TWI789791B - Scraper mechanism, peeler and method of peeling periphery of thin film - Google Patents

Abstract

A scraper mechanism for peeler includes a scraper and a t least one movement auxiliary component. The scraper includes a tapered portion along an extending direction at its end. The movement auxiliary component is adjacent to the scraper.

Description

Scraper mechanism, film peeling machine and method for peeling off the edge of film material

The invention relates to a scraper mechanism, in particular to a scraper mechanism of a film stripping machine and a method for using the scraper mechanism to lift off the edge of a film material.

Press, in the semiconductor or electronic components industry, in some processes, it is necessary to attach a film (such as Mylar film) on the substrate to prevent dust from adhering, to achieve electrostatic protection or to block contact with the air. Nowadays, automated machines are widely used to tear off the film material on the substrate. Due to the thin film thickness and high viscosity of some products, if the film material is directly removed, it is easy to leave residual glue and even damage the electronic components on the surface of the substrate. Therefore, for products with such characteristics, the edge of the film material will be removed first The corners are lifted, and then the entire film material is torn off.

At present, the tools commonly used in the industry to lift the corners of the film material include knurling wheels and scrapers. For film materials with high viscosity, the effect of lifting the corners with a knurling wheel is not good. Although the method of lifting the corners of the film material with a scraper can meet the needs of most products, it faces the problem that the scraper is easy to scratch the surface of the substrate.

The invention aims to provide a scraper mechanism, which helps to solve the problem that the surface of the substrate is easily scratched in the way that the scraper lifts up the corners of the film material.

The scraper mechanism disclosed in the present invention includes a scraper and at least one moving auxiliary element. A tapering portion is formed at the end of the scraper along the extending direction. The movement assisting element is arranged adjacent to the scraper.

Another disclosed film stripping machine of the present invention includes a substrate carrier and a scraper mechanism, and the scraper mechanism is set corresponding to the substrate carrier. The scraper mechanism includes a bearing base, a scraper and at least one moving auxiliary element. The scraper is arranged on the bearing seat. The moving auxiliary component is arranged on the bearing base and adjacent to the scraper, and the bearing base can drive the scraper and the moving auxiliary component to move together.

The method for lifting off the edge of the film material attached to the substrate disclosed by the present invention further includes: placing the substrate with the film material attached on the substrate stage of the aforementioned film stripping machine; moving the scraper mechanism The auxiliary component is against the substrate or the film material; the bearing seat of the driving scraper mechanism moves relative to the substrate, so that the scraper extends between the substrate and the film material or between the two film layers of the film material, and then lifts off the edge of the film material .

The present invention further discloses a scraper mechanism, which includes a bearing seat, a scraper and at least one moving auxiliary element. The carrying seat includes a main body and an auxiliary body, and the auxiliary body is movably arranged on the main body. The scraper is arranged on the auxiliary body. The moving auxiliary element is arranged on the main body and adjacent to the scraper.

According to the scraper mechanism, film stripping machine and film edge lift-off method disclosed in the present invention, the film stripping machine includes a scraper mechanism, and the scraper mechanism includes a moving auxiliary element and is arranged adjacent to the scraper. In addition, according to the method for lifting the edge of the film material away from the substrate disclosed in the present invention, the moving auxiliary component of the scraper mechanism is first pressed against the substrate or the film material, and then the scraper and the moving auxiliary component are moved to extend into the substrate and the film material Between, and then lifted off the edge of the film material. In this way, the height of the scraper is maintained by moving the auxiliary element against the substrate or the film material, so that the tapered part of the scraper is aligned with the junction where the substrate and the film material are adhered, so that the film material and the substrate can be avoided when the scraper is inserted. scratched.

The above description of the disclosure and the following description of the implementation are used to demonstrate and explain the spirit and principle of the present invention, and provide a further explanation of the patent application scope of the present invention.

The detailed features and advantages of the present invention are described in detail below in the implementation mode, and its content is enough to make any person familiar with the related art understand the technical content of the present invention and implement it accordingly, and according to the content disclosed in this specification, the scope of the patent application and the drawings , anyone skilled in the art can easily understand the purpose and advantages of the present invention. The following examples are to further describe the concept of the present invention in detail, but not to limit the scope of the present invention in any way.

Please refer to FIG. 1 , which is a schematic diagram of a stripping machine according to an embodiment of the present invention. In this embodiment, the film stripping machine 1 includes a substrate stage 10 , a scraper mechanism 20 and a film stripping device 30 .

