TWI765674B - Bidirectional Anodic Plasma Chemical Vapor Deposition Coating Equipment - Google Patents

Abstract

The present invention relates to a bidirectional anodic plasma chemical vapor deposition coating equipment, which is a hollow isolation space inside the base, a gas transmission channel is arranged at the top, and a bearing pedestal is installed in the isolation space, and the bearing pedestal is provided with A plurality of hollow chambers, and two anode shunt panels and a power supply part are installed on the outside of the two opposite surfaces of the bearing pedestal, and the two anode shunt panels are respectively shielded on the two outer sides of the plurality of chambers, and the opposite inner sides respectively form working spaces , In addition, one side of the lifting mechanism is assembled under the bearing pedestal, and the other side of the lifting mechanism extends out of the base to adjust the longitudinal displacement of the bearing pedestal in the isolation space, and the lifting mechanism is provided with a grounding portion for supplying electrical energy to the bearing pedestal , and at the bottom of the base around the lifting mechanism is provided with one or more air extraction channels, so as to achieve the purpose of uniform coating on the concave and convex surfaces of the lenses of the contact lenses.

Description

Bidirectional Anodic Plasma Chemical Vapor Deposition Coating Equipment

The present invention provides a bidirectional anodic plasma chemical vapor deposition coating equipment, especially the equipment for coating the concave and convex surfaces of contact lenses. The multiple chambers of the contact lens are built into the lens of the contact lens, so as to achieve the purpose of the lens coating process of the contact lens, and prolong the hydrophilic time and the anti-contamination function of the contact lens.

Press, with the development and innovation of various electronic and electrical products, it has brought people a lot of convenience in daily life and work, especially the advent of a large number of 3C electronic products, which has also led to the popularization of applications such as wireless communication and the Internet. As a result, many people are indulged in the realm of using 3C electronic products, and a large number of 3C electronic products are used for a long time, including students, teenagers, office workers, or some middle-aged and elderly people, almost regardless of gender, age, and coverage. It is quite extensive, which leads to the common scene of low-headed people in daily life, and causes many people's eyesight loss, damage and degradation, etc. to become increasingly serious, which also directly leads to a rapid increase in the population of myopia in society, and the number of people who use glasses and contact lenses. also increased.

In order to solve the inconvenience and trouble caused by myopia, people will wear glasses, contact lenses, orthokeratology lenses, etc. to correct their vision or correct their vision through corneal myopia surgery. on the surface of contact lenses Plasma surface modification treatment is carried out to improve the hydrophilicity of contact lenses and increase the comfort of wearing contact lenses. However, the hydrophilicity of contact lenses can only be maintained for about 1 to 2 weeks. The main factors can be listed as follows:

(1) During the plasma surface modification treatment and after the plasma surface modification treatment of the lens of the contact lens, the chemical groups generated will undergo re-arrangement in order to minimize the surface energy and return to the state of thermal equilibrium. , thereby producing a hydrophobic recovery phenomenon.

(2) When the lenses of the contact lenses are treated by plasma surface modification, most of the lens surfaces will undergo new oxidation and degradation reactions when the surface of the lenses is exposed to air, resulting in hydrophobic recovery.

(3) In order to achieve a stable thermal equilibrium state for the lens of the contact lens with a lower surface energy, a small number of low-molecular oxidized molecules will move to the interior of the lens, thereby producing a hydrophobic recovery phenomenon.

(4) Unmodified low-molecular-weight species and macromolecules move from the interior of the contact lens to the surface, thereby promoting the degree of hydrophobic recovery and forming a low-surface-energy low-molecular layer on the surface.

(5) Reorientation of polar chemical groups on the lens surface of contact lenses.

(6) The relaxation of the surface roughness of the substrate was not improved by the plasma surface modification.

Based on the above factors, the contact angle of the contact lens surface will gradually increase after one to two weeks after the plasma surface modification treatment, and become a hydrophobic surface, and about the 10th to 14th day, the will revert to and untreated contact lenses With the same contact angle, when the wearer wears the lens of the hydrophobic contact lens, the eyeball of the wearer will feel an uncomfortable foreign body sensation, which will affect the wearer's willingness to continue wearing the contact lens; and The lenses of hydrophobic contact lenses are also easy for sediments to adhere and stick. The sediments on the lenses will not only affect the wearer's vision, the comfort of wearing contact lenses and the wettability of the lens surface, but also the sediments. The protein precipitation is also easy to become a breeding ground for bacterial growth, and when the protein deposited on the surface of the contact lens denatures over time, it may induce an immune response in the human body, resulting in Giant Papillary Conjunctivitis (Giant Papillary Conjunctivitis) , acute red eye and other symptoms of corneal infection, which make the wearer unable to wear contact lenses; in addition, because the deposits on the lenses of the contact lenses cannot be completely removed by contact lens cleaners, the deposits will become difficult after a period of time. It will be combined with the material of the lens of the contact lens itself, which will shorten the use time of the lens of the contact lens and cause damage to the lens.

