TWI763351B - High cleanliness baking equipment - Google Patents

Abstract

A high cleanliness baking equipment includes a heating furnace including a furnace tube device, a layer of rack units and at least one transverse jetting tube. The furnace tube device has a furnace base assembly. The furnace base assembly has a furnace base outer frame and a furnace bottom base. The outer frame of the furnace base has an outer frame body with an opening at the bottom and a lower flow channel. The furnace bottom base has a bottom sealing ring which can be crimped on the bottom surface of the outer frame body. The lower flow channel extends along the length direction of the bottom sealing ring, and is used for exporting the thermal energy of the outer frame body. The shelf unit has several longitudinally arranged layered carriers. The transverse jet pipe has several longitudinally arranged air outlet holes. The air outlet holes are respectively aligned between two adjacent layered carriers and blow out high-temperature gas laterally, so as to adjust and control the temperature between the layered carriers, so that the The heating degree of the object to be heated is similar, so as to achieve the purpose of improving the process yield.

Description

High cleanliness baking equipment

The present invention relates to a baking equipment, in particular to a high cleanliness baking equipment suitable for heat treatment of objects to be heated.

In order to cope with the need for larger and faster computing processing capabilities of electronic products, in the semiconductor industry, the wire diameter specifications of the circuit patterns on the chip have been reduced. Therefore, the circuit pattern defects caused by dust adhesion in the semiconductor process are also affected. more pronounced. In order to overcome the problem of circuit pattern defects in the semiconductor process, the requirements for the cleanliness of the equipment in the semiconductor process also increase. However, in terms of the heat treatment process, during the heating process of the existing wafers in the heat treatment process, since the wafers are heat treated by thermal convection in the heating furnace, the dust in the heating furnace will fall to the bottom of the heating furnace with the circulation of the air flow. The wafer surface is attached, resulting in damage to the circuit pattern. In addition, during the heating process, since the airflow of the thermal convection cannot be locally controlled, the degree of heating of the wafers in different regions of the heating chamber varies, which may affect the yield.

Therefore, the purpose of the present invention is to provide a high cleanliness baking equipment which can improve the process yield.

Therefore, the high cleanliness baking equipment of the present invention includes a heating furnace. The heating furnace includes a furnace tube device, a frame unit and at least one transverse jet pipe.

The furnace tube device has a furnace tube body, a heating element group arranged inside the furnace tube body and capable of controlled heating, and a furnace base assembly located at the bottom of the furnace tube body. The furnace base assembly has a furnace base outer frame that communicates with the bottom of the furnace tube body and penetrates to the outside world, a furnace bottom base detachably sealed to the furnace base outer frame, and at least passes through the furnace tube body And can be used to exhaust gas to the outside of the exhaust pipe. The outer frame of the furnace base has an outer frame body and a lower flow channel embedded in the outer frame body. A bottom opening is formed on the bottom surface of the outer frame body. The furnace bottom base has a bottom sealing ring surrounding the periphery of the bottom opening. The bottom sealing ring can be crimped on the bottom surface of the outer frame body to seal the furnace tube device. The lower flow channel is adjacent to the bottom opening and extends along the length direction of the bottom sealing ring, and is used for the circulation of heat-conducting fluid, so as to lead out the thermal energy of the outer frame body.

The layer frame unit is detachably installed in the furnace tube device, and has a frame body and a plurality of layered carriers arranged in the frame body longitudinally. The layered carriers are respectively suitable for carrying objects to be heated.

The transverse jet pipe is vertically installed in the furnace tube device and adjacent to the layer frame unit, and has a plurality of longitudinally arranged air outlet holes. The air outlet holes are respectively aligned between two adjacent layered carriers, and can blow out high-temperature gas laterally, so as to adjust and control the temperature between the layered carriers. Wherein, when the air outlets are blown laterally and the exhaust pipe is exhausted below the furnace tube body, the gas in the furnace tube body can flow from top to bottom.

In some embodiments, the heating furnace includes a hot air intake pipe set installed in the furnace tube device. The hot air inlet pipe group has a plurality of transverse jet pipes respectively erected and arranged around the shelf unit.

In some embodiments, the furnace tube device has at least a cold air intake module which runs through the furnace tube body and is used for guiding gas to enter, and a cold air which runs through the furnace tube body and is used for guiding the gas to flow to the outside. An exhaust module, and an inner furnace unit disposed in the furnace tube body and covering the layer frame unit and the hot air intake pipe group, and sealed with the outer frame of the furnace base. The space between the inner furnace unit and the furnace tube body forms a cooling chamber. The cooling chamber communicates with the cold air intake module and the cold air exhaust module. Wherein, the gas can be guided by the cold air intake module to enter the furnace tube body, and flow through the cooling chamber and be discharged from the cold air exhaust module to lower the temperature of the inner furnace unit.

In some embodiments, a top opening opposite to the bottom opening is further formed on the top surface of the outer frame body. The inner furnace unit has an inner furnace body, and at least one top sealing ring disposed between the inner furnace body and the outer frame body. The top sealing ring surrounds the periphery of the top opening to seal the inner furnace body and the outer frame body. The outer frame of the furnace base also has an upper flow channel embedded in the outer frame body and located above the lower flow channel. The upper-layer flow channel is adjacent to the top opening and extends along the length direction of the top sealing ring, and provides for the circulation of a heat-conducting fluid for conducting heat energy of the outer frame body.

In some embodiments, the cold air intake module is disposed at the bottom of the furnace tube body. The cold air exhaust module is arranged on the top of the furnace tube body. When the cold air intake module and the cold air exhaust module are actuated, the air in the cooling chamber can flow from bottom to top.

In some embodiments, the furnace tube device further has a plurality of thermocouple elements circumferentially disposed around the shelf unit. The thermocouple elements are used to sense the temperature around the shelf unit.

