TWI783744B - Probe structure in cantilever type - Google Patents

Abstract

The present invention provides a probe structure in cantilever type, which includes a fixing segment, a stroke segment connected to the fixed segment, and a testing segment that is connected to the stroke segment. The stroke segment has a first characteristic portion, an elastic portion, and a second characteristic portion, which are sequentially arranged in a direction away from the fixing segment. The first characteristic portion and the second characteristic portion face toward each other and are spaced apart from each other. The testing segment is connected to the second characteristic portion. When a free end of the testing segment of the probe structure abuts against a device under test (DUT) so as to move the second characteristic portion to contact the first characteristic portion by deformation of the elastic portion, the probe structure forms a signal transmission path that is defined from the free end to the fixing segment by sequentially traveling along the second characteristic portion, and the first characteristic portion.

Description

Cantilever Probe Structure

The invention relates to a probe, in particular to a cantilever probe structure.

Existing cantilever probes (such as: Taiwan Patent No. I429915) have long cantilever lengths, resulting in long signal transmission paths, so it is difficult for existing cantilever probes to be used in high-speed or high-frequency applications. Signal test. Therefore, the inventor believes that the above-mentioned defects can be improved, Naite devoted himself to research and combined with the application of scientific principles, and finally proposed an invention with reasonable design and effective improvement of the above-mentioned defects.

The embodiment of the present invention is to provide a cantilever probe structure, which can effectively improve the possible defects of the existing cantilever probes.

The embodiment of the present invention discloses a cantilever probe structure, which includes: a fixed section for welding on a board; a stroke section connected to the fixed section; wherein, the stroke section faces away from the fixed section The direction of the segment has a first characteristic portion, an elastic portion, and a second characteristic portion in sequence, and the first characteristic portion and the second characteristic portion face each other and are arranged at intervals; and a needle measuring segment, connected In the second characteristic part of the stroke section, and a free end of the probe section is used to abut against an object to be tested; wherein, the cantilever probe structure is defined by the free end sequentially along the probing section, the second characteristic portion, the elastic portion, and the first characteristic portion to the A first signal transmission path of the fixed section; wherein, when the free end of the cantilever probe structure abuts against the object under test, the elastic part is deformed to make the second characteristic part contact At the first characteristic part, the cantilever probe structure is formed with the free end sequentially passing through the probe section, the second characteristic part, and the first characteristic part to the A second signal transmission path of the fixed segment.

In summary, the cantilever probe structure disclosed in the embodiments of the present invention effectively optimizes the The overall force-bearing structure of the cantilever probe structure, and greatly shorten the path length of signal transmission, thereby providing a shorter transmission path between the board and the object under test (that is, the first Both the signal transmission path and the second signal transmission path are shorter than the transmission path of the existing cantilever probe).

Furthermore, the cantilever probe structure disclosed in the embodiment of the present invention can be in contact with the first characteristic part through the second characteristic part, so that the signal between the board and the object under test can be A shorter path (that is, the second signal transmission path) is used to reduce the loss caused by the path, so as to provide better test performance.

In order to further understand the characteristics and technical content of the present invention, please refer to the following detailed description and drawings related to the present invention, but these descriptions and drawings are only used to illustrate the present invention, rather than to make any statement on the scope of protection of the present invention. limit.

100: Cantilever probe structure

1: fixed section

2: stroke segment

21: Support part

22: The first feature part

23: elastic part

24: The second feature part

3: Needle measurement section

31: Top Arrival

311: free end

312: The first trapezoidal section

313: the second trapezoidal section

32: Cantilever

321: slot

P1: The first signal transmission path

P2: Second signal transmission path

W100: width

H100: Height

200: plate body

300: The object to be tested

FIG. 1 is a three-dimensional schematic diagram of a cantilever probe structure fixed on a board according to Embodiment 1 of the present invention.

FIG. 2 is a schematic plan view of FIG. 1 .

FIG. 3 is a schematic plan view of the cantilever probe structure in FIG. 2 used to test an object under test.