Therefore, how to solve the problems and troubles in the current lens manufacturing and wearing of contact lenses, the formation of sediments when wearing contact lenses and the troubles and defects of short hydrophilicity time, etc., are related to engaging in this industry. Manufacturers are eager to study the direction of improvement.

Therefore, in view of the above problems and deficiencies, the inventor collected relevant information, evaluated and considered from various parties, and based on years of experience in this industry, through continuous research and development and modification, to design this bidirectional anode plasma chemical. The inventor of the invention patent of vapor deposition coating equipment.

The main purpose of the present invention is the bidirectional anodic plasma chemical vapor deposition coating equipment, which is a hollow isolation space inside the base, a gas transmission channel is arranged on the top, and a bearing pedestal is installed in the isolation space. The pedestal is provided with a plurality of hollow chambers, and the bearing platform is Two anode shunt panels and a power supply part are installed on the outside of the two opposite surfaces of the seat. The two anode shunt panels are respectively shielded on the two outer sides of the plurality of chambers, and the opposite inner sides respectively form working spaces, and one side of the lifting mechanism is assembled on the bearing Below the pedestal, the other side of the lifting mechanism extends out of the base, which is used to adjust the longitudinal displacement of the bearing pedestal in the isolated space, and the lifting mechanism is provided with a grounding portion for supplying electrical energy to the bearing pedestal, and a base around the lifting mechanism is provided The bottom is provided with one or more air extraction channels to achieve the purpose of uniform coating on the concave and convex surfaces of the lenses of the contact lenses, prolong the hydrophilic performance of the lenses of the contact lenses, and reduce protein precipitation on the surface of the lenses, and Reduce the surface roughness, so as to increase the comfort of wearing contact lenses and prolong the service life of the lenses.

Another object of the present invention is that the bearing base is provided with a plurality of chambers, and each chamber is respectively formed in the shape of a wide channel and a narrow channel connecting and passing through, and an inner shoulder is formed at the connecting position of each wide channel and narrow channel, which can be used for presetting. The contact lenses are horizontally laid out from the wide channel and abut against the inner shoulder; and the area of the two anode shunt panels can be equal to or greater than the area of the bearing pedestal, and the two anode shunt panels and the bearing pedestal, a plurality of chambers Work spaces of the same or different heights are formed between them.

Another object of the present invention is that the lifting mechanism is provided with an air-tight insulating body for passing through the base, and a lifting guide rod made of metal conductive material and longitudinally displaced is arranged inside the insulating body. , one side of the lifting guide rod extends into the isolation space of the base and is combined with the bottom of the bearing pedestal, and the other side of the lifting guide rod extends out of the base and is electrically connected to the grounding portion, and the two anode shunt panels are provided with The power supply part is a radio frequency generator, which induces plasma to be produced from the two anode shunt panels to the bearing base (cathode electrode plate) to coat the contact lens.

Another object of the present invention is that the contact lens is subjected to bidirectional anodic plating for long-term effects The steps of the plasma chemical vapor deposition method are: cleaning the bearing pedestal inside the pedestal and removing the moisture on the surface of the bearing pedestal; cleaning the isolation space inside the pedestal, the bearing pedestal and the two anode shunt panels; placing the bearing pedestal in the In the isolation space of the base; vacuumize the isolation space of the base through the air extraction channel; inject plasma-generating gas (working gas) into the isolation space of the base through the gas transmission channel, and turn on the radio frequency generator to isolate the isolation space. The interior of the space is cleaned; the lenses of a plurality of preset contact lenses are placed in the chambers of the bearing pedestal respectively; the isolation space of the base is vacuumized again; the isolation space of the base is assisted by the gas transmission channel to generate plasma. Gas (working gas), after the pressure of the isolation space inside the base is stable, then turn on the RF generator, then start to pretreat the lenses of the contact lens, after the preprocessing is completed, turn off the generator; turn off the gas flow, and turn off the suction motor , and open the base; the purpose of aeration has been achieved, then close the base and repeat the evacuation treatment of the isolated space of the base, and turn on the heater of the bottle body holding the liquid connected to at least one or more valves. At the same time, turn on the electromagnetic stirrer, and after confirming that the bottle body is heated, inject working gas into the isolation space of the base, and confirm that the pressure in the isolation space is stable, and then add the liquid vapor in at least one or more bottles into the base of the base. In the isolation space, and control the pressure in the isolation space, the lens of the contact lens is coated, the bearing base is the cathode electrode plate, and the two anode shunt panels above and below it use the power supply part as the plasma power, through the two anode shunt panels and the bearing The pedestal performs bidirectional anodic plasma chemical vapor deposition coating on the lenses of the contact lenses in each chamber. After the coating operation is completed, turn off the generator, then turn off the heater and electromagnetic stirrer of the bottle body, and confirm that the bottle body is cooled to the room temperature. In the warm state, close at least one or more valves, close the air extraction channel at the bottom of the base, and adjust the pressure of the isolation space inside the base to normal pressure, and then the bearing platform can be taken out of the isolation space, and each cavity on the bearing platform can be removed. Lens removal of indoor contact lenses.

1: Base

10: Isolation space

11: Air channel

12: Exhaust channel

13: Valve

14: Electromagnetic stirrer

15: bottle body

151: Heater

2: Bearing pedestal

20: Chamber

201: Wide Channel

202: Narrow channel

203: inner shoulder

3: Anode shunt panel

30: Workspace

4: Lifting mechanism

41: Power Supply Department

42: Insulation body

421: Lifting guide rod

422: Ground

5: Lenses

[Fig. 1] is a perspective external view of the present invention.

[Fig. 2] is a three-dimensional appearance view of the bearing platform of the present invention.

[Fig. 3] is a partial cross-sectional view of the bearing platform of the present invention.

[Fig. 4] is the flow chart (1) of the coating operation of the present invention.

[Fig. 5] is the flow chart (2) of the coating operation of the present invention.

[Fig. 6] is the flow chart (3) of the coating operation of the present invention.

In order to achieve the above purpose and effect, the technical means used in the present invention and its structure, implementation method, etc., are described in detail with respect to the preferred embodiment of the present invention and its features and functions are as follows, so as to be fully understood.

Please refer to Figures 1, 2, and 3, which are the three-dimensional appearance diagram of the present invention, the three-dimensional appearance diagram of the bearing pedestal, and the partial cross-sectional view of the bearing pedestal. The slurry chemical vapor deposition coating equipment includes a base 1, a bearing pedestal 2, two anode shunt panels 3 and a lifting mechanism 4, wherein: the base 1 has a hollow isolation space 10 inside, and a gas channel 11 is arranged on the top , The bottom is provided with at least one or more suction channels 12, and at least one side is provided with at least one or more liquid conveying valves 13 and electromagnetic stirrers 14, and at least one or more than one valve 13 is connected There is a bottle body 15 for holding liquid, and at least one or more than one bottle body 15 is provided with a heater 151 and at least one or more electromagnetic stirrers 14, which can be adjusted by at least one or more heaters 151. At least one or more than one bottle body 15 is heated reason.

The support base 2 is installed in the isolation space 10 of the base 1 , and a plurality of hollow cavities 20 are provided on the support base 2 .

The two anode shunt panels 3 are installed in the isolation space 10 of the base 1 and are respectively located outside the two opposite surfaces of the bearing base 2 , and the two anode shunt panels 3 are used to cover the two outer sides of the plurality of chambers 20 respectively. Then, working spaces 30 are respectively formed between the two anode shunt panels 3 , the bearing pedestal 2 and the plurality of chambers 20 .

One side of the lifting mechanism 4 is assembled under the bearing pedestal 2, and the other side extends out of the isolation space 10 of the base 1, and is located on the side of at least one or more than one air extraction channel 12 (the lifting mechanism 4 is connected to the base 1 ). There is a close connection between them without gaps and no air leakage. This is a common knowledge and will not be repeated here.), it is used for the lifting mechanism 4 to adjust the longitudinal displacement of the bearing platform 2 in the isolation space 10, and the lifting mechanism 4 There is a power supply part 41 for supplying electrical energy to the two anode shunt panels 3 .

The above-mentioned bearing pedestal 2 includes a plurality of chambers 20 , and each chamber 20 has a wide channel 201 and a narrow channel 202 connected and penetrated respectively, and an inner shoulder is formed at the connecting position of the wide channel 201 and the narrow channel 202 in each chamber 20 . The part 203 is used for the lenses 5 of the plurality of preset contact lenses to be laid horizontally and horizontally in each wide channel 201 respectively, and abut against each inner shoulder part 203 .

And the area of the two anode distribution panels 3 is equal to or greater than the area of the bearing base 2 , and the two anode distribution panels 3 , the bearing base 2 and the plurality of chambers 20 respectively form working spaces 30 of the same or different heights.

In addition, the above-mentioned lifting mechanism 4 includes an air-tight insulating body 42 which is penetrated through the base 1 , and a lifting guide rod 421 made of metal conductive material is arranged inside the insulating body 42 to lift the The lowering guide rod 421 can be longitudinally displaced, and is provided with a grounding portion 422 for supplying electrical energy to the bearing base 2 , and the power supply portion 41 of the lifting mechanism 4 can be a radio frequency generator or the like.

In addition, the above-mentioned lenses 5 of the plurality of preset contact lenses can be polymethyl methacrylate (PMMA), fluorosilicone acrylate (FSA), breathable semi-hard lenses, polyhydroxyethyl methacrylate, GMMA , silicone water glue, etc., or other materials for making the lenses 5 of the preset contact lenses.

Please refer to Figures 1, 2, 3, 4, 5 and 6, which are the three-dimensional appearance diagram of the present invention, the three-dimensional appearance diagram of the bearing pedestal, the partial cross-sectional view of the bearing pedestal, and the flow chart of the coating operation (1), The flow chart of the coating operation (2) and the flow chart of the coating operation (3), as shown in the figures, it can be clearly seen that the steps of the above-mentioned bidirectional anodic plasma chemical vapor deposition coating on the contact lens are as follows:

(A01) Clean the base 1 and the inner bearing pedestal 2 respectively, and remove the residual moisture on the surface of the bearing pedestal 2.

(A02) Clean the isolation space 10 inside the base 1 , the bearing pedestal 2 and the two anode shunt panels 3 .

(A03) Put the support base 2 into the isolation space 10 of the base 1 .

(A04) Evacuate the isolated space 10 of the base 1 through the evacuation channel 12 .

(A05) Use the gas transmission channel 11 to inject working gas into the isolation space 10 of the base, and turn on the power supply 41 (which can be a radio frequency generator) to generate plasma in the isolation space 10 for internal cleaning.

(A06) Put the lenses 5 of the plurality of preset contact lenses into the bearing base 2 respectively In each chamber 20 , a plurality of preset lenses 5 are arranged horizontally and horizontally in the wide passage 201 of each chamber 20 , and then each lens 5 abuts against the inner shoulder 203 of each chamber 20 respectively.

(A07) Evacuate the isolation space 10 of the base 1 again.

(A08) Pour the pretreatment gas into the isolation space 10 of the susceptor 1 , and activate the power supply unit 41 to perform plasma pretreatment on the two-anode split panel 3 .

(A09) Stop injecting gas into the isolation space 10 of the base 1 , depressurize the isolation space 10 , and then open the base 1 .

(A10) Close the base 1, perform vacuum treatment on the isolation space 10 of the base 1, and turn on the heater 151 to heat at least one or more of the bottle bodies 15 containing the liquid, and simultaneously turn on at least one or more of the bottle bodies 15. the electromagnetic stirrer 14, and then confirm that the bottle body 15 has been heated.

(A11) Inject argon gas into the isolation space 10 of the base 1 through the gas delivery channel 11, and then add hydrophilic liquid vapor from at least one or more than one valve 13, and adjust the flow rate of argon gas to isolate the interior of the base 1. The pressure of the space 10 is unstable, and the predetermined pressure is maintained by adding hydrophilic liquid vapor through at least one or more valves 13 .

(A12) Turn on the power supply unit 41 to supply power to the two anode shunt panels 3 in the isolation space 10 of the base 1, and confirm the pressure of the isolation space 10 of the base 1. If the pressure changes, adjust at least one of the input liquid vapor or More than one valve 13 maintains a predetermined pressure in the isolation space 10 in the base 1 to coat the lenses 5 of the predetermined contact lenses in the chambers 20 of the carrier base 2 .

(A13) Using two opposite anode shunt panels 3 located on the upper and lower sides of the bearing platform 2 in the isolation space 10 of the base 1, synchronously conduct bidirectional anode operation on each preset mirror 5 in each chamber 20 Electrode plasma chemical vapor deposition process.

(A14) Use the power supply part 41 to supply power to the two-anode shunt panel 3, use the grounding part 422 to make the bearing base 2 a cathode electrode plate, and the two-anode shunt panel 3 provides plasma power through the power supply part 41, and can pass through the two anodes Between the distribution panel 3 and the carrier base 2 (cathode electrode plate), bidirectional anodic plasma vapor chemical deposition is formed, so that the plasma is concentrated in each chamber 20 of the carrier pedestal 2, and the plasma is deposited in each chamber 20 The front and back surfaces of each preset lens 5 in the interior are used for coating treatment on the front and back surfaces of each preset lens 5 at the same time.

(A15) After the coating is finished, turn off the power supply unit 41, at least one or more heaters 151 of the bottle body 15, and at least one or more electromagnetic stirrers 14, and then pass the gas transmission channel 11 to the isolation space 10 of the base 1 Inject gas.

(A16) Confirm that at least one or more of the bottle bodies 15 containing the liquid are cooled to room temperature, and close the valve 13 connected to the at least one or more bottle bodies 15 .

(A17) Close the argon gas injected into the isolation space 10 of the base 1 by the gas transmission channel 11, so that the isolation space 10 in the base 1 is back pressured to the normal pressure [normal atmospheric pressure: 1kg/cm ² ], and the argon gas can be taken out. Coated lenses 5 of each preset contact lens.

The base 1 in each of the above steps can be connected to at least one or more valves 13 on one side with a bottle body 15 for holding liquid, and the at least one or more than one bottle body 15 is for holding hydrophilic liquid. , the hydrophilic liquid system can be a hydrophilic liquid such as polyethylene glycol methacrylate (Poly(ethylene glycol) Methacrylate, PEGMA] or N-vinylpyrrolidone (N-Vinylpyrrolidone, NVP) .

In the above-mentioned step (A01), the cleaning operation of the base 1 and the inner bearing pedestal 2 is carried out by cleaning the bearing pedestal 2 with clean water, and then using isopropyl alcohol (Isopropy Alc ohol, IPA], then use compressed dry air (Clean Dry Air, CDA) to remove the moisture on the surface of the bearing pedestal 2; and use reverse osmosis (RO) water to wipe the inner isolation space 10 of the pedestal 1 and the bearing pedestal 2. , and use isopropyl alcohol (IPA) to wipe the inner isolation space 10 of the base 1 and the bearing base 2 at least twice or more.

In the vacuum treatment in the above steps (A04) and (A07), it must be confirmed that the internal pressure of the isolation space 10 in the base 1 is below 1.0 ^* 10 ^-1 Torr; and in the vacuum treatment in this step (A10), it must be confirmed The internal pressure of the isolation space 10 in the base 1 is below 3.0 ^* 10 ^-2 Torr.

The working gas system of this step (A05) can be argon (Ar) with a flow rate of 10 sccm and oxygen (O ₂ ) with a flow rate of 20 sccm and other gases, and the plasma pressure (plasma power): 60W, for 8 minutes of cleaning Processing operation; the gas system injected into the isolation space 10 of the base 1 in the steps (A08) and (A09) can be argon (Ar) with a flow rate of 30 sccm, and the predetermined time is 10 to 30 minutes, and the preferred time is 20 minutes.

In this step (A06), the lenses 5 of the plurality of preset contact lenses are placed in the respective chambers 20 of the bearing base 2 in a horizontal manner, and the plurality of chambers 20 of the bearing base 2 are respectively provided with wide channels 201 , The narrow channel 202 is connected in a through shape, and an inner shoulder 203 is provided at the connection position of the wide channel 201 and the narrow channel 202 inside each chamber 20, and the lens 5 for presetting the contact lens is horizontally laid in the wide channel 201, against the inner shoulder 203 .

The treatment gas system before this step (A08) can be argon (Ar) with a flow rate of 9 sccm and oxygen (O ₂ ) with a flow rate of 36 sccm and other gases; and in the steps (A05), (A08), (A12), (A14) ) Start the power supply part 41 of the lifting mechanism 4 for plasma processing or power supply, and the power supply part 41 can be a radio frequency generator (RF generator power); then the RF generator of the power supply part 41 in this step (A05) is set to 120W, and the processing The time can be 5-10 minutes, and the preferred time is 6 minutes; and step (A08) turns on the power supply unit 41 of the lifting mechanism 4 to perform plasma treatment on the two anode shunt panels 3, and set the radio frequency generator to 40W for 16 minutes. , and confirm that the pressure of the isolation space 10 in the base 1 is 300 mTorr; the predetermined pressure maintained in the isolation space 10 in the base 1 is 300-350 mTorr.

In this step (A09), the pressure of the isolation space 10 in the base 1 is decompressed, the isolation space 10 is depressurized to 1 atm, and the base 1 is opened for about 1 to 3 minutes.

In this step (A10), at least one or more than one electromagnetic stirrer 14 is activated, and each electromagnetic stirrer 14 operates at a speed of 20 rpm/sec.

In this step (A11), the flow rate of argon gas (Ar) injected into the isolation space 10 of the base 1 is 8 sccm, and when adjusting the flow rate of argon gas, the flow rate of argon gas is adjusted to 12 sccm; as for the hydrophilic liquid vapor, the argon gas is added first. Poly(ethylene glycol) methacrylate [PEGMA, Poly(ethylene glycol)methacrylate], the pressure is controlled at 1.5~2 ^* 10 ^-1 Torr; then N-Vinylpyrrolidone (NVP) is added, and the pressure is controlled At 2~3 ^* 10 ^-1 Torr; in this step (A12), when the pressure of the isolation space 10 in the base 1 is unstable and floats, and the hydrophilic liquid PEGMA/NVP vapor is added, the predetermined pressure is maintained at 3 * 10 ^-1 Torr ; In addition, the gas system injected into the isolation space 10 of the base 1 in this step (A15) is argon (Ar) with a flow rate of 70 sccm for 15 minutes.

The lenses 5 of the plurality of preset contact lenses processed and coated through the above steps, due to polyethylene glycol methacrylate and N-vinyl-2-rolepyrone, pass between the two anode shunt panels 3 and the bearing base 2, and use The double anode long-acting plasma chemical vapor deposition process makes the front and back surfaces of the lens 5 plated to form a uniform film, and the lens 5 for each preset contact lens has good hydrophilicity and anti-biochemical contamination. function, and utilizes the cross-linking effect between polyethylene glycol methacrylate and N-vinyl-2-rolepyrone, and prolongs the hydrophilic performance time of lens 5 for contact lenses and can reduce protein precipitation on the surface of each preset lens 5, thereby increasing the comfort of wearing the lens 5 of each preset contact lens and prolonging the service life of each preset lens 5.

And the lenses 5 of the above-mentioned plurality of preset contact lenses are then coated by bidirectional anodic plasma chemical vapor deposition, so that the front and back surfaces of the preset lenses 5 form functional groups with hydrophilic functions, and the functional groups will interact with methyl alcohol. Polyethylene glycol based acrylate and N-vinyl-2-rolepyrone are grafted into one, so it can prolong the reorganization of the functional group in order to minimize the surface energy returning to the thermal equilibrium state, thereby extending the hydrophilic time The utility model can improve the adhesion of the coating on the front and back surfaces of each preset lens 5, and increase the stability of the coating.

The above detailed description is only for describing a preferred feasible embodiment of the present invention, but this embodiment is not intended to limit the scope of the patent application of the present invention, and all other equivalent changes and modifications are completed without departing from the technical spirit disclosed in the present invention. Changes should be included in the patent scope covered by the present invention.

To sum up, the above-mentioned bidirectional anodic plasma chemical vapor deposition coating equipment of the present invention can achieve the expected effect and purpose in practical application and implementation. Therefore, the present invention is a research and development with excellent practicability, in order to comply with the invention The application requirements for a patent should be filed in accordance with the law. We hope that your review committee will approve this case as soon as possible to protect the inventor's hard work in research and development. If you have any doubts about this case, please feel free to call or write to us for corrections and advice. , the inventor will do his best to cooperate, and he is very grateful.

1: Base

10: Isolation space

11: Air channel

12: Exhaust channel

13: Valve

14: Electromagnetic stirrer

15: bottle body

151: Heater

2: Bearing pedestal

20: Chamber

3: Anode shunt panel

30: Workspace

4: Lifting mechanism

41: Power Supply Department

42: Insulation body

421: Lifting guide rod

422: Ground

Claims (10)

A bidirectional anodic plasma chemical vapor deposition coating equipment, comprising a base, a bearing pedestal, two anode shunt panels and a lifting mechanism, wherein: the base has a hollow isolation space inside, and a gas transmission channel is arranged on the top; the bearing The pedestal is installed in the isolation space of the base, and a plurality of hollow chambers are arranged on the bearing pedestal; the two anode shunt panels are installed in the isolation space of the base, and are respectively located on two opposite surfaces of the bearing pedestal outside, and the two anode shunt panels are used to cover the two outer sides of the plurality of chambers respectively, so that a working space is formed between the two anode shunt panels and the two outer sides of the plurality of chambers of the bearing pedestal; and one side of the lifting mechanism is assembled Below the bearing pedestal, the other side extends out of the base for adjusting the longitudinal displacement of the bearing pedestal in the isolated space, and the lifting mechanism is provided with a power supply portion for supplying electrical energy to the bearing pedestal, and the pedestal around the lifting mechanism is provided The bottom is provided with one or more air extraction channels. The bidirectional anodic plasma chemical vapor deposition coating equipment as claimed in claim 1, wherein the bearing pedestal comprises a plurality of chambers with wide channels and narrow channels connected through, and the wide channels and narrow channels are connected inside each chamber The position forms an inner shoulder so that the lens of the preset contact lens is horizontally laid out from the wide channel and abuts against the inner shoulder. The bidirectional anodic plasma chemical vapor deposition coating equipment as claimed in claim 1, wherein the area of the two anode shunt panels is equal to or greater than the area of the bearing pedestal, and the two anode shunt panels and the bearing pedestal and the two chambers are Work spaces with the same or different heights are formed between the outer sides. The bidirectional anodic plasma chemical vapor deposition coating equipment as claimed in claim 1, wherein the lifting mechanism comprises an air-tight insulating body pierced through the base, and a metal conductive material is arranged inside the insulating body. The lift guide rod is longitudinally displaced, and the power supply part of the lift mechanism is a radio frequency generator. The bidirectional anodic plasma chemical vapor deposition coating equipment as claimed in claim 1 comprises a base with a hollow isolation space, a support base assembled inside the isolation space of the base, and two anode shunt panels, the interior of the support base It has a plurality of through chambers, and the base is provided with a gas transmission channel and at least one or more valves for liquid vapor input at the top, and at least one or more valves are connected with a bottle body for holding liquid, and At least one or more than one bottle body is provided with a heater and an electromagnetic stirrer, and the two anode shunt panels are located on the outside of the two opposite surfaces of the bearing pedestal, and cover the two outer sides of the plurality of chambers, then the two anode shunts A working space is formed between the panel and the two outer sides of the bearing pedestal. The two anode shunt panels are respectively electrically connected to the power supply part, and a lifting mechanism is assembled under the bearing pedestal. The other side of the lifting mechanism extends out of the base for adjustment. The bearing platform is located in the longitudinal displacement of the isolation space, and the lifting mechanism is provided with a grounding portion for supplying electrical energy to the bearing platform, and the bottom of the pedestal around the lifting mechanism is provided with one or more air extraction channels, wherein the bidirectional anode plasma chemical The steps of vapor deposition coating are as follows: (A01) Clean the base and the inner bearing pedestal, and remove the moisture on the surface of the bearing pedestal; (A02) Clean the isolation space inside the pedestal, the bearing pedestal and the two anode shunt panels; (A03) Put the bearing base into the isolation space of the base; (A04) Evacuate the isolation space of the base through the air extraction channel; (A05) Use the gas transmission channel to inject the working gas into the isolation space of the base, and turn on the power supply (A06) Put the lenses of a plurality of preset contact lenses into the chambers of the pedestal respectively; (A07) Evacuate the isolated space of the base again; (A07) A08) Pour the pretreatment gas into the isolation space of the base, start the power supply part of the lifting mechanism to perform plasma pretreatment on the two anode shunt panels; (A09) Stop injecting gas into the isolation space of the base, and vent the isolation space pressure, and then open the base; (A10) close the base, vacuumize the isolated space of the base, and turn on the heater to heat at least one or more bottles containing liquid, and simultaneously turn on at least one or more bottles. One or more electromagnetic stirrers, and then confirm that the bottle body has been heated; (A11) Inject argon gas into the isolation space of the base through the gas delivery channel, and then add liquid vapor from at least one or more valves, and adjust the argon gas The pressure of the isolation space in the base is unstable, and liquid vapor is added through at least one or more valves to maintain the predetermined pressure; (A12) Turn on the power supply unit to supply power to the two anode shunt panels in the isolation space of the base, And confirm the pressure of the isolation space of the base. If the pressure changes, adjust at least one or more valves for inputting the liquid vapor to maintain the predetermined pressure in the isolation space in the base, and adjust the pressure of each chamber in the bearing platform. The lenses of the preset contact lenses are coated; (A13) In the isolation space of the base, two opposite anode shunt panels are located on the upper and lower sides of the bearing platform, and the bidirectional anodic plasma chemical vapor phase is applied to each preset lens in each chamber. Deposition treatment; (A14) use the power supply part to supply power to the two anode shunt panels, and use the ground part to supply power to the bearing pedestal, the bearing pedestal becomes a cathode electrode plate, and the two anode shunt panels provide plasma power through the power supply part, and can pass through the two anode shunt panels. Each working space between the anode shunt panel and the bearing pedestal forms a bidirectional anode plasma vapor chemical deposition effect, so that the plasma is concentrated in each chamber of the bearing pedestal, and the plasma is deposited on the positive side of each preset lens in each chamber. , at the reverse surface, so that the positive and negative surfaces of each preset lens can be coated at the same time; (A15) After coating, turn off the power supply, at least one or more heaters of the bottle body, and at least one or more electromagnetic Stirrer, and then inject gas into the isolation space of the base through the gas transmission channel; (A16) Confirm that at least one or more bottles containing liquid are cooled to room temperature, and close the valve connecting the at least one or more bottles (A17) Close the argon gas injected into the isolation space of the base by the gas transmission channel, and make the isolation space inside the base back to the normal pressure, and then the lenses of the multiple preset contact lenses that have been coated can be taken out. The bidirectional anodic plasma chemical vapor deposition coating equipment according to claim 5, wherein in the step (A01), the cleaning operation of the inner bearing pedestal of the base is to first clean the bearing pedestal with clean water, and then use isopropyl For cleaning with alcohol, the moisture on the surface of the bearing pedestal is removed by compressing dry air; reverse osmosis water is used to wipe the inner isolation space of the pedestal and the bearing pedestal, and isopropyl alcohol is used to clean the inner isolation space of the pedestal and the bearing pedestal. Wipe at least two times or more; and at least one or more valves on one side of the base are connected with a bottle body for holding liquid, and the at least one or more bottle system is used for holding hydrophilic liquid, the The hydrophilic liquid system is polyethylene glycol methacrylate or N-vinyl-2-rolepyridone; then the flow rate of argon gas injected into the isolation space of the base in this step (A11) is 8sccm, when adjusting the argon gas The flow rate of argon is adjusted to 12sccm; as for the hydrophilic liquid vapor, polyethyl methacrylate is added first, and the pressure is controlled at 1.5~2*10 ^-1 Torr; then N-vinyl-2- Pyridone, the pressure is controlled at 2~3*10 ^-1 Torr; in this step (A12), when the pressure of the isolation space in the base is unstable and floats, and the hydrophilic liquid PEGMA/NVP vapor is added, the predetermined pressure is maintained at 3*10 ^-1 Torr. The bidirectional anodic plasma chemical vapor deposition coating equipment according to claim 5, wherein the vacuum treatment in the steps (A04) and (A07) must confirm that the internal pressure of the isolated space is below 1.0*10 ^-1 Torr; and the In the vacuum treatment of step (A10), it must be confirmed that the internal pressure of the isolated space reaches below 3.0* ^100-2 Torr; and in the step (A10), at least one or more electromagnetic stirrers are activated, and the electromagnetic stirrers are respectively Operates at a speed of 20rpm/sec. The bidirectional anodic plasma chemical vapor deposition coating equipment as claimed in claim 5, wherein the working gas system of this step (A05) is argon and oxygen, and the cleaning operation is performed for 8 minutes with the plasma pressure: 60W; The gas system injected into the isolation space of the base in the steps (A08) and (A09) is argon, and the predetermined time is 10 to 30 minutes; and the processing gas before the step (A08) is argon and oxygen; In the steps (A05), (A08), (A12), (A14), the power supply part of the lifting mechanism is activated to perform plasma processing or power supply, and the power supply part is a radio frequency generator; then the power supply part of the step (A05) is The radio frequency generator is set to 120W, and the processing time is 5-10 minutes; and step (A08) starts the elevator The power supply part of the structure conducts plasma treatment on the two anode shunt panels, sets the RF generator to 40W for 16 minutes, and confirms that the pressure of the isolation space in the base is 300mTorr; as for the predetermined pressure maintained in the isolation space in the base is 300-350mTorr; this step (A09) depressurizes the isolation space in the base, which is to depressurize the isolation space to 1 atm, and open the base for 1 to 3 minutes. The bidirectional anodic plasma chemical vapor deposition coating equipment according to claim 5, wherein the step (A06) is to place the lenses of a plurality of preset contact lenses into each chamber of the bearing base in a horizontal row, and the The bearing pedestal is provided with a plurality of chambers which are respectively connected with a wide channel and a narrow channel, and at the connecting position of the wide channel and the narrow channel inside each chamber, the lenses for each preset contact lens are respectively connected from each wide channel. Lay horizontally against the inner shoulders. The bidirectional anodic plasma chemical vapor deposition coating equipment according to claim 5, wherein the gas system injected into the isolation space of the susceptor in this step (A15) is argon for 15 minutes; the susceptor of this step (A17) The internal isolation space is returned to normal atmospheric pressure: 1kg/cm2.

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