TW202315046A - Light emitting apparatus and manufacturing method thereof - Google Patents

Light emitting apparatus and manufacturing method thereof Download PDF

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TW202315046A
TW202315046A TW110135048A TW110135048A TW202315046A TW 202315046 A TW202315046 A TW 202315046A TW 110135048 A TW110135048 A TW 110135048A TW 110135048 A TW110135048 A TW 110135048A TW 202315046 A TW202315046 A TW 202315046A
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layer
conductive pattern
opening
insulating layer
pattern layer
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TW110135048A
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TWI769082B (en
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阮丞禾
曾建洲
侯智元
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友達光電股份有限公司
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Abstract

A light emitting apparatus includes a substrate, a driving circuit, a first insulation layer, a conductive pattern layer, a plating layer, a projection layer and a light emitting element. The driving circuit is disposed on the substrate. The first insulation layer is disposed on the driving circuit and has an opening overlapped with the driving circuit. The conductive pattern layer has a first portion, wherein the first portion of the conductive pattern is disposed on a solid portion of the first insulation layer and located outside the opening of the first insulation layer. The plating layer has at least one raised structure, wherein the at least one raised structure is disposed on and electrically connected to the first portion of the conductive pattern layer. The protection layer is disposed on the first insulation layer and covers the at least one raised structure and the first portion of the conductive pattern layer. The light emitting element is electrically connected to the driving circuit.

Description

發光裝置及其製造方法Light emitting device and manufacturing method thereof

本發明是有關於一種發光裝置及其製造方法。The invention relates to a light emitting device and a manufacturing method thereof.

相較於有機發光二極體背光模組(或顯示裝置),小型發光二極體的背光模組(或顯示裝置)具有省電、高效率及高亮度等優點。小型發光二極體的背光模組(或顯示裝置)包括驅動背板及被轉置於驅動背板之接墊上的小型發光二極體。Compared with organic light-emitting diode backlight modules (or display devices), small light-emitting diode backlight modules (or display devices) have the advantages of power saving, high efficiency, and high brightness. The backlight module (or display device) of small light-emitting diodes includes a driving backplane and small light-emitting diodes that are transposed on pads of the driving backplane.

一般而言,為增加出光效率,會在驅動背板的接墊周圍設置多個凸起物;然後,再於多個凸起物上設置共形的反射層,以形成具有表面起伏的反射結構。小型發光二極體發出的部分光束會傳向驅動背板而不易出光,但透過驅動背板的反射結構能將傳向驅動背板的部分光束反射向外,進而增加出光效率。Generally speaking, in order to increase the light extraction efficiency, a plurality of protrusions are arranged around the pads of the driving backplane; then, a conformal reflective layer is arranged on the plurality of protrusions to form a reflective structure with surface relief . Part of the light beam emitted by the small light-emitting diode will be transmitted to the driving backplane and is not easy to emit light, but through the reflective structure of the driving backplane, part of the light beam transmitted to the driving backplane can be reflected outward, thereby increasing the light extraction efficiency.

在上述具有反射結構之驅動背板的製程中,在形成反射層後,還會在反射層上形成絕緣材料層;然後,再圖案化絕緣材料層,以露出用以與小型發光二極體接合的接墊;最後,再使接墊上鍍。然而,在圖案化絕緣材料層以露出接墊時,由於部分的絕緣材料層設置在上下起伏的反射結構上,導致在圖案化絕緣材料層的過程中,凸起物上方的部分絕緣材料層也會被去除,而使凸起物上的部分反射層被裸露。因此,當接墊被上鍍時,被裸露出之凸起物上的部分反射層也會被異常地被上鍍,影響小型發光二極體的背光模組(或顯示裝置)的良率。In the process of driving the backplane with a reflective structure, after the reflective layer is formed, an insulating material layer is formed on the reflective layer; then, the insulating material layer is patterned to expose the small light-emitting diodes for bonding. The pads; finally, the pads are plated. However, when the insulating material layer is patterned to expose the contact pads, since part of the insulating material layer is disposed on the up and down reflective structure, during the process of patterning the insulating material layer, the part of the insulating material layer above the protrusions is also exposed. will be removed, so that part of the reflective layer on the protrusion is exposed. Therefore, when the pads are plated, part of the reflective layer on the exposed bumps will also be plated abnormally, affecting the yield of the backlight module (or display device) of the small LED.

本發明提供一種發光裝置,良率能提升。The invention provides a light-emitting device, and the yield rate can be improved.

本發明提供一種發光裝置的製造方法,能提升發光裝置的良率。The invention provides a method for manufacturing a light emitting device, which can improve the yield of the light emitting device.

本發明提供另一種發光裝置的製造方法,也能提升發光裝置的良率。The invention provides another manufacturing method of the light emitting device, which can also improve the yield of the light emitting device.

本發明的發光裝置,包括基底、驅動線路、第一絕緣層、導電圖案層、電鍍層、保護層及發光元件。驅動線路設置於基底上。第一絕緣層設置於驅動線路上,且具有重疊於驅動線路的開口。導電圖案層具有第一部,其中導電圖案層的第一部設置於第一絕緣層的實體上,且位於第一絕緣層的開口外。電鍍層具有至少一凸起結構,其中至少一凸起結構設置於導電圖案層的第一部上,且與導電圖案層的第一部電性連接。保護層設置於第一絕緣層上,且覆蓋至少一凸起結構及導電圖案層的第一部。發光元件電性連接至驅動線路。The light-emitting device of the present invention includes a substrate, a driving circuit, a first insulating layer, a conductive pattern layer, an electroplating layer, a protective layer and a light-emitting element. The driving circuit is arranged on the base. The first insulating layer is disposed on the driving circuit and has an opening overlapping the driving circuit. The conductive pattern layer has a first portion, wherein the first portion of the conductive pattern layer is disposed on the body of the first insulating layer and is located outside the opening of the first insulating layer. The electroplating layer has at least one protruding structure, wherein the at least one protruding structure is disposed on the first portion of the conductive pattern layer and is electrically connected to the first portion of the conductive pattern layer. The protective layer is disposed on the first insulating layer and covers at least one protruding structure and the first part of the conductive pattern layer. The light emitting element is electrically connected to the driving circuit.

在本發明的一實施例中,上述至少一凸起結構與導電圖案層的第一部相隔一距離。In an embodiment of the present invention, the at least one protruding structure is separated from the first portion of the conductive pattern layer by a distance.

在本發明的一實施例中,上述的至少一凸起結構包括第一部及第二部,至少一凸起結構的第一部直接連接至導電圖案層的第一部,至少一凸起結構的第二部直接連接至至少一凸起結構的第一部,至少一凸起結構之第二部的寬度大於至少一凸起結構之第一部的寬度,且至少一凸起結構的第二部與導電圖案層的第一部之間相隔上述距離。In an embodiment of the present invention, the above-mentioned at least one raised structure includes a first part and a second part, the first part of the at least one raised structure is directly connected to the first part of the conductive pattern layer, and the at least one raised structure The second portion of the at least one protruding structure is directly connected to the first portion of the at least one protruding structure, the width of the second portion of the at least one protruding structure is greater than the width of the first portion of the at least one protruding structure, and the second portion of the at least one protruding structure The portion is separated from the first portion of the conductive pattern layer by the above-mentioned distance.