FIG. 4 is a schematic plan view of the first characteristic part and the second characteristic part of the cantilever probe structure according to Embodiment 1 of the present invention in a concave-convex manner.

FIG. 5 is a schematic plan view of a cantilever probe structure fixed on a plate in Embodiment 2 of the present invention.

FIG. 6 is a schematic plan view of a cantilever probe structure fixed on a board according to Embodiment 3 of the present invention.

FIG. 7 is a schematic plan view of a cantilever probe structure fixed on a board according to Embodiment 4 of the present invention.

FIG. 8 is a schematic plan view of the cantilever probe structure in FIG. 7 used to test the object under test.

FIG. 9 is a schematic plan view of another aspect of the structure of the cantilever probe according to Embodiment 4 of the present invention.

FIG. 10 is a schematic plan view of the cantilever probe structure of FIG. 9 used to test the object under test.

The following are specific examples to illustrate the implementation of the "cantilever probe structure" disclosed in the present invention. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various modifications and changes can be made to the details in this specification based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only for simple illustration, and are not drawn according to the actual size, which is stated in advance. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the protection scope of the present invention.

It should be understood that although terms such as "first", "second", and "third" may be used herein to describe various elements or signals, these elements or signals should not be limited by these terms. These terms are primarily used to distinguish one element from another, or a number with another signal. In addition, the term "or" used herein may include any one or a combination of more of the associated listed items depending on the actual situation.

[Example 1]

Please refer to FIG. 1 to FIG. 4 , which are the first embodiment of the present invention. As shown in FIGS. 1 to 3 , this embodiment discloses a cantilever probe structure 100, which is a component applied to a cantilever probe card and is suitable for transmitting high-frequency or high-speed signals; that is, it is not a cantilever probe structure. Any probe structure is different from the cantilever probe structure 100 disclosed in this embodiment.

It should be noted that the cantilever probe structure 100 has a width W100 in a direction parallel to the plate 200, and the cantilever probe structure 100 has a height H100 in a direction perpendicular to the plate 200. , and a ratio defined by dividing the width W100 of the cantilever probe structure 100 by the height H100 is between 0.7˜1.5. In other words, any cantilever probe having a width greater than twice the height is different from the cantilever probe structure 100 referred to in this embodiment.

Furthermore, the cantilever probe structure 100 is a one-piece structure integrally formed in this embodiment, and the cross-section of the cantilever probe structure 100 is generally rectangular. The cantilever probe structure 100 includes a fixed section 1 , a stroke section 2 connected to the fixed section 1 , and a probe section 3 connected to the stroke section 2 .

Furthermore, the cantilever probe structure 100 can be welded to a board body 200 through the fixing section 1, and the welding method between the fixing section 1 and the board body 200 can be based on design requirements It can be adjusted, for example: surface mount technology (surface mount technology, SMT), pin-in-paste (PIP) form, or other soldering form, the present invention is not limited here.

In this embodiment, the stroke section 2 has a support portion 21, a first characteristic portion 22, an elastic portion 23, and a second characteristic portion 24 in sequence in the direction away from the fixed section 1, but the present invention Do not limited by this. For example, in other embodiments of the present invention, the support portion 21 may also be omitted from the travel section 2 .

Wherein, the support portion 21 is formed by extending obliquely from the fixed section 1 to the first characteristic portion 22 in this embodiment, and the support portion 21 is roughly in line with the fixed section 1 (or all The plate body 200) is sandwiched by an acute angle between 15 degrees and 45 degrees, but the present invention is not limited to the above conditions.

Furthermore, the elastic portion 23 is C-shaped or U-shaped in this embodiment, so as to have the function of elastic deformation, but the specific structure of the elastic portion 23 can also be adjusted and changed according to the design requirements. are limited by what is contained in this example.

Furthermore, the first characteristic part 22 and the second characteristic part 24 are respectively located at the two ends of the elastic part 23; that is to say, the first characteristic part 22 is connected to the support part 21 and the Between the elastic parts 23, the second characteristic part 24 is connected between the elastic part 23 and the stroke section 2, and the first characteristic part 22 and the second characteristic part 24 are connected to each other. Opposite and spaced apart.

