TWI768029B - Manufacturing method of printed circuit board - Google Patents
Manufacturing method of printed circuit board Download PDFInfo
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- TWI768029B TWI768029B TW107113103A TW107113103A TWI768029B TW I768029 B TWI768029 B TW I768029B TW 107113103 A TW107113103 A TW 107113103A TW 107113103 A TW107113103 A TW 107113103A TW I768029 B TWI768029 B TW I768029B
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/022—Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
- H05K3/025—Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates by transfer of thin metal foil formed on a temporary carrier, e.g. peel-apart copper
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/02—Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
- H05K2203/0264—Peeling insulating layer, e.g. foil, or separating mask
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- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
Abstract
本發明涉及一種印刷電路板的製造方法,本發明的印刷電路板的製造方法的特徵在於,包括:剝離層形成步驟,在基板上由第一導電物質來形成剝離層;電路圖案形成步驟,在所述剝離層上由第二導電物質來形成電路圖案;樹脂層形成步驟,在形成有所述電路圖案的剝離層上形成絕緣樹脂層;基板剝離步驟,從所述剝離層中剝離去除所述基板;及剝離層去除步驟,去除所述剝離層。The present invention relates to a method for manufacturing a printed circuit board. The method for manufacturing a printed circuit board of the present invention is characterized by comprising: a step of forming a peeling layer, wherein the peeling layer is formed on a substrate by a first conductive substance; and a step of forming a circuit pattern, in A circuit pattern is formed on the peeling layer by a second conductive substance; the resin layer forming step is to form an insulating resin layer on the peeling layer on which the circuit pattern is formed; the substrate peeling step is to peel off the peeling layer and remove the a substrate; and a peeling layer removing step of removing the peeling layer.
Description
本發明涉及一種印刷電路板的製造方法,更為詳細地,涉及一種能夠防止在去除剝離層的過程中損傷電路圖案的印刷電路板的製造方法。The present invention relates to a method for manufacturing a printed circuit board, and more particularly, to a method for manufacturing a printed circuit board capable of preventing damage to a circuit pattern in the process of removing the peeling layer.
一般來講,與將銅箔電路凸出形成在絕緣層表面相比,將銅箔電路填埋在絕緣層內時更能減小銅箔的寬度和間距,因此在實現微電路圖案時使用電路埋入基板(Embedded Trace Substrate;下稱「ETS」)方法。Generally speaking, compared with forming the copper foil circuit protruding on the surface of the insulating layer, when the copper foil circuit is buried in the insulating layer, the width and spacing of the copper foil can be reduced, so the circuit is used when realizing the microcircuit pattern. Embedded Trace Substrate (hereinafter referred to as "ETS") method.
圖式中,圖1為表示使用習知ETS方法的印刷電路板的製造方法。In the drawings, FIG. 1 shows a manufacturing method of a printed circuit board using a conventional ETS method.
圖1的(a)表示可拆卸芯體(detachable core),可拆卸芯體100包括起到支撐體作用的芯體100a;接合在芯體100a上部的載體銅箔100b;及接合在載體銅箔100b上部的基板銅箔100c,所述基板銅箔100c通過粘合劑臨時粘合在載體銅箔100b上,當施加輕微的物理力時可從載體銅箔100b分離。在此,所述芯體100a和載體銅箔100b可使用銅箔層壓板(Copper Clad Laminate,CCL)。(a) of FIG. 1 shows a detachable core. The
如圖1的(b)所示,在可拆卸芯體100的基板銅箔100c上形成由電路圖案110、150和絕緣層130、160構成的疊加層,從而在疊加層的兩面上分別製造印刷電路板,該印刷電路板的電路圖案110、150填埋於絕緣層130、160內。As shown in FIG. 1( b ), a superimposed layer composed of
接下來,如圖1的(c)所示,當從載體銅箔100b中剝去基板銅箔100c,從而從疊加層分離可拆卸芯體100時,通過一次製程即能獲得上下兩個電路板。Next, as shown in (c) of FIG. 1 , when the
此外,如圖1的(d)所示,當通過蝕刻去除基板銅箔100c時,會形成填埋於絕緣層130形式的電路板,並且在去除基板銅箔100c之後的表面上暴露電路圖案110。Furthermore, as shown in (d) of FIG. 1 , when the
然而,為了容易地從載體銅箔100b中剝離基板銅箔100c,所述可拆卸芯體100需要塗覆粘合劑的製程、在粘合劑上層疊載體銅箔的製程及複膜(laminating)製程,因此會提升製造成本。However, in order to easily peel the
此外,附著在疊加層上的基板銅箔100c由與電路圖案110相同的銅材質來構成,在通過如蝕刻的化學方法去除所述基板銅箔100c的過程中,存在電路圖案110被暴露於蝕刻液中的問題。In addition, the
在如上所述的習知技術的情況下,在蝕刻基板銅箔100c的過程中不可避免地將電路圖案一起蝕刻,結果會構成電路圖案比絕緣層的表面稍微凹陷的凹陷(recess)形狀。即,產生凹陷深度缺陷(recess depth)。In the case of the conventional technique as described above, the circuit pattern is inevitably etched together in the process of etching the
尤其,當根據習知技術應用ETS方法來製作半導體晶片的互連襯墊時,襯墊會以絕緣層表面為基準向內側凹陷,這在電子零部件的封裝製程中接合半導體晶粒(die)和BOL(Bump on Lead)的過程中會產生不能焊接的潤濕性不良(non-wet issue),因此會降低製程收率。In particular, when the ETS method is applied to fabricate the interconnection pads of the semiconductor wafer according to the prior art, the pads are recessed inward with respect to the surface of the insulating layer, which is used to bond the semiconductor die in the packaging process of electronic components. In the process of BOL (Bump on Lead), there will be a non-wet issue that cannot be soldered, which will reduce the process yield.
因此,本發明係為了解決所述的習知問題而提出者,其目的是提供一種印刷電路板的製造方法,該印刷電路板的製造方法能夠防止在去除剝離層的過程中損傷電路圖案。Therefore, the present invention has been made in order to solve the above-mentioned conventional problems, and an object thereof is to provide a method for manufacturing a printed circuit board, which can prevent damage to a circuit pattern in the process of removing the peeling layer.
