TWI769308B - Multilayer Ceramic Capacitors - Google Patents

Abstract

An object of the present invention is to provide a multilayer ceramic capacitor capable of ensuring high sinterability. The multilayer ceramic capacitor of the present invention includes a ceramic body, first and second inner electrodes, and first and second outer electrodes. The ceramic green body has a plurality of ceramic layers laminated along a uniaxial direction, and is formed of a polycrystal, and the polycrystal contains calcium and zirconium and has a perovskite structure represented by the general formula ABO ₃ as a main phase, and contains silicon. , boron, and lithium. The first and second internal electrodes are alternately arranged between a plurality of ceramic layers, and are connected to the first and second external electrodes. In the multilayer ceramic capacitor, when the volume of the ceramic body is V (mm ³ ), the lithium concentration when the concentration of the B-site element in the main phase in the polycrystal is 100 atm% is C _Li (atm% ), the relationship of 0.2858V+0.4371≦C _Li ≦0.1306V+3.0391 is satisfied.

Description

Multilayer Ceramic Capacitors

The present invention relates to a multilayer ceramic capacitor which can be used in a high frequency region.

With the increase in frequency of electronic equipment, a high Q value (Quality factor) in a high frequency region is required for a multilayer ceramic capacitor used in electronic equipment. For example, Patent Document 1 discloses a multilayer ceramic capacitor that achieves an improvement in the Q value by using copper having a small specific resistance as an internal electrode.

The firing temperature of a multilayer ceramic capacitor using copper as an internal electrode needs to be lower than the melting point of low-melting copper. Therefore, in the multilayer ceramic capacitor described in Patent Document 1, in order to obtain sufficient sinterability even at a low sintering temperature, silicon, boron, and lithium are used as sintering aids that form a liquid phase during sintering. [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2009-7209

[Problems to be Solved by Invention]

However, during the sintering process of the multilayer ceramic capacitor, the amount of volatile lithium changes. Therefore, in order to fully obtain the effect of improving sinterability by utilizing lithium, it is necessary to keep the amount of lithium within an appropriate range throughout the sintering process of the multilayer ceramic capacitor.

In view of the above circumstances, an object of the present invention is to provide a multilayer ceramic capacitor capable of ensuring high sinterability. [Technical means to solve problems]

In order to achieve the above-mentioned object, a multilayer ceramic capacitor according to an aspect of the present invention includes a ceramic body, first and second internal electrodes, and first and second external electrodes. The above-mentioned ceramic green body has a plurality of ceramic layers laminated in a uniaxial direction, and is formed of a polycrystal, and the above-mentioned polycrystal has a perovskite structure containing calcium and zirconium and represented by the general formula ABO ₃ as a main phase, and contains Silicon, Boron, and Lithium. The first and second internal electrodes are alternately arranged between the plurality of ceramic layers. The first external electrode is provided on the outer surface of the ceramic body, and is connected to the first internal electrode. The second external electrode is provided on the outer surface of the ceramic body, and is connected to the second internal electrode. In the above-mentioned multilayer ceramic capacitor, the lithium concentration when the volume of the above-mentioned ceramic body is V (mm ³ ) and the concentration of the B-site element in the above-mentioned main phase in the above-mentioned polycrystal is 100 atm%. C _Li (atm%), then satisfy the relationship of: 0.2901V+0.4068≦C _Li ≦0.1306V+3.0391.

In this configuration, by controlling the amount of lithium in the ceramic body after sintering, the amount of lithium in the ceramic body during sintering can be controlled within an appropriate range. That is, by manufacturing the multilayer ceramic capacitor in such a manner that the amount of lithium in the ceramic body is as described above, the high sinterability of the ceramic body can be ensured.

When the concentration of the B-site element in the main phase in the polycrystal is set to 100 atm%, the silicon concentration may be 1.0 atm% or more and 6.0 atm% or less. The boron concentration may be 1.0 atm% or more and 6.0 atm% or less when the concentration of the B-site element in the main phase in the polycrystal is 100 atm%. In this configuration, the effect of utilizing silicon and boron to improve the sinterability of the ceramic body can be effectively obtained.

The above-mentioned polycrystal may further contain manganese. The manganese concentration may be 0.5 atm% or more and 5.5 atm% or less when the concentration of the B-site element in the main phase in the polycrystal is 100 atm%. In this configuration, the insulating properties of the ceramic body are enhanced by the action of manganese. Therefore, the multilayer ceramic capacitor can obtain higher reliability.

