TWI776561B - Nano imprint replica mold making device - Google Patents

Abstract

The present invention relates to a replica mold making device for nanoimprinting, comprising: a transfer part that forms a replica mold on a film supplied from one side; a film supply part that intermittently unwinds the film to feed the transfer part supplying the film; a film recovery section that intermittently winds the film to recover the film from the transfer section, and the transfer section includes: a stage section for placing a master mold on which a pattern for applying resin is formed; a pressing roll section , which is moved in the horizontal direction to form a copying mold; and a transfer portion driving unit which is driven in order to move the pressing roller portion from a standby position on one side to the other side and back to the standby position again.

Description

Replica mold making device for nanoimprinting

The invention relates to a replica mold making device for nano-imprinting.

Recently, a Nano Imprint process is used in display processes and semiconductor processes to form patterns (for example, molding patterns for structuring and etched or evaporated mask pattern, etc.).

In the nanoimprinting process of forming micro-patterns of nanometer to micrometer size on the surface of the substrate in the form of imprint by using a mold (Mold), although the master mold 10 can also be used to directly form patterns on the surface of the substrate, but Recently, a method of producing a replica mold 20 from a master mold 10 and using the produced replica mold 20 to form a pattern on the surface of a substrate is mainly employed.

At this time, the secondary replication mold 20 further replicated from the primary replication mold 20 produced by the master mold 10 can be produced. The primary replication mold 20 for making the secondary replication mold 20 may also be referred to as a master mold 10 . That is, the master mold 10 may refer to a mold for making the replica mold 20 . Also, the replica mold 20 may refer to a mold made from the master mold 10 .

As one of the various methods for producing such a replica mold 20, there is a roller that forms the replica mold 20 on the film 60 by advancing (molding process) and retreating (molding process) the pressing roller part 120 from the upper side of the film 60 transfer method.

On the other hand, the production apparatus of the transfer mold 20 that performs the roll transfer method has a problem that the size of the apparatus becomes large in proportion to the length of the advance of the pressing roller portion 120 .

In addition, there is a problem that the size of the apparatus is increased in order to keep the angle at which the film 60 enters the pressing roll portion 120 constant.

In addition, the production apparatus of the replica mold 20 has a problem that variation in coating capacity occurs when the resin 70 is applied to the pattern of the master mold 10 .

An object of the present invention is to provide a replica mold making device for nanoimprinting that can solve the technical problems described in the prior art.

A replica mold making apparatus for nanoimprinting according to an embodiment of the present invention includes: a transfer part that forms a replica mold on a thin film supplied from one side; a film supply part that intermittently unwinds the thin film to transfer the and a film recovery section that intermittently reels the film to recover the film from the transfer section, and the transfer section includes: a stage section for placing a master mold formed with a pattern for applying resin; a press a roller part, which moves in the horizontal direction to form a copying mold; a transfer part driving unit, which drives to move the pressing roller part from a standby position on one side to the other side and back to the standby position again; a light irradiation part, It irradiates light to the resin; and, a combined moving part is combined with the light irradiation part and the pressing roller part to move together through the transfer part driving unit, and the irradiation direction of the light irradiation part is based on the lower direction perpendicular to the stage part. It is inclined towards the pressing roller part.

According to an embodiment, the light irradiation portion includes an irradiation direction guide portion that guides the irradiation direction in such a way that the irradiation direction is inclined within 10 degrees to 80 degrees.

According to an embodiment, the light irradiation portion further includes a light shielding portion disposed protruding from the light irradiation portion to shield the light irradiated to the resin and prevent the light from being diffused and irradiated to the resin overlappingly.

According to an embodiment, the device for making a replica mold for nanoimprinting of the present invention further includes: a guide roller, which is disposed between the film recovery part and the transfer part with at least one guide roller to adjust the entry angle of the film, and the transfer part further comprises: Including a film angle maintenance roll portion, the film angle maintenance roll portion is vertically and horizontally spaced from the pressure roll portion in a manner that changes the angle at which the film enters the pressure roll portion, and the film angle maintenance roll portion is configured to be relatively The film supplied from the film supply section is made to enter first, and the length of the film between the film angle maintaining roll section and the pressing roll section corresponds to the length that the pressing roll section moves in the horizontal direction in order to form the replication mold, so that the film angle maintaining roll The part is in contact with the two sides of the film where the replica mold is formed, but during the demolding process, the film angle maintaining roller part is not in contact with the replica mold, and the guide roller and the two sides of the film are formed with the replica mold. Different surfaces of the surfaces are in contact to prevent the guide roller from contacting the replica mold moving along the film recovered to the film recovery section.

According to an embodiment, the replica mold making apparatus for nanoimprinting further includes: a dispenser section that applies resin to a coating area in a standby position on one side in a manner not to overlap with the pattern of the master mold the space between the pressing roller part and the pattern of the master mold; and the pressing roller driving unit, which is driven in such a manner as to move the vertical position of the pressing roller part to form a space between the stage part and the pressing roller part, and The roller portion spreads the resin in the horizontal direction of the movement from the standby position on one side to the other side through the gap between the stage portion and the pressing roller portion, and is applied to the pattern of the master mold.

According to an embodiment, the replica molding apparatus for nanoimprinting further includes: a stage driving unit that elevates and lowers the stage part; and a dispenser driving unit that introduces the dispenser part to pass through the stage driving unit for resin coating The descending stage section is then led out of the dispenser section.

