JP2022013799A - Nanoimprint replica mold manufacturing device - Google Patents

Abstract

To provide a nanoimprint replica mold manufacturing device in which a deflection of a coating capacity of a range not occur while reducing the size.SOLUTION: A replica mold manufacturing device contains: a transfer part 100 in which a film supplied from one side forms a replica mold; a film supply part 30 supplying the film toward the transfer part by continuously winding the film; and a film recover part 40 recovering the film from the transfer part by continuously winding the film. The transfer part contains: a stage part to which a master mold on which a pattern to which a resin is coated is formed is mounted; a press roller part forming the replica mold by being moved to a horizontal direction; and a transfer part driving unit driven in order to move the press roller part from a standby position of one side to the other side and recover it again to the standby position.SELECTED DRAWING: Figure 1

Description

The present invention relates to a replica mold manufacturing apparatus for nanoimprint.

Recently, in display and semiconductor processes, to form patterns on the surface of substrates (eg, display panels and wafers, etc.), such as structured molding patterns and mask patterns for etching or vapor deposition. A NanoImplint process is used.

In the nanoimprint process of forming a fine pattern of nanometer to micrometer size on the surface of a substrate in an Imprint form using Mold, the pattern is directly formed on the surface of the substrate using Master Mold 10. Although it may be formed, recently, a method of manufacturing a replica mold 20 from a master mold 10 and forming a pattern on the surface of a substrate by using the manufactured replica mold 20 is mainly used.

At this time, the secondary replica mold 20 duplicated from the primary replica mold 20 manufactured from the master mold 10 can be manufactured. The primary replica mold 20 for producing such a secondary replica mold 20 can also be referred to as a master mold 10. That is, the master mold 10 may mean a common name for the mold that manufactures the replica mold 20. Further, the replica mold 20 may mean a common name for a mold manufactured from the master mold 10.

In one of various methods for manufacturing such a replica mold 20, the press roller portion 120 is replicated to the film 60 by advancing (molding step) and reverse (demolding step) on the upper side of the film 60. There is a roll transfer method for forming the mold 20.

On the other hand, the replica mold 20 manufacturing apparatus that carries out the roll transfer method has a problem that the size of the apparatus increases in proportion to the length in which the press roller portion 120 advances.

Further, the replica mold 20 manufacturing apparatus has a problem that the size of the apparatus becomes large in order to make the angle at which the film 60 enters the press roller portion 120 constant.

Further, the replica mold 20 manufacturing apparatus has a problem that a deviation in the coating capacity occurs when the resin 70 is applied to the pattern of the master mold 10.

An object of the present invention is to provide a replica mold manufacturing apparatus for nanoimprint.

The replica mold manufacturing apparatus for nanoimprint according to the embodiment of the present invention has a transfer portion that forms a replica mold on a film supplied from one side, and the film is intermittently unwound and the film is directed toward the transfer portion. The film supply unit to supply and
The transfer unit includes a film recovery unit that intermittently winds the film and collects the film from the transfer unit, and the transfer unit is horizontal to a stage unit on which a master mold having a pattern to which a resin is applied is mounted. A press roller unit that moves in a direction to form the replica mold, and a transfer unit drive unit that is driven to move the press roller unit from a standby position on one side to the other side and return it to the standby position again. The light irradiation unit includes a light irradiation unit that irradiates the resin with light, a coupling moving unit that is coupled to the light irradiation unit and the press roller unit and is moved by the drive unit, and the light irradiation unit has the irradiation direction described above. Tilt toward the press roller portion with reference to the lower direction perpendicular to the stage portion.

According to the embodiment, the light irradiation unit includes an irradiation direction guide unit that guides the irradiation direction so as to be tilted within 10 to 80 degrees.

According to the embodiment, the light irradiation unit is arranged so as to project from the light irradiation unit, and is a light-shielding unit that shields the resin from being diffused by the light irradiating the resin and irradiating the resin with light. Including further.

According to the embodiment, one or more guide rolls are arranged between the film recovery section and the transfer section to adjust the approach angle of the film, and the transfer section further includes the film entering the press roller section. A film angle maintaining roller section that is vertically and horizontally separated from the press roller section so as to change the angle is further included, and the film angle maintaining roller section is preceded by the film supplied from the film supply section from the press roller section. The film angle maintaining roller portion is in contact with the surface of both sides of the film on which the replica mold is formed. The length of the film between the film angle maintaining roller section and the press roller section corresponds to the length of the press roller section moving horizontally to form the replica mold so as not to contact the mold. The guide roll is placed on both sides of the film, which is different from the surface on which the replica mold is formed, so that the guide roll does not come into contact with the replica mold that moves along the film collected by the film recovery unit. Contact.

According to the embodiment, the dispenser portion that applies the resin to the coating region, which is the space between the press roller portion located at the standby position on one side and the pattern of the master mold, so as not to overlap the pattern of the master mold. Further includes a press roller drive unit that moves the vertical position of the press roller portion to drive the stage portion and the press roller portion so as to form a space between the stage portion and the press roller portion. The resin is diffused in the horizontal direction in which the press roller portion moves from the standby position on one side to the other side through the interval between them, and is applied to the pattern of the master mold.

According to the embodiment, the dispenser drive that pulls the dispenser part into the stage drive unit that raises and lowers the stage part and the stage part that is lowered by the stage drive unit to apply the resin and pulls out the dispenser part again. Includes more units.

According to an embodiment, a transfer unit that forms a replica mold on a film supplied from one side, a film supply unit that intermittently unwinds the film and supplies the film toward the transfer unit, and the film. A film recovery unit that is intermittently wound to collect the film from the transfer unit, and a guide roll that is arranged between the film collection unit and the transfer unit to guide the film to the film collection unit. In order to prevent the guide roll from contacting only the surface of both sides of the film where the replica mold is not formed and not the surface where the replica mold is formed, the transfer portion is horizontal. The press roller section located below the film recovery section and one side to which the film is supplied from the guide roll and the press roller section stand by so as to move in the direction to form the replica mold. The transfer unit drive unit driven to move the film from the position toward one side to which the film is supplied to proceed with the molding process, return to the standby position again, and proceed with the demolding process, and the film is said to be said. The press roller is located on one side where the film is supplied from the press roller portion and is located on the opposite side of the guide roll with the press roller portion sandwiched so as to change the angle of entry into the press roller portion. The film includes a film angle maintaining roller portion located above the portion, a coupling moving portion that is coupled so as to move both the film angle maintaining roller portion and the press roller portion, and is moved by the transfer unit driving unit. In the angle maintaining roller section, the film is supplied from the film supply section to the transfer section, the molding step is advanced, the demolding step is advanced, and the film is recovered from the transfer section to the film recovery section. The position of the guide roll with the press roller portion is not changed, the position of the guide roll is not moved while the film angle maintaining roller portion and the press roller portion move, and the film angle is maintained while the molding process is performed. The separation distance of the roller portion and the press roller portion from the guide roll increases, and the separation distance of the film angle maintaining roller portion and the press roller portion decreases from the guide roll while the dimolding step is in progress.