The substrate carrier 10 is, for example but not limited to, a metal carrier with vacuum suction holes formed on its surface, which is used for carrying the substrate. The substrate can be firmly adsorbed by the vacuum suction holes of the substrate stage 10 .

The scraper mechanism 20 is disposed corresponding to the substrate carrier 10 , and the scraper mechanism 20 includes a carrier seat 210 , a scraper 220 and a moving auxiliary element 230 . In the present embodiment, the scraper mechanism 20 is installed on a robot arm (not shown separately) and is normally located above the substrate stage 10 . The scraper 220 and the moving auxiliary element 230 are disposed on the bearing seat 210 , and the moving auxiliary element 230 is adjacent to the scraper 220 . Furthermore, the scraper 220 is fixed on the bearing base 210 , and the moving auxiliary element 230 is pivotally mounted on the bearing base 210 . The scraper mechanism 20 of this embodiment includes two moving auxiliary elements 230 , but the number of moving auxiliary elements 230 is not intended to limit the present invention.

The central axis of the moving assisting element 230 is substantially non-intersecting with the extending direction of the scraper 220 . Please also refer to FIG. 2 , which is a schematic diagram of the scraper mechanism in FIG. 1 . The scraper 220 forms a tapered portion 221 at the end along the extension direction D, and the central axis A of the moving auxiliary element 230 is substantially parallel to the extension direction D of the scraper 220 . At the tapering portion 221 , the thickness of the scraper 220 gradually decreases toward the end. In this embodiment, the moving auxiliary element 230 is a roller, and the central axis A is the rotation axis of the roller, but the invention is not limited thereto. In other embodiments, the moving assisting element may be an element made of a material with a low friction coefficient or good self-lubricating property, such as a Teflon plate, a polyoxymethylene (POM) bump, and the like.

The peeling device 30 is provided corresponding to the substrate stage 10 . FIG. 1 and FIG. 2 illustrate that the stripping device 30 includes an auxiliary tape moving component as an example, but the present invention is not limited thereto. In other embodiments, the peeling device 30 may include suction cups or grippers.

Please refer to FIG. 3 , which is a schematic front view of the scraper mechanism in FIG. 2 . In this embodiment, in the vertical direction H, the tapered portion 221 of the scraper 220 is flush with the bottom of the moving assisting element 230 . In addition, in the vertical direction H, the two moving assisting elements 230 are disposed at the same height, and the tapered part 221 of the scraper 220 is located between the two moving assisting elements 230 . In some embodiments, in the vertical direction, the tapered part of the scraper can be slightly lower than the bottom of the moving auxiliary element.

The following describes the process of peeling off the film material from the substrate. Please refer to FIG. 4 to FIG. 7 together, which are schematic diagrams of using the film stripping machine in FIG. 1 to peel off the film material from the substrate. As shown in FIG. 4 , the substrate 40 with the film material 41 attached to its surface is placed on the substrate stage 10 of the film stripping machine. The substrate 40 is for example but not limited to a printed circuit board, a silicon wafer or a glass substrate, and the film material 41 is for example but not limited to an ABF film, an adhesive film or a polyester (PET) film. The film material 41 can be a single-layer film (ie, a single film material) or a multi-layer film structure (ie, a stack of multiple films, such as a stack of Mylar film layers and ABF film layers).

After the substrate 40 is placed on the substrate stage 10 , the moving auxiliary component 230 of the scraper mechanism 20 is pressed against the substrate 40 . As shown in FIG. 5 , the carrier 210 of the scraper mechanism 20 can be driven by a motor (not shown) or manually to drive the scraper 220 to move together with the moving auxiliary component 230 , and then approach the upper surface of the substrate 40 . Furthermore, the upper surface of the substrate 40 can be divided into a central area 40a covered by the film material 41 and an edge area 40b not covered by the film material 41, and the moving auxiliary element 230 of the scraper mechanism 20 can be against the upper surface of the substrate 40 The edge area 40b. When the moving auxiliary element 230 abuts against the upper surface of the substrate 40 , the tapered portion 221 of the scraper 220 can just correspond to the junction where the substrate 40 and the film material 41 are adhered.

After the moving auxiliary component 230 of the scraper mechanism 20 abuts against the substrate 40 , the bearing seat 210 of the scraper mechanism 20 is driven to move relative to the substrate 40 to separate the edge of the film material 41 from the substrate 40 . As shown in FIG. 6 , the bearing seat 210 moves along a direction perpendicular to the central axis of the moving auxiliary component 230 , more specifically, it moves along the edge of the film material 41 . When the carrier 210 moves relative to the substrate 40 and the substrate stage 10 , the moving auxiliary component 230 of the scraper mechanism 20 rolls on the upper surface of the substrate 40 , and the scraper 220 extends between the substrate 40 and the film material 41 . The edge of the film material 41 is separated from the substrate 40 due to the penetration of the scraper 220 , that is, a small part of the edge of the film material 41 is torn off, while the rest of the film material 41 is still attached to the upper surface of the substrate 40 .

Next, use the film stripping device 30 to completely tear off the film material from the substrate. As shown in Figure 7, the film stripping device 30 (tape roller) adheres to a small part of the film material 41 that has been separated from the substrate 40, and the film stripping device 30 moves relative to the substrate 40, thereby driving the film material 41 to move along the film stripping device 30 The directions are continuously separated from the substrate 40 . A small portion of the film material 41 that has been separated from the substrate 40 can be used as the force point of the film stripping device 30 as the starting position of the film stripping operation, which helps to complete the film stripping operation more quickly and improves the film stripping quality. In an embodiment where the film stripping device 30 includes a suction cup, the small portion of the film material 41 that has been separated from the substrate 40 can be sucked by the suction cup. In an embodiment where the film stripping device 30 includes grippers, the corners of a small portion of the film material 41 that has been separated from the substrate 40 can be gripped by the grippers.

This embodiment discloses that the film stripping machine 1 shown in FIG. 1 is used to separate the film material 41 from the substrate 40 , but the present invention is not limited thereto. In other embodiments, when the film material 41 includes a multi-layer film structure, the film stripping machine 1 can be used to separate two film layers in the multi-layer film structure. That is to say, the scraper 220 can penetrate between two film layers of the film material 41 , and the two film layers are separated due to the penetration of the scraper 220 .

Please refer to FIG. 8 and FIG. 9 , wherein FIG. 8 is a schematic diagram of a scraper mechanism according to another embodiment of the present invention, and FIG. 9 is a schematic front view of the scraper mechanism in FIG. 8 . In this embodiment, the scraper mechanism 20A of the peeling machine includes a bearing seat 210A, a scraper 220 and a moving auxiliary component 230 . The bearing base 210A includes a main body 211 and a secondary body 212 , and the secondary body 212 is movably disposed on the main body 211 .

The scraper 220 is disposed on the auxiliary body 212 , the moving auxiliary element 230 is disposed on the main body 211 , and the moving auxiliary element 230 is adjacent to the scraper 220 . Further, the scraper 220 is fixed on the auxiliary body 212 , and the moving auxiliary element 230 is pivotally mounted on the main body 211 . The scraper mechanism 20A of this embodiment includes two moving assisting elements 230 , but the number of moving assisting elements 230 is not intended to limit the present invention. In addition, the main body 211 of this embodiment has a groove 213 extending from the bottom. The auxiliary body 212 is movably disposed in the groove 213 , and the groove 213 is interposed between the two moving auxiliary elements 230 .

The central axis of the moving assisting element 230 is substantially non-intersecting with the extending direction of the scraper 220 . The scraper 220 forms a tapered portion 221 at the end along the extension direction D, and the central axis A of the moving auxiliary element 230 is substantially parallel to the extension direction D of the scraper 220 . At the tapering portion 221 , the thickness of the scraper 220 gradually decreases toward the end. In this embodiment, the moving assisting element 230 is a roller pivotally mounted on the bearing seat 210A, and the central axis A is the rotation axis of the roller, but the invention is not limited thereto. In other embodiments, the moving assisting element may be an element made of a material with a low friction coefficient or good self-lubricating property, such as a Teflon plate, a polyoxymethylene (POM) bump, and the like. In addition, in the vertical direction H, the tapered portion 221 of the scraper 220 is slightly lower than the bottom of the moving auxiliary element 230 , but in other embodiments, the tapered portion of the scraper may not be at the same level as the bottom of the moving auxiliary element 230 .

10 to 13 are schematic diagrams of peeling off the film material from the substrate using the scraper mechanism of FIG. 8 . As shown in FIGS. 10 and 11 , after the substrate 40 is placed on the substrate stage, the main body 211 of the carrier 210A is driven down by a motor (not shown) or manually, so that the moving auxiliary element 230 of the scraper mechanism 20A touches it. Lean against the upper surface of the film material 41 adhered to the substrate 40 . When the moving auxiliary component 230 abuts against the upper surface of the film material 41 , the scraper 220 can just correspond to the junction where the substrate 40 and the film material 41 are adhered.

As shown in FIG. 12 , the auxiliary body 212 of the bearing seat 210A moves relative to the main body 211 along a direction parallel to the central axis (or along the extending direction of the scraper 220 ). The auxiliary body 212 moves to drive the scraper 220 close to the substrate 40 and the film material 41 , and makes the scraper 220 extend between the substrate 40 and the film material 41 . Next, as shown in FIG. 13 , the main body 211 of the bearing seat 210A moves on the film material 41 along a direction perpendicular to the central axis of the moving auxiliary component 230 , and more specifically, moves along the edge of the film material 41 . FIG. 13 shows that the bearing seat 210A moves from the position in FIG. 12 toward the corner of the film material 41 . When the carrier 210A moves relative to the substrate 40 , the moving auxiliary component 230 of the scraper mechanism 20A rolls on the upper surface of the film material 41 , and the scraper 220 extends between the substrate 40 and the film material 41 . The edge of the film material 41 is separated from the substrate 40 due to the penetration of the scraper 220 , that is, a small part of the edge of the film material 41 is torn off, while the rest of the film material 41 is still attached to the upper surface of the substrate 40 .

This embodiment discloses that the edge of the film material 41 is lifted off the substrate 40 by using the scraper mechanism 20A of FIG. 8 , but the invention is not limited thereto. In other embodiments, when the film material 41 includes a multi-layer film structure, the scraper mechanism 20A can be used to separate two film layers in the multi-layer film structure. That is to say, the scraper 220 can penetrate between two film layers of the film material 41 , and the two film layers are separated due to the penetration of the scraper 220 .

In summary, according to the scraper mechanism and the film stripping machine disclosed in the present invention, the film stripping machine includes a scraper mechanism. Wherein, the scraper mechanism includes a moving auxiliary element and is arranged adjacent to the scraper. In addition, according to the method of lifting off the edge of the film material disclosed in the present invention, the moving auxiliary element of the scraper mechanism is first pressed against the substrate, and then the scraper and the moving auxiliary element are moved to extend into the substrate and the film material or the film material. Between the two film layers, the edge of the film material is separated from the substrate or film layer. Since the central axis of the auxiliary moving element is substantially perpendicular to the moving direction of the scraper when it lifts off the edge of the film material, the auxiliary moving element can roll on the substrate. In this way, the height of the scraper in the vertical direction is maintained by moving the auxiliary element against the substrate or the film material, so that the tapered part (or blade) of the scraper is aligned with the junction where the substrate and the film material are adhered, so that when the scraper is inserted It can prevent the film material and the substrate from being scratched.

Although the present invention is disclosed by the aforementioned embodiments, they are not intended to limit the present invention. Without departing from the spirit and scope of the present invention, all changes and modifications are within the scope of patent protection of the present invention. For the scope of protection defined by the present invention, please refer to the appended scope of patent application.

1.....Peeling machine 10…..substrate carrier 20, 20A…..scraper mechanism 210, 210A…..bearing seat 211.....Subject 212..Auxiliary body 220…..scraper 221…..Taper 230…..moving auxiliary elements 231…..bottom 30…..Peeling device 40…..substrate 40a………..Central area 40b edge area 41…..Membrane material A…..central axis D…..extended direction H…..vertical direction

FIG. 1 is a schematic diagram of a film peeling machine according to an embodiment of the present invention. FIG. 2 is a schematic perspective view of the scraper mechanism in FIG. 1 . Fig. 3 is a schematic front view of the scraper mechanism in Fig. 2 . 4 to 7 are schematic diagrams of peeling off the film material from the substrate by using the film stripping machine shown in FIG. 1 . FIG. 8 is a schematic diagram of a scraper mechanism according to another embodiment of the present invention. FIG. 9 is a schematic front view of the scraper mechanism in FIG. 8 . 10 to 13 are schematic diagrams of peeling off the film material from the substrate using the scraper mechanism of FIG. 8 .

220…..scraper 221…..Taper 230…..moving auxiliary components A…..central axis D…..extended direction

Claims (23)

A scraper mechanism of a film peeling machine, comprising: a scraper, forming a tapered portion at the end along an extension direction; and at least one moving auxiliary element, disposed adjacent to the scraper, a central axis of the at least one moving auxiliary element substantially non-intersecting with an extending direction of the scraper. The scraper mechanism of a film peeling machine as claimed in claim 1, wherein the central axis of the at least one moving auxiliary element is substantially parallel to the extending direction of the scraper. The scraper mechanism of the film peeling machine as described in claim 1 further includes a bearing seat, wherein the scraper and the at least one movement assisting element are arranged on the bearing seat, and the bearing seat can drive the scraper and the at least one movement assistance Components move together. The scraper mechanism of the film peeling machine as claimed in claim 1, wherein the tapered part of the scraper is flush with the bottom of the at least one moving auxiliary element in a vertical direction. The scraper mechanism of the film peeling machine as described in claim 4, wherein the number of the at least one moving auxiliary element is two, the two moving auxiliary elements are arranged at the same height in the vertical direction, and the tapered portion of the scraper is located at Between the two mobile auxiliary elements. The scraper mechanism of the film peeling machine as claimed in claim 1, wherein the tapered part of the scraper is lower than the bottom of the at least one moving auxiliary element in a vertical direction. A film stripping machine, comprising: a substrate carrier; and a scraper mechanism, which is set corresponding to the substrate carrier, and the scraper mechanism includes: a bearing seat; a scraper disposed on the bearing seat; and at least one movement assisting element disposed on the bearing seat and adjacent to the scraper, a central axis of the at least one movement assisting element substantially non-intersecting to an extending direction of the scraper, and the The bearing seat can drive the scraper and the at least one moving auxiliary element to move together. The peeling machine according to claim 7, wherein the scraper forms a tapered portion at the end along an extending direction. The film peeling machine according to claim 7, wherein the central axis of the at least one moving auxiliary element is substantially parallel to the extending direction of the scraper. The film peeling machine as claimed in claim 8, wherein the tapered part of the scraper is flush with the bottom of the at least one moving auxiliary element in a vertical direction. The film peeling machine as claimed in claim 8, wherein the tapered part of the scraper is lower than the bottom of the at least one moving auxiliary element in a vertical direction. A method for peeling off an edge of a film material attached to a substrate by using the film stripping machine as described in claim 7, comprising: placing the substrate with the film material attached on the substrate stage ; the at least one moving auxiliary element of the scraper mechanism is pressed against the substrate or the film material; and the carrier seat of the scraper mechanism is driven to move relative to the substrate, so that the scraper extends into the substrate and the film material Between or between the two film layers of the film material, and then lifted off the edge of the film material. The method as claimed in claim 12, wherein when the carrier moves relative to the substrate, the at least one movement assisting element rolls on the substrate. The method according to claim 12, wherein when the carrier moves relative to the substrate, the at least one movement assisting element rolls on the film material. The method according to claim 12, wherein the carrier moves along the edge of the film material. A scraper mechanism of a film peeling machine, comprising: a bearing seat, including a main body and an auxiliary body, the auxiliary body is movably arranged on the main body; a scraper is arranged on the auxiliary body; and at least one moving auxiliary element is arranged It is arranged on the main body and adjacent to the scraper. The scraper mechanism of the film peeling machine according to claim 16, wherein a central axis of the at least one moving auxiliary element is substantially non-intersecting with an extending direction of the scraper. The scraper mechanism of a film peeling machine as claimed in claim 17, wherein the central axis of the at least one moving auxiliary element is substantially parallel to the extending direction of the scraper. The scraper mechanism of a film peeling machine as claimed in claim 17, wherein the auxiliary body can move relative to the main body along a direction substantially parallel to the central axis of the at least one moving auxiliary element. The scraper mechanism of the peeling machine according to claim 16, wherein the main body has a groove extending from the bottom, and the auxiliary body is arranged in the groove. The scraper mechanism of a film peeling machine as claimed in claim 20, wherein the number of the at least one moving assisting element is two, and the groove of the main body is interposed between the two moving assisting elements. The scraper mechanism of the film peeling machine according to claim 16, wherein the scraper forms a tapered portion at the end along an extending direction, and the tapered portion of the scraper is lower than the at least one moving auxiliary element in a vertical direction bottom of. The scraper mechanism of a film peeling machine as claimed in claim 16, wherein the at least one movement assisting element is rotatably disposed on the main body of the bearing seat.

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