According to an embodiment, the present invention provides a replica mold making apparatus for nanoimprinting, which includes: a transfer part that forms a replica mold on a film supplied from one side; and a film supply part that intermittently unwinds the film to supply the film to the transfer section; a film recovery section that takes up the film intermittently to remove the film from the transfer section part to recover the film; and guide rollers, one or more of which are arranged between the film recovery part and the transfer part to guide the film to the film recovery part, and in order that the guide rollers are only connected to the two sides of the film without forming a replica mold The surface of the film is in contact with the surface on which the copying mold is formed, and not with the surface on which the copying mold is formed. It is located on the side where the film is supplied compared to the guide roller; the transfer portion driving unit is used to move the pressing roller portion from the standby position toward the side where the film is supplied for the molding process and back to the standby position for the demolding process. Drive; the film angle maintaining roll portion is located on the side of the supply film compared to the nip roll portion in a manner that changes the angle of the film entering the nip roll portion, so as to be on the opposite side of the guide roll across the nip roll portion, and compared to the nip roll portion. on the upper side of the pressing roller part; and a combined moving part that combines the film angle maintaining roller part and the pressing roller part to move together, and is moved by the transfer part driving unit to supply the film from the film supply part to the transfer part , and carry out the molding process, followed by the demolding process, and in the process of recovering the film from the transfer part to the film recovery part, the mutual position of the film angle maintenance roller part and the pressing roller part is unchanged, and the film angle maintenance roller The position of the guide roller does not move during the movement of the roller part and the pressure roller part. During the molding process, the distance between the film angle maintenance roller part and the pressure roller part from the guide roller increases. During the process, the separation distance of the film angle maintenance roll section and the pressure roll section from the guide roll decreases.

According to the embodiment, the distance between the film angle maintaining roller part and the film supply part is shorter than the distance between the pressing roller part and the film supplying part, and the length of the film between the film angle maintaining roller part and the pressing roller part corresponds to the pressing roller The length that the part moves in the horizontal direction in order to form the replica mold so that the film angle maintaining roller part comes into contact with the surface on which the replica mold is formed among the two sides of the film, but the film angle maintaining roller is in the process of performing the mold release process. The part is not in contact with the replica mold.

According to an embodiment, the present invention provides a replica mold making apparatus for nanoimprinting, comprising: a transfer part that forms a replica mold on a film supplied from one side; and a dispenser part, the transfer part includes: a stage part, It is used to place a master mold on which a pattern is formed on the upper surface; a pressing roller part, which moves in the horizontal direction to form a copy mold; and a transfer part driving unit, which moves the pressing roller part from the standby position to the horizontal direction The dispenser part applies resin to the application area on the upper surface of the stage part, and the application area is the press roller located in the standby position so as not to overlap with the pattern of the master mold The space between the part and the pattern of the master mold, when the pressing roller part moves from the standby position to the horizontal direction, spreads the resin from the coating area to the horizontal direction to coat the resin on the upper surface of the master mold. The area where the pattern of the master mold overlaps, and when the pressing roller part moves on the upper side of the resin coated on the upper surface of the master mold, binds the resin to the pattern of the master mold to form a replica mold, and the initial coating resin in the coating area are spaced horizontally from the positions of the patterns that bond the resin to the master.

According to an embodiment, the replica molding apparatus for nanoimprinting further includes: a stage driving unit that elevates and lowers the stage part; and a dispenser driving unit that introduces the dispenser part to pass through the stage driving unit for resin coating The descending stage section is then led out of the dispenser section.

According to an embodiment, the replica molding apparatus for nanoimprinting further includes: a pressing roller driving unit which is driven in such a manner as to move the vertical position of the pressing roller part to form a gap between the stage part and the pressing roller part, the pressing roller The part moves from the space between the stage part and the pressing roll part to spread the resin through the gap between the stage part and the pressing roll part.

According to an embodiment, the present invention provides a method for manufacturing a replica mold for nanoimprinting, comprising: a step of lowering a stage to lower a stage portion; and a step of coating, in which a dispenser portion is introduced into the inner side of the stage portion and removed from the stage When the inner side of the part is drawn out, the resin is not directly applied to the pattern of the master mold, but the resin is applied to the application area of the upper surface of the stage part as a space spaced from the pattern formed on the upper surface of the master mold; a stage raising step of raising the stage part; and a molding step of making the resin horizontally apply the resin to the pattern formed on the upper surface of the master mold when the pressing roller part moves in the horizontal direction from the standby position Diffusion, in the molding step, when the pressing roller portion moves on the upper side of the resin coated on the upper surface of the master mold, binds the resin to the pattern of the master mold to form a replica mold, the initially coated resin in the coating area is The positions are horizontally spaced from the positions of the patterns that bond the resin to the master.

According to an embodiment, the method for producing a replica mold for nanoimprinting further includes: a demolding step of moving the pressing roller part to a standby position in such a manner that the master mold and the replica mold are separated and attached to the lower side of the film; and a recycling step , and the film is moved in order to move the transfer mold to the side of the film recovery unit. In the molding step, the light irradiation section cures the resin while moving with the pressing roll section, and in the demolding step, the film enters the pressing roll section through the film formed by the film angle maintaining roll section when the pressing roll section moves to the standby position. angle, the replica is separated from the master. After the recovery step, the stage lowering step, the coating step, the stage raising step, the molding step, the demolding step, and the recovery step are performed again in order to form another replica mold.

According to an embodiment, there is provided a replica mold making apparatus for nanoimprinting, comprising: a transfer part that forms a replica mold on a film supplied from one side; a film supply part that intermittently unwinds the film to transfer The printing section supplies the film; the film recovery section intermittently winds the film to recover the film from the transfer section, and the transfer section includes: a stage section for placing a master mold formed with a pattern for applying resin; a press The roll section, which moves horizontally to form the replica mold; the film angle maintenance roll section, which is vertically and horizontally spaced from the pinch roll section in a manner that changes the angle at which the film enters the pinch roll section, the pinch roll section and the film angle The maintaining roller portion moves in the opposite direction to the moving direction of the film moving in such a way as to recover the film unwound from the film supply portion to the film recovery portion to perform the molding process, and the pressing roller portion and the film angle maintaining roller portion move toward the direction of the film. Move in the moving direction to perform the demolding process.

According to an embodiment, the film angle maintaining roll portion is configured to face in a direction opposite to the moving direction of the film relative to the pressing roll portion.

According to an embodiment, the film recovery part is located on the upper side compared to the pressing roller part.