在本發明的一實施例中,上述的至少一凸起結構具有朝遠離基底之方向凸起的凸面。In an embodiment of the present invention, the above-mentioned at least one protruding structure has a convex surface protruding away from the base.

在本發明的一實施例中,上述的至少一凸起結構包括第一部及第二部,至少一凸起結構的第一部直接連接至導電圖案層的第一部,至少一凸起結構的第二部直接連接至至少一凸起結構的第一部,至少一凸起結構之第二部的寬度大於至少一凸起結構之第一部的寬度,且至少一凸起結構的第二部具有上述凸面。In an embodiment of the present invention, the above-mentioned at least one raised structure includes a first part and a second part, the first part of the at least one raised structure is directly connected to the first part of the conductive pattern layer, and the at least one raised structure The second portion of the at least one protruding structure is directly connected to the first portion of the at least one protruding structure, the width of the second portion of the at least one protruding structure is greater than the width of the first portion of the at least one protruding structure, and the second portion of the at least one protruding structure The portion has the above-mentioned convex surface.

在本發明的一實施例中,上述的導電圖案層更具有第二部,導電圖案層的第一部與導電圖案層的第二部分離,導電圖案層的第二部透過第一絕緣層的開口電性連接至驅動電路,且發光元件電性連接至導電圖案層的第二部。In an embodiment of the present invention, the above-mentioned conductive pattern layer further has a second portion, the first portion of the conductive pattern layer is separated from the second portion of the conductive pattern layer, and the second portion of the conductive pattern layer penetrates through the second portion of the first insulating layer. The opening is electrically connected to the driving circuit, and the light emitting element is electrically connected to the second portion of the conductive pattern layer.

在本發明的一實施例中,上述的發光裝置更包括第二絕緣層,設置於導電圖案層的第一部上,其中第二絕緣層具有至少一第一開口,且電鍍層之至少一凸起結構填入第二絕緣層的至少一第一開口,以電性連接至導電圖案層的第一部。In an embodiment of the present invention, the above-mentioned light-emitting device further includes a second insulating layer disposed on the first portion of the conductive pattern layer, wherein the second insulating layer has at least one first opening, and at least one protrusion of the electroplating layer The structure is filled into at least one first opening of the second insulating layer, so as to be electrically connected to the first portion of the conductive pattern layer.

在本發明的一實施例中,上述的電鍍層更具有連接部,電鍍層的連接部與電鍍層的至少一凸起結構分離,電鍍層的連接部電性連接至導電圖案層的第二部,且發光元件電性連接至電鍍層的連接部。In an embodiment of the present invention, the above-mentioned electroplating layer further has a connecting portion, the connecting portion of the electroplating layer is separated from at least one protrusion structure of the electroplating layer, and the connecting portion of the electroplating layer is electrically connected to the second portion of the conductive pattern layer , and the light-emitting element is electrically connected to the connecting portion of the electroplating layer.

在本發明的一實施例中,上述的至少一凸起結構與導電圖案層的第一部之間存在一間隙,且保護層填入所述間隙。In an embodiment of the present invention, there is a gap between the at least one protrusion structure and the first portion of the conductive pattern layer, and the protective layer fills the gap.

在本發明的一實施例中,上述的保護層的頂面與基底的距離大於至少一凸起結構的頂點與基底的距離。In an embodiment of the present invention, the distance between the top surface of the protective layer and the base is greater than the distance between the apex of the at least one protruding structure and the base.

本發明一實施例的發光裝置的製造方法包括下列步驟:於基底上形成驅動線路及第一絕緣層,其中驅動線路設置於基底上,第一絕緣層設置於驅動線路上且具有重疊於驅動線路的開口;於第一絕緣層上形成導電材料層,其中導電材料層透過第一絕緣層的開口電性連接至驅動電路;於導電材料層上形成第二絕緣層,其中第二絕緣層具有暴露導電材料層的至少一第一開口,且第二絕緣層的至少一第一開口位於第一絕緣層的開口外;於導電材料層及第二絕緣層上形成定義層,其中定義層具有至少一第一開口及第二開口,且定義層的至少一第一開口重疊於第二絕緣層的至少一第一開口;進行於電鍍工序,以於定義層的至少一第一開口及第二絕緣層的至少一第一開口中形成電鍍層的至少一凸起結構,且於定義層的第二開口中形成電鍍層的連接部;在形成電鍍層的至少一凸起結構及連接部之後,移除定義層;以電鍍層的至少一凸起結構、第二絕緣層及電鍍層的連接部為遮罩,圖案化導電材料層,以形成導電圖案層,其中導電圖案層具有第一部及第二部,導電圖案層的第一部設置於第一絕緣層的實體上且位於第一絕緣層的開口外,電鍍層的至少一凸起結構設置於導電圖案層的第一部上且與導電圖案層的第一部電性連接,電鍍層的連接部設置於導電圖案層的第二部上且與導電圖案層的第二部電性連接,導電圖案層的第二部透過第一絕緣層的開口電性連接至驅動電路,且導電圖案層的第一部及第二部彼此分離;形成保護層,以覆蓋至少一凸起結構、第二絕緣層及導電圖案層的第一部,其中保護層具有開口,暴露電鍍層的連接部;以及轉置發光元件於基底上,且使發光元件與電鍍層的連接部電性連接。A method for manufacturing a light-emitting device according to an embodiment of the present invention includes the following steps: forming a driving circuit and a first insulating layer on a substrate, wherein the driving circuit is disposed on the substrate, and the first insulating layer is disposed on the driving circuit and has a structure overlapping the driving circuit. an opening; a conductive material layer is formed on the first insulating layer, wherein the conductive material layer is electrically connected to the driving circuit through the opening of the first insulating layer; a second insulating layer is formed on the conductive material layer, wherein the second insulating layer has exposed At least one first opening of the conductive material layer, and at least one first opening of the second insulating layer is located outside the opening of the first insulating layer; a defining layer is formed on the conducting material layer and the second insulating layer, wherein the defining layer has at least one The first opening and the second opening, and the at least one first opening of the definition layer overlaps the at least one first opening of the second insulating layer; the electroplating process is performed to define the at least one first opening of the layer and the second insulating layer At least one raised structure of the electroplating layer is formed in at least one first opening of the defined layer, and a connection portion of the electroplating layer is formed in the second opening of the definition layer; after the at least one raised structure and the connecting portion of the electroplating layer are formed, the Definition layer; using at least one raised structure of the electroplating layer, the second insulating layer and the connection part of the electroplating layer as a mask, patterning the conductive material layer to form a conductive pattern layer, wherein the conductive pattern layer has a first part and a second part part, the first part of the conductive pattern layer is disposed on the entity of the first insulating layer and is located outside the opening of the first insulating layer, and at least one raised structure of the electroplating layer is disposed on the first part of the conductive pattern layer and is connected with the conductive pattern The first part of the layer is electrically connected, the connection part of the electroplating layer is arranged on the second part of the conductive pattern layer and is electrically connected with the second part of the conductive pattern layer, and the second part of the conductive pattern layer passes through the second part of the first insulating layer. The opening is electrically connected to the driving circuit, and the first part and the second part of the conductive pattern layer are separated from each other; a protective layer is formed to cover at least one protrusion structure, the second insulating layer and the first part of the conductive pattern layer, wherein the protection The layer has an opening, exposing the connection part of the electroplating layer; and transposing the light-emitting element on the base, and electrically connecting the light-emitting element and the connection part of the electroplating layer.