The above-mentioned first and second internal electrodes may be made of copper as a main component. In the present invention, even if the firing temperature is low, the sinterability of the ceramic green body can be ensured. Therefore, in this multilayer ceramic capacitor, copper having a relatively low melting point can be used as the main component of the first and second internal electrodes. Thereby, since the electrical conductivity of the 1st and 2nd internal electrodes becomes high, the Q value of a multilayer ceramic capacitor can be improved.

The above-mentioned volume may be 0.001 mm ³ or more and 5.000 mm ³ or less. The above-mentioned volume may be 0.001 mm ³ or more and 0.006 mm ³ or less. With these constitutions, it is easy to obtain the effects of the present invention as described above. [Effect of invention]

Multilayer ceramic capacitors that ensure high sinterability are available.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, the X axis, the Y axis, and the Z axis which are orthogonal to each other are appropriately represented. The X-axis, Y-axis, and Z-axis are common to all drawings.

1. Basic Configuration of Multilayer Ceramic Capacitor 10 FIGS. 1 to 3 are views showing a multilayer ceramic capacitor 10 according to an embodiment of the present invention. FIG. 1 is a perspective view of a multilayer ceramic capacitor 10 . FIG. 2 is a cross-sectional view of the multilayer ceramic capacitor 10 taken along the line AA' in FIG. 1 . FIG. 3 is a cross-sectional view of the multilayer ceramic capacitor 10 taken along the line BB' in FIG. 1 .

The multilayer ceramic capacitor 10 is constituted so that it can be preferably used in a high frequency region of about 100 MHz to 2 GHz, and can be used, for example, as a dielectric resonator or a filter for high frequency. Specifically, the multilayer ceramic capacitor 10 is configured to have both a high Q value and high reliability in a high frequency region.

The multilayer ceramic capacitor 10 includes a ceramic body 11 , a first external electrode 14 , and a second external electrode 15 . The outer surface of the ceramic body 11 includes first and second end surfaces E1 and E2 facing the X-axis direction, first and second side surfaces facing the Y-axis direction, and first and second main surfaces facing the Z-axis direction.

In addition, the shape of the ceramic body 11 is not limited to the above. That is, the ceramic body 11 may not have the rectangular parallelepiped shape as shown in FIGS. 1 to 3 . For example, each surface of the ceramic body 11 may also be a curved surface, and the ceramic body 11 may also be in a shape with a curvature as a whole.

The first external electrode 14 covers the first end surface E1 of the ceramic body 11 . The second external electrode 15 covers the second end surface E2 of the ceramic body 11 . The external electrodes 14 and 15 face each other in the X-axis direction with the ceramic body 11 interposed therebetween, and function as terminals of the multilayer ceramic capacitor 10 .

The external electrodes 14 and 15 extend from the first and second end surfaces E1 and E2 of the ceramic body 11 to the first and second main surfaces and the first and second side surfaces. Accordingly, the cross-sections of the external electrodes 14 and 15 parallel to the X-Z plane shown in FIG. 2 and the cross-sections parallel to the X-Y plane are both U-shaped.

Furthermore, the shapes of the external electrodes 14 and 15 are not limited to those shown in FIG. 1 . For example, the external electrodes 14 and 15 may extend from the end surfaces E1 and E2 of the ceramic body 11 to only one main surface, and the cross-section parallel to the X-Z plane may be L-shaped. In addition, the external electrodes 14 and 15 may not extend to any of the main surfaces and the side surfaces.

The external electrodes 14 and 15 are formed of good electrical conductors. Examples of good conductors for forming the external electrodes 14 and 15 include copper (Cu), nickel (Ni), tin (Sn), palladium (Pd), platinum (Pt), silver (Ag), and gold (Au). Metals or alloys with main components.

The ceramic green body 11 is formed of dielectric ceramic. The ceramic body 11 has a first internal electrode 12 and a second internal electrode 13 covered with dielectric ceramics. The internal electrodes 12 and 13 are both sheet-like extending along the X-Y plane, and are alternately arranged along the Z-axis direction.