According to an embodiment, the transfer portion further includes a coupling moving portion that combines the film angle maintaining roller portion and the pressing roller portion to move together, and is moved by the transfer portion driving unit.

According to the embodiment, the length of the film between the film angle maintaining roller portion and the pressing roller portion corresponds to the length that the pressing roller portion moves in the horizontal direction for forming the replica mold, so that the film angle maintaining roller portion It is in contact with the surface on which the replica mold is formed among both surfaces of the film, but the film angle maintaining roll portion does not come into contact with the replica mold during the mold release process.

According to an embodiment, the film angle maintaining roll section is configured such that the film supplied from the film supply section enters earlier than the pressing roll section.

According to an embodiment, the nanoimprint replica mold making device further includes: guide rollers, which are arranged between the film recovery part and the transfer part to adjust the entry angle of the film, two guide rollers and the film Different faces of the faces on which the replica molds are formed are in contact to prevent the guide rollers from coming into contact with the replica molds moving along the film recovered to the film recovery section.

First, since the second minimum pitch having a length smaller than the first minimum pitch is provided, the minimum length of the movement of the pressing roller portion is reduced, and thus there is an effect of reducing the size of the apparatus. Furthermore, compared with the first minimum pitch, there is an effect of reducing the consumption of the thin film. In addition, when the nanoimprint process is performed using a film having the second minimum pitch, the time required to move from one replica to the next can be reduced compared to the first minimum pitch, so that the process can be shortened. effect of time. Furthermore, since the resin pressed against the master mold through the press roll portion is immediately cured, there is an effect that the process time required for curing the resin can be shortened. In addition, since the resin is immediately cured, the transfer mold can be formed in a state in which the change of the pattern formed in the resin through the pressing roller portion is minimized, and there is an effect of preventing failure of the transfer mold.

In addition, the irradiation direction guide portion has an effect of being able to guide by changing the slope of the light irradiation direction of the light irradiation portion within a limited value according to the purpose.

Furthermore, the light shielding portion shields the diffusion irradiation area so that the degree of curing of the resin is constant, and prevents the diffusion irradiation area from irradiating light to the resin overlappingly. And, due to having a length less than the first separation distance The second interval distance reduces the minimum length of the movement of the pressing roller portion, thereby reducing the size of the apparatus.

Further, the film angle maintaining roll portion has the effect of maintaining the entry angle constant. Also, since the film angle maintaining roller portion can minimize the horizontal position spaced apart from the guide rollers adjacent to the pressing roller portion, there is an effect of reducing the size of the apparatus.

In addition, since the film angle maintaining roller prevents the entry angle from being changed due to the movement of the pressing roller, the tension of the film can be maintained even without an independent mechanism, and there is an effect that the intermittent supply of the film can be smoothly performed.

In addition, since the film angle maintaining roller part is separated from the pressing roller part, even if the member for moving position is not included or the members used for the molding process and the demolding process are separated separately, it is possible to have a prevention roller part that prevents the film angle maintaining roller part from being caused by the replication mold and the film angle maintaining roller. The effect of damage caused by contact.

In addition, the film recovery part located on the upper side of the pressing roller part has the effect of preventing the guide roller from contacting the replica mold.

Furthermore, since the resin is indirectly diffused and applied to the pattern of the master mold, there is an effect that variation in the coating capacity of the resin applied to the pattern of the master mold does not occur.

10: Master mold

20: Copy the mold

30: Film Supply Department

40: Film Recycling Department

50: Guide roller

60: Film

70: Resin

100: Transfer part

110: Stage Department

120: Press roller part

130: Transfer section drive unit

131: Motor

132: Ball Screw

133: Block

140: Light irradiation part

141: Shading part

142A: Directly irradiated area

142B: Diffuse irradiated area

143: Luminous part

150: Combining the mobile part

160: Irradiation direction guide

161: Projection

162: Guide groove

163: Fixed part

170: Film angle maintenance roll section

180: Dispenser Department

181: Dispenser Nozzle

200: Stage drive unit

210: Roller drive unit

L1: The first minimum spacing

L2: Second minimum spacing

PA: Coating area

S1: The first separation distance

S2: Second separation distance

AG: Inclination

FG: entry angle

FIG. 1 is a schematic diagram of a replica mold manufacturing apparatus for nanoimprinting according to an embodiment of the present invention.

2 is a schematic diagram of a transfer portion according to an embodiment of the present invention.

FIG. 3 is a schematic view of the back side of FIG. 2 .

4 to 6 are schematic diagrams of a light irradiation part according to an embodiment of the present invention.

7 is a schematic diagram of a first separation distance and a second separation distance according to an embodiment of the present invention.

8 is a schematic diagram of an entry angle according to an embodiment of the present invention.

9 to 15 are schematic views of a molding process and a demolding process according to an embodiment of the present invention.

16-20 are schematic diagrams of a dispenser portion according to an embodiment of the present invention (for reference, the depicted The position of the dispenser nozzle marked in the dispenser section is actually the coating direction of the dispenser nozzle is arranged to face the stage portion).

Hereinafter, the embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those having ordinary knowledge in the technical field to which the present invention pertains can be easily implemented.

The present invention can be implemented in many different forms, and is not limited to the embodiments described herein.

In the present invention, the horizontal direction may refer to the X-axis direction or the left and right directions in the drawing, and the vertical direction may refer to the Y-axis direction or the upward and downward directions in the drawing.

In the present invention, the length may refer to the relative distance in the direction of the X axis, and the height may refer to the relative distance in the direction of the Y axis.

In recent years, a Nano Imprint process has been used in display and semiconductor processes to form patterns (for example, molding patterns for structuring) on the surface of substrates (for example, display panels and wafers, etc.). and etching or evaporation mask pattern, etc.).