According to the embodiment, the distance between the film angle maintaining roller section and the film supply section is shorter than the distance between the press roller section and the film supply section, and the film angle maintaining roller section is on both sides of the film. Between the film angle maintaining roller portion and the press roller portion so that the film angle maintaining roller portion does not come into contact with the replica mold during the progress of the dimolding step of contacting the surface on which the replica mold is formed. The length of the film corresponds to the length by which the press roller portion moves horizontally to form the replica mold.

According to an embodiment, a transfer portion for forming a replica mold on a film supplied from one side and a dispenser portion are included, and the transfer portion is horizontal to a stage portion on which a master mold having a pattern formed on an upper surface is mounted. The dispenser includes a press roller unit that moves in a direction to form the replica mold, and a transfer unit drive unit that is driven to move the press roller unit horizontally from a standby position and return the press roller unit to the standby position again. The portion is a space between the press roller portion located at the standby position and the pattern of the master mold, and the resin is applied to the coating area on the upper surface of the stage portion so as not to overlap with the pattern of the master mold. While moving horizontally from the standby position, the press roller portion diffuses the resin in the horizontal direction from the coating area, which is a region that does not overlap with the pattern of the master mold, and spreads the resin on the upper surface of the master mold. The resin is applied and the resin is bonded to the pattern of the master mold to form a replica mold while moving the upper side of the resin applied to the upper surface of the master mold, and the resin is first applied in the application area. The position to be formed and the position to bond the resin to the pattern of the master mold are separated in the horizontal direction.

According to the embodiment, the dispenser drive that pulls the dispenser part into the stage drive unit that raises and lowers the stage part and the stage part that is lowered by the stage drive unit to apply the resin and pulls out the dispenser part again. Includes more units.

According to the embodiment, the press roller drive unit further includes a press roller drive unit that moves the vertical position of the press roller portion to drive the stage portion and the press roller portion so as to form a space between the stage portion and the press roller portion. The resin is diffused through the space between the stage portion and the press roller portion by moving from the space between the stage portion and the press roller portion.

According to the embodiment, the stage lowering stage in which the stage portion is lowered and the dispenser portion are pulled out to the inside of the stage portion and pulled out to the upper surface of the master mold without directly applying the resin to the pattern of the master mold. A coating stage in which the resin is applied to the coating area on the upper surface of the stage portion while being a space separated from the formed pattern, an ascending stage in which the stage portion rises, and a press roller portion move horizontally from the standby position. While including a molding step of horizontally diffusing the resin so that the resin is applied to a pattern formed on the upper surface of the master mold, in the molding step, the press roller portion is placed on the upper surface of the master mold. While moving on the upper side of the applied resin, the resin is bonded to the pattern of the master mold to form a replica mold, and the position where the resin is first applied and the pattern of the master mold in the application area are formed. The positions where the resin is bonded to the metal are separated in the horizontal direction.

According to the embodiment, a dimolding step of moving the press roller portion to the standby position so that the master mold and the replica mold are separated and adhered to the lower side of the film, and the replica mold on the film recovery portion side. Further includes a recovery step of moving the film to move to, in the molding step the light irradiating section moves with the press roller section to cure the resin, and in the demolding step the replica mold is said to be said. The press roller portion is separated from the master mold through the angle at which the press roller portion enters the press roller portion of the film formed by the film angle maintaining roller portion while moving to the standby position, and after the recovery step, another replica mold is used. The stage descending step, the coating step, the ascending step, the molding step, the dimolding step and the recovery step are re-performed in order to form.

According to an embodiment, a transfer unit that forms a replica mold on a film supplied from one side, a film supply unit that intermittently unwinds the film and supplies the film toward the transfer unit, and the film. The transfer section includes a film recovery section that intermittently winds up and recovers the film from the transfer section, and the transfer section includes a stage section on which a master mold having a pattern to which a resin is applied is mounted, and a horizontal direction. Includes a press roller section that moves to form the replica mold and a film angle maintaining roller section that separates the film vertically and horizontally from the press roller section so as to change the angle at which the film enters the press roller section. The press roller section and the film angle maintaining roller section move in a direction opposite to the moving direction of the film, which moves so that the film unwound from the film supply section is collected by the film recovery section. Then, the molding step is executed, and the press roller portion and the film angle maintaining roller portion move in the moving direction of the film to carry out the demolding step.

According to the embodiment, the film angle maintaining roller portion is located so as to face the direction opposite to the moving direction of the film from the press roller portion.

According to the embodiment, the film recovery section is located above the press roller section.

According to the embodiment, the transfer portion further includes a coupling moving portion that is coupled so as to move the film angle maintaining roller portion and the press roller portion together and is moved by the transfer unit driving unit.

According to an embodiment, the film angle maintaining roller portion is in contact with the surface of both sides of the film on which the replica mold is formed, and the film angle maintaining roller portion is attached to the replica mold while the dimolding step is in progress. The length of the film between the film angle maintaining roller portion and the press roller portion corresponds to the length of the press roller portion moving horizontally to form the replica mold so as not to come into contact with each other.

According to the embodiment, the film angle maintaining roller section is positioned so that the film supplied from the film supply section enters the press roller section first.

According to the embodiment, one or more guide rolls arranged between the film recovery unit and the transfer unit to adjust the approach angle of the film are further included, and the guide roll is applied to the film collected by the film recovery unit. The guide roll contacts both sides of the film, which are different from the surface on which the replica mold is formed, so as not to contact the replica mold moving along the film.

First, since the minimum length for the press roller portion to move is reduced by providing the second minimum interval, which is smaller than the length of the first minimum interval, there is an effect that the size of the device is reduced. Further, there is an effect that the amount of film consumed is reduced as compared with the first minimum interval. Further, when the nanoimprint process is carried out using the film having the second minimum interval, the time required to move from the replica mold to the next replica mold is reduced as compared with the first minimum interval, so that the process time is shortened. There is an effect that can be done. Further, since the resin pressurized to the master mold by the press roller portion is immediately cured, there is an effect that the process time required for curing the resin can be shortened. Further, since the resin is cured immediately, the replica mold is formed in a state where the change in the pattern formed on the resin by the press roller portion is minimized, so that there is an effect of preventing the replica mold from being defective.

Further, the irradiation direction guide unit has an effect of guiding the inclination of the light irradiation direction of the light irradiation unit so that it can be changed within a limited numerical value so as to suit the purpose.

