TWM615604U - Bidirectional anode plasma chemical vapor deposition coating apparatus - Google Patents

Abstract

This creation is about a two-way anode plasma chemical vapor deposition coating equipment, which is located in the hollow isolation space inside the base, with a gas transmission channel on the top, and a bearing pedestal is installed in the isolation space, and the bearing pedestal is equipped with A plurality of hollow chambers, and two anode shunt panels and power supply parts are installed outside the two opposite surfaces of the bearing pedestal. The two anode shunt panels are respectively shielded on the two outer sides of the plurality of chambers, and the opposite inner sides form working spaces respectively , In addition, one side of the lifting mechanism is assembled under the bearing pedestal, and the other side of the lifting mechanism is extended out of the base to adjust the longitudinal displacement of the bearing pedestal in the isolated space, and the lifting mechanism is provided with a grounding portion for supplying power to the bearing pedestal , And at the bottom of the base around the lifting mechanism is provided with one or more air extraction channels to achieve the purpose of uniform coating on the concave and convex surfaces of the contact lens.

Description

Bidirectional anode plasma chemical vapor deposition coating equipment

This creation provides a two-way anode plasma chemical vapor deposition coating equipment, especially the equipment for coating the concave and convex surfaces of contact lenses. It is equipped with a bearing pedestal and a two-anode shunt panel inside the base, and the bearing pedestal The multiple chambers of the contact lens are built into the lens of the contact lens to achieve the purpose of the lens coating procedure of the contact lens, and to extend the hydrophilic time and anti-contamination function of the contact lens.

By the way, with the development and innovation of various electronic and electrical products, it has brought people a lot of convenience in daily life and work, especially the advent of a large number of 3C electronic products, which has led to the popularization of wireless communication and Internet applications. Many people are indulging in the use of 3C electronic products, and a large number of 3C electronic products are used for a long time. For example, students, young people, office workers, or some middle-aged and elderly people, almost regardless of men and women, young and old, and covering the scope It is quite extensive, which leads to the common sight of people with lowered heads in life, and causes many people's eyesight loss, injury and deterioration, etc., which are becoming more and more serious. It also directly leads to a rapid increase in the myopia population in the society, and the use of glasses and contact lenses. Also increase.

In order to solve the inconvenience and trouble caused by myopia, people will wear glasses, contact lenses, orthokeratology lenses, etc. to correct their vision or correct them through corneal myopia surgery. Generally, the commonly used contact lens lenses are usually manufactured by manufacturers. On the surface of the contact lens Plasma surface modification treatment is implemented to improve the hydrophilicity of contact lenses and increase the comfort of wearing contact lenses. However, the hydrophilicity of contact lenses can only be maintained for about 1 to 2 weeks. The main factors include the following items:

(1) During and after the plasma surface modification treatment of the contact lens lens, the chemical groups generated will undergo re-arrangement in order to minimize the surface energy and return to a state of thermal equilibrium. , Thereby generating a hydrophobic recovery phenomenon.

(2) When most of the contact lens lenses after plasma surface modification treatment are exposed to air, new oxidation and degradation reactions will occur on the surface of the lens, which will result in hydrophobic recovery.

(3) In order to achieve a stable thermal equilibrium state for the contact lens lens with a lower surface energy, a small part of the low-molecular oxidized molecules will move to the inside of the lens, thereby causing the phenomenon of hydrophobic recovery.

(4) Unmodified low-molecular-weight species and macromolecules will move from the inside of the contact lens to the surface, thus promoting the degree of hydrophobic recovery and the formation of a low-molecular-weight layer with low surface energy on the surface.

(5) Reorientation of the polar chemical groups on the surface of the contact lens.

(6) The relaxation of the surface roughness is not improved by plasma surface modification.

