TWI789571B - Film laminator and film lamination method - Google Patents

Abstract

A film laminator includes a lower cavity, an upper cavity, an E-chuck and a film deflection component. The upper cavity is movable to seal with the lower cavity. The E-chuck is disposed in the upper cavity. The film bending component is arranged in the upper cavity. The film bending component is movable relative to the upper cavity to approach or move away from the lower cavity.

Description

Laminating machine and laminating method

The invention relates to a film laminating machine and a film laminating method, in particular to a film laminating machine and a film laminating method capable of preventing glue overflow.

By the way, in the semiconductor or electronic component industry, it is necessary to attach a film (including adhesive film, Mylar film) on the substrate as a construction layer or an adhesive in the subsequent process. Generally speaking, the film material is cut and attached to the substrate, and the film material is heated synchronously to make it have a certain degree of fluidity to fill and bond the substrate.

However, when the film material is heated and pressurized, the film material in a hot-melt state tends to overflow from the edge of the substrate. This overflow situation will lead to uneven height of the film material or pollute the machine, which will affect the film yield and Film quality.

In view of the above problems, the present invention discloses a film laminating machine and a film laminating method, which help to solve the problem of glue overflow of the heated film material during film lamination.

The film laminating machine disclosed in the present invention includes a lower chamber, an upper chamber, an electrostatic chuck and a film material deflection element. The upper cavity can move relative to the lower cavity to be in close contact with the lower cavity. The electrostatic chuck is arranged on the upper cavity. The film material deflection element is arranged in the upper cavity, and the film material deflection element can move relative to the upper cavity to approach or leave the lower cavity.

The film sticking method disclosed in the present invention includes: using an electrostatic chuck to absorb a first film material and a second film material of different materials, wherein the size of the first film material is larger than the size of the second film material, and the first film material is between Between the electrostatic chuck and the second film material; making the peripheral part of the first film material deflect so as to cover the base material and the side of the second film material; and attaching the second film material to a base material.

According to the film laminating machine disclosed in the present invention, the film deflection element can move relative to the upper cavity to approach or move away from the lower cavity. When performing the film sticking procedure, the deflection of the peripheral portion of the first film material can be achieved by pushing the film material deflection element against the first film material.

According to the film sticking method disclosed in the present invention, the electrostatic chuck will absorb the first film material and the second film material, wherein the second film material is the film material to be attached on the surface of the substrate. Since the size of the first film material is larger than that of the second film material, the side of the second film material can be covered by bending the peripheral portion of the first film material. Thereby, when the second film material is heated to have fluidity, the second film material will be prevented from overflowing from the edge of the base material due to the blockage of the peripheral part of the first film material, effectively solving the problem of adhesive overflow of the pasting film.

The above description of the disclosure and the following description of the implementation are used to demonstrate and explain the spirit and principle of the present invention, and provide a further explanation of the patent application scope of the present invention.

The detailed features and advantages of the present invention are described in detail below in the implementation mode, and its content is enough to make any person familiar with the related art understand the technical content of the present invention and implement it accordingly, and according to the content disclosed in this specification, the scope of the patent application and the drawings , anyone skilled in the art can easily understand the purpose and advantages of the present invention. The following examples further describe the concepts of the present invention in detail, but do not limit the scope of the present invention in any way.

Please refer to FIG. 1 , which is a schematic diagram of a film cutting machine and a film laminating machine according to an embodiment of the present invention. In this embodiment, the film attaching machine 1 is used to pick up the film material cut by the film cutting machine 2 and attach the film material to the substrate. The film laminating machine 1 includes a lower cavity 10 , an upper cavity 20 , an electrostatic chuck 30 , an air bag membrane 40 and a heater 50 . The film cutting machine 2 is connected to a working platform 3, which is used to carry the film material cut by the cutter (not shown) inside the film cutting machine 2.

The lower cavity 10 is provided with a carrying platform for carrying a substrate, such as a wafer or a printed circuit board. The upper chamber 20 can move relative to the lower chamber 10, and the lower chamber 10 can be sealed with the upper chamber 20 to jointly form a closed chamber.

