TWI659215B - Probe card device and signal transmitting module thereof - Google Patents

Abstract

The invention discloses a probe card device, which comprises an adapter plate, a positioning base on one side of the adapter plate, and a plurality of rectangular probes arranged on the positioning base. The adapter board includes a plurality of electrical contacts. Each rectangular probe includes a first contact section and a second contact section that penetrate the positioning base. The first contact sections of the plurality of rectangular probes respectively abut against multiple contacts. Electrical contacts. The connection between each first contact segment and the corresponding electrical contact is a concave-convex fit and can maintain contact within a relative displacement amount (less than 10 microns), so that the first contact segment and the corresponding electrical contact are opposite each other. The position can be adjusted within the relative displacement, so that the end edges of the second contact segments of the plurality of rectangular probes are substantially aligned with each other. The invention also discloses a signal transmission module of a probe card device.

Description

Probe card device and its signal transmission module

The invention relates to a detection device, in particular to a probe card device and a signal transmission module thereof.

As shown in FIG. 1, the conventional probe card device 100 a is a plurality of electrical contacts 11 a in a protruding shape connected to one end of a plurality of probes 2 a on the adapter board 1 a. The existing tolerance in length and the tolerance in height of the plurality of electrical contacts 11a on the adapter board 1a make the coplanarity of the other ends of the plurality of probes 2s poor, which further affects the existing probes. The measurement accuracy of the card device 100a for the object to be measured.

Therefore, the present inventor believes that the above-mentioned defects can be improved, and with special research and cooperation with the application of scientific principles, he finally proposes an invention with a reasonable design and effective improvement of the above-mentioned defects.

An embodiment of the present invention is to provide a probe card device and a signal transmission module thereof, which can effectively improve defects that may occur in the existing probe card device.

An embodiment of the present invention discloses a probe card device, which includes: an adapter board including a board surface and a plurality of electrical contacts located on the board surface; a positioning base body correspondingly disposed on a plurality of the electric devices; One side of the contact point; and a plurality of rectangular probes disposed on the positioning base, and each of the rectangular probes includes a first contact segment located on opposite sides and penetrating the positioning base and A second contact segment, and the first contact segments of the plurality of rectangular probes respectively abut a plurality of the electrical contacts; wherein each The connection between each of the first contact sections and the corresponding electrical contact is a concave-convex fit and can maintain contact with each other within a relative displacement, so that each of the first contact sections and the corresponding contact The relative positions of the electrical contacts can be adjusted within the relative displacement amount, so that the end edges of the second contact segments of the plurality of rectangular probes are substantially aligned with each other; wherein the relative displacement amount is 10 Below micron.

An embodiment of the present invention also discloses a signal transmission module of a probe card device, including: an adapter board including a board surface and a plurality of electrical contacts located on the board surface; and a plurality of rectangular probes, each The first contact section and the second contact section on opposite sides are included, and the first contact sections of the plurality of rectangular probes respectively abut on the plurality of electrical contacts; The connection between each of the first contact sections and the corresponding electrical contact is a concave-convex fit and can maintain contact with each other within a relative displacement, so that each of the first contact sections and the corresponding contact The relative positions of the electrical contacts can be adjusted within the relative displacement amount, so that the end edges of the second contact segments of the plurality of rectangular probes are substantially aligned with each other; wherein the relative displacement amount is 10 Below micron.

In summary, the probe card device and its signal transmission module disclosed in the embodiments of the present invention can be adjusted to each other's relative positions within a relative displacement amount and keep each first contact section in contact with the corresponding power. The structural design of the electrical contacts makes it possible to absorb the length tolerances between multiple rectangular probes and the height tolerances of multiple electrical contacts, so that the end edges of the second contact segments of the multiple rectangular probes are substantially aligned with each other. And effectively improve the measurement accuracy of the probe card device.

In order to further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention, but these descriptions and drawings are only used to illustrate the present invention, and not to make any limitation to the scope of the present invention limit.

[Prior art]

100a‧‧‧probe card device

1a‧‧‧ Adapter Board

11a‧‧‧electric contact

2a‧‧‧ Probe

[This embodiment]

100‧‧‧ Probe Card Device

1‧‧‧ transfer board

11‧‧‧ plate surface

12‧‧‧electric contact

121‧‧‧ groove

122‧‧‧ bump

13‧‧‧ substrate

14‧‧‧metal pad

15‧‧‧ Insulation

151‧‧‧through hole

16‧‧‧metal plating

2‧‧‧ positioning base

21‧‧‧The first guide plate

211‧‧‧The first through hole

22‧‧‧Second Guide

221‧‧‧Second through hole

23‧‧‧ Spacer

3‧‧‧ rectangular probe

31‧‧‧ the first contact

311‧‧‧ free end

3111‧‧‧Contact Arm

3112‧‧‧Groove

312‧‧‧ barb

32‧‧‧ second contact

4‧‧‧ buffer

M‧‧‧Signal transmission module

FIG. 1 is a schematic diagram of a conventional probe card device in the prior art.

