CN217474003U - Two-way anode plasma chemical vapor deposition coating equipment - Google Patents
Two-way anode plasma chemical vapor deposition coating equipment Download PDFInfo
- Publication number
- CN217474003U CN217474003U CN202121054438.XU CN202121054438U CN217474003U CN 217474003 U CN217474003 U CN 217474003U CN 202121054438 U CN202121054438 U CN 202121054438U CN 217474003 U CN217474003 U CN 217474003U
- Authority
- CN
- China
- Prior art keywords
- bearing pedestal
- base
- panels
- lifting mechanism
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model provides a two-way positive pole plasma chemistry vapor deposition coating equipment, it is at the inside cavity form isolation space of base, the top is equipped with the gas transmission passageway, and install the bearing pedestal in isolation space, this bearing pedestal is equipped with the cavity of plural number cavity form, and in two relative surface outside of bearing pedestal install two positive pole reposition of redundant personnel panels and power supply portion again, two positive pole reposition of redundant personnel panels then respectively the shade in the outside of plural number cavity, and relative inboard forms the operation space respectively, assemble elevating system one side in bearing pedestal below in addition, the elevating system opposite side extends the base outside, supply to adjust the longitudinal displacement that the bearing pedestal is located isolation space, and be equipped with the grounding part of supplying bearing pedestal electric energy in elevating system, and be equipped with one or more than one air exhaust channel in the peripheral base bottom of this elevating system, reach in the concave of contact lens, The convex surface is evenly coated.
Description
Technical Field
The utility model relates to a two-way positive pole plasma chemistry vapor deposition coating equipment especially indicates to the equipment that carries out the coating film to the concave, convex surface of contact lens, installs bearing pedestal and two positive poles reposition of redundant personnel panels inside the base, and puts into the lens of contact lens in the plural cavity of bearing pedestal to reach the purpose of carrying out the lens coating procedure of contact lens, and prolong the hydrophilicity time of contact lens, anti function that stains.
Background
With the research and development of various electronic and electrical products, people are convenient and fast in daily life and work, especially, the popularization of wireless communication and internet and other applications is caused due to the mass appearance of 3C electronic products, so that many people are drowned in the world using 3C electronic products, and 3C electronic products are widely applied for a long time, so that students, teenagers, office workers, or partial middle-aged and old people are almost not male and female, old and young, and the coverage range is quite wide, thereby deriving the common low-head scenery in life, causing the situations of eye vision loss, injury degradation and the like of many people to be serious, directly causing the sharp rise of the shortsighted population in the society, and increasing the use population of glasses and contact lenses.
In order to solve the inconvenience and disturbance caused by myopia, people wear glasses, contact lenses, plastic lenses, etc. to correct vision or perform correction through corneal myopia surgery, etc., the general contact lenses are manufactured by performing plasma surface modification treatment on the surface of the contact lenses to improve the hydrophilicity of the contact lenses and increase the comfort of wearing the contact lenses, but the hydrophilicity of the general contact lenses can only be maintained for about 1-2 weeks, and the main factors include the following items:
the chemical groups generated during and after the plasma surface modification treatment of the contact lens are recombined (re-arrangement) in order to minimize the surface energy and return to a thermal equilibrium state, thereby generating a hydrophobic recovery phenomenon.
Secondly, when the surface of the contact lens is subjected to plasma surface modification treatment, most of the surface of the contact lens is subjected to air contact, new oxidation and degradation reactions are generated on the surface of the contact lens, and thus, a hydrophobicity recovery phenomenon is generated.
Third, in order to achieve a stable thermal equilibrium state at a low surface energy of the lens of the contact lens, a small portion of low-molecular oxidized molecules move to the inside of the lens, thereby generating a hydrophobic recovery phenomenon.
(IV) unmodified low molecular weight species (species) and macromolecules (macromolecules) migrate from the interior of the lens to the surface of the contact lens, thus promoting the degree of hydrophobicity recovery and the formation of low surface energy, low molecular layers on the surface.
And (V) the polar chemical groups on the lens surface of the contact lens are redirected.
(VI) the substrate surface roughness (the relaxation of the surface roughness) is not improved by plasma surface modification.