That is, the internal electrodes 12 and 13 face each other in the Z-axis direction with the ceramic layer interposed therebetween. The first inner electrode 12 is drawn out to the first end face E1 of the ceramic body 11 and is connected to the first outer electrode 14 . The second inner electrode 13 is drawn out to the second end face E2 of the ceramic body 11 and is connected to the second outer electrode 15 .

With this configuration, in the multilayer ceramic capacitor 10 , when a voltage is applied between the first external electrode 14 and the second external electrode 15 , the voltage is applied to a plurality of parts between the first internal electrode 12 and the second internal electrode 13 . layer of ceramic layer. Thereby, in the multilayer ceramic capacitor 10 , electric charges corresponding to the voltage between the first external electrode 14 and the second external electrode 15 are stored.

For the multilayer ceramic capacitor 10, in order to exhibit stable performance in a high frequency region, the temperature change of the capacitance is required to be small. Therefore, in order to reduce the temperature change of the capacitance of each ceramic layer, the ceramic green body 11 must use a dielectric ceramic with a small temperature change of the dielectric constant.

Therefore, the ceramic body 11 is formed of a polycrystalline form containing calcium (Ca) and zirconium (Zr) with a small temperature change in dielectric constant, and represented by the general formula ABO ₃ ("A" represents the A site element, "B" represents the B-site element) as the main phase of the perovskite structure. Calcium (Ca) is an A-site element, and zirconium (Zr) is a B-site element. Specifically, the main phase of the polycrystal constituting the ceramic green body 11 is preferably a composition represented by Ca _x ZrO ₃ (0.90≦x≦1.15).

Furthermore, in the main phase of the polycrystal constituting the ceramic green body 11, a part of calcium (Ca) and zirconium (Zr) may be substituted by other elements as required. For example, a part of calcium (Ca) of the A-site element may be substituted by strontium (Sr). In addition, a part of zirconium (Zr) of the B-site element may be substituted with titanium (Ti).

Further, the polycrystal constituting the ceramic green body 11 contains silicon (Si), boron (B), and lithium (Li) as sintering aids. These elements form a liquid phase during the sintering process of the ceramic body 11 . Thereby, in the multilayer ceramic capacitor 10, the sinterability of the ceramic body 11 can be improved.

During the sintering process of the ceramic green body 11, the amount of volatile lithium (Li) changes. Therefore, in order to fully obtain the effect of improving the sinterability of the ceramic green body 11 with lithium (Li), the amount of lithium (Li) must be within an appropriate range throughout the sintering process of the ceramic green body 11 .

In the multilayer ceramic capacitor 10 of the present embodiment, by controlling the amount of lithium (Li) in the ceramic body 11 after sintering, the amount of lithium (Li) in the ceramic body 11 during the sintering process can be controlled within within an appropriate range. The details of the structure of the multilayer ceramic capacitor 10 will be described later.

The amounts of silicon (Si) and boron (B) in the polycrystal constituting the ceramic green body 11 can be appropriately determined. For example, the amounts of silicon (Si) and boron (B) are preferably determined within a range in which high sinterability of the ceramic green body 11 is obtained and the performance of the multilayer ceramic capacitor 10 is not easily affected.

Specifically, in the polycrystal constituting the ceramic body 11, it is preferable that the concentration of silicon (Si) is 1.0 atm% or more and 6.0 atm% or less when the concentration of the B-site element in the main phase is set to 100 atm%. . Further, in the polycrystal constituting the ceramic body 11, when the concentration of the B-site element in the main phase is 100 atm%, the boron (B) concentration is preferably 1.0 atm% or more and 6.0 atm% or less.

The internal electrodes 12 and 13 are formed of good conductors, and function as internal electrodes of the multilayer ceramic capacitor 10 . The internal electrodes 12 and 13 preferably contain copper (Cu) as a main component. As a result, in the multilayer ceramic capacitor, the electrical conductivity of the internal electrodes 12 and 13 is increased, so that the ESR (Equivalent Series Resistance) is lowered, and a higher Q value is obtained.

In addition, the internal electrodes 12 and 13 may not contain copper (Cu) as a main component. In this case, the internal electrodes 12 and 13 can be mainly composed of, for example, one or more selected from nickel (Ni), palladium (Pd), platinum (Pt), silver (Ag), and gold (Au). Composition of metals or alloys.