所述目的通過本發明的印刷電路板的製造方法來實現,所述印刷電路板的製造方法的特徵在於,包括:剝離層形成步驟,在基板上由第一導電物質來形成剝離層;電路圖案形成步驟,在所述剝離層上由第二導電物質來形成電路圖案;樹脂層形成步驟,在形成有所述電路圖案的剝離層上形成絕緣樹脂層;基板剝離步驟,從所述剝離層中剝離去除所述基板;及剝離層去除步驟,去除所述剝離層。The object is achieved by the method for manufacturing a printed circuit board of the present invention, which is characterized by comprising: a step of forming a peeling layer, wherein the peeling layer is formed on the substrate by a first conductive substance; a circuit pattern In the forming step, a circuit pattern is formed on the peeling layer by using the second conductive substance; the resin layer forming step, an insulating resin layer is formed on the peeling layer on which the circuit pattern is formed; the substrate peeling step is from the peeling layer peeling and removing the substrate; and removing the peeling layer, removing the peeling layer.
在此,優選地,用於從所述剝離層中剝離所述基板的剝離強度設定為10gf/cm至100gf/cm。Here, preferably, the peel strength for peeling the substrate from the peeling layer is set to 10 gf/cm to 100 gf/cm.
此外,優選地,所述剝離層和電路圖案由彼此不同材質的導電物質來形成。Furthermore, preferably, the peeling layer and the circuit pattern are formed of conductive substances of different materials from each other.
此外,優選地,在所述剝離層去除步驟中採用只能溶解所述剝離層的蝕刻液組合物來去除剝離層。In addition, preferably, in the step of removing the peeling layer, an etching solution composition that can only dissolve the peeling layer is used to remove the peeling layer.
此外,優選地,所述剝離層由銀(Ag)來形成,所述電路圖案由銅(Cu)來形成。Furthermore, preferably, the peeling layer is formed of silver (Ag), and the circuit pattern is formed of copper (Cu).
此外,優選地,所述基板由在樹脂層的至少一面上層壓有銅箔的銅箔層壓薄膜(Copper Clad Laminate)來構成。Moreover, it is preferable that the said board|substrate is comprised by the copper foil laminated film (Copper Clad Laminate) which laminated|stacked copper foil on at least one surface of a resin layer.
此外,優選地,在所述剝離層形成步驟中,在所述銅箔層壓薄膜的銅箔上塗覆銀(Ag)來形成剝離層。Furthermore, preferably, in the peeling layer forming step, silver (Ag) is coated on the copper foil of the copper foil-laminated film to form the peeling layer.
根據本發明提供一種能夠防止在去除剝離層的過程中損傷電路圖案的印刷電路板的製造方法。According to the present invention, there is provided a method of manufacturing a printed circuit board capable of preventing damage to a circuit pattern during removal of a peeling layer.
在對本發明進行說明之前需要說明的是,在多個實施例中,對於具有相同結構的構件使用相同的符號,並在第一實施例中進行代表性的說明,在其他實施例中針對與第一實施例不同的結構進行說明。Before describing the present invention, it should be noted that, in multiple embodiments, the same symbols are used for components having the same structure, and a representative description is given in the first embodiment, and in other embodiments, the same symbols are used for components with the same structure. A different structure of an embodiment will be described.
下面,參考圖式對本發明的第一實施例的印刷電路板的製造方法進行詳細說明。Hereinafter, the manufacturing method of the printed circuit board according to the first embodiment of the present invention will be described in detail with reference to the drawings.
在圖式中,圖2為表示根據本發明的第一實施例的印刷電路板的製造方法的順序圖,圖3為表示根據本發明的第一實施例的印刷電路板的製造方法的按製程步驟的剖視圖。In the drawings, FIG. 2 is a sequence diagram showing a method of manufacturing a printed circuit board according to a first embodiment of the present invention, and FIG. 3 is a process-by-process diagram showing a method of manufacturing a printed circuit board according to the first embodiment of the present invention. Cutaway view of steps.
如所述圖所示的本發明的第一實施例的印刷電路板的製造方法包括剝離層形成步驟(S10)、電路圖案形成步驟(S20)、樹脂層形成步驟(S30)、基板剝離步驟(S40)及剝離層去除步驟(S50)。The manufacturing method of the printed circuit board according to the first embodiment of the present invention as shown in the figure includes a peeling layer forming step ( S10 ), a circuit pattern forming step ( S20 ), a resin layer forming step ( S30 ), and a substrate peeling step ( S40) and the peeling layer removal step (S50).
在所述剝離層形成步驟(S10)中,如圖3的(a)所示,在基板10的一面上塗覆銀(Ag)材質的第一導電物質而形成剝離層20。所述剝離層20可通過凹版印刷(gravure printing)、絲網印刷(screen printing)、狹縫式模頭擠出塗布(slot die coating)、旋塗(spincoating)、浸塗(dip coating)或噴塗(spray coating)等來形成。In the peeling layer forming step ( S10 ), as shown in FIG. 3( a ), a first conductive substance made of silver (Ag) is coated on one surface of the
另外,在本實施例中,以第一導電物質由銀(Ag)材質來構成為例進行說明,但可由如鐵、銅、鋁、鎳、鉛、鋅、錫、金及鈦等導電率優異的金屬中的任一種來構成。In addition, in this embodiment, the first conductive material is made of silver (Ag) as an example, but it can be made of iron, copper, aluminum, nickel, lead, zinc, tin, gold, titanium, etc. with excellent conductivity. of any metal.
在所述電路圖案形成步驟(S20)中,如圖3的(b)所示,在所述剝離層20上形成由與所述第一導電物質不同的銅(Cu)材質構成的第二導電物質來形成電路圖案30。在此,所述電路圖案30可通過多種方式的減法(subtractive process)或者加法(additive process)來形成。In the circuit pattern forming step ( S20 ), as shown in FIG. 3( b ), a second conductive material made of copper (Cu) material different from the first conductive material is formed on the
在本實施例中,以所述第二導電物質由銅(Cu)來構成為例進行說明,但並不局限於此,所述第二導電物質可由如銀、鐵、鋁、鎳、鉛、鋅、錫、金及鈦等的導電性優異的金屬中,在溶解第一導電物質的過程中能夠不被溶解的材質來構成。In this embodiment, the second conductive material is made of copper (Cu) as an example for description, but it is not limited to this. The second conductive material can be made of silver, iron, aluminum, nickel, lead, Among metals having excellent electrical conductivity such as zinc, tin, gold, and titanium, it is made of a material that cannot be dissolved in the process of dissolving the first conductive substance.