Based on the above factors, after the lens of the contact lens is subjected to the plasma surface modification treatment for one to two weeks, the contact angle of the surface of the lens gradually increases to become a hydrophobic surface, and the contact angle of the lens of the contact lens returns to the same contact angle as that of the lens of the contact lens without the plasma treatment at about 10 to 14 days, so that when the lens of the contact lens with the hydrophobic surface is worn by a wearer, the eyeball of the wearer feels uncomfortable foreign body sensation, and the intention of the wearer to continuously wear the contact lens is influenced; the deposits on the lens not only affect the vision of the wearer, the comfort level of the lens wearing the contact lens and the wettability of the surface of the lens, but also the protein deposits in the deposits can easily become a hotbed for the growth of bacteria, and when the protein deposits on the surface of the contact lens are denatured along with time, the protein deposits can possibly induce the immunoreaction of the human body, further cause the signs of corneal infection such as Giant Papillary Conjunctivitis (acute red eye) and the like, and lead the wearer to be unable to wear the contact lens; in addition, since the deposits on the lenses of the contact lenses cannot be completely removed by the contact lens cleaning agent, the deposits can be combined with the materials of the lenses of the contact lenses after a period of time, thereby shortening the service time of the lenses of the contact lenses and causing damage to the lenses.
Therefore, it is a direction of urgent research and improvement by related manufacturers to solve the problems and troubles in the manufacturing and wearing of the contact lenses, the troubles and shortcomings of the formation of precipitates and the short period of hydrophilicity during the wearing of the contact lenses.
SUMMERY OF THE UTILITY MODEL
Therefore, in view of the above problems and disadvantages, the present invention provides a method for manufacturing a bi-directional anode plasma chemical vapor deposition coating apparatus, which comprises collecting relevant data, evaluating and considering the data in multiple ways, and developing and modifying the data according to years of experience accumulated in the industry.
In order to achieve the above object, the utility model adopts the following technical scheme:
the utility model provides a two-way positive pole plasma chemical vapor deposition coating equipment which characterized in that, includes base, bears pedestal, two positive pole reposition of redundant personnel panels and elevating system, wherein:
the base is internally provided with a hollow isolation space, and the top of the base is provided with a gas transmission channel;
the bearing pedestal is arranged in the isolated space of the base and is provided with a plurality of hollow chambers;
the two anode shunt panels are arranged in the isolation space of the base and are respectively positioned outside the two opposite surfaces of the bearing pedestal, the two anode shunt panels are respectively covered on the two outer sides of the plurality of cavities, and an operation space is respectively formed between the two anode shunt panels and the two outer sides of the plurality of cavities of the bearing pedestal; and
one side of the lifting mechanism is assembled below the bearing pedestal, the other side of the lifting mechanism extends out of the base to adjust the longitudinal displacement of the bearing pedestal in the isolation space, a power supply part for supplying the bearing pedestal with electric energy is arranged on the lifting mechanism, and more than one air exhaust channel is arranged at the bottom of the base on the periphery of the lifting mechanism.
The bidirectional anode plasma chemical vapor deposition coating equipment comprises: the bearing pedestal comprises a plurality of chambers which are in a shape of connecting and penetrating wide channels and narrow channels, and inner shoulders are formed at the connecting positions of the wide channels and the narrow channels inside each chamber, so that the lenses of the preset contact lenses are horizontally placed in the wide channels and are abutted against the inner shoulders.
The bidirectional anode plasma chemical vapor deposition coating equipment comprises: the area of the two anode shunt panels is equal to or larger than that of the bearing pedestal, and operation spaces with the same or different heights are respectively formed between the two anode shunt panels and the bearing pedestal and between the two outer sides of the plurality of chambers.
The bidirectional anode plasma chemical vapor deposition coating equipment comprises: the lifting mechanism comprises an airtight insulation body penetrating through the base, a lifting guide rod which is made of metal conductive materials and longitudinally displaces is arranged in the insulation body, and a power supply part of the lifting mechanism is a radio frequency generator.
The bidirectional anode plasma chemical vapor deposition coating equipment comprises: the base of the hollow isolation space is provided with a gas transmission channel and more than one valve for inputting liquid vapor at the top, more than one valve is connected with a bottle body for containing liquid, more than one bottle body is provided with a heater and an electromagnetic stirrer, a bearing pedestal and two anode shunt panels are assembled in the isolation space of the base, a plurality of through chambers are arranged in the bearing pedestal, the two anode shunt panels are positioned outside two opposite surfaces of the bearing pedestal and cover the outer sides of the plurality of chambers, an operation space is respectively formed between the two anode shunt panels and the outer sides of the bearing pedestal, the two anode shunt panels are respectively and electrically connected with a power supply part, and a lifting mechanism is assembled below the bearing pedestal, the other side of the lifting mechanism extends out of the base for adjusting the longitudinal displacement of the bearing pedestal in the isolation space, the lifting mechanism is provided with a grounding part for supplying electric energy to the bearing pedestal, and the bottom of the pedestal at the periphery of the lifting mechanism is provided with more than one air exhaust channel.
