TWI833152B - Peeler and scraper mechanism thereof - Google Patents

Abstract

A scraper mechanism includes a base, a scraper and an elastic member. The scraper is pivoted to the base. The elastic member connects the base with the scraper, and the elastic member can be deformed by movement of the scraper relative to the base.

Description

Film tearing machine and its scraper mechanism

The present invention relates to a scraper mechanism, in particular to a scraper mechanism of a film stripping machine.

According to the industry, in the semiconductor or electronic component industry, in some processes, it is necessary to attach multiple layers of film material to the substrate, with the outermost release mold being used to prevent dust from adhering, achieve electrostatic protection, or block contact with the air. The operation process of attaching film materials includes the film application process and the outermost release mold tearing process. In the film application process, the main film material of the multi-layer film is attached to the substrate, and above the main film material is the release film material that is subsequently torn off. In the film tearing process, the release film material is torn off to reveal the main film material.

At present, the industry has generally used automated equipment to remove film materials from substrates. However, the main problem of film material overflow may affect the equipment's film removal process. Specifically, the main film material in the film application process will be heated and then attached to the substrate. At this time, if the main film material has high fluidity, it may overflow from the edge of the release film material and cover the periphery of the release film material. area, making it difficult to separate the release film material from the main film material in the subsequent tearing process. In order to solve the above problem, one solution is to use laser to burn off the main overflowing film material after the film application process is completed. However, the laser energy may damage the circuit pattern on the substrate. Therefore, in addition to laser burning off the overflowing film material, In addition, it is necessary to develop other solution.

In view of the above problems, the present invention discloses a scraper mechanism, which substantially solves one or more problems caused by limitations and defects of the conventional technology. The invention also discloses a film tearing machine containing the scraper mechanism.

The scraper mechanism disclosed in the present invention includes a bearing seat, a cutter and an elastic member. The tool is pivotally connected to the bearing seat. The elastic member connects the bearing base and the cutter, and the elastic member can be deformed by the movement of the cutter relative to the bearing base.

The scraper mechanism also disclosed in the present invention includes a bearing base, a cutter and a path length adjustment member. The tool is pivotally connected to the bearing seat. The path length adjustment member is arranged on the bearing base, and the path length adjustment member is used to limit the path length of the tool relative to the bearing base.

The film tearing machine disclosed in the present invention includes the aforementioned scraper mechanism and a film tearing device. The scraper mechanism is used to separate the edge of the film material from another film material, and the film tearing device is used to completely separate the film material from the other film material.

According to the scraper mechanism and film tearing machine disclosed in the present invention, the cutter is connected to the bearing base through an elastic member, so the elastic member provides the cutter with a certain degree of mobility. For the case where the main film material overflows from the edge of the release film material, when the blade of the movable tool touches the main film material, the blade can keep moving along the surface of the main film material without inserting into the main film material. material inside. Then, when the blade of the tool touches the release film material, the tool can move downward through the elastic member and its own weight. The film extends under the release film material to separate the release film material from the main film material. Using the scraper mechanism of the present invention to tear off the film can eliminate the need to use laser to burn out the overflowing film material in advance.

The above description of the present disclosure and the following description of the embodiments are used to demonstrate and explain the spirit and principles of the present invention, and to provide further explanation of the patent application scope of the present invention.

1: Scraper mechanism

2: Film tearing machine

3: Film tearing device

10: Bearing seat

20: Knives

210: Connector

211: Groove

220:Blade

221: tapering tip

230: Column parts

231:Male and female matching structure

30: Elastic parts

40: Path length adjustment piece

410: Interference end

50:Limiting piece

A, B: membrane material

S:Substrate

Figure 1 is a schematic perspective view of a scraper mechanism according to an embodiment of the present invention.

FIG. 2 is a schematic cross-sectional view of the scraper mechanism of FIG. 1 .

Figures 3 to 6 are schematic diagrams of using a film tearing machine including the scraper mechanism in Figure 1 to remove film material from a substrate.

The detailed features and advantages of the present invention are described in detail below in the implementation mode. The content is sufficient to enable anyone skilled in the relevant art to understand the technical content of the present invention and implement it according to the content disclosed in this specification, the patent scope and the drawings. , anyone familiar with the relevant art can easily understand the relevant objectives and advantages of the present invention. The following examples further illustrate the aspects of the present invention in detail, but do not limit the scope of the present invention in any way.

Please refer to FIGS. 1 and 2 , wherein FIG. 1 is a schematic perspective view of a scraper mechanism according to an embodiment of the present invention, and FIG. 2 is a schematic cross-sectional view of the scraper mechanism of FIG. 1 . In this embodiment, the scraper mechanism 1 includes a bearing base 10, a cutter 20, an elastic 30 and path length adjustment piece 40. The cutter 20 is pivotally connected to the bearing base 10 , the elastic member 30 connects the bearing base 10 and the cutter 20 , and the path length adjustment member 40 can be disposed on the bearing base 10 . The bearing base 10 can be driven by a motor (not shown) or manually to drive the cutter 20 , the elastic member 30 and the path length adjustment member 40 to move together.