In addition, the light-shielding portion is defective in the replica mold because the diffused irradiation region shields the resin from being repeatedly irradiated with light so that the degree of curing of the resin is constant and does not affect the dimolding process. Has the effect of preventing the occurrence of. Further, since the minimum length for the press roller portion to move is reduced by providing the second separation distance, which is a length smaller than the length of the first separation distance, there is an effect that the size of the device is reduced.

Further, the film angle maintaining roller portion has an effect of maintaining a constant approach angle. Further, since the film angle maintaining roller portion can minimize the separated horizontal position of the guide roll adjacent to the press roller portion, there is an effect that the size of the apparatus is reduced. Further, the film angle maintaining roller portion can maintain the tension of the film without any other means by preventing the approach angle from being changed due to the movement of the press roller portion, and thus the intermittent supply of the film is smooth. There is an effect that can be.

Further, even if the film angle maintaining roller portion is separated from the press roller portion and the position is moved, or the configuration for the molding process and the demolding process is not separately separated, the film angle maintaining roller portion is replica-molded. Has the effect of preventing contact and damage.

Further, the film collecting portion located above the press roller portion has an effect of preventing the guide roll from coming into contact with the replica mold.

Further, since the resin is indirectly diffused and applied to the master mold pattern, there is an effect that the deviation of the coating capacity of the resin applied to the master mold pattern does not occur.

It is a drawing about the replica mold manufacturing apparatus for nanoimprint which concerns on embodiment of this invention. It is a drawing about the transfer part which concerns on embodiment of this invention. It is a drawing which illustrated the back surface of FIG. It is a figure about the light irradiation part which concerns on embodiment of this invention. It is a figure about the light irradiation part which concerns on embodiment of this invention. It is a figure about the light irradiation part which concerns on embodiment of this invention. It is a drawing about the 1st separation distance and the 2nd separation distance which concerns on embodiment of this invention. It is a drawing about the approach angle which concerns on embodiment of this invention. It is a drawing about the molding process and the demolding process which concerns on embodiment of this invention. It is a drawing about the molding process and the demolding process which concerns on embodiment of this invention. It is a drawing about the molding process and the demolding process which concerns on embodiment of this invention. It is a drawing about the molding process and the demolding process which concerns on embodiment of this invention. It is a drawing about the molding process and the demolding process which concerns on embodiment of this invention. It is a drawing about the molding process and the demolding process which concerns on embodiment of this invention. It is a drawing about the molding process and the demolding process which concerns on embodiment of this invention. It is a drawing about the dispenser part which concerns on embodiment of this invention. Located to face.). It is a drawing about the dispenser part which concerns on embodiment of this invention. Located to face.). It is a drawing about the dispenser part which concerns on embodiment of this invention. Located to face.). It is a drawing about the dispenser part which concerns on embodiment of this invention. Located to face.). It is a drawing about the dispenser part which concerns on embodiment of this invention. Located to face.).

Hereinafter, examples of the present invention will be described in detail with reference to the accompanying drawings so as to be easily carried out by a person having ordinary knowledge in the technical field to which the present invention belongs.

The present invention can be embodied in a variety of different forms and is not limited to the examples described herein.

In the present invention, the horizontal direction may mean the direction toward the X-axis or the left and right directions in the drawing, and the vertical direction may mean the direction toward the Y-axis or the upper and lower directions in the drawing.

In the present invention, length can mean a relative distance to the X-axis and height can mean a relative distance to the Y-axis.

Recently, in display and semiconductor processes, to form patterns on the surface of substrates (eg, display panels and wafers, etc.), such as structured molding patterns and mask patterns for etching or vapor deposition. A NanoImplint process is used.

In the nanoimprint process of forming a fine pattern of nanometer to micrometer size on the surface of a substrate in an Imprint form using Mold, the pattern is directly formed on the surface of the substrate using Master Mold 10. Although it may be formed, recently, a method of manufacturing a replica mold 20 from a master mold 10 and forming a pattern on the surface of a substrate by using the manufactured replica mold 20 is mainly used.

At this time, the secondary replica mold 20 duplicated from the primary replica mold 20 manufactured from the master mold 10 can be manufactured. The primary replica mold 20 for producing such a secondary replica mold 20 can also be referred to as a master mold 10. That is, the master mold 10 may mean a common name for the mold that manufactures the replica mold 20. Further, the replica mold 20 may mean a common name for a mold manufactured from the master mold 10.

In one of various methods for manufacturing the replica mold 20 as described above, the replica mold 20 is formed on the film 60 by advancing the press roller portion 120 on the upper side of the film 60 (molding step) and moving the press roller portion 120 backward (molding step). There is a roll transfer method to form.

On the other hand, the replica mold 20 manufacturing apparatus that carries out the roll transfer method has a problem that the size of the apparatus increases in proportion to the length in which the press roller portion 120 advances.

Further, the replica mold 20 manufacturing apparatus has a problem that the size of the apparatus becomes large in order to make the angle at which the film 60 enters the press roller portion 120 constant.

Further, the replica mold 20 manufacturing apparatus has a problem that a deviation in the coating capacity occurs when the resin 70 is applied to the pattern of the master mold 10.

In order to solve such a problem, as shown in FIGS. 1 to 3, the replica mold 20 manufacturing apparatus for nanoimprint according to the embodiment of the present invention includes a transfer unit 100, a film supply unit 30, and a film recovery unit. 40 can be included.

The transfer unit 100 can form the replica mold 20 on the lower side of the film 60 supplied from one side.

The film supply unit 30 can intermittently unwind the film 60 to supply the film 60 toward the transfer unit 100.

The film recovery unit 40 can intermittently wind the film 60 and recover the film 60 from the transfer unit 100.

Such a transfer unit 100 can include a stage unit 110, a press roller unit 120, and a transfer unit drive unit 130.

The stage portion 110 may be equipped with a master mold 10 having a pattern on which the resin 70 is applied.

The pattern formed on the master mold 10 can be formed by directly processing the pattern on the upper surface of the hard base, or by adhering the pattern to the upper surface of the base. Hereinafter, when the master mold 10 is described, it may be omitted that the pattern is formed.

The press roller portion 120 can move in the horizontal direction to form the replica mold 20 by the roll transfer method.

The transfer unit drive unit 130 may be driven to move the press roller unit 120 from the standby position on one side to the other side and return it to the standby position again. That is, the transfer unit drive unit 130 can be driven to move the press roller unit 120 horizontally from the standby position and return it to the standby position again. For example, the transfer unit drive unit 130 moves the press roller unit 120 from the standby position toward one side to which the film 60 is supplied to proceed with the molding process, and then returns to the standby position again to proceed with the demolding process. Can be driven by.