The bidirectional anode plasma chemical vapor deposition coating equipment comprises: more than one valve on one side of the base is connected with a bottle body for containing liquid, the more than one bottle body is used for containing hydrophilic liquid, and the hydrophilic liquid is polyethylene glycol methacrylate or N-vinyl pyrrolidone.
The bidirectional anode plasma chemical vapor deposition coating equipment comprises: the grounding part of the lifting mechanism is electrically connected with the power supply part.
The main advantage of the present invention is that the bi-directional anode plasma chemical vapor deposition coating apparatus comprises a hollow isolation space inside the base, a gas transmission channel at the top, a bearing pedestal installed in the isolation space, a plurality of hollow cavities on the bearing pedestal, two anode shunt panels and a power supply part installed outside two opposite surfaces of the bearing pedestal, the two anode shunt panels respectively cover the two outer sides of the cavities, the inner sides of the anode shunt panels respectively form an operation space, an elevating mechanism is installed below the bearing pedestal, the other side of the elevating mechanism extends out of the base for adjusting the longitudinal displacement of the bearing pedestal in the isolation space, the elevating mechanism is provided with a grounding part for supplying electric energy to the bearing pedestal, one or more air exhaust channels are provided at the bottom of the base around the elevating mechanism, and the concave surface of the lens of the contact lens is reached, The convex surface is uniformly coated, the time of the hydrophilic effect of the contact lens is prolonged, protein deposition on the surface of the contact lens is reduced, and the surface roughness is reduced, so that the wearing comfort of the contact lens is improved, and the service life of the contact lens is prolonged.
The utility model has another advantage that the bearing pedestal is provided with a plurality of chambers, each chamber is respectively in a shape of linking and communicating wide channels and narrow channels, and an inner shoulder is formed at the linking position of each wide channel and narrow channel, so that the preset contact lenses can be horizontally and horizontally placed in the wide channels and abut against the inner shoulder; the area of the two anode shunt panels can be equal to or larger than the area of the bearing pedestal, and operation spaces with the same or different heights are respectively formed between the two anode shunt panels and the bearing pedestal and between the two anode shunt panels and the plurality of chambers.
The utility model discloses a still another advantage lies in that this elevating system is equipped with airtight type's insulator, for wearing to locate the base, again in the inside lift guide arm that is equipped with metal conducting material and makes and be longitudinal displacement of insulator, this lift guide arm one side extends into in the isolation space of base and combines in bearing pedestal bottom, and this lift guide arm opposite side is for extending the outside and electric connection in grounding portion of base, and the power supply portion that two positive poles reposition of redundant personnel panels were established is radio frequency generator, it produces to bearing pedestal (cathode plate electrode) direction coating film on contact lens to lure electric pulp to shunt the panel from two positive poles.
The utility model has the advantages that the steps of the contact lens to carry out the bidirectional anode plating long-acting type plasma chemical vapor deposition method film plating are as follows: cleaning a bearing pedestal in the base and removing water on the surface of the bearing pedestal; cleaning an isolation space in the base, a bearing pedestal and two anode shunt panels; placing the bearing pedestal into the isolated space of the base; vacuumizing the isolated space of the base through an air exhaust channel; injecting gas (working gas) for generating plasma ions into the isolated space of the base by using the gas transmission channel, and starting the radio frequency generator to clean the interior of the isolated space; respectively placing a plurality of lenses with preset contact lenses into each cavity of the bearing pedestal; vacuumizing the isolated space of the base again; injecting gas (working gas) for generating plasma into the isolated space of the base by using the gas transmission channel, starting the radio frequency generator after the pressure of the isolated space in the base is stable, starting to pretreat the lenses of the contact lenses, and closing the generator after the pretreatment is finished; closing the gas flow, closing the pumping motor, and opening the pedestal; the aeration purpose is achieved, the base is closed to repeatedly evacuate the isolated space of the base, a heater of a bottle body which is connected with more than one valve and is used for containing liquid is opened, an electromagnetic stirrer is opened at the same time, after the bottle body is confirmed to be heated, working gas is injected into the isolated space of the base, the pressure in the isolated space is confirmed to be stable, liquid steam in more than one bottle body is added into the isolated space of the base, the pressure in the isolated space is controlled, the lens of the contact lens is coated, a bearing pedestal is a cathode electrode plate, two anode shunt plates above and below the bearing pedestal are powered by a power supply part, the lens of the contact lens in each chamber is coated by bidirectional anode plasma chemical vapor deposition through the two anode shunt plates and the bearing pedestal, after the coating operation is finished, a generator is closed, the heater and the electromagnetic stirrer of the bottle body are closed, and confirming that the bottle body is cooled to the room temperature state, closing more than one valve, closing an air exhaust channel at the bottom of the base, adjusting the pressure of the isolation space in the base to the normal pressure, taking the bearing table out of the isolation space, and taking out the lenses of the contact lenses in each chamber on the bearing table.