FIG. 2 is a schematic diagram (1) of a probe card device according to the first embodiment of the present invention.

FIG. 3 is a schematic diagram of a specific structure of the adapter plate of FIG. 2.

FIG. 4 is a schematic diagram (2) of a probe card device according to the first embodiment of the present invention.

FIG. 5 is a schematic diagram (c) of a probe card device according to the first embodiment of the present invention.

FIG. 6 is a schematic diagram (a) of a probe card device according to a second embodiment of the present invention.

FIG. 7 is a schematic diagram (2) of a probe card device according to a second embodiment of the present invention.

FIG. 8 is a schematic diagram of a probe card device according to a third embodiment of the present invention.

FIG. 9 is a schematic diagram of a probe card device according to a fourth embodiment of the present invention.

Please refer to FIG. 2 to FIG. 9, which are embodiments of the present invention. It should be noted that this embodiment corresponds to the related quantities and appearances mentioned in the drawings, and is only used to specifically describe the implementation of the present invention. Mode to facilitate understanding of the content of the present invention, but not to limit the protection scope of the present invention. It should be additionally noted that the technical features disclosed in the following multiple embodiments can be mutually referenced and transferred to each other to form other embodiments not shown in the present invention.

[Example 1]

As shown in FIG. 2 to FIG. 5, this is a first embodiment of the present invention. This embodiment discloses a probe card device 100, which includes an adapter plate 1, a positioning base 2 located on one side of the adapter plate 1, and a plurality of rectangular probes 3 disposed on the positioning base 2. Wherein, one end of each of the rectangular probes 3 is in contact with the adapter board 1, and the other end of each of the rectangular probes 3 is used to contact and test an object to be tested (such as a semiconductor wafer). .

Furthermore, the adapter plate 1 and the plurality of rectangular probes 3 can be collectively referred to as a signal transmission module M in this embodiment, and the signal transmission module M is not limited to being matched with the positioning base 2 . That is, in other embodiments not shown in the present invention, the signal transmission module M may be sold separately or applied to other components. It should be noted that the diagram of this embodiment is a schematic diagram showing the needle implantation process of the rectangular probe 3 described above. However, the present invention is not limited to this. In addition, in order to facilitate understanding of this embodiment, the drawings only show a partial structure of the probe card device 100, so as to clearly show the structure and connection relationship of each element of the probe card device 100. The structure of each element of the probe card device 100 and its connection relationship will be described below.

The adapter board 1 includes a board surface 11 and a plurality of electrical contacts 12 located on the board surface 11. Each of the electrical contacts 12 in this embodiment includes a groove 121 recessed in the board surface 11, and an inner wall of the groove 121 is made of conductive material. It should be noted that this embodiment does not limit the specific structure of the adapter plate 1, so the adapter plate 1 in the figure is presented in a schematic manner.

For example, the structure of the adapter plate 1 in this embodiment may be shown in FIG. 3, but is not limited thereto. The adapter board 1 includes a substrate 13, a plurality of metal pads 14 on the substrate 13, an insulating layer 15 covering the substrate 13, and a plurality of metal plating layers 16 respectively connected to the plurality of metal pads 14. . Further, the outer surface of the insulating layer 15 is defined as the board surface 11 of the above-mentioned adapter board 1, the insulating layer 15 is formed with a plurality of through holes 151 respectively exposing a plurality of metal pads 14, and a plurality of metal plating layers 16 is plated on the inner sidewalls of the plurality of through holes 151. Wherein, each of the metal pads 14 and the connected metal plating layers 16 are combined and defined as one of the electrical contacts 12 and collectively surround and form the groove 121.

The positioning base 2 is correspondingly disposed on one side of the plurality of electrical contacts 12 of the adapter board 1, and the positioning base 2 includes a first die 21 (upper die) in this embodiment, which is substantially parallel to A second guide plate 22 (lower die) of the first guide plate 21 and a spacer plate 23 (not shown) clamped between the first guide plate 21 and the second guide plate 22. Wherein, the first guide plate 21 is formed with a plurality of first through holes 211, the second guide plate 22 is formed with a plurality of second through holes 221, and the positions of the plurality of second through holes 221 respectively correspond to The positions of the plurality of first through holes 211, and the diameter of each second through hole 221 is not larger than the diameter of the first through hole 211.