In some embodiments, the heating element group has a plurality of ceramic electric heating plates arranged annularly along the furnace tube body. Each of the ceramic electric heating plates can be individually controlled to adjust the temperature.

In some embodiments, the furnace base assembly further has two connecting pieces respectively connected to the left and right sides of the furnace base. The high cleanliness baking equipment also includes two lifting mechanisms. The lifting mechanisms are respectively arranged below the left and right sides of the heating furnace. Each lifting mechanism includes a dustproof casing, a lifting cylinder, at least two guide wheels and a dustproof belt. Each dust enclosure forms a longitudinally extending slideway. Each lift cylinder has a cylinder body and a piston block which is arranged in the corresponding slideway and can be displaced up and down relative to the cylinder body. One ends of the piston blocks away from the cylinder body are respectively connected with the connecting pieces, so that the furnace bottom base can move up and down with the action of the piston blocks. The guide wheels of each of the lifting mechanisms are laterally arranged on the top and bottom of the slideway, respectively. Each guide wheel can pivot around the horizontal axis. Each dustproof belt surrounds the corresponding guide wheels of the lifting mechanism, and two opposite ends of the dustproof belt are respectively connected to the corresponding connecting pieces. Wherein, the dustproof belt covers the periphery of the corresponding piston block, and can be pivoted with the displacement of the connecting piece, so that the opening of the slideway can be shielded by the dustproof belt.

In some embodiments, each lifting mechanism further includes a suction unit at least through the bottom of the corresponding dustproof casing, so that the gas in the dustproof casing is discharged from top to bottom.

In some embodiments, the high cleanliness baking equipment further includes a gas filtering device. The gas filtering device includes an outer cylinder structure communicating with the exhaust pipe, and a condensing structure with high heat transfer characteristics. The condensing structure is not communicated with the outer cylinder structure, and is used for exporting the heat energy in the outer cylinder structure to exchange heat between the gas in the outer cylinder structure and the condensing structure to cool and condense some components in the gas.

The effect of the present invention lies in: the high temperature gas is blown laterally between the layered carriers by the air outlet holes of each of the horizontal jet pipes, respectively, so as to control the temperature between the layered carriers and enable the The heating degrees of the objects to be heated placed on the layered stages are similar, so as to achieve the purpose of improving the process yield. In addition, when the air outlets are blown laterally and the exhaust pipe is exhausted below the furnace tube body, the gas in the furnace tube body can be discharged outward from top to bottom, so as to avoid deposition on the furnace tube body The dust below floats to the layered stages along with the up-and-down circulating airflow and adheres to the surface of the object to be heated, which can also achieve the purpose of improving the process yield. In addition, since the openings of the slideways of the lifting mechanisms are shielded by the dustproof belts, the dust in the dustproof casings cannot be scattered into the inner furnace body through the bottom opening, and the amount of dust in the inner furnace body can be avoided. It increases and contaminates the object to be heated, so as to achieve the purpose of improving the process yield.

Referring to FIG. 1 and FIG. 2, it is an embodiment of the high cleanliness baking equipment of the present invention. The high cleanliness baking equipment is suitable for heat treatment of several objects to be heated 9 such as wafers, and includes a heating furnace 1 , two lifting mechanisms 2 and a gas filtering device 3 .

Referring to FIG. 2 , the heating furnace 1 includes a furnace tube device 4 , a shelf unit 5 detachably installed in the furnace tube device 4 and suitable for carrying the object to be heated 9 , and a shelf unit 5 installed in the furnace tube device 4 . The hot air intake pipe group 6 in the furnace tube device 4. The furnace tube device 4 has a furnace tube body 41 , a heating element group 42 disposed inside the furnace tube body 41 and capable of controlled heating, a furnace base assembly 43 located at the bottom of the furnace tube body 41 , and four sets of devices. A cold air intake module 44 located at the bottom of the furnace tube body 41 and can be controlled to act, a cold air exhaust module 45 installed on the top of the furnace tube body 41 and can be controlled to act, a cold air exhaust module 45 installed on the furnace Inside the tube body 41 and covering the inner furnace unit 46 of the shelf unit 5 and the hot air intake tube set 6, a cooling chamber 47 jointly defined by the outer wall of the inner furnace unit 46 and the inner side of the furnace tube body 41 , and a plurality of thermocouple elements 48 arranged around the shelf unit 5 .

Referring to FIG. 2 , in this embodiment, the furnace tube body 41 has a cylindrical shape with an opening facing downward, but it is not limited to this shape. The heating element group 42 has a plurality of ceramic electric heating plates (not shown) arranged annularly along the furnace tube body 41 . Each of the ceramic electric heating plates can be controlled to adjust the temperature respectively, so that the temperature of each area in the furnace tube body 41 can be adjusted to be almost the same, so that the heating degree of the waiting heating object 9 in different areas in the furnace tube body 41 is similar. . The ceramic electric heating plates can increase the temperature in the furnace tube body 41 by means of thermal radiation, which can prevent the gas in the furnace tube body 41 from being disturbed up and down due to the influence of thermal convection compared with the heating method by introducing hot air Therefore, the dust flying in the furnace tube body 41 can be reduced. However, the implementation of the heating element group 42 is not limited to the type of heat radiation, and it can also be a common type of heat convection heater, which is matched with the inner furnace unit 46 to cover the shelf unit 5 to isolate the heating The flow of airflow between the element group 42 and the shelf unit 5 prevents the dust generated by the heating element group 42 from scattering to the shelf unit 5 and affecting the cleanliness of the object to be heated 9 .