本發明另一實施例的發光裝置的製造方法包括下列步驟:於基底上形成驅動線路及第一絕緣層,其中驅動線路設置於基底上,第一絕緣層設置於驅動線路上且具有重疊於驅動線路的開口;於基底上形成導電圖案層,其中導電圖案層的第一部設置於第一絕緣層的實體上,且位於第一絕緣層的開口外;於導電圖案層及第一絕緣層上形成定義層,其中定義層具有暴露導電圖案層之第一部的多個第一開口;進行於電鍍工序,以於定義層的多個第一開口中形成電鍍層的多個凸起結構,其中多個凸起結構電性連接至導電圖案層的第一部;在形成電鍍層的多個凸起結構之後,移除定義層;形成保護層,以覆蓋多個凸起結構及導電圖案層的第一部,其中保護層具有一開口,重疊於第一絕緣層的開口;於保護層的開口中形成一焊接材料,其中焊接材料透過第一絕緣層的開口電性連接至驅動電路;以及轉置發光元件於基底上,且使發光元件與焊接材料電性連接。A method for manufacturing a light emitting device according to another embodiment of the present invention includes the following steps: forming a driving circuit and a first insulating layer on a substrate, wherein the driving circuit is disposed on the substrate, and the first insulating layer is disposed on the driving circuit and has a layer overlapping the driving circuit. The opening of the line; forming a conductive pattern layer on the base, wherein the first part of the conductive pattern layer is arranged on the entity of the first insulating layer, and is located outside the opening of the first insulating layer; on the conductive pattern layer and the first insulating layer forming a defined layer, wherein the defined layer has a plurality of first openings exposing the first portion of the conductive pattern layer; performing an electroplating process to form a plurality of raised structures of the electroplating layer in the plurality of first openings of the defined layer, wherein A plurality of raised structures are electrically connected to the first portion of the conductive pattern layer; after forming the plurality of raised structures of the electroplating layer, the definition layer is removed; a protective layer is formed to cover the plurality of raised structures and the conductive pattern layer The first part, wherein the protective layer has an opening overlapping the opening of the first insulating layer; forming a soldering material in the opening of the protective layer, wherein the soldering material is electrically connected to the driving circuit through the opening of the first insulating layer; and The light-emitting element is placed on the base, and the light-emitting element is electrically connected with the welding material.

現將詳細地參考本發明的示範性實施例,示範性實施例的實例說明於附圖中。只要有可能,相同元件符號在圖式和描述中用來表示相同或相似部分。Reference will now be made in detail to the exemplary embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numbers are used in the drawings and descriptions to refer to the same or like parts.

應當理解,當諸如層、膜、區域或基板的元件被稱為在另一元件“上”或“連接到”另一元件時,其可以直接在另一元件上或與另一元件連接,或者中間元件可以也存在。相反,當元件被稱為“直接在另一元件上”或“直接連接到”另一元件時,不存在中間元件。如本文所使用的,“連接”可以指物理及/或電性連接。再者,“電性連接”或“耦合”可以是二元件間存在其它元件。It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "connected to" another element, it can be directly on or connected to the other element, or Intermediate elements may also be present. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element, there are no intervening elements present. As used herein, "connected" may refer to physical and/or electrical connection. Furthermore, "electrically connected" or "coupled" may mean that other elements exist between two elements.

本文使用的“約”、“近似”、或“實質上”包括所述值和在本領域普通技術人員確定的特定值的可接受的偏差範圍內的平均值,考慮到所討論的測量和與測量相關的誤差的特定數量(即,測量系統的限制)。例如,“約”可以表示在所述值的一個或多個標準偏差內,或±30%、±20%、±10%、±5%內。再者,本文使用的“約”、“近似”或“實質上”可依光學性質、蝕刻性質或其它性質,來選擇較可接受的偏差範圍或標準偏差,而可不用一個標準偏差適用全部性質。As used herein, "about," "approximately," or "substantially" includes stated values and averages within acceptable deviations from a particular value as determined by one of ordinary skill in the art, taking into account the measurements in question and the relative A specific amount of measurement-related error (ie, the limit of the measurement system). For example, "about" can mean within one or more standard deviations of the stated value, or within ±30%, ±20%, ±10%, ±5%. Moreover, "about", "approximately" or "substantially" used herein may select a more acceptable deviation range or standard deviation according to optical properties, etching properties or other properties, and may not use one standard deviation to apply to all properties .

除非另有定義,本文使用的所有術語(包括技術和科學術語)具有與本發明所屬領域的普通技術人員通常理解的相同的含義。將進一步理解的是,諸如在通常使用的字典中定義的那些術語應當被解釋為具有與它們在相關技術和本發明的上下文中的含義一致的含義,並且將不被解釋為理想化的或過度正式的意義,除非本文中明確地這樣定義。Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms such as those defined in commonly used dictionaries should be interpreted to have meanings consistent with their meanings in the context of the relevant art and the present invention, and will not be interpreted as idealized or excessive formal meaning, unless expressly so defined herein.

圖1A至圖1H為本發明一實施例之發光裝置10的製造流程的剖面示意圖。以下配合圖1A至圖1H舉例說明本發明一實施例之發光裝置10的製造流程。1A to 1H are schematic cross-sectional views of the manufacturing process of a light emitting device 10 according to an embodiment of the present invention. The manufacturing process of the light emitting device 10 according to an embodiment of the present invention will be illustrated below with reference to FIG. 1A to FIG. 1H .

請參照圖1A,首先,於基底110上形成驅動線路DC及第一絕緣層150,其中驅動線路DC設置於基底110上,第一絕緣層150設置於驅動線路DC上且具有重疊於驅動線路DC的開口150a。舉例而言,在本實施例中,驅動線路DC包括第一金屬層120、絕緣層130及第二金屬層140,其中第一金屬層120設置於基底110上,絕緣層130設置於第一金屬層120上且具有開口130a,第二金屬層140設置於絕緣層130上且透過絕緣層130的開口130a電性連接至第一金屬層120。在本實施例中,驅動線路DC例如是被動式驅動線路。然而,本發明不限於此,在其它實施例中,驅動線路DC也可以是主動式驅動線路。Please refer to FIG. 1A, firstly, the driving circuit DC and the first insulating layer 150 are formed on the substrate 110, wherein the driving circuit DC is arranged on the substrate 110, and the first insulating layer 150 is arranged on the driving circuit DC and has a structure overlapping the driving circuit DC. The opening 150a. For example, in this embodiment, the driving circuit DC includes a first metal layer 120, an insulating layer 130, and a second metal layer 140, wherein the first metal layer 120 is disposed on the substrate 110, and the insulating layer 130 is disposed on the first metal layer 140. The layer 120 has an opening 130 a on it. The second metal layer 140 is disposed on the insulating layer 130 and is electrically connected to the first metal layer 120 through the opening 130 a of the insulating layer 130 . In this embodiment, the driving line DC is, for example, a passive driving line. However, the present invention is not limited thereto, and in other embodiments, the driving line DC may also be an active driving line.