In the nanoimprinting process of forming micro-patterns of nanometer to micrometer size on the surface of the substrate in the form of imprint by using a mold (Mold), although the master mold 10 can also be used to directly form patterns on the surface of the substrate, but Recently, a method of producing a replica mold 20 from a master mold 10 and using the produced replica mold 20 to form a pattern on the surface of a substrate is mainly employed.

At this time, the secondary replication mold 20 further replicated from the primary replication mold 20 produced by the master mold 10 can be produced. The primary replication mold 20 for making the secondary replication mold 20 may also be referred to as a master mold 10 . That is, the master mold 10 may refer to a mold for making the replica mold 20 . Also, the replica mold 20 may refer to a mold made from the master mold 10 .

As one of the various methods of producing the replica mold 20, there is a roll that forms the replica mold 20 on the film 60 by advancing the pressing roller portion 120 from the upper side of the film 60 (molding process) and retreating (molding process) transfer method.

On the other hand, the production apparatus of the transfer mold 20 that performs the roll transfer method has a problem that the size of the apparatus becomes large in proportion to the length of the advance of the pressing roller portion 120 .

In addition, there is a problem that the size of the apparatus is increased in order to keep the angle at which the film 60 enters the pressing roll portion 120 constant.

In addition, the production apparatus of the replica mold 20 has a problem that variation in coating capacity occurs when the resin 70 is applied to the pattern of the master mold 10 .

In order to solve such a problem, as shown in FIGS. 1 to 3 , the manufacturing apparatus of the replica mold 20 for nanoimprinting according to the embodiment of the present invention may include a transfer part 100 , a film supply part 30 and a film recovery part 40 .

The transfer part 100 may form the replication mold 20 on the lower side of the film 60 supplied from one side.

The film supply part 30 may intermittently unwind the film 60 to supply the film 60 toward the transfer part 100 .

The film recovery part 40 may take up the film 60 intermittently to recover the film 60 from the transfer part 100 .

The above-described transfer unit 100 may include a stage unit 110 , a pressure roller unit 120 , and a transfer unit driving unit 130 .

On the stage part 110, the master mold 10 in which the pattern for coating the resin 70 is formed can be mounted.

The pattern formed on the master mold 10 may be formed by directly machining the pattern on the upper surface of the rigid substrate, or by attaching the pattern to the upper surface of the substrate. Hereinafter, when the master mold 10 is described, the formation of the pattern may be omitted for description.

The pressing roller part 120 may be moved in a horizontal direction to form the replica mold 20 by a roller transfer method.

The transfer portion driving unit 130 may be driven in order to move the pressing roller portion 120 from one side of the standby position to the other side and then back to the standby position. That is, the transfer portion driving unit 130 may be driven so as to move the pressing roller portion 120 in the horizontal direction from the standby position and then return to the standby position. For example, the transfer portion driving unit 130 may be performed to move the pressing roller portion 120 from the standby position toward the side where the film 60 is supplied to perform the molding process, and to return the pressing roller portion 120 to the standby position again to perform the mold release process. drive.

The transfer portion driving unit 130 may be an actuator. For example, as shown in FIG. 3 , the transfer portion driving unit 130 may include a motor 131 , a ball screw 132 rotated by the motor 131 , and a block 133 moved by the ball screw 132 . In addition, the block 133 can be moved together by being combined with the combining moving part 150 described later, so that the pressing roller part 120 combined with the combining moving part 150 is moved in the horizontal direction.

At least one guide roller 50 that adjusts the entry angle FG of the film 60 may be disposed at at least one of between the film supply unit 30 and the transfer unit 100 and between the film recovery unit 40 and the transfer unit 100 . For example, at least one guide roller 50 may be disposed between the film recovery portion 40 and the transfer portion 100 to guide the film 60 to the film recovery portion 40 .

The master mold 10 and the resin 70 may be located between the stage portion 110 and the film 60 . For example, the master mold 10 may be placed on the upper side of the stage portion 110 , the resin 70 may be applied on the upper side of the pattern formed on the upper surface of the master mold 10 , and the film 60 may be positioned on the upper side of the resin 70 . At this time, the pressing roller part 120 moving in the horizontal direction from the upper side of the film 60 presses the film 60 , whereby the resin 70 positioned on the lower side of the film 60 can be pressed against the master mold 10 .

The pressing roller part 120 can form the replica mold 20 by bonding the resin 70 to the pattern of the master mold 10 when moving from the standby position on one side to the other side (molding process). In addition, the pressing roller part 120 may separate the master mold 10 and the replica mold 20 when returning from the other side to the standby position of one side (a demolding process) to form the replica mold 20 attached to the film 60 . That is, the pressing roller part 120 can be moved in the horizontal direction from the standby position to perform the molding process and returned to the standby position to perform the mold release process to form the replica mold 20 . For example, the press roller part 120 may be moved from the standby position toward the side supplying the film 60 for the molding process, and the press roller part 120 may be returned to the standby position again for the mold release process to form the replica mold 20 .

As the main embodiment of the manufacturing apparatus of the replica mold 20 , the embodiments of the light irradiation part 140 , the film angle maintaining roller part 170 and the distributor part 180 will be described in detail below. Next, examples of the light irradiation part 140 , the film angle maintaining roller part 170 , and the distributor part 180 will be respectively described. However, as an example, it may be applied to the manufacturing apparatus of the replica mold 20 individually or two or more simultaneously.

First, an embodiment of the light irradiation section 140 of the apparatus for producing the replica mold 20 will be described.

As shown in part (a) of FIG. 4 , when the irradiation direction of the light irradiation part 140 is directed to the lower side direction perpendicular to the stage part 110 , it may be the same as the passage from the irradiation area of the light irradiation part 140 to the pressing roller part 120 . The length up to the area of the master mold 10 is used as a reference, and the first minimum pitch L1 is proportionally determined.