Referring to FIGS. 1 and 2 , the furnace base assembly 43 has a furnace base outer frame 431 , a furnace bottom base 432 , four exhaust pipes 433 , and two are connected to the left and right sides of the furnace bottom base 432 respectively. Adapter 434. The outer frame 431 of the furnace base is connected to the bottom of the furnace tube body 41 , and has an outer frame body 435 that passes through the inside of the furnace tube body 41 and the outside, and lower flow channels 436 embedded in the outer frame body 435 respectively. and an upper flow channel 437 . A bottom opening 4351 and a top opening 4352 are respectively formed on the bottom surface and the top surface of the outer frame body 435 in opposite directions. The lower flow channel 436 and the upper flow channel 437 are adjacent to the bottom opening 4351 and the top opening 4352 respectively, and surround the channel running through the outer frame body 435 in the longitudinal direction, and both the lower flow channel 436 and the upper flow channel 437 can supply The heat-conducting fluid is circulated so as to lead out the thermal energy of the outer frame body 435 . In this embodiment, the lower flow channel 436 and the upper flow channel 437 are both used to guide nitrogen gas at room temperature to pass through, but the heat transfer fluid components that can be guided are not limited to this.

Referring to FIG. 2 , the furnace bottom base 432 is detachably sealed to the furnace bottom frame 431 , and has a bottom sealing ring 438 surrounding the periphery of the bottom opening 4351 . The bottom sealing ring 438 can be crimped on the bottom surface of the outer frame body 435 to ensure air tightness between the outer frame 431 of the furnace base and the furnace bottom base 432 . In this embodiment, the position of the bottom seal ring 438 is aligned with the lower flow channel 436 up and down, that is, the lower flow channel 436 extends along the length direction of the bottom seal ring 438 so that the lower flow channel 436 The thermal energy of the outer frame body 435 abutting against the bottom sealing ring 438 can be dissipated, and the bottom sealing ring 438 can be prevented from being thermally deformed by the heat conduction of the outer frame body 435 . The exhaust pipes 433 are respectively installed on the left and right sides of the outer frame 431 of the furnace base and communicate with the inside of the furnace tube body 41 and the outside, and can be used to discharge the gas inside the furnace tube body 41 to the outside. However, the The exhaust pipes 433 can also be installed on the furnace bottom base 432 respectively, and the gas inside the furnace tube body 41 can also be exhausted to the outside. Although the number of the exhaust pipes 433 is exemplified by four, the number is not limited to a specific number, and may be one, two, three or more than five.

Referring to FIG. 2 , the cold air intake modules 44 respectively penetrate through the bottom of the furnace tube body 41 and are used for guiding the air to flow into the cooling chamber 47 from the outside. The cold air exhaust module 45 penetrates through the top of the furnace tube body 41 and is used for guiding gas to flow from the cooling chamber 47 to the outside. When the cold air intake modules 44 and the cold air exhaust module 45 are actuated, the gas in the cooling chamber 47 can flow from bottom to top, so that the heat energy of the inner furnace unit 46 can be exported. In this embodiment, each of the cold air intake modules 44 and the cold air exhaust module 45 includes a pipeline that communicates with the cooling chamber 47 and a suction fan installed at the pipeline, so as to realize air circulation and guide cited function. In addition, in this embodiment, the cold air intake modules 44 are installed at the bottom of the furnace tube body 41 at equal intervals, so that the four sides of the inner furnace unit 46 can be cooled uniformly. However, the number of the cold air intake modules 44 is not limited to a specific number. On the other hand, the cold air intake modules 44 and the cold air exhaust module 45 can also be arranged upside down, that is to say, the cold air intake modules 44 are arranged above the cold air exhaust module 45 , so that the gas in the cooling chamber 47 is discharged from below. The implementation of the cold air intake modules 44 and the cold air exhaust modules 45 depends on actual needs.

Referring to FIGS. 3 to 4 , the inner furnace unit 46 has an inner furnace body 461 and two top sealing rings 462 disposed between the inner furnace body 461 and the outer frame body 435 . The inner furnace body 461 covers the shelf unit 5 and the hot air intake pipe group 6 for separating the shelf unit 5 and the heating element group 42, so that the dust generated by the heating element group 42 cannot be scattered to the The shelf unit 5 affects the cleanliness of the object 9 to be heated. In this embodiment, the inner furnace body 461 is made of quartz, which is resistant to high temperature and can absorb the heat energy in the furnace tube body 41 and radiate heat to the shelf unit 5 . However, the material of the inner furnace body 461 may also be a high temperature resistant material such as aluminum or stainless steel, depending on actual requirements. In this embodiment, the cross-section of the inner furnace body 461 is circular as shown in FIG. 3 , but the shape is not limited to a circle. The cross-sectional shape of the inner furnace body 461 can also be a polygon. The furnace body 461 is spaced at intervals corresponding to the ceramic heating plates of the heating element group 42, and the ceramic heating plates are evenly distributed on the peripheral side of the inner furnace body 461, so as to facilitate each part of the inner furnace body 461 to absorb the ceramic heating plates respectively The heat energy of the electric heating plate is then transferred to the shelf unit 5 by heat radiation from different directions, so as to ensure the uniformity of temperature distribution. The top sealing rings 462 surround the periphery of the top opening 4352 of the outer frame body 435 to ensure air tightness between the inner furnace body 461 and the outer frame body 435 . In this embodiment, the top sealing rings 462 are arranged in alignment with the upper flow channel 437, that is, the upper flow channel 437 extends along the length direction of the top sealing ring 462, so that the upper flow channel 437 The channel 437 can dissipate the heat energy of the outer frame body 435 abutting against the top sealing ring 462 , so as to prevent the top sealing ring 462 from being thermally deformed by the heat conduction of the outer frame body 435 . In this embodiment, the number of the top sealing rings 462 may also be one or more than three, depending on the sealing effect of the inner furnace body 461 and the outer frame body 435 .

