and are separated by a moving gap on the bottom side of the protective film. There is an object to be tested, and after the test needle is deformed and damaged by the above-mentioned components, the maintenance cost can be saved by replacing the protective film with a lower cost.

Description

Improvement of the structure of the test needle seat for high-frequency measurement

The present invention provides a structure improvement of the test needle base for high-frequency measurement, especially a stretchable film, a protective film, and a plurality of conductive electrodes on the protective film are provided between the plurality of probes and the plurality of contacts of the object to be tested. Needle body, to achieve no noise when measuring high-frequency signal UUTs, and at the same time ensure that the contact force between the probe and the multiple contacts of the DUT is moderate, which can avoid multiple probes and DUTs The contacts are damaged due to hard force or rapid wear, and these conductive needle systems are made of harder conductive metal materials, which are harder and less prone to damage. Even if the conductive needles are damaged, they can be By replacing the protective film with lower cost, the effect of convenient replacement and reduced maintenance cost is achieved.

Press, the probe card (Probe Card) is used before the integrated circuit (IC) is packaged, and the bare crystal is tested with the probe (Probe) for the test point conduction or disconnection, and then the defective products are screened out before subsequent packaging project. Therefore, testing integrated circuits with probe cards is an important manufacturing process of integrated circuits; this probe card test can increase the yield rate of finished products from 70% to 90%, of which 20% of the yield contribution is increased This process has a huge impact and is necessary for semiconductor factories whose yield rate is critical. The probe card is the interface between a test machine and the wafer (Wafer). Each integrated circuit needs at least one corresponding probe card for testing, and the purpose of the probe card test is to make the wafer dicing Finally, the good products that pass the test can enter the next packaging process, and the defective products can be avoided Continued processing results in greater waste.

In the wafer (Wafer) or printed circuit board (PCB) testing device currently used in the industry, the test fixture is set with a plurality of probes in a probe card, so that these probes are connected to the wafer or PCB to be tested. The multiple test points of the printed circuit board are electrically connected, and the electronic signals of the test points are obtained by the probe and transmitted to a test machine through multiple wires. The test machine displays the wafer or printed circuit board to be tested Whether these test points are in the state of conduction or disconnection, and the contact force between the contact terminal of the probe and the test points of the device under test should not be too large, otherwise it will cause damage to the probe or the test point of the device under test For this reason, a stretchable film can be set in front of the probe to control the force of pressing the contact, and a plurality of thin film conductive bumps are grown on the stretchable film using micro-electromechanical process technology to conduct or conduct with the test points. The test of the open circuit state, however, the conductive bumps on the film are easily deformed and damaged due to insufficient hardness after repeated test point conduction or open circuit state tests, which leads to the need to replace the entire stretch film on the testing machine To repair, but to be engaged in this industry to be resolved.

Therefore, in view of the above-mentioned problems and deficiencies, the inventor collected relevant information, evaluated and considered in many ways, and based on years of experience accumulated in this industry, through continuous trial and modification, he designed this kind of high-frequency application. The invention patent for the improvement of the test needle seat structure was born.

