JP3237231U - Test probe holder structure applying high frequency measurement - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a test probe holder structure to which high frequency measurement is applied, which can save repair cost by replacing a protective film at low cost after deformation and damage of a test probe head. SOLUTION: A first plate body 11, a second plate body 12 and a plurality of probe grooves 10 are included, a plurality of probes 13 are provided inside, and a plurality of probes 13 are provided between the first plate body and the second plate body. A location corresponding to the second accommodating groove having a telescopic gap 20 between the probe holder 1 having the first and second accommodating grooves 15 and 16 and the first plate body arranged on the upper side of the first plate body. A movable circuit board 2 provided with a plurality of perforations 21 for penetrating a plurality of fixing members 3 and an elastic film 4 attached to the peripheral edge of the movable circuit board on the bottom side surface of the movable circuit board and covering the bottom side of the second plate body. And a protective film 5 attached to the bottom side surface of the elastic film, the protective film is provided with a plurality of conductive needles 51 corresponding to the probe, and the conductive needles project toward the bottom of the protective film to protect the protective film. The subject 6 is provided on the bottom side with a push gap. [Selection diagram] Fig. 1

Description

The present invention relates to the improvement of the test probe holder structure to which high frequency measurement is applied, and in particular, a plurality of conductive needles on an elastic film, a protective film and a protective film are formed between a plurality of probes and a plurality of contacts of a subject. It is provided so that noise is not generated when measuring a high-frequency signal subject, and at the same time, the contact force of the probe and the plurality of contacts of the subject is appropriately secured, and between the probe and the plurality of contacts of the subject. Can be prevented from being damaged by strong force or sudden wear.
These conductive needles are made of a relatively hard conductive metal material, are stronger and more resistant to damage, and even if these conductive needles are damaged, they are convenient to replace by replacing a relatively low-cost protective film. Moreover, the effect of reducing the maintenance cost can be achieved.

The probe card is used before the integrated circuit (IC) is packaged, and the bare chip is tested for continuity or open circuit with a probe (Probe) to sort out defective products before the next package. Perform the process. Therefore, performing integrated circuit testing with a probe card is an important process for integrated circuits.
By performing this probe card test, the yield of the finished product can be improved from 70% to 90% of the original, and the contribution to improve the yield of 20% is this process for semiconductor factories where the yield is important. The impact of is important and necessary.
The probe card is the interface between the test machine and the wafer, and various integrated circuits need to be tested with the corresponding probe card, and the purpose of the probe card test is to test after cutting the wafer. This is to allow good products to enter the next packaging process and prevent defective products from continuing to be processed and becoming a larger waste.

In wafer or printed circuit board (PCB) test equipment currently in use in the industry, the test jig is a wafer or printed circuit to be tested with these probes by means of multiple probes installed on the probe card. It is electrically connected to multiple test points on the board, and the electronic signals of the test points are obtained by a probe and sent to the test machine via multiple leads, and the test machine is the wafer or printed circuit to be tested. Shows whether the test point on the board is in a conductive or disconnected state, and the pressing contact force between the contact end point of the probe and the test point of the device under test must not be too great, otherwise the probe. It causes damage to the needle or the test point of the device under test.
Therefore, a stretchable membrane can be added in front of the probe to control the pressing contact force, and a plurality of thin film conductive bumps can be grown on the stretchable membrane using MEMS process technology to conduct or conduct with these test points. The cut state is tested, but the multiple conductive bumps on the thin film are prone to deformation and damage due to insufficient hardness after undergoing the continuity or cut state tests at multiple test points. The test machine needs to replace the entire stretchable membrane for repair, and a solution is desired in this industry.

Therefore, in view of the above problems and defects, the inventor collects related information, evaluates and examines in various fields, and based on many years of experience accumulated in this industry, continues trial and error, such high frequency measurement. We are creating an improvement in the structure of the test probe holder that applies the above.

