TWI780813B - Electrical testing carrier board device with shielding effect - Google Patents

Electrical testing carrier board device with shielding effect Download PDF

Info

Publication number
TWI780813B
TWI780813B TW110125678A TW110125678A TWI780813B TW I780813 B TWI780813 B TW I780813B TW 110125678 A TW110125678 A TW 110125678A TW 110125678 A TW110125678 A TW 110125678A TW I780813 B TWI780813 B TW I780813B
Authority
TW
Taiwan
Prior art keywords
layer
base
conductive layer
insulating layer
shielding effect
Prior art date
Application number
TW110125678A
Other languages
Chinese (zh)
Other versions
TW202303163A (en
Inventor
偉強 高
Original Assignee
美商全球連接器科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商全球連接器科技有限公司 filed Critical 美商全球連接器科技有限公司
Priority to TW110125678A priority Critical patent/TWI780813B/en
Application granted granted Critical
Publication of TWI780813B publication Critical patent/TWI780813B/en
Publication of TW202303163A publication Critical patent/TW202303163A/en

Links

Images

Landscapes

  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Structure Of Printed Boards (AREA)

Abstract

一種具有屏蔽效果的電性檢測載板裝置,包含至少一個構成單元,每一構成單元包含一第一絕緣層、一貼附於該第一絕緣層的第一導電層,及一貼附於該第一絕緣層之另一側的第一訊號層。該第一絕緣層界定出至少一自該第一基面延伸至該第二基面的第一通孔。該第一訊號層包括多個經該至少一第一通孔而與該第一導電層電連接的第一接地件,及多個與該等第一接地件間隔設置的第一傳訊件。由於該等第一接地件是與整層結構的該第一導電層電性連接,因此該等第一傳訊件的訊號傳遞可由該第一導電層形成屏蔽,藉此優化電性檢測的性能,有利於執行高頻測試。An electrical detection carrier device with shielding effect, comprising at least one constituent unit, each constituent unit comprising a first insulating layer, a first conductive layer attached to the first insulating layer, and a first insulating layer attached to the The first signal layer on the other side of the first insulating layer. The first insulating layer defines at least one first through hole extending from the first base plane to the second base plane. The first signal layer includes a plurality of first ground elements electrically connected to the first conductive layer through the at least one first through hole, and a plurality of first communication elements spaced apart from the first ground elements. Since the first grounding elements are electrically connected to the first conductive layer of the entire layer structure, the signal transmission of the first communication elements can be shielded by the first conductive layer, thereby optimizing the performance of electrical detection, Useful for performing high frequency tests.

Description

具有屏蔽效果的電性檢測載板裝置Electrical detection carrier board device with shielding effect

本發明是有關於一種電性檢測裝置,特別是指一種具有屏蔽效果的電性檢測載板裝置。 The invention relates to an electrical property detection device, in particular to an electrical property detection carrier board device with shielding effect.

電性檢測載板裝置(Electrical Interposer)是用來執行待測電子元件的設備,可因應例如積體電路(IC)、印刷電路板(PCB),或者其他形式之電子元件的良品檢測。由於現今相關產業的技術日新月異,不僅是檢測性能必須得以因應技術水平,針對檢測效率的要求也日漸提升。目前執行電性檢測時,若希望提高檢測效率,通常是提高測試頻率而執行高速檢測,但提高測試頻率的同時,卻也難免伴隨著對其他測試對(Diffrential Pair)之訊號傳遞造成影響的雜訊。因此,如何解決雜訊影響電信號傳導的問題,則成為優化檢測性能並同時提高測試效率的關鍵。 Electrical Interposer is a device used to implement the electronic components to be tested, which can respond to the quality inspection of integrated circuits (IC), printed circuit boards (PCB), or other forms of electronic components. Due to the rapid changes in the technology of related industries, not only the detection performance must be able to meet the technical level, but also the requirements for detection efficiency are also increasing. At present, when performing electrical testing, if you want to improve the detection efficiency, you usually increase the test frequency to perform high-speed detection. However, while increasing the test frequency, it will inevitably be accompanied by noise that affects the signal transmission of other test pairs (Diffrential Pair). News. Therefore, how to solve the problem of noise affecting electrical signal conduction becomes the key to optimize detection performance and improve test efficiency at the same time.

因此,本發明之目的,即在提供一種能因應高速檢測之 具有屏蔽效果的電性檢測載板裝置。 Therefore, the object of the present invention is to provide a device capable of responding to high-speed detection An electrical detection carrier board device with shielding effect.