Based on the above factors, after one to two weeks of plasma surface modification treatment, the contact angle of the contact lens will gradually increase and become a hydrophobic surface, and it is about 10 to 14 days. Will revert to the lens of the contact lens that has not been treated with plasma With the same contact angle, when the wearer wears a hydrophobic contact lens lens, the wearer’s eyeball will feel uncomfortable foreign body sensation, which will affect the wearer’s willingness to continue wearing the contact lens; and The lenses of hydrophobic contact lenses are also easy for deposits to adhere and stick. The deposits on the lenses will not only affect the wearer’s vision, the comfort of wearing contact lenses and the wettability of the lens surface, but also the deposits. The protein deposits are also easy to become a breeding ground for bacterial growth, and when the deposits on the surface of the contact lens lens degenerate over time, it may induce the body's immune response and cause Giant Papillary Conjunctivitis (Giant Papillary Conjunctivitis) , Acute red eye and other signs of corneal infection, make the wearer unable to wear contact lenses; in addition, because the deposits on the lenses of the contact lenses cannot be completely removed by contact lens cleaners, the deposits will disappear after a period of time It will be combined with the material of the lens of the contact lens, it will shorten the use time of the lens of the contact lens, and cause the damage of the lens.

Therefore, how to solve the problems and troubles in the manufacturing and wearing of the current contact lens lenses, the formation of deposits when wearing contact lenses and the troubles and deficiencies in the short hydrophilic time, etc., are related to engaging in this industry. Manufacturers desperately want to study the direction of improvement.

Therefore, in view of the above-mentioned problems and deficiencies, the creators collected relevant information, evaluated and considered in many ways, and based on the accumulated years of experience in this industry, through continuous trials and modifications, they began to design this kind of bidirectional anode plating long-lasting effect. The new patent of plasma chemical vapor deposition method for coating contact lens equipment was born.

The main purpose of this creation is the two-way anode plasma chemical vapor deposition coating equipment, which is located in the hollow isolation space inside the base, with a gas transmission channel on the top, and a bearing pedestal is installed in the isolation space. The pedestal is provided with a plurality of hollow chambers, and the carrying platform Two anode shunt panels and power supply parts are installed on the outside of the two opposite surfaces of the seat. The two anode shunt panels are respectively shielded on the two outer sides of the plurality of chambers, and the opposite inner sides form working spaces respectively. In addition, one side of the lifting mechanism is assembled on the bearing Below the pedestal, the other side of the lifting mechanism extends out of the base to adjust the longitudinal displacement of the bearing pedestal in the isolated space, and the lifting mechanism is provided with a grounding portion for supplying electric power to the bearing pedestal, and is located at the base around the lifting mechanism One or more air extraction channels are provided at the bottom to achieve the purpose of uniform coating on the concave and convex surfaces of the contact lens, and to extend the hydrophilic performance time of the contact lens and reduce the precipitation of protein on the surface of the lens, and Reduce the surface roughness, thereby increasing the comfort of wearing contact lenses and extending the service life of the lenses.

Another purpose of this creation is that the bearing pedestal is provided with a plurality of chambers, each chamber is in the shape of a wide channel and a narrow channel connecting through, and an inner shoulder is formed at the connecting position of each wide channel and narrow channel, which can be used for pre-preparation. The contact lens is placed horizontally from the wide channel and abuts against the inner shoulder; and the area of the two-anode shunt panel can be equal to or larger than the area of the bearing pedestal, and the two-anode shunt panel and the bearing pedestal, multiple chambers The working spaces of the same or different heights are formed between them.

Another purpose of this creation is that the lifting mechanism is provided with an airtight insulating body for passing through the base, and then a lifting guide rod made of metal conductive material and longitudinally displaced is arranged inside the insulating body One side of the lifting guide rod extends into the isolation space of the base and is combined with the bottom of the bearing platform, and the other side of the lifting guide rod extends out of the base and is electrically connected to the grounding part, and the two anode shunt panel is provided The power supply part is a radio frequency generator, which induces plasma to be generated from the two-anode shunt panel to the bearing pedestal (cathode electrode plate) and coated on the contact lens.

Another purpose of this creation is to carry out long-lasting bidirectional anode plating on the contact lens The steps of plasma chemical vapor deposition method are: cleaning the bearing pedestal inside the pedestal and removing the moisture on the surface of the bearing pedestal; cleaning the isolation space inside the pedestal, the bearing pedestal and the two-anode shunt panel; placing the bearing pedestal in Inside the isolated space of the base; vacuumize the isolated space of the base through the air extraction channel; use the gas transmission channel to inject the gas (working gas) that generates plasma ions into the isolated space of the base, and turn on the radio frequency generator to Clean the interior of the isolated space; place the lenses of a plurality of preset contact lenses into the chambers of the pedestal; vacuumize the isolated space of the pedestal again; use the gas channel to help generate plasma in the isolated space of the pedestal After the pressure in the isolation space inside the base stabilizes, turn on the RF generator to start the pretreatment of the contact lens lenses. After the pretreatment is completed, turn off the generator; turn off the gas flow and turn off the exhaust Motor, and open the base; when the purpose of aeration is reached, close the base again to evacuate the isolated space of the base, and turn on the heater of the bottle containing the liquid connected to at least one or more valves , Turn on the electromagnetic stirrer at the same time, and after confirming that the bottle is heated, inject working gas into the isolated space of the base, and at the same time confirm that the pressure in the isolated space is stable, and then add at least one or more liquid vapor in the bottle to the base In the isolated space, and control the pressure in the isolated space to coat the lens of the contact lens, the bearing pedestal is the cathode electrode plate, and the two anode shunt panels above and below it use the power supply as the plasma power through the two anode shunt panels and The bearing pedestal conducts bidirectional anode plasma chemical vapor deposition coating on the contact lens lenses in each cavity. When the coating operation is over, turn off the generator, then turn off the heater and electromagnetic stirrer of the bottle body, and confirm that the bottle body is cooled to At room temperature, close at least one or more valves, close the air extraction channel at the bottom of the base, adjust the pressure of the isolation space inside the base to normal pressure, and then remove the bearing platform from the isolation space, Take out the lens of the contact lens in the chamber.

1: pedestal

10: Isolated space

11: Gas transmission channel

12: Exhaust channel

13: Valve

14: Electromagnetic stirrer

15: Bottle body

151: heater

2: Bearing pedestal

20: Chamber

201: wide channel

202: narrow channel

203: inner shoulder

3: Anode shunt panel

30: Work space

4: Lifting mechanism

41: Power Supply Department

42: Insulating body

421: Lifting guide rod

422: Grounding part

5: Lens

[Picture 1] is the three-dimensional appearance of this creation.

[Picture 2] is the three-dimensional appearance of the creative bearing pedestal.

[Picture 3] is a partial cross-sectional view of this creative bearing pedestal.

[Picture 4] is the flow chart (1) of this creative coating operation.

[Picture 5] is the flow chart (2) of this creative coating operation.

[Picture 6] is the flow chart (3) of this creative coating operation.

In order to achieve the above-mentioned purposes and effects, the technical means used in this creation, its structure, and the method of implementation, etc., are drawn to illustrate the characteristics and functions of the preferred embodiment of this creation in detail as follows, for the benefit of a complete understanding.

Please refer to Figures 1, 2 and 3, which are the three-dimensional appearance of this creation, the three-dimensional appearance of the bearing pedestal, and the partial cross-sectional view of the bearing pedestal. It can be clearly seen from the figures that this creation is two-way anodized. Long-term plasma chemical vapor deposition method for coating on contact lens equipment includes a base 1, a bearing stand 2, a two-anode shunt panel 3, and a lifting mechanism 4. Among them:

The base 1 has a hollow isolation space 10 inside, a gas delivery channel 11 at the top, at least one or more air extraction channels 12 at the bottom, and at least one or more delivery channels on at least one side. Liquid valve 13 and electromagnetic stirrer 14, and at least one or more valves 13 are connected with a bottle 15 for holding liquid, and at least one or more bottles 15 are provided with heaters 151 and at least one or More than one electromagnetic stirrer 14 can be used to heat at least one or more bottles 15 by at least one or more heaters 151 reason.

The bearing pedestal 2 is installed in the isolated space 10 of the base 1, and the bearing pedestal 2 is provided with a plurality of hollow chambers 20.

The two-anode shunt panels 3 are installed in the isolation space 10 of the base 1 and are respectively located outside the two opposite surfaces of the bearing pedestal 2, and the two-anode shunt panels 3 are respectively shielded on the two outsides of the plurality of chambers 20, A working space 30 is formed between the two-anode shunt panel 3 and the bearing pedestal 2 and the plurality of chambers 20 respectively.

One side of the lifting mechanism 4 is assembled under the bearing pedestal 2, and the other side extends outside the isolation space 10 of the base 1, and is located on the side of at least one or more air extraction channels 12 (the lifting mechanism 4 and the base 1 This is a common knowledge, and will not be repeated here.) It is used for the lifting mechanism 4 to adjust the longitudinal displacement of the bearing pedestal 2 in the isolation space 10, and the lifting mechanism 4 A power supply unit 41 for the electric energy of the two-anode shunt panel 3 is provided.

The above-mentioned bearing pedestal 2 includes a plurality of chambers 20, and each chamber 20 is in the shape of a wide channel 201 and a narrow channel 202 that are connected through each other, and an inner shoulder is formed at the joint position of the wide channel 201 and the narrow channel 202 inside each chamber 20. The part 203 is provided for the lenses 5 of a plurality of preset contact lenses to be placed horizontally and horizontally in each wide channel 201, and abut against each inner shoulder 203.

Moreover, the area of the two-anode shunt panel 3 is equal to or larger than the area of the bearing pedestal 2, and the two-anode shunt panel 3 and the bearing pedestal 2 form a working space 30 of the same or different heights respectively.

In addition, the above-mentioned lifting mechanism 4 includes an air-tight insulating body 42 that penetrates through the base 1, and a lifting guide rod 421 made of metal conductive material is provided inside the insulating body 42. The lifting guide rod 421 can be Longitudinal displacement, and is provided with a grounding portion 422 for supplying electric energy to the bearing pedestal 2, and The power supply unit 41 of the lifting mechanism 4 may be a radio frequency generator or the like.

In addition, the lens 5 of the plurality of preset contact lenses can be polymethylmethacrylate (PMMA), fluorosilicone acrylate (FSA), breathable semi-hard lens, polyhydroxyethyl methacrylate, GMMA , Silicone rubber, etc. or other materials for making the lens 5 of the preset contact lens, etc.

Please refer to Figures 1, 2, 3, 4, 5 and 6, which are the three-dimensional appearance of this creation, the three-dimensional appearance of the bearing pedestal, the partial cross-sectional view of the bearing pedestal, and the flow chart of the coating operation (1), The flow chart of the coating operation (2) and the flow chart of the coating operation (3) can be clearly seen from the figure. The steps of the above-mentioned contact lens for bidirectional anode plasma chemical vapor deposition coating are:

(A01) Clean the base 1 and the internal bearing pedestal 2 respectively, and remove the residual moisture on the surface of the bearing pedestal 2.

(A02) Clean the internal isolation space 10 of the base 1, the bearing pedestal 2 and the two-anode shunt panel 3.

(A03) Put the bearing pedestal 2 into the isolated space 10 of the base 1.

(A04) Vacuum processing is performed on the isolated space 10 of the susceptor 1 through the suction channel 12.

(A05) Use the gas channel 11 to inject working gas into the isolated space 10 of the base, and turn on the power supply 41 (which can be a radio frequency generator) to generate plasma ions in the isolated space 10 for internal cleaning.

(A06) Put the lenses 5 of the plural preset contact lenses into each chamber 20 of the bearing pedestal 2, and supply the plural preset lenses 5 to be horizontal in the wide passage 201 of each chamber 20 respectively When placed horizontally, each lens 5 abuts against the inner shoulder 203 of each cavity 20 respectively.

(A07) Vacuum the isolated space 10 of the base 1 again.

(A08) Pass the pretreatment gas into the isolated space 10 of the base 1, and start the power supply unit 41 to perform plasma pretreatment on the two-anode shunt panel 3.

(A09) Stop injecting gas into the isolation space 10 of the susceptor 1, release the pressure of the isolation space 10, and then turn on the susceptor 1.

(A10) The base 1 is closed, and the isolated space 10 of the base 1 is vacuumed, and the heater 151 is turned on to heat at least one or more bottles 15 containing liquid, and at least one or more bottles 15 are turned on at the same time The electromagnetic stirrer 14 confirms that the bottle 15 has been heated.

(A11) Argon gas is injected into the isolation space 10 of the base 1 from the gas channel 11, and then hydrophilic liquid vapor is added from at least one or more valves 13 and the flow rate of argon is adjusted. The base 1 is isolated The pressure in the space 10 is unstable, and hydrophilic liquid vapor is added through at least one or more valves 13 to maintain a predetermined pressure.

(A12) Turn on the power supply unit 41 to supply power to the two anode shunt panels 3 in the isolation space 10 of the base 1, and confirm the pressure of the isolation space 10 of the base 1. If the pressure changes, adjust at least one of the input liquid vapor or More than one valve 13 keeps the isolation space 10 in the base 1 at a predetermined pressure, and coats the lenses 5 of the preset contact lenses in the chambers 20 of the pedestal 2.

(A13) Using the two opposite anode shunt panels 3 located above and below the bearing pedestal 2 in the isolated space 10 of the base 1, simultaneously perform bidirectional anode plasma chemical vapor deposition treatment on each preset lens 5 in each chamber 20 .

(A14) Use the power supply unit 41 to supply power to the two-anode shunt panel 3, and the grounding portion 422 makes the bearing stand 2 become a cathode electrode plate, and the two-anode shunt panel 3 provides plasma power through the power supply unit 41, which can pass through the two anodes Between the shunt panel 3 and the bearing pedestal 2 (cathode electrode plate), a bidirectional anode plasma vapor chemical deposition is formed, so that the plasma is concentrated in each chamber 20 of the bearing pedestal 2, and the power supply slurry is deposited in each chamber 20 The front and back surfaces of each preset lens 5 inside are provided for simultaneous coating treatment on the front and back surfaces of each preset lens 5.

(A15) After coating, turn off the power supply 41, at least one or more heaters 151 of the bottle body 15, and at least one or more electromagnetic stirrers 14, and then pass the gas channel 11 to the isolated space 10 of the base 1 Inject gas.

(A16) Confirm that the temperature of at least one or more bottles 15 containing the liquid is cooled to room temperature, and close the valve 13 connected to the at least one or more bottles 15.

(A17) Close the argon gas injected into the isolated space 10 of the base 1 by the gas channel 11, and return the pressure of the isolated space 10 in the base 1 to the normal pressure (normal atmospheric pressure: 1kg/cm ² ). The lens 5 of each preset contact lens with coating.

In the above-mentioned steps, the base 1 can be connected to at least one or more valves 13 on one side with a bottle 15 for holding liquid, and the at least one or more bottle 15 is for holding a hydrophilic liquid. The hydrophilic liquid system can be a hydrophilic liquid such as Poly(ethylene glycol) Methacrylate (PEGMA) or N-Vinylpyrrolidone (NVP) .

In the above step (A01), the cleaning operation of the base 1 and the internal bearing pedestal 2 is to first clean the bearing pedestal 2 with clean water, and then use isopropy alcohol [Isopropy Alcohol, IPA] for cleaning, and then by compression Clean Dry Air [Clean Dry Air, CDA] Remove the moisture on the surface of the bearing pedestal 2; and use reverse osmosis [RO] water to wipe the internal isolation space 10 and the bearing pedestal 2 of the pedestal 1, and use isopropyl alcohol [IPA] to wipe the internal isolation space 10 and the bearing of the pedestal 1 The pedestal 2 is wiped at least twice or more than twice.

For the vacuum treatment in the above steps (A04) and (A07), it must be confirmed that the internal pressure of the isolation space 10 in the base 1 is ^{below 1.0 *} 10 ^-1 Torr; and the vacuum treatment in this step (A10) must be confirmed The internal pressure of the isolation space 10 in the base 1 is ^{below 3.0 *} 10 ^-2 Torr.

The working gas system of this step (A05) can be argon (Ar- _{10sccm) and oxygen (O 2} -20sccm) and other gases, and use plasma power: 60W for cleaning for 8 minutes; In the steps (A08) and (A09), the gas system injected into the isolated space 10 of the base 1 can be argon (Ar-30sccm), and the predetermined time is 10-30 minutes, preferably 20 minutes.

In this step (A06), the lenses 5 of the plurality of preset contact lenses are placed in the respective chambers 20 of the bearing pedestal 2 in a horizontal row direction, and the plural cavities 20 of the bearing pedestal 2 are respectively provided with wide passages 201 , The narrow channel 202 is connected through the shape, and the inner shoulder 203 is provided at the connection position of the wide channel 201 and the narrow channel 202 inside each chamber 20, so that the lens 5 of the preset contact lens can be placed horizontally in the wide channel 201, Abut against the inner shoulder 203.

The processing gas system before this step (A08) can be argon (Ar-9sccm) and oxygen (O ₂ -36sccm) and other gases; and this step (A05), (A08), (A12), (A14) starts the lifting mechanism The power supply unit 41 of 4 performs plasma processing or power supply. The power supply unit 41 can be an RF generator power; then the RF generator of the power supply unit 41 in this step (A05) is set to 120W, and the processing time can be 5 -10 minutes, preferably 6 minutes; and step (A08) turn on the power supply 41 of the lifting mechanism 4 to perform plasma treatment on the two-anode shunt panel 3, set the radio frequency generator to 40W for 16 minutes, and confirm the base The pressure of the isolation space 10 in the base 1 is 300 mTorr; the predetermined pressure maintained by the isolation space 10 in the base 1 is 300-350 mTorr.

In this step (A09), the pressure of the isolation space 10 in the base 1 is relieved, and the pressure of the isolation space 10 is relieved to 1 atm, and the base 1 can be opened for about 1 to 3 minutes.

In this step (A10), at least one or more electromagnetic stirrers 14 are activated, and each electromagnetic stirrer 14 is operated at a speed of 20 rpm/sec (revolutions per second).

This step (A11) injects argon gas (Ar-8sccm) into the isolated space 10 of the base 1, when adjusting the flow rate of argon gas, adjust the argon gas to (Ar-12sccm); as for the hydrophilic liquid vapor, add it first Poly(ethylene glycol) methacrylate [PEGMA, Poly(ethylene glycol)methacrylate], the pressure is controlled at 1.5~2 ^* 10 ^-1 Torr; then N-Vinylpyrrolidone (NVP) is added, the pressure is Control at 2~3 ^* 10 ^-1 Torr; in this step (A12), when the pressure in the isolation space 10 in the base 1 is unstable and floating, when the hydrophilic liquid PEGMA/NVP vapor is added, the predetermined pressure is maintained at 3 ^* 10 ^-1 Torr; In addition, the gas system injected into the isolated space 10 of the susceptor 1 in this step (A15) is argon (Ar-70 sccm) for 15 minutes.

Through the above-mentioned steps, the lens 5 of the plural preset contact lenses is processed and coated. Because polyethylene glycol methacrylate and N-vinyl-2-pyrrolidone pass through between the two-anode shunt panel 3 and the bearing pedestal 2, use The double anode long-acting plasma chemical vapor deposition process allows the front and back surfaces of the lens 5 to be coated to form a uniform film, and the lens 5 for each preset contact lens has good hydrophilicity and resistance to biochemical contamination Function, and the use of polyethylene glycol methacrylate and N-vinyl-2-pyrrolidone will cross-link each other, and the hydrophilic performance time of the lens 5 for contact lenses is prolonged, and protein precipitation can be reduced. The surface of each preset lens 5 can increase the comfort of wearing the lens 5 of each preset contact lens and the effect of extending the service life of each preset lens 5 and so on.

And the lenses 5 of the plural preset contact lenses are then coated by bidirectional anode plasma chemical vapor deposition, so that the front and back surfaces of each preset lens 5 form a functional group with hydrophilic function, and the functional group will interact with the former. Polyethylene glycol acrylate and N-vinyl-2-pyrrolidone are grafted into one body, so the functional group can be extended to minimize the surface energy returning to the thermal equilibrium state and recombine, thereby extending the hydrophilic time It can improve the adhesion of the coating on the front and back of each preset lens 5, and increase the stability of the coating.

The above detailed description is only for a better feasible embodiment of this creation, but this embodiment is not used to limit the scope of patent application of this creation, for all other equal changes and modifications completed without departing from the spirit of the technique disclosed in this creation All changes shall be included in the scope of patents covered by this creation.

In summary, the above-mentioned two-way anode plasma chemical vapor deposition coating equipment of this creation can indeed achieve the expected effect and purpose when it is actually applied and implemented. Therefore, this creation is a research and development with excellent practicality and is in line with the new model. For the patent application requirements, I filed an application in accordance with the law. I hope that your reviewer will approve this case as soon as possible to protect the creator's hard research and development and creation. If the bureau and your reviewer have any doubts about this case, please feel free to call or write to correct us. , The creators must do their best to cooperate and feel extremely virtuous.

1: pedestal

10: Isolated space

11: Gas transmission channel

12: Exhaust channel

13: Valve

14: Electromagnetic stirrer

15: Bottle body

151: heater

2: Bearing pedestal

20: Chamber

3: Anode shunt panel

30: Work space

4: Lifting mechanism

41: Power Supply Department

42: Insulating body

421: Lifting guide rod

422: Grounding part

Claims (7)

A two-way anode plasma chemical vapor deposition coating equipment, which includes a base, a bearing stand, a two-anode shunt panel and a lifting mechanism, wherein: The base has a hollow isolation space inside, and a gas transmission channel is provided on the top; The bearing pedestal is installed in the isolated space of the base, and the bearing pedestal is provided with a plurality of hollow chambers; The two-anode shunt panels are installed in the isolation space of the base and are respectively located outside the two opposite surfaces of the bearing pedestal, and the two-anode shunt panels are respectively shielded on the two outer sides of the plurality of chambers, and are located on the two-anode shunt panel To form working spaces respectively between the two outer sides of the plurality of chambers of the bearing pedestal; and One side of the lifting mechanism is assembled under the bearing pedestal, and the other side extends outside the base to adjust the longitudinal displacement of the bearing pedestal in the isolated space. The lifting mechanism is provided with a power supply unit for supplying electric energy to the bearing pedestal. One or more air extraction channels are arranged at the bottom of the base around the lifting mechanism. The two-way anode plasma chemical vapor deposition coating equipment according to claim 1, wherein the bearing pedestal includes a plurality of chambers in the shape of a wide channel and a narrow channel connected through, and the wide channel and the narrow channel are connected in each chamber The position forms an inner shoulder, so that the lens of the preset contact lens is placed horizontally from the wide channel and abuts against the inner shoulder. The bidirectional anode plasma chemical vapor deposition coating equipment according to claim 1, wherein the area of the two anode splitter panel is equal to or greater than the area of the bearing pedestal, and the two anode splitter panel, the bearing pedestal, and the outer side of the plurality of chambers The working spaces of the same or different heights are formed between them. The bidirectional anode plasma chemical vapor deposition coating equipment according to claim 1, wherein the lifting mechanism includes an airtight insulating body pierced through the base, and a metal conductive material is arranged inside the insulating body And it is a vertical displacement lifting guide rod, and the power supply part of the lifting mechanism is a radio frequency generator. The bidirectional anode plasma chemical vapor deposition coating equipment according to claim 1, wherein the base of the hollow isolation space is provided with a gas transmission channel and at least one or more valves for liquid vapor input at the top, and at least One or more valves are connected to the bottle body that holds the liquid, and at least one or more bottles are provided with heaters and electromagnetic stirrers, and the bearing pedestal and two anode shunts are assembled in the isolated space of the base Panel, the carrying platform has a plurality of through-shaped chambers inside, and the two anode shunt panels are located outside the two opposite surfaces of the carrying platform, and cover the two outer sides of the plurality of chambers, then on the two anode shunt panel and the carrying platform A working space is formed between the two outer sides of the two anode shunt panels respectively. The two anode shunt panels are electrically connected to the power supply part, and then a lifting mechanism is assembled under the bearing pedestal. The vertical displacement in the space, and the lifting mechanism is provided with a grounding portion for supplying electric power to the bearing pedestal, and the bottom of the base around the lifting mechanism is provided with one or more air extraction channels. The two-way anode plasma chemical vapor deposition coating equipment according to claim 5, wherein at least one or more valves on one side of the base are connected to a bottle body for holding liquid, and the at least one or more bottle systems For holding hydrophilic liquid, the hydrophilic liquid system is polyethylene glycol methacrylate [Poly(ethylene glycol) Methacrylate, PEGMA] or N-Vinylpyrrolidone (N-Vinylpyrrolidone, NVP) ). The bidirectional anode plasma chemical vapor deposition coating equipment described in claim 5, which The grounding part of the lifting mechanism is electrically connected to the power supply part.

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