A plurality of rectangular probes 3 are arranged substantially in a matrix and pass through the positioning base 2. One end of each of the plurality of rectangular probes 3 passes through a plurality of first through holes 211 of the first guide plate 21, and a plurality of rectangles are formed. The other ends of the probes 3 respectively pass through the second through holes 221 of the second guide plate 22. That is to say, each of the rectangular probes 3 is sequentially passed through the corresponding first through hole 211, the spacer 23, and the corresponding second through hole of the first guide plate 21. 221, and the opposite sides of each rectangular probe 3 passing through the positioning base 2 are respectively defined as a first contact section 31 and a second contact section 32, and the first contacts of the plurality of rectangular probes 3 The segments 31 respectively abut on the plurality of electrical contacts 12 of the above-mentioned adapter board 1.

Further, the connection between each first contact segment 31 and the corresponding electrical contact 12 is a concave-convex fit (such as a concave-convex fit structure with a tight-fitting effect) and can maintain each other within a relative displacement amount. Making contact so that the relative position of each first contact segment 31 and the corresponding electrical contact 12 can be adjusted within the relative displacement, so that the ends of the second contact segments 32 of the plurality of rectangular probes 3 The edges are approximately aligned with each other. In this embodiment, the relative displacement is 10 micrometers (μm) or less, and preferably 5 micrometers or less. Furthermore, the phrase “substantially aligned with each other” in this embodiment means that the height difference between the end edges of any two second contact segments 32 is 10 micrometers or less, which is much smaller than the length tolerance between the rectangular probes 3 ( (About 50 microns), or the height tolerance (about 50 microns) of the plurality of electrical contacts 12.

To put it another way, the relative displacement amount can be used to absorb the length tolerance between the plurality of rectangular probes 3 and the height tolerance of the plurality of electrical contacts 12 in this embodiment. For example, as shown in FIG. 2, when two rectangular probes 3 located on the left and right outer sides but having different lengths, the first contact segments 31 of the two rectangular probes 3 are inserted into the grooves 121 of the two electrical contacts 12. The two first contact sections 31 can move different distances within the relative displacement, so that the end edges of the second contact sections 32 of the two outer rectangular probes 3 are substantially coplanar. Furthermore, as shown in FIG. 2, two rectangular probes 3 having the same length are located on the left and center, and the first contact segments 31 of the two probes are inserted into two probes having different depths. In the two grooves 121, the two first contact sections 31 can move the same distance within the relative displacement, so that the end edges of the second contact sections 32 of the two left rectangular probes 3 are substantially coplanar.

In more detail, each of the first contact sections 31 has a free end portion 311, and the width of the free end portion 311 is preferably smaller than the width of the corresponding electrical contact 12; and each rectangular probe In 3 and the corresponding electrical contact 12, the free end portion 311 is movably inserted into the groove 121 of the electrical contact 12 within the relative displacement amount, and the free end portion 311 abuts on The inner side wall of the groove 121 is separated from the bottom of the groove 121 by a distance.

In addition, since the portion of the spacer plate 23 and each rectangular probe 3 between the first contact section 31 and the second contact section 32 thereof has a low correlation with the improvement point of the present invention, the following details are not added. Instructions. Furthermore, the probe card device 100 of this embodiment is limited to the use of rectangular probes 3, which may be manufactured by micro-electromechanical systems (MEMS) technology, so this embodiment is to exclude circular probes with completely different manufacturing processes. In other words, compared with the round probe, the rectangular probe 3 of this embodiment has different manufacturing processes, so there is no motivation to refer to each other.

In addition, although the structures of the plurality of rectangular probes 3 and the multiple electrical contacts 12 respectively matched in this embodiment are substantially the same, in an embodiment not shown in the present invention, the probe card device 100 The plurality of rectangular probes 3 and the plurality of electrical contacts 12 respectively matched with each other may have different structures. Furthermore, the specific structure of the probe card device 100 in this embodiment can be adjusted and changed according to the needs of the designer, and is not limited to that shown in FIG. 2.