於是,本發明具有屏蔽效果的電性檢測載板裝置,包含至少一個構成單元。每一個構成單元包含一第一絕緣層、一貼附於該第一絕緣層的第一導電層,及一貼附於該第一絕緣層的第一訊號層。 Therefore, the electrical detection carrier device with shielding effect of the present invention includes at least one constituent unit. Each constituent unit includes a first insulating layer, a first conductive layer attached to the first insulating layer, and a first signal layer attached to the first insulating layer.

該第一絕緣層包括一第一基面,及一與該第一基面相反的第二基面,且界定出至少一自該第一基面延伸至該第二基面的第一通孔。該第一導電層貼附於該第一基面,而該第一訊號層貼附於該第二基面。 The first insulating layer includes a first base, and a second base opposite to the first base, and defines at least one first through hole extending from the first base to the second base . The first conductive layer is attached to the first base surface, and the first signal layer is attached to the second base surface.

該第一訊號層包括多個經該至少一第一通孔而與該第一導電層電連接的第一接地件,及多個與該等第一接地件間隔設置的第一傳訊件。 The first signal layer includes a plurality of first ground elements electrically connected to the first conductive layer through the at least one first through hole, and a plurality of first communication elements spaced apart from the first ground elements.

本發明之功效在於:該等第一接地件是與該第一導電層電性連接,能使該第一導電層形成整層結構的接地平面,因此藉由該等第一傳訊件傳遞電性檢測的訊號時,可由該第一導電層形成屏蔽,藉此優化電性檢測的性能,也因而有利於執行高頻測試。 The effect of the present invention is that: the first grounding elements are electrically connected to the first conductive layer, enabling the first conductive layer to form a ground plane of the entire layer structure, so that the electrical properties are transmitted through the first communication elements. When detecting signals, shielding can be formed by the first conductive layer, so as to optimize the performance of electrical detection, and thus facilitate the implementation of high-frequency testing.

100:構成單元 100: constituent unit

101:中介絕緣板 101:Intermediate insulation board

102:封裝板 102: Package board

21:第一絕緣層 21: The first insulating layer

210:第一通孔 210: the first through hole

211:第一基面 211: The first base

212:第二基面 212: second base

22:第一導電層 22: The first conductive layer

220:貫孔 220: through hole

23:第一訊號層 23: The first signal layer

231:第一接地件 231: The first grounding piece

232:第一傳訊件 232: First communication

233:導通件 233: Conductor

239:內通接部 239: Internal connection

290:第一中空區 290: The first hollow area

291:第一基部 291: First base

292:第一通接部 292: The first connecting part

3:基板層 3: Substrate layer

41:第二導電層 41: Second conductive layer

42:第二絕緣層 42: Second insulating layer

420:第二通孔 420: second through hole

421:第三基面 421: The third base

422:第四基面 422: The fourth base

43:第二訊號層 43: The second signal layer

431:第二接地件 431: Second grounding piece

432:第二傳訊件 432:Second summons

490:第二中空區 490: The second hollow area

491:第二基部 491:Second Base

492:第二通接部 492: The second connecting part

51:內絕緣層 51: Inner insulating layer

510:內通孔 510: Inner through hole

52:內訊號層 52: Internal signal layer

520:屏蔽區域 520: shielded area

521:路徑佈線 521:Path routing

71:待測元件 71: Components under test

72:驅動元件 72: Drive element

本發明之其他的特徵及功效,將於參照圖式的實施方式中清楚地呈現,其中: 圖1是一立體圖,說明本發明具有屏蔽效果的電性檢測載板裝置之一第一實施例;圖2是一立體分解圖,說明該第一實施例的多個構成單元;圖3是一側視圖,說明該第一實施例的多個中介絕緣板及二個封裝板;圖4是一局部放大的立體圖,說明每一個構成單元的一第一絕緣層及一第一訊號層;圖5是一局部放大的剖視圖,說明該第一訊號層與每一個構成單元之該第一導電層所產生的屏蔽效果;圖6是一示意圖,說明該第一實施例與一待測元件及一驅動元件電連接的使用情況;圖7是一立體分解圖,說明具有屏蔽效果的電性檢測載板裝置之一第二實施例;及圖8是一局部放大的立體圖,說明該第二實施例的該第一訊號層。 Other features and effects of the present invention will be clearly presented in the implementation manner with reference to the drawings, wherein: Fig. 1 is a perspective view illustrating a first embodiment of the electrical detection carrier device with a shielding effect of the present invention; Fig. 2 is an exploded perspective view illustrating a plurality of constituent units of the first embodiment; Fig. 3 is a A side view illustrating a plurality of intermediate insulating plates and two packaging plates of the first embodiment; FIG. 4 is a partially enlarged perspective view illustrating a first insulating layer and a first signal layer of each constituent unit; FIG. 5 It is a partially enlarged cross-sectional view illustrating the shielding effect produced by the first signal layer and the first conductive layer of each constituent unit; FIG. 6 is a schematic diagram illustrating the first embodiment, a device under test and a driver The use of the electrical connection of the components; Fig. 7 is a three-dimensional exploded view illustrating a second embodiment of an electrical detection carrier device with a shielding effect; and Fig. 8 is a partially enlarged perspective view illustrating the second embodiment the first signal layer.