The electrostatic chuck 30 , the airbag membrane 40 and the heater 50 are disposed on the upper cavity 20 . In detail, the edge of the airbag membrane 40 and the heater 50 are fixed on the inner wall of the upper cavity 20 . The electrostatic chuck 30 is disposed on the upper cavity 20 and connected to the airbag membrane 40 . The electrostatic chuck 30 and the heater 50 are respectively located on opposite sides of the airbag membrane 40 , and the electrostatic chuck 30 faces the lower cavity 10 .

Through the upper cavity 20 moving above the working platform 3 , the electrostatic chuck 30 can absorb the film material placed on the working platform 3 . Moreover, by moving the upper chamber 20 above the lower chamber 10 , the upper chamber 20 and the electrostatic chuck 30 can attach the film material to the surface of the substrate.

A film sticking method according to an embodiment of the present invention will be described below. Please refer to FIG. 2 to FIG. 6 together, wherein FIG. 2 is a schematic flow chart of a film sticking method according to an embodiment of the present invention, and FIGS. 3 to 6 are schematic views of the film sticking method executed by the film sticking machine in FIG. 1 . In this embodiment, the film lamination method can be performed via the film lamination machine 1, and the film lamination method includes steps S11-S15.

Step S11 is to provide the first film material 201 and the second film material 202 . Please also refer to FIG. 1 and FIG. 3 , the film cutting machine 2 in FIG. 1 can transport the first film material 201 and the second film material 202 to the working platform 3 . The first film material 201 is, for example but not limited to, a non-hot-melt film material, such as a polyethylene terephthalate (PET) film. The second film material 202 is, for example but not limited to, a film material of a hot-melt material, such as an adhesive material that has a certain degree of fluidity after heating, such as an ABF material or a photoresist film. In this embodiment, the size of the first film material 201 is greater than the size of the second film material 202, more specifically the area of the first film material 201 is greater than the area of the second film material 202, so that the second film material 202 The edge may be surrounded by the edge of the first film material 201 . The "hot-melt" and "non-hot-melt" materials described here refer to two materials with relatively low and relatively high heat-fusibility respectively at the same temperature, which means that the heat-melt of the first film material 201 The property is less than the heat-fusibility of the second film material 202, but it is not limited that the first film material 201 does not have heat-fusibility at any temperature.

Step S12 is to suck the first film material 201 and the second film material 202 with the electrostatic chuck 30 . As shown in FIG. 3 , the electrostatic chuck 30 sucks the first film material 201 and the second film material 202 . After the suction is completed, the first film material 201 is interposed between the electrostatic chuck 30 and the second film material 202 .

In this embodiment, the actions of the electrostatic chuck 30 to suck the first film material 201 and the second film material 202 are performed separately. Specifically, the working platform 3 of the film cutting machine 2 can have two placement areas, and the film cutting machine 2 can transport the cut first film material 201 and the second film material 202 to the two placement areas respectively. , or the film cutting machine 2 transports the first film material 201 and the second film material 202 to the working platform 3 at different time points at preset time intervals. The upper cavity 20 first moves to the top of the placement area carrying the first film material 201, and moves down to allow the electrostatic chuck 30 to absorb the first film material 201; then, the upper cavity body 20 moves to the placement area carrying the second film material 202. The electrostatic chuck 30 that already has adsorbed the first film material 201 can absorb the second film material 202, and move down to allow the second film material 202 to be picked up. In some embodiments, the first film material 201 and the second film material 202 transported by the film cutting machine 2 to the working platform 3 can be stacked to form a multi-layer film, and then the electrostatic chuck 30 simultaneously sucks the first film material 201 and the second film material 202.

Step S13 is to seal the upper chamber 20 and the lower chamber 10 to form a sealed chamber S, and to evacuate the sealed chamber S. As shown in FIG. 4 , when the lower cavity 10 and the upper cavity 20 are tightly sealed, the substrate 100 and the electrostatic chuck 30 on which the first film material 201 and the second film material 202 are adsorbed are located in the chamber S. The lower cavity 10 or the upper cavity 20 has a suction hole H, and the air in the chamber S is sucked out from the suction hole H, so that the inside of the chamber S forms a vacuum state. Vacuumizing the chamber S can prevent air bubbles remaining inside the second film material 202 , which helps to improve the quality of the film during subsequent film bonding.