Since the above-described first minimum pitch L1 is the minimum length of the movement of the pressing roller portion 120, there is a problem that the size of the apparatus increases in proportion to the first minimum pitch L1. Furthermore, there is a problem that the consumption amount of the thin film 60 increases in proportion to the first minimum pitch L1. Also, when the nanoimprint process is performed using the thin film 60 having the first minimum pitch L1, since the time required to move from one replica 20 to the next replica 20 increases in proportion to the first minimum pitch L1, There is a process The problem of slowing down. On the other hand, there is a problem in that the pattern formed on the resin 70 by the pressing roller portion 120 changes with the passage of time, and the transfer mold 20 becomes defective.

In order to solve such a problem, as shown in FIG. 4( b ) and FIG. 5 , as a specific description of the embodiment, the transfer part 100 may include a light irradiation part 140 and a joint moving part 150 .

The light irradiating part 140 can irradiate the resin 70 with light through the light generated by the light emitting part 143 as a light source.

At this time, the resin 70 may be a photo-curable resin that can be cured by transmitting light energy. In addition, the light irradiated to the resin 70 by the light irradiation part 140 may be ultraviolet light (Ultraviolet light). That is, the resin 70 can be cured by transmitting the light irradiated by the light irradiating part 140 .

The light irradiation section 140 may be formed with an inclination AG such that the irradiation direction is inclined toward the pressing roller section 120 on the basis of the lower direction perpendicular to the stage section 110 .

The inclination AG of the light irradiation part 140 may be formed as an inclination for immediately irradiating the master mold 10 through which the pressing roller part 120 passes with light. That is, the resin 70 pressed against the master mold 10 by the pressing roller part 120 can be cured immediately.

As shown in FIG. 5 , the inclination AG of the light irradiation portion 140 may be formed to be 10 degrees based on the direction toward the stage portion 110 defined as 0 degrees and the direction toward the press roller portion 120 defined as 90 degrees. to a slope of 80 degrees.

The light irradiated by the light irradiation part 140 to the resin 70 may form an irradiation area where the light reaches the resin 70 .

The combined moving part 150 may be combined with the light irradiation part 140 and the pressing roller part 120 to move together through the transfer part driving unit 130 .

When the irradiation direction of the light irradiation part 140 is inclined toward the pressing roller part 120 with the lower direction perpendicular to the stage part 110 as the reference, and the inclination AG is formed, the irradiation area of the light irradiation part 140 may be The second minimum distance L2 between the pair of replica molds 20 formed on the film 60 and connected to each other is proportionally determined on the basis of the length up to the region of the master mold 10 through which the pressing roller portion 120 passes.

Compared with the case where the irradiation direction of the light irradiation part 140 faces the lower direction perpendicular to the stage part 110, the irradiation area reaches the area of the master mold 10 through which the pressing roller part 120 passes. Therefore, the length of the second minimum pitch L2 can be smaller than the length of the first minimum pitch L1.

With the above arrangement, since the second minimum pitch L2 having a length smaller than that of the first minimum pitch L1 is provided, the minimum length of the movement of the pressing roller portion 120 is reduced, thereby reducing the size of the apparatus. In addition, compared with the first minimum pitch L1, there is an effect that the consumption of the thin film 60 is reduced. Also, when the nanoimprint process is performed using the thin film 60 having the second minimum pitch L2, the time required to move from one replica 20 to the next replica 20 is reduced as compared with the first minimum pitch L1, so There is an effect that the process time can be shortened. In addition, since the resin 70 pressed against the master mold 10 through the pressing roller portion 120 is immediately cured, there is an effect that the process time required for curing the resin 70 can be shortened. In addition, since the resin 70 is immediately cured, the transfer mold 20 is formed in a state in which the variation of the pattern formed on the resin 70 by the pressing roller part 120 is minimized, and thus there is an effect of preventing failure of the transfer mold 20 .

As shown in FIGS. 5 and 6 , as a specific description of the embodiment, the light irradiation part 140 may include an irradiation direction guide part 160 .

The irradiation direction guide portion 160 may be guided in such a manner that the irradiation direction is inclined within 10 to 80 degrees with respect to the lower direction of the stage portion 110 perpendicular to the lower side of the irradiation press roller portion 120 at 0 degrees. .

As an example, as shown in FIGS. 5 and 6 , the irradiation direction guide portion 160 may be formed to guide the movement of the protruding portion 161 protruding from the light irradiation portion 140 formed to be rotatable to guide the light The slope of the irradiation direction has a structure in which a guide groove 162 having a curved shape with a length is combined with a fixing portion 163 that is fixed so as to prevent a change in the slope of the irradiation direction.

As another embodiment, although not shown in the drawings, the irradiation direction guide portion 160 is a structure that can pass through an actuator to change the slope of the light irradiation direction.

In this way, the irradiation direction guide portion 160 has an effect of further guiding so that the slope of the light irradiation direction of the light irradiation portion 140 can be changed within a limited value according to the purpose.

As shown in FIG. 4 , the irradiation area can be diffused by the light generated by the light emitting unit 143 of the light irradiation unit 140 that directly reaches the direct irradiation area 142A of the resin 70 and the surrounding of the direct irradiation area 142A to reach the diffusion irradiation area 142B of the resin 70 . constitute.

The direct irradiation area 142A of the transmitted light irradiation part 140 may be irradiated with light through the diffusion irradiation area 142B in a superimposed manner to complete the light irradiation area of the resin 70 . At this time, the degree of curing of the regions of the resin 70 irradiated with light in a superimposed manner varies. For example, compared with the other side of the resin 70 to which the light irradiation section 140 finishes light irradiation, the side of the resin 70 from which the light irradiation section 140 starts light irradiation is irradiated with light more overlappingly through the diffusion irradiation area 142B, and thus cured. The degree may be higher.

The difference in the degree of curing caused by the overlapping of such light irradiation affects the separation of the master mold 10 and the replica mold 20 , and there is a problem that the replica mold 20 becomes defective.

As shown in part (a) of FIG. 7 , although it is possible to solve the problem of different degrees of curing by passing the diffusely irradiated area 142B completely through the resin 70 to irradiate light to all areas of the resin 70 overlappingly, this may be different from the diffused irradiated area. 142B completely passes through the resin 70, and the first separation distance S1 between the pressing roller part 120 and the resin 70 is determined accordingly.