在本發明被詳細描述之前,應當注意在以下的說明內容中,類似的元件是以相同的編號來表示。 Before the present invention is described in detail, it should be noted that in the following description, similar elements are denoted by the same numerals.

參閱圖1與圖2,為本發明具有屏蔽效果的電性檢測載板 裝置之一第一實施例,本第一實施例包含三個彼此間隔設置的構成單元100、二個分別介於相鄰之二個構成單元100之間的中介絕緣板101,及二分別分別設置於最外側之二個構成單元100外側的封裝板102。要先行說明的是,在本第一實施例中,雖然是以該等構成單元100為三個的情況來說明,但實際實施時,自可因應待測元件的規格配合適當數量,甚至是特定型態的該等構成單元100,並且配合適當數量的該等中介絕緣板101,並不以本第一實施例所呈現的型態為限。 Referring to Fig. 1 and Fig. 2, it is the electrical detection carrier plate with shielding effect of the present invention One of the first embodiment of the device, this first embodiment comprises three constituent units 100 arranged at intervals, two intermediary insulating plates 101 respectively interposed between two adjacent constituent units 100, and two respectively arranged The packaging boards 102 outside the two outermost constituent units 100 . It should be explained in advance that in the first embodiment, although the case of three constituent units 100 is used for illustration, in actual implementation, an appropriate number can be matched according to the specifications of the components to be tested, or even a specific number can be used. The types of the constituent units 100 and the appropriate number of the intermediate insulating plates 101 are not limited to the types presented in the first embodiment.

參閱圖2與圖3,每一個構成單元100包含一第一絕緣層21、一貼附於該第一絕緣層21之一側的第一導電層22、一貼附於該第一絕緣層21之另一側的第一訊號層23、一貼附於該第一導電層22遠離該第一絕緣層21之一側的基板層3、一貼附於該基板層3相反於該第一導電層22之一側的第二導電層41、一貼附於該第二導電層41另一側的第二絕緣層42,及一貼附於該第二絕緣層42遠離該第二導電層41之一側的第二訊號層43。 2 and 3, each constituent unit 100 includes a first insulating layer 21, a first conductive layer 22 attached to one side of the first insulating layer 21, a first conductive layer 22 attached to the first insulating layer 21. The first signal layer 23 on the other side, a substrate layer 3 attached to the side of the first conductive layer 22 away from the first insulating layer 21, a substrate layer 3 attached to the substrate layer 3 opposite to the first conductive layer A second conductive layer 41 on one side of the layer 22, a second insulating layer 42 attached to the other side of the second conductive layer 41, and a second insulating layer 42 attached to the second insulating layer 42 away from the second conductive layer 41 The second signal layer 43 on one side.

參閱圖3與圖4,該第一絕緣層21包括一第一基面211,及一與該第一基面211相反的第二基面212,且界定出多個自該第一基面211延伸至該第二基面212的第一通孔210。而該第一導電層22及該第一訊號層23即是分別貼附於該第一基面211及該第二基面212。同樣的,該第二絕緣層42包括一接觸該第二導電層41的第 三基面421,及一相反於該第三基面421的第四基面422,且界定出多個自該第三基面421延伸至該第四基面422的第二通孔420。即,該第二導電層41及該第二訊號層43是分別貼附於該第三基面421及該第四基面422。 3 and 4, the first insulating layer 21 includes a first base 211, and a second base 212 opposite to the first base 211, and defines a plurality of bases from the first base 211 The first through hole 210 extending to the second base surface 212 . The first conductive layer 22 and the first signal layer 23 are attached to the first base surface 211 and the second base surface 212 respectively. Similarly, the second insulating layer 42 includes a first contact with the second conductive layer 41 Three base surfaces 421 and a fourth base surface 422 opposite to the third base surface 421 define a plurality of second through holes 420 extending from the third base surface 421 to the fourth base surface 422 . That is, the second conductive layer 41 and the second signal layer 43 are attached to the third base surface 421 and the fourth base surface 422 respectively.