It should be noted that the cantilever probe structure 100 can move the second characteristic part 24 to contact the first characteristic part 22 through the elastic deformation of the elastic part 23 . Wherein, the first feature portion 22 and the second feature portion 24 are mutually matching structures and can be adjusted and changed according to design requirements. For example, the contact between the second characteristic portion 24 and the first characteristic portion 22 (coordinated with the structure) can be a single-point contact as shown in FIG. 3 , or a multi-point contact as shown in FIG. 4 .

As shown in FIGS. 1 to 3 , the probe section 3 in this embodiment includes a propping portion 31 and a cantilever portion 32 connecting the propping portion 31 and the second feature portion 24 . Wherein, the cantilever portion 32 is formed by extending from the second characteristic portion 24 toward an oblique direction away from the elastic portion 23 and the fixing section 1 , and the support portion 21 and the cantilever portion 32 are mutually facing each other, while the support The distance between the portion 21 and the cantilever portion 32 gradually increases toward the direction away from the elastic portion 23 . Accordingly, the cantilever probe structure 100 in this embodiment can absorb external force and provide a certain travel distance through the inclined cantilever portion 32 , but the present invention is not limited thereto.

Furthermore, in this embodiment, the abutting portion 31 is from the end of the cantilever portion 32 far away from the second characteristic portion 24 (such as: the right end of the cantilever portion 32 in FIG. The direction of the section 1 is extended, and the abutting portion 31 is preferably in the shape of a pyramid to form a sharp free end 311 . Wherein, the free end 311 of the abutment portion 31 (or the probe section 3 ) can be used to abut against an object under test 300 (such as: a semiconductor wafer), and the abutment portion 31 can be Displacement occurs when the cantilever portion 32 swings relative to the elastic portion 23 . That is to say, the object under test 300 can pass through the cantilever probe structure 100 from the free end 311 to transmit signals with the board 200 .

More specifically, the cantilever probe structure 100 is defined by the free end 311 sequentially passing through the probe section 3 , the second characteristic portion 24 , the elastic portion 23 , and the first A characteristic portion 22 leads to a first signal transmission path P1 of the fixed section 1 . That is to say, signal transmission can be performed between the board 200 and the object under test 300 through the first signal transmission path P1, and the first signal transmission path P1 in this embodiment is along the The entire stroke section 2 (including the support portion 21 ).

Furthermore, when the cantilever probe structure 100 is pressed against the object under test 300 with the free end 311, the second characteristic portion 24 contacts the first characteristic portion 24 through the deformation of the elastic portion 23. When a characteristic portion 22 is formed, the cantilever probe structure 100 is formed with the free end 311 sequentially passing through the probing section 3, the second characteristic portion 24, and the first characteristic portion 22. A second signal transmission path P2 to the fixed segment 1 . That is to say, signal transmission between the board 200 and the object under test 300 can also be performed through the second signal transmission path P2, and the second signal transmission path P2 in this embodiment is only along Partially through the stroke segment 2; or in other words, the second signal transmission path P2 does not cover The elastic portion 23 is covered, thereby reducing the overall path length.

Accordingly, the cantilever probe structure 100 in this embodiment is effectively optimized by forming the elastic portion 23 that can change the distance between the first feature portion 22 and the second feature portion 24. The overall force-bearing structure of the cantilever probe structure 100 greatly shortens the path length of signal transmission, thereby providing a shorter transmission path between the board body 200 and the object under test 300 (that is, Both the first signal transmission path P1 and the second signal transmission path P2 are shorter than the transmission path of the existing cantilever probe).

Furthermore, in this embodiment, the cantilever probe structure 100 can be in contact with the first characteristic portion 22 through the second characteristic portion 24, so that the relationship between the board 200 and the object under test 300 The signals between them can take a shorter path (that is, the second signal transmission path P2 ) to reduce the loss caused by the path, so as to provide better test performance.