The transfer unit drive unit 130 may be an actuator. For example, as illustrated in FIG. 3, the transfer unit drive unit 130 can include a motor 131, a ball screw 132 rotated by the motor 131, and a block 133 moved by the ball screw 132. Further, the block 133 is coupled to the coupling moving portion 150 described later and moves together, so that the press roller portion 120 coupled to the coupling moving portion 150 can be moved in the horizontal direction.

One or more guide rolls 50 for adjusting the approach angle FG of the film 60 may be arranged between the film supply unit 30 and the transfer unit 100 and between the film recovery unit 40 and the transfer unit 100. For example, one or more guide rolls 50 may be arranged between the film recovery unit 40 and the transfer unit 100 to guide the film 60 to the film recovery unit 40.

The master mold 10 and the resin 70 can be located between the stage portion 110 and the film 60. For example, the master mold 10 may be mounted on the upper side of the stage portion 110, the resin 70 may be applied on the upper side of the pattern formed on the upper surface of the master mold 10, and the film 60 may be positioned on the upper side of the resin 70. At this time, the press roller portion 120 that moves horizontally on the upper side of the film 60 pressurizes the film 60, so that the resin 70 located on the lower side of the film 60 can be pressed on the master mold 10.

The press roller portion 120 can form the replica mold 20 by binding the resin 70 to the pattern of the master mold 10 (molding step) while moving from the standby position on one side to the other side. Further, the press roller portion 120 separates the master mold 10 and the replica mold 20 (demolding step) while returning to the standby position on one side from the other side to form the replica mold 20 attached to the lower side of the film 60. be able to. That is, the press roller unit 120 can move horizontally from the standby position to advance the molding process, return to the standby position again, proceed to the demolding process, and form the replica mold 20. For example, the press roller unit 120 moves from the standby position toward one side to which the film 60 is supplied to proceed with the molding process, returns to the standby position again, proceeds with the demolding process, and forms the replica mold 20. be able to.

As a main embodiment of the replica mold 20 manufacturing apparatus, there is an embodiment relating to a light irradiation unit 140, a film angle maintaining roller unit 170, and a dispenser unit 180. Hereinafter, examples of the light irradiation unit 140, the film angle maintenance roller unit 170, and the dispenser unit 180 will be described, but as an example, each or two or more of them may be applied to the replica mold 20 manufacturing apparatus.

First, an embodiment relating to the light irradiation unit 140 of the replica mold 20 manufacturing apparatus will be described.

As shown in FIG. 4A, when the irradiation direction of the light irradiation unit 140 is directed to the lower direction perpendicular to the stage unit 110, the irradiation region of the light irradiation unit 140 has passed the master mold 10 by the press roller unit 120. In proportion to the length to reach the region, the first minimum spacing L1 which is the separated length between the pair of replica molds 20 formed adjacent to the film 60 can be determined.

Since the first minimum interval L1 is the minimum length for the press roller portion 120 to move, there is a problem that the size of the device increases in proportion to the first minimum interval L1. Further, there is a problem that the consumption amount of the film 60 increases in proportion to the first minimum interval L1. Further, when the nanoimprint process is carried out using the film 60 provided with the first minimum spacing L1, the time required to move from the replica mold 20 to the next replica mold 20 increases in proportion to the first minimum spacing L1. Therefore, there is a problem that the speed of the process increases. On the other hand, the pattern formed on the resin 70 by the press roller portion 120 has a problem that a change occurs with the passage of time and a defect is issued to the replica mold 20.

In order to solve such a problem, as illustrated in FIGS. 4 (b) and 5, as a specific description of the embodiment, the transfer unit 100 includes a light irradiation unit 140 and a bond moving unit 150. Can be done.

The light irradiation unit 140 can irradiate the resin 70 with light through the light generated by the light emitting unit 143 which is a light source.

At this time, the resin 70 can be a visualization resin that is cured by light energy. Further, the light irradiated to the resin 70 by the light irradiation unit 140 may be ultraviolet rays (Ultraviolet light). That is, the resin 70 can be cured by the light emitted by the light irradiation unit 140.

The light irradiation unit 140 may be formed with an inclination degree AG inclined so as to be directed toward the press roller unit 120 with respect to the lower direction in which the irradiation direction is perpendicular to the stage unit 110.

The inclination AG of the light irradiation unit 140 may be formed at an inclination for immediately irradiating the master mold 10 that the press roller unit 120 has passed. That is, the resin 70 pressurized to the master mold 10 by the press roller unit 120 can be immediately cured.

As shown in FIG. 5, the inclination AG of the light irradiation unit 140 is 10 to 80 degrees with respect to the direction toward the stage unit 110 defined at 0 degrees and the direction toward the press roller unit 120 defined at 90 degrees. Can be formed with a degree slope.

The light that the light irradiation unit 140 irradiates the resin 70 can form an irradiation region where the light reaches the resin 70.

The coupling moving unit 150 is coupled to the light irradiation unit 140 and the press roller unit 120 and can be moved together by the transfer unit driving unit 130.

When the inclination AG is formed by tilting the irradiation direction of the light irradiation unit 140 toward the press roller unit 120 with respect to the lower direction perpendicular to the stage unit 110, the irradiation region of the light irradiation unit 140 is the press roller unit. A second minimum spacing L2 between a pair of adjacent replica molds 20 formed on the film 60 can be determined in proportion to the length of time 120 passes by to reach the master mold 10 region.

Such a second minimum interval L2 is set until the irradiation region reaches the master mold 10 region where the press roller portion 120 has passed, rather than when the irradiation direction of the light irradiation unit 140 is directed to the lower direction perpendicular to the stage portion 110. Since the length of the second minimum interval L2 is small, the length of the second minimum interval L2 may be smaller than the length of the first minimum interval L1.

As described above, since the minimum length for the press roller portion 120 to move is reduced by providing the second minimum interval L2 which is smaller than the length of the first minimum interval L1, the size of the apparatus is reduced. effective. Further, there is an effect that the amount of consumption of the film 60 is reduced as compared with the first minimum interval L1. Further, when the nanoimprint process is carried out using the film 60 provided with the second minimum spacing L2, the time required to move from the replica mold 20 to the next replica mold 20 is reduced as compared with the first minimum spacing L1. It has the effect of shortening the process time. Further, since the resin 70 pressurized to the master mold 10 is immediately cured by the press roller unit 120, there is an effect that the process time required for curing the resin 70 can be shortened. Further, since the resin 70 is cured immediately, the replica mold 20 is formed in a state where the change in the pattern formed on the resin 70 by the press roller portion 120 is minimized, so that a defect occurs in the replica mold 20. It has the effect of preventing it.

As illustrated in FIGS. 5 and 6, as a specific description of the embodiment, the light irradiation unit 140 can include an irradiation direction guide unit 160.