在所述樹脂層形成步驟(S30)中,如圖3的(c)所示,可在形成有所述電路圖案30的剝離層20上形成樹脂層40,而且使所述樹脂層40包覆形成在剝離層20上的電路圖案30。作為所述樹脂層40可使用如環氧(Epoxy)、聚氨酯(Urethane)及酯樹脂(Ester resin)的聚合物(Polymer)或光固化樹脂(UV curable resin)或增強了纖維質(fiber)的預浸料(PREPREG;Preimpregnated Materials)等。作為一例,在所述樹脂層形成步驟(S30)中,可在形成有所述電路圖案30的剝離層20上塗覆未固化狀態的預浸料樹脂,並且施加壓力而接合後,進行加熱來形成固化的樹脂層40,此外也可通過提供熱量和壓力的熱壓製程來同時實現接合與固化。In the resin layer forming step ( S30 ), as shown in FIG. 3( c ), the
另外,當透明顯示器上應用印刷電路板時,優選使用固化後透射度高的樹脂來形成樹脂層40。In addition, when a printed circuit board is applied to a transparent display, the
在本實施例中為了說明上的方便,以形成單層結構的電路圖案30為例進行說明,但根據需要也可通過反復進行所述電路圖案形成步驟(S20)和樹脂層形成步驟(S30)來形成多層結構的電路圖案30。In this embodiment, for the convenience of description, the
在所述基板剝離步驟(S40)中,從所述剝離層20中剝離去除所述基板10。此時,用於從所述剝離層20中剝離所述基板10的剝離強度優選設定為10gf/㎝至100gf/㎝。In the substrate peeling step ( S40 ), the
具體地,如圖3的(d)所示,所述基板剝離步驟(S40)用於從剝離層20中分離基板10,用於從所述剝離層20中剝離所述基板10的剝離強度應設定為能夠利用人手來容易剝離基板10的程度。Specifically, as shown in (d) of FIG. 3 , the substrate peeling step ( S40 ) is for separating the
在本實施例中,應在基板剝離步驟(S40)中能夠易於從剝離層20中剝離,因此雖然所述剝離強度過高會成為問題,但所述剝離強度應該保持在電路圖案形成步驟(S20)或樹脂層形成步驟(S30)中不被任意剝離的程度。In the present embodiment, it should be possible to easily peel from the
從這種角度來看,所述剝離強度優選為10gf/cm至100gf/cm,更加優選為20gf/cm至40gf/cm。當用於從所述剝離層20中剝離所述基板10的剝離強度小於10gf/cm時,在搬送或加工時基板可能會任意被剝離,當剝離強度超過100gf/cm時,在基板剝離步驟(S40)中,基板10可能會不易被剝離。From this viewpoint, the peel strength is preferably 10 gf/cm to 100 gf/cm, more preferably 20 gf/cm to 40 gf/cm. When the peeling strength for peeling the
另外,所述剝離強度根據在JIS C6481中規定的90度剝離強度檢測方法來進行檢測。In addition, the said peeling strength was detected according to the 90 degree peeling strength detection method prescribed|regulated by JIS C6481.
通過所述基板剝離步驟(S40)從剝離層20中剝離基板10後,通過剝離層去除步驟(S50)去除剝離層20。After the
具體地,在所述剝離層去除步驟(S50)中,如圖3的(e)所示,採用只能溶解由銀(Ag)材質第一導電物質構成的剝離層20的蝕刻液組合物來對剝離層20進行溶解並去除。尤其,對剝離層20進行溶解的過程中,不會溶解暴露於蝕刻液組合物中的銅(Cu)材質第二導電物質,因此能夠防止在剝離層20去除過程中電路圖案30受損。Specifically, in the peeling layer removing step ( S50 ), as shown in (e) of FIG. 3 , an etchant composition that can only dissolve the
如此,將剝離層20和電路圖案30由彼此不同的材質來構成,當只溶解並去除剝離層20時,能夠防止電路圖案30的凹陷深度(recess depth)的不良。此外,由於電路圖案30的暴露表面與樹脂層40的表面構成同一面,因此能夠防止在接合半導體晶粒和BOL(Bump on Lead)的過程中不能焊接的潤濕性不良(non-wet issue)。In this way, the
接下來,對本發明的第二實施例的印刷電路板的製造方法進行說明。Next, the manufacturing method of the printed wiring board of the 2nd Example of this invention is demonstrated.
在圖式中,圖4為表示根據本發明的第二實施例的印刷電路板的製造方法的按製程步驟的剖視圖。In the drawings, FIG. 4 is a cross-sectional view by process steps showing a manufacturing method of a printed circuit board according to a second embodiment of the present invention.
如所述圖式中所示,在本發明的第二實施例的印刷電路板的製造方法中,以基板10由在絕緣層10a的兩面上層壓有銅箔10b的銅箔層壓薄膜(Copper Clad Laminate)來構成,且通過剝離層形成步驟(S10)、電路圖案形成步驟(S20)、樹脂層形成步驟(S30)、基板剝離步驟(S40)及剝離層去除步驟(S50)在所述基板10的兩面上分別形成電路基板為例進行說明。As shown in the drawings, in the method for manufacturing a printed circuit board according to the second embodiment of the present invention, the
在所述剝離層形成步驟(S10)中,如圖4的(a)所示,在設置於絕緣層10a兩面上的銅箔10b上塗覆銀(Ag)材質的第一導電物質而形成剝離層20。與第一實施例同樣地,這種剝離層20可通過多種塗覆方法來形成。此外,所述第一導電物質除了銀(Ag)之外還可由如鐵、銅、鋁、鎳、鉛、鋅、錫、金及鈦等導電率優異的金屬中的一種來構成。In the peeling layer forming step ( S10 ), as shown in FIG. 4( a ), a first conductive substance made of silver (Ag) is coated on the copper foils 10 b provided on both sides of the insulating