請參照圖1A,接著,於第一絕緣層150上形成導電材料層160,其中導電材料層160透過第一絕緣層150的開口150a電性連接至驅動電路DC。在本實施例中,可進行一電鍍工序,以於第一絕緣層150上形成導電材料層160,而導電材料層160也可稱電鍍導電層。舉例而言,在本實施例中,導電材料層160的材料可為錫、銀、金、鎳、銅、其它材料或上述至少兩者的組合,但本發明不以此為限。Referring to FIG. 1A , next, a conductive material layer 160 is formed on the first insulating layer 150 , wherein the conductive material layer 160 is electrically connected to the driving circuit DC through the opening 150 a of the first insulating layer 150 . In this embodiment, an electroplating process can be performed to form the conductive material layer 160 on the first insulating layer 150, and the conductive material layer 160 can also be called an electroplating conductive layer. For example, in this embodiment, the material of the conductive material layer 160 can be tin, silver, gold, nickel, copper, other materials or a combination of at least two of the above, but the invention is not limited thereto.

請參照圖1B,接著,於導電材料層160上形成第二絕緣層170,其中第二絕緣層170具有暴露導電材料層160的至少一第一開口170a,且第二絕緣層170的至少一第一開口170a位於第一絕緣層150的開口150a外。舉例而言,在本實施例中,第二絕緣層170的材料可為無機材料(例如:氧化矽、氮化矽、氮氧化矽、或上述至少二種材料的堆疊層)、有機材料或上述的組合,但本發明不以此為限。Please refer to FIG. 1B, then, a second insulating layer 170 is formed on the conductive material layer 160, wherein the second insulating layer 170 has at least one first opening 170a exposing the conductive material layer 160, and at least one first opening 170a of the second insulating layer 170 An opening 170 a is located outside the opening 150 a of the first insulating layer 150 . For example, in this embodiment, the material of the second insulating layer 170 can be an inorganic material (for example: silicon oxide, silicon nitride, silicon oxynitride, or a stacked layer of at least two of the above materials), an organic material or the above-mentioned combination, but the present invention is not limited thereto.

請參照圖1C,接著,於導電材料層160及第二絕緣層170上形成一定義層180,其中定義層180具有至少一第一開口180a及一第二開口180b,且定義層180的至少一第一開口180a重疊於第二絕緣層170的至少一第一開口170a。舉例而言,在本實施例中,定義層180的材料可為光阻,但本發明不以此為限。Please refer to FIG. 1C, then, a definition layer 180 is formed on the conductive material layer 160 and the second insulating layer 170, wherein the definition layer 180 has at least one first opening 180a and a second opening 180b, and at least one of the definition layer 180 The first opening 180 a overlaps at least one first opening 170 a of the second insulating layer 170 . For example, in this embodiment, the material of the definition layer 180 can be photoresist, but the invention is not limited thereto.

請參照圖1D,接著,進行於一電鍍工序,以於定義層180的至少一第一開口180a及第二絕緣層170的至少一第一開口170a中形成電鍍層190的至少一凸起結構191,且於定義層180的第二開口180b中形成電鍍層190的一連接部192。電鍍層190的至少一凸起結構191與電鍍層190的連接部192分離。電鍍層190的至少一凸起結構191及連接部192電性連接至導電材料層160。在本實施例中,電鍍層190的材料以具有高反射率的導電材料為佳,例如:錫、銀、金、鎳、銅、其它材料或上述至少兩者的組合,但本發明不以此為限。Please refer to FIG. 1D, then, an electroplating process is performed to form at least one raised structure 191 of the electroplating layer 190 in at least one first opening 180a of the definition layer 180 and at least one first opening 170a of the second insulating layer 170 , and a connection portion 192 of the plating layer 190 is formed in the second opening 180 b of the definition layer 180 . At least one protruding structure 191 of the electroplating layer 190 is separated from the connecting portion 192 of the electroplating layer 190 . At least one protruding structure 191 and the connecting portion 192 of the electroplating layer 190 are electrically connected to the conductive material layer 160 . In this embodiment, the material of the electroplating layer 190 is preferably a conductive material with high reflectivity, such as tin, silver, gold, nickel, copper, other materials or a combination of at least two of the above, but the present invention does not limit.

請參照圖1D及圖1E,接著,移除定義層180,以露出部分的第二絕緣層170及位於電鍍層190之凸起結構191與連接部192之間的部分導電材料層160。Referring to FIG. 1D and FIG. 1E , then, the definition layer 180 is removed to expose a portion of the second insulating layer 170 and a portion of the conductive material layer 160 between the protruding structure 191 and the connection portion 192 of the plating layer 190 .

請參照圖1E及圖1F,接著,以電鍍層190的至少一凸起結構191、第二絕緣層170及電鍍層190的連接部192為遮罩,圖案化導電材料層160,以形成導電圖案層162。請參照圖1F,導電圖案層162具有彼此分離的第一部162a及第二部162b。導電圖案層162的第一部162a設置於第一絕緣層150的實體152上且位於第一絕緣層150的開口150a外。電鍍層190的至少一凸起結構191設置於導電圖案層162的第一部162a上且與導電圖案層162的第一部162a電性連接。電鍍層190的連接部192設置於導電圖案層162的第二部162b上且與導電圖案層162的第二部162b電性連接。導電圖案層162的第二部162b透過第一絕緣層150的開口150a電性連接至驅動電路DC。在本實施例中,第二絕緣層170設置於導電圖案層162的第一部162a上,且電鍍層190的凸起結構191填入第二絕緣層170的第一開口170a,以電性連接至導電圖案層162的第一部162a。Please refer to FIG. 1E and FIG. 1F, then, using at least one protrusion structure 191 of the electroplating layer 190, the second insulating layer 170, and the connecting portion 192 of the electroplating layer 190 as a mask, pattern the conductive material layer 160 to form a conductive pattern Layer 162. Referring to FIG. 1F , the conductive pattern layer 162 has a first portion 162 a and a second portion 162 b separated from each other. The first portion 162a of the conductive pattern layer 162 is disposed on the entity 152 of the first insulating layer 150 and located outside the opening 150a of the first insulating layer 150 . At least one protruding structure 191 of the electroplating layer 190 is disposed on the first portion 162 a of the conductive pattern layer 162 and is electrically connected to the first portion 162 a of the conductive pattern layer 162 . The connection portion 192 of the electroplating layer 190 is disposed on the second portion 162 b of the conductive pattern layer 162 and is electrically connected to the second portion 162 b of the conductive pattern layer 162 . The second portion 162b of the conductive pattern layer 162 is electrically connected to the driving circuit DC through the opening 150a of the first insulating layer 150 . In this embodiment, the second insulating layer 170 is disposed on the first portion 162a of the conductive pattern layer 162, and the raised structure 191 of the electroplating layer 190 fills the first opening 170a of the second insulating layer 170 for electrical connection. to the first portion 162a of the conductive pattern layer 162 .

