TWI769301B - Vibration system control device and workpiece conveying device - Google Patents

Abstract

[Problem] To provide a control device for a vibration system that is suitable for use in parts feeders, ultrasonic motors, and other devices that can drive these stably and efficiently. [Solution] The control device of the vibration system of the present invention is used when two vibration systems (1, 2) having different resonance frequencies (f1, f2) are driven by a common drive command, and it has : a first amplitude detector (61) and a second amplitude detector (62) that detect the amplitude of the vibration of each vibration system (1, 2); to be detected by these amplitude detection means (61, 62) A differentiator (63) for comparing the amplitudes; and a tracing means (7) for tracing the frequency (f) of the drive command so that the difference between the two amplitudes obtained through the differentiator (63) becomes zero.

Description

Vibration system control device and workpiece conveying device

The present invention relates to a control device and a workpiece conveying device of a vibration system which is applied to a device utilizing vibration of a parts feeder, an ultrasonic motor, or the like, and can stably and efficiently drive the vibration system.

Conventionally, devices such as elliptical vibration parts feeders, traveling wave type parts feeders, and ultrasonic motors are known, which have a plurality of vibration systems and are driven at a single frequency to perform various functions. . Here, the plural vibration system refers to any of a vibration system obtained by a plural structure, a vibration system having plural vibration directions, and a plural vibration mode of the same structure.

In the apparatuses described above, in order to efficiently vibrate the conveying section, the resonant frequencies of the complex vibration systems are often designed and adjusted so that the resonant frequencies are close to the values, and they are driven at frequencies near the resonant frequencies. In addition, control to adjust the drive frequency according to the resonance frequency of one of the plural vibration systems has been proposed (see, for example, Patent Documents 1 and 2).

Patent Document 1 discloses a drive circuit for an ultrasonic motor, which is configured by using a voltage according to a drive state (a voltage obtained from a piezoelectric element for drive detection) and a voltage applied to a piezoelectric body (between two electrodes). The driving frequency is controlled so that the phase difference of one of the applied voltages) becomes a preset phase difference.

On the other hand, Patent Document 2 shows a drive control device for an elliptical vibration parts feeder, which is configured to set the output frequency so that the amplitude of either the horizontal vibration or the vertical vibration becomes the maximum. [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Application Laid-Open No. 07-2023 [Patent Document 2] Japanese Patent Application Laid-Open No. 11-227926

However, the elliptical vibration parts feeder or the traveling wave type parts feeder, which is the subject of the present invention, generally has a shift in the resonance frequencies of the two vibration systems. In particular, the traveling wave component feeder utilizes two standing wave modes whose phases are shifted by 90° in space. However, since the vibration part is not symmetrical, the resonance frequency is easily shifted, and it is difficult to match it. adjustment. In addition, a phenomenon in which the resonance frequency changes depending on temperature changes and the like has been confirmed. In this case, it is considered that the resonance frequency of each vibration system does not necessarily change so as to become the same, and the offset becomes larger.

Therefore, in the conventional control for adjusting the drive frequency based on the resonance frequency of one vibration system, the overall efficiency of the device is not maximized due to the influence of the shift of the resonance frequency. In addition, the difference in the response magnification of the vibration of each vibration system is large, and it is considered that there may be problems such as requiring an excessively large vibration force to generate a desired amplitude in some of the vibration systems, or insufficient amplitude in some of the vibration systems.

The present invention has been accomplished by emphasizing the above-mentioned problems, and aims to realize that the response magnification of the vibration between the resonant frequencies of the two vibration systems becomes approximately the same as the conventional one without tracing the resonance frequency of one vibration system. A control device and a workpiece conveying device for a vibration system that is driven by an equal frequency to achieve a solution to the problem.

In order to solve this problem, the present invention takes the following measures.

That is, the control device of the vibration system according to the present invention is a control device used when two vibration systems with different resonance frequencies are driven by a common drive command, and is characterized by comprising: a control device for detecting each of the vibration systems. Amplitude detection means for the amplitude of vibration; comparison means for comparing the amplitudes detected by the amplitude detection means; Tracing means of tracing.

By performing the control as described above, the two vibration systems can be driven at frequencies with approximately the same amplitude. Next, since this frequency is located between the resonant frequencies of the two vibration systems, compared with the control that adjusts the drive frequency according to the resonant frequency of one vibration system, the vibration of each vibration system is The difference between the dynamic response magnifications is reduced, and it is possible to prevent the situation where an excessively large vibration force is necessary to generate the desired amplitude in a part of the vibration system, or the amplitude is insufficient in a part of the vibration system, and the entire device can be efficiently controlled. In addition, since control is performed only where the amplitudes match, the control is also simpler compared to the case where the resonance frequency is searched using the phase difference between the drive command and the response of the vibration system.