在所述電路圖案形成步驟(S20)中,在所述剝離層20上由與所述第一導電物質不同的銅(Cu)材質第二導電物質來形成電路圖案30。在本實施例中,以所述第二導電物質由銅(Cu)來構成為例進行說明,但並不局限於此,所述第二導電物質可由如銀、鐵、鋁、鎳、鉛、鋅、錫、金及鈦等導電率優異的金屬中與第一導電物質不同的材質來構成。In the circuit pattern forming step ( S20 ), a
在所述電路圖案形成步驟(S20)中,可通過多種方式的減法(subtractive process)或加法(additive process)來形成電路圖案30。作為一例,所述電路圖案形成步驟(S20)為了通過SAP(Semi Additive Process)方式來形成電路圖案30,可包括感光層形成步驟(S21)、曝光及顯影步驟(S22)、鍍金步驟(S23)及感光層去除步驟(S24)。在所述感光層形成步驟(S21)中,如圖4的(b)所示,在所述剝離層20上塗覆感光物質來形成感光層31,在所述曝光及顯影步驟(S22)中,如圖4的(c)所示,在感光層31上形成選擇性地暴露剝離層20的圖案槽32。因此,根據所要形成電路的圖案,剝離層20通過感光層31的圖案槽32選擇性地被暴露。在所述鍍金步驟(S23)中,如圖4的(d)所示,在圖案槽32的內部鍍覆第二導電物質來形成電路圖案30。此時,優選第二導電物質由導電度很高的銅來設置。在鍍金過程中,通過圖案槽32暴露的剝離層20起到電極作用,因此能夠將第二導電物質填充在圖案槽32中。在所述感光層去除步驟(S24)中,如圖4的(e)所示,可通過去除除了填充在圖案槽32的第二導電物質之外的感光層31來形成電路圖案30。In the circuit pattern forming step ( S20 ), the
在所述樹脂層形成步驟(S30)中,如圖4的(f)所示,可通過在形成有所述電路圖案30的剝離層20上形成樹脂層40來使所述樹脂層40包覆形成在剝離層20上的電路圖案30。作為所述樹脂層40可使用樹脂(resin)、環氧樹脂或增強了纖維質(fiber)的預浸料(Preimpregnated Materials,PREPREG)等。具體地,在所述樹脂層形成步驟(S30)中,可在形成有所述電路圖案30的剝離層20上塗覆未固化狀態的預浸料樹脂,並且施加壓力而進行接合後,進行加熱來形成固化的樹脂層40,此外也可通過提供熱量和壓力的熱壓製程來同時實現接合與固化。In the resin layer forming step ( S30 ), as shown in FIG. 4( f ), the
在本實施例中為了說明上的方便,以形成單層結構的電路圖案30為例進行說明,但根據需要也可通過反復進行所述電路圖案形成步驟(S20)和樹脂層形成步驟(S30)來形成多層結構的電路圖案30。In this embodiment, for the convenience of description, the
在所述基板剝離步驟(S40)中,如圖4的(g)所示,從所述剝離層20中剝離去除所述基板10。此時,優選地,用於從所述剝離層20中剝離所述基板10的剝離強度設定為10gf/cm至100gf/cm。In the substrate peeling step ( S40 ), as shown in FIG. 4( g ), the
具體地,所述基板剝離步驟(S40)為用於從剝離層20中分離基板10的步驟,用於從所述剝離層20中剝離所述基板10的剝離強度應設定為能夠用人手容易剝離基板10的程度。Specifically, the substrate peeling step ( S40 ) is a step for separating the
在本實施例中,應在基板剝離步驟(S40)中能夠易於從剝離層20中剝離,因此所述剝離強度過高會成為問題,但所述剝離強度應該保持在電路圖案形成步驟(S20)或樹脂層形成步驟(S30)中不被任意剝離的程度。In this embodiment, it should be possible to easily peel from the
從這種角度來看,所述剝離強度優選為10gf/cm至100gf/cm,更加優選為20gf/cm至40gf/cm。當用於從所述剝離層20中剝離所述基板10的剝離強度小於10gf/cm時,在搬送或加工時基板可能會任意被剝離,當剝離強度超過100gf/cm時,在基板剝離步驟(S40)中,基板10可能會不易被剝離。From this viewpoint, the peel strength is preferably 10 gf/cm to 100 gf/cm, more preferably 20 gf/cm to 40 gf/cm. When the peeling strength for peeling the
另外,所述剝離強度根據在JIS C6481中規定的90度剝離強度檢測方法來進行檢測。In addition, the said peeling strength was detected according to the 90 degree peeling strength detection method prescribed|regulated by JIS C6481.
當通過所述基板剝離步驟(S40)從剝離層20中剝離基板10時,可通過一次製程來形成兩個印刷電路板,之後通過剝離層去除步驟(S50)來去除附著在各印刷電路板上的剝離層20。When the
具體地,在所述剝離層去除步驟(S50)中,如圖4的(h)所示,採用只能溶解由銀(Ag)材質第一導電物質構成的剝離層20的蝕刻液組合物來對剝離層20進行溶解並去除。尤其,對剝離層20進行溶解的過程中,不會溶解暴露於蝕刻液組合物中的銅(Cu)材質第二導電物質,因此能夠防止在剝離層20去除過程中電路圖案30受損。Specifically, in the step of removing the peeling layer ( S50 ), as shown in (h) of FIG. 4 , an etchant composition that can only dissolve the
如此,將剝離層20和電路圖案30由彼此不同的材質來構成,當只溶解剝離層20並將其去除時,能夠防止電路圖案30的凹陷深度(recess depth)的不良。此外,由於電路圖案30的暴露表面與樹脂層40的表面構成同一面,因此能夠防止在接合半導體晶粒和BOL(Bump on Lead)的過程中不能焊接的潤濕性不良(non-wet issue)。In this way, the
另外,通過試驗例,對如上所述本實施例的剝離層和基板的剝離強度更為詳細地進行說明。這些試驗例是僅用於示出本發明的一例,本發明的範圍並不局限於這些試驗例。In addition, the peeling strength of the peeling layer and the board|substrate of this Example as mentioned above is demonstrated in detail by the test example. These test examples are merely examples for illustrating the present invention, and the scope of the present invention is not limited to these test examples.