For example, as shown in FIG. 4, in each rectangular probe 3 and the corresponding electrical contact 12, the groove 121 of the electrical contact 12 has a substantially trapezoidal cross-section, and the rectangular probe 3 is free. The cross-sectional shape of the end portion 311 is a shape corresponding to the cross-section of the groove 121. That is, when the free end portion 311 moves within the groove 121, the above-mentioned self- The side edge of the end portion 311 can be kept in contact with the inner side wall of the groove 121, and the deeper the free end portion 311 is inserted into the groove 121, the greater the force between the free end portion 311 and the groove 121 (Eg: tight fit).

Furthermore, as shown in FIG. 5, in each of the rectangular probes 3 and the corresponding electrical contacts 12, the free end portion 311 includes two contact arms 3111, and a distance between the two contact arms 3111. The distance gradually increases from the second contact section 32 toward the first contact section 31. Specifically, the two contact arms 3111 are substantially parallel to each other when the groove 121 is not inserted. After the two contact arms 3111 are inserted into the groove 121, the end edges of the two contact arms 3111 abut against the groove 121. The two contact arms 3111 are bent outward from each other, and as the two contact arms 3111 are inserted deeper into the groove 121, the distance between the ends of the two contact arms 3111 is larger.

[Example 2]

As shown in FIG. 6 and FIG. 7, this is a second embodiment of the present invention. This embodiment is similar to the first embodiment described above, and the same technical features of the two are not described again. The main features of this embodiment and the first embodiment are as follows. The differences are set out below.

Specifically, as shown in FIG. 6, in this embodiment, in each of the rectangular probes 3 and the corresponding electrical contacts 12, the electrical contacts 12 are protruding from the board surface 11 of the adapter board 1. The groove 121 is formed by being recessed from the end surface of the electrical contact 12. The groove 121 is located outside the plate surface 11 of the adapter plate 1 in this embodiment, but the present invention is not limited thereto.

Further, as shown in FIG. 7, each of the rectangular probes 3 can be formed with a plurality of barbs 312 on the side edge of the free end portion 311 thereof, and the plurality of barbs 312 can be inserted into the groove 121. The side wall to improve the electrical connection effect of the rectangular probe 3 and the corresponding electrical contact 12. The distance between any one barb 312 and the side edge of the free end 311 is preferably gradually reduced from the second contact section 32 toward the first contact section 31, but the present invention is not limited thereto.

[Example Three]

As shown in FIG. 8, this is the third embodiment of the present invention. This embodiment is similar to the first embodiment described above, and the same technical features of the two will not be described again. The main differences between this embodiment and the first embodiment are as follows. Set.

Specifically, in this embodiment, in each of the rectangular probes 3 and the corresponding electrical contacts 12, the electrical contacts 12 are not formed with the groove 121, but include a plate protruding from the adapter plate 1 described above. A bump 122 on the surface 11, a free end portion 311 of the rectangular probe 3 is formed with a groove 3112, and the groove 3112 is movably sleeved on the electrical contact 12 within the relative displacement amount. Inside the protruding block 122, and the protruding block 122 is separated from the bottom of the groove 3112 by a distance.

[Example 4]

As shown in FIG. 9, this is Embodiment 4 of the present invention. This embodiment is similar to the above-mentioned Embodiment 1. The same technical features of the two are not described again. The main differences between this embodiment and the above-mentioned Embodiment 1 are as follows. Set.

Specifically, the probe card device 100 of this embodiment further includes a plurality of buffer bodies 4 disposed in the grooves 121 of the plurality of electrical contacts 12. In each rectangular probe 3, the corresponding electrical contact 12, and the corresponding buffer body 4, the buffer body 4 is pressed against the free end portion 311 of the rectangular probe 3 and the electrical property. The groove 121 of the contact 12 has a groove bottom. The relative displacement is smaller than the elastic compression amount of the buffer body 4, and the elastic compression amount of the buffer body 4 is, for example, 50 μm or less. Furthermore, the elastic modulus of the buffer body 4 is greater than that of the rectangular probe 3, and the elastic modulus of the buffer body 4 is preferably 65 GPa, and the elastic modulus of the rectangular probe 3 is better It is 60 GPa, but the present invention is not limited to this.

Furthermore, in this embodiment, each of the buffer bodies 4 may be made of a conductive material (such as gold, silver, copper) or a non-conductive material (such as a polymer material), which is not described in the present invention. limit.

[Technical effect of the embodiment of the present invention]

In summary, the probe card device 100 and its signal transmission module M disclosed in the embodiments of the present invention can be adjusted by each of the first contact segments 31 and Corresponding to the structural design of the electrical contacts 12, so as to absorb the length tolerances between the plurality of rectangular probes 3 and the height tolerances of the plurality of electrical contacts 12, the second The end edges of the contact segments 32 are substantially aligned with each other, and effectively improve the measurement accuracy of the probe card device 100.