Since the first separation distance S1 is the minimum length that the pressing roller part 120 moves, there is a problem that the size of the apparatus becomes larger in proportion to the first separation distance S1.

In order to solve such a problem, as a specific description of this embodiment, as shown in FIG. 6 , the light irradiation part 140 may include a light shielding part 141 .

The light shielding portion 141 may be configured to protrude from the light irradiating portion 140 to shield the diffusion of light irradiated to the resin 70 , thereby preventing the light from being irradiated to the resin 70 overlappingly.

The light shielding portion 141 may be arranged such that the irradiation area of the light irradiation portion 140 is located between the light shielding portion 141 and the pressing roller portion 120 .

The width of the light shielding portion 141 may be larger than that of the light emitting portion 143 of the light irradiation portion 140 , and may have a protruding length that does not interfere with the moving route of the film 60 . For example, as shown in FIG. 6 , the light shielding portion 141 may be formed in a plate shape and arranged on the light irradiation portion 140 .

As shown in part (b) of FIG. 7 , the light shielding portion 141 shields the light irradiated from the diffusion irradiation region 142B to the resin 70 in a superimposed manner, so that the degree of curing of the resin 70 is constant, and the gap between the pressing roller portion 120 and the resin 70 can be made constant. The second separation distance S2 is minimized.

With the above arrangement, the light shielding portion 141 shields the light irradiated from the diffusion irradiation region 142B to the resin 70 in a superimposed manner, so that the degree of curing of the resin 70 is constant, the mold release process is not affected, and the replica mold 20 is prevented from being defective. . In addition, since the second separation distance S2 having a length smaller than the first separation distance S1 is provided, the minimum length of the movement of the pressing roller part 120 is reduced, and thus the size of the apparatus is reduced.

Next, the example of the film angle maintaining roll part 170 in the manufacturing apparatus of the replica mold 20 will be described.

The film angle maintaining roller part 170 may be configured such that the film 60 supplied from the film supply part 30 enters earlier than the pressing roller part 120 . For example, the film angle maintaining roller part 170 may be located on the side of the supply film 60 compared to the pressing roller part 120 , and may be located on the upper side compared to the pressing roller part 120 . In addition, the film angle maintaining roller part 170 and the light irradiation part 140 may be located on both sides across the pressing roller part 120 , and the pressing roller part 120 may be located on the side of the supply film 60 compared to the light irradiation part 140 .

The entry angle FG, which is the angle at which the film 60 enters the pressing roll portion 120, may be determined by the horizontal positions of the adjacent rolls.

As shown in part (a) of FIG. 8 , with regard to the entry angle FG, the entry angle can be changed at any time during the movement of the pressing roller portion 120 from one side of the standby position to the other side and back to the standby position again. fg. That is, for the molding process and the demolding process to proceed, the entry angle FG may be changed as the pressing roller portion 120 moves in a horizontal position adjacent to the adjacent guide rollers 50 and in a spaced manner.

Such an approach angle FG has a problem in that the change of the approach angle FG becomes steeper as the horizontal position of the guide roller 50 adjacent to the pressing roller portion 120 located at the standby position becomes closer. In addition, when the entry angle FG changes sharply, the separation of the master mold 10 and the replica mold 20 in the demolding process will not be performed at the same angle, which will cause a problem that the replica mold 20 is defective. In addition, in order to perform the molding process and the mold release process, the tension of the film 60 needs to be maintained. However, when the entry angle FG changes rapidly, the tension of the film 60 also changes, so there is a need for an independent mechanism to maintain the film 60. tension problem. For example, the independent mechanism for maintaining tension may be a tension roller mechanism including a position change with changes in the tension of the film 60 to maintain the tension of the film 60, or the rotation of the film supply 30 relative to the film 60 in order to unwind the film 60 A mechanism for maintaining the tension of the film 60 by rotating in the reverse direction, or by rotating the film recovery part 40 in the reverse direction relative to the direction in which the film 60 is rotated, or by rotating both the film supply part 30 and the film recovery part 40 in the reverse direction. . Furthermore, the existence of an independent mechanism for maintaining the tension of the film 60 has a problem of preventing the smooth intermittent supply of the film 60 . At this time, as shown in part (b) of FIG. 8 , when the horizontal positions of the guide rollers 50 adjacent to the pressing roller portion 120 located at the standby position are spaced apart, the problem of abrupt changes in the entry angle FG can be solved, although the entry angle The magnitude of the change in FG is small, but it is still effective, and there is another problem that the size of the apparatus is increased because the horizontal positions of the rollers adjacent to the pressing roller portion 120 in the standby position are spaced apart.

In order to solve such a problem, as a specific description of the embodiment, as shown in FIG.

The film angle maintenance roll portion 170 may be vertically and horizontally spaced from the pressure roll portion 120 by changing the angle at which the film 60 enters the pressure roll portion 120 .

The combined moving part 150 may be combined with the film angle maintaining roller part 170 and the pressing roller part 120 to move together through the transfer part driving unit 130 .

As shown in part (c) of FIG. 8 , the film angle maintaining roller portion 170 is combined with the pressing roller portion 120 in the process that the pressing roller portion 120 is moved from the standby position on one side to the other side and back to the standby position again. By moving, the entry angle FG, which is the angle at which the film 60 enters the press roll portion 120, can be maintained constant.

The length of the film 60 between the film angle maintaining roller portion 170 and the pressing roller portion 120 may correspond to the length that the pressing roller portion 120 moves in the horizontal direction for forming the replica mold 20, so that the film angle maintaining roller portion 170 can be connected with the film The surfaces of the transfer mold 20 are formed on both surfaces of the 60 , but the film angle maintaining roll portion 170 does not come into contact with the transfer mold 20 during the mold release process. That is, as shown in FIG. 14 , the length of the film 60 between the film angle maintaining roller part 170 and the pressing roller part 120 may be greater than the length in the horizontal direction of the transfer mold 20 .