<試驗例1> 剝離強度試驗<Test example 1> Peel strength test
1、如圖5的(a)所示,在絕緣層10a的一面上形成有18㎛厚度銅(Cu)薄膜10b的基板10的銅箔10b上以0.3㎛厚度塗覆銀(Ag)剝離層20。1. As shown in FIG. 5( a ), on the
2、如圖5的(b)所示,在銀(Ag) 剝離層20上以15㎛厚度塗覆銅電路圖案30層。2. As shown in FIG. 5( b ), a layer of
3、如圖5的(c)所示,對電路圖案30層的表面進行軟蝕刻。3. As shown in FIG. 5( c ), soft etching is performed on the surface of the
4、如圖5的(d)所示,在電路圖案30層上層壓預浸料,並且提供壓力和熱量來形成樹脂層40。4. As shown in (d) of FIG. 5 , a prepreg is laminated on the
5、如圖5的(e)所示,從剝離層20中剝離基板10,此時形成在基板10的銅箔10b上的剝離層20被轉移至電路圖案30層。5. As shown in FIG. 5( e ), the
6、如圖5的(f)所示,在剝離層20的暴露的表面上以20㎛的厚度塗覆銅(Cu)試樣層50。6. As shown in (f) of FIG. 5 , a copper (Cu)
7、通過如上所述的製程,製作兩個相同的電路板後,如圖5的(g)所示,從剝離層20中剝離試樣層50的同時檢測剝離強度,結果如圖6的圖表所示,檢測到最大值0.028kgf/cm和最小值0.020kgf/cm。7. After making two identical circuit boards through the above-mentioned process, as shown in (g) of FIG. 5 , the
<試驗例2> 凹陷深度試驗<Test example 2> Sag depth test
1、參考圖4的(a),在絕緣層10a的一面上形成有18㎛厚度銅(Cu)薄膜10b的基板10的銅箔10b上以0.3㎛厚度塗覆銀(Ag)剝離層20。1. Referring to FIG. 4( a ), a silver (Ag) peeling
2、如圖4的(b)所示,在銀(Ag) 剝離層20上以15㎛厚度塗覆感光層31。2. As shown in FIG. 4( b ), a
3、如圖4的(c)所示,通過曝光及顯影製程,在感光層31上形成圖案槽32。3. As shown in (c) of FIG. 4 ,
4、如圖4的(d)所示,通過鍍金製程,在圖案槽32內以13㎛的厚度填充銅來形成電路圖案30。4. As shown in FIG. 4( d ), through the gold plating process, copper is filled in the
5、如圖4的(e)所示,去除感光層31。5. As shown in FIG. 4( e ), the
6、如圖4的(f)所示,在形成有電路圖案30的剝離層20上層壓預浸料,並且提供壓力和熱量來形成樹脂層40。6. As shown in (f) of FIG. 4 , a prepreg is laminated on the
7、如圖4的(g)所示,從剝離層20中剝離基板10,此時形成在基板10的銅箔10b上的剝離層20被轉移至電路圖案30層。7. As shown in FIG. 4( g ), the
8、接下來,如圖4的(h)所示,採用只能溶解銀(Ag)材質剝離層20的蝕刻液組合物對轉移至電路圖案30側的剝離層20進行溶解,此時,如圖7所示,能夠確認銅(Cu)材質電路圖案30未被損傷。8. Next, as shown in (h) of FIG. 4 , the
下面,對在本發明中採用的蝕刻液組合物進行說明。Next, the etching liquid composition used in this invention is demonstrated.
作為在本發明中採用的銀、銀合金或銀化合物的選擇性蝕刻液組合物,可採用記載在本申請人的韓國發明專利10-0712879中的包含氨化合物和氧化劑的蝕刻液組合物;也可採用包括如氧化性氣體、過氧化物或過氧酸等的氧化劑;脂族胺、芳族胺、鏈烷醇胺或氨化合物;螯合劑、消泡劑、潤濕劑、pH調節劑及除此之外為提高蝕刻液的性能而選擇的至少一種以上的添加劑;和水的選擇性蝕刻液組合物。對於選擇性蝕刻液的各組成,在下面具體地進行說明。As the selective etching liquid composition of silver, silver alloy or silver compound used in the present invention, the etching liquid composition containing an ammonia compound and an oxidizing agent described in Korean Invention Patent No. 10-0712879 of the applicant can be used; Oxidizing agents including, for example, oxidizing gases, peroxides or peroxyacids; aliphatic amines, aromatic amines, alkanolamines or ammonia compounds; chelating agents, defoaming agents, wetting agents, pH adjusting agents and In addition, at least one or more additives selected to improve the performance of the etching solution; and a water-selective etching solution composition. Each composition of the selective etching solution will be specifically described below.
在蝕刻液組合物中所包括的氧化劑(Oxidizing agent)起到用於氧化剝離層表面的銀材質的作用。在習知技術中公開有採用硝酸、鹽酸、硫酸、磷酸、硝酸鐵、氯化鐵、硫酸鐵或磷酸鐵等的蝕刻液組合物等。但是這些蝕刻液組合物係氧化及離解銅、鎳及鉻等金屬的物質,因此不適合用於選擇性地只蝕刻銀的電路蝕刻液。The oxidizing agent (Oxidizing agent) contained in the etching solution composition functions to oxidize the silver material on the surface of the peeling layer. Etching liquid compositions using nitric acid, hydrochloric acid, sulfuric acid, phosphoric acid, ferric nitrate, ferric chloride, ferric sulfate, ferric phosphate, or the like are disclosed in the prior art. However, since these etching liquid compositions oxidize and dissociate metals such as copper, nickel, and chromium, they are not suitable for circuit etching liquids that selectively etch only silver.
所述氧化劑使用如空氣、氧氣及臭氧等的氧化性氣體;如過硼酸鈉(Sodium perborate)、過氧化氫(Hydrogen peroxide)、鉍酸鈉(Sodium bismuthate)、過碳酸鈉(Sodium percarbonate)、過氧化苯甲醯(Benzoyl peroxide)、過氧化鉀(Potassium peroxide)及過氧化鈉(Sodium peroxide) 等的過氧化物(Peroxides);如甲酸(Formic acid)、過氧乙酸(Peroxyacetic acid)、過苯甲酸(Perbenzoic acid)、3-氯過氧苯甲酸(3-Chloroperoxybenzoic acid)及三甲基乙酸(Trimethylacetic acid)等的過氧酸(Peroxy acid);及過硫酸鉀(Potassium persulfate),當使用這些氧化劑時,優選混合至少一種氧化劑來使用。The oxidant uses oxidizing gases such as air, oxygen and ozone; such as sodium perborate (Sodium perborate), hydrogen peroxide (Hydrogen peroxide), sodium bismuthate (Sodium bismuthate), sodium percarbonate (Sodium percarbonate), Peroxides (Peroxides) such as Benzoyl peroxide, Potassium peroxide and Sodium peroxide; such as Formic acid, Peroxyacetic acid, Peroxide Peroxy acid such as Perbenzoic acid, 3-Chloroperoxybenzoic acid and Trimethylacetic acid; and Potassium persulfate, when using these In the case of an oxidizing agent, it is preferable to mix and use at least one oxidizing agent.
相對於銀或銀合金或銀化合物的蝕刻液組合物總重量,所包含的所述氧化劑優選為1~30重量%,更加優選為5~18重量%。當所述氧化劑少於1重量%時,蝕刻速度較慢,不能實現完美的蝕刻,從而可能會產生大量的銀殘渣。當在電路和電路之間存在銀殘渣時,會產生短路而導致產品不良,且較慢的蝕刻速度會影響生產性。當所述氧化劑的含量超過30重量%時,雖然暴露的剝離層的蝕刻速度較快,但會影響電路層底下存在的剝離層,從而產生過大的底切現象。這種底切現象為影響電路層附著力的因素,因此優選抑制該底切現象的產生。The oxidizing agent is preferably contained in an amount of 1 to 30% by weight, more preferably 5 to 18% by weight, relative to the total weight of the etching solution composition of silver, silver alloy or silver compound. When the oxidizing agent is less than 1 wt %, the etching speed is slow, and perfect etching cannot be achieved, so that a large amount of silver residues may be generated. When silver residues exist between circuits, short circuits can occur, resulting in defective products, and slow etching rates can affect productivity. When the content of the oxidizing agent exceeds 30 wt %, although the etching speed of the exposed peeling layer is faster, it will affect the peeling layer existing under the circuit layer, thereby causing excessive undercutting phenomenon. Such an undercut phenomenon is a factor affecting the adhesion of the circuit layer, so it is preferable to suppress the occurrence of the undercut phenomenon.