In addition, the basic structure of the multilayer ceramic capacitor 10 of this embodiment is not limited to the structure shown in FIGS. 1-3, It can change suitably. For example, the number of the internal electrodes 12 and 13 and the thickness of the ceramic layers can be appropriately determined according to the size or performance required for the multilayer ceramic capacitor 10 .

2. Manufacturing method of multilayer ceramic capacitor 10 FIG. 4 is a flowchart showing a manufacturing method of multilayer ceramic capacitor 10 . 5 and 6 are diagrams showing the manufacturing process of the multilayer ceramic capacitor 10 . Hereinafter, the manufacturing method of the multilayer ceramic capacitor 10 will be described with reference to FIG. 4 and FIGS. 5 and 6 as appropriate.

2.1 Step S01: Fabrication of the ceramic body In step S01, the unfired ceramic body 11 is fabricated. As shown in FIG. 5 , the unfired ceramic green body 11 is obtained by laminating a plurality of ceramic green sheets in the Z-axis direction and performing thermocompression bonding. The internal electrodes 12 and 13 can be arranged by pre-printing copper paste with a specific pattern on the ceramic green sheet.

The ceramic green sheet is an unfired dielectric green sheet obtained by molding a ceramic slurry into a sheet shape. The ceramic green sheet is formed into a sheet shape using, for example, a roll coater, a doctor blade, or the like. The composition of the ceramic slurry is adjusted so as to obtain the ceramic green body 11 of the above-mentioned composition.

Specifically, the ceramic slurry includes calcined powder of dielectric ceramics, silicon (Si) powder such as SiO ₂ , boron (B) powder such as BN, and lithium (Li) powder such as Li ₂ CO ₃ . In addition, the ceramic slurry may contain manganese (Mn)-containing powder such as MnCO ₃ .

2.2 Step S02: Firing In step S02, the unfired ceramic body 11 obtained in step S01 is fired. Thereby, the ceramic green body 11 is sintered, and the ceramic green body 11 shown in FIG. 6 is obtained. The firing of the ceramic green body 11 can be performed, for example, in a reducing atmosphere or a low oxygen partial pressure atmosphere. The firing conditions of the ceramic body 11 can be appropriately determined.

For example, since lithium (Li) volatilizes during firing of the ceramic body 11 , it is preferable to adjust the firing conditions so that an appropriate amount of lithium (Li) remains in the ceramic body 11 after firing. In addition, the firing temperature is preferably lower than the melting point (1084° C.) of copper (Cu), which is the main component of the internal electrodes 12 and 13 , and can be set to 950° C., for example. Moreover, the baking time can be set to 2 hours, for example.

2.3 Step S03: Formation of External Electrodes In step S03, by forming external electrodes 14 and 15 from the ceramic body 11 obtained in step S02, the multilayer ceramic capacitor 10 shown in FIGS. 1 to 3 is fabricated. In step S03 , for example, a base film, an intermediate film, and a surface film constituting the external electrodes 14 and 15 are formed on the end surfaces E1 and E2 of the ceramic body 11 .

More specifically, in step S03 , first, the unfired electrode material is applied so as to cover the end faces E1 and E2 of the ceramic green body 11 . The base films of the external electrodes 14 and 15 are formed on the ceramic green body 11 by, for example, firing the applied unfired electrode material in a reducing atmosphere or a low oxygen partial pressure atmosphere.

Then, the intermediate films of the external electrodes 14 and 15 are formed on the base films of the external electrodes 14 and 15 sintered on the ceramic green body 11 , and the surface films of the external electrodes 14 and 15 are further formed. When forming the intermediate film and the surface film of the external electrodes 14 and 15, wet plating such as electrolytic plating can be used, for example.

Furthermore, a part of the processing in the above-mentioned step S03 may also be performed before the step S02. For example, before step S02, the end faces E1 and E2 of the unfired ceramic body 11 can also be coated with the unfired electrode material. Thereby, the firing of the ceramic green body 11 and the firing of the electrode material can be simultaneously performed in step S02.

3. The amount of lithium (Li) in the ceramic body 11 In the multilayer ceramic capacitor 10, if the sinterability of the ceramic body 11 is not sufficient, for example, a decrease in the Q value or reliability such as moisture resistance may occur. reduction, etc. In order to ensure high sinterability of the ceramic green body 11 at a relatively low firing temperature, the ceramic green body 11 must contain appropriate amounts of silicon (Si), boron (B), and lithium (Li).