Referring to FIG. 2 and FIG. 3 , the cooling chamber 47 communicates with the cold air intake module 44 and the cold air exhaust module 45 . The outside air can be guided by the cold air intake module 44 to enter the furnace tube body 41 , and flow through the cooling chamber 47 and be discharged from the cold air exhaust module 45 , so that the inner furnace unit 46 is discharged. Temperature drop. In other words, when the heat treatment process of the object to be heated 9 is completed, the object to be heated 9 can be taken out from the inner furnace unit 46 only after the object to be heated 9 in the inner furnace unit 46 is cooled down, so the cooling method is adopted. Cooling down the chamber 47 The design of the inner furnace unit 46 can save the time for waiting for the temperature of the waiting object 9 to cool down, so as to improve the process efficiency. The thermocouple elements 48 extend longitudinally upward from the furnace base assembly 43 and are used to sense the temperature around the shelf unit 5 . In this embodiment, the extension lengths of the thermocouple elements 48 are different, so as to sense the ambient temperature of each layer of the shelf unit 5 .

Referring to FIG. 2 and FIG. 3 , the shelf unit 5 has a frame body 51 , and a plurality of layered carriers 52 which are arranged in the frame body 51 and are respectively suitable for carrying the object to be heated 9 . The frame body 51 is installed above the furnace bottom base 432 , and can be removed from the furnace tube body 41 as the furnace bottom base 432 moves away from the furnace base outer frame 431 , so as to facilitate the heating object 9 Loaded on the layered stages 52 or transferred from the layered stages 52 to other places. In this embodiment, the frame body 51 is implemented by four vertical rods symmetrically arranged above the furnace bottom base 432, and the implementation of each layered stage 52 is four connected to the vertical poles respectively. The flat plates of the rod, and the flat plates are not connected to each other, so that only the four corners of each object to be heated 9 are pressed against the flat plates, and the middle part of each object to be heated 9 can be suspended in the shelf unit 5 .

Referring to FIG. 2 and FIG. 3 , the hot air intake pipe set 6 is installed above the furnace bottom base 432 and can be exposed on the furnace tube body 41 as the furnace bottom base 432 moves away from the furnace base outer frame 431 In addition, there are several transverse jet pipes 61 erected and circumferentially arranged around the shelf unit 5 , a front longitudinal jet pipe 62 and a rear longitudinal jet pipe 63 with an upward opening. Each of the transverse jet pipes 61 has several longitudinally arranged air outlet holes 611 . The air outlet holes 611 are respectively aligned between the adjacent layered carriers 52 , and can blow out high-temperature gas laterally, so as to adjust and control the temperature between the layered carriers 52 . In the present embodiment, the hot air intake pipe group 6 is used to guide the high temperature nitrogen gas to circulate, the number of the transverse air injection pipes 61 is an example of four, and the transverse air injection pipes 61 are arranged in groups of two respectively. On the left and right sides of the shelf unit 5, the object 9 to be heated is heated from four directions to make it more uniform. However, the number of the transverse jet pipes 61 is not limited to a specific number, and depends on actual needs. The openings of the front longitudinal jet pipe 62 and the rear longitudinal jet pipe 63 are respectively disposed on the front and rear sides of the layer frame unit 5, and can blow high-temperature gas upward, so that the gas in the furnace tube device 4 of the furnace tube structure can be blown upward. Flow from top to bottom. In this embodiment, the bottom end of the front longitudinal air jet pipe 62 is connected to the furnace bottom base 432 behind the shelf unit 5 and extends longitudinally to the top of the shelf unit 5, as shown in FIG. 3 . Extend along the uppermost layered carrier 52 toward the front side of the shelf unit 5, and finally set the top opening of the front longitudinal air jet 62 in front of the shelf unit 5, so that the front longitudinal air injection pipe 62 can be On the premise that the object 9 to be heated is not blocked from entering and exiting from the front side of the shelf unit 5 , air can still be blown toward the front side of the top of the shelf unit 5 . In addition, the bottom end of the rear longitudinal jet pipe 63 is also connected to the furnace bottom base 432 behind the shelf unit 5 like the front longitudinal jet pipe 62, but the difference from the front longitudinal jet pipe 62 is that the rear Longitudinal lances 63 extend longitudinally from the hearth base 432 to the top rear side of the shelf unit 5 . In this way, when the air outlets 611 are blown laterally and the exhaust pipe 433 is exhausted below the inner furnace unit 46, and the front longitudinal air injection pipe 62 and the rear longitudinal air injection pipe 63 are blown upward, the The gas in the shelf unit 5 flows from the inside to the outside, and the gas in the inner furnace unit 46 flows from top to bottom, which can prevent dust from floating inward from the outside of the shelf unit 5 to the surface of the object to be heated 9 to ensure The surface cleanliness of the object 9 to be heated.