In this way, the film angle maintaining roll portion 170 has the effect of maintaining the entry angle FG constant. In addition, the film angle maintaining roller portion 170 can minimize the horizontal position spaced apart by the guide rollers 50 adjacent to the pressing roller portion 120, thus having the effect of reducing the size of the apparatus. In addition, the film angle maintaining roller part 170 can prevent the change of the entry angle FG caused by the movement of the pressing roller part 120, so that the tension of the film 60 can be maintained even without an independent mechanism, and thus the intermittent supply of the film 60 can be smoothed. Effect.

The molding process is performed so that the pressing roller part 120 is moved in the moving direction of the film 60 moving so that the film 60 unwound from the film supply part 30 is recovered to the film recovery part 40 , and the pressing roller part 120 is moved toward the film 60 . In order to perform the demolding process by moving in a direction opposite to the moving direction of the film angle maintaining roller part 170 , the film angle maintaining roller part 170 needs to be configured in a moving direction toward the film 60 compared to the pressing roller part 120 . Therefore, there is a problem that the transfer mold 20 comes into contact with the film angle maintaining roller portion 170 during the movement so that the transfer mold 20 formed through the molding process and the mold release step is recovered to the film recovery unit 40 . and injured.

In order to prevent the replica mold 20 from coming into contact with the film angle maintaining roller 170, it is possible to include a member for moving the position of the film angle maintaining roller 170 and the pressing roller 120 by separating them, or to separate the molding process and the demolding process independently. components to solve the problem, but it is difficult to regard it as a better way to solve the problem.

To solve such a problem, the pressing roller part 120 may move in the opposite direction to the moving direction of the film 60 to perform the molding process, and the pressing roller part 120 may move in the moving direction of the film 60 to perform the demolding process. In addition, the film angle maintaining roller part 170 may be configured to be oriented in a direction opposite to the moving direction of the film 60 compared to the pressing roller part 120 .

With the above arrangement, the effect of preventing the transfer mold 20 from being damaged due to contact with the film angle maintaining roller 170 can be achieved without including a member for moving the position of the film angle maintaining roller 170 and the pressing roller 120 apart, or separately. Separate components for the molding process and the demolding process.

In addition, in order to prevent the guide roller 50 from coming into contact with the replica mold 20 moving along the film 60 recovered to the film recovery part 40 , the film recovery part 40 may be located on the upper side compared to the pressing roller part 120 , so that the two sides of the guide roller 50 and the film 60 are located on the upper side. Different surface contacts of the surfaces of the replica mold 20 are formed in each of the surfaces. That is, the guide roller 50 can be brought into contact only with the surface on which the transfer mold 20 is not formed among the two surfaces of the film 60 and not with the surface on which the transfer mold 20 is formed.

With the above configuration, the film recovery portion 40 located on the upper side compared to the pressing roller portion 120 has the effect of preventing the guide roller 50 from contacting the transfer mold 20 .

Next, an embodiment of the dispenser unit 180 of the apparatus for producing the replica mold 20 will be described.

When the resin 70 is directly applied to the pattern of the master mold 10, the application capacity may vary due to uneven application.

The problem of such variation in coating capacity is that when the coating capacity is insufficient, the pattern of the transfer mold 20 is not formed, and when the coating capacity is excessive, the resin 70 remains in the transfer mold 20 as a residue. cause it to contaminate other components and cause defects.

In order to solve such a problem, as a concrete description of the embodiment, as shown in FIG. 9 , the distributor part 180 and the pressing roller driving unit 210 may be included.

The dispenser portion 180 can apply the resin 70 to the coating area PA, which is the space between the pressing roller portion 120 located at the standby position and the pattern of the mother mold 10 , so as not to overlap with the pattern of the master mold 10 . . At this time, the application area PA may be the upper surface of the stage portion 110 .

The dispenser portion 180 can apply the resin 70 through the dispenser nozzle 181 .

As shown in FIGS. 18 to 20 , the dispenser portion 180 may apply the resin 70 in various forms. For example, as shown in FIG. 18 , the dispenser portion 180 may apply the resin 70 in a row. In addition, as shown in FIG. 19, the dispenser portion 180 may coat the resin 70 in two or more rows (although not shown). Furthermore, as shown in FIG. 20 , the dispenser portion 180 may be coated with the resin 70 in a row or separated into a plurality of rows (although not shown, eg, in the shape of a dotted line).

The pressing roller driving unit 210 may move the vertical position of the pressing roller part 120 to form a gap between the stage part 110 and the pressing roller part 120 .

Through such a distance between the stage portion 110 and the pressing roller portion 120 , the resin 70 can be spread in the horizontal direction in which the pressing roller portion 120 is moved and applied to the pattern of the master mold 10 .

Also, the pressing roller driving unit 210 may be an actuator.

With the above arrangement, since the resin 70 is indirectly applied to the pattern of the master mold 10 by diffusing the resin 70 , there is an effect that variation in the coating capacity of the resin 70 applied to the pattern of the master mold 10 does not occur.

As a specific description of the embodiment, as shown in FIG. 9 , a stage driving unit 200 and a distributor driving unit (not shown) may be included.

The stage driving unit 200 can raise and lower the stage portion 110 .

The dispenser driving unit may introduce the dispenser part 180 into the stage part 110 descended through the stage driving unit 200 to apply the resin 70 , and then lead out the dispenser part 180 .

The stage driving unit 200 and the dispenser driving unit may be actuators.

Next, the manufacturing process of the replica mold 20 will be described in detail with respect to the above-mentioned manufacturing apparatus of the replica mold 20 .

First, the molding process steps will be described.

As shown in FIGS. 9 to 12 , instead of directly applying the resin 70 on the pattern of the master mold 10 , the resin 70 may be applied in the application area PA provided in the space spaced apart from the pattern of the master mold 10 to The pattern of the master mold 10 molds (bonds) the resin 70 to form the replica mold 20 .