During the sintering process of the ceramic green body 11 , the amounts of silicon (Si) and boron (B) are not easily changed, whereas the amounts of volatile lithium (Li) are changed. Therefore, in order to fully obtain the effect obtained by utilizing lithium (Li) throughout the sintering process of the entire ceramic body 11 , the amount of lithium (Li) must be controlled within an appropriate range.

In the multilayer ceramic capacitor 10 of the present embodiment, by controlling the amount of lithium (Li) in the ceramic body 11 after sintering, the amount of lithium (Li) in the ceramic body 11 during the sintering process can be controlled within within an appropriate range. Thereby, in the multilayer ceramic capacitor 10, the high sinterability of the ceramic body 11 is ensured.

Moreover, in the ceramic green body 11, the tendency for the range of the appropriate amount of lithium (Li) after sintering to change depending on the volume was observed. More specifically, it has been confirmed by experiments that the larger the volume of the ceramic green body 11 is, the larger the amount of lithium (Li) after sintering is required.

Hereinafter, an experiment for analyzing the range of an appropriate amount of lithium (Li) in the ceramic green body 11 after sintering will be described. In this experiment, a plurality of samples of the multilayer ceramic capacitor 10 in which the volume of the ceramic body 11 and the amount of lithium (Li) in the ceramic body 11 are different are produced first.

The dimension L (mm) in the X-axis direction, the dimension W (mm) in the Y-axis direction, and the dimension T (mm) in the Z-axis direction as shown in Figures 2 and 3 can be used to calculate by L×W×T The volume including the internal electrodes 12 and 13 is taken as the volume V (mm ³ ) of the ceramic green body 11 . The dimensions L, W, and T of the ceramic body 11 are measured at the central portion of the ceramic body 11 in the X-axis, Y-axis, and Z-axis directions.

The amount of lithium (Li) in the ceramic body 11 is defined as the lithium (Li) concentration C _Li (atm %) when the concentration of the B-site element constituting the main phase of the polycrystal of the ceramic body 11 is 100 atm % and calculate. The concentration of the B-site element constituting the main phase of the polycrystal of the ceramic green body 11 can be obtained, for example, as the concentration of zirconium (Zr).

That is, the lithium (Li) concentration C _Li represents the relative lithium (Li) concentration based on the zirconium (Zr) concentration. The concentrations of zirconium (Zr) and lithium (Li) can be measured by inductively coupled plasma (ICP: Inductively Coupled Plasma) luminescence analysis.

The Q value and the moisture resistance were evaluated for each sample. In this experiment, the sinterability of the ceramic green body 11 was indirectly evaluated by the evaluation of the Q value and the moisture resistance. The evaluation of the Q value is carried out at a frequency of 1 GHz. The evaluation of the moisture resistance was performed under the conditions of applying a voltage twice the rated voltage for 200 hours at a temperature of 85° C. and a humidity of 85%.

In the evaluation of the Q value, a sample having a specification value of 1.5 times or more was considered acceptable. In the evaluation of moisture resistance, a sample having a resistance value of 10 MΩ or more was regarded as acceptable. In addition, the samples which passed the evaluations of the Q value and the moisture resistance were regarded as those having sufficient sinterability of the ceramic green body 11, and were listed as examples. On the other hand, the samples in which at least one of the evaluation of the Q value and the moisture resistance was unacceptable were regarded as insufficient sinterability of the ceramic green body 11, and were regarded as comparative examples.

FIG. 7 is a graph showing the evaluation results of each sample. The horizontal axis of FIG. 7 represents the volume V of the ceramic green body 11 . The vertical axis of FIG. 7 represents the lithium (Li) concentration C _Li when the concentration of the B-site element constituting the main phase of the polycrystal of the ceramic green body 11 is 100 atm %. In addition, the Example is shown by the graph of a circle, and the comparative example is shown by the graph of a cross.

According to FIG. 7 , it can be seen that the plots of the embodiment are distributed in a specific range of the lithium (Li) concentration C _Li , and the plots of the comparative example are distributed above and below this range. Therefore, by using the conditions of the range distributed in the drawing of the embodiment, the high sinterability of the ceramic green body 11 can be ensured.

In FIG. 7, the curve obtained by fitting the uppermost plot of the range over which the plot of the embodiment is distributed is fitted by the least squares method. This curve is represented by "C _Li =0.1306V+3.0391". In addition, the coefficient of determination R ² was 0.9489, which was a good fit.