The irradiation direction guide portion 160 guides the lower side of the press roller portion 120 so that the irradiation direction is tilted within 10 to 80 degrees with respect to the lower direction perpendicular to the stage portion 110 which is 0 degree. be able to.

As an example, the irradiation direction guide unit 160 guides the movement of the projecting portion 161 protruding from the light irradiation unit 140 formed so as to be rotatable as shown in FIGS. 5 and 6 in the light irradiation direction. The structure may be such that a fixing portion 163 for fixing the guide groove 162 having a length so as to guide the inclination so as not to change the inclination in the irradiation direction is connected to the guide groove 162.

Although the irradiation direction guide unit 160 is not shown as another embodiment, the irradiation direction guide unit 160 may have a structure in which the inclination of the light irradiation direction is changed by an actuator.

As described above, the irradiation direction guide unit 160 has an effect of guiding the inclination of the light irradiation unit 140 in the light irradiation direction so that it can be changed within a limited numerical value so as to suit the purpose.

As shown in FIG. 4, the irradiation region includes the direct irradiation region 142A in which the light generated by the light emitting portion 143 of the light irradiation unit 140 directly reaches the resin 70 and the light around the direct irradiation region 142A diffuses into the resin 70. It may consist of a reachable diffuse irradiation area 142B.

The region where the light irradiation of the resin 70 is completed by the direct irradiation region 142A of the light irradiation unit 140 may be duplicated by the diffuse irradiation region 142B. At this time, the degree of curing of the region of the resin 70 that has been repeatedly irradiated with light changes. For example, one side of the resin 70 from which the light irradiation unit 140 has started light irradiation is more and more duplicated with the diffused irradiation region 142B than the other side of the resin 70 from which the light irradiation is finished, so that the degree of curing is further increased. Can be high.

Such a difference in the degree of curing due to overlapping light irradiation affects the separation of the master mold 10 and the replica mold 20, and there is a problem that a defect occurs in the replica mold 20.

As shown in FIG. 7 (a), the problem that the degree of curing is changed by irradiating all the regions of the resin 70 with light so that the diffuse irradiation region 142B completely passes through the resin 70 is solved. However, the first separation distance S1 between the press roller portion 120 and the resin 70 can be determined so that the diffuse irradiation region 142B completely passes through the resin 70.

Since the first separation distance S1 is the minimum length for the press roller portion 120 to move, there is a problem that the size of the device increases in proportion to the first separation distance S1.

In order to solve such a problem, as illustrated in FIG. 6, as a specific description of the embodiment, the light irradiation unit 140 can include a light shielding unit 141.

The light-shielding portion 141 is arranged so as to protrude from the light irradiation unit 140, and can shield the light irradiating the resin 70 from being diffused and the resin 70 being repeatedly irradiated with the light.

The light-shielding portion 141 may be arranged so that the irradiation region of the light irradiation portion 140 is located between the light-shielding portion 141 and the press roller portion 120.

The light-shielding portion 141 has a width larger than that of the light source 143 of the light irradiation unit 140, and can have a protruding length within a range that does not interfere with the movement of the film 60. For example, as shown in FIG. 6, the light-shielding portion 141 may be formed in the shape of a plate material and arranged in the light irradiation portion 140.

As shown in FIG. 7B, the light-shielding portion 141 shields the diffusion irradiation region 142B from irradiating the resin 70 with light in an overlapping manner to keep the degree of curing of the resin 70 constant, and the press roller portion. The second separation distance S2 between 120 and the resin 70 can be minimized.

As described above, the light-shielding portion 141 shields the resin 70 from being repeatedly irradiated with light so that the degree of curing of the resin 70 is constant, and does not affect the dimolding step. Therefore, there is an effect of preventing the replica mold 20 from being defective. Further, since the minimum length for the press roller portion 120 to move is reduced by providing the second separation distance S2 which is smaller than the length of the first separation distance S1, the effect of reducing the size of the device is obtained. be.

Next, an embodiment relating to the film angle maintaining roller portion 170 of the replica mold 20 manufacturing apparatus will be described.

The film angle maintaining roller unit 170 can be positioned so that the film 60 supplied from the film supply unit 30 enters the press roller unit 120 first. For example, the film angle maintaining roller unit 170 can be located on one side where the film 60 is supplied from the press roller unit 120, and can be located on the upper side of the press roller unit 120. Further, the film angle maintaining roller unit 170 and the light irradiation unit 140 can be located on both sides of the press roller unit 120, and the press roller unit 120 can be located on one side where the film 60 is supplied from the light irradiation unit 140. ..

The approach angle FG, which is the angle at which the film 60 enters the press roller portion 120, can be determined by the horizontal position of the adjacent rolls.

As shown in FIG. 8A, the approach angle FG may be changed at any time while the press roller unit 120 moves from the standby position on one side to the other side and returns to the standby position again. That is, for the molding step and the demolding step, the approach angle FG can be changed by moving the press roller portion 120 so that the horizontal position is adjacent to and separated from the adjacent guide roll 50.

Such an approach angle FG has a problem that the horizontal position of the guide roll 50 adjacent to the press roller portion 120 located at the standby position changes abruptly as the horizontal position is adjacent to each other. Further, if the approach angle FG is suddenly changed, the master mold 10 and the replica mold 20 are not separated at the same angle in the demolding step, so that there is a problem that a defect occurs in the replica mold 20. Further, in order to carry out the molding step and the demolding step, the tension of the film 60 must be maintained, but when the approach angle FG changes abruptly, the tension of the film 60 also changes, so that the film 60 also changes. There is a problem that a separate means for maintaining the tension of the film is required. For example, another means for maintaining the tension includes a tension roll whose position changes according to the change in the tension of the film 60 to maintain the tension of the film 60, or because the film supply unit 30 unwinds the film 60. Rotate in the opposite direction to the direction of rotation, or rotate in the opposite direction of the direction in which the film recovery unit 40 rotates to wind the film 60, or rotate in the opposite direction of all of the film supply unit 30 and the film recovery unit 40. It can maintain the tension of the film 60. Further, another means for maintaining the tension of the film 60 has a problem of interfering with the smooth intermittent supply of the film 60. At this time, as shown in FIG. 8B, it is possible to solve the problem that the approach angle FG suddenly changes when the horizontal position of the guide roll 50 adjacent to the press roller portion 120 located at the standby position is separated. However, it is still effective to change the approach angle FG, although it is small, and the horizontal position of the adjacent roll is separated from the press roller portion 120 located in the standby position, so that the size of the device becomes large. There is.

In order to solve such a problem, as illustrated in FIG. 2, as a specific description of the embodiment, the transfer unit 100 can include a film angle maintaining roller unit 170 and a coupling moving unit 150.

The film angle maintaining roller section 170 can be vertically and horizontally separated from the press roller section 120 so as to change the angle at which the film 60 enters the press roller section 120.