Referring to FIG. 1 , FIG. 2 and FIG. 5 , the lifting mechanisms 2 are respectively disposed below the left and right sides of the heating furnace 1 . Each lifting mechanism 2 includes a dustproof casing 21, a lifting cylinder 22, four guide wheels 23, a dustproof belt 24, an air extraction unit 25, and is arranged in the dustproof casing 21 and can also assist in supporting the furnace. The lifting assembly of the bottom base 432 and the components such as chain belts are not shown in detail. Each dustproof housing 21 forms a longitudinally extending slideway 211 and an opening 212 that communicates the slideway 211 with the outside world, and is used to cover the structure of friction generated by the action of the lift cylinder 22 and the guide wheels 23 . inside, so that the dust generated by friction is not easy to scatter to the external environment. Each of the openings 212 is used for the corresponding connecting piece 434 to extend into the corresponding sliding channel 211 . Each lift cylinder 22 has a cylinder body 221 and a piston block 222 disposed in the corresponding slideway 211 and displaceable up and down relative to the cylinder body 221 . The piston blocks 222 are respectively engaged with the connecting pieces 434 and connected to the corresponding cylinder body 221 , so that the furnace bottom base 432 connected to the connecting pieces 434 can move up and down with the movement of the piston blocks 222 . The guide wheels 23 of each of the lift mechanisms 2 are respectively disposed on the top and bottom of the slideway 211 . Each guide wheel 23 can pivot around the horizontal axis. Each dustproof belt 24 surrounds the corresponding guide pulleys 23 of the lifting mechanism 2, and two opposite ends of the dustproof belt 24 are respectively connected to the top and bottom of the corresponding connecting piece 434. The width of a dustproof belt 24 is slightly larger than the corresponding width of the opening 212 . As shown in FIG. 5 , in this embodiment, the implementation of the guide wheels 23 is that two of the guide wheels 23 are arranged at the bottom of the slideway 211 at a horizontal interval, so that the bottom of the dust-proof belt 24 can run horizontally. Among the guide pulleys 23, the other two guide pulleys 23 are also arranged at the top of the slideway 211 at horizontal intervals, so that the top of the dustproof belt 24 extends laterally around the guide pulleys 23, thereby preventing the dustproof belt 24 from running around the guide pulleys 23. The belt 24 is spaced between the cylinder body 221 and the piston block 222 to avoid friction with the piston block 222 and reduce the generation of dust. Moreover, the upper and lower guide pulleys 23 close to the opening 212 make a part of the dustproof belt 24 adjacent to the opening 212 parallel to the extending direction of the opening 212 and almost approach but not contact the dustproof casing 21 In this way, the opening 212 can be covered and the dust generated by the friction between the dustproof belt 24 and the inner surface of the dustproof casing 21 can be avoided. Of course, the number of the guide wheels 23 can also be two, three, or more than five, and are respectively disposed on the top and bottom of the slideway 211 , which is not limited to a specific implementation.

More specifically, when each of the connecting members 434 moves up and down along with the action of the corresponding piston block 222 , it can drive the corresponding dustproof belt 24 to pivot bidirectionally along a loop path. In this way, when the lifting mechanisms 2 are actuated, since each of the dustproof belts 24 can pivot with the displacement of the corresponding connecting piece 434 , the corresponding openings 212 can be continuously shielded by the corresponding dustproof belts 24 . That is, the only openings 212 of the dustproof casings 21 are closed by the corresponding dustproof belts 24 , so that the dust in the dustproof casings 21 cannot escape to the external environment through the openings 212 .

Referring to FIGS. 1 and 5 , each of the air extraction units 25 is installed at the bottom of the corresponding dust-proof casing 21 and communicates with the inside of the corresponding dust-proof casing 21 and the outside, so that the corresponding dust-proof casing 21 The gas is discharged from the corresponding air extraction unit 25 to the outside from top to bottom, so as to reduce the amount of dust in the dustproof housing 21 .

Referring to FIGS. 1 and 6 , the gas filtering device 3 includes an outer cylinder structure 31 communicating with the exhaust pipe 433 , a condensation structure 32 with high heat transfer characteristics, and a pressure detector (not shown). The outer cylinder structure 31 includes an outer cylinder body 311 and a cylinder cover 312 detachably locked to the outer cylinder body 311 . An exhaust outlet 313 is formed at one end of the outer cylinder 311 away from the cylinder cover 312 . In this embodiment, the outer cylinder 311 is a cylindrical cylinder with openings at the top and bottom. The cylinder cover 312 covers the top of the outer cylinder 311 to close the opening of the top of the outer cylinder 311 . The exhaust outlet 313 is formed at the bottom of the outer cylinder 311 to be away from the top opening of the outer cylinder 311 . However, the shape of the outer cylinder 311 and the embodiment of the opening position of the outer cylinder 311 can be adjusted according to actual needs. The cylinder cover 312 forms an air inlet 314 which communicates with the outer cylinder 311 and a detection port 315 which communicates with the outer cylinder 311 . The intake inlet 314 communicates with the exhaust pipe 433 , so that the gas in the inner furnace unit 46 can flow into the outer cylinder 311 . The detection port 315 is for the pressure detector to be inserted into the outer cylinder 311 from the outside, so as to monitor the pressure of the gas circulating in the outer cylinder 311 .

The condensation structure 32 includes an inner cylinder 321 extending from the inner side of the cylinder cover 312 toward the exhaust outlet 313 , an inflow pipe 322 and an outflow pipe 323 respectively connected to the inner cylinder 321 , and a plurality of pipes connected to the inner cylinder Condensing plates 324 are arranged at intervals along the extending direction of the inner cylinder 321 outside the 321 . More specifically, the inner cylinder 321 and the condensing plates 324 are both accommodated in the outer cylinder 311 for supplying the gas from the inner furnace unit 46 (refer to FIG. 2 ) and the outer wall of the inner cylinder 321 and The condensing plates 324 perform the condensing treatment of the unclean components in the gas by means of heat conduction. In this embodiment, the inner tube 321 and the condensing plates 324 are made of materials with high heat transfer characteristics. Both the inflow pipe 322 and the outflow pipe 323 penetrate through the cylinder cover 312, and guide the thermal fluid to flow into the inner cylinder 321 and the outflow of the thermal fluid from the inner cylinder 321 respectively to conduct the inner cylinder 321 and the condensation The thermal energy of the plate 324 is conducted through the heat transfer fluid. In this embodiment, the inflow pipe 322 extends from the cylinder cover 312 toward the bottom of the inner cylinder 321 . More specifically, the distance from the inflow pipe 322 to the bottom of the inner cylinder 321 is smaller than the distance from the outflow pipe 323 to the bottom of the inner cylinder 321 . In this way, the heat-conducting fluid can directly flow into the bottom of the inner cylinder 321 and flow toward the top of the inner cylinder 321 to ensure that the heat-conducting fluid fully flows through the inner cylinder 321 and increase the heat exchange efficiency of the condensing structure 32 . In addition, the outer diameter of the inner cylinder 321 is larger than the outer diameters of the inflow pipe 322 and the outflow pipe 323 to increase the overall surface area of the condensing structure 32 , thereby improving the heat exchange efficiency of the condensing structure 32 .