該第一訊號層23包括多個經該等第一通孔210而與該第一導電層22電連接的第一接地件231,及多個與該等第一接地件231間隔設置的第一傳訊件232。每一個第一接地件231具有一圍繞界定出一位置對應個別之第一通孔210之第一中空區290的第一基部291,及一設置於個別之第一通孔210中,並連接於該第一導電層22的第一通接部292。而該第一通接部292呈一嵌設於該第一中空區290並完整圍繞該第一中空區290的環狀。該第二訊號層43包括多個經該等第二通孔420而與該第二導電層41電連接的第二接地件431,及多個與該等第二接地件431間隔設置的第二傳訊件432。每一個第二接地件431具有一圍繞界定出一位置對應個別之第二通孔420之第二中空區490的第二基部491,及一設置於個別之第二通孔420中,並連接於該第二導電層41的第二通接部492。而該第二通接部492呈一嵌設於該第二中空區490並完整圍繞該第二中空區490的環狀。 The first signal layer 23 includes a plurality of first ground members 231 electrically connected to the first conductive layer 22 through the first through holes 210, and a plurality of first ground members 231 spaced apart from the first ground members 231. Subpoena 232. Each first ground member 231 has a first base 291 surrounding the first hollow area 290 defining a position corresponding to the individual first through hole 210, and a first base portion 291 disposed in the individual first through hole 210 and connected to the first through hole 210. The first connecting portion 292 of the first conductive layer 22 . The first connecting portion 292 is a ring embedded in the first hollow area 290 and completely surrounds the first hollow area 290 . The second signal layer 43 includes a plurality of second ground members 431 electrically connected to the second conductive layer 41 through the second through holes 420, and a plurality of second ground members 431 spaced apart from the second ground members 431. Subpoena 432. Each second ground member 431 has a second base portion 491 surrounding a second hollow area 490 that defines a position corresponding to an individual second through hole 420, and a second base portion 491 disposed in the individual second through hole 420 and connected to the second through hole 420. The second connection portion 492 of the second conductive layer 41 . The second connecting portion 492 is a ring embedded in the second hollow area 490 and completely surrounds the second hollow area 490 .

要特別說明的是,在每一個構成單元100中,該基板層3的相反兩側實質上是呈現彼此對稱的相同結構,主要是配合待測元 件的接點形式,以此方式建構「多層式」的測試模組,但就單純的電性傳導而言,若以該第一導電層22、該第一絕緣層21、該第一訊號層23為一組電性傳導結構,而該第二導電層41、該第二絕緣層42、該第二訊號層43為一組電性傳導結構,實質上只需要其中一組結構即可達成傳訊以及接地的電性傳導功能。 It should be particularly noted that, in each constituent unit 100, the opposite sides of the substrate layer 3 substantially present the same structure that is symmetrical to each other, mainly to match the unit under test. In this way, a "multi-layer" test module is constructed, but in terms of simple electrical conduction, if the first conductive layer 22, the first insulating layer 21, the first signal layer 23 is a group of electrically conductive structures, and the second conductive layer 41, the second insulating layer 42, and the second signal layer 43 are a group of electrically conductive structures, and only one of the structures is actually required to achieve communication. And the electrical conduction function of grounding.

以單一組的電性傳導結構來說明,在該第一訊號層23中,是以相鄰的一對第一傳訊件232來構成訊號來回的訊號對,而與所述之一對第一傳訊件232緊鄰的一個第一接地件231,則會對應扮演接地的角色,以與所述一對第一傳訊件232構成完整的電性測試通路。而該等第一傳訊件232及該等第一接地件231的接點分布,當然可按照待測元件的需求配置,並不以本第一實施例中的配置為限。 Illustrated with a single set of electrical conduction structure, in the first signal layer 23, a pair of adjacent first communication elements 232 are used to form a signal pair for back and forth signals, and with the one pair of first communication elements 232 A first grounding element 231 immediately adjacent to the element 232 will correspondingly play the role of grounding, so as to form a complete electrical test path with the pair of first communication elements 232 . The distribution of the contact points of the first communication elements 232 and the first ground elements 231 can of course be configured according to the requirements of the device under test, and is not limited to the configuration in the first embodiment.

具體而言,該等封裝板102是以絕緣材質所製成,主要目的係遮蔽位於相對外側的該第一訊號層23或該第二訊號層43,並且將本第一實施例封裝為一模組化裝置,以利於模組化地與檢測系統整體的其他設備組裝。 Specifically, the packaging boards 102 are made of insulating material, the main purpose is to shield the first signal layer 23 or the second signal layer 43 located on the opposite outside, and to package the first embodiment into a mold. The modularized device is convenient for modular assembly with other equipment of the detection system as a whole.