包含在所述銀或銀合金或銀化合物的蝕刻液組合物的脂肪胺(Aliphatic amine)或芳香胺(Aromatic amine)或烷醇胺(Alkanol amine)或銨化合物起到對剝離層中氧化的銀進行離解的作用。通過由氧化劑引起的氧化反應和由脂肪胺或芳香胺引起的離解反應,能夠只對銀或銀合金或銀化合物進行選擇性蝕刻。如上所述,在習知蝕刻液組合物中包含的硝酸、鹽酸、硫酸、磷酸、硝酸鐵、鹽酸鐵、硫酸鐵及磷酸鐵等,其中一種物質作為主蝕刻劑與銅反應,從而同時產生氧化及離解。然而,本發明的蝕刻液為每兩種物質負責氧化及離解,氧化後的銀與脂肪胺或芳香胺或烷醇胺或銨化合物的離解反應比銅離解反應進行得更激烈,從而只對由銀或銀合金或銀化合物來形成的種子層進行選擇性蝕刻。Aliphatic amine or Aromatic amine or Alkanol amine or ammonium compound contained in the etching solution composition of silver or silver alloy or silver compound acts to oxidize silver in peeling layer effect of dissociation. It is possible to selectively etch only silver or a silver alloy or a silver compound by an oxidation reaction caused by an oxidizing agent and a dissociation reaction caused by an aliphatic amine or an aromatic amine. As mentioned above, nitric acid, hydrochloric acid, sulfuric acid, phosphoric acid, ferric nitrate, ferric hydrochloride, ferric sulfate and ferric phosphate, etc. contained in the conventional etching solution compositions, one of which reacts with copper as the main etchant, thereby simultaneously producing oxidation and dissociation. However, the etching solution of the present invention is responsible for the oxidation and dissociation of each of the two substances, and the dissociation reaction of the oxidized silver with aliphatic amines or aromatic amines or alkanolamines or ammonium compounds is more intense than the copper dissociation reaction. Silver or silver alloys or silver compounds are used to form the seed layer for selective etching.
所述脂肪胺或芳香胺或烷醇胺或銨化合物使用乙胺(Ethylamine)、丙胺(Propylamine)、異丙胺(Isopropylamine)、n-丁胺(n-Butylamine)、異丁胺(Isobutylamine)、仲丁胺(sec-Butylamine)、二乙胺(Diethylamine)、哌啶(Piperidine)、酪胺(Tyramine)、N-甲基酪胺(N-Methyltyramine)、吡咯啉(Pyrroline)、吡咯烷(Pyrrolidine)、咪唑(Imidazole)、吲哚(Indole)、嘧啶(Pyrimidine)、乙醇胺(Ethanolamine)、6-氨基-2-甲基-2-己醇(6-Amino-2-methyl-2-heptanol)、1-氨基-2-丙醇(1-Amino-2-propanol)、甲醇胺(Methanolamine)、二甲基乙醇胺(Dimethylethanolamine)、N-甲基乙醇胺(N-Methylethanolamine)、1-氨基乙醇(1-Aminoethanol)、2-氨基-2-甲基-1-丙醇(2-amino-2-methyl-1-propanol)、碳酸銨(Ammonium carbonate)、磷酸銨(Ammonium phosphate)、硝酸銨(Ammonium nitrate)、氟化銨(Ammonium fluoride)及氨水(Ammonium hydroxide)等的胺類或銨化合物,當使用這種胺類或銨化合物時,優選混合至少一種的胺類或銨化合物來使用。The aliphatic amine or aromatic amine or alkanolamine or ammonium compound uses ethylamine (Ethylamine), propylamine (Propylamine), isopropylamine (Isopropylamine), n-butylamine (n-Butylamine), isobutylamine (Isobutylamine), secondary sec-Butylamine, Diethylamine, Piperidine, Tyramine, N-Methyltyramine, Pyrroline, Pyrrolidine , Imidazole, Indole, Pyrimidine, Ethanolamine, 6-Amino-2-methyl-2-heptanol, 1 - 1-Amino-2-propanol, Methanolamine, Dimethylethanolamine, N-Methylethanolamine, 1-Aminoethanol ), 2-amino-2-methyl-1-propanol, Ammonium carbonate, Ammonium phosphate, Ammonium nitrate, Amines or ammonium compounds such as ammonium fluoride (Ammonium fluoride) and ammonia hydroxide (Ammonium hydroxide), and when such amines or ammonium compounds are used, it is preferable to mix and use at least one amine or ammonium compound.
相對於銀材質剝離層蝕刻液組合物的總重量,所包含的所述脂肪胺或芳香胺或烷醇胺或銨化合物優選為1至75重量%,更加優選為20至70重量%。當所述脂肪胺或芳香胺或烷醇胺或銨化合物少於1重量%時,氧化後的銀的離解反應不佳,會導致銀剝離層的蝕刻速度變慢。當超過75%重量時,雖然對剝離層的選擇性蝕刻不會產生問題,但是胺類或銨化合物的過量使用會作為在蝕刻液中氧化劑阻礙銀或銀合金或銀化合物氧化的主要原因來起作用,從而會急劇降低選擇性蝕刻速度。因此,優選使用能夠產生剝離層表面氧化反應且通過對氧化的銀進行溶解來順利進行選擇性蝕刻程度的量。The aliphatic amine, aromatic amine, alkanolamine or ammonium compound contained is preferably 1 to 75 wt %, more preferably 20 to 70 wt %, relative to the total weight of the silver material peeling layer etching solution composition. When the aliphatic amine or aromatic amine or alkanolamine or ammonium compound is less than 1% by weight, the dissociation reaction of the oxidized silver is not good, which may cause the etching speed of the silver peeling layer to be slow. When it exceeds 75% by weight, although the selective etching of the peeling layer does not cause problems, the excessive use of amines or ammonium compounds will be the main reason for the oxidizing agent to hinder the oxidation of silver or silver alloys or silver compounds in the etching solution. effect, which drastically reduces the selective etch rate. Therefore, it is preferable to use an amount that can cause an oxidation reaction on the surface of the peeling layer and dissolve the oxidized silver so that selective etching can be smoothly performed.