Drawings
Fig. 1 is a perspective view of the present invention.
Fig. 2 is a perspective view of the pedestal of the present invention.
Fig. 3 is a partial sectional view of the load-bearing pedestal of the present invention.
FIG. 4 is a flow chart of the coating operation of the present invention.
FIG. 5 is a flow chart of the coating operation of the present invention (II).
FIG. 6 is a third flow chart of the coating operation of the present invention.
Description of the reference numerals: 1-a base; 10-an isolated space; 11-a gas transmission channel; 12-an air extraction channel; 13-a valve; 14-an electromagnetic stirrer; 15-bottle body; 151-a heater; 2-bearing pedestal; 20-a chamber; 201-wide channel; 202-narrow channels; 203-inner shoulder; 3-anode shunt panel; 30-a working space; 4-a lifting mechanism; 41-a power supply portion; 42-an insulating body; 421-lifting guide rod; 422-ground part; 5-a lens.
Detailed Description
To achieve the above objects and advantages, the present invention provides a method and apparatus for constructing and operating a display device, which can be used to explain the features and functions of the preferred embodiments of the present invention as follows.
Please refer to fig. 1, fig. 2 and fig. 3, which are a perspective view, a perspective view of the load-bearing pedestal, and a partial cross-sectional view of the load-bearing pedestal of the present invention, as can be clearly seen from the drawings, the two-way anode plasma chemical vapor deposition coating apparatus of the present invention comprises a base 1, a load-bearing pedestal 2, two anode shunt panels 3 and a lifting mechanism 4, wherein:
the base 1 has a hollow isolation space 10 inside, a gas transmission channel 11 on the top, more than one gas extraction channel 12 on the bottom, more than one valve 13 and electromagnetic stirrer 14 for transmitting liquid on at least one side, and more than one valve 13 is connected to the bottle 15 for holding liquid, and more than one bottle 15 is provided with a heater 151 and more than one electromagnetic stirrer 14, so that more than one bottle 15 can be heated by more than one heater 151.
The pedestal 2 is installed in the isolated space 10 of the base 1, and the pedestal 2 is provided with a plurality of hollow chambers 20.
The two anode shunt panels 3 are installed in the isolation space 10 of the base 1 and located outside the two opposite surfaces of the supporting pedestal 2, respectively, and the two anode shunt panels 3 are covered on two outer sides of the plural cavities 20, respectively, so that an operation space 30 is formed between the two anode shunt panels 3 and the supporting pedestal 2, respectively, and between the plural cavities 20.
One side of the lifting mechanism 4 is assembled below the bearing pedestal 2, and the other side of the lifting mechanism 4 extends out of the isolation space 10 of the base 1 and is located at the side of one or more air exhaust channels 12 (as a common knowledge that no gap and no air leakage are formed between the lifting mechanism 4 and the base 1), so that the lifting mechanism 4 can adjust the longitudinal displacement of the bearing pedestal 2 in the isolation space 10, and the lifting mechanism 4 is provided with a power supply portion 41 for supplying electric energy to the two anode shunt panels 3.
The carrying pedestal 2 includes a plurality of chambers 20, and each chamber 20 is formed with a through connection of a wide channel 201 and a narrow channel 202, and an inner shoulder 203 is formed at the connection position of the wide channel 201 and the narrow channel 202 inside each chamber 20, so that a plurality of lenses 5 of preset contact lenses are horizontally placed from the wide channels 201 and abut against the inner shoulders 203.
The area of the two anode shunt panels 3 is equal to or larger than the area of the pedestal 2, and working spaces 30 with the same or different heights are formed between the two anode shunt panels 3 and the pedestal 2 and between the two anode shunt panels 3 and the plurality of chambers 20.