The coupling moving unit 150 is coupled to the film angle maintaining roller unit 170 and the press roller unit 120 and can be moved together by the transfer unit driving unit 130.

As shown in FIG. 8C, the film angle maintaining roller section 170 moves together with the press roller section 120 while the press roller section 120 moves from the standby position on one side to the other side and returns to the standby position again. The approach angle FG, which is the angle at which the film 60 enters the press roller portion 120, can be kept constant.

The film angle maintaining roller portion 170 contacts the surface of both sides of the film 60 on which the replica mold 20 is formed. The film angle is prevented so that the film angle maintaining roller portion 170 does not contact the replica mold 20 during the dimolding process. The length of the film 60 between the maintenance roller section 170 and the press roller section 120 can correspond to the length of the press roller section 120 that moves horizontally to form the replica mold 20. That is, as shown in FIG. 14, the length of the film 60 between the film angle maintaining roller portion 170 and the press roller portion 120 may be larger than the horizontal length of the replica mold 20.

As described above, the film angle maintaining roller portion 170 has an effect of maintaining the approach angle FG at a constant level. Further, since the film angle maintaining roller portion 170 can minimize the separated horizontal position of the guide roll 50 adjacent to the press roller portion 120, there is an effect that the size of the apparatus is reduced. Further, the film angle maintaining roller portion 170 can maintain the tension of the film 60 without any other means by preventing the approach angle FG from being changed due to the movement of the press roller portion 120, and thus the film 60 can be intermittently maintained. It has the effect of facilitating a smooth supply.

The press roller unit 120 moves in the moving direction of the film 60 so that the film 60 unwound from the film supply unit 30 is collected by the film collecting unit 40 to carry out the molding step, and the moving direction of the film 60 In order for the press roller portion 120 to move in the opposite direction and perform the dimolding step, the film angle maintaining roller portion 170 must be positioned so as to face the moving direction of the film 60 from the press roller portion 120. In the process of moving the replica mold 20 formed by the molding step and the demolding step so as to be collected by the film collecting unit 40, there is a problem that the replica mold 20 comes into contact with the film angle maintaining roller unit 170 and is damaged. ..

In order to prevent the replica mold 20 from coming into contact with the film angle maintaining roller portion 170, the film angle maintaining roller portion 170 includes a configuration in which the film angle maintaining roller portion 170 is separated from the press roller portion 120 and moves its position, or a molding step and a demolding step. Although it can be solved by separately separating the configuration for the above, it cannot be said to be a preferable solution to the problem.

In order to solve such a problem, the press roller unit 120 moves in the direction opposite to the moving direction of the film 60 to carry out the molding process, and the press roller unit 120 moves in the film 60 moving direction to perform the molding process. Can carry out the molding process. Further, the film angle maintaining roller portion 170 can be positioned so as to face the direction opposite to the moving direction of the film 60 from the press roller portion 120.

As described above, the film angle maintaining roller portion 170 does not have to be separated from the press roller portion 120 to move the position, or the configuration for the molding step and the demolding step is not separately separated. It has the effect of preventing the replica mold 20 from coming into contact with the portion 170 and being damaged.

Further, since the guide roll 50 does not come into contact with the replica mold 20 that moves along the film 60 collected by the film recovery unit 40, the film recovery unit 40 is located above the press roller unit 120 and the guide roll 50 is a film. Of both sides of the 60, the surface different from the surface on which the replica mold 20 is formed can be contacted. That is, the guide roll 50 can be prevented from contacting only the surface of both sides of the film 60 on which the replica mold 20 is not formed, and not the surface on which the replica mold 20 is formed.

As described above, the film recovery unit 40 located above the press roller unit 120 has an effect of preventing the guide roll 50 from coming into contact with the replica mold 20.

Next, an embodiment relating to the dispenser unit 180 of the replica mold 20 manufacturing apparatus will be described.

When the resin 70 is directly applied to the pattern of the master mold 10, it is not applied uniformly, so that a deviation in the coating capacity occurs.

Such a deviation in the coating capacity causes a defect that the pattern of the replica mold 20 is not formed when the coating capacity is insufficient, and when the coating capacity is excessive, it remains as a residue in the replica mold 20 and other components. There is a problem that defects that contaminate the configuration occur.

In order to solve such a problem, as illustrated in FIG. 9, a dispenser unit 180 and a press roller drive unit 210 can be included as a specific description of the embodiment.

The dispenser unit 180 can apply the resin 70 to the coating area PA, which is a space between the press roller unit 120 located at the standby position and the pattern of the master mold 10, so as not to overlap the pattern of the master mold 10. At this time, the coating area PA may be the upper surface of the stage portion 110.

The dispenser unit 180 may be coated with the resin 70 through the dispenser nozzle 181.

As shown in FIGS. 18 to 20, the dispenser unit 180 can apply the resin 70 in various forms. For example, as illustrated in FIG. 18, the dispenser unit 180 can apply the resin 70 in a row so that the rows are connected. Further, as shown in FIG. 19, the dispenser unit 180 can apply the resin 70 in two rows or more rows, which are not shown. Further, as shown in FIG. 20, the dispenser unit 180 can apply the resin 70 in a single row or in a row more than the resin 70, so that the rows are separated into a plurality of rows (for example, in the shape of a dotted line). ..

The press roller drive unit 210 may move the vertical position of the press roller portion 120 to form a gap between the stage portion 110 and the press roller portion 120.

Through such a gap between the stage portion 110 and the press roller portion 120, the resin 70 can be diffused in the horizontal direction in which the press roller portion 120 moves and applied to the pattern of the master mold 10.

The press roller drive unit 210 can be an actuator.

As described above, since the resin 70 is indirectly diffused and applied to the pattern of the master mold 10, there is an effect that the deviation of the coating capacity of the resin 70 applied to the pattern of the master mold 10 does not occur.

As illustrated in FIG. 9, as a specific description of the embodiment, a stage drive unit 200 and a dispenser drive unit (not shown) can be included.

The stage drive unit 200 can raise and lower the stage unit 110.

The dispenser drive unit (not shown) can pull the dispenser unit 180 into the stage portion 110 lowered by the stage drive unit 200 and pull out the dispenser unit 180 again in order to apply the resin 70.

The stage drive unit 200 and the dispenser drive unit (not shown) can be actuators.

The process of manufacturing the replica mold 20 by the replica mold 20 manufacturing apparatus described above will be described later.

First, the molding process stage will be described.

As shown in FIGS. 9 to 12, the resin 70 is not directly applied to the pattern of the master mold 10, but the resin 70 is applied to the coating area PA provided in the space separated from the pattern of the master mold 10. The replica mold 20 can be formed by molding (bonding) the resin 70 to the pattern of the master mold 10.