Each condensing plate 324 forms a communication hole 325 penetrating two opposite plate surfaces of the condensing plate 324 , and the communication holes 325 of two adjacent condensing plates 324 are offset from each other. In this embodiment, the air inlet 314 and the communication hole 325 of the adjacent condenser plate 324 are symmetrically formed on the cylinder cover 312 and the corresponding condenser plate 324 with the axis of the inner cylinder 321 as the center. In addition, the communicating holes 325 of the adjacent condensing plates 324 are symmetrically formed on the condensing plates 324 with the axis of the inner cylinder 321 as the center, and the number of the communicating holes 325 of each condensing plate 324 is only One, and the gap between the side edges of the condensation plates 324 and the inner surface of the outer cylinder 311 is very small, so that the gas in the outer cylinder 311 can only pass through the communication holes 325 in sequence, and finally outflow from the exhaust outlet 313 . In other words, the gas in the outer cylinder 311 can flow through the outer cylinder 311 along the longest path, so as to increase the heat exchange time between the gas in the outer cylinder 311 and the condensation structure 32 . However, the number of the communication holes 325 of each of the condensing plates 324 is not limited to a specific number, and depends on actual needs. In this embodiment, the diameter of each communication hole 325 is larger than the thickness of each condensation plate 324 . That is to say, the gas in the outer cylinder 311 has passed through the communication holes 325 in sequence without being compressed and cooled by the hole walls of the communication holes 325 , but reaches the communication hole 325 by heat exchange with the condensation structure 32 . Part of the components in the gas in the outer cylinder 311 (mainly the unclean components caused by the volatilization of the coating applied on the object to be heated 9 as shown in FIG. 2 ) are cooled and condensed, so as to realize the purification of the gas.

Referring to FIGS. 1 , 2 and 7 , during the heat treatment process, the furnace bottom base 432 is first separated from the furnace base frame 431 along with the movement of the lifting mechanisms 2 as shown in FIGS. 1 and 7 , and together with The shelf units 5 are lowered together to the bottom of the lifting mechanisms 2 . At this time, the layer frame unit 5 is exposed outside the furnace tube body 41 for the object to be heated 9 to be placed on the layered stages 52 respectively. Then, the furnace bottom base 432 is displaced upward with the action of the lifting mechanisms 2, and is sealed with the furnace bottom frame 431 through the bottom sealing ring 438, so that the shelf unit 5 is accommodated in the inner furnace unit 46 in a confined space. Subsequently, the ceramic electric heating plates of the heating element group 42 are actuated respectively to keep the temperature in the inner furnace unit 46 within the range of the process temperature, and cooperate with the thermocouple elements 48 to sense the shelf unit 5 The temperature of different surrounding areas, and the horizontal jet pipes 61 that drive the hot air intake pipe group 6 respectively spray high-temperature nitrogen gas with different air volumes to the waiting object 9, so as to fine-tune the heating degree of the waiting object 9 to make different The heating degree of the waiting heating object 9 in the area is similar. At the same time, the lower flow channel 436 and the upper flow channel 437 both guide and guide the heat fluid to pass through, so that the heat energy conducted from the inner furnace unit 46 to the outer frame body 435 can be exported, so that the outer frame body 435 can be partially cooled to avoid the The bottom seal ring 438 and the top seal ring 462 are heated and deformed. Finally, when the heating process of the heating furnace 1 is completed, the cold air intake modules 44 and the cold air exhaust module 45 are activated to exchange heat between the temperature in the inner furnace unit 46 and the temperature in the cooling chamber 47 . When the temperature is lowered, the aforementioned actions can be repeated to lower the furnace bottom base 432 to take out the object to be heated 9 .

Referring to FIGS. 1 , 2 and 6 , when the heating furnace 1 heats the object 9 to be heated, the coating applied on the object to be heated 9 will be heated and volatilized to generate volatile gas, then, the heating furnace The volatile gas in 1 is guided by the exhaust pipe 433, passes through the intake inlet 314, the communication holes 325 and the exhaust outlet 313 in sequence, and communicates with the inner cylinder 321, the condensation plates 324 Heat exchange is generated to cool down and condense, and a liquid or colloidal organic substance is formed to remain in the outer cylinder 311 . At the same time, the inflow pipe 322 , the inner cylinder 321 and the outflow pipe 323 can sequentially guide the thermal fluid to pass through, so that the thermal energy of the inner cylinder 321 and the condensing plates 324 can be exported through the heat conduction fluid, so that the condensing structure 32 can be maintained below the temperature of volatile gases. It is worth mentioning that the organic matter remaining in the outer cylinder 311 may be attached to the plate surfaces of the condensation plates 324 and the walls of the communication holes 325 , causing the communication holes 325 to be blocked. At this time, the pressure detector will show that the pressure value in the outer cylinder 311 is too high, so as to prompt the user to separate the cylinder cover 312 from the outer cylinder 311 , so that the condensation structure 32 connected to the cylinder cover 312 is separated. The cylinder cover 312 can be taken out from the outer cylinder body 311 along with the movement of the cylinder cover 312 to facilitate subsequent cleaning of the condensation structure 32 .