In this case, it is preferable that the tracing means includes: a control amount calculation unit for calculating a control amount using at least a proportional term and an integral term based on the deviation of the amplitude obtained by the comparison means; The aforementioned control amount is a frequency regulator that increases or decreases the frequency.

If the amplitudes match, the frequency is not adjusted. On the other hand, the larger the deviation of the amplitude is, the more the frequency deviates from the frequency with the same amplitude, so the adjustment amount of the frequency increases according to the deviation. Then, the target value can be reached quickly by the control including the proportional term and the integral term.

Further, it is preferable to include: a gain multiplier that multiplies a drive command input to either of the two vibration systems by a gain; and divides the detection signal detected by the amplitude detection means of the vibration system by the aforementioned A gain dividing unit for gain, and the detection signal divided by the gain dividing unit is input to the comparison means.

As described above, the present invention can be applied to two vibration systems with relatively large and different amplitudes, such as an elliptical vibration system, or a purpose of correcting mechanical errors and matching the amplitudes, such as a traveling wave parts feeder. The common drive command causes the two vibration systems to vibrate with an appropriate amplitude according to the same frequency. Furthermore, since the signal to be detected by the amplitude detection means One of the two vibration systems is divided by the gain to compare the deviation, so it is possible to adjust the frequency to achieve a balance for the two vibration systems.

Further, it is also preferable to include a gain dividing unit that divides the detection signal detected by the amplitude detection means of either of the two vibration systems by a gain, and the detection signal divided by the gain dividing unit is inputted to the aforementioned means of comparison.

If configured as described above, the magnitudes of the vibrating signals are equal in the two vibration systems, and the amplitude ratios are also set to a predetermined ratio by driving at a frequency at which the response magnification becomes a predetermined ratio. At this time, the magnitudes of the vibration signals to the two vibration systems can be made equal regardless of the set value of the amplitude ratio, so that the operation of amplifiers such as drivers is stable.

Next, it is preferable to include: a conveyance part that conveys the workpiece in a state where the workpiece is placed; and a process that combines two standing waves with different phases, and is used to generate a traveling wave that causes the conveyance part to flexibly vibrate In the wave generating means, the control device of the vibration system described above is applied to the generation of the two standing waves of the traveling wave generating means, thereby constituting a workpiece conveying device.

In the case of the workpiece conveying device shown above, the traveling wave is appropriately generated from the two standing waves, and efficient conveying can be performed.

Alternatively, it is also preferable to include: a conveyance part that conveys the workpiece in a state where the workpiece is placed; and two vibrations including a conveyance direction and a direction of a vertical component intersecting with the conveyance direction are combined to make the conveyance part The elliptical vibration generating means for performing the elliptical vibration, the control device of the above-mentioned vibration system is applied to the generation of the two vibrations of the elliptical vibration generating means to constitute a workpiece conveying device.

In the case of the workpiece conveying device shown above, elliptical vibration is appropriately generated by two vibrations, and efficient conveying is possible.

According to the present invention described above, when applied to a parts feeder or a device utilizing vibration of an ultrasonic motor, etc., it is possible to provide a novel and useful vibration system control device and workpiece transfer that can drive these stably and efficiently. device.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a block diagram showing the control device C of the vibration system of the present embodiment. The control device C includes the first and second vibration systems 1 and 2, and has vibration parts (1x, 2x) in which the resonance frequencies f1 and f2 of the vibration systems 1 and 2 are close to each other. For a vibration system in which the resonant frequencies f1 and f2 are close to each other as shown above, for example, a complex number of parts having a spatial phase difference is vibrated in a complex number of vibration modes, thereby causing the parts where the traveling wave is generated to move. Ultrasonic vibration systems such as feeders, or spring mass damper vibration systems such as planar conveying devices that generate elliptical vibrations through vibrations in the XZ direction or the YZ direction.

Specifically, the first and second vibration systems 1 and 2 are vibrated by the first and second vibrators 11 and 21, respectively.