For example, first, as shown in FIG. 9, the stage portion 110 can be lowered to form a space between the film 60 and the stage portion 110 from which the dispenser portion 180 can be drawn.

Then, as illustrated in FIG. 16, the dispenser portion 180 may be pulled into the inside of the stage portion 110 from the side surface of the stage portion 110.

After that, as shown in FIGS. 17 and 18, the resin 70 can be applied to the application area PA while the dispenser unit 180 is pulled out.

After that, as shown in FIG. 10, the stage portion 110 coated with the resin 70 can be raised.

After that, as shown in FIGS. 11 and 12, the press roller portion 120 moves from the standby position on one side to the other side so that the resin 70 applied to the coating area PA is applied to the pattern of the master mold 10. Can be diffused into. That is, the resin 70 can be diffused in the horizontal direction in which the press roller portion 120 moves through the gap between the stage portion 110 and the press roller portion 120 and applied to the pattern of the master mold 10.

At this time, the press roller portion 120 may move the upper side of the resin 70 applied to the pattern of the master mold 10 and bond the resin 70 to the pattern of the master mold 10 (molding step) to form the replica mold 20. can.

Such a position in the coating area PA where the resin 70 is first applied and a position where the resin 70 is bonded to the pattern of the master mold 10 can be separated in the horizontal direction.

Further, the replica mold 20 can be formed by curing the resin 70 while the light irradiation unit 140 moves together with the press roller unit 120.

Next, the dimolding process stage will be described.

As shown in FIGS. 13 to 15, the master mold 10 and the replica mold 20 can be separated to form the replica mold 20 attached to the lower side of the film 60.

For example, as shown in FIGS. 13 to 14, the angle at which the film 60 formed by the film angle maintaining roller unit 170 enters the press roller unit 120 while the press roller unit 120 moves from the other side to the standby position on one side. The replica mold 20 can be separated from the master mold 10 through.

After that, as shown in FIG. 15, the film 60 is moved to move the completed replica mold 20 to the film recovery unit 40 side, and the stage unit 110 is lowered to form the next replica mold 20. can.

At this time, when the stage portion 110 is lowered, the robot arm (not shown) can replace the master mold 10 with another master mold 10.

Such a step of manufacturing the replica mold 20 can be repeated several times.

Although the present invention has been described in detail through preferred embodiments, the present invention is not limited to this, and can be variously implemented within the scope of the claims.

10: Master mold 20: Replica mold 30: Film supply unit 40: Film recovery unit 50: Guide roll 60: Film 70: Resin 100: Transfer unit 110: Stage unit 120: Press roller unit 130: Transfer unit drive unit 140: Optical Irradiation part 141: Light-shielding part 142A: Direct irradiation area 142B: Diffuse irradiation area 143: Light-emitting part 150: Coupling moving part 160: Irradiation direction guide part 161: Protruding part 162: Guide groove 163: Fixed part 170: Film angle maintenance roller part 180: Dispenser unit 181: Dispenser nozzle 200: Stage drive unit 210: Press roller drive unit L1: First minimum interval L2: Second minimum interval PA: Coating area S1: First separation distance S2: Second separation distance AG: Inclined Degree FG: Approach angle

Claims (20)