請參照圖1F,在本實施例中,凸起結構191與導電圖案層162的第一部162a相隔一距離D。詳言之,在本實施例中,凸起結構191包括第一部191a及第二部191b,凸起結構191的第一部191a直接連接至導電圖案層162的第一部162a,凸起結構191的第二部191b直接連接至凸起結構191的第一部191a,凸起結構191之第二部191b的寬度W2大於凸起結構191之第一部191a的寬度W1,且凸起結構191的第二部191b與導電圖案層162的第一部162a相隔一距離D。此外,凸起結構191具有朝遠離基底110之方向z凸起的凸面191s。詳言之,凸起結構191的第二部191b具有凸面191s。Referring to FIG. 1F , in this embodiment, the protruding structure 191 is separated from the first portion 162 a of the conductive pattern layer 162 by a distance D. Specifically, in this embodiment, the protruding structure 191 includes a first portion 191a and a second portion 191b, the first portion 191a of the protruding structure 191 is directly connected to the first portion 162a of the conductive pattern layer 162, the protruding structure The second portion 191b of the protruding structure 191 is directly connected to the first portion 191a of the protruding structure 191, the width W2 of the second portion 191b of the protruding structure 191 is greater than the width W1 of the first portion 191a of the protruding structure 191, and the protruding structure 191 The second portion 191b of the conductive pattern layer 162 is separated by a distance D from the first portion 162a of the conductive pattern layer 162 . In addition, the protruding structure 191 has a convex surface 191s protruding toward the direction z away from the base 110 . In detail, the second portion 191b of the protruding structure 191 has a convex surface 191s.

請參照圖1G,接著,形成保護層194,以覆蓋凸起結構191、第二絕緣層170及導電圖案層162的第一部162a。保護層194具有開口194a。保護層194的開口194a重疊於第一絕緣層150的開口150a。保護層194的開口194a暴露電鍍層190的連接部192。在本實施例中,保護層194之頂面194s與基底110的距離D194大於凸起結構191的頂點191p與基底110的距離D191。Referring to FIG. 1G , next, a protective layer 194 is formed to cover the protruding structure 191 , the second insulating layer 170 and the first portion 162 a of the conductive pattern layer 162 . The protective layer 194 has an opening 194a. The opening 194 a of the passivation layer 194 overlaps the opening 150 a of the first insulating layer 150 . The opening 194 a of the protection layer 194 exposes the connection portion 192 of the plating layer 190 . In this embodiment, the distance D194 between the top surface 194s of the protection layer 194 and the base 110 is greater than the distance D191 between the apex 191p of the protruding structure 191 and the base 110 .

請參照圖1H,接著,轉置發光元件196於基底110上,且使發光元件196與電鍍層190的連接部192電性連接。在本實施例中,發光元件196可透過電鍍層190的連接部192及導電圖案層162的第二部162b電性連接至驅動線路DC。於此,便完成本實施例的發光裝置10。在本實施例中,發光元件196的至少一部分可重疊於保護層194的開口194a,但本發明不以此為限。在本實施例中,發光裝置10可用以做為背光源。然而,本發明不限於此,在其它實施例中,發光裝置10也可用以做為自發光顯示裝置。Referring to FIG. 1H , then, the light emitting element 196 is transposed on the substrate 110 , and the light emitting element 196 is electrically connected to the connection portion 192 of the electroplating layer 190 . In this embodiment, the light emitting element 196 can be electrically connected to the driving circuit DC through the connection portion 192 of the electroplating layer 190 and the second portion 162 b of the conductive pattern layer 162 . Here, the light emitting device 10 of this embodiment is completed. In this embodiment, at least a part of the light emitting element 196 may overlap the opening 194a of the protective layer 194, but the invention is not limited thereto. In this embodiment, the light emitting device 10 can be used as a backlight. However, the present invention is not limited thereto. In other embodiments, the light emitting device 10 can also be used as a self-luminous display device.

值得一提的是,電鍍層190的凸起結構191可將發光元件196發出的光束L反射向發光裝置10外,以提升發光裝置10的出光效率。特別是,用以反射光束L的凸起結構191本身是利用電鍍工序形成,不而是由凸起物及覆蓋凸起物的反射層所組成,因此,在發光裝置10的製程中,不會發生反射層被裸露而被異常上鍍的問題,進而能提升發光裝置10的良率。It is worth mentioning that the protruding structure 191 of the electroplating layer 190 can reflect the light beam L emitted by the light emitting element 196 to the outside of the light emitting device 10 to improve the light extraction efficiency of the light emitting device 10 . In particular, the protruding structure 191 used to reflect the light beam L itself is formed by an electroplating process instead of being composed of a protruding object and a reflective layer covering the protruding object. Therefore, in the manufacturing process of the light emitting device 10, there will be no The problem that the reflective layer is exposed and abnormally plated occurs, thereby improving the yield of the light emitting device 10 .

在此必須說明的是,下述實施例沿用前述實施例的元件標號與部分內容,其中採用相同的標號來表示相同或近似的元件,並且省略了相同技術內容的說明。關於省略部分的說明可參考前述實施例,下述實施例不再重述。It must be noted here that the following embodiments use the component numbers and part of the content of the previous embodiments, wherein the same numbers are used to denote the same or similar components, and descriptions of the same technical content are omitted. For the description of omitted parts, reference may be made to the aforementioned embodiments, and the following embodiments will not be repeated.

圖2A至圖2G為本發明另一實施例之發光裝置10A的製造流程的剖面示意圖。圖2A至圖2G的發光裝置10A及其製造流程與圖1A至圖1H的發光裝置10及其製造流程類似,兩者主要的差異在於:在圖2A至圖2G的實施例中,不須形成圖1A至圖1H之實施例的第二絕緣層170。以下配合圖2A至圖2G說明本發明第二實施例之發光裝置10A的製造流程。2A to 2G are schematic cross-sectional views of the manufacturing process of a light emitting device 10A according to another embodiment of the present invention. The light-emitting device 10A of FIGS. 2A to 2G and its manufacturing process are similar to the light-emitting device 10 of FIGS. 1A to 1H and its manufacturing process. The second insulating layer 170 of the embodiment shown in FIGS. 1A to 1H . The manufacturing process of the light emitting device 10A according to the second embodiment of the present invention will be described below with reference to FIGS. 2A to 2G .

請參照圖2A,首先,於基底110上形成驅動線路DC及第一絕緣層150,其中驅動線路DC設置於基底110上,第一絕緣層150設置於驅動線路DC上且具有重疊於驅動線路DC的開口150a。接著,於基底110上形成導電圖案層162,其中導電圖案層162的第一部162a設置於第一絕緣層150的實體152上,且位於第一絕緣層150的開口150a外。Please refer to FIG. 2A , firstly, the driving circuit DC and the first insulating layer 150 are formed on the substrate 110, wherein the driving circuit DC is disposed on the substrate 110, and the first insulating layer 150 is disposed on the driving circuit DC and has a structure overlapping the driving circuit DC. The opening 150a. Next, a conductive pattern layer 162 is formed on the substrate 110 , wherein the first portion 162 a of the conductive pattern layer 162 is disposed on the entity 152 of the first insulating layer 150 and located outside the opening 150 a of the first insulating layer 150 .