The tool 20 may include a connecting member 210 and a blade 220 fixed on the connecting member 210 . The connecting piece 210 is pivotally connected to the bearing base 10 , and the elastic member 30 connects the bearing base 10 and the connecting piece 210 so that the connecting piece 210 can rotate relative to the bearing base 10 . The blade 220 forms a tapered tip 221 at the end. At the tapering tip 221, the thickness of the blade 220 gradually decreases toward the end.

The elastic member 30 is disposed between the cutter 20 and the bearing base 10 . The elastic member 30 is, for example, but not limited to, a disc spring, one end of which is fixed to the bearing base 10 and the other end of which is fixed to the connecting member 210 of the tool 20 .

The path length adjustment member 40 is used to limit the path length of the tool 20 relative to the carrying base 10 . Specifically, the path length adjustment member 40 can move closer to or away from the tool 20 relative to the bearing base 10 , and the path length adjustment member 40 interferes with the tool 20 to limit the path length of the tool 20 . In this embodiment, the path length adjustment member 40 may include an interference end portion 410 with a bevel, and the cutter 20 may further include a cylindrical member 230. The columnar member 230 is located in the through groove 211 of the connecting member 210 , and the columnar member 230 has another slope matching the slope of the interference end portion 410 . The path length adjustment member 40 can be moved relative to the bearing base 10 and inserted into the cutter 20 to contact the cylindrical member 230 to form a male and female matching structure 231, and the interference end portion 410 is inserted into the through groove 211 by the width of the insertion slot 211. Adjust the movable degree of the tool 20. In this embodiment, the path length of the tool 20 is affected by the contact formed between the path length adjusting member 40 and the two inclined surfaces on the tool 20 respectively, but the invention is not limited thereto. In some embodiments, the path length can be adjusted by matching the concave and convex surfaces respectively formed on the path length adjusting member and the tool.

In addition, in this embodiment, the scraper mechanism 1 may further include a limiting member 50 fixed to the bearing base 10 . The cutter 20 is disposed between the carrying base 10 and the limiting member 50 , and the limiting member 50 is located on the path where the cutting tool 20 rotates relative to the carrying base 10 . More specifically, the limiting member 50 is a plate member, such as a metal plate member, which is inclined relative to the elastic member 30 . The connecting piece 210 of the tool 20 is located between the carrying base 10 and the limiting piece 50 . The extending direction of the blade 220 of the tool 20 and the extending direction of the limiting member 50 may be substantially parallel.

Figures 3 to 6 are schematic diagrams of using a film tearing machine including the scraper mechanism in Figure 1 to remove film material from a substrate. The film tearing machine 2 includes a scraper mechanism 1 (see Figures 3 to 6) and a film tearing device 3 (see Figure 6). The scraper mechanism 1 is used to separate the edge of film material A from film material B. The film tearing device 3 is used to completely separate film material A and film material B. The film material A is, for example, but not limited to, a Mylar film, and the film material B, for example, but is not limited to, is an ABF film, which is attached to the surface of the substrate S. Film material B overflows from the edge of film material A, and film material B surrounds the peripheral area of film material A or even covers the peripheral area of film material A.

As shown in Figures 2 and 3, the bearing base 10 of the scraper mechanism 1 can be driven by a motor or other power source (not shown separately) to drive the cutter 20, the elastic member 30 and the The path length adjustment member 40 moves together, and then approaches the film material A and the film material B. Through the movement of the carrier 10, the cutter 20 is brought close to the edge of the film material B along the surface of the substrate S, and then the blade 220 of the cutter 20 can contact the junction where the substrate S and the film material B are adhered.

As shown in FIGS. 2 and 4 , if the carrier base 10 is continuously driven to move, the blade 220 of the cutter 20 will move from the interface between the substrate S and the film material B to the surface of the film material B. When the blade 220 moves to the surface of the film material B, the blade 220 of the cutter 20 may break away from the surface of the film material B. At this time, the elastic member 30 deforms, and a gap occurs between the connecting piece 210 of the cutter 20 and the limiting member 50 . The deformed elastic member 30 then releases elastic potential energy to recover, and the elastic potential energy released by the elastic member 30 drives the cutter 20 to rotate slightly relative to the bearing base 10, thereby returning the blade 220 to the surface of the film material B. When the film material B has a high surface hardness, the cutter 20 has a certain degree of mobility through the spring, and therefore can keep moving along the surface of the film material B without being inserted into the interior of the film material B.