The main purpose of the present invention is to provide an improved structure of a test needle base for high-frequency measurement, including: a needle base, which includes a first board body and a second board body, and is connected between the first board body and the second board body A plurality of probe slots for positioning a plurality of probes are penetrated between the two boards, and the probes include a needle body, the top of the needle body has a probe head extending out of the first board body, and the needle body The bottom of the body has a probe holding portion extending out of the second board body, and the first board body is further It has a plurality of first accommodating grooves for a plurality of elastic parts, and a plurality of second accommodating grooves extending from the first plate body to the second plate body are provided on one side of the first accommodating grooves ; a movable circuit board, which is arranged on the top side of the first board body, and the bottom side of the movable circuit board is supported by the probe heads, and the movable circuit board and the first board body There is a telescopic gap between them, and a plurality of perforations for multiple locking elements are provided corresponding to the second accommodating grooves, and the shafts of the locking elements will be inserted into the second accommodating grooves. at the first plate of the slot, and the locking part with external thread at the end of the locking element will be locked at the second plate of the second accommodating groove, and the top of the locking element has A head will be positioned on the surface of the top side of the movable circuit board; a stretch film, the periphery of which is attached to the surface of the bottom side of the movable circuit board, and the stretch film is wrapped and pasted on the second The bottom side of the second plate body; a protective film, which is attached to the bottom surface of the stretchable film, and the protective film is provided with a plurality of positioning holes corresponding to the probes, and the contents of the positioning holes There are a plurality of conductive needles positioned at the position, and the conductive needle system will protrude from the bottom side of the protective film, and an object to be measured is arranged on the bottom side of the protective film with a moving gap, and the object to be measured is connected to the aforementioned plurality of probes There is a stretch film, a protective film, and a plurality of conductive needles on the protective film between the multiple contacts, so that no noise will be generated when measuring the high-frequency signal DUT, and at the same time ensure that the probe and the DUT The contact strength of the plurality of contacts is moderate, which can avoid damage caused by hard force or rapid wear between the probe and the plurality of contacts of the object under test, and these conductive needle systems are made of relatively hard conductive metal materials. It is harder and less prone to damage, and after the conductive needles are damaged by accident, the protective film can be replaced with a lower-cost protective film, so as to achieve the effect of convenient replacement and lower maintenance cost.

The secondary purpose of the present invention is to provide a plurality of conductive lines extending to the periphery of the stretchable film and conducting the movable circuit board and the conductive pins on the other side.

Another object of the present invention is to tie a A first deformation space and a second deformation space corresponding to each other and passing through the probe slots are provided in the other recesses.

Another object of the present invention is that the conductive needle systems protrude 0.2 mm from the bottom side of the protective film.

Another object of the present invention is that the conductive needle systems are respectively fixed on the bottom side of the stretchable film through a conductive gel, and the conductive gels are arranged in one-to-one dots corresponding to the other side of the stretchable film. The positions of the probes on the side are arranged in a straight line so that the probes, the conductive gels and the conductive needle systems are respectively arranged in a straight line.

Another object of the present invention is that the protective film is made of polyimide fiber.

Another object of the present invention is that the conductive needle systems are made of metal materials with high hardness and conductivity.

Another object of the present invention is that the top surface of the movable circuit board is coated with a reinforcing pad, and the reinforcing pad can form a structural reinforcement for the covered part of the movable circuit board.

Another object of the present invention is to provide an anti-adhesive anti-slip adhesive tape between the stretch film and the second board to make the second board close to the stretch film.

Another object of the present invention is that the distance of the telescopic gap is greater than the distance of the push gap, so that the probes will form a bent deformation state when pushed between the movable circuit board and the stretch film.

1: Needle seat

10: Probe slot

11: The first plate body

110: The first deformation space

12: Second plate body

120: Second deformation space

13: Probe

131: needle body

132: Probe head

133: Probe resisting part

14: Elastic parts

15: The first storage tank

16: The second storage tank

2: Removable circuit board

20: telescopic gap

21: perforation

3: Locking element

31: Shaft

32: Locking part

321: external thread

33: head

4: stretch film

41: Perimeter

5: Protective film

50: positioning hole

51: Conductive needle body

52: Conductive gel

6: The object to be tested

60: Move gap

61: contact

7: Reinforcing pad

8: Anti-adhesive anti-skid tape

[Picture 1] is a side view before the measurement of the improved structure of the test needle holder for the application of high-frequency measurement in the present invention Sectional view.

[Figure 2] is a partially enlarged view of Figure 1.

[Fig. 3] is a side cross-sectional view of the improved structure of the test needle holder for the application of high-frequency measurement in the measurement of the present invention.

[Figure 4] is a partially enlarged view of Figure 3.