In addition, the lifting mechanism 4 includes an airtight insulation body 42 penetrating the base 1, a lifting guide rod 421 made of a metal conductive material is disposed inside the insulation body 42, the lifting guide rod 421 is capable of longitudinal displacement and is provided with a grounding portion 422 for supplying electric energy to the bearing pedestal 2, and the power supply portion 41 of the lifting mechanism 4 can be a radio frequency generator or the like.
The lenses 5 of the plurality of preset contact lenses may be polymethyl methacrylate (PMMA), fluorosilicone acrylate (FSA), air permeable semihard lenses, polyhydroxyethyl methacrylate, GMMA, silicone gel, or other materials for manufacturing the lenses 5 of the preset contact lenses.
Please refer to fig. 1, fig. 2, fig. 3, fig. 4, fig. 5, and fig. 6, which are a perspective view of the contact lens, a perspective view of the carrying pedestal, a partial cross-sectional view of the carrying pedestal, a flow chart of the coating operation (i), a flow chart of the coating operation (ii), and a flow chart of the coating operation (iii), as can be clearly seen from the drawings, the steps of the two-way anodic plasma cvd coating of the contact lens are as follows:
(A01) the base 1 and the internal bearing pedestal 2 are cleaned respectively, and residual moisture on the surface of the bearing pedestal 2 is removed.
(A02) The cleaning base 1 includes an inner isolation space 10, a bearing pedestal 2 and two anode shunt panels 3.
(A03) The load-bearing pedestal 2 is placed in the isolated space 10 of the base 1.
(A04) The isolated space 10 of the susceptor 1 is vacuumized through the pumping channel 12.
(A05) The gas transmission channel 11 is used to inject working gas into the isolation space 10 of the susceptor, and the power supply portion 41 (which may be a radio frequency generator) is turned on to perform internal cleaning on the isolation space 10 to generate plasma.
(A06) The lenses 5 of the plurality of preset contact lenses are respectively placed in the cavities 20 of the bearing pedestal 2, and the plurality of preset lenses 5 are respectively horizontally placed from the wide channels 201 of the cavities 20, so that the lenses 5 respectively abut against the inner shoulders 203 of the cavities 20.
(A07) The isolated space 10 of the susceptor 1 is again vacuumized.
(A08) A pretreatment gas is introduced into the isolation space 10 of the susceptor 1, and the power supply portion 41 is activated to perform plasma pretreatment on the two anode diverging panels 3.
(A09) Stopping injecting the gas into the isolation space 10 of the base 1, relieving the pressure in the isolation space 10, and then opening the base 1.
(A10) The susceptor 1 is closed, the isolated space 10 of the susceptor 1 is vacuumized, the heater 151 is turned on to heat one or more vials 15 containing the liquid, and the one or more electromagnetic stirrers 14 are turned on to confirm that the vials 15 are heated.
(A11) Argon gas is injected into the isolated space 10 of the base 1 through the gas transmission channel 11, hydrophilic liquid vapor is added through more than one valve 13, the flow rate of the argon gas is adjusted, the pressure of the isolated space 10 in the base 1 is unstable, and the hydrophilic liquid vapor is added through more than one valve 13 to maintain a preset pressure.
(A12) The power supply unit 41 is turned on to supply power to the two anode diverging plates 3 in the isolated space 10 of the base 1, and the pressure in the isolated space 10 of the base 1 is checked, and if the pressure fluctuates, one or more valves 13 for supplying liquid vapor are adjusted to maintain a predetermined pressure in the isolated space 10 of the base 1, and the lens 5 of each preset contact lens in each chamber 20 of the pedestal 2 is coated.
(A13) Two opposite anode shunt panels 3 located on the upper and lower sides of the carrying pedestal 2 in the isolation space 10 of the base 1 are used to synchronously perform two-way anode plasma chemical vapor deposition process on each preset lens 5 in each chamber 20.
(A14) The two anode shunt panels 3 are powered by the power supply portion 41, the bearing pedestal 2 becomes a cathode electrode plate by the grounding portion 422, and the two anode shunt panels 3 provide plasma power through the power supply portion 41, so that a bidirectional anode plasma gas-phase chemical deposition effect is formed between the two anode shunt panels 3 and the bearing pedestal 2 (cathode electrode plate), so that the plasma is concentrated in each chamber 20 of the bearing pedestal 2, and the power supply plasma is deposited on the front and back surfaces of each preset lens 5 in each chamber 20, so as to simultaneously perform a film coating process on the front and back surfaces of each preset lens 5.