請參照圖2B,接著,於導電圖案層162及第一絕緣層150上形成定義層180,其中定義層180具有暴露導電圖案層162之第一部162a的多個第一開口180a。Referring to FIG. 2B , next, a definition layer 180 is formed on the conductive pattern layer 162 and the first insulating layer 150 , wherein the definition layer 180 has a plurality of first openings 180a exposing the first portion 162a of the conductive pattern layer 162 .

請參照圖2C,接著,進行於一電鍍工序,以於定義層180的多個第一開口180a中形成電鍍層190的多個凸起結構191,其中多個凸起結構191電性連接至導電圖案層162的第一部162a。凸起結構191與導電圖案層162的第一部162a相隔一距離D。詳言之,在本實施例中,凸起結構191包括第一部191a及第二部191b,凸起結構191的第一部191a直接連接至導電圖案層162的第一部162a,凸起結構191的第二部191b直接連接至凸起結構191的第一部191a,凸起結構191之第二部191b的寬度W2大於凸起結構191之第一部191a的寬度W1,且凸起結構191的第二部191b與導電圖案層162的第一部162a相隔一距離D。Please refer to FIG. 2C, then, an electroplating process is performed to form a plurality of raised structures 191 of the electroplating layer 190 in a plurality of first openings 180a of the definition layer 180, wherein the plurality of raised structures 191 are electrically connected to the conductive The first part 162a of the pattern layer 162 . The protruding structure 191 is separated by a distance D from the first portion 162 a of the conductive pattern layer 162 . Specifically, in this embodiment, the protruding structure 191 includes a first portion 191a and a second portion 191b, the first portion 191a of the protruding structure 191 is directly connected to the first portion 162a of the conductive pattern layer 162, the protruding structure The second portion 191b of the protruding structure 191 is directly connected to the first portion 191a of the protruding structure 191, the width W2 of the second portion 191b of the protruding structure 191 is greater than the width W1 of the first portion 191a of the protruding structure 191, and the protruding structure 191 The second portion 191b of the conductive pattern layer 162 is separated by a distance D from the first portion 162a of the conductive pattern layer 162 .

請參照圖2C及圖2D,接著,移除定義層180,以露出導電圖案層162的第一部162a及重疊於第一絕緣層150之開口150a的部分驅動電路DC。在本實施例中,在移除定義層180之後,凸起結構191與導電圖案層162的第一部162a之間會存在間隙g。詳言之,在本實施例中,間隙g存在於凸起結構191的第二部191b與導電圖案層162的第一部162a之間。Referring to FIG. 2C and FIG. 2D , then, the definition layer 180 is removed to expose the first portion 162 a of the conductive pattern layer 162 and a portion of the driving circuit DC overlapping the opening 150 a of the first insulating layer 150 . In this embodiment, after the definition layer 180 is removed, there is a gap g between the protruding structure 191 and the first portion 162 a of the conductive pattern layer 162 . In detail, in this embodiment, the gap g exists between the second portion 191 b of the protruding structure 191 and the first portion 162 a of the conductive pattern layer 162 .

請參照圖2E,接著,形成保護層194,以覆蓋多個凸起結構191及導電圖案層162的第一部162a,其中保護層194具有一開口194a,重疊於第一絕緣層150的開口150a。在本實施例中,保護層194更填入間隙g。Please refer to FIG. 2E, and then, a protective layer 194 is formed to cover the plurality of raised structures 191 and the first portion 162a of the conductive pattern layer 162, wherein the protective layer 194 has an opening 194a overlapping the opening 150a of the first insulating layer 150 . In this embodiment, the protection layer 194 further fills the gap g.

請參照圖2F,接著,於保護層194的開口194a中形成一焊接材料195,其中焊接材料195透過第一絕緣層150的開口150a電性連接至驅動電路DC。舉例而言,在本實施例中,焊接材料195可包括鎳金膜(包括鎳/或鎳合金與金/或金合金)、鎳鈀金膜(包括鎳/或鎳合金、鈀/或鈀合金與金/或金合金)、鎳鈀銀金膜(包括鎳/或鎳合金、鈀/或鈀合金、銀/或銀合金與金/或金合金),但本發明不以此為限。Referring to FIG. 2F , next, a soldering material 195 is formed in the opening 194 a of the protection layer 194 , wherein the soldering material 195 is electrically connected to the driving circuit DC through the opening 150 a of the first insulating layer 150 . For example, in this embodiment, the solder material 195 may include nickel-gold film (including nickel/or nickel alloy and gold/or gold alloy), nickel-palladium-gold film (including nickel/or nickel alloy, palladium/or palladium alloy and gold/or gold alloy), nickel-palladium-silver-gold film (including nickel/or nickel alloy, palladium/or palladium alloy, silver/or silver alloy and gold/or gold alloy), but the present invention is not limited thereto.

請參照圖2G,接著,轉置發光元件196於基底110上,且使發光元件196與焊接材料195電性連接。在本實施例中,發光元件196透過焊接材料195電性連接至驅動線路DC。於此,便完成本實施例的發光裝置10A。Referring to FIG. 2G , then, the light-emitting element 196 is transposed on the substrate 110 , and the light-emitting element 196 is electrically connected to the solder material 195 . In this embodiment, the light emitting element 196 is electrically connected to the driving circuit DC through the solder material 195 . Here, the light emitting device 10A of this embodiment is completed.

10、10A:發光裝置 110:基底 120:第一金屬層 130:絕緣層 130a、150a、194a:開口 140:第二金屬層 150:第一絕緣層 152:實體 160:導電材料層 162:導電圖案層 162a:第一部 162b:第二部 170:第二絕緣層 170a、180a:第一開口 180:定義層 180b:第二開口 190:電鍍層 191:凸起結構 191a:第一部 191b:第二部 191s:凸面 191p:頂點 192:連接部 194:保護層 194s:頂面 195:焊接材料 196:發光元件 D、D191、D194:距離 DC:驅動線路 g:間隙 L:光束 W1、W2:寬度 10, 10A: light emitting device 110: base 120: the first metal layer 130: insulating layer 130a, 150a, 194a: openings 140: second metal layer 150: the first insulating layer 152: entity 160: conductive material layer 162: conductive pattern layer 162a: Part 1 162b: Part Two 170: second insulating layer 170a, 180a: first opening 180: Define layers 180b: second opening 190: Plating layer 191: Raised structure 191a: Part 1 191b: Part Two 191s: Convex 191p: apex 192: connection part 194: protective layer 194s: top surface 195: welding material 196: Light emitting element D, D191, D194: distance DC: drive line g: gap L: light beam W1, W2: Width

圖1A至圖1H為本發明一實施例之發光裝置10的製造流程的剖面示意圖。 圖2A至圖2G為本發明另一實施例之發光裝置10A的製造流程的剖面示意圖。 1A to 1H are schematic cross-sectional views of the manufacturing process of a light emitting device 10 according to an embodiment of the present invention. 2A to 2G are schematic cross-sectional views of the manufacturing process of a light emitting device 10A according to another embodiment of the present invention.