It should be additionally noted that the impedance formed by the second characteristic portion 24 , the elastic portion 23 , and the first characteristic portion 22 in the first signal transmission path P1 is greater than that of the first characteristic portion 24 . An impedance value formed by the second characteristic part 24 and the first characteristic part 22 in the two signal transmission paths P2, so when the second characteristic part 24 is in contact with the first characteristic part 22, the The signal between the board 200 and the object under test 300 will choose to travel along the second signal transmission path P2 with a lower impedance.

Furthermore, when the second feature portion 24 is in contact with the first feature portion 22, the first feature portion 22, the elastic portion 23, and the second feature portion 24 together form a closed loop That is to say, the closed loop is equivalent to an outer loop located outside the second signal transmission path P2, so when the signal between the board 200 and the object under test 300 is along the When the second signal transmission path P2 travels, there will be no stub effect.

[Example 2]

Please refer to FIG. 5 , which is the second embodiment of the present invention. Since this example is similar to The above-mentioned first embodiment, so the similarities between the two embodiments will not be repeated, and the differences between this embodiment and the above-mentioned first embodiment are roughly described as follows: In this embodiment, the cantilever portion 32 of the cantilever probe structure 100 is concavely formed with at least one slot 321 along its length direction; in this embodiment, the cantilever probe structure 100 is One slot 321 formed through the cantilever portion 32 is provided for illustration, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the cantilever portion 32 can be recessed with a slot 321 not penetrating on its opposite sides; or, the cantilever portion 32 can be formed with a through Shaped and a plurality of slots 321 arranged in parallel.

Accordingly, in this implementation, the cantilever probe structure 100 can effectively adjust (eg lower) the The force that the object under test 300 needs to withstand, so as to prevent the cantilever probe structure 100 from damaging the object under test 300 .

[Embodiment three]

Please refer to FIG. 6 , which is the third embodiment of the present invention. Since this embodiment is similar to the first and second embodiments above, the similarities between the two embodiments will not be repeated, and the differences between this embodiment and the first and second embodiments are roughly described as follows: In this embodiment , the abutting portion 31 is stepped and has a first trapezoidal segment 312 and a second trapezoidal segment 313 extending sequentially from (the end of) the cantilever portion 32, and the first trapezoidal segment The top edge of 312 is larger than the bottom edge of the second trapezoidal section 313 , and the free end 311 is located at the top edge of the second trapezoidal section 313 .

In addition, the abutting portion 31 can also be adjusted in different structures according to design requirements; for example, in other embodiments of the present invention A third trapezoidal section is arranged above the trapezoidal section 313, and the top edge of the second trapezoidal section 313 is larger than the bottom edge of the third trapezoidal section, and the free end 311 is located at the third ladder the top edge of the shaped segment.

[embodiment four]

Please refer to FIG. 7 to FIG. 10 , which are the fourth embodiment of the present invention. Since this embodiment is similar to the above-mentioned embodiments 1 to 3, the similarities between the two embodiments will not be repeated, and the differences between this embodiment and the above-mentioned embodiments 1 to 3 are roughly described as follows: In this embodiment, the The needle measuring section 3 only has the abutting portion 31, and omits the cantilever portion 32 shown in FIG. direction extension, so as to effectively reduce the width W100 of the cantilever probe structure 100, and further shorten the length of the first signal transmission path P1 and the length of the second signal transmission path P2, so as to This enables the cantilever probe structure 100 to have a structure that meets more application requirements.

Furthermore, as shown in Fig. 9 and Fig. 10 of this embodiment, the elastic part 23 may be roughly V-shaped, and the cantilever probe structure 100 may further omit the supporting part 21 as shown in Fig. 2 (For example: the parts of the cantilever probe structure 100 other than the probe section 3 may be roughly Z-shaped). Furthermore, the second characteristic portion 24 can extend toward the first characteristic portion 22, so as to shorten the distance between the first characteristic portion 22 and the second characteristic portion 24, thereby facilitating the second The feature portion 24 contacts the first feature portion 22 so that the cantilever probe structure 100 can form the second signal transmission path P2.