(A15) After the coating is completed, the power supply unit 41, the heater 151 of the one or more vials 15, and the one or more electromagnetic stirrers 14 are turned off, and then gas is injected into the isolated space 10 of the susceptor 1 through the gas transmission channel 11.
(A16) After confirming that the temperature of the one or more than one bottle bodies 15 containing the liquid is reduced to the room temperature, the valve 13 connected with the one or more than one bottle bodies 15 is closed.
(A17) The argon gas injected into the isolated space 10 of the susceptor 1 through the gas transmission passage 11 is shut off, so that the isolated space 10 in the susceptor 1 is back pressurized to a normal pressure [ normal atmospheric pressure: 1kg/cm 2 ]The coated lens 5 of each preset contact lens can be taken out.
In the above steps, the base 1 may have more than one valve 13 on one side connected to a bottle 15 for holding liquid, and the more than one bottle 15 is used for holding hydrophilic liquid, and the hydrophilic liquid may be polyethylene glycol Methacrylate (peg ma) or N-vinyl pyrrolidone (NVP).
In the step (a01), the cleaning operation of the susceptor 1 and the internal load-bearing pedestal 2 is performed by cleaning the load-bearing pedestal 2 with Clean water, and then cleaning with isopropyl Alcohol (IPA), and removing the water on the surface of the load-bearing pedestal 2 by compressed Dry Air (Clean Dry Air, CDA); the inside space 10 of the base 1 and the pedestal 2 are wiped with reverse osmosis water, and the inside space 10 of the base 1 and the pedestal 2 are wiped with isopropyl alcohol IPA for more than two times.
The evacuation process in the above steps (a04) and (a07) requires that the internal pressure of the isolated space 10 in the susceptor 1 be confirmed to be 1.0 × 10 -1 Torr below; the evacuation process of step (a10) is performed, and it is necessary to confirm that the pressure inside the isolated space 10 in the susceptor 1 is 3.0 x 10 -2 The Torr is less.
The working gas in the step (A05) may be argon (Ar-10sccm) and oxygen (O) 2 -20sccm) of a gas and at a plasma pressure (plasma power): 60W, performing cleaning treatment operation for 8 minutes; the gas injected into the isolation space 10 of the susceptor 1 in the steps (A08) and (A09) may be argon (Ar-30sccm), and the predetermined time is 10 to 30 minutes, preferably 20 minutes.
In this step (a06), the lenses 5 of a plurality of preset contact lenses are respectively placed in each chamber 20 of the carrying pedestal 2 in a horizontal row manner, and the plurality of chambers 20 of the carrying pedestal 2 are respectively provided with a wide channel 201 and a narrow channel 202 which are connected and communicated, and an inner shoulder 203 is provided at the connection position of the wide channel 201 and the narrow channel 202 inside each chamber 20, so that the lenses 5 of the preset contact lenses can be horizontally placed from the wide channel 201 and abut against the inner shoulder 203.
The pretreatment gas in the step (A08) may be argon (Ar-9sccm) and oxygen (O) 2 36sccm) and the like; the steps (a05), (a08), (a12) and (a14) start the power supply part 41 of the lifting mechanism 4 to perform plasma processing or power supply, wherein the power supply part 41 can be a radio frequency generator (RF generator power); the rf generator of the power supply part 41 in the step (a05) is set to 120W, and the processing time may be 5-10 minutes, preferably 6 minutes; and step (A08) opening power supply part 41 of lifting mechanism 4 to proceed plasma treatment to two anode shunt panel 3, setting the RF generator as 40W, lasting for 16 minutes, and confirming the pressure of isolation space 10 in base 1 as 300 mTorr; the predetermined pressure maintained with respect to the separation space 10 within the base 1 is 300-.
The step (A09) is to depressurize the isolation space 10 in the base 1 by depressurizing the isolation space 10 to 1atm, and the time for opening the base 1 can be about 1 to 3 minutes.
In the step (a10), one or more electromagnetic stirrers 14 are activated, and each electromagnetic stirrer 14 is operated at a speed of 20 rpm/sec.