To sum up, the high temperature gas is blown laterally between the layered carriers 52 by the air outlet holes 611 of the horizontal jet pipes 61 respectively, thereby controlling the temperature between the layered carriers 52 , so that the heating levels of the objects 9 to be heated placed on the layered stages 52 are similar, so as to ensure that the objects 9 to be heated can be heat treated under the same conditions, thereby achieving the purpose of improving the process yield. In addition, when the air outlet holes 611 are blown laterally and the exhaust pipe 433 is exhausted below the furnace tube body 41, the gas in the furnace tube body 41 can be exhausted from top to bottom to avoid deposition in the furnace tube body 41. The dust under the furnace tube body 41 floats to the layered stages 52 along with the up-and-down air flow and adheres to the surface of the object to be heated 9 , which can also achieve the purpose of improving the process yield. In addition, since the openings of the slideways 211 of the lifting mechanisms 2 are shielded by the dustproof belts 24, the dust in the dustproof casings 21 cannot be scattered into the inner furnace body 461 through the bottom openings 4351, thereby avoiding The amount of dust in the inner furnace body 461 is increased to ensure the cleanliness of the object to be heated 9, so as to achieve the purpose of improving the process yield, so the purpose of the present invention can be achieved.

However, the above are only examples of the present invention, and should not limit the scope of implementation of the present invention. Any simple equivalent changes and modifications made according to the scope of the patent application of the present invention and the contents of the patent specification are still included in the scope of the present invention. within the scope of the invention patent.

1: Heating furnace 2: Lifting mechanism 21: Dust-proof housing 211: Chute 212: Opening 22: Lifting cylinder 221: Cylinder body 222: Piston block 23: Guide wheel 24: Dust belt 25: Exhaust unit 3: Gas filtration device 31: Outer cylinder structure 311: outer cylinder 312: Cylinder cover 313: Exhaust outlet 314: Intake inlet 315: detection port 32: Condensation structure 321: inner cylinder 322: Inflow Pipe 323: Outflow Pipe 324: Condensation plate 325: Connecting hole 4: Furnace tube device 41: Furnace tube body 42: Heating element group 43: Furnace base assembly 431: Outer frame of furnace base 432: Bottom Pedestal 433: exhaust pipe 434: Connector 435: Outer frame body 4351: Bottom opening 4352: Top opening 436: Lower runner 437: Upper runner 438: Bottom sealing ring 44: Cold air intake module 45: Cold air exhaust module 46: Inner furnace unit 461: Inner furnace body 462: Top seal ring 47: Cooling Room 48: Thermocouple Components 5: Shelf unit 51: Frame 52: Layered stage 6: Hot air intake pipe group 61: Lateral jet tube 611: Air vent 62: Front longitudinal jet pipe 63: Rear longitudinal jet pipe 9: Object to be heated

Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, wherein: Fig. 1 is a schematic diagram illustrating an embodiment of the high cleanliness baking equipment of the present invention; 2 is a schematic cross-sectional view illustrating a heating furnace of this embodiment; Fig. 3 is the sectional schematic diagram of another angle of view; Fig. 4 is a partial enlarged view of Fig. 2, illustrating the connection relationship of a furnace base assembly and an inner furnace unit of the heating furnace; 5 is a schematic cross-sectional view from the perspective of FIG. 1, illustrating the connection relationship between the second lifting mechanism of the embodiment and a furnace bottom base of the heating furnace; Figure 6 is a schematic cross-sectional view illustrating the gas filtering device; and FIG. 7 is another state schematic diagram of the high cleanliness baking equipment.

1: Heating furnace

4: Furnace tube device

41: Furnace tube body

42: Heating element group

43: Furnace base assembly

431: Outer frame of furnace base

432: Bottom Pedestal

433: exhaust pipe

434: Connector

435: Outer frame body

4351: Bottom opening

4352: Top opening

436: Lower runner

437: Upper runner

438: Bottom sealing ring

44: Cold air intake module

45: Cold air exhaust module

46: Inner furnace unit

461: Inner furnace body

462: Top seal ring

47: Cooling Room

48: Thermocouple Components

5: Shelf unit

51: Frame

52: Layered stage

6: Hot air intake pipe group

61: Lateral jet tube

611: Air vent

62: Front longitudinal jet pipe

63: Rear longitudinal jet pipe

9: Object to be heated

Claims (9)