Step S14 is to make the peripheral part of the first film material 201 bend to cover the side of the second film material 202 . As shown in Figure 5, in this embodiment, because the size of the first film material 201 is relatively large and is located above the second film material 202, the peripheral portion 2011 of the first film material 201 will sag due to the influence of its own gravity, that is, Gravity will naturally deflect the peripheral portion 2011 downward. Depending on the degree of deflection, the peripheral portion 2011 can be located around the second film material 202 or contact the edge of the second film material 202, thereby covering the side of the second film material 202, and the degree of deflection can depend on the first film material 202. The material of film material 201. In other embodiments, additional mechanism elements can be used to push against the peripheral portion 2011 of the first film material 201 to make the deflection more obvious.

Step S15 is to attach the second film material 202 to the substrate 100 through the electrostatic chuck 30 . As shown in FIG. 6 , a driving mechanism (such as a screw, a cylinder or a stepping motor, not shown) moves the electrostatic chuck 30 down relative to the upper cavity 20 to approach the lower cavity 10 . Air is introduced from the outside into the upper cavity 20 of the film laminating machine 1 to inflate the airbag film 40 to push the electrostatic chuck 30 , and then attach the second film material 202 to the surface of the substrate 100 . The airbag membrane 40 can be further inflated by increasing the air pressure and volume of the gas in the upper cavity 20 to apply force to push the electrostatic chuck 30 , so that the second film material 202 can be attached more firmly. The heater 50 of the film laminating machine 1 heats the second film material 202 to become a flowable hot-melt state, thereby increasing the adhesive strength between the second film material 202 and the surface of the substrate 100 . After the attachment of the second film material 202 is completed, the first film material 201 can be removed. In this embodiment, the peripheral portion 2011 of the first film material 201 can cover the side of the second film material 202 to help prevent the hot-melt second film material 202 from overflowing from the edge of the substrate 100 .

In addition, since the first film material 201 is made of a material different from that of the second film material 202, when the second film material 202 is heated into a flowable hot-melt state, the first film material 201 remains in a non-hot-melt state, so It can effectively block the flow of the second film material 202 in the horizontal direction. The "different materials" described here refer to the obvious differences in the heat-fusibility of the first film material 201 and the second film material 202, for example, two PET films with different degrees of heat-fusibility at the same temperature, and are not limited to the first film material 202. The first film material 201 and the second film material 202 must be made of different materials.

Fig. 7 is a schematic diagram of a film laminating machine according to another embodiment of the present invention. In this embodiment, the film laminating machine 1 a includes a lower chamber 10 , an upper chamber 20 , an electrostatic chuck 30 , an airbag film 40 , a heater 50 and a film material deflection element 60 . For the description of the lower cavity 10 , the upper cavity 20 , the electrostatic chuck 30 , the airbag film 40 and the heater 50 , please refer to the content of the laminator shown in FIG. 1 , and these components will not be repeated below.

The film deflection element 60 is disposed on the upper cavity 20 and is movable relative to the upper cavity 20 to approach or move away from the lower cavity 10 . In detail, the membrane deflection element 60 of this embodiment is an annular inflatable ring, and the electrostatic chuck 30 and the membrane deflection element 60 are respectively located on opposite sides of the airbag membrane 40, in other words the heater 50 and the membrane material The flexure element 60 is located on the same side of the airbag membrane 40 .

FIG. 8 is a schematic flowchart of a film sticking method according to another embodiment of the present invention. 9 to 11 are schematic diagrams of the film laminating method performed by the film laminating machine in FIG. 7 . In this embodiment, the film lamination method can be performed via the film lamination machine 1a, and the film lamination method includes steps S21-S26.