Special Table 2005-530178 published

An object of the present invention is to include a probe holder, a movable circuit board, an elastic film, and a protective film, and the probe holder includes a first plate body and a second plate body, and the first plate body is included. A plurality of probe grooves for positioning a plurality of probes are penetrated between the body and the second plate body, the probe includes a needle body, and the upper portion of the needle body is outside the first plate body. The bottom of the needle body has a probe holding portion extending outside the second plate body, and the first plate body has a plurality of elastic members to be accommodated. It has a first accommodating groove, and a plurality of second accommodating grooves extending from the first plate body to the second accommodating groove are provided on one side of the first accommodating groove.
The movable circuit board is installed on the upper side of the first plate body, and the bottom side of the movable circuit board holds the probe head, and the movable circuit board and the first plate body are attached to each other. A plurality of perforations having an expansion / contraction gap between them and allowing a plurality of fixing members to pass through are provided at a portion corresponding to the second accommodating groove, and the rod body of the fixing member is the first of the second accommodating grooves. The lock portion installed at the plate body portion and having at least one external thread at the end of the fixing member is fixed to the second plate body portion of the second accommodating groove and has a head on the upper portion of the fixing member. Is positioned on the upper surface of the movable circuit board.
The elastic film has a peripheral edge bonded to the bottom surface of the movable circuit board and is bonded so as to cover the bottom side of the second plate body, and the elastic film corresponds to the needle in the elastic film. A plurality of conductive wires extending to the peripheral edge of the stretchable membrane and conducting the movable circuit board and the conductive needle on the other side are provided, and the protective film is attached to the bottom side surface of the stretchable membrane and A plurality of positioning holes corresponding to the probe locations are provided, and a plurality of conductive needle bodies are accommodated and positioned in the positioning holes, and the conductive needle bodies project toward the bottom side of the protective film, and the protective film is provided. The bottom side provides an improvement in the test probe holder structure that applies high frequency measurement in which the subject is provided across the push gap, with a stretchable film, a protective film between the plurality of probes and the plurality of contacts of the subject. In addition, by providing a plurality of conductive needles on the protective film, noise is not generated when measuring a subject with a high frequency signal, and the contact force between the probe and the plurality of contacts of the subject is appropriately secured. , It is possible to prevent damage due to strong force or sudden wear between the probe and the plurality of contacts of the subject.
These conductive needles are made of a relatively hard conductive metal material, are stronger and more resistant to damage, and even if these conductive needles are damaged, they are convenient to replace by replacing a relatively low-cost protective film. Moreover, it is possible to achieve the effect of reducing the maintenance cost.

Another object of the present invention is to provide a plurality of conductive wirings extending to the peripheral edge portion of the stretchable membrane in the stretchable membrane to conduct the movable circuit board and the other conductive needle body. That is.

Another object of the present invention is to provide a first deformation space and a second deformation space that correspond to each other and penetrate the probe between the first plate body and the second plate body, respectively. It is to be.

Yet another object of the present invention is to make the conductive needle body project 0.2 mm from the bottom side of the protective film.

Yet another object of the present invention is that the conductive needles are fixed to the bottom side of the stretchable membrane via a conductive gel, and the conductive gel is arranged in a one-to-one dot pattern in addition to the stretchable membrane. Corresponding to the position of the probe on the side, the probe, the conductive gel, and the conductive needle body are arranged in a straight line, respectively.

Yet another object of the present invention is to allow the protective film to be formed of a polyimide fiber material.

Yet another object of the present invention is to make the conductive needle body made of a metal material having high hardness and conductivity.

Yet another object of the present invention is to cover the upper side surface of the movable circuit board with a reinforcing pad, and the reinforcing pad forms a structural reinforcement at a place where the movable circuit board is attached. Is.

Yet another object of the present invention is to provide an anti-adhesive and non-slip tape between the elastic membrane and the second plate so that the second plate can be tightly attached to the elastic membrane. That is.

Yet another object of the present invention is that the stretch gap distance is greater than the push gap distance and is curved when the probe is pushed between the movable circuit board and the stretch membrane. It is to form a deformed state.