Furthermore, the probe card device 100 can further be provided with a buffer body 4 in the groove 121 of each electrical contact 12, and the buffer body 4 can be pressed against the free end of the rectangular probe 3 under pressure. The bottom of the groove 121 of the portion 311 and the electrical contact 12 is used to provide the rebound and shock absorption functions through the buffer body 4 during the insertion of the rectangular probe 3 into the groove 121, thereby further improving a plurality of rectangular probes. Coplanarity of the end edge of the second contact segment 32 of 3.

The above are only the preferred and feasible embodiments of the present invention, and are not intended to limit the scope of protection of the present invention. Any equal changes and modifications made in accordance with the scope of patent application of the present invention shall fall within the protection scope of the claims of the present invention .

Claims (9)

A probe card device includes: an adapter board including a board surface and a plurality of electrical contacts located on the board surface; a positioning base corresponding to one side of the plurality of electrical contacts And a plurality of rectangular probes disposed on the positioning base, and each of the rectangular probes includes a first contact segment and a second contact segment located on opposite sides and penetrating the positioning base. And the first contact sections of the plurality of rectangular probes respectively abut against the plurality of electrical contacts; wherein each of the first contact sections is corresponding to one of the corresponding electrical contacts. The connection between them is a concave-convex fit and can maintain contact with each other within a relative displacement, so that the relative position of each of the first contact segments and the corresponding electrical contact can be adjusted within the relative displacement. , So that the end edges of the second contact segments of the plurality of rectangular probes are aligned with each other; wherein the relative displacement is less than 10 micrometers (μm); wherein each of the rectangular probes and the corresponding In the electrical contact, the electrical contact includes a groove, and the A free end portion is movably inserted into the groove within the relative displacement amount, and the free end portion abuts an inner side wall of the groove, and the free end portion and the groove The bottoms of the slots are separated by a distance; in each of the rectangular probes and the corresponding electrical contacts, the electrical contacts protrude from the board surface, and the grooves extend from the board. The end surface of the electrical contact is formed by being recessed. The probe card device according to claim 1, further comprising a plurality of buffer bodies disposed in the grooves of the plurality of electrical contacts; Corresponding to the electrical contacts and corresponding to the buffer body, the buffer body abuts against the free end portion and the groove bottom of the groove under pressure. The probe card device according to claim 1, wherein in each of the rectangular probes and the corresponding electrical contacts, a width of the free end portion is smaller than a width of the electrical contacts. The probe card device according to claim 1, wherein the groove is located outside the board surface of the adapter board. The probe card device according to claim 1, wherein in each of the rectangular probes and the corresponding electrical contacts, the rectangular probes are extended at a side edge of the free end to form a plurality of Barbs, and multiple barbs are pierced into the inner side wall of the groove. The probe card device according to claim 1, wherein the relative displacement is further limited to 5 μm or less. A signal transmission module of a probe card device includes: an adapter board including a board surface and a plurality of electrical contacts located on the board surface; and a plurality of rectangular probes each including opposite sides A first contact segment and a second contact segment, and the first contact segments of the plurality of rectangular probes respectively abut a plurality of the electrical contacts; wherein each of the first contacts The connection between the segment and the corresponding electrical contact is a concave-convex fit and can maintain contact with each other within a relative displacement, so that each of the first contact segments and the corresponding electrical contact are The relative position can be adjusted within the relative displacement amount, so that the end edges of the second contact segments of the plurality of rectangular probes are aligned with each other; wherein the relative displacement amount is 10 μm or less; Among the rectangular probes and the corresponding electrical contacts, the electrical contacts include a groove, and a free end portion of the first contact section is movably inserted within the relative displacement amount. Is provided in the groove, and the free end portion abuts an inner side wall of the groove The free end is separated from the bottom of the groove by a distance; wherein, in each of the rectangular probes and the corresponding electrical contacts, the electrical contacts protrude from the A plate surface, and the groove is formed by being recessed from the end surface of the electrical contact. The signal transmission module of the probe card device according to claim 7, wherein the groove is located outside the board surface of the adapter board. The signal transmission module of the probe card device according to claim 7, wherein in each of the rectangular probes and the corresponding electrical contacts, the rectangular probe is on the free end side The edge extends to form a plurality of barbs, and the plurality of barbs are pierced into the inner side wall of the groove.