In order to achieve the above-mentioned purpose and effect, the technical means and the structure adopted by the present invention are hereby illustrated in detail with respect to the preferred embodiments of the present invention. Its features and functions are as follows, so that it can be fully understood.

Please refer to Figures 1 to 4, which are the side sectional views before the measurement of the improved structure of the test needle holder for high-frequency measurement, the partial enlarged view of Figure 1, and the side sectional views during the measurement. Figure 3 and the partial enlarged view of Figure 3, it can be clearly seen from the figure that the improvement of the structure of the test needle base for high-frequency measurement in the present invention includes: a needle base 1, a movable circuit board 2, a locking Element 3, a stretch film 4, a protective film 5 and a reinforcing pad 7, the main components and features thereof are detailed as follows:

The needle holder 1 includes a first board body 11 and a second board body 12, and a plurality of probes for positioning the plurality of probes 13 pass through between the first board body 11 and the second board body 12 grooves 10, and between the first plate body 11 and the second plate body 12, a first deformation space 110 and a second deformation space 120 corresponding to each other and penetrating the probe grooves 10 are respectively recessed, And these probes 13 include a needle body 131, the top of the needle body 131 has a probe head 132 extending out of the first plate body 11, and the bottom of the needle body 131 has a probe head 132 extending out of the second plate body 12 A probe holding portion 133 outside, and the first plate body 11 has a plurality of first accommodating grooves 15 for a plurality of elastic members 14 to accommodate, and on one side of the first accommodating grooves 15 There is a complex extending from the first board 11 to the second board 12 Count the second accommodating groove 16.

The movable circuit board 2 is arranged on the top side of the first board body 11, and the bottom side of the movable circuit board 2 is supported by the probe heads 132, and the movable circuit board 2 and the There is a telescopic gap 20 between the first plates 11, and a plurality of perforations 21 are provided corresponding to the second accommodating grooves 16 for a plurality of locking elements 3 to pass through, and the locking elements 3 are movable. Cooperate with different heights of workpieces to limit the height of a screw, and the shafts 31 of the locking elements 3 will pass through the first plate 11 of the second accommodating groove 16, and the locking elements 3. The locking part 32 with external thread 321 at the end will be locked at the second plate body 12 of the second accommodation groove 16, and a head 33 at the top of the locking element 3 will be positioned at the second plate body 12. at the surface of the top side of the movable circuit board 2 .

The peripheral edge 41 of the stretch film 4 is attached to the surface of the bottom side of the movable circuit board 2 , and the stretch film 4 is wrapped and pasted on the bottom side of the second board body 12 .

The protective film 5 is attached to the bottom surface of the stretchable film 4, the protective film 5 is made of polyimide fiber (Polyimide Fiber), and the protective film 4 is provided with the corresponding The plurality of positioning holes 50 at the probes 13, and a plurality of conductive needles 51 are positioned in the positioning holes 50, and the conductive needles 51 will protrude from the bottom side of the protective film 5 by 0.2 mm (millimeters), And the conductive needles 51 are made of metal material with high hardness and conductivity, and the conductive needles 51 are respectively provided with a conductive gel 52 on the side facing the stretchable film 4, and the conductive needles 51 It can be fixed on the bottom side of the stretch film 4 through the conductive gels 52, and the conductive gels 52 are arranged in a one-to-one point-like manner corresponding to the probes 13 on the other side of the stretch film 4 position, so that the probes 13, the conductive gels 52 and the conductive needles 51 are respectively arranged in a straight line, and a test object 6 is arranged on the bottom side of the protective film 5 with a moving gap 60 , and the object under test 6 is provided with a plurality of contacts 61 corresponding to the conductive pins 51 and capable of forming electrical connections, and the movable circuit board 2 will be Move towards the direction of the needle base 1, so that the elastic members 14 are compressed, and the bottom surface of the movable circuit board 2 will push the probes 13 to move towards the object under test 6, and the probes resist The part 133 will support and push the stretch film 4, so that the stretch film 4 is moved toward the object 6, and the stretch film 4 is pushed toward the object 6, and the stretch film 4 is expanded by pushing, and the stretch film 4 is expanded. These probes 13 will be pushed by the movable circuit board 2 and the elastic recovery force of the stretch film 4 to form a bent deformation state, and by making the conductive gel 52 and the probes The conductive pins 51 of the needle 13 that keep the linearity are electrically connected to the contacts 61 on the object under test 6 to obtain the conduction state signals of the contacts 61, and then make the movable circuit board 2 Move toward the opposite direction of the needle holder 1 to restore the elastic members 14 to their original state, and the probes 13 will be pushed by the elastic restoring force of the stretch film 4 and move toward the movable circuit board 2, and The probes 13 will return to the upright state from the bent state.