Step S21 is to provide the first film material 201 and the second film material 202 . This step is similar to step S11 of the foregoing embodiment, so it is not repeated here.

Step S22 is to suck the first film material 201 and the second film material 202 with the electrostatic chuck 30 . This step is similar to step S12 of the foregoing embodiment, so it is not repeated here.

Step S23 is to seal the upper chamber 20 and the lower chamber 10 to form a sealed chamber S, and to evacuate the sealed chamber S. This step is similar to step S13 of the foregoing embodiment, so it is not repeated here.

Step S24 is to pre-attach the second film material 202 to the substrate 100 . As shown in FIG. 9 , a driving mechanism (such as a screw, a cylinder or a stepping motor, not shown) moves the electrostatic chuck 30 down relative to the upper cavity 20 to approach the lower cavity 10 . Gas is introduced from the outside into the upper cavity 20 of the film laminating machine 1 to inflate the airbag film 40 to push the electrostatic chuck 30 , and then make the second film material 202 contact the surface of the substrate 100 .

Step S25 is to make the peripheral portion of the first film material 201 bend to cover the side of the second film material 202 . As shown in FIG. 10 , gas is introduced into the inner space 610 of the film material flexure element 60 (annular inflatable ring) to inflate the film material flexure element 60 . The expanded film material deflection element 60 pushes against the first film material 201 , so that the peripheral portion 2011 of the first film material 201 is deflected. Since the inside of the film material flexing element 60 is not connected to the cavity of the upper cavity 20, the gas passed into the film material flexing element 60 will not affect the air pressure and gas volume in the upper cavity 20, so The airbag membrane 40 will not be inflated or deflated due to inflation of the membrane deflection element 60 . The expanded film material deflection element 60 pushes against the peripheral portion 2011 of the first film material 201 , so that the peripheral portion 2011 is deflected to cover the second film material 202 and the sides of the substrate 100 . 7 to 10 illustrate that the heater 50 and the film material deflection element 60 are located on the same side of the airbag film 40, so as to prevent the film material deflection element 60 from being ruptured due to excessive expansion when inflated, but the present invention does not rely on This is the limit. In other embodiments, the electrostatic chuck 30 and the film deflection element 60 are located on the same side of the airbag film 40 .

Step S26 is to attach the second film material 202 to the substrate 100 through the electrostatic chuck 30 . As shown in FIG. 11 , further gas is passed into the upper cavity 20 to make the airbag membrane 40 more inflated, so that the airbag membrane 40 exerts a force F to push the electrostatic chuck 30, so that the second film material 202 is more firmly attached to the base. Material 100 surface. The heater 50 heats the second film material 202 to make it into a flowable hot-melt state, thereby increasing the adhesive strength between the second film material 202 and the surface of the substrate 100 . In this embodiment, by deflecting the peripheral portion 2011 of the first film material 201 with the film material deflection member 60 to cover the sides of the second film material 202, it is helpful to prevent the second film material 202 from being hot-melt. overflow from the edge of the substrate 100. After the second film material 202 is pasted on the surface of the substrate 100, the first film material 201 can be removed.

To sum up, the film laminating machine disclosed in the present invention includes a film material deflection element, which can move relative to the upper chamber to approach or move away from the lower chamber. When performing the film sticking procedure, the deflection of the peripheral portion of the first film material can be achieved by pushing the film material deflection element against the first film material.

In the film sticking method disclosed in the present invention, the electrostatic chuck will absorb the first film material and the second film material, wherein the second film material is the film material to be attached on the surface of the substrate. Since the size of the first film material is larger than that of the second film material, the side of the second film material can be covered by bending the peripheral portion of the first film material. Thereby, when the second film material is heated to have fluidity, the second film material will be prevented from overflowing from the edge of the base material due to the blockage of the peripheral part of the first film material, effectively solving the problem of adhesive overflow of the pasting film.

Although the present invention is disclosed above with the aforementioned embodiments, these embodiments are not intended to limit the present invention. Without departing from the spirit and scope of the present invention, all changes and modifications are within the scope of patent protection of the present invention. For the scope of protection defined by the present invention, please refer to the appended scope of patent application.