For the first and second vibrators 11 and 21 , the frequency-variable and periodic signals such as sine waves or rectangular waves, which are generated by the drive command generation unit 3 such as transmitters, are sent to the first and second amplifiers 12 and 22 by the first and second amplifiers 12 and 22 Enlarge and enter. The frequency of the drive command generated by the drive command generation unit 3 is externally formed to be variable. In addition, the amplification ratios of the amplifiers 12 and 22 are assumed to be equal. In order to provide a relative phase difference to the second vibration system 2 using the first vibration system 1 as a reference, the second vibrator 21 is input to shift the periodic signal from the drive command generator 3 to the phase shifter 4 phase is amplified in the second amplifier 22 .

That is, the periodic signal from the drive command generation unit 3 is input to the first amplifier 12 , and is input to the second amplifier 22 with the phase shifted by the phaser 4 .

Here, in the case of general control, the drive command generation unit 3 is configured to generate a drive command at any frequency of the resonance frequency f1 of the first vibration system 1 or the resonance frequency f2 of the second vibration system 2, and use the phase shifter to generate a drive command. 4 A phase difference of 90° is added to drive the two vibration systems 1, 2.

However, as described above, the control for driving the whole at the resonance frequency f1 of the first vibration system 1 is not driven at the resonance frequency f2 in the second vibration system 2, so between the first vibration system 1 and the first vibration system 1, The difference in response magnification becomes large, and it is considered that in order to generate the desired amplitude in the second vibration system 2, the second amplifier 22 needs to have an excessively large vibrating force or the amplitude is insufficient. The same applies to the case where the whole is driven at the resonance frequency f2 of the second vibration system 2 .

Therefore, in the present embodiment, a first vibration detector 51 and a second vibration detector 52 are provided as vibration detection means for detecting the vibration of the aforementioned vibration systems 1 and 2; the vibration detectors 51 and 52 detect the vibration The first amplitude detector 61 and the second amplitude detector 62 as the amplitude detection means of the detected amplitude of the vibration signal; the difference between the amplitudes detected by these amplitude detectors 61 and 62 is compared as the comparison means The controller 63; and the tracing means 7 for tracing the frequency of the drive command in the drive command generation unit 3 so that the deviation between the two amplitudes obtained by the comparison means 63 becomes zero.

At this time, the first and second vibration detectors 51 and 52 detect: displacement signals, velocity signals or acceleration signals extracted by the vibration parts 1x and 2x of the first and second vibration systems 1 and 2 any of them.

The tracing means 7 is configured to include a PI control unit 71 as a control amount calculation unit that calculates a control amount Δf using at least a proportional term and an integral term based on the deviation of the amplitude obtained by passing through the differentiator 63; The frequency regulator 72 increases or decreases the frequency f by the aforementioned control amount Δf.

For example, as shown in FIG. 2 , if it is assumed that the resonance frequency f2 of the second vibration system 2 is higher than the resonance frequency f1 of the first vibration system 1 , according to the value detected by the second amplitude detector 62 The magnitude of the relationship between the amplitude A2 and the amplitude A1 detected by the first amplitude detector 61 is changed in frequency as described below.

When A2<A1 (see FIG. 2( a )), it is changed to f=f+Δf.

When A2>A1 (see Fig. 2(b) ), it is changed to f=f-Δf.

Δf is a control amount calculated by the PI control unit 71 , and is calculated as a larger value as the deviation of the amplitudes of the two vibration systems 1 and 2 is larger.

Thereby, the frequency of the drive command output by the drive command generation unit 3 is directed in the direction in which the deviation of the amplitudes of the two vibration systems 1 and 2 becomes 0, that is, as shown in FIG. The frequency f0 with the same amplitude is corrected.

At this time, in the present embodiment, a gain multiplier that generates the gain coefficient Kα in the drive command input to the second vibration system 2 is provided 81; and a gain division part 82 that divides the detection signal detected by the second amplitude detection means 52 of the second vibration system 2 by the aforementioned gain coefficient Kα, and inputs the detection signal divided by the gain division part 82 to the Differentiator 63 .

Thereby, the amplitude ratio of the 1st vibration system 1 and the 2nd vibration system 2 becomes 1:Ka. In addition, the output signal from the second amplitude detector 62 is compared with the output signal of the first amplitude detector 61 after being multiplied by 1/Kα. Next, the drive frequency is adjusted so that the deviation becomes zero.

With the configuration as described above, in the second vibration system 2, after the command signal is multiplied by Kα, the vibration detection value is multiplied by 1/Kα, and therefore the gain is set by the signal used in the deviation calculation. Cancel. Therefore, at the frequencies where the response magnification becomes equal, the deviation becomes 0. Therefore, according to the control method of the present embodiment, it is possible to drive the frequency f between the two resonance frequencies f1 and f2 with the response magnification being equal. The frequency f shown above is close to either of the resonance frequencies f1 and f2 of the two vibration systems 1 and 2, and the response magnification is high, so the two vibration systems 1 and 2 can be vibrated efficiently. In addition, even if the resonance frequencies f1 and f2 change, etc., the drive frequency is automatically adjusted accordingly.

As described above, between the first vibration system 1 and the second vibration system 2, the difference in the response magnification of vibration is reduced, thereby solving the problem that one vibration system must have an excessively large vibration force, or the other Problems such as insufficient amplitude of the vibration system. In addition, compared to the case of driving at one resonance frequency, the required power is generally smaller.

In addition, since the drive frequency is automatically adjusted, the labor of manually searching for the resonance frequencies f1 and f2 of the first and second vibration systems 1 and 2 is eliminated. That is, when tracing the resonance frequency, it is not necessary to detect the phase difference or perform frequency scanning, so the detection circuit is simpler and the control is easier.

In addition, not only the driving frequency, but also the amplitude ratio of the first vibration system 1 and the second vibration system 2 is controlled to be 1:Ka by the gain Kα of the excitation signal, so that the driving state is stable and can be actively set according to the applicable object. Amplitude ratio. If the control to make the amplitude constant is performed in parallel, the amplitude detection signal of one of the first and second vibration systems may be used for control, whereby the amplitude of the other vibration system is also controlled to be constant.

In addition, the tracing means 7 is configured to include a PI control unit 71 that calculates a control amount using at least a proportional term and an integral term based on the deviation of the amplitude obtained by passing through the differentiator 63, and a control amount in the positive and negative directions of the deviation Δf is the frequency regulator 72 that increases and decreases the frequency, so the larger the deviation of the amplitude is, the larger the adjustment amount of the frequency is according to the deviation. Then, through the control including proportional term and integral term, it can quickly reach the target value.

In the above, when the amplitudes of the two vibration modes are expected to be equal, for example, in an ultrasonic motor or a traveling wave type parts feeder, Ka=1 is set.

Fig. 3 shows an example of the frequency response function of two vibration systems whose resonant frequencies f1 and f2 are shifted. As can be seen from the figure, in two vibration systems with similar vibration characteristics such as equivalent mass and equivalent rigidity and slightly shifted resonance frequencies, points where the graphs of the response magnifications intersect exist between the respective resonance frequencies.

Therefore, the configuration of the present embodiment is particularly effective in the traveling wave type parts feeder in which the resonance frequencies of the two vibration systems are easily shifted in any structure.

FIG. 4 shows a parts feeder PF as a workpiece conveying device as an example of the control device C to which the vibration system of the present embodiment is applied. The parts feeder PF is constituted by a bowl feeder Bf that allows the workpieces to be loaded to climb along the screw conveyance portion T1, and the workpieces discharged from the bowl feeder Bf are conveyed in a row. The section t1 performs alignment, direction determination, and the like to allow only workpieces with an appropriate posture to pass therethrough, and returns inappropriate workpieces to the linear feeder Lf of the bowl feeder Bf through the return conveyance section t2.

Among them, the bowl feeder Bf is, as shown in FIG. 5, constituted by a first vibration system that vibrates in the 0° mode in the first region in the annular vibration region of the bottom surface of the feeder body The vibrating portion 1x of 1 and the vibrating portion 2x of the second vibrating system vibrating in the 90° mode in the second region are vibrated by the first vibrator 11 and the second vibrator 21 using piezoelectric elements. , the standing waves having different phases are synthesized, and the traveling wave generating means BZ for generating the traveling wave that causes the conveying portion T1 to flexibly vibrate is used.

Next, when the above-mentioned control device C is applied to the bowl feeder Bf, the first and second vibrators 11 and 21 of the traveling wave generating means BZ are input to the circuits shown in FIGS. 1 and 2 . The periodic signals amplified by the first and second amplifiers 12 and 22 and the vibrations of the first and second vibration systems 1 (1x) and 2 (2x) can be extracted through the first and second vibration detectors 51 and 52 . Other parts of the control device C (see FIGS. 1 and 2 ) are omitted in FIG. 5 , and the configuration and control method are the same as those of the above-described embodiment.

When driving the parts feeder PF as shown above, it is a common practice to drive the resonant frequencies f1 and f2 of the vibrating parts 1x and 2x as substantially the same. If the piezoelectric elements are pasted on the bottom surfaces of the vibrating parts 1x and 2x , due to the heat generation of the piezoelectric element, the resonant frequency at the complex vibration points changes by several %, the standing wave ratio is reduced, and the transfer efficiency may be significantly impaired, but the control through the control device C can effectively solve this problem.

On the other hand, the linear feeder Lf of FIG. 4 is, as shown in FIG. 6 , configured such that, in the oval vibration region of the bottom surface of the feeder body, the first region vibrates in the 0° mode for the first region. The vibrating portion 1x of the vibration system 1 and the vibrating portion 2x of the second vibrating system vibrating in the 90° mode in the second region, through the first vibrator 11 and the second vibrator 12 using piezoelectric elements By vibrating, the standing waves having different phases are synthesized, and the traveling wave generating means LZ for generating the traveling waves that cause the conveying parts t1 and t2 to flexibly vibrate is used.

Next, if the above-mentioned control device C is applied to the linear feeder Lf, it is also assumed that the traveling wave generating means LZ is input to the first and second vibrators 11 and 21 as shown in FIGS. 1 and 2 . The periodic signals amplified by the first and second amplifiers 12 and 22 are shown, and the vibrations of the first and second vibration systems 1 (1x) and 2 (2x) are extracted through the first and second vibration detectors 51 and 52 That's it. In FIG. 6, other parts of the control device C (refer to FIG. 1 and FIG. 2) are also omitted, and the configuration and control method are the same as those of the above-described embodiment.

One embodiment of the present invention has been described above, but the specific configuration of each part is not limited to the above-mentioned embodiment.

For example, in the above-described embodiment, the control amount calculation unit uses PI control, but it is not limited to this, and various control methods such as matching the magnitudes of the two signals can be used.

In addition, the gain Kα may be applied to the input signal of the first amplifier 12 instead of the second amplifier 22 , and the gain 1/Kα may be applied to the output signal of the first amplitude detector 51 instead of the second amplitude detector 52 . At this time, the amplitude ratio of the first and second vibration systems 1 and 2 is Ka:1.

In addition, as shown in FIG. 7 , the input signal to the second amplifier 22 may not be provided with the gain Kα, and only the output signal of the second amplitude detector 62 may be divided by the gain Kα. At this time, the magnitude of the vibrating signal is equal to the first and second vibration systems 1 and 2, and the frequency of the response magnification ratio becomes 1:Kα by driving, and the amplitude ratio becomes 1:Kα (refer to FIG. 8 ) . At this time, since the magnitudes of the excitation signals to the two vibration systems can be made equal regardless of the set value of the amplitude ratio, the operation of the driver (amplifier, etc.) is stable. However, the range of the settable amplification ratio depends on the characteristics of the two vibration systems 1 and 2 . Therefore, when the resonant frequencies f1 and f2 of the two vibration systems 1 and 2 are close to each other and the difference in response magnification is small at any frequency, the range of the settable amplitude ratio tends to be narrowed.

In addition, shown in FIG. 9 is an elliptical vibration parts feeder PF as a workpiece conveying device, which is provided with: a conveying part tx that conveys a workpiece in a state where the workpiece is placed; by including the conveying direction (X direction and The elliptical vibration generating means Pz that causes the transport portion tx to elliptically vibrate by combining two vibrations in the vertical component direction (Z direction) intersecting with the conveyance direction. The elliptical vibration generating means Pz is a first vibration system 1 that vibrates the conveying portion tx in the Z direction by vibrating the first plate-like spring 11a with a vibrator (piezoelectric element) 11; and The second plate-like spring 21a is constituted by a second vibration system 2 that vibrates the conveying portion tx in the X direction and/or the Y direction by vibrating with a vibrator (piezoelectric element) 21 . Next, in the two vibration systems 1 and 2 of the elliptical vibration generating means Pz, the vibrator 11 of the first vibration system 1 is vibrated through the first amplifier 12 of FIG. The vibrator 21 is vibrated through the second amplifier 22 in FIG. 1 . If the vibration signals extracted by the vibration systems 1 and 2 through the vibration detectors 51 and 52 are input to the first amplitude detector 61 and the first amplitude detector in FIG. 1 . The second amplitude detector 62 can appropriately control the elliptical vibration according to the above.

Various modifications can be made to other structures without departing from the gist of the present invention.

1: The first vibration system

1x, 2x: Vibration part

2: Second Vibration System

3: Drive command generation part

4: Phaser

7: Tracing means

11: The first vibrator

11a: The first leaf spring

12: First Amplifier

21: Second vibrator

21a: Second leaf spring

22: Second amplifier

51: Vibration detection means (first vibration detector)

52: Vibration detection means (second vibration detector)

61: First amplitude detector

62: Second amplitude detector

63: Comparison means (differentiator)

71: Control value calculation part (PI control part)

72: Frequency regulator

81: Gain Multiplier

82: Gain division part

f: frequency

f1, f2: resonance frequency

BZ, LZ: means of generating traveling waves

Pz: elliptical vibration generating means

PF: Workpiece transfer device (parts feeder)

T1, t1, t2, tx: conveying part

A1, A2: Amplitude

C: control device

Δf: control amount

Bf: Bowl Feeder

BZ: Progressive wave generating means

Lf: Linear feeder

LZ: Progressive wave generating means

FIG. 1 is a block diagram showing a control device of a vibration system according to an embodiment of the present invention.

FIG. 2 is a graph showing the outline of the control in the same embodiment.

FIG. 3 is a graph showing the outline of the control in the same embodiment.

FIG. 4 is a diagram showing a parts feeder as an example of the configuration of the workpiece conveying device of the present invention.

Fig. 5 is a control block diagram of the bowl feeder constituting the same parts feeder.

Fig. 6 is a control block diagram of the linear feeder constituting the same parts feeder.

FIG. 7 is a block diagram corresponding to FIG. 1 showing a modification of the present invention.

FIG. 8 is a graph showing the outline of the control in the same modification.

FIG. 9 is a view showing a modification of the workpiece conveying device of the present invention.

FIG. 10 is a diagram showing an overview of a conventional control in contrast to the present invention.

1‧‧‧First Vibration System

1x, 2x‧‧‧Vibration part

2‧‧‧Second vibration system

3‧‧‧Drive command generation part

4‧‧‧Phase Shifter

7‧‧‧Tracking method

11‧‧‧First Vibrator

12‧‧‧First Amplifier

21‧‧‧Second vibrator

22‧‧‧Second amplifier

51‧‧‧Vibration detection means (first vibration detector)

52‧‧‧Vibration detection means (second vibration detector)

61‧‧‧First Amplitude Detector

62‧‧‧Second amplitude detector

63‧‧‧Comparators (Differentiators)

71‧‧‧Control value calculation part (PI control part)

72‧‧‧Frequency adjustment

81‧‧‧Gain Multiplier

82‧‧‧Gain Division

C‧‧‧Control device

Claims (6)

A control device for a vibration system, which is used when two vibration systems with different resonance frequencies are driven through a common drive command, comprising: detecting the amplitude of vibration of each of the vibration systems amplitude detection means; comparison means for comparing the amplitudes detected by the amplitude detection means; and tracing for tracing the frequency of the drive command so that the deviation between the two amplitudes obtained by the comparison means becomes 0 means. The control device for a vibration system according to claim 1, wherein the tracing means comprises: a control amount calculation unit for calculating the control amount using at least a proportional term and an integral term based on the deviation of the amplitude obtained by the comparison means; And a frequency regulator that increases or decreases the frequency by the aforementioned control amount in the positive and negative directions of the corresponding deviation. A control device for a vibration system according to claim 1 or claim 2, comprising: a gain multiplier for multiplying a drive command input to either of the two vibration systems by a gain; and The detection signal detected by the amplitude detection means of the vibration system is divided by the gain dividing unit of the gain, and the detection signal divided by the gain dividing unit is input to the comparing means. A control device for a vibration system according to claim 1 or claim 2, further comprising: a gain dividing unit that divides the detection signal detected by the amplitude detection means of either of the two vibration systems by the gain, The detection signal divided by the gain dividing unit is input to the comparison means. A workpiece conveying device, comprising: a conveying portion that conveys a workpiece in a state where the workpiece is placed; and two standing waves having different phases are synthesized and used to cause the conveying portion to travel with flexural vibration The traveling wave generating means for wave generation is applied to the control device of the vibration system according to any one of claims 1 to 4 of the scope of the patent application in the generation of the two standing waves of the aforementioned traveling wave generating means. A workpiece conveying device, comprising: a conveying portion that conveys a workpiece in a state where the workpiece is placed; The elliptical vibration generating means for elliptical vibration of the conveying part is applied to the control device of the vibration system according to any one of claims 1 to 4 of the scope of application for generating two vibrations of the elliptical vibration generating means.

Images