The above-mentioned top side surface of the movable circuit board 2 is covered with a strengthening pad 7, which can make the movable circuit board 2 form a structural reinforcement at the place where the movable circuit board 2 is pasted, so as to prevent the movable circuit board 2 from being damaged. External pressure, causing damage, cracks or even fractures.

An anti-sticking anti-slip tape 8 is arranged between the above-mentioned stretchable film 4 and the second plate body 12, and the anti-sticky anti-slip tape 8 can make the stretchable film 4 cling to the bottom of the second plate body 12. Side, so that the flexible film 4 will not slide freely because of the probe test, so as to facilitate the precise alignment of the probes 13 to the conductive needles 51, and the flexible film 4 is resisted by the probes 13 After being held, no stickiness will be produced, so that the stretchable film 4 can move smoothly and form an expanded state.

The distance of the telescopic gap 20 is greater than the distance of the push gap 60, so that the probes 13 are pushed between the movable circuit board 2 and the telescopic film 4 to form a curved deformation state, and are curved. The probe 13 can ensure that the probe 13 has indeed abutted against the conductive needle body 51 On the conductive gel 52 on.

The above-mentioned elastic member 14 is composed of a spring, and one end of the elastic member 14 extends into the telescopic gap 20 and the other end of the elastic member is against the top surface of the second board 12 .

In practical application, the present invention applies a test needle seat structure improvement for high-frequency measurement to apply a mechanical force from top to bottom to the surface of the movable circuit board 2 or the reinforcing pad 7, and the movable circuit board 2 will move towards the needle holder 1 after being stressed, so that the elastic members 14 supported on the bottom side of the movable circuit board 2 will be compressed, and at the same time, the movable circuit board 2 will be held against the On the top surface of the first board body 11, and the bottom surface of the movable circuit board 2 will push the probe heads 132 of the probes 13 to move towards the object under test 6, and the bottom of the probes 13 The probe holding portion 133 will push and squeeze toward the stretch film 4, so that the stretch film 4 will push toward the protective film 5, and the push of the probes 13 will make the stretch Membrane 4 expands and protrudes and stretches, and these probes 13 form the deformed state of bending (as Fig. shown), and the first deformation space 110 and the second deformation space 120 will provide appropriate deformation space for the probes 13 to be bent and deformed, so as to avoid the fracture of the probes 13 due to insufficient bending space In particular, the distance of the telescopic gap 20 is greater than the distance of the push gap 60, so that the probes 13 will first be held against the conductive gel 52 during the downward push. , and the movable circuit board 2 will still carry out the pushing action, and the probes 13 will form a bent state to comply with the pushing force, and the conductive pins 51 on the protective film 5 will continue to push and resist The electrical connections are formed on the contacts 61 held on the object under test 6, and after the conduction state signals of the contacts 61 of the object under test 6 are obtained, the conduction state signals of the contacts 61 are conduction through the conductive needles 51, the conductive gels 52 and the plurality of conductive lines in the stretchable film 4 that are individually connected to the conductive gels 52, And transmit the on-state signal to a plurality of preset pads (not shown in the figure) on the bottom side of the movable circuit board 2 through the conductive lines, and the preset pads pass through a plurality of wires (not shown in the figure) It is sent to a preset test machine (not shown in the figure), and the test machine will display whether the contacts on the object under test 6 are in the state of conduction or disconnection.