1, 1a: Laminating machine 2: film cutting machine 3: Working platform 10: Lower cavity 20: Upper cavity S: chamber 30: Electrostatic chuck 40: air bag membrane 50: heater 60: Membrane material deflection element 610: interior space 100: Substrate 201: The first film material 2011: Peripheral part 202: Second film material H: air hole F: force S11~S15, S21~S26: steps

FIG. 1 is a schematic diagram of a film cutting machine and a film laminating machine according to an embodiment of the present invention. FIG. 2 is a schematic flowchart of a film sticking method according to an embodiment of the present invention. 3 to 6 are schematic diagrams of the film laminating method performed by the film laminating machine in FIG. 1 . Fig. 7 is a schematic diagram of a film laminating machine according to another embodiment of the present invention. FIG. 8 is a schematic flowchart of a film sticking method according to another embodiment of the present invention. 9 to 11 are schematic diagrams of the film laminating method performed by the film laminating machine in FIG. 7 .

1a: Laminating machine

10: Lower cavity

20: Upper cavity

30: Electrostatic chuck

40: air bag membrane

50: heater

60: Membrane material deflection element

Claims (11)

A film sticking machine, comprising: a lower cavity; an upper cavity, which can move relative to the lower cavity to closely fit with the lower cavity; an electrostatic chuck, which is arranged on the upper cavity, and is used to absorb A laminate of a first film material and a second film material, wherein the first film material is interposed between the electrostatic chuck and the second film material; and a film material flexing element is arranged in the upper cavity, The film material deflection element can move relative to the upper cavity to approach or move away from the lower cavity, and the film material deflection element is an annular inflatable ring, and the film material deflection element is used to push against the first film material The peripheral portion of the first film material is deflected, and then the deflected peripheral portion of the first film material covers the side of the second film material. The film laminating machine as described in Claim 1 further includes an airbag film disposed on the upper chamber, wherein the electrostatic chuck is connected to the airbag film and disposed on the upper chamber. The film laminating machine according to claim 2, wherein the electrostatic chuck and the annular inflatable ring are respectively located on two opposite sides of the airbag membrane. The film laminating machine as described in Claim 2 further includes a heater, and the electrostatic chuck and the heater are respectively located on two opposite sides of the airbag film. The film laminating machine as described in Claim 1, wherein the electrostatic chuck is used to absorb a plurality of film materials of different sizes. A film sticking method, comprising: providing a first film material and a second film material, wherein the size of the first film material is larger than the size of the second film material; sucking the first film material and the second film material with an electrostatic chuck, wherein the first film material is interposed between the electrostatic chuck and the second film material; making a film material deflection element and the first film material approaching, so that the peripheral part of the first film material is deflected by the film material deflection element pushing against the first film material, and then the peripheral part of the deflected first film material covers the second film The side edge of the material, wherein the flexible element of the film material is an annular inflatable ring; and the second film material is attached to a base material. The film sticking method as described in Claim 6, wherein the first film material is a non-hot-melt material, and the second film material is a hot-melt material. The film sticking method as described in Claim 6, wherein the electrostatic chuck is arranged in an upper cavity, and the base material is carried in a lower cavity, and the film sticking method further includes: making the upper cavity and the lower cavity close together to form a closed chamber, and the base material and the electrostatic chuck adsorbed with the first film material and the second film material are located in the closed chamber; and vacuuming the closed chamber. The film sticking method as described in claim 6, wherein attaching the second film material to the substrate comprises: heating the second film material; and pushing the electrostatic chuck to attach the second film material on the substrate. The film sticking method as described in claim 6, wherein using the electrostatic chuck to absorb the first film material and the second film material includes: using the electrostatic chuck to absorb the first film material; and using the electrostatic chuck to absorb the first film material The electrostatic chuck absorbs the second film material. The film sticking method as described in claim 6, wherein using the electrostatic chuck to absorb the first film material and the second film material includes: using the electrostatic chuck to absorb a plurality of materials composed of the first film material and the second film material layer film.

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