[Technical effects of the embodiments of the present invention]

In summary, the cantilever probe structure disclosed in the embodiments of the present invention effectively optimizes the The overall force-bearing structure of the cantilever probe structure, and greatly shorten the path length of signal transmission, thereby providing a shorter transmission path between the board and the object under test (that is, the first Both the signal transmission path and the second signal transmission path are comparable to the transmission of the existing cantilever probe the path is short).

Furthermore, the cantilever probe structure disclosed in the embodiment of the present invention can be in contact with the first characteristic part through the second characteristic part, so that the signal between the board and the object under test can be A shorter path (that is, the second signal transmission path) is used to reduce the loss caused by the path, so as to provide better test performance.

The content disclosed above is only a preferred feasible embodiment of the present invention, and does not limit the patent scope of the present invention, so all equivalent technical changes made by using the description and drawings of the present invention are included in the patent scope of the present invention Inside.

100: Cantilever probe structure

1: fixed section

2: stroke segment

21: Support part

22: The first feature part

23: elastic part

24: The second feature part

3: Needle measurement section

31: Top Arrival

311: free end

32: Cantilever

P2: Second signal transmission path

200: plate body

300: The object to be tested

Claims (9)

A cantilever probe structure, which includes: a fixed section, used for welding on a board; a stroke section, connected to the fixed section; wherein, the stroke sections are sequentially directed away from the fixed section It has a first characteristic part, an elastic part, and a second characteristic part, and the first characteristic part and the second characteristic part are facing each other and arranged at intervals; and a needle measuring section is connected to the stroke section The second feature portion, and a free end of the probe section is used to abut against an object to be tested; wherein, the cantilever probe structure is defined by the free end sequentially along the A first signal transmission path from the needle measuring section, the second characteristic portion, the elastic portion, and the first characteristic portion to the fixed section; wherein, the needle measuring section includes: an abutment part, having the free end; and a cantilever part, connecting the abutting part and the second characteristic part; wherein, the abutting part can be displaced by the swing of the cantilever part relative to the elastic part ; Wherein, when the free end of the cantilever probe structure abuts against the object to be tested, so that the second characteristic part contacts the first characteristic part through the deformation of the elastic part, The cantilever probe structure forms a second signal transmission from the free end sequentially along the probe section, the second characteristic portion, and the first characteristic portion to the fixed section path. The cantilever probe structure according to claim 1, wherein the cantilever portion is formed by extending from the second characteristic portion in an oblique direction away from the elastic portion and the fixing section. The cantilever probe structure as claimed in claim 1, wherein, the cantilever portion along its At least one slot hole is recessed in the length direction. The cantilever probe structure according to claim 1, wherein the abutting portion is in a layered shape and has a first trapezoidal section and a second trapezoidal section extending sequentially from the cantilever portion, and the The top edge of the first trapezoidal section is larger than the bottom edge of the second trapezoidal section. The cantilever probe structure according to claim 1, wherein, the travel section has a support part extending obliquely from the fixed section to the first feature part, and the support part and the cantilever part are mutually opposite; wherein, the distance between the support portion and the cantilever portion gradually increases toward a direction away from the elastic portion. The cantilever probe structure according to claim 1, wherein an impedance value formed by the second characteristic part, the elastic part, and the first characteristic part in the first signal transmission path, It is greater than an impedance value formed by the second characteristic part and the first characteristic part in the second signal transmission path. The cantilever probe structure according to claim 1, wherein the contact between the second feature and the first feature is defined as a multi-point contact. The cantilever probe structure according to claim 1, wherein the cantilever probe structure has a width in a direction parallel to the plate body, and the cantilever probe structure has a width in a direction perpendicular to the plate body It has a height, and a ratio defined by dividing the width of the cantilever probe structure by the height is between 0.7˜1.5. The cantilever probe structure according to claim 1, wherein the cantilever probe structure is further defined as an integrally formed single-piece structure, and the elastic part is C-shaped or U-shaped, and when the When the second characteristic part is in contact with the first characteristic part, the first characteristic part, the elastic part, and the second characteristic part together form a closed loop.

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