Moreover, in FIG. 7, the curve obtained by fitting the plot of the lowermost part of the range in which the plot which comprises an Example is distributed by the least squares method is shown. This curve is represented by "C _Li =0.2858V+0.4371". In addition, the coefficient of determination R ² was 0.9777, which was a good fit.

Therefore, the distribution range of the mapping of the embodiment in FIG. 7 can be expressed by the following formula. 0.2858V+0.4371≦C _Li ≦0.1306V+3.0391 That is, by producing the ceramic body 11 of the multilayer ceramic capacitor 10 so as to satisfy the relationship of this formula, high sinterability can be ensured.

In addition, the control of the sinterability of the ceramic body 11 based on the above formula is more effective when the volume V of the ceramic body 11 is 0.001 mm ³ or more and 5.000 mm ³ or less, and the volume V of the ceramic body 11 is 0.001 mm ³ or more and 0.006 mm ³ or less are more effective.

4. Other Embodiments The embodiments of the present invention have been described above, but it goes without saying that the present invention is not limited to the above-described embodiments, and various modifications can be added.

10‧‧‧Multilayer Ceramic Capacitor 11‧‧‧Ceramic Body 12‧‧‧Internal Electrode 13‧‧‧Internal Electrode 14‧‧‧External Electrode 15‧‧‧External Electrode E1‧‧‧End Surface E2‧‧‧End Surface L‧ ‧‧Dimensions in the X-axis direction W‧‧‧Dimensions in the Y-axis direction T‧‧‧Dimensions in the Z-axis direction

FIG. 1 is a perspective view of a multilayer ceramic capacitor according to an embodiment of the present invention. FIG. 2 is a cross-sectional view of the multilayer ceramic capacitor described above, taken along line AA' of FIG. 1 . FIG. 3 is a cross-sectional view of the multilayer ceramic capacitor described above along the line BB' in FIG. 1 . FIG. 4 is a flowchart showing a method of manufacturing the above-mentioned multilayer ceramic capacitor. FIG. 5 is an exploded perspective view of the ceramic body in step S01. FIG. 6 is a perspective view of the ceramic green body obtained in step S02. FIG. 7 is a graph showing evaluation results in Examples and Comparative Examples.

Claims (7)

A multilayer ceramic capacitor, comprising: a ceramic body having a plurality of ceramic layers laminated in a uniaxial direction, and formed of a polycrystal formed of calcium containing calcium and zirconium and represented by the general formula ABO ₃ The titanium ore structure is the main phase, and contains silicon, boron, and lithium; the first and second inner electrodes are alternately arranged between the plurality of ceramic layers; the first outer electrode is arranged on the ceramic blank The outer surface of the body is connected to the first inner electrode; and the second outer electrode is arranged on the outer surface of the ceramic body and is connected to the second inner electrode; and when the volume of the ceramic body is calculated As V (mm ³ ), and the lithium concentration when the concentration of the B-site element of the main phase in the polycrystal is set to be 100 atm% is C _Li (atm%), it satisfies: 0.2858V+0.4371≦C _Li ≦0.1306V＋3.0391. The multilayer ceramic capacitor of claim 1, wherein the silicon concentration when the concentration of the B-site element of the main phase in the polycrystal is 100 atm% is 1.0 atm% or more and 6.0 atm% or less. The multilayer ceramic capacitor according to claim 1 or 2, wherein the boron concentration is 1.0 atm% or more and 6.0 atm% or less when the concentration of the B-site element of the above-mentioned main phase in the above-mentioned polycrystal is 100 atm%. The multilayer ceramic capacitor according to claim 1 or 2, wherein the polycrystal further contains manganese, and the manganese concentration when the concentration of the B-site element in the main phase in the polycrystal is 100 atm% is 0.5 atm% or more and 5.5 atm% or less. The multilayer ceramic capacitor according to claim 1 or 2, wherein the first and second internal electrodes contain copper as a main component. The multilayer ceramic capacitor of claim 1 or 2, wherein the volume is 0.001 mm ³ or more and 5.000 mm ³ or less. The multilayer ceramic capacitor of claim 1 or 2, wherein the volume is 0.001 mm ³ or more and 0.006 mm ³ or less.

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