參閱圖5並配合圖4,就單一個構成單元100而言,同樣以該基板層3其中一側之單一組的電性傳導結構來說明,透過該第一絕緣層21的該等第一通孔210,每一個第一接地件231的該第一通接部292不但能經由該對應的該第一通孔210與該第一導電層22達 成電性連接,藉由自身呈現環狀的封閉型態,也能在所述第一通孔210的傳導方向上形成屏蔽,配合該第一導電層22與該等第一接地件231電性連接而形成接地平面,也得以達成屏蔽效果。 Referring to FIG. 5 and in conjunction with FIG. 4 , as far as a single constituent unit 100 is concerned, it is also illustrated by a single group of electrically conductive structures on one side of the substrate layer 3. The first conductive structures passing through the first insulating layer 21 hole 210, the first connecting portion 292 of each first grounding member 231 can reach the first conductive layer 22 through the corresponding first through hole 210 The electrical connection can also form a shield in the conduction direction of the first through hole 210 by itself presenting a ring-shaped closed type, and cooperate with the first conductive layer 22 and the first grounding members 231 to electrically Connecting to form a ground plane can also achieve a shielding effect.

同時參閱圖5與圖6,如圖6呈現本第一實施例與一待測元件71及一驅動元件72在相反兩側達成電性連接的使用情況,具體而言,即是利用該等第一接地件231、該等第二接地件431、該等第一傳訊件232,及該等第二傳訊件432向外延伸的臂部,分別與該待測元件71及該驅動元件72的接點達成電性連接,藉由確認電性訊號傳遞的情況,即可針對該待測元件71執行檢測。執行檢測時,在多方向之電性傳導得以達成屏蔽的情況下,在該等第一傳訊件232、該等第二傳訊件432中傳導的訊號則不易受到雜訊干擾,也因而得以提高檢測頻率,有利於執行高速檢測。 Referring to FIG. 5 and FIG. 6 at the same time, FIG. 6 presents the use of the first embodiment to achieve electrical connection with a device under test 71 and a driving device 72 on opposite sides. Specifically, using the first embodiment A grounding piece 231, the second grounding pieces 431, the first communication pieces 232, and the arms extending outwards of the second communication pieces 432 are respectively connected to the interface of the device under test 71 and the driving element 72. The points are electrically connected, and by confirming the transmission of electrical signals, testing can be performed on the DUT 71 . When performing detection, under the condition that the multi-directional electrical conduction can be shielded, the signals conducted in the first communication pieces 232 and the second communication pieces 432 are less likely to be interfered by noise, and thus the detection can be improved. frequency, which facilitates high-speed detection.

參閱圖7與圖8,為本發明具有屏蔽效果的電性檢測載板裝置之一第二實施例,以該基板層3(見圖2或圖3)相反兩側的其中一側而言,本第二實施例與該第一實施例的區別在於:該第一導電層22界定出多個位置分別對應該等第一通孔210的貫孔220,而每一個構成單元100還包含一貼附於該第一導電層22遠離該第一絕緣層21之一側的內絕緣層51,及一貼附於該內絕緣層51相反於該第一導電層22之一側的內訊號層52。其中,該內絕緣層51圍繞界定出多個位置分別對應該等貫孔220的內通孔510,而該內訊號層52 包括多個形成於朝向該內絕緣層51之表面,並圍繞出一封閉之屏蔽區域520的路徑佈線521。該第一訊號層23還包括多個經由該等第一通孔210、該等貫孔220,及該等內通孔510而與該內訊號層52在該等屏蔽區域520中連接連接的導通件233。 Referring to FIG. 7 and FIG. 8, it is a second embodiment of the electric detection carrier device with shielding effect of the present invention. For one of the two opposite sides of the substrate layer 3 (see FIG. 2 or FIG. 3), The difference between the second embodiment and the first embodiment is that the first conductive layer 22 defines a plurality of through holes 220 corresponding to the first through holes 210 respectively, and each constituent unit 100 also includes a sticker An inner insulating layer 51 attached to the side of the first conductive layer 22 away from the first insulating layer 21, and an inner signal layer 52 attached to the side of the inner insulating layer 51 opposite to the first conductive layer 22 . Wherein, the inner insulating layer 51 surrounds and defines a plurality of inner through holes 510 corresponding to the through holes 220 respectively, and the inner signal layer 52 It includes a plurality of routing lines 521 formed on the surface facing the inner insulating layer 51 and surrounding a closed shielding area 520 . The first signal layer 23 also includes a plurality of vias connected to the inner signal layer 52 in the shielding regions 520 through the first through holes 210, the through holes 220, and the inner through holes 510. Item 233.

具體而言,所述的路徑佈線521可由金屬沉積來形成,只要能在該內訊號層52上形成封閉線路,並且圍繞對應該等第一通孔210、該等貫孔220,及該等內通孔510的位置,藉此形成所需的該等屏閉區域520即可,型態上並不以如圖7所繪示的路徑為限。 Specifically, the routing wiring 521 can be formed by metal deposition, as long as it can form a closed line on the inner signal layer 52, and surround the corresponding first through holes 210, the through holes 220, and the inner signal layers. The position of the through hole 510 is enough to form the required shielding regions 520 , and the type is not limited to the path shown in FIG. 7 .