A transfer part that forms a replica mold on the film supplied from one side;
A film supply unit that intermittently unwinds the film and supplies the film toward the transfer unit; and a film recovery unit that intermittently winds the film and recovers the film from the transfer unit;
The transfer part is
The stage where the master mold with the pattern to which the resin is applied is mounted;
Press roller section that moves horizontally to form the replica mold;
A transfer unit drive unit driven to move the press roller unit from the standby position on one side to the other side and return it to the standby position again;
A light irradiation unit that irradiates the resin with light; and a coupling movement unit that is coupled to the light irradiation unit and the press roller unit and moved together by the drive unit;
The light irradiation unit is a replica mold manufacturing apparatus for nanoimprint in which the irradiation direction is tilted toward the press roller unit with reference to the lower direction perpendicular to the stage unit. The light irradiation unit is
The replica mold manufacturing apparatus for nanoimprint according to claim 1, further comprising an irradiation direction guide unit that guides the irradiation direction so as to be tilted within 10 to 80 degrees. The light irradiation unit is
1. The replica mold manufacturing apparatus for nanoimprint according to 2. Further comprising a guide roll; one or more arranged between the film recovery section and the transfer section to adjust the approach angle of the film;
The transfer part is
Further included is a film angle maintaining roller section that is vertically and horizontally separated from the press roller section so as to change the angle at which the film enters the press roller section.
The film angle maintaining roller section is positioned so that the film supplied from the film supply section enters the press roller section first.
The film angle maintaining roller portion is in contact with the surface of both sides of the film on which the replica mold is formed. The film angle maintaining roller portion is prevented from contacting the replica mold while the dimolding step is in progress. The length of the film between the film angle maintaining roller section and the press roller section corresponds to the length of the press roller section that moves horizontally to form the replica mold.
The guide roll is placed on both sides of the film, which is different from the surface on which the replica mold is formed, so that the guide roll does not come into contact with the replica mold that moves along the film collected by the film recovery unit. The replica mold manufacturing apparatus for nanoimprint according to claim 1, which is in contact with the replica mold. The dispenser section that applies the resin to the coating area, which is the space between the press roller section located at the standby position on one side and the pattern of the master mold, so as not to overlap the pattern of the master mold; and the press roller. Further included is a press roller drive unit that moves the vertical position of the section to drive such that a gap is formed between the stage section and the press roller section.
1 The replica mold manufacturing device for nanoimprint described in. Further includes a stage drive unit that raises and lowers the stage portion; and a dispenser drive unit that pulls the dispenser portion into the stage portion lowered by the stage drive unit to apply the resin and pulls out the dispenser portion again. , The replica mold manufacturing apparatus for nanoimprint according to claim 5. A transfer part that forms a replica mold on the film supplied from one side;
A film supply unit that intermittently unwinds the film and supplies the film toward the transfer unit;
A film recovery unit that intermittently winds the film to collect the film from the transfer unit; and one or more arranged between the film collection unit and the transfer unit to guide the film to the film collection unit. Including guide rolls;
In order to prevent the guide roll from contacting only the surface of both sides of the film where the replica mold is not formed and not the surface where the replica mold is formed.
The transfer part is
A press roller section located below the film recovery section and on one side to which the film is supplied from the guide roll so as to move horizontally to form the replica mold;
A transfer unit drive unit driven to move the press roller unit from the standby position toward one side to which the film is supplied to advance the molding process, and to return the press roller unit to the standby position again to proceed with the demolding process. ;
It is located on one side where the film is supplied from the press roller portion and is located on the opposite side of the guide roll so as to sandwich the press roller portion so as to change the angle at which the film enters the press roller portion. , The film angle maintaining roller portion located above the press roller portion; and the coupling moving portion which is coupled so as to move both the film angle maintaining roller portion and the press roller portion and is moved by the transfer unit driving unit; Including
In the film angle maintaining roller section, the film is supplied from the film supply section to the transfer section, the molding step is advanced, the demolding step is advanced, and the film is collected from the transfer section to the film recovery section. The position with the press roller portion is not changed during the process.
The position of the guide roll is not moved while the film angle maintaining roller portion and the press roller portion move.
During the molding step, the film angle maintaining roller portion and the press roller portion are separated from the guide roll by increasing the separation distance.
A replica mold manufacturing apparatus for nanoimprint in which the distance between the film angle maintaining roller portion and the press roller portion is reduced from the guide roll while the demolding step is in progress. The distance between the film angle maintaining roller section and the film supply section is shorter than the distance between the press roller section and the film supply section.
The film angle maintaining roller portion is in contact with the surface of both sides of the film on which the replica mold is formed so that the film angle maintaining roller portion does not come into contact with the replica mold while the dimolding step is in progress. The nanoimprint according to claim 7, wherein the length of the film between the film angle maintaining roller portion and the press roller portion corresponds to the length of the press roller portion moving horizontally to form the replica mold. Replica mold making equipment for. Includes a transfer section; and a dispenser section; that form a replica mold on the film supplied from one side.
The transfer part is
The stage part where the master mold with the pattern formed on the upper surface is mounted;
Includes a press roller section that moves horizontally to form the replica mold; and a transfer section drive unit that is driven to move the press roller section horizontally from the standby position and return it to the standby position again.
The dispenser portion applies resin to the coating area on the upper surface of the stage portion, which is a space between the press roller portion located at the standby position and the master mold pattern, so as not to overlap with the master mold pattern. ,
The press roller portion is
While moving horizontally from the standby position, the resin is diffused in the horizontal direction from the coating area, which is a region that does not overlap with the pattern of the master mold, and the resin is applied to the upper surface of the master mold.
While moving the upper side of the resin applied to the upper surface of the master mold, the resin is bonded to the pattern of the master mold to form a replica mold.
A replica mold manufacturing apparatus for nanoimprint in which the position where the resin is first applied in the coating area and the position where the resin is bonded to the pattern of the master mold are separated in the horizontal direction. Further includes a stage drive unit that raises and lowers the stage portion; and a dispenser drive unit that pulls the dispenser portion into the stage portion lowered by the stage drive unit to apply the resin and pulls out the dispenser portion again. , The replica mold manufacturing apparatus for nanoimprint according to claim 9. Further included is a press roller drive unit that moves the vertical position of the press roller portion to drive so that a gap is formed between the stage portion and the press roller portion.
The replica mold for nanoimprint according to claim 9, wherein the press roller portion moves from the space between the stage portion and the press roller portion and diffuses the resin through a space between the stage portion and the press roller portion. Production equipment. Stage descent stage where the stage part descends;
While the dispenser portion is pulled in and pulled out from the inside of the stage portion, the resin is not directly applied to the pattern of the master mold, and the space is separated from the pattern formed on the upper surface of the master mold, but the stage portion is formed. The coating stage where the resin is applied to the coating area on the upper surface;
The ascending stage in which the stage portion rises; and the resin is horizontally diffused so that the resin is applied to the pattern formed on the upper surface of the master mold while the press roller portion moves horizontally from the standby position. Including the molding stage;
At the molding stage,
While the press roller portion moves on the upper side of the resin applied to the upper surface of the master mold, the resin is bonded to the pattern of the master mold to form a replica mold.
A method for manufacturing a replica mold for nanoimprint, wherein the position where the resin is first applied in the coating area and the position where the resin is bonded to the pattern of the master mold are separated in the horizontal direction. A dimolding step in which the press roller section is moved to the standby position so that the master mold and the replica mold are separated and adhered to the underside of the film; and to move the replica mold to the film recovery section side. Further including a recovery step of moving the film;
At the molding stage,
The resin is cured while the light irradiation unit moves together with the press roller unit.
At the dimolding stage, the replica mold is
The press roller portion is separated from the master mold through an angle of entering the press roller portion of the film formed by the film angle maintaining roller portion while moving to the standby position.
After the recovery stage,
12. The replica mold for nanoimprint according to claim 12, wherein the stage descending step, the coating step, the ascending step, the molding step, the dimolding step and the recovery step are re-performed to form another replica mold. Manufacturing method. A transfer part that forms a replica mold on the film supplied from one side;
A film supply unit that intermittently unwinds the film and supplies the film toward the transfer unit;
A film recovery unit that intermittently winds the film and recovers the film from the transfer unit;
The transfer part is
The stage where the master mold with the pattern to which the resin is applied is mounted;
Press roller section that moves horizontally to form the replica mold;
A film angle maintaining roller section that is vertically and horizontally separated from the press roller section so as to change the angle at which the film enters the press roller section;
The press roller section and the film angle maintaining roller section move in a direction opposite to the moving direction of the film, which moves so that the film unwound from the film supply section is collected by the film recovery section. A replica mold manufacturing apparatus for nanoimprint, wherein the press roller portion and the film angle maintaining roller portion move in the moving direction of the film to carry out the dimolding step. The replica mold manufacturing apparatus for nanoimprint according to claim 14, wherein the film angle maintaining roller portion is located so as to face a direction opposite to the moving direction of the film from the press roller portion. The replica mold manufacturing apparatus for nanoimprint according to claim 14, wherein the film recovery unit is located above the press roller unit. The transfer part is
The replica mold manufacturing apparatus for nanoimprint according to claim 14, further comprising a coupling moving portion that is coupled so as to move both the film angle maintaining roller portion and the press roller portion and is moved by the transfer unit driving unit. The film angle maintaining roller portion is in contact with the surface of both sides of the film on which the replica mold is formed, so that the film angle maintaining roller portion does not come into contact with the replica mold while the dimolding step is in progress. The nanoimprint according to claim 14, wherein the length of the film between the film angle maintaining roller portion and the press roller portion corresponds to the length of the press roller portion moving horizontally to form the replica mold. Replica mold making equipment for. The replica mold manufacturing apparatus for nanoimprint according to claim 14, wherein the film angle maintaining roller unit is located so that the film supplied from the film supply unit enters the press roller unit first. Further comprising a guide roll; one or more arranged between the film recovery section and the transfer section to adjust the approach angle of the film;
The guide roll is placed on both sides of the film, which is different from the surface on which the replica mold is formed, so that the guide roll does not come into contact with the replica mold that moves along the film collected by the film recovery unit. The replica mold manufacturing apparatus for nanoimprint according to claim 14, which is in contact with the replica mold.

Images