在本發明的銀或銀合金或銀化合物的蝕刻液組合物中包含的螯合劑、消泡劑、潤濕劑、pH調節劑及除此以外用於提高蝕刻液的蝕刻性能而選擇的一種以上的添加劑起到去除在氧化反應時可能會產生的氣泡的作用,並且起到賦予能夠使蝕刻液很好地吸著在剝離層表面上的潤濕性等的作用,除此之外也可以選用能夠提高本發明效果的常用的添加劑。One or more selected from a chelating agent, an antifoaming agent, a wetting agent, a pH adjuster, and other that are included in the etching solution composition of silver, silver alloy, or silver compound of the present invention to improve the etching performance of the etching solution The additive of the etchant plays the role of removing the bubbles that may be generated during the oxidation reaction, and plays the role of imparting wettability, etc., which can make the etching solution well adsorbed on the surface of the peeling layer. Commonly used additives capable of enhancing the effect of the present invention.
根據添加劑的種類及作用,相對於銀材質剝離層蝕刻液組合物的總重量所包含的所述添加劑優選為0.1至10重量%,更加優選為1至7重量%。當所述添加劑的含量少於0.1重量%時,不能起到提高本發明效果即選擇性蝕刻特性的作用,當超過10重量%時,蝕刻液會產生膠化(或,凝膠化)而大幅降低蝕刻特性。Depending on the type and function of the additive, the additive is preferably contained in an amount of 0.1 to 10 wt %, more preferably 1 to 7 wt %, relative to the total weight of the silver material peeling layer etching solution composition. When the content of the additive is less than 0.1% by weight, the effect of the present invention, that is, the selective etching characteristic cannot be improved, and when the content of the additive exceeds 10% by weight, the etching solution will gel (or gel) and greatly Decreased etching characteristics.
本發明的銀或銀合金或銀化合物的蝕刻液組合物包含上述物質,在共100重量%中包括餘量的水。水優選使用去離子水。The etching liquid composition of the silver or silver alloy or silver compound of this invention contains the above-mentioned substances, and the balance water is included in 100 weight% in total. Deionized water is preferably used for water.
下面,通過實施例更為詳細地說明本發明,但實施例只是本發明的示例,本發明的範圍並不局限於實施例。Hereinafter, the present invention will be described in more detail by way of examples, but the examples are merely examples of the present invention, and the scope of the present invention is not limited to the examples.
實施例1:選擇性蝕刻液組合物的製備Example 1: Preparation of Selective Etching Liquid Composition
1-1:選擇性蝕刻液組合物1的製備1-1: Preparation of Selective
對12重量%的過氧化氫(hydrogen peroxide)、40重量%的單乙醇胺(Monoethanolamine)、1重量%的潤濕劑(wetting agent)、1重量%的消泡劑(antifoaming agent)及46重量%的去離子水(DI water)進行混合而製備選擇性蝕刻液組合物1。For 12 wt% hydrogen peroxide, 40 wt% monoethanolamine, 1 wt% wetting agent, 1 wt% antifoaming agent and 46 wt% Selective
1-2:選擇性蝕刻液組合物2的製備1-2: Preparation of Selective
對7重量%的過碳酸鈉(Sodium percarbonate)、32.5重量%的N-甲基二乙醇胺(N-Methyldiethnaolamine)、0.5重量%的潤濕劑、1重量%的消泡劑及59重量%的去離子水進行混合而製備選擇性蝕刻液組合物2。7% by weight of sodium percarbonate (Sodium percarbonate), 32.5% by weight of N-Methyldiethanolamine (N-Methyldiethanolamine), 0.5% by weight of wetting agent, 1% by weight of defoamer and 59% by weight of defoamers Selective
1-3:選擇性蝕刻液組合物3的製備1-3: Preparation of Selective Etching Liquid Composition 3
對4重量%的過碳酸鈉、60重量%的N-甲基二乙醇胺(N-Methyldiethnaolamine)、1.5重量%的潤濕劑、0.5重量%的消泡劑及34重量%的去離子水進行混合而製備選擇性蝕刻液組合物3。4% by weight of sodium percarbonate, 60% by weight of N-Methyldiethanolamine (N-Methyldiethnaolamine), 1.5% by weight of wetting agent, 0.5% by weight of defoamer and 34% by weight of deionized water were mixed And the selective etching liquid composition 3 was prepared.
實施例2:比較例的製備Example 2: Preparation of Comparative Example
2-1:比較例1的製備2-1: Preparation of Comparative Example 1
為了與在實施例1中製備的選擇性蝕刻液組合物1至3進行比較,參照韓國公開專利公報第10-2016-0115189號中記載的實施例1,對10重量%的硝酸鐵、5重量%的硝酸、5重量%的醋酸、1重量%的EDTA、1重量%的乙醇酸及78重量%的去離子水進行混合而製備比較例1。For comparison with the selective etching
2-2:比較例2的製備2-2: Preparation of Comparative Example 2
為了與在實施例1中製備的選擇性蝕刻液組合物1至3進行比較,參照韓國公開專利公報第10-2010-0098409號中記載的實施例1,對7重量%的氨、1.5重量%的過氧化氫及91.5重量%的去離子水進行混合而製備比較例2。For comparison with the selective etching
2-3:比較例3的製備2-3: Preparation of Comparative Example 3
為了與在實施例1中製備的選擇性蝕刻液組合物1至3進行比較,參照韓國公開專利公報第10-2010-0098409號中記載的比較例2,對50重量%的磷酸、5重量%的硝酸、30重量%的醋酸及15重量%的去離子水進行混合而製備比較例3。For comparison with the selective etching
實施例3:蝕刻實驗結果Example 3: Etching Experiment Results
在如下的ICP分析實驗條件下對在實施例1中製備的選擇性蝕刻液組合物及在實施例2中製備的比較例進行蝕刻實驗(表1)。該條件為,聚醯亞胺(PI)基板材料、試樣大小2.5×2.5cm(Ag coating seed layer, Cu FCCL)、蝕刻液量40g、蝕刻時間10秒及小於5ppm的N.D。 【表1】
結果能夠確認,在選擇性蝕刻液組合物1至3的情況下,銀在10秒的蝕刻時間內被蝕刻,並露出聚醯亞胺基板材料表面,Cu FCCL表面沒有出現特別的變色或特殊情況,未進行通過蝕刻液的表面氧化。As a result, it can be confirmed that in the case of the selective etching
但在比較例1及2下能夠確認,在進行相同時間的蝕刻時銀未被100%蝕刻,而是存在殘留物,Cu FCCL表面被氧化而變色。此外,在比較例3下能夠確認,在進行相同時間的蝕刻時雖然銀被100%蝕刻,但是因Cu FCCL的蝕刻速度也較快而導致急劇的表面氧化。However, in Comparative Examples 1 and 2, it was confirmed that the silver was not 100% etched when etching was performed for the same period of time, but residues were present, and the surface of the Cu FCCL was oxidized and discolored. Furthermore, in Comparative Example 3, it was confirmed that although silver was etched 100% when etching was performed for the same time period, the etching rate of Cu FCCL was also high, resulting in rapid surface oxidation.