For example, first, as shown in FIG. 9 , the stage part 110 may be lowered to form a space between the film 60 and the stage part 110 into which the dispenser part 180 can be introduced.

After that, as shown in FIG. 16 , the dispenser part 180 may be introduced into the inner side of the stage part 110 from the side surface of the stage part 110 .

Furthermore, as shown in FIGS. 17 and 18 , when the dispenser portion 180 is drawn out, the resin 70 may be applied to the application area PA.

Then, as shown in FIG. 10 , the stage portion 110 to which the resin 70 is applied can be raised.

Furthermore, as shown in FIGS. 11 and 12 , when the pressing roller part 120 moves from the standby position on one side to the other side, the resin 70 applied to the application area PA can be diffused and applied to the pattern of the master mold 10 . . That is, the resin 70 can be spread in the horizontal direction in which the press roller part 120 moves through the gap between the stage part 110 and the press roller part 120 to be applied to the pattern of the master mold 10 .

At this time, the pressing roller portion 120 may form the replica mold 20 by bonding the resin 70 to the pattern of the master mold 10 while moving on the upper side of the resin 70 applied to the pattern of the master mold 10 (molding process).

In this way, the position within the coating area PA where the resin 70 is initially applied and the position where the resin 70 is bonded to the pattern of the master mold 10 can be spaced apart in the horizontal direction.

In addition, the light irradiation part 140 may cure the resin 70 to form the replica mold 20 while moving together with the pressing roller part 120 .

Next, the demolding step will be described.

As shown in FIGS. 13-15 , the master mold 10 and the replica mold 20 may be separated to form the replica mold 20 attached to the underside of the film 60 .

For example, as shown in FIGS. 13 to 14 , when the pressing roller portion 120 moves from the other side to the standby position on one side, the angle of the film 60 formed by the film angle maintenance roller portion 170 entering the pressing roller portion 120 can be maintained from the film angle to the pressing roller portion 120 . The master mold 10 separates the replica mold 20 .

After that, as shown in FIG. 15 , the film 60 may be moved to move the completed replica mold 20 to one side of the film recovery portion 40 , and then the stage portion 110 is lowered to form the replica mold 20 .

At this time, when the stage part 110 is lowered, the robot arm (not shown) can replace the master mold 10 with another master mold 10 .

The manufacturing process of such a replica mold 20 may be repeated a plurality of times.

Although the present invention has been described in detail through the above-mentioned preferred embodiments, the present invention is not limited thereto, but can be variously implemented within the scope of the patent application.

30: Film Supply Department

40: Film Recycling Department

50: Guide roller

60: Film

100: Transfer part

Claims (6)

A replica mold manufacturing device for nanoimprinting, comprising: a transfer part, which forms a replica mold on a film supplied from one side; a film supply part, which intermittently unwinds the film to the transfer section supplies the film; and a film recovery section that intermittently reels the film to recover the film from the transfer section, the transfer section comprising: a stage section for seating and forming a film for coating A master mold for fabricating a resin pattern; a pressing roller part, which moves in the horizontal direction to form the copying mold; a transfer part driving unit, which moves the pressing roller part from a standby position on one side to the other one side and then return to the standby position for driving; a light irradiating part that irradiates light to the resin; and a combining moving part that is combined with the light irradiating part and the pressing roller part to pass through the transfer part together The drive unit moves, and the irradiation direction of the light irradiation section is inclined toward the pressing roller section with reference to the downward direction perpendicular to the stage section. The device for making a replica mold for nanoimprinting according to claim 1, wherein the light irradiation part includes an irradiation direction guide part, and the irradiation direction guide part guides the irradiation direction in a manner of inclining the irradiation direction within 10 degrees to 80 degrees. . The device for making a replica mold for nanoimprinting according to claim 1 or claim 2, wherein the light irradiating portion further comprises a light shielding portion, and the light shielding portion is disposed protruding from the light irradiating portion to shield the light irradiating to the The light of the resin is prevented from being diffused and irradiated to the resin in a superimposed manner. The device for making a replica mold for nanoimprinting as claimed in claim 1, further comprising: a guide roller, with one or more guide rollers disposed between the film recovery part and the transfer part to adjust the entry angle of the film , and the transfer portion further comprises a film angle maintaining roller portion, the film angle maintaining roller portion is used to change the way the film enters the angle of the pressing roller portion, and is spaced apart from the pressing roller portion in the vertical and horizontal directions , the film angle maintaining roller part is configured to make the film supplied from the film supply part enter earlier than the pressing roller part, and the length of the film between the film angle maintaining roller part and the pressing roller part corresponds to In order to form the replica mold at the pressing roller part, the horizontal direction is The length of the upward movement so that the film angle maintaining roller part is in contact with the surface of the two sides of the film forming the replica mold, but the film angle maintaining roller part is not in contact with the replica mold during a demolding process. In contact, the guide roller is in contact with a different one of the two sides of the film on which the replica mold is formed to prevent the guide roller from contacting the replica mold moving along the film recovered to the film recovery section. The replica mold making device for nanoimprinting as claimed in claim 1, further comprising: a dispenser part which coats the resin on a coating area in a manner that does not overlap with the pattern of the master mold, the The coating area is the space between the pressing roller portion at the standby position on one side and the pattern of the master mold; and a pressing roller driving unit that moves the vertical position of the pressing roller portion to be in contact with the stage portion. The pressure roller part is driven in such a way that a distance is formed between the pressure roller parts, and the pressure roller part moves the resin from the standby position on one side to the other side through the distance between the stage part and the pressure roller part. Spread in the horizontal direction to coat the pattern on the master. The replica mold making device for nanoimprinting according to claim 5, further comprising: a stage driving unit, which makes the stage part move up and down; and A dispenser drive unit that introduces the dispenser portion into the stage portion lowered through the stage drive unit for coating the resin and then leads out the dispenser portion.

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