10:發光裝置 10: Lighting device

110:基底 110: base

120:第一金屬層 120: the first metal layer

130:絕緣層 130: insulating layer

130a、150a、194a:開口 130a, 150a, 194a: openings

140:第二金屬層 140: second metal layer

150:第一絕緣層 150: the first insulating layer

152:實體 152: entity

162:導電圖案層 162: conductive pattern layer

162a:第一部 162a: Part 1

162b:第二部 162b: Part Two

170:第二絕緣層 170: second insulating layer

170a:第一開口 170a: first opening

190:電鍍層 190: Plating layer

191:凸起結構 191: Raised structure

191a:第一部 191a: Part 1

191b:第二部 191b: Part Two

191s:凸面 191s: Convex

191p:頂點 191p: apex

192:連接部 192: connection part

194:保護層 194: protective layer

194s:頂面 194s: top surface

196:發光元件 196: Light emitting element

D、D191、D194:距離 D, D191, D194: distance

DC:驅動線路 DC: drive line

L:光束 L: light beam

W1、W2:寬度 W1, W2: Width

z:方向 z: direction

Claims (12)

一種發光裝置,包括: 一基底; 一驅動線路,設置於該基底上; 一第一絕緣層,設置於該驅動線路上,且具有重疊於該驅動線路的一開口; 一導電圖案層,具有一第一部,其中該導電圖案層的該第一部設置於該第一絕緣層的一實體上,且位於該第一絕緣層的該開口外; 一電鍍層,具有至少一凸起結構,其中該至少一凸起結構設置於該導電圖案層的該第一部上,且與該導電圖案層的該第一部電性連接; 一保護層,設置於該第一絕緣層上,且覆蓋該至少一凸起結構及該導電圖案層的該第一部;以及 一發光元件,電性連接至該驅動線路。 A lighting device comprising: a base; a driving circuit arranged on the substrate; A first insulating layer is disposed on the driving circuit and has an opening overlapping the driving circuit; A conductive pattern layer having a first portion, wherein the first portion of the conductive pattern layer is disposed on a body of the first insulating layer and is located outside the opening of the first insulating layer; An electroplating layer having at least one raised structure, wherein the at least one raised structure is disposed on the first portion of the conductive pattern layer and is electrically connected to the first portion of the conductive pattern layer; a protective layer disposed on the first insulating layer and covering the at least one raised structure and the first portion of the conductive pattern layer; and A light emitting element is electrically connected to the driving circuit. 如請求項1所述的發光裝置,其中該至少一凸起結構與該導電圖案層的該第一部相隔一距離。The light-emitting device as claimed in claim 1, wherein the at least one protruding structure is separated from the first portion of the conductive pattern layer by a distance. 如請求項2所述的發光裝置,其中該至少一凸起結構包括一第一部及一第二部,該至少一凸起結構的該第一部直接連接至該導電圖案層的該第一部,該至少一凸起結構的該第二部直接連接至該至少一凸起結構的該第一部,該至少一凸起結構之該第二部的一寬度大於該至少一凸起結構之該第一部的一寬度,且該至少一凸起結構的該第二部與該導電圖案層的該第一部之間相隔該距離。The light-emitting device according to claim 2, wherein the at least one raised structure includes a first portion and a second portion, and the first portion of the at least one raised structure is directly connected to the first portion of the conductive pattern layer. portion, the second portion of the at least one protruding structure is directly connected to the first portion of the at least one protruding structure, a width of the second portion of the at least one protruding structure is greater than that of the at least one protruding structure A width of the first portion, and the distance between the second portion of the at least one protruding structure and the first portion of the conductive pattern layer. 如請求項1所述的發光裝置,其中該至少一凸起結構具有朝遠離該基底之一方向凸起的一凸面。The light-emitting device as claimed in claim 1, wherein the at least one protruding structure has a convex surface protruding toward a direction away from the base. 如請求項4所述的發光裝置,其中該至少一凸起結構包括一第一部及一第二部,該至少一凸起結構的該第一部直接連接至該導電圖案層的該第一部,該至少一凸起結構的該第二部直接連接至該至少一凸起結構的該第一部,該至少一凸起結構之該第二部的一寬度大於該至少一凸起結構之該第一部的一寬度,且該至少一凸起結構的該第二部具有該凸面。The light-emitting device according to claim 4, wherein the at least one raised structure includes a first portion and a second portion, and the first portion of the at least one raised structure is directly connected to the first portion of the conductive pattern layer. portion, the second portion of the at least one protruding structure is directly connected to the first portion of the at least one protruding structure, a width of the second portion of the at least one protruding structure is greater than that of the at least one protruding structure The first portion has a width, and the second portion of the at least one protruding structure has the convex surface. 如請求項1所述的發光裝置,其中該導電圖案層更具有一第二部,該導電圖案層的該第一部與該導電圖案層的該第二部分離,該導電圖案層的該第二部透過該第一絕緣層的該開口電性連接至該驅動電路,且該發光元件電性連接至該導電圖案層的該第二部。The light-emitting device according to claim 1, wherein the conductive pattern layer further has a second portion, the first portion of the conductive pattern layer is separated from the second portion of the conductive pattern layer, and the first portion of the conductive pattern layer The second part is electrically connected to the driving circuit through the opening of the first insulating layer, and the light emitting element is electrically connected to the second part of the conductive pattern layer. 如請求項6所述的發光裝置,更包括: 一第二絕緣層,設置於該導電圖案層的該第一部上,其中該第二絕緣層具有至少一第一開口,且該電鍍層之該至少一凸起結構填入該第二絕緣層的該至少一第一開口,以電性連接至該導電圖案層的該第一部。 The lighting device as described in Claim 6, further comprising: A second insulating layer disposed on the first portion of the conductive pattern layer, wherein the second insulating layer has at least one first opening, and the at least one raised structure of the electroplating layer is filled into the second insulating layer The at least one first opening is electrically connected to the first portion of the conductive pattern layer. 如請求項6所述的發光裝置,其中該電鍍層更具有一連接部,該電鍍層的該連接部與該電鍍層的該至少一凸起結構分離,該電鍍層的該連接部電性連接至該導電圖案層的該第二部,且該發光元件電性連接至該電鍍層的該連接部。The light-emitting device as claimed in item 6, wherein the electroplating layer further has a connecting portion, the connecting portion of the electroplating layer is separated from the at least one protrusion structure of the electroplating layer, and the connecting portion of the electroplating layer is electrically connected to the second portion of the conductive pattern layer, and the light emitting element is electrically connected to the connection portion of the electroplating layer. 如請求項1所述的發光裝置,其中該至少一凸起結構與該導電圖案層的該第一部之間存在一間隙,且該保護層填入該間隙。The light emitting device as claimed in claim 1, wherein there is a gap between the at least one protruding structure and the first portion of the conductive pattern layer, and the protection layer fills the gap. 如請求項1所述的發光裝置,其中該保護層之一頂面與該基底的一距離大於該至少一凸起結構的一頂點與該基底的一距離。