每一個導通件233具有一朝向該等第一通孔210、該等貫孔220,及該等內通孔510延伸,並連接於該內訊號層52的內通接部239。所述的內通接部239不但可讓該等導通件233經由該等第一通孔210、該等貫孔220,及該等內通孔510而與該內訊號層52形成電性連接,藉此達成層與層之間的信號傳遞,也由於該等內通接部239接觸該內訊號層52的位置,皆會在該等路徑佈線521所圍繞界定的該等屏蔽區域520內,因此也能藉由該等路徑佈線521形成屏蔽效果,在該等導通件233的訊號傳遞上達成優化檢測性能而有利於執行高速檢測的功效。 Each via 233 has an inner connection portion 239 extending toward the first through holes 210 , the through holes 220 , and the inner through holes 510 and connected to the inner signal layer 52 . The internal connecting portion 239 not only allows the conductive members 233 to form an electrical connection with the internal signal layer 52 through the first through holes 210, the through holes 220, and the internal through holes 510, In this way, signal transmission between layers is achieved, and because the positions where the inner vias 239 contact the inner signal layer 52 are all within the shielded regions 520 surrounded by the routing lines 521, therefore The shielding effect can also be formed by the routing wirings 521 to optimize the detection performance in the signal transmission of the vias 233 , which is beneficial to perform high-speed detection.

綜上所述,本發明具有屏蔽效果的電性檢測載板裝置,能藉由該等第一接地件231及該等第二接地件431,在分別與該第一導電層22及該第二導電層41達成電連接的情況下,形成接地平 面而形成屏蔽,甚至利用該等第一接地件231、該等第二接地件431,及該等導通件233的型態,在層與層的傳導也形成屏蔽,藉此達成避免電性訊號受到雜訊干擾的目的,也因而有利於執行高頻檢測而提高檢測效率。因此,確實能達成本發明之目的。 To sum up, the electrical detection carrier device with shielding effect of the present invention can be connected to the first conductive layer 22 and the second When the conductive layer 41 achieves an electrical connection, it forms a ground plane Even using the first grounding elements 231, the second grounding elements 431, and the vias 233, shielding is also formed in the layer-to-layer conduction, so as to avoid electrical signal Objects subject to noise interference are also beneficial to perform high-frequency detection and improve detection efficiency. Therefore, can really reach the purpose of the present invention.

惟以上所述者,僅為本發明之實施例而已,當不能以此限定本發明實施之範圍,凡是依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。 But what is described above is only an embodiment of the present invention, and should not limit the scope of the present invention. All simple equivalent changes and modifications made according to the patent scope of the present invention and the content of the patent specification are still within the scope of the present invention. Within the scope covered by the patent of the present invention.

100:構成單元 100: constituent unit

101:中介絕緣板 101:Intermediate insulation board

102:封裝板 102: Package board

21:第一絕緣層 21: The first insulating layer

210:第一通孔 210: the first through hole

212:第二基面 212: second base

23:第一訊號層 23: The first signal layer

231:第一接地件 231: The first grounding piece

232:第一傳訊件 232: First communication

3:基板層 3: Substrate layer

Claims (10)