In addition, the path length of the tool 20 rotating relative to the carrying base 10 (ie, the degree of up and down shaking) can be adjusted by the path length adjustment member 40 . For example, referring to FIGS. 2 and 4 , when the surface hardness of membrane material B is relatively high or the thickness is relatively thick, the operator can pull the path length adjustment member 40 to move the interference end 410 away from the through groove 211 . At this time, the contact area of the cylindrical member 230 between the inclined surface of the interference end 410 and the sloping surface of the cylindrical member 230 is small, so the tool 20 has a longer rotation path relative to the bearing base 10 and has a greater degree of mobility. This allows the tapered tip 221 of the blade 220 to Can be lifted to higher heights.

As shown in FIGS. 2 and 5 , if the carrier base 10 is continuously driven to move, the blade 220 of the cutter 20 will move along the surface of the film material B and reach the junction of the film materials A and B. At the junction of film materials A and B, film material A is not covered by film material B, or the thickness of film material B covering film material A is very thin. Due to the mobility of the cutter 20, when the film material A is relatively soft, the cutter 20 can move downward through the elastic member 30 and its own weight, so that the blade 220 extends into the film material A from the junction of the film materials A and B. below. Due to the penetration of the blade 220, the edge of the film material A is separated from the film material B, that is, a small part of the edge of the film material A is torn off, while the remaining part of the film material A is still attached to the surface of the film material B.

As shown in Figures 2 and 6, the film tearing device 3 (such as a suction cup or tape roller) is attached to a small portion of the film material A that has been separated from the film material B, and the film tearing device 3 moves to drive the film material A along the tear film The moving direction of the device 3 is continuously separated from the film material B.

To sum up, according to the scraper mechanism and film tearing machine disclosed in the present invention, the cutter is connected to the bearing base through an elastic member, so the elastic member provides the cutter with a certain degree of mobility. For the case where the main film material overflows from the edge of the release film material, when the blade of the movable tool touches the main film material, the blade can keep moving along the surface of the main film material without inserting into the main film material. material inside. Then, when the blade of the tool touches the release film material, the tool can move downward through the elastic member and its own weight to extend the blade under the release film material, thereby separating the release film material from the main film material. separation. Using the scraper mechanism of the present invention to tear off the film can eliminate the need to use laser to burn out the overflowing film material in advance.

It will be apparent to those of ordinary skill in the art that various modifications and variations can be made in the present invention without departing from the scope of the invention. Therefore, the present invention covers the modifications and changes provided by the present invention, and these modifications and changes fall within the patent scope of the present application.

1: Scraper mechanism

10: Bearing seat

20: Knives

210: Connector

220:Blade

221: tapering tip

30: Elastic parts

40: Path length adjustment piece

50:Limiting piece

Claims (8)

A scraper mechanism includes: a bearing base; a cutter, which is pivotally connected to the bearing base; and an elastic member, which connects the bearing base and the cutter, and the elastic piece can be deformed by the movement of the cutter relative to the bearing base; and a path length adjustment member disposed on the bearing seat; wherein the tool has a through groove and a first slope located in the through groove, and the path length adjustment member includes an interference end portion with a second slope, The interference end portion is movably disposed in the through groove so that the first inclined surface contacts the second inclined surface, and the rotatable path length of the tool relative to the bearing seat is adjusted by the movement of the interference end portion. The scraper mechanism of claim 1, wherein the cutter includes a connecting piece and a blade fixed on the connecting piece, the connecting piece is pivotally connected to the carrying base, and the elastic member connects the carrying base and the connecting piece. The scraper mechanism according to claim 1 further includes a limiting piece fixed on the bearing base, wherein the cutter is disposed between the bearing base and the limiting piece, and the limiting piece is located between the cutter and the bearing. on the path of activity. The scraper mechanism as claimed in claim 3, wherein the extending direction of a blade of the tool is parallel to the extending direction of the limiting member. The scraper mechanism of claim 1, wherein the cutter includes a connecting piece, a blade fixed on the connecting piece, and a columnar member disposed on the connecting piece, the connecting piece is pivotally connected to the bearing seat, and the elastic A piece connects the bearing seat and the connecting piece, and the columnar piece is located in the through groove of the connecting piece and has the first slope. A scraper mechanism includes: a bearing base; a cutter pivoted to the bearing base; and a path length adjustment member disposed on the bearing base; wherein the cutter has a through groove and a first groove located in the through groove. An inclined surface, the path length adjustment member includes an interference end portion with a second inclined surface, the interference end portion is movably disposed in the through groove so that the first inclined surface contacts the second inclined surface, and through the interference The movement of the end adjusts the length of the rotatable path of the tool relative to the carrier. The scraper mechanism of claim 6, wherein the cutter includes a connecting piece, a blade fixed on the connecting piece, and a columnar member disposed on the connecting piece, the connecting piece is pivotally connected to the bearing seat, and the column The shape piece is located in the through groove of the connecting piece and has the first slope. A film tearing machine, including: a scraper mechanism as described in any one of claims 1 to 7, used to separate the edge of a first film material from a second film material; and a film tearing device, used to separate the edge of the first film material from the second film material. The first film material is completely separated from the second film material.

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