The light-emitting device as claimed in claim 1, wherein a distance between a top surface of the protective layer and the base is greater than a distance between a vertex of the at least one protruding structure and the base. 一種發光裝置的製造方法,包括: 於一基底上形成一驅動線路及一第一絕緣層,其中該驅動線路設置於該基底上,該第一絕緣層設置於該驅動線路上且具有重疊於該驅動線路的一開口; 於該第一絕緣層上形成一導電材料層,其中該導電材料層透過該第一絕緣層的該開口電性連接至該驅動電路; 於該導電材料層上形成一第二絕緣層,其中該第二絕緣層具有暴露該導電材料層的至少一第一開口,且該第二絕緣層的該至少一第一開口位於該第一絕緣層的該開口外; 於該導電材料層及該第二絕緣層上形成一定義層,其中該定義層具有至少一第一開口及一第二開口,且該定義層的至少一第一開口重疊於該第二絕緣層的該至少一第一開口; 進行於一電鍍工序,以於該定義層的該至少一第一開口及該第二絕緣層的該至少一第一開口中形成一電鍍層的至少一凸起結構,且於該定義層的該第二開口中形成該電鍍層的一連接部; 在形成該電鍍層的該至少一凸起結構及該連接部之後,移除該定義層; 以該電鍍層的該至少一凸起結構、該第二絕緣層及該電鍍層的該連接部為遮罩,圖案化該導電材料層,以形成一導電圖案層,其中該導電圖案層具有一第一部及一第二部,該導電圖案層的該第一部設置於該第一絕緣層的一實體上且位於該第一絕緣層的該開口外,該電鍍層的該至少一凸起結構設置於該導電圖案層的該第一部上且與該導電圖案層的該第一部電性連接,該電鍍層的該連接部設置於該導電圖案層的該第二部上且與該導電圖案層的該第二部電性連接,該導電圖案層的該第二部透過該第一絕緣層的該開口電性連接至該驅動電路,且該導電圖案層的該第一部及該第二部彼此分離; 形成一保護層,以覆蓋該至少一凸起結構、該第二絕緣層及該導電圖案層的該第一部,其中該保護層具有一開口,暴露該電鍍層的該連接部;以及 轉置一發光元件於該基底上,且使該發光元件與該電鍍層的該連接部電性連接。 A method of manufacturing a light emitting device, comprising: forming a driving circuit and a first insulating layer on a substrate, wherein the driving circuit is arranged on the substrate, and the first insulating layer is arranged on the driving circuit and has an opening overlapping the driving circuit; forming a conductive material layer on the first insulating layer, wherein the conductive material layer is electrically connected to the driving circuit through the opening of the first insulating layer; A second insulating layer is formed on the conductive material layer, wherein the second insulating layer has at least one first opening exposing the conductive material layer, and the at least one first opening of the second insulating layer is located on the first insulating layer. outside the opening of the layer; A defined layer is formed on the conductive material layer and the second insulating layer, wherein the defined layer has at least one first opening and a second opening, and at least one first opening of the defined layer overlaps the second insulating layer the at least one first opening of; performing an electroplating process to form at least one raised structure of an electroplating layer in the at least one first opening of the definition layer and the at least one first opening of the second insulating layer, and in the at least one first opening of the definition layer forming a connection portion of the electroplating layer in the second opening; removing the definition layer after forming the at least one raised structure and the connecting portion of the electroplating layer; Using the at least one protrusion structure of the electroplating layer, the second insulating layer, and the connecting portion of the electroplating layer as a mask, patterning the conductive material layer to form a conductive pattern layer, wherein the conductive pattern layer has a A first part and a second part, the first part of the conductive pattern layer is disposed on a solid body of the first insulating layer and is located outside the opening of the first insulating layer, the at least one protrusion of the electroplating layer The structure is disposed on the first portion of the conductive pattern layer and is electrically connected to the first portion of the conductive pattern layer, and the connection portion of the electroplating layer is disposed on the second portion of the conductive pattern layer and is connected to the first portion of the conductive pattern layer. The second part of the conductive pattern layer is electrically connected, the second part of the conductive pattern layer is electrically connected to the driving circuit through the opening of the first insulating layer, and the first part of the conductive pattern layer and the The second part is separated from each other; forming a protection layer to cover the at least one protrusion structure, the second insulating layer and the first portion of the conductive pattern layer, wherein the protection layer has an opening exposing the connection portion of the electroplating layer; and A light emitting element is transposed on the base, and the light emitting element is electrically connected with the connection portion of the electroplating layer. 一種發光裝置的製造方法,包括: 於一基底上形成一驅動線路及一第一絕緣層,其中該驅動線路設置於該基底上,該第一絕緣層設置於該驅動線路上且具有重疊於該驅動線路的一開口; 於該基底上形成一導電圖案層,其中該導電圖案層的一第一部設置於該第一絕緣層的一實體上,且位於該第一絕緣層的該開口外; 於該導電圖案層及該第一絕緣層上形成一定義層,其中該定義層具有暴露該導電圖案層之該第一部的多個第一開口; 進行於一電鍍工序,以於該定義層的該些第一開口中形成一電鍍層的多個凸起結構,其中該些凸起結構電性連接至該導電圖案層的該第一部; 在形成該電鍍層的該些凸起結構之後,移除該定義層; 形成一保護層,以覆蓋該些凸起結構及該導電圖案層的該第一部,其中該保護層具有一開口,重疊於該第一絕緣層的該開口; 於該保護層的該開口中形成一焊接材料,其中該焊接材料透過該第一絕緣層的該開口電性連接至該驅動電路;以及 轉置一發光元件於該基底上,且使該發光元件與該焊接材料電性連接。 A method of manufacturing a light emitting device, comprising: forming a driving circuit and a first insulating layer on a substrate, wherein the driving circuit is arranged on the substrate, and the first insulating layer is arranged on the driving circuit and has an opening overlapping the driving circuit; forming a conductive pattern layer on the base, wherein a first portion of the conductive pattern layer is disposed on a body of the first insulating layer and is located outside the opening of the first insulating layer; forming a definition layer on the conductive pattern layer and the first insulating layer, wherein the definition layer has a plurality of first openings exposing the first portion of the conductive pattern layer; performing an electroplating process to form a plurality of raised structures of an electroplating layer in the first openings of the definition layer, wherein the raised structures are electrically connected to the first portion of the conductive pattern layer; After forming the raised structures of the electroplating layer, removing the definition layer; forming a protective layer to cover the raised structures and the first portion of the conductive pattern layer, wherein the protective layer has an opening overlapping the opening of the first insulating layer; forming a soldering material in the opening of the protective layer, wherein the soldering material is electrically connected to the driving circuit through the opening of the first insulating layer; and A light-emitting element is transposed on the base, and the light-emitting element is electrically connected with the welding material.
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