一種具有屏蔽效果的電性檢測載板裝置,包含至少一個構成單元,每一個構成單元包含: 一第一絕緣層,包括一第一基面,及一與該第一基面相反的第二基面,且界定出至少一自該第一基面延伸至該第二基面的第一通孔; 一第一導電層,貼附於該第一絕緣層的該第一基面;及 一第一訊號層,貼附於該第一絕緣層的該第二基面,並包括多個經該至少一第一通孔而與該第一導電層電連接的第一接地件,及多個與該等第一接地件間隔設置的第一傳訊件。 An electrical detection carrier device with shielding effect, comprising at least one constituent unit, each constituent unit comprising: A first insulating layer, including a first base, and a second base opposite to the first base, and defining at least one first via extending from the first base to the second base hole; a first conductive layer attached to the first base surface of the first insulating layer; and A first signal layer, attached to the second base surface of the first insulating layer, and including a plurality of first grounding elements electrically connected to the first conductive layer through the at least one first through hole, and a plurality of a first communication member spaced apart from the first grounding members. 如請求項1所述具有屏蔽效果的電性檢測載板裝置,其中,該第一訊號層的每一個第一接地件具有一設置於個別之第一通孔中,並連接於該第一導電層的第一通接部。The electrical detection carrier device with shielding effect as described in claim 1, wherein each first ground member of the first signal layer has a first through hole arranged in an individual one and connected to the first conductive The first connection part of the layer. 如請求項2所述具有屏蔽效果的電性檢測載板裝置,其中,該第一訊號層的每一個第一接地件具有一圍繞界定出一位置對應個別之第一通孔之第一中空區的第一基部,該第一通接部呈一嵌設於該第一中空區並完整圍繞該第一中空區的環狀。The electrical detection substrate device with shielding effect as described in claim 2, wherein each first ground member of the first signal layer has a first hollow area surrounding and defining a position corresponding to an individual first through hole The first base part, the first connection part is a ring embedded in the first hollow area and completely surrounds the first hollow area. 如請求項1所述具有屏蔽效果的電性檢測載板裝置,包含多個構成單元,及多個分別設置於相鄰之二個構成單元之間的中介絕緣板。The electrical detection carrier device with shielding effect as described in Claim 1 comprises a plurality of constituent units, and a plurality of intermediate insulating plates respectively arranged between two adjacent constituent units. 如請求項4所述具有屏蔽效果的電性檢測載板裝置,其中,每一個構成單元還包含: 一基板層,貼附於該第一導電層遠離該第一絕緣層之一側; 一第二導電層,貼附於該基板層相反於該第一導電層之一側; 一第二絕緣層,貼附於該第二導電層並包括一接觸該第二導電層的第三基面,及一相反於該第三基面的第四基面,且界定出至少一自該第三基面延伸至該第四基面的第二通孔;及 一第二訊號層,貼附於該第二絕緣層的該第四基面,並包括多個經該至少一第二通孔而與該第二導電層電連接的第二接地件,及多個與該等第二接地件間隔設置的第二傳訊件。 The electrical detection carrier device with shielding effect as described in claim 4, wherein each constituent unit also includes: a substrate layer attached to a side of the first conductive layer away from the first insulating layer; a second conductive layer attached to the side of the substrate layer opposite to the first conductive layer; A second insulating layer, attached to the second conductive layer and including a third base surface contacting the second conductive layer, and a fourth base surface opposite to the third base surface, and defining at least one self- the third base extends to the second through hole of the fourth base; and A second signal layer, attached to the fourth base surface of the second insulating layer, and including a plurality of second grounding elements electrically connected to the second conductive layer through the at least one second through hole, and a plurality of a second communication piece spaced apart from the second grounding pieces. 如請求項5所述具有屏蔽效果的電性檢測載板裝置,其中,該第二訊號層的每一個第二接地件具有一設置於個別之第二通孔中,並連接於該第二導電層的第二通接部。The electrical detection carrier device with shielding effect as described in claim 5, wherein, each second ground member of the second signal layer has a second through-hole arranged in an individual, and connected to the second conductive The second connecting portion of the layer. 如請求項6所述具有屏蔽效果的電性檢測載板裝置,該第二訊號層的每一個第二接地件具有一圍繞界定出一位置對應個別之第二通孔之第二中空區的第二基部,該第二通接部呈一嵌設於該第二中空區並完整圍繞該第二中空區的環狀。According to the electrical detection carrier device with shielding effect as described in claim 6, each second ground member of the second signal layer has a second hollow area surrounding a second hollow area defining a position corresponding to an individual second through hole Two base parts, the second connection part is a ring embedded in the second hollow area and completely surrounds the second hollow area. 如請求項4所述具有屏蔽效果的電性檢測載板裝置,其中,該第一導電層界定出多個位置分別對應該等第一通孔的貫孔,每一個構成單元還包含: 一內絕緣層,貼附於該第一導電層遠離該第一絕緣層之一側,圍繞界定出多個位置分別對應該等貫孔的內通孔;及 一內訊號層,貼附於該內絕緣層相反於該第一導電層之一側,並包括多個形成於朝向該內絕緣層之表面,並圍繞出一封閉之屏蔽區域的路徑佈線; 該第一訊號層還包括多個經由該等第一通孔、該等貫孔,及該等內通孔而與該內訊號層在該等屏蔽區域中連接的導通件。 The electrical detection carrier device with shielding effect as described in Claim 4, wherein the first conductive layer defines a plurality of through holes corresponding to the first through holes, and each constituent unit further includes: an inner insulating layer, attached to a side of the first conductive layer away from the first insulating layer, surrounding and defining a plurality of inner through holes corresponding to the through holes; and an inner signal layer, attached to the side of the inner insulating layer opposite to the first conductive layer, and including a plurality of routing wirings formed on the surface facing the inner insulating layer and surrounding a closed shielding area; The first signal layer also includes a plurality of vias connected to the inner signal layer in the shielding regions through the first through holes, the through holes, and the inner through holes. 如請求項8所述具有屏蔽效果的電性檢測載板裝置,其中,該第一訊號層的每一個導通件具有一朝向該等第一通孔、該等貫孔,及該等內通孔延伸,並連接於該內訊號層的內通接部。The electrical detection carrier device with shielding effect as described in claim 8, wherein each via of the first signal layer has a direction toward the first through holes, the through holes, and the inner through holes extending and connected to the internal connection portion of the internal signal layer. 如請求項4所述具有屏蔽效果的電性檢測載板裝置,還包含二分別設置於最外側之二個構成單元外側的封裝板。The electrical detection carrier device with shielding effect as described in claim 4 further includes two packaging boards respectively arranged outside the two outermost constituent units.
TW110125678A 2021-07-13 2021-07-13 Electrical testing carrier board device with shielding effect TWI780813B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW110125678A TWI780813B (en) 2021-07-13 2021-07-13 Electrical testing carrier board device with shielding effect