After the above-mentioned testing machine measures the object under test 6 and obtains the measurement data, it can make the movable circuit board 2 move toward the opposite direction of the needle holder 1, so that the elastic member 14 can be elastically reset, And these probes 13 are moved toward the direction of this movable circuit board 2 by the elastic recovery force of this stretch film 4, and these probes 13 will return to the upright state by the bending state, and by the aforementioned amount During the measurement process, the stretchable film 4, the protective film 5 and the conductive needles 51 are arranged between the probes 13 and the contacts 61 on the object 6 to achieve the measurement height. Noise will not be generated when the frequency signal is detected by the object under test 6, and at the same time ensure that the force of contact between the probes 13 and the contacts 61 of the object under test 6 is moderate, so as to avoid contact between the probes 13 and the object under test 6. The contacts 61 of the test object 6 are damaged due to hard force or rapid wear, and the conductive needles 51 provided on the protective film 5 are compared with the use of micro-electromechanical processes in the past to make conductive protrusions grow on the film. The way of the block is more hard, not easy to be damaged, and the length is longer so that the contacts 61 on the object under test 6 can be more easily contacted, and if the conductive needles 51 are accidentally damaged during the test , it can be repaired by replacing the protective film 5, and the replacement of the protective film 5 is easier and less costly than the replacement of the stretchable film 4, and it can make it easier for the user to solve the problem of measuring the object under test 6. The damage of the equipment at the contact point 61 and the maintenance cost are saved. The test needle socket of the present invention has excellent practicability when applied to high-frequency measurement, so a patent application is filed to seek the protection of the patent right.

The above is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention, so all the simple modifications and equivalents made by using the description and drawings of the present invention Structural changes should be included in the patent scope of the present invention in the same way, and should be stated together.

To sum up, the improvement of the structure of the above-mentioned high-frequency measurement test needle seat of the present invention is used to achieve its effect and purpose. Therefore, the present invention is an invention with excellent practicability, and it is in line with the application for an invention patent. The essential requirement is to file an application in accordance with the law. I hope that the trial committee will approve this case as soon as possible to protect the hard work of the inventor. If the Junju trial committee has any doubts, please feel free to send a letter to instruct the inventor. I will do my best to cooperate, and I really appreciate it.

1: Needle seat

10: Probe slot

11: The first plate body

110: The first deformation space

12: Second plate body

120: Second deformation space

13: Probe

131: needle body

132: Probe head

133: Probe resisting part

14: Elastic parts

15: The first storage tank

16: The second storage tank

2: Removable circuit board

20: telescopic gap

21: perforation

3: Locking element

31: Shaft

32: Locking part

321: external thread

33: head

4: stretch film

41: Perimeter

5: Protective film

51: Conductive needle body

52: Conductive gel

6: The object to be tested

60: Move gap

61: contact

7: Reinforcing pad

8: Anti-adhesive anti-skid tape

Claims (10)

An improvement of the structure of a test needle base for high-frequency measurement, including: A needle holder, which includes a first board body and a second board body, and a plurality of probe grooves for positioning a plurality of probes are penetrated between the first board body and the second board body, and the probes The needle includes a needle body, the top of the needle body has a probe head extending out of the first board, and the bottom of the needle body has a probe abutting portion extending out of the second board, and the first The plate body is further provided with a plurality of first accommodation grooves for a plurality of elastic members to be accommodated, and a plurality of first accommodation grooves extending from the first plate body to the second plate body are arranged on one side of the first accommodation grooves. Two holding tanks; A movable circuit board, which is arranged on the top side of the first board body, and the bottom side of the movable circuit board is supported by the probe heads, and the movable circuit board and the first board body There is a telescopic gap between them, and a plurality of perforations are provided corresponding to the second accommodating grooves for a plurality of locking elements to pass through, and the shafts of the locking elements will be inserted into the second accommodating slots At the first plate of the groove, and the locking part with at least one external thread at the end of the locking element will be locked at the second plate of the second accommodating groove, and the top of the locking element having a head positioned at the surface of the top side of the movable circuit board; a stretchable film, the periphery of which is attached to the surface of the bottom side of the movable circuit board, and the stretchable film is wrapped and attached to the bottom side of the second board body; and A protective film, which is attached to the bottom surface of the stretchable film, and the protective film is provided with a plurality of positioning holes corresponding to the probes, and a plurality of conductive needles are positioned in the positioning holes body, and the conductive needle system will protrude from the bottom side of the protective film, and an object to be tested is provided at the bottom side of the protective film with a moving gap, and the object to be tested is provided with corresponding conductive pins. The electric needle body can form a plurality of contacts for electrical connection, and the movable circuit board will move toward the needle seat, so that the elastic members are compressed, and the bottom surface of the movable circuit board pushes the probes Move towards the direction of the object to be tested, and the probe holding parts will hold and push the stretchable film, so that the protective film attached to the bottom side of the stretchable film will push toward the object to be tested, and the stretchable film The system will expand through pushing, and the probes will be pushed by the movable circuit board and the elastic recovery force of the stretch film to form a bent deformation state, so that the conductive needles and the object to be tested The contacts on the circuit board are electrically connected to obtain the conduction state signals of the contacts, and then the movable circuit board is moved in the opposite direction to the needle seat to restore the elastic members to their original state, and the The probes are pushed by the elastic recovery force of the stretch film and move toward the movable circuit board, and the probes return from the bent state to the upright state. The structure improvement of the test needle seat applying high-frequency measurement as described in claim 1, wherein the stretch film is provided with the conductive needles extending to the periphery of the stretch film and conducting the movable circuit board and the other side of plural conducting lines. As described in claim 1, the structure improvement of the test needle seat applying high-frequency measurement, wherein the first board body and the second board body are each provided with a recess corresponding to each other and for the probe slots to pass through. A first deformation space and a second deformation space. According to claim 1, the improved structure of the test needle holder for high-frequency measurement, wherein the conductive needle system protrudes 0.2mm (millimeter) from the bottom side of the protective film. According to claim 1, the structure improvement of the test needle seat applying high-frequency measurement, wherein the conductive needle systems are respectively fixed on the bottom side of the stretchable film through a conductive gel, and the conductive gel is in the form of a The one-to-one point-like arrangement corresponds to the probes on the other side of the stretchable film. The positions of the needles are arranged so that the probes, the conductive gels and the conductive needle systems are respectively arranged in a straight line. According to claim 1, the structure improvement of the test needle socket applying high-frequency measurement, wherein the protective film is made of polyimide fiber (Polyimide Fiber). According to claim 1, the improved structure of the test needle holder for high-frequency measurement, wherein the conductive needle systems are made of metal materials with high hardness and conductivity. According to the improvement of the structure of the test needle base for high-frequency measurement as described in claim 1, the top side surface of the movable circuit board is covered with a reinforcement pad, and the reinforcement pad can make the movable circuit board be pasted. Create structural reinforcement. According to the improvement of the structure of the test needle base for high-frequency measurement as described in claim 1, an anti-sticking film is provided between the stretch film and the second plate to make the second plate close to the stretch film Sticky non-slip tape. As described in claim 1, the structure improvement of the test needle seat applying high-frequency measurement, wherein the distance of the telescopic gap is greater than the distance of the push gap, so that the probes are pushed between the movable circuit board and the telescopic The time tie between the membranes will form a bent deformation state.

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