The improvement of the test probe holder structure to which the high frequency measurement of the present invention is applied includes a probe holder, a movable circuit board, an elastic film, and a protective film, and the probe holder includes a first plate body and a protective film. A plurality of probe grooves for positioning a plurality of probes are penetrated between the first plate body and the second plate body, including the second plate body, and the probe includes the needle body. The upper portion of the needle body has a probe head extending outside the first plate body, and the bottom portion of the needle body has a probe holding portion extending outside the second plate body and the first plate body. Has a plurality of first accommodating grooves for accommodating a plurality of elastic members, and a plurality of second accommodating grooves extending from the first plate body to the second plate body are provided on one side of the first accommodating groove. The movable circuit board is installed on the upper side of the first plate body, and the bottom side of the movable circuit board holds the probe head, and the movable circuit board and the first board body are held. It has an expansion / contraction gap between the two, and a plurality of perforations for passing a plurality of fixing members are provided at a portion corresponding to the second accommodating groove.
The rod body of the fixing member is installed at the first plate body portion of the second accommodating groove, and the lock portion having at least one external thread at the end of the fixing member is the second accommodating groove. The head fixed to the second plate body portion and held at the upper part of the fixing member is positioned on the upper surface of the movable circuit board, and the peripheral edge of the elastic film is the bottom surface of the movable circuit board. The movable circuit board and the like, which are bonded to the second plate body and are bonded to cover the bottom side of the second plate body, correspond to the probe in the elastic film, and extend to the peripheral edge of the elastic film. A plurality of conduction circuits for conducting the conductive needle on the side are provided.
The protective film is attached to the bottom side surface of the elastic membrane and is provided with a plurality of positioning holes corresponding to the probe locations. The conductive needle body protrudes to the bottom side of the protective film, the subject is provided on the bottom side of the protective film with a push gap, and the subject forms an electrical connection corresponding to the conductive needle body. A plurality of contacts that can be provided are provided.
The movable circuit board moves toward the probe holder to compress the elastic member, and the bottom surface of the movable circuit board moves the probe toward the subject. The probe holding portion holds and pushes the elastic film, and pushes and moves the protective film to which the elastic film is attached to the bottom side toward the subject, and the elastic film is moved toward the subject. Pushed and expanded, the probe forms a curved deformed state by receiving the pressing of the movable circuit board and the elastic recovery force of the elastic membrane, and after acquiring the conduction state signal of the contact, further. The movable circuit board moves in the opposite direction toward the probe holder to restore the elastic member to its original state, and the probe is pushed and moved by the elastic recovery force of the elastic membrane and the movable circuit. Moving toward the substrate, the probe recovers from a curved state to an upright state.

The improvement of the test probe holder structure to which the high frequency measurement of the present invention is applied is that a stretchable film, a protective film and a plurality of conductive needles on the protective film are provided between the plurality of probes and the plurality of contacts of the subject. No noise is generated when measuring a high-frequency signal subject, and at the same time, the contact force of multiple contacts of the probe and subject is appropriately secured, and a strong force is applied between the probe and multiple contacts of the subject. Alternatively, it is possible to avoid causing damage due to sudden wear.
These conductive needles are made of a relatively hard conductive metal material, are stronger and more resistant to damage, and even if these conductive needles are damaged, they are convenient to replace by replacing a relatively low-cost protective film. Moreover, the effect of reducing the maintenance cost can be achieved.

It is a side sectional view before measurement of the improvement of the test probe holder structure which applied the high frequency measurement of this invention. It is a partially enlarged view of FIG. It is a side sectional view at the time of measurement of the improvement of the test probe holder structure which applied the high frequency measurement of this invention. It is a partially enlarged view of FIG.

In order to make it easier to understand the technical means and its structure adopted by the present invention in order to achieve the above object and effect, the features and functions of the preferred embodiment of the present invention will be described together with the drawings.

Although it will be described with reference to FIGS. 1 to 4, FIG. 1 is a side sectional view of an improvement of the test probe holder structure to which the high frequency measurement of the present invention is applied before measurement, and FIG. 2 is a partially enlarged view of FIG. FIG. 3 is a side sectional view at the time of measurement, and FIG. 4 is a partially enlarged view thereof.
As can be seen from these figures, the improvement of the test probe holder structure to which the high frequency measurement of the present invention is applied is the probe holder 1, the movable circuit board 2, the fixing member 3, the elastic film 4, the protective film 5, and the reinforcing pad. The details of the main members and features thereof including No. 7 are as follows.

The probe holder 1 includes a first plate body 11 and a second plate body 12, and a plurality of probes 13 for positioning a plurality of probes 13 between the first plate body 11 and the second plate body 12. The first deformed space 110 and the second deformed space 120 through which the probe groove 10 is penetrated and correspond to each other between the first plate body 11 and the second plate body 12 and penetrate the probe groove 10 are provided. Each of the probes 13 is recessed and includes the needle body 131, and the upper portion of the needle body 131 has a probe head 132 extending outside the first plate body 11 and the needle body 131. The bottom portion has a probe holding portion 133 extending outside the second plate body 12, and the first plate body 11 has a plurality of first accommodating grooves 15 accommodating a plurality of elastic members 14. A plurality of second accommodating grooves 16 extending from the first plate 11 to the second accommodating groove 12 are provided on one side of the first accommodating groove 15.