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW110125678A TWI780813B (en) 2021-07-13 2021-07-13 Electrical testing carrier board device with shielding effect

Publications (2)

Publication Number Publication Date
TWI780813B true TWI780813B (en) 2022-10-11
TW202303163A TW202303163A (en) 2023-01-16

Family

ID=85475737

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110125678A TWI780813B (en) 2021-07-13 2021-07-13 Electrical testing carrier board device with shielding effect

Country Status (1)

Country Link
TW (1) TWI780813B (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201810484A (en) * 2015-08-14 2018-03-16 中華精測科技股份有限公司 Wafer testing interface assembly and interposer having buried passive components thereof
TW201929629A (en) * 2017-12-20 2019-07-16 中華精測科技股份有限公司 Multi-DUT testing interposer module and manufacturing method thereof
US20190331712A1 (en) * 2018-04-30 2019-10-31 GITech Inc. Connector and Testing Apparatus Thereof
TW201946339A (en) * 2018-04-30 2019-12-01 高天星 Electrical connector and electrical test device wherein the electrical connector includes a substrate and a plurality of contact bodies arranged at intervals along the substrate
TW202103397A (en) * 2019-03-20 2021-01-16 日商阿德潘鐵斯特股份有限公司 Interposer, socket, socket assembly, and wiring board assembly

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201810484A (en) * 2015-08-14 2018-03-16 中華精測科技股份有限公司 Wafer testing interface assembly and interposer having buried passive components thereof
TW201929629A (en) * 2017-12-20 2019-07-16 中華精測科技股份有限公司 Multi-DUT testing interposer module and manufacturing method thereof
US20190331712A1 (en) * 2018-04-30 2019-10-31 GITech Inc. Connector and Testing Apparatus Thereof
TW201946339A (en) * 2018-04-30 2019-12-01 高天星 Electrical connector and electrical test device wherein the electrical connector includes a substrate and a plurality of contact bodies arranged at intervals along the substrate
TW202103397A (en) * 2019-03-20 2021-01-16 日商阿德潘鐵斯特股份有限公司 Interposer, socket, socket assembly, and wiring board assembly

Also Published As

Publication number Publication date
TW202303163A (en) 2023-01-16

Similar Documents

Publication Publication Date Title
US7583513B2 (en) Apparatus for providing an integrated printed circuit board registration coupon
US6462570B1 (en) Breakout board using blind vias to eliminate stubs
KR100666224B1 (en) Rigid flexible printed circuit board having openings
CN108432355B (en) Recess type circuit board
US20190244912A1 (en) Semiconductor device and method of inspecting the same
KR20080015107A (en) Impedance controlled via structure
JP2007121180A (en) Testing device test method for semiconductor device
US9341648B2 (en) Probe card and manufacturing method thereof
TWM610980U (en) Connector device of semiconductor test equipment
US20120119779A1 (en) Signal sensing device and circuit boards
JP2011009481A (en) Probe card
KR101131105B1 (en) Semiconductor test apparatus
TWI780813B (en) Electrical testing carrier board device with shielding effect
US20040207420A1 (en) Modularized probe card with coaxial transmitters
TW201526392A (en) Connector
TWI747693B (en) Connector device of semiconductor test equipment
KR101693001B1 (en) Test board for semiconductor package and board assembly for testing semiconductor package
US20130330945A1 (en) Electrical connector assembly with an adaptor for electrical connecting the electrical connector and the pcb
JPWO2010050132A1 (en) Test equipment and circuit module
CN116564924A (en) Electrical property detection carrier plate device with shielding effect
CN111326502B (en) Semiconductor package and method for obtaining contact resistance of semiconductor package
CN113678574B (en) Packaging device for common mode rejection and printed circuit board
KR20230168410A (en) Electrical inspection device with shielding effect
JP3133555U (en) High frequency circuit board device
JP4045841B2 (en) Probe card

Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent