TWI769082B - Light emitting apparatus and manufacturing method thereof - Google Patents
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本發明是有關於一種發光裝置及其製造方法。The present invention relates to a light-emitting device and a manufacturing method thereof.
相較於有機發光二極體背光模組(或顯示裝置),小型發光二極體的背光模組(或顯示裝置)具有省電、高效率及高亮度等優點。小型發光二極體的背光模組(或顯示裝置)包括驅動背板及被轉置於驅動背板之接墊上的小型發光二極體。Compared with organic light emitting diode backlight modules (or display devices), small light emitting diode backlight modules (or display devices) have the advantages of power saving, high efficiency, and high brightness. The backlight module (or display device) of small light-emitting diodes includes a driving backplane and small light-emitting diodes that are transferred to the pads of the driving backplane.
一般而言,為增加出光效率,會在驅動背板的接墊周圍設置多個凸起物;然後,再於多個凸起物上設置共形的反射層,以形成具有表面起伏的反射結構。小型發光二極體發出的部分光束會傳向驅動背板而不易出光,但透過驅動背板的反射結構能將傳向驅動背板的部分光束反射向外,進而增加出光效率。Generally speaking, in order to increase the light extraction efficiency, a plurality of protrusions are arranged around the pads of the driving backplane; then, a conformal reflective layer is arranged on the plurality of protrusions to form a reflective structure with surface relief . Part of the light beam emitted by the small light-emitting diode will be transmitted to the driving backplane and not easy to emit light, but the reflection structure of the driving backplane can reflect part of the light beam transmitted to the driving backplane to the outside, thereby increasing the light extraction efficiency.
在上述具有反射結構之驅動背板的製程中,在形成反射層後,還會在反射層上形成絕緣材料層;然後,再圖案化絕緣材料層,以露出用以與小型發光二極體接合的接墊;最後,再使接墊上鍍。然而,在圖案化絕緣材料層以露出接墊時,由於部分的絕緣材料層設置在上下起伏的反射結構上,導致在圖案化絕緣材料層的過程中,凸起物上方的部分絕緣材料層也會被去除,而使凸起物上的部分反射層被裸露。因此,當接墊被上鍍時,被裸露出之凸起物上的部分反射層也會被異常地被上鍍,影響小型發光二極體的背光模組(或顯示裝置)的良率。In the process of the above-mentioned driving backplane with a reflective structure, after the reflective layer is formed, an insulating material layer is formed on the reflective layer; then, the insulating material layer is patterned to expose the small light-emitting diodes for bonding the pads; finally, the pads are plated. However, when the insulating material layer is patterned to expose the pads, since part of the insulating material layer is disposed on the undulating reflective structure, part of the insulating material layer above the protrusions is also exposed during the patterning of the insulating material layer. will be removed, leaving part of the reflective layer on the bumps exposed. Therefore, when the pads are plated, part of the reflective layer on the exposed protrusions will also be plated abnormally, which affects the yield of the small light-emitting diode backlight module (or display device).
本發明提供一種發光裝置,良率能提升。The present invention provides a light-emitting device with improved yield.
本發明提供一種發光裝置的製造方法,能提升發光裝置的良率。The present invention provides a method for manufacturing a light-emitting device, which can improve the yield of the light-emitting device.
本發明提供另一種發光裝置的製造方法,也能提升發光裝置的良率。The present invention provides another method for manufacturing a light-emitting device, which can also improve the yield of the light-emitting device.
本發明的發光裝置,包括基底、驅動線路、第一絕緣層、導電圖案層、電鍍層、保護層及發光元件。驅動線路設置於基底上。第一絕緣層設置於驅動線路上,且具有重疊於驅動線路的開口。導電圖案層具有第一部,其中導電圖案層的第一部設置於第一絕緣層的實體上,且位於第一絕緣層的開口外。電鍍層具有至少一凸起結構,其中至少一凸起結構設置於導電圖案層的第一部上,且與導電圖案層的第一部電性連接。保護層設置於第一絕緣層上,且覆蓋至少一凸起結構及導電圖案層的第一部。發光元件電性連接至驅動線路。The light-emitting device of the present invention includes a substrate, a driving circuit, a first insulating layer, a conductive pattern layer, an electroplating layer, a protective layer and a light-emitting element. The driving circuit is arranged on the substrate. The first insulating layer is disposed on the driving circuit and has an opening overlapping the driving circuit. The conductive pattern layer has a first portion, wherein the first portion of the conductive pattern layer is disposed on the body of the first insulating layer and is located outside the opening of the first insulating layer. The electroplating layer has at least one protruding structure, wherein the at least one protruding structure is disposed on the first part of the conductive pattern layer and is electrically connected with the first part of the conductive pattern layer. The protective layer is disposed on the first insulating layer and covers at least one protruding structure and the first part of the conductive pattern layer. The light-emitting element is electrically connected to the driving circuit.
在本發明的一實施例中,上述至少一凸起結構與導電圖案層的第一部相隔一距離。In an embodiment of the present invention, the at least one protruding structure is separated from the first portion of the conductive pattern layer by a distance.
在本發明的一實施例中,上述的至少一凸起結構包括第一部及第二部,至少一凸起結構的第一部直接連接至導電圖案層的第一部,至少一凸起結構的第二部直接連接至至少一凸起結構的第一部,至少一凸起結構之第二部的寬度大於至少一凸起結構之第一部的寬度,且至少一凸起結構的第二部與導電圖案層的第一部之間相隔上述距離。In an embodiment of the present invention, the at least one protruding structure includes a first portion and a second portion, the first portion of the at least one protruding structure is directly connected to the first portion of the conductive pattern layer, and the at least one protruding structure is The second part of the at least one protruding structure is directly connected to the first part of the The distance between the first portion and the first portion of the conductive pattern layer is as described above.
在本發明的一實施例中,上述的至少一凸起結構具有朝遠離基底之方向凸起的凸面。In an embodiment of the present invention, the at least one protruding structure has a convex surface that protrudes away from the substrate.
在本發明的一實施例中,上述的至少一凸起結構包括第一部及第二部,至少一凸起結構的第一部直接連接至導電圖案層的第一部,至少一凸起結構的第二部直接連接至至少一凸起結構的第一部,至少一凸起結構之第二部的寬度大於至少一凸起結構之第一部的寬度,且至少一凸起結構的第二部具有上述凸面。In an embodiment of the present invention, the at least one protruding structure includes a first portion and a second portion, the first portion of the at least one protruding structure is directly connected to the first portion of the conductive pattern layer, and the at least one protruding structure is The second part of the at least one protruding structure is directly connected to the first part of the The portion has the above-mentioned convex surface.
在本發明的一實施例中,上述的導電圖案層更具有第二部,導電圖案層的第一部與導電圖案層的第二部分離,導電圖案層的第二部透過第一絕緣層的開口電性連接至驅動電路,且發光元件電性連接至導電圖案層的第二部。In an embodiment of the present invention, the above-mentioned conductive pattern layer further has a second portion, the first portion of the conductive pattern layer is separated from the second portion of the conductive pattern layer, and the second portion of the conductive pattern layer passes through the first insulating layer. The opening is electrically connected to the driving circuit, and the light-emitting element is electrically connected to the second portion of the conductive pattern layer.
在本發明的一實施例中,上述的發光裝置更包括第二絕緣層,設置於導電圖案層的第一部上,其中第二絕緣層具有至少一第一開口,且電鍍層之至少一凸起結構填入第二絕緣層的至少一第一開口,以電性連接至導電圖案層的第一部。In an embodiment of the present invention, the above-mentioned light-emitting device further includes a second insulating layer disposed on the first portion of the conductive pattern layer, wherein the second insulating layer has at least one first opening, and at least one protrusion of the electroplating layer The starting structure is filled into at least one first opening of the second insulating layer to be electrically connected to the first portion of the conductive pattern layer.
在本發明的一實施例中,上述的電鍍層更具有連接部,電鍍層的連接部與電鍍層的至少一凸起結構分離,電鍍層的連接部電性連接至導電圖案層的第二部,且發光元件電性連接至電鍍層的連接部。In an embodiment of the present invention, the above-mentioned electroplating layer further has a connecting portion, the connecting portion of the electroplating layer is separated from at least one protruding structure of the electroplating layer, and the connecting portion of the electroplating layer is electrically connected to the second portion of the conductive pattern layer. , and the light-emitting element is electrically connected to the connection portion of the electroplating layer.
在本發明的一實施例中,上述的至少一凸起結構與導電圖案層的第一部之間存在一間隙,且保護層填入所述間隙。In an embodiment of the present invention, a gap exists between the at least one protruding structure and the first portion of the conductive pattern layer, and the protective layer fills the gap.
在本發明的一實施例中,上述的保護層的頂面與基底的距離大於至少一凸起結構的頂點與基底的距離。In an embodiment of the present invention, the distance between the top surface of the protective layer and the substrate is greater than the distance between the vertex of the at least one protruding structure and the substrate.
本發明一實施例的發光裝置的製造方法包括下列步驟:於基底上形成驅動線路及第一絕緣層,其中驅動線路設置於基底上,第一絕緣層設置於驅動線路上且具有重疊於驅動線路的開口;於第一絕緣層上形成導電材料層,其中導電材料層透過第一絕緣層的開口電性連接至驅動電路;於導電材料層上形成第二絕緣層,其中第二絕緣層具有暴露導電材料層的至少一第一開口,且第二絕緣層的至少一第一開口位於第一絕緣層的開口外;於導電材料層及第二絕緣層上形成定義層,其中定義層具有至少一第一開口及第二開口,且定義層的至少一第一開口重疊於第二絕緣層的至少一第一開口;進行於電鍍工序,以於定義層的至少一第一開口及第二絕緣層的至少一第一開口中形成電鍍層的至少一凸起結構,且於定義層的第二開口中形成電鍍層的連接部;在形成電鍍層的至少一凸起結構及連接部之後,移除定義層;以電鍍層的至少一凸起結構、第二絕緣層及電鍍層的連接部為遮罩,圖案化導電材料層,以形成導電圖案層,其中導電圖案層具有第一部及第二部,導電圖案層的第一部設置於第一絕緣層的實體上且位於第一絕緣層的開口外,電鍍層的至少一凸起結構設置於導電圖案層的第一部上且與導電圖案層的第一部電性連接,電鍍層的連接部設置於導電圖案層的第二部上且與導電圖案層的第二部電性連接,導電圖案層的第二部透過第一絕緣層的開口電性連接至驅動電路,且導電圖案層的第一部及第二部彼此分離;形成保護層,以覆蓋至少一凸起結構、第二絕緣層及導電圖案層的第一部,其中保護層具有開口,暴露電鍍層的連接部;以及轉置發光元件於基底上,且使發光元件與電鍍層的連接部電性連接。A method for manufacturing a light-emitting device according to an embodiment of the present invention includes the following steps: forming a driving circuit and a first insulating layer on a substrate, wherein the driving circuit is disposed on the substrate, and the first insulating layer is disposed on the driving circuit and has a structure overlapping the driving circuit. A conductive material layer is formed on the first insulating layer, wherein the conductive material layer is electrically connected to the driving circuit through the opening of the first insulating layer; a second insulating layer is formed on the conductive material layer, wherein the second insulating layer has exposed At least one first opening of the conductive material layer, and at least one first opening of the second insulating layer is located outside the opening of the first insulating layer; a definition layer is formed on the conductive material layer and the second insulating layer, wherein the definition layer has at least one a first opening and a second opening, and the at least one first opening of the definition layer overlaps the at least one first opening of the second insulating layer; the electroplating process is performed so that the at least one first opening of the defining layer and the second insulating layer At least one protruding structure of the electroplating layer is formed in at least one first opening of the plated layer, and a connecting portion of the electroplating layer is formed in the second opening of the definition layer; after the at least one protruding structure and the connecting portion of the electroplating layer are formed, remove the A definition layer; using at least one protruding structure of the electroplating layer, the second insulating layer and the connecting part of the electroplating layer as a mask, patterning the conductive material layer to form a conductive pattern layer, wherein the conductive pattern layer has a first part and a second part part, the first part of the conductive pattern layer is disposed on the body of the first insulating layer and outside the opening of the first insulating layer, and at least one raised structure of the electroplating layer is disposed on the first part of the conductive pattern layer and is connected with the conductive pattern The first part of the layer is electrically connected, and the connection part of the electroplating layer is arranged on the second part of the conductive pattern layer and is electrically connected with the second part of the conductive pattern layer, and the second part of the conductive pattern layer passes through the first insulating layer. The opening is electrically connected to the driving circuit, and the first part and the second part of the conductive pattern layer are separated from each other; a protective layer is formed to cover at least one raised structure, the second insulating layer and the first part of the conductive pattern layer, wherein the protective layer is formed The layer has an opening to expose the connection part of the electroplating layer; and the light-emitting element is transposed on the substrate, and the light-emitting element is electrically connected to the connection part of the electroplating layer.
本發明另一實施例的發光裝置的製造方法包括下列步驟:於基底上形成驅動線路及第一絕緣層,其中驅動線路設置於基底上,第一絕緣層設置於驅動線路上且具有重疊於驅動線路的開口;於基底上形成導電圖案層,其中導電圖案層的第一部設置於第一絕緣層的實體上,且位於第一絕緣層的開口外;於導電圖案層及第一絕緣層上形成定義層,其中定義層具有暴露導電圖案層之第一部的多個第一開口;進行於電鍍工序,以於定義層的多個第一開口中形成電鍍層的多個凸起結構,其中多個凸起結構電性連接至導電圖案層的第一部;在形成電鍍層的多個凸起結構之後,移除定義層;形成保護層,以覆蓋多個凸起結構及導電圖案層的第一部,其中保護層具有一開口,重疊於第一絕緣層的開口;於保護層的開口中形成一焊接材料,其中焊接材料透過第一絕緣層的開口電性連接至驅動電路;以及轉置發光元件於基底上,且使發光元件與焊接材料電性連接。A method for manufacturing a light-emitting device according to another embodiment of the present invention includes the following steps: forming a driving circuit and a first insulating layer on a substrate, wherein the driving circuit is disposed on the substrate, and the first insulating layer is disposed on the driving circuit and has a structure overlapping the driving circuit. The opening of the circuit; the conductive pattern layer is formed on the substrate, wherein the first part of the conductive pattern layer is arranged on the body of the first insulating layer, and is located outside the opening of the first insulating layer; on the conductive pattern layer and the first insulating layer forming a definition layer, wherein the definition layer has a plurality of first openings exposing the first portion of the conductive pattern layer; performing an electroplating process to form a plurality of protrusion structures of the electroplating layer in the plurality of first openings of the definition layer, wherein The plurality of raised structures are electrically connected to the first portion of the conductive pattern layer; after forming the plurality of raised structures of the electroplating layer, the definition layer is removed; a protective layer is formed to cover the plurality of raised structures and the conductive pattern layers The first part, wherein the protective layer has an opening overlapping the opening of the first insulating layer; a soldering material is formed in the opening of the protective layer, wherein the soldering material is electrically connected to the driving circuit through the opening of the first insulating layer; The light-emitting element is placed on the substrate, and the light-emitting element and the soldering material are electrically connected.
現將詳細地參考本發明的示範性實施例,示範性實施例的實例說明於附圖中。只要有可能,相同元件符號在圖式和描述中用來表示相同或相似部分。Reference will now be made in detail to the exemplary embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numerals are used in the drawings and description to refer to the same or like parts.
應當理解,當諸如層、膜、區域或基板的元件被稱為在另一元件“上”或“連接到”另一元件時,其可以直接在另一元件上或與另一元件連接,或者中間元件可以也存在。相反,當元件被稱為“直接在另一元件上”或“直接連接到”另一元件時,不存在中間元件。如本文所使用的,“連接”可以指物理及/或電性連接。再者,“電性連接”或“耦合”可以是二元件間存在其它元件。It will be understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "connected to" another element, it can be directly on or connected to the other element, or Intermediate elements may also be present. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element, there are no intervening elements present. As used herein, "connected" may refer to a physical and/or electrical connection. Furthermore, "electrically connected" or "coupled" may refer to the existence of other elements between the two elements.
本文使用的“約”、“近似”、或“實質上”包括所述值和在本領域普通技術人員確定的特定值的可接受的偏差範圍內的平均值,考慮到所討論的測量和與測量相關的誤差的特定數量(即,測量系統的限制)。例如,“約”可以表示在所述值的一個或多個標準偏差內,或±30%、±20%、±10%、±5%內。再者,本文使用的“約”、“近似”或“實質上”可依光學性質、蝕刻性質或其它性質,來選擇較可接受的偏差範圍或標準偏差,而可不用一個標準偏差適用全部性質。As used herein, "about," "approximately," or "substantially" includes the stated value and the average within an acceptable deviation from the particular value as determined by one of ordinary skill in the art, given the measurement in question and the A specific amount of measurement-related error (ie, the limitations of the measurement system). For example, "about" can mean within one or more standard deviations of the stated value, or within ±30%, ±20%, ±10%, ±5%. Furthermore, as used herein, "about", "approximately" or "substantially" may be used to select a more acceptable range of deviation or standard deviation depending on optical properties, etching properties or other properties, and not one standard deviation may apply to all properties. .
除非另有定義,本文使用的所有術語(包括技術和科學術語)具有與本發明所屬領域的普通技術人員通常理解的相同的含義。將進一步理解的是,諸如在通常使用的字典中定義的那些術語應當被解釋為具有與它們在相關技術和本發明的上下文中的含義一致的含義,並且將不被解釋為理想化的或過度正式的意義,除非本文中明確地這樣定義。Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms such as those defined in commonly used dictionaries should be construed as having meanings consistent with their meanings in the context of the related art and the present invention, and are not to be construed as idealized or excessive Formal meaning, unless expressly defined as such herein.
圖1A至圖1H為本發明一實施例之發光裝置10的製造流程的剖面示意圖。以下配合圖1A至圖1H舉例說明本發明一實施例之發光裝置10的製造流程。1A to 1H are schematic cross-sectional views illustrating a manufacturing process of a light-emitting
請參照圖1A,首先,於基底110上形成驅動線路DC及第一絕緣層150,其中驅動線路DC設置於基底110上,第一絕緣層150設置於驅動線路DC上且具有重疊於驅動線路DC的開口150a。舉例而言,在本實施例中,驅動線路DC包括第一金屬層120、絕緣層130及第二金屬層140,其中第一金屬層120設置於基底110上,絕緣層130設置於第一金屬層120上且具有開口130a,第二金屬層140設置於絕緣層130上且透過絕緣層130的開口130a電性連接至第一金屬層120。在本實施例中,驅動線路DC例如是被動式驅動線路。然而,本發明不限於此,在其它實施例中,驅動線路DC也可以是主動式驅動線路。Referring to FIG. 1A , firstly, a driving circuit DC and a first
請參照圖1A,接著,於第一絕緣層150上形成導電材料層160,其中導電材料層160透過第一絕緣層150的開口150a電性連接至驅動電路DC。在本實施例中,可進行一電鍍工序,以於第一絕緣層150上形成導電材料層160,而導電材料層160也可稱電鍍導電層。舉例而言,在本實施例中,導電材料層160的材料可為錫、銀、金、鎳、銅、其它材料或上述至少兩者的組合,但本發明不以此為限。1A , then, a
請參照圖1B,接著,於導電材料層160上形成第二絕緣層170,其中第二絕緣層170具有暴露導電材料層160的至少一第一開口170a,且第二絕緣層170的至少一第一開口170a位於第一絕緣層150的開口150a外。舉例而言,在本實施例中,第二絕緣層170的材料可為無機材料(例如:氧化矽、氮化矽、氮氧化矽、或上述至少二種材料的堆疊層)、有機材料或上述的組合,但本發明不以此為限。Referring to FIG. 1B , then, a second
請參照圖1C,接著,於導電材料層160及第二絕緣層170上形成一定義層180,其中定義層180具有至少一第一開口180a及一第二開口180b,且定義層180的至少一第一開口180a重疊於第二絕緣層170的至少一第一開口170a。舉例而言,在本實施例中,定義層180的材料可為光阻,但本發明不以此為限。1C, then, a
請參照圖1D,接著,進行於一電鍍工序,以於定義層180的至少一第一開口180a及第二絕緣層170的至少一第一開口170a中形成電鍍層190的至少一凸起結構191,且於定義層180的第二開口180b中形成電鍍層190的一連接部192。電鍍層190的至少一凸起結構191與電鍍層190的連接部192分離。電鍍層190的至少一凸起結構191及連接部192電性連接至導電材料層160。在本實施例中,電鍍層190的材料以具有高反射率的導電材料為佳,例如:錫、銀、金、鎳、銅、其它材料或上述至少兩者的組合,但本發明不以此為限。Referring to FIG. 1D , then, an electroplating process is performed to form at least one protruding
請參照圖1D及圖1E,接著,移除定義層180,以露出部分的第二絕緣層170及位於電鍍層190之凸起結構191與連接部192之間的部分導電材料層160。1D and FIG. 1E , then, the defining
請參照圖1E及圖1F,接著,以電鍍層190的至少一凸起結構191、第二絕緣層170及電鍍層190的連接部192為遮罩,圖案化導電材料層160,以形成導電圖案層162。請參照圖1F,導電圖案層162具有彼此分離的第一部162a及第二部162b。導電圖案層162的第一部162a設置於第一絕緣層150的實體152上且位於第一絕緣層150的開口150a外。電鍍層190的至少一凸起結構191設置於導電圖案層162的第一部162a上且與導電圖案層162的第一部162a電性連接。電鍍層190的連接部192設置於導電圖案層162的第二部162b上且與導電圖案層162的第二部162b電性連接。導電圖案層162的第二部162b透過第一絕緣層150的開口150a電性連接至驅動電路DC。在本實施例中,第二絕緣層170設置於導電圖案層162的第一部162a上,且電鍍層190的凸起結構191填入第二絕緣層170的第一開口170a,以電性連接至導電圖案層162的第一部162a。1E and FIG. 1F , then, using at least one protruding
請參照圖1F,在本實施例中,凸起結構191與導電圖案層162的第一部162a相隔一距離D。詳言之,在本實施例中,凸起結構191包括第一部191a及第二部191b,凸起結構191的第一部191a直接連接至導電圖案層162的第一部162a,凸起結構191的第二部191b直接連接至凸起結構191的第一部191a,凸起結構191之第二部191b的寬度W2大於凸起結構191之第一部191a的寬度W1,且凸起結構191的第二部191b與導電圖案層162的第一部162a相隔一距離D。此外,凸起結構191具有朝遠離基底110之方向z凸起的凸面191s。詳言之,凸起結構191的第二部191b具有凸面191s。Referring to FIG. 1F , in this embodiment, the protruding
請參照圖1G,接著,形成保護層194,以覆蓋凸起結構191、第二絕緣層170及導電圖案層162的第一部162a。保護層194具有開口194a。保護層194的開口194a重疊於第一絕緣層150的開口150a。保護層194的開口194a暴露電鍍層190的連接部192。在本實施例中,保護層194之頂面194s與基底110的距離D194大於凸起結構191的頂點191p與基底110的距離D191。Referring to FIG. 1G , then, a
請參照圖1H,接著,轉置發光元件196於基底110上,且使發光元件196與電鍍層190的連接部192電性連接。在本實施例中,發光元件196可透過電鍍層190的連接部192及導電圖案層162的第二部162b電性連接至驅動線路DC。於此,便完成本實施例的發光裝置10。在本實施例中,發光元件196的至少一部分可重疊於保護層194的開口194a,但本發明不以此為限。在本實施例中,發光裝置10可用以做為背光源。然而,本發明不限於此,在其它實施例中,發光裝置10也可用以做為自發光顯示裝置。Referring to FIG. 1H , then, the light-emitting
值得一提的是,電鍍層190的凸起結構191可將發光元件196發出的光束L反射向發光裝置10外,以提升發光裝置10的出光效率。特別是,用以反射光束L的凸起結構191本身是利用電鍍工序形成,不而是由凸起物及覆蓋凸起物的反射層所組成,因此,在發光裝置10的製程中,不會發生反射層被裸露而被異常上鍍的問題,進而能提升發光裝置10的良率。It is worth mentioning that the protruding
在此必須說明的是,下述實施例沿用前述實施例的元件標號與部分內容,其中採用相同的標號來表示相同或近似的元件,並且省略了相同技術內容的說明。關於省略部分的說明可參考前述實施例,下述實施例不再重述。It must be noted here that the following embodiments use the element numbers and part of the contents of the previous embodiments, wherein the same numbers are used to represent the same or similar elements, and the description of the same technical contents is omitted. For the description of the omitted part, reference may be made to the foregoing embodiments, and the following embodiments will not be repeated.
圖2A至圖2G為本發明另一實施例之發光裝置10A的製造流程的剖面示意圖。圖2A至圖2G的發光裝置10A及其製造流程與圖1A至圖1H的發光裝置10及其製造流程類似,兩者主要的差異在於:在圖2A至圖2G的實施例中,不須形成圖1A至圖1H之實施例的第二絕緣層170。以下配合圖2A至圖2G說明本發明第二實施例之發光裝置10A的製造流程。2A to 2G are schematic cross-sectional views illustrating a manufacturing process of a light-emitting
請參照圖2A,首先,於基底110上形成驅動線路DC及第一絕緣層150,其中驅動線路DC設置於基底110上,第一絕緣層150設置於驅動線路DC上且具有重疊於驅動線路DC的開口150a。接著,於基底110上形成導電圖案層162,其中導電圖案層162的第一部162a設置於第一絕緣層150的實體152上,且位於第一絕緣層150的開口150a外。Referring to FIG. 2A , first, a driving circuit DC and a first insulating
請參照圖2B,接著,於導電圖案層162及第一絕緣層150上形成定義層180,其中定義層180具有暴露導電圖案層162之第一部162a的多個第一開口180a。Referring to FIG. 2B , then, a
請參照圖2C,接著,進行於一電鍍工序,以於定義層180的多個第一開口180a中形成電鍍層190的多個凸起結構191,其中多個凸起結構191電性連接至導電圖案層162的第一部162a。凸起結構191與導電圖案層162的第一部162a相隔一距離D。詳言之,在本實施例中,凸起結構191包括第一部191a及第二部191b,凸起結構191的第一部191a直接連接至導電圖案層162的第一部162a,凸起結構191的第二部191b直接連接至凸起結構191的第一部191a,凸起結構191之第二部191b的寬度W2大於凸起結構191之第一部191a的寬度W1,且凸起結構191的第二部191b與導電圖案層162的第一部162a相隔一距離D。Referring to FIG. 2C , a plating process is performed to form a plurality of protruding
請參照圖2C及圖2D,接著,移除定義層180,以露出導電圖案層162的第一部162a及重疊於第一絕緣層150之開口150a的部分驅動電路DC。在本實施例中,在移除定義層180之後,凸起結構191與導電圖案層162的第一部162a之間會存在間隙g。詳言之,在本實施例中,間隙g存在於凸起結構191的第二部191b與導電圖案層162的第一部162a之間。2C and FIG. 2D , then, the defining
請參照圖2E,接著,形成保護層194,以覆蓋多個凸起結構191及導電圖案層162的第一部162a,其中保護層194具有一開口194a,重疊於第一絕緣層150的開口150a。在本實施例中,保護層194更填入間隙g。2E, then, a
請參照圖2F,接著,於保護層194的開口194a中形成一焊接材料195,其中焊接材料195透過第一絕緣層150的開口150a電性連接至驅動電路DC。舉例而言,在本實施例中,焊接材料195可包括鎳金膜(包括鎳/或鎳合金與金/或金合金)、鎳鈀金膜(包括鎳/或鎳合金、鈀/或鈀合金與金/或金合金)、鎳鈀銀金膜(包括鎳/或鎳合金、鈀/或鈀合金、銀/或銀合金與金/或金合金),但本發明不以此為限。2F , then, a
請參照圖2G,接著,轉置發光元件196於基底110上,且使發光元件196與焊接材料195電性連接。在本實施例中,發光元件196透過焊接材料195電性連接至驅動線路DC。於此,便完成本實施例的發光裝置10A。Referring to FIG. 2G , next, the light-emitting
10、10A:發光裝置
110:基底
120:第一金屬層
130:絕緣層
130a、150a、194a:開口
140:第二金屬層
150:第一絕緣層
152:實體
160:導電材料層
162:導電圖案層
162a:第一部
162b:第二部
170:第二絕緣層
170a、180a:第一開口
180:定義層
180b:第二開口
190:電鍍層
191:凸起結構
191a:第一部
191b:第二部
191s:凸面
191p:頂點
192:連接部
194:保護層
194s:頂面
195:焊接材料
196:發光元件
D、D191、D194:距離
DC:驅動線路
g:間隙
L:光束
W1、W2:寬度10, 10A: Lighting device
110: Base
120: first metal layer
130:
圖1A至圖1H為本發明一實施例之發光裝置10的製造流程的剖面示意圖。
圖2A至圖2G為本發明另一實施例之發光裝置10A的製造流程的剖面示意圖。
1A to 1H are schematic cross-sectional views illustrating a manufacturing process of a light-emitting
10:發光裝置 10: Lighting device
110:基底 110: Base
120:第一金屬層 120: first metal layer
130:絕緣層 130: Insulation layer
130a、150a、194a:開口 130a, 150a, 194a: openings
140:第二金屬層 140: Second metal layer
150:第一絕緣層 150: first insulating layer
152:實體 152: Entity
162:導電圖案層 162: Conductive pattern layer
162a:第一部
162a:
162b:第二部 162b: Part II
170:第二絕緣層 170: Second insulating layer
170a:第一開口 170a: First Opening
190:電鍍層 190: Electroplating layer
191:凸起結構 191: Raised Structure
191a:第一部
191a:
191b:第二部 191b: Part II
191s:凸面 191s: Convex
191p:頂點 191p: Vertex
192:連接部 192: Connector
194:保護層 194: Protective Layer
194s:頂面 194s: Top Surface
196:發光元件 196: Light-emitting element
D、D191、D194:距離 D, D191, D194: distance
DC:驅動線路 DC: drive line
L:光束 L: Beam
W1、W2:寬度 W1, W2: width
z:方向 z: direction
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US20050127376A1 (en) * | 2002-03-20 | 2005-06-16 | Koninklijke Philips Electronics N.V. | Active matrix electroluminescent display devices, and their manufacture |
CN105552159A (en) * | 2016-01-12 | 2016-05-04 | 友达光电股份有限公司 | light sensing device |
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US20050127376A1 (en) * | 2002-03-20 | 2005-06-16 | Koninklijke Philips Electronics N.V. | Active matrix electroluminescent display devices, and their manufacture |
CN105552159A (en) * | 2016-01-12 | 2016-05-04 | 友达光电股份有限公司 | light sensing device |
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