The movable circuit board 2 is installed on the upper side of the first plate body 11, and the bottom side of the movable circuit board 2 holds the probe head 132, and the movable circuit board 2 and the first are. A plurality of perforations 21 having an expansion / contraction gap 20 with one plate body 11 and allowing a plurality of fixing members 3 to pass through are provided at locations corresponding to the second accommodating grooves 16, and the fixing members 3 are different. The height screw is limited according to the height of the member, and the rod body 31 of the fixing member 3 is installed at the first plate body 11 of the second accommodating groove 16 and the fixing member 3 is provided. The lock portion 32 having at least one external thread 321 at the end thereof is fixed to the second plate body 12 of the second accommodating groove 16, and the head 33 held in the upper part of the fixing member 3 is movable. It is positioned on the upper surface of the circuit board 2.

The elastic film 4 has a peripheral edge 41 bonded to the bottom surface of the movable circuit board 2 and is bonded so as to cover the bottom side of the second plate body 12.

The protective film 5 is attached to the bottom side surface of the elastic film 4, the protective film 5 is made of a polyimide fiber material, and a plurality of the protective film 5 corresponding to the 13 needles on the protective film 5. The positioning hole 50 is provided, and a plurality of conductive needles 51 are accommodated and positioned in the positioning hole 50, and the conductive needle 51 projects 0.2 mm toward the bottom side of the protective film 5 and the conductive needle The body 51 is made of a metal material having high hardness and conductivity, and a conductive gel 52 is provided on one side of the conductive needle body 51 facing the elastic film 4.
The conductive needle body 51 is fixed to the bottom side portion of the elastic membrane 4 by the conductive gel 52, and the conductive gel 52 is arranged in a one-to-one dot pattern, and the probe 13 on the other side of the elastic membrane 4 is arranged. The probe 13, the conductive gel 52, and the conductive needle 51 are arranged linearly, respectively, and the subject 6 is provided on the bottom side of the protective film 5 with a push gap 60 in between. Further, the subject 6 is provided with a plurality of contacts 61 capable of forming an electrical connection corresponding to the conductive needle body 51.
The movable circuit board 2 moves toward the probe holder 1 (in the direction of the arrow in FIG. 1) to compress the elastic member 14, and the bottom surface of the movable circuit board 2 is the probe. 13 is pushed and moved so as to move toward the subject 6, and the probe holding portion 133 holds and pushes the elastic film 4, and the protective film 4 is attached to the bottom side. The membrane 5 is pushed and moved toward the subject 6, the stretchable membrane 4 is pushed and moved to expand, and the probe 13 presses the movable circuit board 2 and elastically recovers the stretchable membrane 4. It receives and forms a curved deformed state, and the conductive gel 52 forms an electrical connection between the conductive needle 51 that maintains alignment with the probe 13 and the contact point on the subject 6.
After acquiring the continuity state signal of the contact 61, the movable circuit board 2 is further moved in the opposite direction of the probe holder 1, the elastic member 14 is restored to its original state, and the probe 13 is the probe 13. It is pushed and moved by the elastic recovery force of the elastic film 4 and moves toward the movable circuit board 2, and the probe 13 recovers from the curved state to the upright state.

The upper side surface of the movable circuit board 2 is covered with a reinforcing pad 7, the reinforcing pad 7 forms a structural reinforcement at a place where the movable circuit board 2 is attached, and the movable circuit board 2 is external. It is possible to avoid damage, cracking, and even rupture due to the pressure of the circuit board.

An anti-adhesive and non-slip tape 8 is provided between the elastic film 4 and the second plate body 12, and the anti-adhesive and non-slip tape 8 has the elastic film 4 at the bottom of the second plate body 12. It is tightly attached to the side so that the elastic membrane 4 does not slide by itself by performing a probe test, and the probe 13 is accurately aligned with the conductive needle body 51. After the elastic membrane 4 is supported by the probe 13, no viscosity is generated, and the elastic membrane 4 is smoothly moved to form an expanded state.

The distance of the expansion / contraction gap 20 is larger than the distance of the push gap 60, and a curved deformation state is formed when the probe 13 is pushed and moved between the movable circuit board 2 and the expansion / contraction film 4. The curved probe 13 can be secured so that the probe 13 is surely in contact with the conductive gel 52 on the conductive needle body 51.

The elastic member 14 is composed of a spring, one end of the elastic member 14 extends into the expansion / contraction gap 20, and the other end abuts on the upper surface of the second plate body 12.

During the actual application of the improvement of the test probe holder structure to which the high frequency measurement of the present invention is applied, a mechanical force is applied from top to bottom on the surface of the movable circuit board 2 or the reinforcing pad 7, and the movable circuit is applied. The substrate 2 moves toward the probe holder 1 after receiving a force, compresses the elastic member 14 held on the bottom side of the movable circuit board 2, and simultaneously causes the movable circuit board 2 to move. The bottom surface of the movable circuit board 2 held on the upper surface of the first plate 11 pushes the probe head 132 of the probe 13 so as to move toward the subject 6.
The probe holding portion 133 at the bottom of the probe 13 moves and presses toward the four elastic films, causes the elastic film 4 to move to the protective film 5, and changes the probe 13. Causes the elastic membrane 4 to expand and project, and the probe 13 receives the pressure of the movable circuit board 2 and the elastic recovery force of the elastic membrane 4 to form a deformed state of curvature (FIG. 3, FIG. 3). (See FIG. 4), the first deformation space 110 and the second deformation space 120 provide an appropriate deformation space to the probe 13 and deform it in a curved manner, and the probe 13 ruptures due to a lack of the curved space. The distance of the expansion / contraction gap 20 is made larger than the distance of the push gap 60 to avoid inviting and to be particularly explained.
In the process of moving the probe 13 downward, the conductive gel 52 is first held, the movable circuit board 2 is pushed and moved, and the probe 13 forms a curved state and has a pushing force. Adapting, the conductive needle 51 on the protective film 5 continues to transition, abuting on the contact 61 on the subject 6 to form an electrical connection, and conduction of the contact 61 on the subject 6. After acquiring the state signal, the conduction state signal of the contact 61 is conducted via a plurality of conductive wirings that are electrically connected to the conductive needle 51, the conductive gel 52, and the conductive gel 52 in the elastic film 4, respectively. Then, the conduction state signal is transmitted to a plurality of predetermined welding pads (not shown) on the bottom side of the movable circuit board 2 via the conductive wiring, and the plurality of predetermined welding pads are provided. It is transmitted to a test machine (not shown) provided in advance via a lead wire (not shown), and the test machine displays whether the contact of the subject 6 is in a conductive state or a disconnected state. ..

After measuring the subject 6 and acquiring the measurement data, the test machine moves the movable circuit board 2 in the opposite direction of the probe holder 1 to elastically reposition the elastic member 14. The probe 13 is pushed and moved by receiving the elastic recovery force of the elastic film 4, and moves toward the movable circuit board 2, and the probe 13 recovers from a curved state to an upright state. Then, in the process of the measurement, the probe 13 uses the elastic film 4, the protective film 5, and the conductive needle body 51 provided between the contact 61 of the subject 6 to obtain the subject 6 of the high frequency signal. No noise is generated during measurement.
At the same time, the contact force between the probe 13 and the contact 61 of the subject 6 is appropriately secured, and the contact force between the probe 13 and the contact 61 of the subject 6 causes damage due to strong force or sudden wear. This can be avoided, and the conductive needle 51 provided on the protective film 5 is stronger, less likely to be damaged, and longer than the method of growing conductive bumps on the thin film using the conventional MEMS process. Is relatively long and can be easily contacted by the contact 61 of the subject 6, and if the conductive needle 51 is unexpectedly damaged during the measurement process, it can be repaired by replacing the protective film 5. Moreover, the replacement of the protective film 5 is easier and lower in cost than the replacement of the elastic film 4, so that the user can easily solve the problem that the contact point at the time of measuring the subject 6 is damaged and the maintenance cost is reduced. It can save money and has extremely good practicality when the test probe holder of the present invention is applied to high frequency measurement.

The above is merely a preferred embodiment of the present invention and does not limit the scope of protection of the present invention. Therefore, any simple modification or uniform structural change performed by operating the specification and drawings of the present invention is performed. It should be included within the scope of protection of the present invention.

In summary, the present invention is a highly practical device because the effect and purpose can certainly be achieved when using the improved test probe holder structure to which the above high frequency measurement of the present invention is applied. Since it meets the application requirements for a utility model, it was filed in accordance with the law.

1 Needle holder 10 Needle groove 11 1st plate 12 2nd plate 13 Probe 131 Needle 132 Probe head 133 Needle holder 14 Elastic member 15 1st accommodating groove 16 2nd accommodating groove 2 Movable circuit board 20 Elastic gap 21 Perforation 3 Fixing member 31 Rod body 32 Lock part 321 External thread 33 Head 4 Elastic film 41 Peripheral 5 Protective film 50 Positioning hole 51 Conductive needle body 52 Conductive gel 6 Subject

Claims (3)

It is equipped with a probe holder, a movable circuit board, an elastic film, and a protective film.
The probe holder includes a first plate body and a second plate body, and a plurality of probe grooves for positioning a plurality of probes are penetrated between the first plate body and the second plate body, and a plurality of probe grooves are penetrated. The probe includes a needle body, the upper part of the needle body has a probe head extending outside the first plate body, and the bottom portion of the needle body holds the probe extending outside the second plate body. The first plate body has a portion and has a plurality of first accommodating grooves for accommodating a plurality of elastic members, and the first plate body to the second plate body are provided on one side of the first accommodating groove. A plurality of second accommodating grooves are provided to extend to
The movable circuit board is installed on the upper side of the first plate body, and the bottom side of the movable circuit board holds the probe head, and the movable circuit board and the first plate body are attached to each other. A plurality of perforations having an expansion / contraction gap between them and allowing a plurality of fixing members to pass through are provided at a portion corresponding to the second accommodating groove, and the rod body of the fixing member is the first of the second accommodating grooves. The lock portion installed at the plate body portion and having at least one external thread at the end of the fixing member is fixed to the second plate body portion of the second accommodating groove and has a head on the upper portion of the fixing member. Is positioned on the upper surface of the movable circuit board.
The elastic film has a peripheral edge bonded to the bottom surface of the movable circuit board and is bonded so as to cover the bottom side of the second plate body, and the elastic film corresponds to the needle in the elastic film. A plurality of conduction circuits that extend to the peripheral edge of the elastic membrane and conduct the movable circuit board and the conductive needle on the other side are provided.
The protective film is attached to the bottom side surface of the elastic membrane, and a plurality of positioning holes corresponding to the probe points are provided, and a plurality of conductive needle bodies are accommodated and positioned in the positioning holes, and the position is described. The conductive needle body protrudes to the bottom side of the protective film, the subject is provided on the bottom side of the protective film with a push gap, and the subject forms an electrical connection corresponding to the conductive needle body. The movable circuit board is provided with a plurality of contacts that can be made, the movable circuit board moves toward the probe holder, the elastic member is compressed, and the bottom surface of the movable circuit board is the needle. Is pushed and moved so as to move toward the subject, the probe holding portion holds and pushes the elastic membrane, and the protective film to which the elastic membrane is attached to the bottom side is attached to the subject. The elastic membrane is pushed and expanded toward, and the probe forms a curved deformed state under the pressure of the movable circuit board and the elastic recovery force of the elastic membrane. After forming an electric connection between the conductive needle body and the contact on the subject and acquiring the continuity state signal of the contact, the movable circuit board further moves in the opposite direction toward the needle holder, and the said. The elastic member is restored to its original state, the probe is pushed and moved by the elastic recovery force of the elastic membrane and moves toward the movable circuit board, and the probe is in an upright state from a curved state. Test probe holder structure that applies high-frequency measurement to recover to. Each of the conductive needles is fixed to the bottom side of the stretchable film via a conductive gel, and the conductive gels correspond to the positions of the needles on the other side of the stretchable film in a one-to-one dot arrangement. , The probe, the conductive gel, and the conductive needle are arranged linearly, and the conductive needle protrudes 0.2 mm from the bottom side of the protective film, and the protective film is a polyimide fiber. ) The test needle holder structure to which the high frequency measurement according to claim 1 is applied, which is formed of a material and the conductive needle body is made of a metal material having high hardness and conductivity. The distance of the stretchable gap is larger than the distance of the push gap, and when the probe is pushed between the movable circuit board and the stretchable membrane, a curved deformed state is formed, and the stretchable membrane and the stretchable membrane are formed. The test probe holder structure to which the high frequency measurement according to claim 1 is applied, in which an anti-adhesive and non-slip tape for tightly attaching the second plate to the second plate is provided.

Images