通過ICP分析能夠確認,當檢測和比較在蝕刻溶液中存在的銀及銅成分時,在銀未被100%蝕刻的比較例1及2下檢測到170ppm以下的銀,在Cu FCCL表面被氧化而變色的比較例1至3下檢測到銅。尤其能夠確認,在銀的蝕刻量較多的比較例1和3下,同樣因銅的蝕刻速度較快而檢測到較多的銅。It was confirmed by ICP analysis that, when the silver and copper components present in the etching solution were detected and compared, 170 ppm or less of silver was detected in Comparative Examples 1 and 2 in which silver was not 100% etched, and the surface of Cu FCCL was oxidized to Copper was detected under discolored Comparative Examples 1 to 3. In particular, in Comparative Examples 1 and 3 in which the etching amount of silver was large, it was confirmed that a large amount of copper was detected similarly because the etching rate of copper was high.
結果能夠確認,與比較例1至3不同,在選擇性蝕刻液組合物1至3下,銀在10秒的蝕刻時間內的蝕刻量為170ppm以上,銀被100%蝕刻,而銅為N.D(小於5ppm),未被檢測。由此能夠明確確認,選擇性蝕刻液組合物1至3選擇性地只蝕刻銀。As a result, it could be confirmed that, unlike Comparative Examples 1 to 3, in the selective etching
即,根據如上實施例,可通過將金屬電路層的去除抑制到最小限度,且選擇性地只蝕刻銀或銀合金或銀化合物來提供不會損傷銅電路層且蝕刻因子(Etch factor)較高的蝕刻液組合物。因此,利用該蝕刻液組合物能夠設計高性能及高積體的電路,並且能夠製造需要輕薄短小的產品。That is, according to the above embodiment, by suppressing the removal of the metal circuit layer to a minimum, and selectively etching only silver or silver alloy or silver compound, it is possible to provide the copper circuit layer without damaging the copper circuit layer with a high etch factor (Etch factor) etchant composition. Therefore, a high-performance and high-integration circuit can be designed using this etchant composition, and a product that needs to be light, thin, and short can be manufactured.
本發明的權利範圍並不限於上述實施例,在所附的申請專利範圍內可由多種形式的實施例實現。在不脫離申請專利範圍所要求保護的本發明精神的範圍內,本發明所屬技術領域的技術人員均能變形的各種範圍也屬於本發明的申請專利範圍所記載的範圍內。The right scope of the present invention is not limited to the above-mentioned embodiments, and can be realized by various forms of embodiments within the scope of the appended claims. Within the scope of not departing from the spirit of the invention claimed in the scope of the patent application, various ranges that can be modified by those skilled in the art to which the invention pertains also belong to the scope described in the scope of the patent application of the invention.
10‧‧‧基板10a‧‧‧絕緣層10b‧‧‧銅箔20‧‧‧剝離層30‧‧‧電路圖案31‧‧‧感光層32‧‧‧圖案槽40‧‧‧樹脂層S10‧‧‧剝離層形成步驟S20‧‧‧電路圖案形成步驟S30‧‧‧樹脂層形成步驟S40‧‧‧基板剝離步驟S50‧‧‧剝離層去除步驟10‧‧‧
圖1為表示採用習知ETS方法的印刷電路板的製造方法的圖;FIG. 1 is a diagram showing a manufacturing method of a printed circuit board using a conventional ETS method;
圖2為表示根據本發明的第一實施例的印刷電路板的製造方法的順序圖;2 is a sequence diagram showing a method of manufacturing a printed circuit board according to the first embodiment of the present invention;
圖3為表示根據本發明的第一實施例的印刷電路板的製造方法的按製程步驟的剖視圖;3 is a cross-sectional view showing a process step of a method for manufacturing a printed circuit board according to the first embodiment of the present invention;
圖4為表示根據本發明的第二實施例的印刷電路板的製造方法的按製程步驟的剖視圖;4 is a cross-sectional view showing a process step of a method for manufacturing a printed circuit board according to a second embodiment of the present invention;
圖5為表示用於試驗本發明中剝離強度的電路板的製造過程的剖視圖;5 is a cross-sectional view showing a manufacturing process of a circuit board for testing peel strength in the present invention;
圖6為表示通過本發明製造的剝離層的剝離強度的試驗例;6 is a test example showing the peel strength of the peeling layer produced by the present invention;
圖7為表示本發明的剝離層去除步驟後的電路圖案剖面的放大圖。7 is an enlarged view showing a cross section of the circuit pattern after the peeling layer removal step of the present invention.
S10‧‧‧剝離層形成步驟 S10‧‧‧Forming step of peeling layer
S20‧‧‧電路圖案形成步驟 S20‧‧‧Circuit pattern forming step
S30‧‧‧樹脂層形成步驟 S30‧‧‧Resin layer forming step
S40‧‧‧基板剝離步驟 S40‧‧‧Substrate peeling step
S50‧‧‧剝離層去除步驟 S50‧‧‧Peeling layer removal step
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2018
- 2018-04-17 KR KR1020180044603A patent/KR102414959B1/en active IP Right Grant
- 2018-04-18 TW TW107113103A patent/TWI768029B/en active
- 2018-04-18 WO PCT/KR2018/004492 patent/WO2018194367A1/en active Application Filing
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JP2012114110A (en) * | 2010-11-19 | 2012-06-14 | Toppan Printing Co Ltd | Method for manufacturing multilayer wiring board |
JP2012216824A (en) * | 2011-03-31 | 2012-11-08 | Hitachi Chem Co Ltd | Manufacturing method of package substrate for mounting semiconductor element |
TW201700290A (en) * | 2015-06-17 | 2017-01-01 | 長興材料工業股份有限公司 | Metal-clad laminate and method of manufacturing the same |
TW201712128A (en) * | 2015-09-24 | 2017-04-01 | Jx Nippon Mining & Metals Corp | Metal foil, metal foil provided with release layer, laminate body, printed circuit board, semiconductor package, electronic apparatus, and printed circuit board production method |
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WO2018194367A1 (en) | 2018-10-25 |
KR20180117550A (en) | 2018-10-29 |
KR102414959B1 (en) | 2022-07-05 |
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