A high-cleanliness baking equipment, comprising: a heating furnace, including a furnace tube device, having a furnace tube body, a heating element group disposed inside the furnace tube body and capable of controlled heating, and a furnace tube body located in the furnace The furnace base assembly at the bottom of the tube body, the heating element group has a plurality of ceramic electric heating plates arranged annularly along the furnace tube body, each of the ceramic electric heating plates can be controlled to adjust the temperature respectively, the furnace base assembly has a communication with the The outer frame of the furnace base at the bottom of the furnace tube body and passing through to the outside world, a furnace bottom base detachably sealed to the outer frame of the furnace base, and at least a furnace tube body that runs through the furnace tube body and can be used to discharge gas to the outside world. An exhaust pipe, the outer frame of the furnace base has an outer frame body and a lower flow channel embedded in the outer frame body, the bottom surface of the outer frame body forms a bottom opening, and the furnace bottom base has a surrounding around the outer frame body. A bottom sealing ring around the bottom opening, the bottom sealing ring can be crimped on the bottom surface of the outer frame body to seal the furnace tube device, the lower flow channel is adjacent to the bottom opening and extends along the length direction of the bottom sealing ring, and A heat-conducting fluid is circulated to be used for deriving the heat energy of the outer frame body. A frame unit is installed in the furnace tube device in a removable manner, and has a frame body, and a plurality of frame units are arranged in the frame in a longitudinal direction. The layered carriers are respectively suitable for carrying the objects to be heated, and at least one transverse jet pipe, which is vertically installed in the furnace tube device and adjacent to the layer frame unit, and has several longitudinal The air outlet holes are arranged, the air outlet holes are respectively aligned between the two adjacent layered carriers, and can blow out high-temperature gas laterally, so as to adjust and control the temperature between the layered carriers. Wait for the air outlet to blow air laterally and the exhaust pipe is located on the side of the furnace tube body. The bottom exhaust can make the gas in the furnace tube body flow from top to bottom. A high cleanliness baking equipment, comprising: a heating furnace, including a furnace tube device, with a furnace tube body, a heating element group arranged inside the furnace tube body and capable of controlled heating, a furnace tube located in the furnace tube A furnace base assembly at the bottom of the main body, and several thermoelectric coupling elements, the furnace base assembly has a furnace base outer frame that communicates with the bottom of the furnace tube body and penetrates to the outside world, and a detachable seal outside the furnace base The furnace bottom base of the frame, and the exhaust pipe that at least runs through the furnace tube body and can be used to discharge gas to the outside world, the furnace base outer frame has an outer frame body, and a lower layer embedded in the outer frame body a flow channel, the bottom surface of the outer frame body forms a bottom opening, the furnace bottom base has a bottom sealing ring surrounding the periphery of the bottom opening, the bottom sealing ring can be crimped on the bottom surface of the outer frame body to seal the Furnace tube device, the lower flow channel is adjacent to the bottom opening and extends along the length direction of the bottom sealing ring, and provides for the circulation of heat-conducting fluid, so as to be used for deriving the thermal energy of the outer frame body, a shelf unit, which can be removed from the ground It is arranged in the furnace tube device, and has a frame body and a plurality of layered carriers arranged longitudinally on the frame body. The layered carriers are respectively suitable for carrying the objects to be heated. The thermocouple elements are arranged in a surrounding area for sensing the temperature around the shelf unit, and at least one transverse jet pipe is vertically installed in the furnace tube device and adjacent to the shelf unit, and has several There are vertically arranged air outlet holes, the air outlet holes are respectively aligned between two adjacent layered carriers, and can blow out high-temperature gas laterally, so as to adjust and control the temperature between the layered carriers, wherein, When the air outlets are blown laterally and the exhaust pipe is exhausted below the furnace tube body, the gas in the furnace tube body can flow from top to bottom. The high cleanliness baking equipment according to claim 1 or 2, wherein the heating furnace includes a hot air intake pipe group installed in the furnace tube device, and the hot air intake pipe group has a plurality of upright and A transverse jet pipe disposed circumferentially around the shelf unit. The high-cleanliness baking equipment according to claim 3, wherein the furnace tube device has at least a cold air intake module that runs through the furnace tube body and is used to guide gas to enter, and runs through the furnace tube body and uses A cold air exhaust module for guiding the gas flow to the outside world, and an inner part arranged in the furnace tube body and covered with the layer frame unit and the hot air intake pipe group, and sealed with the outer frame of the furnace base A furnace unit, the space between the inner furnace unit and the furnace tube body forms a cooling chamber, the cooling chamber communicates with the cold air intake module and the cold air exhaust module, wherein the gas can be subjected to the cold air intake module It is guided into the furnace tube body, flows through the cooling chamber and is discharged from the cold air exhaust module, so that the temperature of the inner furnace unit is lowered. The high-cleanliness baking equipment according to claim 4, wherein a top opening opposite to the bottom opening is further formed on the top surface of the outer frame body, the inner furnace unit has an inner furnace body, and at least one setting A top sealing ring between the inner furnace body and the outer frame body, the top sealing ring surrounds the periphery of the top opening to seal the inner furnace body and the outer frame body, and the outer frame of the furnace base also has an inlay an upper-layer flow channel in the outer frame body and above the lower-layer flow channel, the upper-layer flow channel is adjacent to the top opening and extends along the length direction of the top sealing ring, and is used for the circulation of heat-conducting fluid for the outer frame The thermal energy of the body is exported. The high cleanliness baking equipment according to claim 4, wherein the cold air intake module is arranged at the bottom of the furnace tube body, and the cold air exhaust module is arranged at the top of the furnace tube body. The air module and the cold air exhaust module act to make the gas in the cooling chamber flow from bottom to top. The high cleanliness baking equipment according to claim 1 or 2, wherein the furnace base assembly further has two connecting pieces respectively connected to the left and right sides of the furnace bottom base, and the high cleanliness baking equipment further Including two lifting mechanisms, the lifting mechanisms are respectively arranged under the left and right sides of the heating furnace, each lifting mechanism includes a dustproof casing, a lifting cylinder, at least two guide wheels and a dustproof belt, each dustproof casing is formed A longitudinally extending slideway, each lift cylinder has a cylinder body, and a piston block disposed in the corresponding slideway and displaceable up and down relative to the cylinder body, the ends of the piston blocks away from the cylinder body are respectively It is connected with the connecting pieces, so that the furnace bottom base can move up and down with the action of the piston block. The guide wheels of each lifting mechanism are arranged laterally on the top and bottom of the slideway, and each guide wheel can Pivoting with the horizontal axis as the axis, each dustproof belt surrounds the guide wheels of the corresponding lifting mechanism, and the two opposite ends of the dustproof belt are respectively connected to the corresponding connecting pieces, wherein the dustproof belt covers It is located on the periphery of the corresponding piston block, and can be pivoted with the displacement of the connecting piece, so that the opening of the slideway can be shielded by the dustproof belt. The high-cleanliness baking equipment according to claim 7, wherein each lifting mechanism further includes an air extraction unit at least through the bottom of the corresponding dust-proof casing, so that the gas in the dust-proof casing is from top to bottom discharge. The high cleanliness baking equipment according to claim 1 or 2, further comprising a gas filtering device, the gas filtering device comprising an outer cylinder structure communicating with the exhaust pipe, and a condensing device with high heat transfer characteristics structure, the condensing structure is not communicated with the outer cylinder structure, and is used to export the thermal energy in the outer cylinder structure, so that the gas in the outer cylinder structure and the condensing structure produce heat exchange, so that some components in the gas are cooled and condensed .

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