The step (A11) of injecting argon (Ar-8sccm) into the isolated space 10 of the susceptor 1, and adjusting the flow rate of argon to (Ar-12 sccm); as for the hydrophilic liquid vapor, polyethylene glycol methacrylate (PEGMA, Poly (ethylene glycol)) methacrylate is added first]The pressure is controlled to be 1.5-2 x 10 -1 Torr; adding N-vinyl pyrrolidone (NVP), and controlling pressure at 2-3 x 10 -1 Torr; this step (A12) is carried out when the pressure in the separation space 10 in the susceptor 1 is unstable and floats, and the predetermined pressure is maintained at 3 x 10 when the hydrophilic liquid PEGMA/NVP vapor is added - 1 Torr; further, the gas injected into the isolation space 10 of the susceptor 1 in the step (A15) is argonGas (Ar-70sccm) for 15 minutes.
The lenses 5 of the plurality of preset contact lenses are processed and coated by the steps, because the polyethylene glycol methacrylate and the N-vinyl pyrrolidone pass between the two anode shunt panels 3 and the bearing pedestal 2, the positive and negative surfaces of the lenses 5 are coated to form uniform films by using a double-anode long-acting plasma chemical vapor deposition process, the lenses 5 of each preset contact lens have good hydrophilicity and anti-contamination functions, and the polyethylene glycol methacrylate and the N-vinyl pyrrolidone can generate a cross-linking effect mutually, so that the hydrophilicity efficacy time of the lenses 5 of the contact lenses is prolonged, protein can be reduced to be deposited on the surfaces of the preset lenses 5, and the effects of improving the comfort level of the lenses 5 of each preset contact lens during wearing, prolonging the service life of the preset lenses 5 and the like are achieved.
And the lenses 5 of the plurality of preset contact lenses are coated by bidirectional anode plasma chemical vapor deposition, so that the front and back surfaces of each preset lens 5 form a functional group with a hydrophilic function, and the functional group can be grafted with polyethylene glycol methacrylate and N-vinyl pyrrolidone into a whole, so that the situation that the functional group is recombined in order to minimize the surface energy to return to a thermal equilibrium state can be prolonged, the effect of prolonging the hydrophilic time can be achieved, the adhesiveness of the front and back surface coatings of each preset lens 5 can be improved, the stability of the coatings can be increased, and the like.
The foregoing description is intended to be illustrative rather than limiting, and it will be appreciated by those skilled in the art that many modifications, variations or equivalents may be made without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (7)
1. The utility model provides a two-way positive pole plasma chemical vapor deposition coating equipment which characterized in that, includes base, bears pedestal, two positive pole reposition of redundant personnel panels and elevating system, wherein:
the base is internally provided with a hollow isolation space, and the top of the base is provided with a gas transmission channel;
the bearing pedestal is arranged in the isolated space of the base and is provided with a plurality of hollow chambers;
the two anode shunt panels are arranged in the isolation space of the base and are respectively positioned outside the two opposite surfaces of the bearing pedestal, the two anode shunt panels are respectively covered on the two outer sides of the plurality of cavities, and an operation space is respectively formed between the two anode shunt panels and the two outer sides of the plurality of cavities of the bearing pedestal; and
one side of the lifting mechanism is assembled below the bearing pedestal, the other side of the lifting mechanism extends out of the base to adjust the longitudinal displacement of the bearing pedestal in the isolation space, a power supply part for supplying the bearing pedestal with electric energy is arranged on the lifting mechanism, and more than one air exhaust channel is arranged at the bottom of the base on the periphery of the lifting mechanism.
2. The apparatus of claim 1, wherein: the bearing pedestal comprises a plurality of chambers which are in a shape of connecting and penetrating wide channels and narrow channels, and inner shoulders are formed at the connecting positions of the wide channels and the narrow channels inside each chamber, so that the lenses of the preset contact lenses are horizontally placed in the wide channels and are abutted against the inner shoulders.
3. The apparatus of claim 1, further comprising: the area of the two anode shunt panels is equal to or larger than that of the bearing pedestal, and operation spaces with the same or different heights are respectively formed between the two anode shunt panels and the bearing pedestal and between the two outer sides of the plurality of chambers.
4. The apparatus of claim 1, further comprising: the lifting mechanism comprises an airtight insulation body penetrating through the base, a lifting guide rod which is made of metal conductive materials and longitudinally displaces is arranged in the insulation body, and a power supply part arranged on the lifting mechanism is a radio frequency generator.
5. The apparatus of claim 1, further comprising: the base of the hollow isolation space is provided with a gas transmission channel and more than one valve for inputting liquid vapor at the top, more than one valve is connected with a bottle body for containing liquid, more than one bottle body is provided with a heater and an electromagnetic stirrer, a bearing pedestal and two anode shunt panels are assembled in the isolation space of the base, a plurality of through chambers are arranged in the bearing pedestal, the two anode shunt panels are positioned outside two opposite surfaces of the bearing pedestal and cover the outer sides of the plurality of chambers, an operation space is respectively formed between the two anode shunt panels and the outer sides of the bearing pedestal, the two anode shunt panels are respectively and electrically connected with a power supply part, and a lifting mechanism is assembled below the bearing pedestal, the other side of the lifting mechanism extends out of the base for adjusting the longitudinal displacement of the bearing pedestal in the isolation space, the lifting mechanism is provided with a grounding part for supplying electric energy to the bearing pedestal, and the bottom of the base at the periphery of the lifting mechanism is provided with more than one air exhaust channel.
6. The apparatus of claim 5, wherein: more than one valve on one side of the base is connected with a bottle body for containing liquid, the more than one bottle body is used for containing hydrophilic liquid, and the hydrophilic liquid is polyethylene glycol methacrylate or N-vinyl pyrrolidone.
7. The apparatus of claim 5, wherein: the grounding part of the lifting mechanism is electrically connected with the power supply part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121054438.XU CN217474003U (en) | 2021-05-17 | 2021-05-17 | Two-way anode plasma chemical vapor deposition coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121054438.XU CN217474003U (en) | 2021-05-17 | 2021-05-17 | Two-way anode plasma chemical vapor deposition coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217474003U true CN217474003U (en) | 2022-09-23 |
Family
ID=83303336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121054438.XU Active CN217474003U (en) | 2021-05-17 | 2021-05-17 | Two-way anode plasma chemical vapor deposition coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217474003U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115365083A (en) * | 2021-05-17 | 2022-11-22 | 亨泰光学股份有限公司 | Bidirectional anode plasma chemical vapor deposition coating equipment |
-
2021
- 2021-05-17 CN CN202121054438.XU patent/CN217474003U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115365083A (en) * | 2021-05-17 | 2022-11-22 | 亨泰光学股份有限公司 | Bidirectional anode plasma chemical vapor deposition coating equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN217474003U (en) | Two-way anode plasma chemical vapor deposition coating equipment | |
| EP1617457B1 (en) | Ultra high speed uniform plasma processing system | |
| TW469534B (en) | Plasma processing method and apparatus | |
| US20060163201A1 (en) | Plasma processing system and plasma treatment process | |
| AU725410B2 (en) | Anodizing apparatus and apparatus and method associated with the same | |
| US4214014A (en) | Method for surface treatment of contact lenses | |
| ATE440385T1 (en) | METHOD FOR THE LARGE-SCALE PRODUCTION OF CDTE/CDS THIN FILM SOLAR CELLS | |
| KR101292268B1 (en) | Parallel driving micro plasma devices for treatment of wound area | |
| WO2001045141A3 (en) | Method and apparatus for smoothing thin conductive films by gas cluster ion beam | |
| GB2272995B (en) | Method for making or treating a semiconductor | |
| TW366553B (en) | Manufacturing method for capacitor of semiconductor device | |
| EP1073091A3 (en) | Electrode for plasma generation, plasma treatment apparatus using the electrode, and plasma treatment with the apparatus | |
| TW200510257A (en) | Vacuum degassing method for molten glass flow | |
| AU2003296050A1 (en) | Method and apparatus for treating a substrate | |
| WO2007128061A1 (en) | Method of mounting objects for chemical vapour deposition | |
| SE0001367D0 (en) | Apparatus and method for electrochemical processing of substrates | |
| MY120869A (en) | Plasma treatment apparatus and method | |
| WO2003030223A3 (en) | Substrate processing apparatus and method | |
| CN115365083A (en) | Bidirectional anode plasma chemical vapor deposition coating equipment | |
| TWI765674B (en) | Bidirectional Anodic Plasma Chemical Vapor Deposition Coating Equipment | |
| TWM615604U (en) | Bidirectional anode plasma chemical vapor deposition coating apparatus | |
| WO2003036681A3 (en) | Methods and apparatus for plasma doping by anode pulsing | |
| WO2004050943A3 (en) | Method for the treatment of surfaces with plasma in a vacuum and unit for the same | |
| EP1651794B1 (en) | Method of manufacturing vacuum plasma treated workpieces | |
| TWI679227B (en) | Method for preparing thin film on contact lens by plasma-assisted chemical vapor deposition method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |